TW201932791A - Light source device and distance measuring sensor provided with same - Google Patents
Light source device and distance measuring sensor provided with same Download PDFInfo
- Publication number
- TW201932791A TW201932791A TW108111806A TW108111806A TW201932791A TW 201932791 A TW201932791 A TW 201932791A TW 108111806 A TW108111806 A TW 108111806A TW 108111806 A TW108111806 A TW 108111806A TW 201932791 A TW201932791 A TW 201932791A
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- light source
- phosphor
- source device
- fluorescent
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V7/00—Reflectors for light sources
- F21V7/22—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C3/00—Measuring distances in line of sight; Optical rangefinders
- G01C3/02—Details
- G01C3/06—Use of electric means to obtain final indication
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Semiconductor Lasers (AREA)
- Projection Apparatus (AREA)
- Measurement Of Optical Distance (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
Description
本發明是有關於一種光源裝置以及具備該裝置的測距感測器。The present invention relates to a light source device and a distance measuring sensor provided therewith.
近年來,使用的是將出射藍色雷射光的光源部、與被照射藍色雷射光而經激發並發出螢光的螢光體組合而成的光源裝置。
例如,專利文獻1中揭示了一種光源裝置,其為了實現光源裝置的小型化及高亮度化,使用由自多個半導體雷射出射並由聚光透鏡聚光的雷射光激發而發出波長各不相同的螢光光的多個螢光體,並以各半導體雷射的發光點與各螢光體經由聚光透鏡而成為彼此共軛關係的方式構成。
[現有技術文獻]
[專利文獻]
[專利文獻1]日本專利特開2013-120735號公報
[專利文獻2]日本專利第5649202號公報
[專利文獻3]日本專利特開2007-148418號公報In recent years, a light source device that combines a light source portion that emits blue laser light and a phosphor that is excited by blue laser light and emits fluorescence is used.
For example, Patent Document 1 discloses a light source device that emits laser light emitted from a plurality of semiconductor lasers and condensed by a condensing lens to emit wavelengths in order to achieve miniaturization and high luminance of the light source device. The plurality of phosphors of the same fluorescent light are configured such that the light-emitting points of the respective semiconductor lasers and the respective phosphors are conjugated to each other via the collecting lens.
[Prior Art Literature]
[Patent Literature]
[Patent Document 1] Japanese Patent Laid-Open Publication No. 2013-120735
[Patent Document 2] Japanese Patent No. 5649202
[Patent Document 3] Japanese Patent Laid-Open Publication No. 2007-148418
然而,所述先前的光源裝置具有如以下所示的問題。
即,所述公報所揭示的光源裝置中,螢光體是混入至樹脂等黏合劑中而形成,因此,當自半導體雷射出射的雷射光照射至螢光體時,雷射光於螢光體的內部發生散射。因此,在沿特定的方向導出螢光的情況下,無法效率良好地導出螢光體中所發出的螢光,難以獲得亮度充分高的光源。
另外,所述專利文獻2中對使用了未使用樹脂等黏合劑的單晶的螢光體的光源裝置進行了記載。但,若對單晶的螢光體僅照射雷射光,則難以獲得經充分高亮度化的光源。
本發明的課題在於提供一種可獲得較先前亮度更高的光源的光源裝置以及具備該裝置的測距感測器。
[解決課題之手段]
第1發明的光源裝置具備照射雷射光的光源部、聚光透鏡、以及透光性螢光體。聚光透鏡對自光源部照射的雷射光進行聚光。透光性螢光體被照射由聚光透鏡聚光的雷射光而發出螢光。
此處,對透光性螢光體照射自光源部照射並由聚光透鏡聚光的雷射光,並使用透光性螢光體中由雷射光所激發的螢光作為光源。
此處,作為所述光源部,例如可使用照射藍色雷射光的半導體雷射(雷射二極體(Laser Diode,LD))等。
作為所述聚光透鏡,只要為具有可對透光性螢光體聚集雷射光的功能者即可,其形狀並無限制。另外,聚光透鏡較佳為以將聚光點設置於透光性螢光體的表面或內部的方式配置。
所述透光性螢光體例如為多面體或球狀等塊狀的螢光體,包括單晶螢光體、透光性陶瓷螢光體等。而且,所謂透光性,是於雷射光所照射的螢光體內部幾乎不存在光的散射的特性(亦包括不存在散射的特性),且是指於螢光體的內部形成聚光點(spot)的程度的散射特性。
藉此,於透光性螢光體中的被照射由聚光透鏡聚光的雷射光的部分,沿雷射光的傳播方向而形成發出由雷射光激發的螢光的螢光光源部,並且藉由透光性螢光體的特性,可幾乎不使雷射光散射地導出所發出的螢光。
其結果,可效率良好地導出形成於透光性螢光體的螢光光源部中發出的螢光,因此可獲得較先前亮度更高的光源。
第2發明的光源裝置如第1發明的光源裝置所述,其中透光性螢光體具有螢光光源部,所述螢光光源部形成於藉由聚光透鏡而雷射光經聚光的部分。
此處,例如於具有長方體形狀的塊狀的透光性螢光體中,在雷射光經聚光的部分形成由雷射光激發而發出螢光的螢光光源部。
此處,所述螢光光源部沿透光性螢光體中的雷射光傳播的方向形成,於雷射光所照射的部分中發光。
藉此,雷射光幾乎不發生散射地照射至透光性螢光體,因此可使螢光光源部的每單位體積中產生的螢光的功率增加。藉此可獲得較先前亮度更高的光源。
第3發明的光源裝置如第2發明的光源裝置所述,其中螢光光源部在自光源部照射的雷射光的傳播方向上具有長的大致筒狀的形狀。
此處,透光性螢光體的內部中的形成於雷射光的照射部分的螢光光源部形成為沿雷射光的傳播方向而形成的大致筒狀。
藉此,可自形成於透光性螢光體的內部的大致筒狀的螢光光源部發出螢光。
第4發明的光源裝置如第1發明至第3發明中任一發明的光源裝置所述,其中雷射光藉由聚光透鏡而被聚光至透光性螢光體的表面或內部。
此處,使雷射光聚光至透光性螢光體的表面或內部。
藉此,於透光性螢光體中,在雷射光經聚光的部分形成被激發而發出螢光的螢光光源部。而且,自透光性螢光體的表面至內部,雷射光幾乎不會發生散射地照射,因此,可效率良好地自所期望的方向導出所發出的螢光。
第5發明的光源裝置如第1發明至第4發明中任一發明的光源裝置所述,其更具備導入用透鏡,所述導入用透鏡對透光性螢光體中所發出的螢光進行聚光。
此處,設置有導入用透鏡,所述導入用透鏡導出透光性螢光體的內部中的雷射光所照射的部分(螢光光源部)中發出的螢光。
藉此,透光性螢光體中發出的螢光自透光性螢光體中的導入用透鏡的方向被導出向外部。
藉此,可獲得較先前亮度更高的光源。
第6發明的光源裝置如第5發明的光源裝置所述,其中導入用透鏡使透鏡中心軸、與通過透光性螢光體的雷射光的雷射傳播的中心軸一致地配置。
此處,導入用透鏡以如下方式配置:使透鏡的中心軸、與透光性螢光體的內部中的沿雷射光傳播的方向而形成的發光部分(螢光光源部)的雷射傳播的中心軸一致。
藉此,使導入用透鏡的中心軸對準形成於透光性螢光體的內部的螢光發光部分(螢光光源部)的中心軸而配置,因此,可效率良好地導出透光性螢光體中發出的螢光。藉此,可獲得較先前亮度更高的光源。
另外,使導入用透鏡的中心軸對準形成於透光性螢光體的內部的螢光發光部分(螢光光源部)的中心軸而配置,因此,可將光源部的下游側所配置的光學系統(聚光透鏡、導入用透鏡)配置於直線上。藉此,可容易地進行光軸調整,並且可使光學系統小型化。
第7發明的光源裝置如第5發明或第6發明的光源裝置所述,其更具備光纖,所述光纖於第1端面處被照射導入用透鏡中所聚光的螢光,並且自與第1端面為相反側的第2端面出射螢光。
此處,於導出透光性螢光體的內部中發出的螢光的導入用透鏡的下游側,配置有將自導入用透鏡入射的螢光自入射側(第1端面)的相反側(第2端面)出射的光纖。
藉此,可於光纖內導入螢光光源部的景深內的光,因此,可自光纖的第1端面導入螢光,且自第2端面出射高亮度的光。
再者,所謂景深,一般而言是指:相對於透鏡的像面中可容許的模糊量,於物面側在對焦位置的前後視作實用上已對焦的範圍。於本發明中是指:當將光纖的端面中的芯徑設為透鏡的像面中的容許散光圈的直徑時,藉由導入用透鏡而形成於物面的景深。
此處,所謂光纖的端面,是指供由導入用透鏡聚光的光入射的光纖的端部中的剖面。另外,所謂芯徑,是指對光纖內的光進行傳輸的圓筒形的芯部分的內徑。
第8發明的光源裝置如第1發明至第7發明中任一發明的光源裝置所述,其中透光性螢光體在供雷射光入射的入射面、及使螢光出射的出射面中的至少一者中具有凸狀的曲面。
此處,將透光性螢光體中的雷射光入射之側及出射之側的至少一面設為凸狀的曲面。
藉此,於將凸狀的曲面設置於入射側的情況下,例如可使設置於聚光透鏡與透光性螢光體之間的凹面鏡等的徑向上的尺寸小型化。
另一方面,於將凸狀的曲面設置於出射側的情況下,可抑制透光性螢光體與空氣的界面中的折射所引起的光的發散,例如可使配置於下游側的導入用透鏡的直徑小型化。
而且,於將凸狀的曲面設置於入射側及出射側兩側的情況下,可獲得所述入射側的效果與出射側的效果兩者。
第9發明的光源裝置如第1發明至第8發明中任一發明的光源裝置所述,其中透光性螢光體為單晶螢光體。
此處,作為透光性螢光體而使用了單晶螢光體。
藉此,與先前的包含樹脂等黏合劑的螢光體相比,由聚光透鏡聚光的雷射光於內部幾乎不發生散射地傳播,因此可效率良好地發出螢光。藉此,可獲得較先前亮度更高的光源。
第10發明的光源裝置如第1發明至第9發明中任一發明的光源裝置所述,其更具備凹面鏡,所述凹面鏡配置於透光性螢光體的入射面側,使自光源部照射的雷射光透射,並且將透光性螢光體中所發出的螢光中的、發出至入射面側的螢光向透光性螢光體側反射。
此處,於透光性螢光體的入射面側、即聚光透鏡與透光性螢光體之間,配置有使雷射光透射並反射螢光的凹面鏡。
此處,所述凹面鏡中可使用二向色反射鏡(dichroic mirror)、或具有使雷射光通過的開口的穿孔反射鏡等。
藉此,可使由聚光透鏡聚光的雷射光透射而照射至透光性螢光體,並且可藉由凹面鏡將透光性螢光體中發出的螢光中的、放射至透光性螢光體的入射面側的螢光向螢光的發光位置方向反射。
其結果,藉由凹面鏡,可效率良好地導出透光性螢光體中發出的螢光,因此可獲得進一步經高亮度化的光源。
第11發明的光源裝置如第1發明至第9發明中任一發明的光源裝置所述,其更具備凹面鏡,所述凹面鏡配置於透光性螢光體的出射面側,將自光源部照射並通過透光性螢光體的雷射光反射,並且使透光性螢光體中所發出的螢光中的、發出至出射面側的螢光透射。
此處,於透光性螢光體的出射面側配置有反射雷射光並使螢光透射的凹面鏡。
此處,所述凹面鏡中可使用二向色反射鏡、或具有使螢光通過的開口的穿孔反射鏡等。
藉此,可使透光性螢光體中發出的螢光透射,並且可藉由凹面鏡將由聚光透鏡聚光並透射過透光性螢光體的雷射光向螢光的發光位置方向反射。
其結果,藉由凹面鏡,將透射過透光性螢光體的雷射光再次向透光性螢光體側反射,藉此可效率良好地導出螢光,因此可獲得進一步經高亮度化的光源。
第12發明的光源裝置如第10發明或第11發明的光源裝置所述,其中凹面鏡具有以由聚光透鏡聚光的雷射光的聚光點為中心的球面或非球面的曲面。
此處,凹面鏡的凹狀的曲面以成為以由聚光透鏡聚光的雷射光的聚光點為中心的球面或非球面的方式形成。
藉此,能夠以藉由聚光至透光性螢光體中的雷射光而激發的螢光的發光部分(螢光光源部)作為中心來配置凹狀的曲面,因此可將螢光或雷射光效率良好地向螢光的發光位置側反射。
第13發明的光源裝置如第10發明至第12發明中任一發明的光源裝置所述,其中凹面鏡為二向色反射鏡。
藉此,於設置於透光性螢光體中的雷射光的入射面側的凹面鏡中,可使雷射光透射,並且可將在透光性螢光體中發光並放射至入射面側的螢光向透光性螢光體中的發光位置方向反射。
或者,於設置於透光性螢光體中的出射面側的凹面鏡中,可使透光性螢光體中發出的螢光透射,並且可將透射過透光性螢光體的雷射光向透光性螢光體中的發光位置方向反射。
其結果,可獲得進一步經高亮度化的光源。
第14發明的測距感測器具備:第1發明至第13發明中任一發明的光源裝置、光接收部、以及測定部。光接收部接收自光源裝置照射的光的反射光。測定部基於光接收部中所接收的光的量,測定距對象物的距離。
此處,使用所述光源裝置構成了測距感測器。
藉此,可使用較先前經高亮度化的光源,因此能夠獲得可提高測定精度、可提高響應速度等效果。
第15發明的測距感測器如第14發明的測距感測器所述,其中光源裝置發出包含多個波長的螢光,且所述測距感測器更具有以進而使螢光通過的方式構成的色像差焦點透鏡。光接收部經由色像差焦點透鏡而接收照射至對象物的螢光的反射光。測定部基於光接收部中的光接收量成為最大的螢光的波長,測定距對象物的距離。
此處,構成了如下的共焦點式的測距感測器:使用色像差焦點透鏡,按照波長(按照顏色)對螢光進行分離,並對各波長的光的峰值進行檢測,藉此測定距對象物的距離。
藉此,如上所述般使用照射較先前經高亮度化的螢光的光源裝置構成了測距感測器,因此可獲得高性能的共焦點式的測距感測器。
[發明的效果]
根據本發明的光源裝置,可獲得較先前亮度更高的光源。However, the prior light source device has problems as shown below.
In other words, in the light source device disclosed in the publication, the phosphor is formed by being mixed into a binder such as a resin. Therefore, when the laser light emitted from the semiconductor laser is irradiated to the phosphor, the laser light is irradiated onto the phosphor. Scattering occurs inside. Therefore, when the fluorescence is emitted in a specific direction, the fluorescence emitted from the phosphor cannot be efficiently derived, and it is difficult to obtain a light source having a sufficiently high luminance.
Further, in Patent Document 2, a light source device using a single crystal phosphor having no binder such as a resin is described. However, when only a single-crystal phosphor is irradiated with laser light, it is difficult to obtain a light source that is sufficiently brightened.
An object of the present invention is to provide a light source device that can obtain a light source having a higher brightness than before, and a distance measuring sensor including the same.
[Means for solving the problem]
The light source device according to the first aspect of the invention includes a light source unit that emits laser light, a collecting lens, and a light transmitting phosphor. The condensing lens condenses the laser light irradiated from the light source unit. The translucent phosphor is irradiated with laser light collected by a collecting lens to emit fluorescence.
Here, the light-transmitting phosphor is irradiated with laser light that is irradiated from the light source unit and collected by the collecting lens, and the fluorescent light excited by the laser light in the light-transmitting phosphor is used as the light source.
Here, as the light source unit, for example, a semiconductor laser (Laser Diode (LD)) that emits blue laser light or the like can be used.
The condensing lens is not particularly limited as long as it has a function of collecting laser light to the light-transmitting phosphor. Further, it is preferable that the condensing lens is disposed such that the condensing point is provided on the surface or inside of the light-transmitting phosphor.
The light-transmitting phosphor is, for example, a block-shaped phosphor such as a polyhedron or a spherical shape, and includes a single crystal phosphor, a translucent ceramic phosphor, and the like. Further, the light transmissivity is such that there is almost no scattering of light inside the phosphor irradiated by the laser light (including the characteristic of no scattering), and it means that a light collecting point is formed inside the phosphor ( Scattering characteristics of the extent of the spot).
Thereby, a portion of the light-transmitting phosphor that is irradiated with the laser light collected by the collecting lens forms a fluorescent light source portion that emits fluorescence excited by the laser light in the direction in which the laser light propagates, and By the characteristics of the light-transmitting phosphor, the emitted fluorescent light can be derived without scattering the laser light.
As a result, the fluorescent light emitted from the fluorescent light source unit formed of the light-transmitting phosphor can be efficiently derived, so that a light source having a higher brightness than the previous one can be obtained.
In the light source device according to the first aspect of the invention, the light-transmitting phosphor has a fluorescent light source unit, and the fluorescent light source unit is formed in a portion where the laser beam is collected by the collecting lens. .
Here, for example, in a bulk translucent phosphor having a rectangular parallelepiped shape, a fluorescent light source portion that is excited by laser light and emits fluorescence is formed in a portion where the laser light is collected.
Here, the fluorescent light source unit is formed along a direction in which the laser light in the light-transmitting phosphor propagates, and emits light in a portion irradiated with the laser light.
Thereby, since the laser light is irradiated to the light-transmitting phosphor with little scattering, the power of the fluorescent light generated per unit volume of the fluorescent light source unit can be increased. Thereby a light source with a higher brightness than before can be obtained.
In the light source device according to the second aspect of the invention, the fluorescent light source unit has a long substantially cylindrical shape in a propagation direction of the laser light irradiated from the light source unit.
Here, the fluorescent light source portion formed in the irradiation portion of the laser light in the inside of the light-transmitting phosphor is formed in a substantially cylindrical shape formed along the propagation direction of the laser light.
Thereby, the fluorescent light can be emitted from the substantially cylindrical fluorescent light source unit formed inside the light-transmitting phosphor.
In the light source device according to any one of the first to third aspects of the invention, the laser light is collected by the condensing lens to the surface or inside of the light-transmitting phosphor.
Here, the laser light is condensed to the surface or inside of the light-transmitting phosphor.
Thereby, in the translucent phosphor, a fluorescent light source portion that is excited to emit fluorescence is formed in a portion where the laser light is collected. Further, since the laser light is hardly scattered from the surface to the inside of the light-transmitting phosphor, the emitted fluorescent light can be efficiently derived from a desired direction.
In the light source device according to any one of the first to fourth aspects of the invention, the light source device of the present invention further includes the introduction lens, and the introduction lens performs the fluorescence emitted from the translucent phosphor. Spotlight.
Here, an introduction lens that guides fluorescence emitted from a portion (fluorescent light source unit) irradiated by the laser light in the inside of the light-transmitting phosphor is provided.
Thereby, the fluorescence emitted from the light-transmitting phosphor is led out to the outside from the direction of the introduction lens in the light-transmitting phosphor.
Thereby, a light source higher than the previous brightness can be obtained.
In the light source device according to the fifth aspect of the invention, the introduction lens is configured such that the lens central axis and the central axis of the laser light propagating through the light-transmitting fluorescent body are aligned.
Here, the introduction lens is disposed such that the central axis of the lens and the light-emitting portion (fluorescent light source portion) formed in the direction in which the laser light propagates in the inside of the light-transmitting phosphor are propagated by laser light. The center axis is consistent.
With this configuration, the central axis of the introduction lens is aligned with the central axis of the fluorescent light-emitting portion (fluorescent light source portion) formed inside the light-transmitting phosphor, so that the light-transmitting fluorescent can be efficiently derived. Fluorescence emitted in the light body. Thereby, a light source higher than the previous brightness can be obtained.
In addition, since the central axis of the introduction lens is arranged in alignment with the central axis of the fluorescent light-emitting portion (fluorescent light source unit) formed inside the light-transmitting phosphor, the downstream side of the light source unit can be disposed. The optical system (concentrating lens, introduction lens) is placed on a straight line. Thereby, the optical axis adjustment can be easily performed, and the optical system can be miniaturized.
According to a light source device of a fifth aspect of the invention, in the light source device of the fifth aspect of the invention, the optical fiber device further includes an optical fiber, wherein the optical fiber is irradiated with the fluorescent light collected by the introduction lens at the first end surface, and The second end surface on the opposite side of the end surface emits fluorescence.
Here, on the downstream side of the lens for introducing the fluorescent light emitted from the inside of the light-transmitting phosphor, the opposite side to the incident side (first end face) of the fluorescent light incident from the introduction lens is disposed. 2 end face) fiber that exits.
Thereby, the light in the depth of field of the fluorescent light source unit can be introduced into the optical fiber. Therefore, the fluorescent light can be introduced from the first end surface of the optical fiber, and the high-intensity light can be emitted from the second end surface.
In addition, the depth of field generally means a range in which the amount of blurring is allowed with respect to the image plane of the lens, and the front and back of the in-focus position on the object surface side are regarded as a range in which the focus is practically focused. In the present invention, when the core diameter in the end surface of the optical fiber is the diameter of the perforated aperture in the image plane of the lens, the depth of field formed on the object surface is formed by the introduction lens.
Here, the end face of the optical fiber refers to a cross section in the end portion of the optical fiber into which the light collected by the introduction lens is incident. In addition, the core diameter refers to the inner diameter of a cylindrical core portion that transmits light in the optical fiber.
The light source device according to any one of the first to seventh aspects of the invention, wherein the light-transmitting phosphor is in an incident surface on which the laser light is incident and an exit surface on which the fluorescent light is emitted. At least one of them has a convex curved surface.
Here, at least one side of the side on which the laser light is incident on the light-transmitting phosphor and the side on which the light is emitted is a convex curved surface.
In this case, when the convex curved surface is provided on the incident side, for example, the size of the concave mirror or the like provided between the condensing lens and the light-transmitting phosphor can be reduced in size in the radial direction.
On the other hand, when the convex curved surface is provided on the emission side, the divergence of light due to the refraction at the interface between the translucent phosphor and the air can be suppressed, and for example, the introduction can be performed on the downstream side. The diameter of the lens is miniaturized.
Further, when the convex curved surface is provided on both sides of the incident side and the outgoing side, both the effect on the incident side and the effect on the exit side can be obtained.
The light source device according to any one of the first to eighth aspects of the invention, wherein the light-transmitting phosphor is a single crystal phosphor.
Here, a single crystal phosphor is used as the translucent phosphor.
As a result, the laser light collected by the collecting lens is less likely to propagate in the inside of the phosphor than the phosphor including the binder such as a resin, so that the fluorescent light can be efficiently emitted. Thereby, a light source higher than the previous brightness can be obtained.
In the light source device according to any one of the first to ninth aspects of the invention, the light source device further includes a concave mirror disposed on the incident surface side of the light-transmitting phosphor to illuminate the light source portion The laser light transmitted through the light-transmitting phosphor and reflected on the incident surface side is reflected toward the light-transmitting phosphor side.
Here, a concave mirror that transmits the laser light and reflects the fluorescent light is disposed on the incident surface side of the light-transmitting phosphor, that is, between the condensing lens and the light-transmitting phosphor.
Here, a dichroic mirror or a perforated mirror having an opening through which laser light passes may be used in the concave mirror.
Thereby, the laser light collected by the condensing lens can be transmitted to the light-transmitting phosphor, and the light emitted from the light-transmitting phosphor can be radiated to the light-transmitting property by the concave mirror. The fluorescent light on the incident surface side of the phosphor is reflected in the direction of the fluorescent light emission position.
As a result, the fluorescent light emitted from the light-transmitting phosphor can be efficiently extracted by the concave mirror, and thus a light source which is further brightened can be obtained.
In the light source device according to any one of the first to ninth aspects of the invention, the light source device further includes a concave mirror that is disposed on the emission surface side of the light-transmitting phosphor and that is irradiated from the light source unit Further, the laser light emitted from the translucent phosphor is reflected by the laser light emitted from the translucent phosphor, and the fluorescent light emitted to the exit surface side is transmitted.
Here, a concave mirror that reflects the laser light and transmits the fluorescent light is disposed on the emission surface side of the light-transmitting phosphor.
Here, a dichroic mirror or a perforated mirror having an opening through which the fluorescent light passes may be used in the concave mirror.
Thereby, the fluorescent light emitted from the light-transmitting phosphor can be transmitted, and the laser light collected by the collecting lens and transmitted through the light-transmitting fluorescent body can be reflected by the concave mirror in the direction of the fluorescent light-emitting position.
As a result, the laser light transmitted through the light-transmitting phosphor is again reflected toward the light-transmitting phosphor by the concave mirror, whereby the fluorescent light can be efficiently extracted, and thus a light source which is further brightened can be obtained. .
A light source device according to a tenth aspect of the invention, wherein the concave mirror has a spherical surface or an aspherical curved surface centering on a light collecting point of the laser light collected by the collecting lens.
Here, the concave curved surface of the concave mirror is formed so as to be a spherical surface or an aspherical surface centering on the condensed point of the laser light collected by the condensing lens.
With this configuration, a concave curved surface can be arranged with the fluorescent light emitting portion (fluorescent light source portion) excited by the laser light condensed into the light-transmitting phosphor as a center, so that fluorescent or thunder can be used. The light emission efficiency is reflected to the side of the light emission position of the fluorescent light.
The light source device according to any one of the tenth to twelfth aspects, wherein the concave mirror is a dichroic mirror.
In the concave mirror provided on the incident surface side of the laser light provided in the light-transmitting phosphor, the laser light can be transmitted, and the light-emitting phosphor can be emitted and emitted to the incident surface side. The light is reflected toward the light-emitting position in the light-transmitting phosphor.
Alternatively, in the concave mirror provided on the exit surface side of the light-transmitting phosphor, the fluorescent light emitted from the light-transmitting phosphor can be transmitted, and the laser light transmitted through the light-transmitting phosphor can be directed toward The light-emitting position direction of the light-transmitting phosphor is reflected.
As a result, a light source that is further brightened can be obtained.
The distance measuring sensor according to a fourteenth aspect of the invention, comprising the light source device, the light receiving unit, and the measuring unit. The light receiving unit receives the reflected light of the light irradiated from the light source device. The measuring unit measures the distance from the object based on the amount of light received by the light receiving unit.
Here, the distance sensor is constructed using the light source device.
Thereby, a light source which is higher in brightness than before can be used, and therefore an effect of improving measurement accuracy and improving response speed can be obtained.
The ranging sensor of the 15th invention is the distance measuring sensor of the 14th invention, wherein the light source device emits fluorescence including a plurality of wavelengths, and the distance measuring sensor further has a fluorescent light to thereby pass The way the chromatic aberration focus lens is constructed. The light receiving unit receives the reflected light of the fluorescent light that is irradiated onto the object via the chromatic aberration focus lens. The measuring unit measures the distance from the object based on the wavelength of the fluorescent light whose maximum light receiving amount in the light receiving unit is the maximum.
Here, a confocal type ranging sensor is constructed in which a chromatic aberration focus lens is used to separate fluorescence according to a wavelength (by color), and a peak of light of each wavelength is detected, thereby measuring The distance from the object.
Thereby, as described above, the distance measuring sensor is constructed using a light source device that illuminates the fluorescent light that has been previously brightened, so that a high-performance confocal type ranging sensor can be obtained.
[Effects of the Invention]
According to the light source device of the present invention, a light source having a higher brightness than the previous one can be obtained.
(實施方式1)
使用圖1~圖4,如以下般對本發明的一實施方式的光源裝置10以及具備該光源裝置10的共焦點測量裝置(測距感測器)50進行說明。
(共焦點測量裝置50)
如圖1所示,搭載有本實施方式的光源裝置10的共焦點測量裝置50為利用共焦點光學系統對測量對象物T的位移進行測量的測量裝置。藉由共焦點測量裝置50進行測量的測量對象物T中例如存在有液晶顯示面板的單元間隙等。
如圖1所示,共焦點測量裝置50具備:頭部51,具有共焦點的光學系統;控制器部53,經由光纖52而光學性地連接;監視器54,顯示自控制器部53輸出的訊號。
頭部51於筒狀的框體部內具有繞射透鏡(色像差焦點透鏡)51a、配置於較繞射透鏡51a更靠測量對象物T側的物鏡51b、以及設置於光纖52與繞射透鏡51a之間的聚光透鏡51c。
繞射透鏡51a使自後述的出射多個波長的光的光源(例如,白色光源)出射的光中沿光軸方向產生色像差。繞射透鏡51a於透鏡的表面週期性地形成有例如開諾全息(Kinoform)形狀或二元(binary)形狀(台階形狀、階梯形狀)等微細的起伏形狀。再者,繞射透鏡51a的形狀並不限定於所述構成。
物鏡51b將於繞射透鏡51a中產生了色像差的光聚光至測量對象物T。
聚光透鏡51c設置於光纖52與繞射透鏡51a之間,以使光纖52的數值孔徑與繞射透鏡51a的數值孔徑一致。
其原因在於:自白色光源出射的光經由光纖52而被引導至頭部51中,為了藉由繞射透鏡51a有效地利用自光纖52出射的光,需要使光纖52的數值孔徑(NA:numerical aperture)與繞射透鏡51a的數值孔徑一致。
光纖52為自頭部51至控制器部53的光路,並且亦作為針孔(pinhole)發揮功能。即,經物鏡51b聚光的光中,於測量對象物T處聚焦的光於光纖52的開口部處聚焦。因此,光纖52作為將不於測量對象物T處聚焦的波長的光遮擋,且使於測量對象物T處聚焦的光通過的針孔發揮功能。
共焦點測量裝置50亦可為於自頭部51至控制器部53的光路中不使用光纖52的構成,但藉由於所述光路中使用光纖52,可使頭部51相對於控制器部53可撓性地移動。另外,共焦點測量裝置50在為自頭部51至控制器部53的光路中不使用光纖52的構成的情況下,需要具備針孔,但在為使用光纖52的構成的情況下,共焦點測量裝置50無需具備針孔。
控制器部53於內部搭載有作為白色光源的光源裝置10、分支光纖56、分光器57、攝像元件(光接收部)58、控制電路部(測定部)59。再者,關於光源裝置10的詳細構成,將於之後的段落中進行詳述。
分支光纖56在與形成自頭部51至控制器部53的光路的光纖52的連接側具有一根光纖55a,且在該連接側的相反側具有兩根光纖15、光纖55b。再者,光纖15構成後述的光源裝置10的一部分。光纖55b連接於分光器57,以自端面導入由分光器57聚光的光。
因此,分支光纖56將自光源裝置10出射的光引導至光纖52,並自頭部51對測量對象物T進行照射。進而,分支光纖56經由光纖52及頭部51而將測量對象物T的表面反射的光引導向分光器57。
分光器57具有:凹面反射鏡57a,對經由頭部51而返回的反射光進行反射;繞射光柵57b,供經凹面反射鏡57a反射的光入射;以及聚光透鏡57c,對自繞射光柵57b出射的光進行聚光。再者,分光器57只要可對經由頭部51而返回的反射光按照波長進行區分,則可為車爾尼-特納(Czerny-Turner)型、利特羅(Littrow)型等任意的構成。
攝像元件58為對自分光器57出射的光的強度進行測定的線路互補金屬氧化物半導體(Complementary Metal Oxide Semiconductor,CMOS)或電荷耦合元件(Charge Coupled Device,CCD)。此處,於共焦點測量裝置50中,藉由分光器57及攝像元件58構成測定部,所述測定部對經由頭部51而返回的反射光的強度按照波長進行測定。
再者,測定部只要可對自頭部51返回的光的強度按照波長進行測定即可,可藉由CCD等攝像元件58的單體而構成。另外,攝像元件58亦可為二維的CMOS或二維的CCD。
控制電路部59對光源裝置10或攝像元件58等的動作進行控制。另外,雖未圖示,但控制電路部59具有輸入接口、輸出接口等,所述輸入接口輸入用以對光源裝置10或攝像元件58等的動作進行調整的訊號,所述輸出接口輸出攝像元件58的訊號。
監視器54顯示攝像元件58所輸出的訊號。例如,監視器54描繪自頭部51返回的光的光譜波形,並顯示測量對象物的位移。
於本實施方式的共焦點測量裝置50中,藉由搭載有以下的光源裝置10,可獲得高亮度的光源。
藉此,作為測量裝置,能夠獲得可延長測定距離、可提高響應性等效果。
再者,關於光源裝置10的構成,於以下進行詳細說明。
(光源裝置10)
本實施方式的光源裝置10作為所述共焦點測量裝置50的光源而搭載,如圖2所示,具備光源部11、聚光透鏡12、透光性螢光體13、導入用透鏡14、以及光纖15。
光源部11例如為出射峰值波長為450 nm左右的雷射光的半導體雷射,且向聚光透鏡12的方向照射雷射光來作為用以使透光性螢光體13中發出螢光的激發光。
聚光透鏡12為入射面及出射面均為凸狀的透鏡,且將自光源部照射的雷射光聚光至透光性螢光體13的內部。
透光性螢光體13例如為摻雜有Ce離子的釔鋁石榴石(yttrium aluminum garnet,YAG)的單晶螢光體,且具有分別沿垂直於雷射傳播方向的面配置的入射面13a以及出射面13b。而且,透光性螢光體13於自光源部11照射並由聚光透鏡12聚光的雷射光所照射的部分中,發出具有480 nm~750 nm的範圍的波長的螢光。
而且,如圖3所示,於透光性螢光體13中,在雷射光所照射的部分,沿雷射光的傳播方向而形成長的大致筒狀的螢光光源部20。
螢光光源部20形成於雷射光在透光性螢光體13的內部通過的部分,如圖3及圖4所示,在雷射傳播方向上具有長的大致筒狀的形狀。
而且,螢光光源部20於各部中朝向所有方位發出螢光,因此可視作形成於透光性螢光體13的內部的光源。具體而言,如圖4所示,螢光光源部20於沿著雷射光的傳播方向的長邊方向中的中央部分具有剖面圓的半徑變小的徑縮小部,從而具有朝向兩端而剖面圓的半徑變大的大致圓筒狀的形狀。
即,螢光光源部20以雷射光的聚光點位於徑縮小部剖面20b的方式形成。而且,螢光光源部20形成為:與雷射光的會聚及擴散對應地,入射側剖面20a及出射側剖面20c的剖面積變得大於徑縮小部剖面20b。
例如,螢光光源部20於雷射光的入射側的端面(入射側剖面20a)、大致筒狀的中央部分的徑縮小部(徑縮小部剖面20b)、雷射光的出射側的端面(出射側剖面20c)中,分別朝向所有方位發出螢光。
藉此,於螢光光源部20發出的螢光中,於景深內發出的螢光藉由導入用透鏡14而被導入,並聚光至光纖15的端面(第1面)。
再者,所謂景深,一般而言是指相對於透鏡的像面中可容許的模糊量,於物面側在對焦位置的前後視作實用上已對焦的範圍。於本實施方式中是指:當將光纖15的端面中的芯徑設為透鏡的像面中的容許散光圈的直徑時,藉由導入用透鏡14而形成於物面的景深。
此處,所謂光纖15的端面,是指供由導入用透鏡14聚光的光入射的光纖15的端部中的剖面。另外,所謂芯徑,是指對光纖15內的光進行傳輸的圓筒形的芯部分的內徑。
與聚光透鏡12同樣地,導入用透鏡14為入射面及出射面均為凸狀的透鏡,且於透光性螢光體13中配置於雷射光傳播方向中的下游側。而且,導入用透鏡14將於透光性螢光體13的內部(螢光光源部20)發出的螢光聚光至光纖15的端面。
另外,如圖3所示,導入用透鏡14以透鏡中心軸A2與透光性螢光體13的內部中的雷射光傳播的中心軸A1成為同軸(同一直線上)的方式配置。如此般,藉由以雷射傳播的中心軸A1與導入用透鏡14的透鏡中心軸A2成為同軸的方式配置,可使螢光光源部20中發出的螢光效率良好地自第1面15a向光纖15內入射。
光纖15為構成所述共焦點測量裝置50的分支光纖56的一根光纖,且於內部形成自共焦點測量裝置50的頭部51照射的光的光路。
另外,如圖3所示,光纖15具有供由導入用透鏡14聚光的螢光入射的端面(第1面15a)、以及所述端面相反側的出射側的端面(第2面15b)。
藉此,光纖15可使自第1面15a入射的光自第2面15b出射。
於本實施方式的光源裝置10中,藉由如上所述的構成,如圖2所示,將自光源部11照射的激發用的雷射光藉由聚光透鏡12而聚光至透光性螢光體13的內部。而且,如圖3所示,藉由導入用透鏡14,將透光性螢光體13的內部中的雷射光的聚光部分所產生的螢光聚光至光纖15的第1面15a。
此處,於本實施方式的光源裝置10中,如上所述般對單晶的螢光體(透光性螢光體13)的內部照射由聚光透鏡12聚光的雷射光。
此時,雷射光若入射至單晶的螢光體(透光性螢光體13),則於螢光體內,光幾乎不會發生擴散地一邊激發螢光一邊透射螢光體內部。
即,於本實施方式的光源裝置10中,使用的是幾乎不使入射至內部的雷射光散射的單晶螢光體(透光性螢光體)。因此,與先前的使用樹脂等黏合劑而加固的螢光體相比,可效率良好地導出藉由入射至內部的雷射光而發出的螢光,因此,可獲得較先前亮度更高的光源。
(實施方式2)
使用圖5至圖7,如以下般對本發明的實施方式2的光源裝置進行說明。
本實施方式的光源裝置110與所述實施方式1的不同之處在於:如圖5所示,於聚光透鏡12與透光性螢光體13之間設置有凹面鏡116。
再者,關於光源裝置110的其他構成,因與所述實施方式1的光源裝置10相同,故此處標注相同的符號,並省略關於其構成的詳細說明。
如圖5所示,本實施方式的光源裝置110具備:光源部11、聚光透鏡12、凹面鏡116、透光性螢光體13、導入用透鏡14、以及光纖15。
凹面鏡116配置於聚光透鏡12與透光性螢光體13之間,於透光性螢光體13側的面具有凹狀的反射面。而且,凹面鏡116具有使由聚光透鏡12聚光的雷射光透射,並且將透光性螢光體13的內部中發出的螢光反射的特性。
藉此,可將自光源部11照射並由聚光透鏡12聚光的雷射光照射向透光性螢光體13而不會被凹面鏡116遮擋。進而,如圖6所示,可藉由凹面鏡116,將自形成於透光性螢光體13的內部的螢光光源部120朝向所有方位放射的螢光中的、放射至聚光透鏡12側的螢光反射而返回至透光性螢光體13側。
其結果,於導入用透鏡14中,可導入較所述實施方式1中所導入的螢光更多的螢光並向光纖15的第1面15a聚光,因此可獲得較先前進一步經高亮度化的光源。
進而,凹面鏡116以凹狀的曲面的中心出現於螢光光源部120的中心軸A1的方式配置。
藉此,可使所反射的螢光向發出螢光的部分(螢光光源部120)的位置聚光。
其結果,於導入用透鏡14中,可導入較所述實施方式1中所導入的螢光更多的螢光並向光纖15的第1面15a聚光,因此可獲得更有效地經高亮度化的光源。
另外,凹面鏡116更佳為具有以由聚光透鏡12聚光至透光性螢光體13內的雷射光的聚光點為中心的球面或非球面的形狀。
藉此,可使所反射的螢光向發出螢光的部分(螢光光源部120)聚光。
其結果,於導入用透鏡14中,可導入較所述實施方式1中所導入的螢光更多的螢光並向光纖15的第1面15a聚光,因此可獲得更有效地經高亮度化的光源。
再者,作為凹面鏡116,可使用二向色反射鏡、或者於彎月形透鏡的凹面中蒸鍍反射螢光的反射膜而成的透鏡、於使雷射光通過的部分中具有開口且於凹狀的面中使螢光反射的穿孔反射鏡等。
例如,於使用二向色反射鏡作為凹面鏡116的情況下,如圖7所示,藉由使約480 nm以下的波長的光透射,並且使大於約480 nm的波長的光反射,可在使雷射光透射的同時使螢光反射。
(實施方式3)
使用圖8及圖9,如以下般對本發明的實施方式3的光源裝置進行說明。
本實施方式的光源裝置210與使用板狀的透光性螢光體13的所述實施方式1的不同之處在於:如圖8所示,使用出射面213b側為凸狀的透光性螢光體213。
再者,關於光源裝置210的其他構成,因與所述實施方式1的光源裝置10相同,故此處標注相同的符號,並省略關於其構成的詳細說明。
如圖8所示,本實施方式的光源裝置210具備光源部11、聚光透鏡12、透光性螢光體213、導入用透鏡14、以及光纖15。
如圖9所示,透光性螢光體213具有入射面213a以及出射面213b。另外,於透光性螢光體213中,在由聚光透鏡12聚光的雷射光通過的部分形成發出螢光的螢光光源部220。
再者,關於螢光光源部220,具有與所述實施方式1的螢光光源部20大致相同的形狀及功能。
入射面213a為聚光透鏡12側的面,且沿垂直於雷射光的傳播方向的平面而配置。
出射面213b為導入用透鏡14側的面,且具有朝向導入用透鏡14而為凸狀的曲面。
藉此,由照射至透光性螢光體213的雷射光激發的螢光於出射面213b中,因透光性螢光體213(YAG折射率≒1.8)與空氣的界面中的折射率差而發生的發散得到抑制,從而被導入至導入用透鏡14。
其結果,可減小導入用透鏡14的尺寸而實現光源裝置210的小型化。
或者,即便於將導入用透鏡14的尺寸固定的情況下,因出射的螢光的擴散程度得到抑制,故亦可提高導入螢光的量。
藉此,可獲得更有效地經高亮度化的光源。
(實施方式4)
使用圖10及圖11,如以下般對本發明的實施方式4的光源裝置進行說明。
本實施方式的光源裝置310與所述實施方式1的不同之處在於:如圖10所示,於聚光透鏡12與透光性螢光體313之間設置凹面鏡316,並且設置有入射面及出射面兩者具有凸狀的曲面的透光性螢光體313。
再者,關於光源裝置310的其他構成,因與所述實施方式1的光源裝置10相同,故此處標注相同的符號,並省略關於其構成的詳細說明。
如圖10所示,本實施方式的光源裝置310具備:光源部11、聚光透鏡12、凹面鏡316、透光性螢光體313、導入用透鏡14、以及光纖15。
凹面鏡316配置於聚光透鏡12與透光性螢光體313之間,於透光性螢光體313側的面具有凹狀的反射面。而且,凹面鏡316具有使由聚光透鏡12聚光的雷射光透射,並且如圖11所示將透光性螢光體313的內部中發出的螢光反射的特性。
藉此,可將自光源部11照射並由聚光透鏡12聚光的雷射光照射向透光性螢光體313而不會被凹面鏡316遮擋。進而,如圖11所示,可藉由凹面鏡316,將自形成於透光性螢光體313的內部的螢光光源部320朝向所有方位放射的螢光中的、放射至聚光透鏡12側的螢光反射而返回至透光性螢光體313側。
其結果,於導入用透鏡14中,可導入較所述實施方式1中所導入的螢光更多的螢光並向光纖15的第1面15a聚光,因此可獲得較先前進一步經高亮度化的光源。
進而,如圖11所示,凹面鏡316以凹狀的曲面的中心出現於螢光光源部320的中心軸A1的方式配置。
藉此,可使所反射的螢光向發出螢光的部分(螢光光源部320)的位置聚光。
其結果,於導入用透鏡14中,可導入較所述實施方式1中所導入的螢光更多的螢光並向光纖15的第1面15a聚光,因此可獲得更有效地經高亮度化的光源。
另外,凹面鏡316更佳為具有以由聚光透鏡12聚光至透光性螢光體313內的雷射光的聚光點為中心的球面或非球面的形狀。
藉此,可使所反射的螢光向發出螢光的部分(螢光光源部320)聚光。
其結果,於導入用透鏡14中,可導入較所述實施方式1中所導入的螢光更多的螢光並向光纖15的第1面15a聚光,因此可獲得更有效地經高亮度化的光源。
再者,作為凹面鏡316,與所述實施方式2的凹面鏡116同樣地,可使用二向色反射鏡、或者於彎月形透鏡的凹面中蒸鍍反射螢光的反射膜而成的透鏡、於使雷射光通過的部分中具有開口且於凹狀的面中使螢光反射的穿孔反射鏡等。
如圖11所示,透光性螢光體313具有入射面313a以及出射面313b。
入射面313a為聚光透鏡12側的面,且具有朝向聚光透鏡12而為凸狀的曲面。
藉此,由照射至透光性螢光體313的雷射光激發的螢光於入射面313a中,因透光性螢光體313(YAG折射率≒1.8)與空氣的界面中的折射率差而發生的發散得到抑制,從而被導入至凹面鏡316。
其結果,可減小凹面鏡316的尺寸而實現光源裝置310的小型化。
或者,即便於將凹面鏡316的尺寸固定的情況下,因出射的螢光的擴散程度得到抑制,故亦可提高凹面鏡316中反射螢光的量。
藉此,可更有效地藉由凹面鏡316反射螢光而獲得經高亮度化的光源。
另一方面,出射面313b為導入用透鏡14側的面,且具有朝向導入用透鏡14而為凸狀的曲面。
藉此,由照射至透光性螢光體313的雷射光激發的螢光於出射面313b中,因透光性螢光體313(YAG折射率≒1.8)與空氣的界面中的折射率差而發生的擴散得到抑制,從而被導入至導入用透鏡14。
其結果,可減小導入用透鏡14的尺寸而實現光源裝置310的小型化。
或者,即便於將導入用透鏡14的尺寸固定的情況下,因出射的螢光的擴散程度得到抑制,故亦可提高導入螢光的量。
藉此,可獲得更有效地經高亮度化的光源。
(實施方式5)
使用圖12及圖13,如以下般對本發明的實施方式5的光源裝置進行說明。
本實施方式的光源裝置410與所述實施方式1的不同之處在於:如圖12所示,於聚光透鏡12與透光性螢光體413之間設置凹面鏡416,並且設置有入射面具有凸狀的曲面的透光性螢光體413。
再者,關於光源裝置410的其他構成,因與所述實施方式1的光源裝置10相同,故此處標注相同的符號,並省略關於其構成的詳細說明。
如圖12所示,本實施方式的光源裝置410具備:光源部11、聚光透鏡12、凹面鏡416、透光性螢光體413、導入用透鏡14、以及光纖15。
凹面鏡416配置於聚光透鏡12與透光性螢光體413之間,於透光性螢光體413側的面具有凹狀的反射面。而且,凹面鏡416具有使由聚光透鏡12聚光的雷射光透射,並且如圖13所示將透光性螢光體413的內部中發出的螢光反射的特性。
藉此,可將自光源部11照射並由聚光透鏡12聚光的雷射光照射向透光性螢光體413而不會被凹面鏡416遮擋。進而,如圖13所示,可藉由凹面鏡416,將自形成於透光性螢光體413的內部的螢光光源部420朝向所有方位放射的螢光中的、放射至聚光透鏡12側的螢光反射而返回至透光性螢光體413側。
其結果,於導入用透鏡14中,可導入較所述實施方式1中所導入的螢光更多的螢光並向光纖15的第1面15a聚光,因此可獲得較先前進一步經高亮度化的光源。
進而,如圖13所示,凹面鏡416以凹狀的曲面的中心出現於螢光光源部420的中心軸A1的方式配置。
藉此,可使所反射的螢光向發出螢光的部分(螢光光源部420)的位置聚光。
其結果,於導入用透鏡14中,可導入較所述實施方式1中所導入的螢光更多的螢光並向光纖15的第1面15a聚光,因此可獲得更有效地經高亮度化的光源。
另外,凹面鏡416更佳為具有以由聚光透鏡12聚光至透光性螢光體413內的雷射光的聚光點為中心的球面或非球面的形狀。
藉此,可使所反射的螢光向發出螢光的部分(螢光光源部420)聚光。
其結果,於導入用透鏡14中,可導入較所述實施方式1中所導入的螢光更多的螢光並向光纖15的第1面15a聚光,因此可獲得更有效地經高亮度化的光源。
再者,作為凹面鏡416,與所述實施方式2的凹面鏡116同樣地,可使用二向色反射鏡、或者於彎月形透鏡的凹面中蒸鍍反射螢光的反射膜而成的透鏡、於使雷射光通過的部分中具有開口且於凹狀的面中使螢光反射的穿孔反射鏡等。
如圖13所示,透光性螢光體413具有入射面413a以及出射面413b。
入射面413a為聚光透鏡12側的面,且具有朝向聚光透鏡12而為凸狀的曲面。
出射面413b為導入用透鏡14側的面,且沿垂直於雷射光的傳播方向的平面而配置。
藉此,由照射至透光性螢光體413的雷射光激發而朝向所有方位放射的螢光於入射面413a中,因透光性螢光體413(YAG折射率≒1.8)與空氣的界面中的折射率差而發生的發散得到抑制,從而被導入至凹面鏡416。
其結果,可減小凹面鏡416的尺寸而實現光源裝置410的小型化。
或者,即便於將凹面鏡416的尺寸固定的情況下,因出射的螢光的擴散程度得到抑制,故亦可提高凹面鏡416中反射螢光的量。
藉此,可更有效地藉由凹面鏡416反射螢光而獲得經高亮度化的光源。
(實施方式6)
使用圖14至圖16,如以下般對本發明的實施方式6的光源裝置進行說明。
本實施方式的光源裝置510與所述實施方式1的不同之處在於:如圖14所示,於透光性螢光體13與導入用透鏡14之間設置有凹面鏡516。
再者,關於光源裝置510的其他構成,因與所述實施方式1的光源裝置10相同,故此處標注相同的符號,並省略關於其構成的詳細說明。
如圖14所示,本實施方式的光源裝置510具備:光源部11、聚光透鏡12、透光性螢光體13、凹面鏡516、導入用透鏡14、以及光纖15。
凹面鏡516配置於透光性螢光體13與導入用透鏡14之間,於透光性螢光體13側的入射面具有凹狀的反射面。而且,凹面鏡516具有使透光性螢光體13中所激發的螢光透射,並且將透射過透光性螢光體13的雷射光反射的特性。
藉此,可將自形成於透光性螢光體13的內部的螢光光源部120朝向所有方位放射的螢光中放射至導入用透鏡14側的螢光導入至導入用透鏡14中而不會被凹面鏡516遮擋。
進而,如圖15所示,可藉由凹面鏡516將透光性螢光體13中未被吸收而透射的雷射光反射並返回至透光性螢光體13側。
其結果,於透光性螢光體13中,可導入較所述實施方式1中所照射的雷射光更多的激發光以激發螢光,因此可獲得較先前進一步經高亮度化的光源。
進而,如圖15所示,凹面鏡516以凹狀的曲面的中心出現於螢光光源部520的中心軸A1的方式配置。
藉此,可使所反射的雷射光再次向發出螢光的部分(螢光光源部520)的位置聚光。
其結果,於透光性螢光體13中,可導入較所述實施方式1中所照射的雷射光更多的激發光以激發螢光,因此可獲得較先前進一步經高亮度化的光源。
另外,凹面鏡516更佳為具有以由聚光透鏡12聚光至透光性螢光體13內的雷射光的聚光點為中心的球面或非球面的形狀。
藉此,可使所反射的雷射光再次向發出螢光的部分(螢光光源部520)聚光。
其結果,於導入用透鏡14中,可導入較所述實施方式1中所導入的螢光更多的螢光並向光纖15的第1面15a聚光,因此可獲得更有效地經高亮度化的光源。
再者,作為凹面鏡516,可使用二向色反射鏡、或者於彎月形透鏡的凹面中蒸鍍反射雷射光的反射膜而成的透鏡等。
例如,於使用二向色反射鏡作為凹面鏡516的情況下,如圖16所示,藉由使約480 nm以下的波長的光反射,並且使大於約480 nm的波長的光透射,可在使螢光透射的同時使雷射光反射。
[其他實施方式]
以上對本發明的一實施方式進行了說明,但本發明並不限定於所述實施方式,可在不脫離發明的主旨的範圍內進行各種變更。
(A)
於所述實施方式4等中,以如下的光源裝置為例進行了說明:所述光源裝置使用了於入射面及出射面側的至少一者中具有凸狀的曲面的透光性螢光體。但,本發明並不限定於此。
例如,如圖17(a)及圖17(b)所示,亦可使用如下的透光性螢光體613:所述透光性螢光體613具備入射面613a以及出射面613b,所述入射面613a僅於雷射光通過的部分具有凸狀的曲面部613aa,所述出射面613b僅於螢光通過的部分具有凸狀的曲面部613ba。
(B)
於所述實施方式中,列舉聚光透鏡以使雷射光聚光至透光性螢光體的內部的方式配置的例子進行了說明。但,本發明並不限定於此。
例如,聚光透鏡亦可以使雷射光聚光至透光性螢光體的表面的方式配置。
於該情況下,藉由自透光性螢光體的表面的聚光點至內部形成大致筒狀的螢光光源部,亦可獲得與所述實施方式相同的效果。
再者,若考慮於雷射光的傳播方向上以聚光點為中心而在前後形成螢光光源部,則較佳為藉由聚光透鏡對雷射光進行聚光的透光性螢光體中的位置較透光性螢光體的表面更靠內部。
(C)
於所述實施方式中,列舉使用單晶的螢光體作為搭載於光源裝置10的透光性螢光體的例子進行了說明。但,本發明並不限定於此。
例如,亦可代替單晶的螢光體而使用透光性陶瓷的螢光體。
(D)
於所述實施方式中,以作為構成而具備導入用透鏡及光纖的光源裝置10等為例進行了說明。但,本發明並不限定於此。
例如,亦可將不具有導入用透鏡或光纖的構成設為本發明的光源裝置。
(E)
於所述實施方式中,列舉對共焦點測量裝置(測距感測器)50的光源裝置10應用本發明的例子進行了說明。但,本發明並不限定於此。
例如,作為搭載本發明的光源裝置的測距感測器,並不限於共焦點測量裝置等測距感測器,亦可使用其他測距感測器。
另外,作為光源裝置,亦可將本發明應用作頭燈(headlight)、內窺鏡的光源裝置。
[產業上之可利用性](Embodiment 1)
A light source device 10 according to an embodiment of the present invention and a confocal measurement device (ranging sensor) 50 including the light source device 10 will be described below with reference to FIGS. 1 to 4 .
(Co-focus measuring device 50)
As shown in FIG. 1 , the confocal measurement device 50 on which the light source device 10 of the present embodiment is mounted is a measurement device that measures the displacement of the measurement target T by the confocal optical system. For example, a cell gap or the like of the liquid crystal display panel exists in the measurement target T measured by the confocal measurement device 50.
As shown in FIG. 1, the confocal measurement device 50 includes a head portion 51 having an optical system of a confocal point, a controller unit 53 optically connected via an optical fiber 52, and a monitor 54 displaying the output from the controller unit 53. Signal.
The head portion 51 has a diffraction lens (chromatic aberration focus lens) 51a in the cylindrical frame portion, an objective lens 51b disposed on the measurement object T side of the diffraction lens 51a, and an optical fiber 52 and a diffraction lens. Condenser lens 51c between 51a.
The diffractive lens 51a generates chromatic aberration in the optical axis direction from light emitted from a light source (for example, a white light source) that emits light of a plurality of wavelengths, which will be described later. The diffraction lens 51a is periodically formed with a fine undulating shape such as a Kinoform shape or a binary shape (step shape, step shape) on the surface of the lens. Further, the shape of the diffractive lens 51a is not limited to the above configuration.
The objective lens 51b condenses light having chromatic aberration generated in the diffraction lens 51a to the measurement object T.
The condenser lens 51c is disposed between the optical fiber 52 and the diffractive lens 51a such that the numerical aperture of the optical fiber 52 coincides with the numerical aperture of the diffractive lens 51a.
The reason for this is that light emitted from the white light source is guided to the head portion 51 via the optical fiber 52, and in order to effectively utilize the light emitted from the optical fiber 52 by the diffraction lens 51a, it is necessary to make the numerical aperture of the optical fiber 52 (NA: numerical) The aperture) coincides with the numerical aperture of the diffractive lens 51a.
The optical fiber 52 is an optical path from the head 51 to the controller portion 53, and also functions as a pinhole. In other words, among the light collected by the objective lens 51b, the light focused at the measuring object T is focused at the opening of the optical fiber 52. Therefore, the optical fiber 52 functions as a pinhole that blocks light that is not focused at the measurement target T and that passes light that is focused at the measurement object T.
The confocal measurement device 50 may be configured such that the optical fiber 52 is not used in the optical path from the head 51 to the controller portion 53. However, since the optical fiber 52 is used in the optical path, the head portion 51 can be made relative to the controller portion 53. Flexible to move. In addition, when the configuration in which the optical fiber 52 is not used in the optical path from the head 51 to the controller unit 53 is required, the confocal measurement device 50 needs to have a pinhole. However, in the case where the optical fiber 52 is used, the confocal point is used. The measuring device 50 does not need to have a pinhole.
The controller unit 53 is internally provided with a light source device 10 as a white light source, a branch fiber 56, a beam splitter 57, an imaging element (light receiving unit) 58, and a control circuit unit (measurement unit) 59. Furthermore, the detailed configuration of the light source device 10 will be described in detail in the following paragraphs.
The branch fiber 56 has one optical fiber 55a on the side of connection with the optical fiber 52 formed from the head 51 to the optical path of the controller portion 53, and has two optical fibers 15 and 55b on the opposite side of the connection side. Furthermore, the optical fiber 15 constitutes a part of the light source device 10 to be described later. The optical fiber 55b is connected to the spectroscope 57 to introduce light collected by the spectroscope 57 from the end surface.
Therefore, the branch fiber 56 guides the light emitted from the light source device 10 to the optical fiber 52, and irradiates the measurement object T from the head 51. Further, the branch fiber 56 guides the light reflected by the surface of the measuring object T to the spectroscope 57 via the optical fiber 52 and the head portion 51.
The spectroscope 57 has a concave mirror 57a for reflecting reflected light returned via the head 51, a diffraction grating 57b for incident light reflected by the concave mirror 57a, and a collecting lens 57c for self-diffusing grating The light emitted by 57b is concentrated. Further, the spectroscope 57 can be any combination of the Czerny-Turner type and the Littrow type, as long as the reflected light returned through the head 51 can be distinguished according to the wavelength. .
The imaging element 58 is a line complementary metal oxide semiconductor (CMOS) or a charge coupled device (CCD) that measures the intensity of light emitted from the spectroscope 57. Here, in the confocal measurement device 50, the spectroscope 57 and the imaging element 58 constitute a measurement unit that measures the intensity of the reflected light returned via the head 51 in accordance with the wavelength.
In addition, the measurement unit may be configured to measure the intensity of light returned from the head portion 51 in accordance with the wavelength, and may be configured by a single element of the imaging element 58 such as a CCD. In addition, the imaging element 58 may be a two-dimensional CMOS or a two-dimensional CCD.
The control circuit unit 59 controls the operation of the light source device 10 or the image sensor 58. Further, although not shown, the control circuit unit 59 has an input interface, an output interface, and the like, and the input interface inputs a signal for adjusting the operation of the light source device 10 or the imaging device 58 and the like, and the output interface outputs the imaging element. 58 signal.
The monitor 54 displays the signal output from the imaging element 58. For example, the monitor 54 traces the spectral waveform of the light returned from the head 51 and displays the displacement of the measurement object.
In the confocal measurement device 50 of the present embodiment, a light source having high luminance can be obtained by mounting the following light source device 10.
As a result, as the measuring device, it is possible to obtain an effect that the measurement distance can be extended and the responsiveness can be improved.
The configuration of the light source device 10 will be described in detail below.
(Light source device 10)
The light source device 10 of the present embodiment is mounted as a light source of the confocal measurement device 50, and includes a light source unit 11, a condensing lens 12, a translucent phosphor 13, an introduction lens 14, and Optical fiber 15.
The light source unit 11 is, for example, a semiconductor laser that emits laser light having a peak wavelength of about 450 nm, and irradiates the laser light in the direction of the condensing lens 12 as excitation light for emitting fluorescence in the light-transmitting phosphor 13 . .
The condensing lens 12 is a lens in which both the incident surface and the exit surface are convex, and condenses the laser light irradiated from the light source unit into the inside of the light-transmitting phosphor 13 .
The light-transmitting phosphor 13 is, for example, a single crystal phosphor of yttrium aluminum garnet (YAG) doped with Ce ions, and has an incident surface 13a disposed along a plane perpendicular to the laser propagation direction. And an exit surface 13b. Further, the translucent phosphor 13 emits fluorescence having a wavelength in the range of 480 nm to 750 nm in a portion irradiated with the laser beam condensed by the condensing lens 12 from the light source unit 11.
Further, as shown in FIG. 3, in the translucent phosphor 13, a long substantially cylindrical fluorescent light source unit 20 is formed along the propagation direction of the laser light in a portion irradiated with the laser light.
The fluorescent light source unit 20 is formed in a portion where the laser light passes through the inside of the translucent phosphor 13, and has a long substantially cylindrical shape in the laser propagation direction as shown in FIGS. 3 and 4 .
Further, since the fluorescent light source unit 20 emits fluorescence toward all directions in each portion, it can be regarded as a light source formed inside the light-transmitting phosphor 13. Specifically, as shown in FIG. 4, the fluorescent light source unit 20 has a reduced diameter portion in which the radius of the cross-sectional circle becomes smaller at the central portion in the longitudinal direction along the propagation direction of the laser light, and has a profile toward both ends. A substantially cylindrical shape in which the radius of the circle becomes large.
In other words, the fluorescent light source unit 20 is formed such that the light collecting point of the laser light is located on the reduced diameter portion cross section 20b. Further, the fluorescent light source unit 20 is formed such that the cross-sectional area of the incident side cross section 20a and the exit side cross section 20c becomes larger than the diameter reducing portion cross section 20b in accordance with the convergence and diffusion of the laser light.
For example, the end face of the fluorescent light source unit 20 on the incident side of the laser light (incidence side cross section 20a), the reduced diameter portion of the substantially cylindrical central portion (the reduced diameter portion cross section 20b), and the end surface of the exit side of the laser light (the outgoing side) In section 20c), fluorescence is emitted toward all directions.
In the fluorescent light emitted from the fluorescent light source unit 20, the fluorescent light emitted in the depth of field is introduced by the introduction lens 14 and condensed to the end surface (first surface) of the optical fiber 15.
In addition, the depth of field generally refers to a range of blurring that can be tolerated with respect to the image plane of the lens, and the front and back of the in-focus position on the object surface side are practically focused. In the present embodiment, when the core diameter in the end surface of the optical fiber 15 is the diameter of the perforated aperture in the image plane of the lens, the depth of field of the object surface is formed by the introduction lens 14.
Here, the end surface of the optical fiber 15 is a cross section in the end portion of the optical fiber 15 into which the light collected by the introduction lens 14 is incident. In addition, the core diameter means an inner diameter of a cylindrical core portion that transmits light in the optical fiber 15.
In the same manner as the condensing lens 12, the introduction lens 14 is a lens having a convex surface on both the incident surface and the emission surface, and is disposed on the downstream side of the laser light propagation direction in the light-transmitting phosphor 13 . Further, the introduction lens 14 condenses the fluorescence emitted from the inside of the translucent phosphor 13 (the fluorescent light source unit 20) to the end surface of the optical fiber 15.
In addition, as shown in FIG. 3, the introduction lens 14 is disposed such that the central axis A1 of the laser light in the inside of the translucent phosphor 13 is coaxial (on the same straight line) with respect to the lens central axis A2. In this manner, by arranging the central axis A1 of the laser beam and the lens central axis A2 of the introduction lens 14 so as to be coaxial with each other, the fluorescent light emitted from the fluorescent light source unit 20 can be efficiently transmitted from the first surface 15a. The fiber 15 is incident inside.
The optical fiber 15 is an optical fiber constituting the branch fiber 56 of the confocal measurement device 50, and internally forms an optical path of light irradiated from the head 51 of the confocal measurement device 50.
In addition, as shown in FIG. 3, the optical fiber 15 has an end surface (first surface 15a) on which the fluorescent light collected by the introduction lens 14 is incident, and an end surface (second surface 15b) on the emission side opposite to the end surface.
Thereby, the optical fiber 15 can emit light incident from the first surface 15a from the second surface 15b.
In the light source device 10 of the present embodiment, as described above, as shown in FIG. 2, the excitation laser light irradiated from the light source unit 11 is condensed by the condensing lens 12 to the light-transmitting fluorescing light. The inside of the light body 13. Further, as shown in FIG. 3, the fluorescent light generated by the condensing portion of the laser light in the inside of the light-transmitting phosphor 13 is condensed to the first surface 15a of the optical fiber 15 by the introduction lens 14.
Here, in the light source device 10 of the present embodiment, the inside of the single crystal phosphor (translucent phosphor 13) is irradiated with the laser light collected by the collecting lens 12 as described above.
At this time, when the laser beam is incident on the single-crystal phosphor (translucent phosphor 13), the inside of the phosphor is transmitted while the light is excited without being diffused in the phosphor.
In other words, in the light source device 10 of the present embodiment, a single crystal phosphor (translucent phosphor) that hardly scatters laser light incident inside is used. Therefore, compared with the conventional phosphor which is reinforced by using a binder such as a resin, the fluorescent light emitted by the laser light incident inside can be efficiently derived, and therefore, a light source having a higher brightness than the previous one can be obtained.
(Embodiment 2)
The light source device according to Embodiment 2 of the present invention will be described below with reference to Figs. 5 to 7 .
The light source device 110 of the present embodiment is different from the above-described first embodiment in that a concave mirror 116 is provided between the collecting lens 12 and the translucent phosphor 13 as shown in FIG.
The other configuration of the light source device 110 is the same as that of the light source device 10 of the first embodiment, and therefore the same reference numerals will be given thereto, and detailed description thereof will be omitted.
As shown in FIG. 5, the light source device 110 of the present embodiment includes a light source unit 11, a condensing lens 12, a concave mirror 116, a translucent phosphor 13, an introduction lens 14, and an optical fiber 15.
The concave mirror 116 is disposed between the condensing lens 12 and the translucent phosphor 13 and has a concave reflecting surface on the surface on the side of the translucent phosphor 13 . Further, the concave mirror 116 has a characteristic of transmitting the laser light collected by the collecting lens 12 and reflecting the fluorescent light emitted from the inside of the light-transmitting fluorescent body 13.
Thereby, the laser beam irradiated from the light source unit 11 and condensed by the condensing lens 12 can be irradiated to the translucent phosphor 13 without being blocked by the concave mirror 116. Further, as shown in FIG. 6, the fluorescent light source unit 120 formed inside the light-transmitting phosphor 13 is radiated to the condensing lens 12 side by the fluorescent light emitted from all the directions. The fluorescent reflection is returned to the side of the light-transmitting phosphor 13 .
As a result, in the introduction lens 14, more fluorescence than the fluorescence introduced in the first embodiment can be introduced and collected on the first surface 15a of the optical fiber 15, so that further high brightness can be obtained. Light source.
Further, the concave mirror 116 is disposed such that the center of the concave curved surface appears on the central axis A1 of the fluorescent light source unit 120.
Thereby, the reflected fluorescent light can be condensed at the position of the portion (fluorescent light source portion 120) that emits fluorescence.
As a result, in the introduction lens 14, more fluorescence than the fluorescence introduced in the first embodiment can be introduced and collected on the first surface 15a of the optical fiber 15, so that higher brightness can be obtained more effectively. Light source.
Further, the concave mirror 116 preferably has a spherical or aspherical shape centering on a light collecting point of the laser light collected by the collecting lens 12 into the light transmitting fluorescent body 13.
Thereby, the reflected fluorescent light can be collected by the fluorescent portion (fluorescent light source unit 120).
As a result, in the introduction lens 14, more fluorescence than the fluorescence introduced in the first embodiment can be introduced and collected on the first surface 15a of the optical fiber 15, so that higher brightness can be obtained more effectively. Light source.
Further, as the concave mirror 116, a dichroic mirror or a lens in which a reflective film that reflects fluorescence is vapor-deposited on a concave surface of a meniscus lens may be used, and an opening may be formed in a portion through which the laser light passes. A perforated mirror that reflects fluorescence in the surface of the shape.
For example, in the case where a dichroic mirror is used as the concave mirror 116, as shown in FIG. 7, by transmitting light of a wavelength of about 480 nm or less and reflecting light of a wavelength of more than about 480 nm, it is possible to make The laser light is transmitted while reflecting the fluorescent light.
(Embodiment 3)
A light source device according to Embodiment 3 of the present invention will be described below with reference to Figs. 8 and 9 .
The light source device 210 of the present embodiment is different from the first embodiment in which the plate-shaped light-transmitting phosphor 13 is used. As shown in FIG. 8, the light-transmitting fluorescent light having a convex shape on the side of the emitting surface 213b is used. Light body 213.
The other configuration of the light source device 210 is the same as that of the light source device 10 of the first embodiment, and therefore the same reference numerals will be given thereto, and detailed description thereof will be omitted.
As shown in FIG. 8 , the light source device 210 of the present embodiment includes a light source unit 11 , a collecting lens 12 , a light transmitting fluorescent body 213 , an introduction lens 14 , and an optical fiber 15 .
As shown in FIG. 9, the light-transmitting phosphor 213 has an incident surface 213a and an exit surface 213b. Further, in the translucent phosphor 213, a fluorescent light source unit 220 that emits fluorescence is formed in a portion where the laser light collected by the collecting lens 12 passes.
In addition, the fluorescent light source unit 220 has substantially the same shape and function as the fluorescent light source unit 20 of the first embodiment.
The incident surface 213a is a surface on the side of the collecting lens 12, and is disposed along a plane perpendicular to the propagation direction of the laser light.
The exit surface 213b is a surface on the side of the introduction lens 14 and has a curved surface that is convex toward the introduction lens 14.
Thereby, the fluorescence excited by the laser light irradiated to the light-transmitting phosphor 213 is in the exit surface 213b, and the refractive index difference in the interface between the light-transmitting phosphor 213 (YAG refractive index ≒ 1.8) and air is obtained. The generated divergence is suppressed and introduced into the introduction lens 14.
As a result, the size of the introduction lens 14 can be made small, and the size of the light source device 210 can be reduced.
Alternatively, even when the size of the introduction lens 14 is fixed, the degree of diffusion of the emitted fluorescent light is suppressed, so that the amount of fluorescence to be introduced can be increased.
Thereby, a light source that is more efficiently brightened can be obtained.
(Embodiment 4)
A light source device according to Embodiment 4 of the present invention will be described below with reference to Figs. 10 and 11 .
The light source device 310 of the present embodiment is different from the first embodiment in that a concave mirror 316 is provided between the collecting lens 12 and the translucent phosphor 313 as shown in FIG. 10, and an incident surface is provided. Both of the exit surfaces have a convex curved surface translucent phosphor 313.
The other configuration of the light source device 310 is the same as that of the light source device 10 of the first embodiment, and therefore the same reference numerals will be given thereto, and detailed description thereof will be omitted.
As shown in FIG. 10, the light source device 310 of the present embodiment includes a light source unit 11, a collecting lens 12, a concave mirror 316, a translucent phosphor 313, an introduction lens 14, and an optical fiber 15.
The concave mirror 316 is disposed between the condensing lens 12 and the translucent phosphor 313, and has a concave reflecting surface on the surface on the side of the translucent phosphor 313. Further, the concave mirror 316 has a characteristic of transmitting the laser light condensed by the condensing lens 12 and reflecting the fluorescent light emitted from the inside of the light-transmitting phosphor 313 as shown in FIG.
Thereby, the laser light irradiated from the light source unit 11 and condensed by the condensing lens 12 can be irradiated to the translucent phosphor 313 without being blocked by the concave mirror 316. Further, as shown in FIG. 11, the fluorescent light source unit 320 formed inside the light-transmitting phosphor 313 is radiated to the condensing lens 12 side by the fluorescent light source unit 320 formed inside the light-transmitting phosphor 313. The fluorescent reflection is returned to the side of the light-transmitting phosphor 313.
As a result, in the introduction lens 14, more fluorescence than the fluorescence introduced in the first embodiment can be introduced and collected on the first surface 15a of the optical fiber 15, so that further high brightness can be obtained. Light source.
Further, as shown in FIG. 11, the concave mirror 316 is disposed such that the center of the concave curved surface appears on the central axis A1 of the fluorescent light source unit 320.
Thereby, the reflected fluorescent light can be collected at the position of the portion (fluorescent light source portion 320) that emits fluorescence.
As a result, in the introduction lens 14, more fluorescence than the fluorescence introduced in the first embodiment can be introduced and collected on the first surface 15a of the optical fiber 15, so that higher brightness can be obtained more effectively. Light source.
Further, the concave mirror 316 preferably has a spherical or aspherical shape centering on a condensed point of the laser light condensed by the condensing lens 12 into the light-transmitting phosphor 313.
Thereby, the reflected fluorescent light can be collected by the fluorescent portion (fluorescent light source portion 320).
As a result, in the introduction lens 14, more fluorescence than the fluorescence introduced in the first embodiment can be introduced and collected on the first surface 15a of the optical fiber 15, so that higher brightness can be obtained more effectively. Light source.
Further, as the concave mirror 316, similarly to the concave mirror 116 of the second embodiment, a dichroic mirror or a lens in which a reflective film that reflects fluorescence is vapor-deposited on a concave surface of a meniscus lens can be used. A perforated mirror having an opening in the portion through which the laser light passes and reflecting the fluorescent light in the concave surface.
As shown in FIG. 11, the light-transmitting phosphor 313 has an incident surface 313a and an exit surface 313b.
The incident surface 313a is a surface on the side of the condensing lens 12, and has a curved surface that is convex toward the condensing lens 12.
Thereby, the fluorescence excited by the laser light irradiated to the light-transmitting phosphor 313 is incident on the incident surface 313a, and the refractive index difference at the interface between the light-transmitting phosphor 313 (YAG refractive index ≒1.8) and the air is obtained. The occurrence of divergence is suppressed and is introduced into the concave mirror 316.
As a result, the size of the concave mirror 316 can be reduced, and the size of the light source device 310 can be reduced.
Alternatively, even when the size of the concave mirror 316 is fixed, the degree of diffusion of the emitted fluorescent light can be suppressed, so that the amount of reflected fluorescent light in the concave mirror 316 can be increased.
Thereby, the fluorescent light can be more efficiently reflected by the concave mirror 316 to obtain a high-luminance light source.
On the other hand, the exit surface 313b is a surface on the side of the introduction lens 14 and has a curved surface that is convex toward the introduction lens 14.
Thereby, the fluorescence excited by the laser light irradiated to the translucent phosphor 313 is on the emission surface 313b, and the refractive index difference in the interface between the translucent phosphor 313 (YAG refractive index ≒1.8) and the air The generated diffusion is suppressed and introduced into the introduction lens 14.
As a result, the size of the introduction lens 14 can be reduced, and the size of the light source device 310 can be reduced.
Alternatively, even when the size of the introduction lens 14 is fixed, the degree of diffusion of the emitted fluorescent light is suppressed, so that the amount of fluorescence to be introduced can be increased.
Thereby, a light source that is more efficiently brightened can be obtained.
(Embodiment 5)
A light source device according to Embodiment 5 of the present invention will be described below with reference to Figs. 12 and 13 .
The light source device 410 of the present embodiment is different from the above-described first embodiment in that a concave mirror 416 is provided between the collecting lens 12 and the translucent phosphor 413 as shown in FIG. 12, and an incident surface is provided. A translucent phosphor 413 having a convex curved surface.
The other configuration of the light source device 410 is the same as that of the light source device 10 of the first embodiment, and therefore the same reference numerals will be given thereto, and detailed description thereof will be omitted.
As shown in FIG. 12, the light source device 410 of the present embodiment includes a light source unit 11, a collecting lens 12, a concave mirror 416, a translucent phosphor 413, an introduction lens 14, and an optical fiber 15.
The concave mirror 416 is disposed between the condensing lens 12 and the translucent phosphor 413, and has a concave reflecting surface on the surface on the side of the translucent phosphor 413. Further, the concave mirror 416 has a characteristic of transmitting the laser light condensed by the condensing lens 12 and reflecting the fluorescent light emitted from the inside of the light-transmitting phosphor 413 as shown in FIG.
Thereby, the laser light irradiated from the light source unit 11 and condensed by the condensing lens 12 can be irradiated to the translucent phosphor 413 without being blocked by the concave mirror 416. Further, as shown in FIG. 13, the fluorescent light source unit 420 formed inside the light-transmitting phosphor 413 is radiated to the collecting lens 12 side by the fluorescent light emitted from all the directions. The fluorescent reflection is returned to the side of the light-transmitting phosphor 413.
As a result, in the introduction lens 14, more fluorescence than the fluorescence introduced in the first embodiment can be introduced and collected on the first surface 15a of the optical fiber 15, so that further high brightness can be obtained. Light source.
Further, as shown in FIG. 13, the concave mirror 416 is disposed such that the center of the concave curved surface appears on the central axis A1 of the fluorescent light source unit 420.
Thereby, the reflected fluorescent light can be collected at the position of the fluorescent portion (fluorescent light source portion 420).
As a result, in the introduction lens 14, more fluorescence than the fluorescence introduced in the first embodiment can be introduced and collected on the first surface 15a of the optical fiber 15, so that higher brightness can be obtained more effectively. Light source.
Further, the concave mirror 416 preferably has a spherical or aspherical shape centering on a light collecting point of the laser light condensed by the collecting lens 12 into the light transmitting phosphor 413.
Thereby, the reflected fluorescent light can be collected by the fluorescent portion (fluorescent light source portion 420).
As a result, in the introduction lens 14, more fluorescence than the fluorescence introduced in the first embodiment can be introduced and collected on the first surface 15a of the optical fiber 15, so that higher brightness can be obtained more effectively. Light source.
Further, as the concave mirror 416, similarly to the concave mirror 116 of the second embodiment, a dichroic mirror or a lens in which a reflective film that reflects fluorescence is vapor-deposited on a concave surface of a meniscus lens can be used. A perforated mirror having an opening in the portion through which the laser light passes and reflecting the fluorescent light in the concave surface.
As shown in FIG. 13, the translucent phosphor 413 has an incident surface 413a and an exit surface 413b.
The incident surface 413a is a surface on the side of the condensing lens 12, and has a curved surface that is convex toward the condensing lens 12.
The exit surface 413b is a surface on the side of the introduction lens 14 and is disposed along a plane perpendicular to the propagation direction of the laser light.
Thereby, the fluorescent light emitted from all the azimuths excited by the laser light irradiated to the translucent phosphor 413 is incident on the incident surface 413a, and the interface between the translucent phosphor 413 (YAG refractive index ≒ 1.8) and the air is formed. The divergence occurring in the difference in refractive index is suppressed, and is introduced into the concave mirror 416.
As a result, the size of the concave mirror 416 can be reduced to achieve miniaturization of the light source device 410.
Alternatively, even when the size of the concave mirror 416 is fixed, the degree of diffusion of the emitted fluorescent light can be suppressed, so that the amount of reflected fluorescent light in the concave mirror 416 can be increased.
Thereby, the fluorescent light can be more efficiently reflected by the concave mirror 416 to obtain a light source having a high luminance.
(Embodiment 6)
A light source device according to Embodiment 6 of the present invention will be described below with reference to Figs. 14 to 16 .
The light source device 510 of the present embodiment is different from the above-described first embodiment in that a concave mirror 516 is provided between the translucent phosphor 13 and the introduction lens 14 as shown in FIG.
The other configuration of the light source device 510 is the same as that of the light source device 10 of the first embodiment, and therefore the same reference numerals will be given thereto, and detailed description thereof will be omitted.
As shown in FIG. 14 , the light source device 510 of the present embodiment includes a light source unit 11 , a condensing lens 12 , a translucent phosphor 13 , a concave mirror 516 , an introduction lens 14 , and an optical fiber 15 .
The concave mirror 516 is disposed between the light-transmitting phosphor 13 and the introduction lens 14 and has a concave reflecting surface on the incident surface on the side of the light-transmitting phosphor 13 . Further, the concave mirror 516 has a characteristic of transmitting the fluorescent light excited by the light-transmitting phosphor 13 and reflecting the laser light transmitted through the light-transmitting fluorescent body 13.
By this, the fluorescent light source unit 120 formed inside the light-transmitting phosphor 13 can be introduced into the introduction lens 14 without being irradiated to the introduction lens 14 in the fluorescence emitted from all directions. It will be blocked by the concave mirror 516.
Further, as shown in FIG. 15, the laser beam that is not absorbed and transmitted through the translucent phosphor 13 can be reflected by the concave mirror 516 and returned to the side of the translucent phosphor 13 .
As a result, in the light-transmitting phosphor 13, more excitation light than the laser light irradiated in the first embodiment can be introduced to excite the fluorescent light, and thus a light source which is further brightened more than before can be obtained.
Further, as shown in FIG. 15, the concave mirror 516 is disposed such that the center of the concave curved surface appears on the central axis A1 of the fluorescent light source unit 520.
Thereby, the reflected laser light can be collected again at the position of the portion (fluorescent light source portion 520) that emits fluorescence.
As a result, in the light-transmitting phosphor 13, more excitation light than the laser light irradiated in the first embodiment can be introduced to excite the fluorescent light, and thus a light source which is further brightened more than before can be obtained.
Further, the concave mirror 516 preferably has a spherical or aspherical shape centering on a condensed point of the laser light condensed by the condensing lens 12 into the light-transmitting phosphor 13.
Thereby, the reflected laser light can be collected again by the portion (fluorescent light source portion 520) that emits fluorescence.
As a result, in the introduction lens 14, more fluorescence than the fluorescence introduced in the first embodiment can be introduced and collected on the first surface 15a of the optical fiber 15, so that higher brightness can be obtained more effectively. Light source.
Further, as the concave mirror 516, a dichroic mirror or a lens in which a reflective film that reflects laser light is vapor-deposited on a concave surface of a meniscus lens can be used.
For example, in the case where a dichroic mirror is used as the concave mirror 516, as shown in FIG. 16, by reflecting light of a wavelength of about 480 nm or less and transmitting light of a wavelength of more than about 480 nm, it is possible to make The fluorescent light is transmitted while reflecting the laser light.
[Other embodiments]
The embodiment of the present invention has been described above, but the present invention is not limited to the embodiment, and various modifications can be made without departing from the spirit and scope of the invention.
(A)
In the fourth embodiment and the like, the light source device has been described as an example in which the light source device uses a translucent phosphor having a convex curved surface on at least one of an incident surface and an emission surface side. . However, the present invention is not limited to this.
For example, as shown in FIGS. 17( a ) and 17 ( b ), the translucent phosphor 613 may be used: the translucent phosphor 613 includes an incident surface 613 a and an exit surface 613 b. The incident surface 613a has a convex curved surface portion 613aa only at a portion where the laser light passes, and the outgoing surface 613b has a convex curved surface portion 613ba only at a portion where the fluorescent light passes.
(B)
In the above-described embodiment, an example in which the condensing lens is disposed so as to condense the laser light into the inside of the light-transmitting phosphor has been described. However, the present invention is not limited to this.
For example, the condensing lens may be disposed such that the laser light is condensed onto the surface of the light-transmitting phosphor.
In this case, the same effect as that of the above embodiment can be obtained by forming a substantially cylindrical fluorescent light source portion from the light collecting point on the surface of the light-transmitting phosphor to the inside.
Further, in consideration of the fact that the fluorescent light source portion is formed in front and rear with the focus point in the propagation direction of the laser light, it is preferably a light-transmitting phosphor that condenses the laser light by the collecting lens. The position is closer to the inside than the surface of the light-transmitting phosphor.
(C)
In the above-described embodiment, an example in which a single-crystal phosphor is used as the light-transmitting phosphor mounted on the light source device 10 has been described. However, the present invention is not limited to this.
For example, a translucent ceramic phosphor may be used instead of the single crystal phosphor.
(D)
In the above-described embodiment, the light source device 10 including the introduction lens and the optical fiber as a configuration has been described as an example. However, the present invention is not limited to this.
For example, a configuration in which the introduction lens or the optical fiber is not provided may be used as the light source device of the present invention.
(E)
In the above embodiment, an example in which the present invention is applied to the light source device 10 of the confocal measurement device (ranging sensor) 50 has been described. However, the present invention is not limited to this.
For example, the distance measuring sensor in which the light source device of the present invention is mounted is not limited to a distance measuring sensor such as a confocal measuring device, and other ranging sensors may be used.
Further, as a light source device, the present invention can also be applied to a headlight or a light source device of an endoscope.
[Industrial availability]
本發明的光源裝置起到可獲得較先前亮度更高的光源的效果,因此可廣泛應用作各種光源裝置。The light source device of the present invention has an effect of obtaining a light source having a higher brightness than the previous one, and thus can be widely applied to various light source devices.
10‧‧‧光源裝置10‧‧‧Light source device
11‧‧‧光源部 11‧‧‧Light source department
12‧‧‧聚光透鏡 12‧‧‧ Concentrating lens
13‧‧‧透光性螢光體 13‧‧‧Translucent phosphor
13a‧‧‧入射面 13a‧‧‧Incoming surface
13b‧‧‧出射面 13b‧‧‧Outlet
14‧‧‧導入用透鏡 14‧‧‧Introduction lens
15‧‧‧光纖 15‧‧‧Fiber
15a‧‧‧第1面 15a‧‧‧1st
15b‧‧‧第2面 15b‧‧‧2nd
20‧‧‧螢光光源部 20‧‧‧Fluorescent light source department
20a‧‧‧入射側剖面 20a‧‧‧Injection side profile
20b‧‧‧徑縮小部剖面 20b‧‧‧Reducing section
20c‧‧‧出射側剖面 20c‧‧‧ outgoing side profile
50‧‧‧共焦點測量裝置(測距感測器) 50‧‧‧Common focus measuring device (ranging sensor)
51‧‧‧頭部 51‧‧‧ head
51a‧‧‧繞射透鏡(色像差焦點透鏡) 51a‧‧·Diffractive lens (chromatic aberration focus lens)
51b‧‧‧物鏡 51b‧‧‧ objective lens
51c‧‧‧聚光透鏡 51c‧‧‧ Concentrating lens
52‧‧‧光纖 52‧‧‧Fiber
53‧‧‧控制器部 53‧‧‧Controller Department
54‧‧‧監視器 54‧‧‧ monitor
55a、55b‧‧‧光纖 55a, 55b‧‧‧ fiber
56‧‧‧分支光纖 56‧‧‧Branch fiber
57‧‧‧分光器 57‧‧‧ Spectroscope
57a‧‧‧凹面反射鏡 57a‧‧‧ concave mirror
57b‧‧‧繞射光柵 57b‧‧‧Diffraction grating
57c‧‧‧聚光透鏡 57c‧‧‧ Condenser lens
58‧‧‧攝像元件(光接收部) 58‧‧‧Image sensor (light receiving unit)
59‧‧‧控制電路部(測定部) 59‧‧‧Control circuit unit (measurement unit)
110‧‧‧光源裝置 110‧‧‧Light source device
116‧‧‧凹面鏡 116‧‧‧ concave mirror
120‧‧‧螢光光源部 120‧‧‧Fluorescent light source department
210‧‧‧光源裝置 210‧‧‧Light source device
213‧‧‧透光性螢光體 213‧‧‧Translucent phosphor
213a‧‧‧入射面 213a‧‧‧Incoming surface
213b‧‧‧出射面 213b‧‧‧Outlet
220‧‧‧螢光光源部 220‧‧‧Fluorescent light source department
310‧‧‧光源裝置 310‧‧‧Light source device
313‧‧‧透光性螢光體 313‧‧‧Translucent phosphor
313a‧‧‧入射面 313a‧‧‧Incoming surface
313b‧‧‧出射面 313b‧‧‧Outlet
316‧‧‧凹面鏡 316‧‧‧ concave mirror
320‧‧‧螢光光源部 320‧‧‧Fluorescent light source department
410‧‧‧光源裝置 410‧‧‧Light source device
413‧‧‧透光性螢光體 413‧‧‧Translucent phosphor
413a‧‧‧入射面 413a‧‧‧Incoming surface
413b‧‧‧出射面 413b‧‧‧Outlet
416‧‧‧凹面鏡 416‧‧‧ concave mirror
420‧‧‧螢光光源部 420‧‧‧Fluorescent light source department
510‧‧‧光源裝置 510‧‧‧Light source device
516‧‧‧凹面鏡 516‧‧‧ concave mirror
520‧‧‧螢光光源部 520‧‧‧Fluorescent light source department
613‧‧‧透光性螢光體 613‧‧‧Translucent phosphor
613a‧‧‧入射面 613a‧‧‧Incoming surface
613aa‧‧‧曲面部 613aa‧‧‧Surface Department
613b‧‧‧出射面 613b‧‧‧Outlet
613ba‧‧‧曲面部 613ba‧‧‧Face Department
A1‧‧‧中心軸 A1‧‧‧ central axis
A2‧‧‧透鏡中心軸 A2‧‧‧ lens central axis
T‧‧‧測量對象物 T‧‧‧Measurement object
圖1為表示搭載有本發明的一實施方式的光源裝置的共焦點測量裝置的構成的示意圖。FIG. 1 is a schematic view showing a configuration of a confocal measurement device on which a light source device according to an embodiment of the present invention is mounted.
圖2為表示圖1的共焦點測量裝置中所搭載的光源裝置的構成的示意圖。 FIG. 2 is a schematic diagram showing a configuration of a light source device mounted in the confocal measurement device of FIG. 1. FIG.
圖3為對圖2的光源裝置的主要部分進行放大後的示意圖。 Fig. 3 is a schematic enlarged view of a main part of the light source device of Fig. 2;
圖4為表示圖3的透光性螢光體的內部所形成的螢光光源部的形狀的示意圖。 Fig. 4 is a schematic view showing the shape of a fluorescent light source unit formed inside the light-transmitting phosphor of Fig. 3;
圖5為表示本發明的實施方式2的光源裝置的構成的示意圖。 FIG. 5 is a schematic diagram showing a configuration of a light source device according to Embodiment 2 of the present invention.
圖6為對圖5的光源裝置的主要部分進行放大後的示意圖。 Fig. 6 is a schematic enlarged view of a main part of the light source device of Fig. 5;
圖7為表示圖5的光源裝置中所含的凹面鏡(二向色反射鏡)的波長特性的曲線圖。 Fig. 7 is a graph showing wavelength characteristics of a concave mirror (dichroic mirror) included in the light source device of Fig. 5.
圖8為表示本發明的實施方式3的光源裝置的構成的示意圖。 FIG. 8 is a schematic diagram showing a configuration of a light source device according to Embodiment 3 of the present invention.
圖9為對圖8的光源裝置的主要部分進行放大後的示意圖。 Fig. 9 is a schematic enlarged view of a main part of the light source device of Fig. 8.
圖10為表示本發明的實施方式4的光源裝置的構成的示意圖。 FIG. 10 is a schematic diagram showing a configuration of a light source device according to Embodiment 4 of the present invention.
圖11為對圖10的光源裝置的主要部分進行放大後的示意圖。 Fig. 11 is a schematic enlarged view of a main part of the light source device of Fig. 10.
圖12為表示本發明的實施方式5的光源裝置的構成的示意圖。 FIG. 12 is a schematic diagram showing a configuration of a light source device according to Embodiment 5 of the present invention.
圖13為對圖12的光源裝置的主要部分進行放大後的示意圖。 Fig. 13 is a schematic enlarged view of a main part of the light source device of Fig. 12;
圖14為表示本發明的實施方式6的光源裝置的構成的示意圖。 FIG. 14 is a schematic diagram showing a configuration of a light source device according to Embodiment 6 of the present invention.
圖15為對圖14的光源裝置的主要部分進行放大後的示意圖。 Fig. 15 is a schematic enlarged view of a main part of the light source device of Fig. 14;
圖16為表示圖14的光源裝置中所含的凹面鏡(二向色反射鏡)的波長特性的曲線圖。 Fig. 16 is a graph showing wavelength characteristics of a concave mirror (dichroic mirror) included in the light source device of Fig. 14.
圖17(a)及圖17(b)為表示本發明的另一實施方式的光源裝置中所含的透光性螢光體的形狀的側視圖及後視圖。 17(a) and 17(b) are a side view and a rear view showing the shape of a light-transmitting phosphor included in a light source device according to another embodiment of the present invention.
Claims (16)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017114291A JP6471772B2 (en) | 2017-06-09 | 2017-06-09 | Light source device and distance measuring sensor provided with the same |
JP2017-114291 | 2017-06-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201932791A true TW201932791A (en) | 2019-08-16 |
TWI698625B TWI698625B (en) | 2020-07-11 |
Family
ID=64566539
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108111804A TWI698624B (en) | 2017-06-09 | 2018-02-27 | Light source device and distance measuring sensor provided with the device |
TW108111806A TWI698625B (en) | 2017-06-09 | 2018-02-27 | Light source device and distance measuring sensor provided with the device |
TW107106488A TWI660157B (en) | 2017-06-09 | 2018-02-27 | Light source device and ranging sensor provided with the same |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108111804A TWI698624B (en) | 2017-06-09 | 2018-02-27 | Light source device and distance measuring sensor provided with the device |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW107106488A TWI660157B (en) | 2017-06-09 | 2018-02-27 | Light source device and ranging sensor provided with the same |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6471772B2 (en) |
TW (3) | TWI698624B (en) |
WO (1) | WO2018225299A1 (en) |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010178974A (en) * | 2009-02-06 | 2010-08-19 | Olympus Corp | Light source device |
DE102010034054A1 (en) * | 2010-08-11 | 2012-02-16 | Schott Ag | Laser-based white light source |
JP5790178B2 (en) * | 2011-03-14 | 2015-10-07 | オムロン株式会社 | Confocal measuring device |
JP5963453B2 (en) * | 2011-03-15 | 2016-08-03 | 株式会社荏原製作所 | Inspection device |
JP5380498B2 (en) * | 2011-07-25 | 2014-01-08 | シャープ株式会社 | Light source device, lighting device, vehicle headlamp, and vehicle |
JP5793822B2 (en) * | 2011-08-10 | 2015-10-14 | スタンレー電気株式会社 | Light source unit for vehicle headlamp and vehicle headlamp using the same |
JP2013120735A (en) * | 2011-12-08 | 2013-06-17 | Sharp Corp | Light source device |
JP5955593B2 (en) * | 2012-03-15 | 2016-07-20 | スタンレー電気株式会社 | Abnormality detection mechanism and vehicle front illumination device including the same |
WO2013190778A1 (en) * | 2012-06-21 | 2013-12-27 | パナソニック株式会社 | Light emitting device and projection device |
JP5994504B2 (en) * | 2012-09-14 | 2016-09-21 | オムロン株式会社 | Confocal measuring device |
JP6169383B2 (en) * | 2013-03-25 | 2017-07-26 | スタンレー電気株式会社 | Light emitting module and light source device |
JP6497544B2 (en) * | 2015-01-28 | 2019-04-10 | 日本電気硝子株式会社 | Crystallized glass phosphor and wavelength conversion member using the same |
JP6482993B2 (en) * | 2015-09-04 | 2019-03-13 | シャープ株式会社 | Lighting device |
JP6444837B2 (en) * | 2015-09-11 | 2018-12-26 | マクセル株式会社 | Light source device |
-
2017
- 2017-06-09 JP JP2017114291A patent/JP6471772B2/en active Active
-
2018
- 2018-02-16 WO PCT/JP2018/005400 patent/WO2018225299A1/en active Application Filing
- 2018-02-27 TW TW108111804A patent/TWI698624B/en active
- 2018-02-27 TW TW108111806A patent/TWI698625B/en active
- 2018-02-27 TW TW107106488A patent/TWI660157B/en active
Also Published As
Publication number | Publication date |
---|---|
TWI698625B (en) | 2020-07-11 |
JP2018206726A (en) | 2018-12-27 |
WO2018225299A1 (en) | 2018-12-13 |
TW201903355A (en) | 2019-01-16 |
TWI660157B (en) | 2019-05-21 |
TWI698624B (en) | 2020-07-11 |
TW201925723A (en) | 2019-07-01 |
JP6471772B2 (en) | 2019-02-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7270807B2 (en) | Confocal displacement meter | |
TWI452256B (en) | Confocal measuring device | |
US20180348616A1 (en) | Light-emitting device and related light source system | |
JP2008293838A (en) | Light source device | |
JP2010002255A (en) | Optical system for measurement | |
US12019019B2 (en) | Light source device and range sensor provided with the same | |
JP4426026B2 (en) | Multi-light source unit and optical system using the same | |
JP6696597B2 (en) | Light source device and distance measuring sensor including the same | |
JP2020529628A (en) | Spectroscopic filter for high power fiber illumination sources | |
TWI698625B (en) | Light source device and distance measuring sensor provided with the device | |
JP6753477B2 (en) | Light source device and ranging sensor equipped with it | |
JP6888638B2 (en) | Light source device and ranging sensor equipped with it | |
JP2009238990A (en) | Light source device | |
JP2019203867A (en) | Confocal displacement meter | |
JP2019096619A (en) | Light source device and distance measurement sensor including the same | |
CN115236927B (en) | Light guide optical device, light source device, and image projection device | |
JP2005283879A (en) | Vertical illuminating fluorescent illumination device and microscope equipped therewith | |
KR20170026942A (en) | Illumination optical system | |
RU2011129631A (en) | I / O LENS, LIGHTING DEVICE AND ELECTRONIC DEVICE |