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TW201910088A - Transport mechanism of resin molded product, resin molding device, and method of manufacturing resin molded article - Google Patents

Transport mechanism of resin molded product, resin molding device, and method of manufacturing resin molded article Download PDF

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Publication number
TW201910088A
TW201910088A TW107122798A TW107122798A TW201910088A TW 201910088 A TW201910088 A TW 201910088A TW 107122798 A TW107122798 A TW 107122798A TW 107122798 A TW107122798 A TW 107122798A TW 201910088 A TW201910088 A TW 201910088A
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TW
Taiwan
Prior art keywords
resin
molding
molded product
mold
resin molded
Prior art date
Application number
TW107122798A
Other languages
Chinese (zh)
Inventor
姬野智則
荒木晃一
田村孝司
Original Assignee
日商Towa股份有限公司
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Filing date
Publication date
Application filed by 日商Towa股份有限公司 filed Critical 日商Towa股份有限公司
Publication of TW201910088A publication Critical patent/TW201910088A/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/02Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/1769Handling of moulded articles or runners, e.g. sorting, stacking, grinding of runners
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/38Cutting-off equipment for sprues or ingates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

This invention provides a resin molded product transportation mechanism capable of suppressing the increase in the occupied area for a resin molding device and the increase in cost. The resin molded product transportation mechanism (300) of this invention is characterized in having a resin molded product holding mechanism (302) and a resin molded product suction mechanism (301). The resin molded product (1b) can be held in a molding mold (1000) by the resin molded product holding mechanism (302), and in that state, the resin molded product (1b) and the useless resin part (20d) after resin molding can be separated. The resin molded product (1b) can be sucked and transported by the resin molded product suction mechanism (301).

Description

樹脂成型品的搬運機構、樹脂成型裝置以及樹脂成型品的製造方法    Resin molding product conveying mechanism, resin molding device, and method for manufacturing resin molded product   

本發明關於樹脂成型品的搬運機構、樹脂成型裝置以及樹脂成型品的製造方法。 The present invention relates to a resin-molded article conveying mechanism, a resin-molding apparatus, and a method for manufacturing a resin-molded article.

作為樹脂成型品的製造方法,例如使用壓縮成型、傳遞成型等。並且,使用對應各種樹脂成型品的製造方法的樹脂成型裝置。 As a method for manufacturing a resin molded article, for example, compression molding, transfer molding, and the like are used. In addition, a resin molding apparatus corresponding to a method for manufacturing various resin molded products is used.

在樹脂成型裝置中,例如,設置無用樹脂去除部(打澆口部),並從樹脂成型後的樹脂成型品去除無用樹脂部(剩餘樹脂)(專利文獻1)。 In a resin molding apparatus, for example, an unnecessary resin removal part (a gate part) is provided, and an unnecessary resin part (excess resin) is removed from the resin molded product after resin molding (patent document 1).

[先前技術文獻] [Prior technical literature]

[專利文獻] [Patent Literature]

專利文獻1:特開平05-285977號公報。 Patent Document 1: Japanese Unexamined Patent Publication No. 05-285977.

但是,如專利文獻1的樹脂成型裝置由於設置了無用樹脂去除部,而具有佔用面積(佔用區域)增加以及費用增加的問題。 However, the resin molding apparatus such as Patent Document 1 has problems in that an occupied area (occupied area) increases and costs increase because an unnecessary resin removal portion is provided.

於是,本發明的一個目的是提供一種能夠進 行樹脂成型品和無用樹脂部的分離且能抑制樹脂成型裝置的佔用區域增大以及費用增加的樹脂成型品的搬運機構、樹脂成型裝置以及樹脂成型品的製造方法。 Accordingly, an object of the present invention is to provide a resin-molded product transport mechanism, a resin-molded device, and a resin-molded product that can separate a resin-molded product from an unnecessary resin portion, and can suppress an increase in the occupied area and cost of the resin-molded device. Manufacturing method.

為了實現所述目的,本發明的樹脂成型品的搬運機構的特徵在於,其具備樹脂成型品保持機構;和樹脂成型品吸附機構,藉由所述樹脂成型品保持機構能夠將樹脂成型品保持在成型模內,且在該狀態下,能夠分離所述成型品和樹脂成型後的無用樹脂部,藉由所述樹脂成型品吸附機構能夠將所述樹脂成型品吸附並搬運。 In order to achieve the above object, the resin-molded article transport mechanism of the present invention includes a resin-molded article holding mechanism; and a resin-molded article adsorption mechanism capable of holding the resin-molded article at the resin-molded article holding mechanism. In the molding die, in this state, the molded product and the unnecessary resin portion after the resin molding can be separated, and the resin molded product can be adsorbed and transported by the resin molded product adsorption mechanism.

本發明的樹脂成型裝置的特徵在於,其具備所述本發明的樹脂成型品的搬運機構和成型模。 The resin molding apparatus of this invention is equipped with the said conveyance mechanism of the resin molded product of this invention, and a molding die, It is characterized by the above-mentioned.

本發明的樹脂成型品的製造方法的特徵在於,其具備樹脂成型步驟,藉由成型模進行樹脂成型;無用樹脂部分離步驟,分離樹脂成型品和無用樹脂部;和搬運步驟,將所述樹脂成型品以及所述無用樹脂部向所述成型模的外部搬運。 The method for producing a resin molded article according to the present invention includes a resin molding step for resin molding by a molding die; an unnecessary resin section separating step for separating the resin molded article and the unnecessary resin section; and a transporting step for removing the resin. The molded product and the useless resin part are conveyed to the outside of the molding die.

根據本發明,能夠提供一種能進行樹脂成型 品和無用樹脂部的分離且能抑制樹脂成型裝置的佔用區域增大以及費用增加的樹脂成型品的搬運機構、樹脂成型裝置以及樹脂成型品的製造方法。 According to the present invention, it is possible to provide a resin-molded product transport mechanism, a resin-molded device, and a method for manufacturing a resin-molded product that can separate a resin-molded product from an unnecessary resin portion and suppress an increase in the occupied area and cost of the resin-molded device. .

1‧‧‧基板 1‧‧‧ substrate

1b‧‧‧樹脂成型品(封裝完畢基板) 1b‧‧‧Resin molding (packaged substrate)

20‧‧‧固化樹脂 20‧‧‧cured resin

20a‧‧‧板塊(樹脂材料) 20a‧‧‧ plate (resin material)

20b‧‧‧熔融樹脂(流動性樹脂) 20b‧‧‧ molten resin (fluid resin)

20d‧‧‧剩餘樹脂(無用樹脂部) 20d‧‧‧Residual resin (unwanted resin department)

100‧‧‧上模(一個模) 100‧‧‧ Upper mold (one mold)

110‧‧‧上模型腔塊 110‧‧‧Upper cavity block

111‧‧‧型腔 111‧‧‧ Cavity

111B‧‧‧下模型腔 111B‧‧‧Lower model cavity

112‧‧‧流道(樹脂通道) 112‧‧‧ runner (resin channel)

113‧‧‧殘料部(剩餘樹脂容納部) 113‧‧‧Residual material section (residual resin storage section)

113B‧‧‧殘料部(剩餘樹脂容納部) 113B‧‧‧Residual material section (residual resin storage section)

114‧‧‧調整構件(板塊高度調整構件) 114‧‧‧Adjustment member (plate height adjustment member)

115‧‧‧調整構件用彈性構件 115‧‧‧ Elastic member for adjusting member

120‧‧‧上模基塊 120‧‧‧ Upper mold base block

200‧‧‧下模(另一個模) 200‧‧‧ lower mold (another mold)

210‧‧‧下模型腔塊 210‧‧‧ lower model cavity block

210a‧‧‧下模基塊 210a‧‧‧ Lower mold base block

210b‧‧‧傳遞驅動源 210b‧‧‧Transfer driving source

210B‧‧‧下模基塊 210B‧‧‧ Lower mold base block

211‧‧‧基板載置部 211‧‧‧ substrate mounting section

212‧‧‧室(樹脂材料容納部) Room 212‧‧‧ (resin material storage section)

213‧‧‧柱塞 213‧‧‧Plunger

213a‧‧‧凸狀部 213a‧‧‧ convex

214‧‧‧環(環狀構件) 214‧‧‧Ring (ring-shaped member)

215‧‧‧凸緣部 215‧‧‧ flange

216‧‧‧剩餘樹脂分離構件 216‧‧‧Residual resin separation member

217‧‧‧剩餘樹脂分離構件用彈性構件 217‧‧‧Elastic member for residual resin separation member

218‧‧‧貫通孔(殘留樹脂漏孔) 218‧‧‧through hole (residual resin leak)

220‧‧‧閉模部 220‧‧‧ Closed mold department

221‧‧‧保持架A塊(保持架塊) 221‧‧‧Cage A (Cage Block)

222‧‧‧保持架B塊(保持架塊) 222‧‧‧Cage Block B (Cage Block)

223‧‧‧下模載置塊(成型模安裝構件) 223‧‧‧ Lower mold mounting block (molding mold mounting member)

224‧‧‧彈性構件 224‧‧‧elastic member

228‧‧‧液壓機構 228‧‧‧Hydraulic mechanism

230‧‧‧保持架 230‧‧‧ cage

231‧‧‧保持架A塊(保持架塊) 231‧‧‧Cage Block A (Cage Block)

232‧‧‧保持架B塊(保持架塊) 232‧‧‧Cage Block B (Cage Block)

233‧‧‧彈出板載置塊 233‧‧‧Eject board mounting block

234‧‧‧彈性構件 234‧‧‧Elastic member

235‧‧‧彈出板 235‧‧‧ pop-up board

236‧‧‧彈出桿 236‧‧‧ Pop-up lever

300‧‧‧卸料機(樹脂成型品的搬運機構) 300‧‧‧Unloader (conveying mechanism for resin molded products)

301‧‧‧吸盤(樹脂成型品吸附機構) 301‧‧‧Sucker (resin molding mechanism)

302‧‧‧樹脂成型品(封裝完畢基板)保持構件(樹脂成型品保持機構) 302‧‧‧Resin molded product (packaged substrate) holding member (resin molded product holding mechanism)

400‧‧‧中間模 400‧‧‧ intermediate mold

411‧‧‧基板載置部 411‧‧‧ substrate mounting section

412‧‧‧中間模型腔 412‧‧‧Intermediate model cavity

413‧‧‧中間模樹脂材料容納部(中間模樹脂通道) 413‧‧‧Mold mold resin material receiving section (Middle mold resin channel)

1000‧‧‧成型模 1000‧‧‧forming mold

1100‧‧‧固定台板(第1台板) 1100‧‧‧Fixed platen (the first platen)

1110‧‧‧固定台板 1110‧‧‧Fixed platen

1111‧‧‧加熱器 1111‧‧‧Heater

1120‧‧‧可動台板 1120‧‧‧movable table

1200‧‧‧可動台板(第2台板) 1200‧‧‧ movable platen (second platen)

1210‧‧‧可動台板 1210‧‧‧ movable table

1211‧‧‧加熱器 1211‧‧‧Heater

1212‧‧‧升溫台 1212‧‧‧heating station

1220‧‧‧可動台板 1220‧‧‧movable table

a1‧‧‧表示卸料機300進入方向的箭頭 a1‧‧‧ an arrow indicating the entering direction of the unloader 300

b1‧‧‧表示卸料機300退出方向的箭頭 b1‧‧‧ an arrow indicating the exit direction of the unloader 300

c1‧‧‧表示樹脂成型品保持構件302下降方向的箭頭 c1‧‧‧ an arrow indicating the downward direction of the resin molded product holding member 302

d1‧‧‧表示吸盤301下降方向的箭頭 d1‧‧‧ an arrow indicating the downward direction of the suction cup 301

e1‧‧‧表示吸盤301上升方向的箭頭 e1‧‧‧ an arrow indicating the upward direction of the suction cup 301

V1‧‧‧表示可動台板1200上升方向的箭頭 V1‧‧‧ an arrow indicating the upward direction of the movable table 1200

W1‧‧‧表示可動台板1200下降方向的箭頭 W1‧‧‧ an arrow indicating the downward direction of the movable table 1200

T1~T2‧‧‧表示柱塞213上升方向的箭頭 T1 ~ T2‧‧‧ Arrows indicating the rising direction of plunger 213

U1‧‧‧表示柱塞213下降方向的箭頭 U1‧‧‧ an arrow indicating the downward direction of the plunger 213

A1‧‧‧表示卸料機300進入方向的箭頭 A1‧‧‧ an arrow indicating the entering direction of the unloader 300

B1‧‧‧表示吸盤301下降方向的箭頭 B1‧‧‧ an arrow indicating the downward direction of the suction cup 301

C1~C2‧‧‧表示吸盤301上升方向的箭頭 C1 ~ C2 ‧‧‧ arrows indicating the upward direction of the suction cup 301

D1‧‧‧表示卸料機300退出方向的箭頭 D1‧‧‧ an arrow indicating the exit direction of the unloader 300

E1~E2‧‧‧表示成型模1000移動方向的箭頭 E1 ~ E2‧‧‧ Arrows indicating the moving direction of the molding die 1000

F1~F4‧‧‧表示可動台板1220上升方向的箭頭 F1 ~ F4‧‧‧‧ Arrows indicating the upward direction of the movable table 1220

G1~G3‧‧‧表示可動台板1220下降方向的箭頭 G1 ~ G3‧‧‧ Arrows indicating the downward direction of the movable table 1220

H1‧‧‧表示卸料機300進入方向的箭頭 H1‧‧‧ an arrow indicating the entering direction of the unloader 300

I1‧‧‧表示樹脂成型品保持構件302下降方向的箭頭 I1‧‧‧ an arrow indicating the downward direction of the resin molded product holding member 302

J1‧‧‧表示吸盤301下降方向的箭頭 J1‧‧‧ an arrow indicating the downward direction of the suction cup 301

K1~K2‧‧‧表示吸盤301上升方向的箭頭 K1 ~ K2 ‧‧‧ arrows indicating the upward direction of the suction cup 301

L1‧‧‧表示卸料機300退出方向的箭頭 L1‧‧‧ an arrow indicating the exit direction of the unloader 300

M1‧‧‧表示成型模1000退出方向的箭頭 M1‧‧‧ an arrow indicating the exit direction of the molding die 1000

X1~X3‧‧‧表示可動台板1200上升方向的箭頭 X1 ~ X3‧‧‧‧ Arrows indicating the upward direction of the movable table 1200

Y1~Y3‧‧‧表示可動台板1200下降方向的箭頭 Y1 ~ Y3‧‧‧‧ Arrows indicating the downward direction of the movable table 1200

S1‧‧‧升溫段 S1‧‧‧Heating section

S2‧‧‧樹脂成型段 S2‧‧‧Resin molding section

S3‧‧‧固化段 S3‧‧‧curing section

S4‧‧‧彈出段 S4‧‧‧ Popup

圖1為示意性示出實施例1的樹脂成型品的製造方法的一個步驟的截面圖。 FIG. 1 is a cross-sectional view schematically showing one step of a method for manufacturing a resin molded article of Example 1. FIG.

圖2為示意性示出與圖1相同的樹脂成型品的製造方法的另一個步驟的截面圖。 FIG. 2 is a cross-sectional view schematically showing another step of the method for manufacturing a resin molded article similar to FIG. 1.

圖3為示意性示出與圖1相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 3 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to that of FIG. 1.

圖4為示意性示出與圖1相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 4 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to FIG. 1.

圖5為示意性示出與圖1相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 5 is a cross-sectional view schematically showing still another step of the manufacturing method of the resin molded article similar to FIG. 1.

圖6為示意性示出與圖1相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 6 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to that of FIG. 1.

圖7為示意性示出與圖1相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 7 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to FIG. 1.

圖8為示意性示出與圖1相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 8 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to FIG. 1.

圖9為示意性示出與圖1相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 9 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to FIG. 1.

圖10為示意性示出與圖1相同的樹脂成型品的製造方 法的又一個步驟的截面圖。 Fig. 10 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to that shown in Fig. 1.

圖11為示意性示出與圖1相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 11 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to FIG. 1.

圖12為示意性示出與圖1相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 12 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to that of FIG. 1.

圖13為示意性示出與圖1相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 13 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 1.

圖14為示意性示出實施例2的樹脂成型裝置的結構的截面圖。 FIG. 14 is a cross-sectional view schematically showing a structure of a resin molding apparatus of Example 2. FIG.

圖15為示意性示出使用圖14的樹脂成型裝置的樹脂成型品的製造方法的一個步驟的截面圖。 FIG. 15 is a cross-sectional view schematically showing one step of a method of manufacturing a resin molded article using the resin molding apparatus of FIG. 14.

圖16為示意性示出與圖15相同的樹脂成型品的製造方法的另一個步驟的截面圖。 FIG. 16 is a cross-sectional view schematically showing another step of the method of manufacturing a resin molded article similar to that of FIG. 15.

圖17為示意性示出與圖15相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 17 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 15.

圖18為示意性示出與圖15相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 18 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 15.

圖19為示意性示出與圖15相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 19 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 15.

圖20為示意性示出與圖15相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 20 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 15.

圖21為示意性示出與圖15相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 21 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 15.

圖22為示意性示出與圖15相同的樹脂成型品的製造 方法的又一個步驟的截面圖。 Fig. 22 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to that of Fig. 15.

圖23為示意性示出與圖15相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 23 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 15.

圖24為示意性示出與圖15相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 24 is a cross-sectional view schematically showing still another step of the manufacturing method of the resin molded article similar to that of FIG. 15.

圖25為示意性示出與圖15相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 25 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 15.

圖26為示意性示出與圖15相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 26 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 15.

圖27為示意性示出與圖15相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 27 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 15.

圖28A為示意性示出使用圖14的樹脂成型裝置的變形例的樹脂成型品的製造方法的一個步驟的截面圖。 FIG. 28A is a cross-sectional view schematically showing one step of a method of manufacturing a resin molded article using a modification example of the resin molding apparatus of FIG. 14. FIG.

圖28B為示意性示出與圖28A相同的樹脂成型品的製造方法的另一個步驟的截面圖。 FIG. 28B is a cross-sectional view schematically showing another step of the method of manufacturing a resin molded article similar to that of FIG. 28A.

圖28C為示意性示出與圖28A相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 28C is a cross-sectional view schematically showing still another step of the manufacturing method of the resin molded article similar to that of FIG. 28A.

圖29(a)為示意性示出圖14的樹脂成型裝置的其他變形例的截面圖。圖29(b)和(c)分別為示意性示出圖29(a)的樹脂成型裝置的一部分的圖。 FIG. 29 (a) is a sectional view schematically showing another modification example of the resin molding apparatus of FIG. 14. FIG. 29 (b) and (c) are views each schematically showing a part of the resin molding apparatus of FIG. 29 (a).

圖30為示出實施例2的樹脂成型裝置以及使用其的樹脂成型品的製造方法的概要的示意圖。 FIG. 30 is a schematic diagram showing an outline of a resin molding apparatus and a method for manufacturing a resin molded product using the resin molding apparatus of Example 2. FIG.

圖31(a)~(e)為示意性示出圖30的樹脂成型裝置以及樹脂成型品的製造方法的一部分的步驟截面圖。 31 (a) to (e) are cross-sectional views schematically showing a part of the resin molding apparatus and a method of manufacturing a resin molded product of FIG. 30.

圖32(a)~(h)為示意性示出圖30的樹脂成型裝置以及樹脂成型品的製造方法的另一部分的步驟截面圖。 32 (a) to (h) are schematic cross-sectional views showing steps of another part of the resin molding apparatus and the method for manufacturing a resin molded product of FIG. 30.

圖33(a)~(f)為示意性示出圖30的樹脂成型裝置以及樹脂成型品的製造方法的又一部分的步驟截面圖。 33 (a) to (f) are schematic cross-sectional views showing steps of still another part of the resin molding apparatus and the method for manufacturing a resin molded product of FIG. 30.

圖34為示意性示出實施例1和2的樹脂成型裝置的成型模的變形例的截面圖。 FIG. 34 is a cross-sectional view schematically showing a modification example of the molding die of the resin molding apparatus of Examples 1 and 2. FIG.

圖35為示意性示出使用圖34的成型模的樹脂成型品的製造方法的一個步驟的截面圖。 FIG. 35 is a cross-sectional view schematically showing one step of a method of manufacturing a resin molded article using the molding die of FIG. 34.

圖36為示意性示出使用圖34的成型模的樹脂成型品的製造方法的另一個步驟的截面圖。 FIG. 36 is a cross-sectional view schematically showing another step of the method for manufacturing a resin molded article using the molding die of FIG. 34.

圖37為示意性示出使用圖34的成型模的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 37 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article using the molding die of FIG. 34.

圖38為示意性示出實施例1和2的樹脂成型裝置的成型模的其他變形例的截面圖。 FIG. 38 is a cross-sectional view schematically showing another modification example of the molding die of the resin molding apparatus of Examples 1 and 2. FIG.

圖39為示意性示出實施例1和2的樹脂成型裝置的成型模的又一個變形例的截面圖。 FIG. 39 is a cross-sectional view schematically showing still another modification example of the molding die of the resin molding apparatus of Examples 1 and 2. FIG.

圖40為圖39的成型模的平面圖。 FIG. 40 is a plan view of the molding die of FIG. 39.

圖41(a)和(b)為使用圖39和圖40的成型模的樹脂成型品的製造方法的概要的步驟截面圖。 41 (a) and (b) are step cross-sectional views showing the outline of a method for manufacturing a resin molded article using the molding die of FIGS. 39 and 40.

圖42為示意性示出實施例2的樹脂成型品的製造方法的一個步驟的截面圖。 FIG. 42 is a cross-sectional view schematically showing one step of the method for manufacturing a resin molded article of Example 2. FIG.

圖43為示意性示出與圖42相同的樹脂成型品的製造方法的另一個步驟的截面圖。 FIG. 43 is a cross-sectional view schematically showing another step of the method for manufacturing a resin molded article similar to that of FIG. 42. FIG.

圖44為示意性示出與圖42相同的樹脂成型品的製造 方法的又一個步驟的截面圖。 Fig. 44 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to that shown in Fig. 42.

圖45為示意性示出與圖42相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 45 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 42.

圖46為示意性示出與圖42相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 46 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to FIG. 42.

圖47為示意性示出與圖42相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 47 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 42.

圖48為示意性示出與圖42相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 48 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 42.

圖49為示意性示出與圖42相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 49 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 42.

圖50為示意性示出與圖42相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 50 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 42.

圖51為示意性示出與圖42相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 51 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 42.

圖52為示意性示出與圖42相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 52 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 42.

圖53為示意性示出與圖42相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 53 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 42.

圖54為示意性示出與圖42相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 54 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 42.

圖55為示意性示出與圖42相同的樹脂成型品的製造方法的又一個步驟的截面圖。 FIG. 55 is a cross-sectional view schematically showing still another step of the method of manufacturing a resin molded article similar to that of FIG. 42.

圖56為示意性示出與圖42相同的樹脂成型品的製造 方法的又一個步驟的截面圖。 Fig. 56 is a cross-sectional view schematically showing still another step of the method for manufacturing a resin molded article similar to that shown in Fig. 42.

接著,將舉例對本發明進一步詳細地進行說明。但是,本發明不限於以下說明。 Next, the present invention will be described in further detail by way of examples. However, the present invention is not limited to the following description.

本發明的樹脂成型裝置,例如藉由所述成型品保持機構將所述樹脂成型品按壓至所述成型模,而能夠將所述樹脂成型品保持在所述成型模內。 The resin molding device of the present invention can hold the resin molded product in the molding die by pressing the resin molded product to the molding die by the molded product holding mechanism, for example.

本發明的樹脂成型裝置例如可為,所述成型模具備柱塞,在藉由所述樹脂成型品保持機構將所述樹脂成型品保持在所述成型模內的狀態下,藉由以所述柱塞向所述無用樹脂部施加力而能夠分離所述樹脂成型品和所述無用樹脂部。 In the resin molding apparatus of the present invention, for example, the molding die may include a plunger, and the resin molding may be held in the molding die by the resin molding holding mechanism, and the resin molding may be performed by A plunger can separate the resin molded article and the unnecessary resin portion by applying a force to the unnecessary resin portion.

本發明的樹脂成型裝置例如可為,所述樹脂成型裝置進一步具備第1台板和第2台板,所述成型模具備一個模和另一個模,所述一個模安裝在所述第1台板上,所述另一個模安裝在所述第2台板上。 The resin molding apparatus of the present invention may be, for example, that the resin molding apparatus further includes a first platen and a second platen, the molding die includes one mold and another mold, and the one mold is mounted on the first table. On the board, the other mold is mounted on the second platen.

本發明的樹脂成型裝置例如可為,所述樹脂成型裝置具備升溫段、樹脂成型段、固化段、彈出段,所述成型模相對於所述各段能夠安裝拆卸,同時能夠在所述各段之間移動,所述升溫段將所述成型模升溫, 所述樹脂成型段進行樹脂成型,所述固化段使所述成型模內的樹脂固化,所述彈出段使樹脂成型品從所述成型模脫模。 The resin molding device of the present invention may be, for example, that the resin molding device includes a heating section, a resin molding section, a curing section, and an eject section, and the molding die can be attached to and detached from the sections, and can be installed in the sections Moving between, the heating section heats the molding die, the resin molding section performs resin molding, the curing section solidifies the resin in the molding mold, and the ejection section makes the resin molded product from the molding. Mold release.

本發明的樹脂成型品的製造方法例如可為,使用所述本發明的搬運機構,在所述無用樹脂部分離步驟中,藉由所述樹脂成型品保持機構將樹脂成型品保持在所述成型模內,且在該狀態下,分離所述樹脂成型品和所述無用樹脂部,在所述搬運步驟中,藉由所述吸附機構將所述樹脂成型品吸附並搬運。 The method for manufacturing a resin molded product of the present invention may be, for example, using the conveying mechanism of the present invention, and holding the resin molded product in the molding by the resin molded product holding mechanism in the unnecessary resin part separation step. In the mold, in this state, the resin molded product and the useless resin portion are separated, and in the transporting step, the resin molded product is adsorbed and transported by the adsorption mechanism.

本發明的樹脂成型品的製造方法例如可為,使用所述本發明的樹脂成型裝置,在所述樹脂成型步驟中,藉由所述樹脂成型裝置所具備的所述成型模進行樹脂成型,在所述無用樹脂部分離步驟中,藉由所述樹脂成型品保持機構將樹脂成型品保持在所述成型模內,且在該狀態下,分離所述樹脂成型品和所述無用樹脂部,在所述搬運步驟中,藉由所述吸附機構將所述樹脂成型品吸附並搬運。 The method for manufacturing a resin molded article of the present invention may be, for example, using the resin molding apparatus of the present invention, in the resin molding step, resin molding is performed by the molding die provided in the resin molding apparatus, and In the unnecessary resin part separation step, the resin molded product is held in the molding die by the resin molded product holding mechanism, and in this state, the resin molded product and the unnecessary resin part are separated, and In the conveying step, the resin molded product is adsorbed and transported by the adsorption mechanism.

本發明的樹脂成型品的製造方法例如可為,使用所述本發明的樹脂成型裝置,在所述無用樹脂部分離步驟中,藉由所述樹脂成型品保持機構將所述樹脂成型品按壓至所述成型模,而將所述樹脂成型品保持在所述成型模內。 The method for manufacturing a resin molded article of the present invention may be, for example, using the resin molding apparatus of the present invention, and in the unnecessary resin part separation step, the resin molded article is pressed to the resin molded article holding mechanism by The molding die, and the resin molded article is held in the molding die.

本發明的樹脂成型品的製造方法例如可為,使用所述本發明的樹脂成型裝置,所述樹脂成型裝置的所述成型模具備柱塞,在所述無用樹脂部分離步驟中,在藉由所述樹脂成型品保持機構將所述樹脂成型品保持在所述成型模內的狀態下,藉由使用所述柱塞向所述無用樹脂部施加力而分離所述樹脂成型品和所述無用樹脂部。 The method for manufacturing a resin molded article of the present invention may be, for example, using the resin molding apparatus of the present invention, wherein the molding die of the resin molding apparatus is provided with a plunger, and in the step of separating the useless resin, The resin molded product holding mechanism holds the resin molded product in the mold, and separates the resin molded product from the useless resin by applying a force to the useless resin portion using the plunger. Resin department.

本發明的樹脂成型品的製造方法例如可為,使用所述本發明的樹脂成型裝置,所述樹脂成型裝置進一步具備第1台板和第2台板,所述成型模具備一個模和另一個模,所述一個模安裝在所述第1台板上,所述另一個模安裝在所述第2台板上。 The method for manufacturing a resin molded article of the present invention may be, for example, using the resin molding apparatus of the present invention, the resin molding apparatus further including a first platen and a second platen, and the molding die includes one mold and the other One mold is mounted on the first platen, and the other mold is mounted on the second platen.

本發明的樹脂成型品的製造方法例如可為,所述本發明的樹脂成型裝置具備升溫段、樹脂成型段、固化段、彈出段,所述成型模相對於所述各段能夠安裝拆卸,同時能夠在所述各段之間移動,所述升溫段將所述成型模升溫,所述樹脂成型段進行樹脂成型,所述固化段使所述成型模內的樹脂固化,所述彈出段使樹脂成型品從所述成型模脫模。 The method for manufacturing a resin molded article of the present invention may be, for example, that the resin molding apparatus of the present invention includes a temperature rising section, a resin molding section, a curing section, and an ejecting section, and the molding die can be attached to and detached from the sections, and Capable of moving between the sections, the heating section warms the molding die, the resin molding section performs resin molding, the curing section hardens the resin in the molding die, and the ejection section makes the resin The molded article is released from the molding die.

所述樹脂成型方法進一步包括,樹脂材料容納步驟,在所述成型模的樹脂材料容納部 中容納樹脂材料;成型模升溫步驟,在所述升溫段中將所述成型模升溫;樹脂固化步驟,在所述固化段中使所述成型模內的樹脂固化;和脫模步驟,在所述彈出段中使樹脂成型品從所述成型模脫模,所述樹脂材料容納步驟在所述樹脂成型段中進行。 The resin molding method further includes a resin material accommodating step of accommodating the resin material in a resin material accommodating portion of the molding die; a molding die temperature increasing step of heating the molding die in the temperature increasing section; a resin curing step, Curing the resin in the molding die in the curing section; and a demolding step, in which the resin molded article is demolded from the molding die in the ejecting section, and the resin material accommodating step is performed in the resin molding In the paragraph.

在本發明中,樹脂成型品沒有特別限定,例如可以是僅將樹脂成型的樹脂成型品,也可以是將晶片等部件進行了樹脂封裝的樹脂成型品。在本發明中,樹脂成型品例如可以是電子部件等。 In the present invention, the resin molded product is not particularly limited, and may be, for example, a resin molded product in which only resin is molded, or a resin molded product in which components such as a wafer are resin-encapsulated. In the present invention, the resin molded article may be, for example, an electronic component.

在本發明中,“樹脂成型”或“樹脂封裝”意味著例如樹脂硬化(固化)了的狀態。 In the present invention, "resin molding" or "resin encapsulation" means, for example, a state where the resin is hardened (cured).

在本發明中,作為成型前的樹脂材料和成型後的樹脂,沒有特別限定,例如可以是環氧樹脂和矽酮樹脂等熱固性樹脂,也可以是熱塑性樹脂。並且,還可以是部分包含熱固性樹脂或熱塑性樹脂的複合材料。在本發明中,作為成型前的樹脂材料的形態,例如可舉例顆粒樹脂、流動性樹脂、片狀樹脂、板塊狀樹脂、粉狀樹脂等。在本發明中,所述流動性樹脂只要是具有流動性的樹脂,就沒有特別限定,例如可舉例液狀樹脂、熔融樹脂等。在本發明中,所述液狀是指例如在室溫下為液體,或具有流動性的樹脂。在本發明中,所述熔融樹脂是指例如藉由熔融成為液狀或具有流動性狀態的樹脂。所述熔融樹脂的形態只 要是能夠供給至成型模的型腔和室等的形態,則其他形態也可以。 In the present invention, the resin material before molding and the resin after molding are not particularly limited, and may be, for example, a thermosetting resin such as an epoxy resin and a silicone resin, or a thermoplastic resin. Furthermore, it may be a composite material partially containing a thermosetting resin or a thermoplastic resin. In the present invention, examples of the form of the resin material before molding include particulate resins, flowable resins, sheet resins, plate resins, and powder resins. In the present invention, the fluid resin is not particularly limited as long as it is a fluid resin, and examples thereof include a liquid resin and a molten resin. In the present invention, the liquid state means, for example, a resin that is liquid at room temperature or has fluidity. In the present invention, the molten resin refers to, for example, a resin which becomes liquid or has a fluid state by melting. The form of the molten resin may be any form as long as it can be supplied to a cavity, a chamber, or the like of a molding die.

並且,一般而言,“電子部件”包括進行樹脂封裝前的晶片的情況和已將晶片進行了樹脂封裝的狀態,但在本發明中,在僅稱“電子部件”的情況下,除非另外指明,則表示所述晶片被進行了樹脂封裝的電子部件(作為成品的電子部件)。在本發明中,“晶片”是指進行樹脂封裝前的晶片,具體而言,例如可舉例積體電路(IC)、半導體晶片、電力控制用半導體元件等晶片。在本發明中,進行樹脂封裝前的晶片為了和樹脂封裝後的電子部件進行區分,方便起見稱為“晶片”。但是,本發明的“晶片”只要是進行樹脂封裝前的晶片,則沒有特別限定,也可以不是晶片狀。 In addition, in general, the "electronic component" includes a case where the wafer is resin-sealed and a state where the wafer has been resin-sealed. However, in the present invention, when it is simply referred to as an "electronic component", unless otherwise specified, , It means that the chip is a resin-encapsulated electronic component (a finished electronic component). In the present invention, the "wafer" refers to a wafer before resin encapsulation, and specifically, for example, a chip such as an integrated circuit (IC), a semiconductor wafer, or a semiconductor element for power control can be used. In the present invention, a wafer before resin encapsulation is referred to as a "wafer" for convenience in order to distinguish it from electronic components after resin encapsulation. However, the "wafer" of the present invention is not particularly limited as long as it is a wafer before resin encapsulation, and may not be a wafer shape.

在本發明中,“倒裝晶片”是指,在IC晶片表面部的電極(焊盤)上具有被稱為焊點的鼓包狀凸起電極的IC晶片,或該晶片形態。該晶片向下(面向下)安裝在印刷基板等的配線部分。所述倒裝晶片例如可以用作無引線接合法用的晶片或安裝方式的一種。 In the present invention, the "flip-chip" refers to an IC wafer having a bump-shaped bump electrode called a pad on an electrode (pad) on the surface portion of the IC wafer, or the form of the wafer. This wafer is mounted downward (facing downward) on a wiring portion such as a printed circuit board. The flip chip can be used, for example, as a wafer for a wireless bonding method or as a mounting method.

在本發明中,例如可以將基板的一個面或兩個面進行樹脂成型而製造樹脂成型品。並且,可以將安裝在基板的一個面或兩個面的部件(例如晶片、倒裝晶片等)進行樹脂封裝(樹脂成型)而製造樹脂成型品。在本發明中,作為所述基板(也稱插入物)沒有特別限定,例如可以是引線框、配線基板、晶片、陶瓷基板等。所述基板例如 如上所述,可以是在其一個面或兩個面安裝有晶片的安裝基板。所述晶片的安裝方法沒有特別限定,例如可列舉引線接合、倒裝晶片接合等。在本發明中,可以藉由將所述安裝基板的一個面或兩個面進行樹脂封裝而製造所述晶片被進行了樹脂封裝的電子部件。並且,藉由本發明的樹脂封裝裝置而被樹脂封裝的基板的用途,沒有特別限定,例如可列舉移動通信終端用高頻模組基板、電力控制用模組基板、機器控制用基板等。 In the present invention, for example, one or both sides of the substrate may be resin-molded to produce a resin-molded product. In addition, components (for example, wafers, flip-chips, and the like) mounted on one or both sides of the substrate may be resin-encapsulated (resin-molded) to produce a resin-molded product. In the present invention, the substrate (also referred to as an insert) is not particularly limited, and examples thereof include a lead frame, a wiring substrate, a wafer, and a ceramic substrate. The substrate may be a mounting substrate having a wafer mounted on one or both sides thereof, as described above, for example. The method for mounting the wafer is not particularly limited, and examples thereof include wire bonding and flip-chip bonding. In the present invention, an electronic component in which the wafer is resin-sealed can be manufactured by resin-sealing one or both sides of the mounting substrate. In addition, the use of the resin-encapsulated substrate by the resin-encapsulating device of the present invention is not particularly limited, and examples thereof include high-frequency module substrates for mobile communication terminals, module substrates for power control, and substrates for machine control.

並且,在本發明中,“安裝”包括“載置”或“固定”。進一步,在本發明中,“載置”包括“固定”。 Further, in the present invention, "mounting" includes "mounting" or "fixing". Further, in the present invention, "mounting" includes "fixing".

下文中,將基於圖式對本發明的具體實施例進行說明。為了方便說明,將各附圖適當省略、誇張等而進行示意性地描述。 Hereinafter, specific embodiments of the present invention will be described based on the drawings. For convenience of description, the drawings are appropriately omitted, exaggerated, and the like are schematically described.

【實施例1】 [Example 1]

在本實施例中,對樹脂成型品的搬運機構以及樹脂成型裝置的一例和使用其的樹脂成型品的製造方法的一例進行說明。 In this embodiment, an example of a resin-molded article transport mechanism and a resin-molding device, and an example of a method of manufacturing a resin-molded article using the same will be described.

在圖1的截面圖中,示意性地示出本實施例的樹脂成型裝置的成型模、第1台板以及第2台板的結構。另外,如後述,該樹脂成型裝置進一步具備樹脂成型品搬運機構(未在圖1中示出)。 In the cross-sectional view of FIG. 1, the structures of a molding die, a first platen, and a second platen of the resin molding device of this embodiment are schematically shown. As described later, the resin molding apparatus further includes a resin molded product transport mechanism (not shown in FIG. 1).

如圖1所示,成型模1000具備上模(一個模)100和下模(另一個模)200。上模100和下模200相對。 As shown in FIG. 1, the molding die 1000 includes an upper die (one die) 100 and a lower die (another die) 200. The upper mold 100 and the lower mold 200 are opposed to each other.

上模100以上模型腔塊110為主要構成要素。在上模型腔塊110的模具表面(和下模200相對側的表面)設置有型腔111、流道(樹脂通道)112和殘料部(剩餘樹脂容納部)113。型腔111為多個。互相鄰接的型腔111彼此藉由流道112連通。在上模型腔塊110的兩端各自設置有1個殘料部113。各殘料部113藉由鄰接的型腔111和流道112連通。然後,如後所述,殘料部113能夠容納閉模時未被容納在型腔111內的剩餘樹脂的至少一部分。 The mold cavity block 110 above the upper mold 100 is a main constituent element. A cavity 111, a runner (resin channel) 112, and a residual material portion (residual resin accommodation portion) 113 are provided on a mold surface (surface on the side opposite to the lower mold 200) of the upper mold cavity block 110. The cavity 111 is plural. The mutually adjacent cavities 111 communicate with each other through a flow channel 112. One residual material portion 113 is provided at each end of the upper mold cavity block 110. Each of the remaining material portions 113 communicates with the cavity 111 and the flow path 112 through the adjacent cavity 111. Then, as described later, the residual material portion 113 can accommodate at least a portion of the remaining resin that is not contained in the cavity 111 when the mold is closed.

下模200以下模型腔塊210和下模基塊210a為主要構成要素。下模型腔塊210,在與其模具表面(和上模100相對側的表面)相反側的面上,固定有下模基塊210a。並且,下模型腔塊210具備基板載置部211。基板載置部211設置於下模型腔塊210的模具表面的、與上模100的型腔111相對的位置。並且,下模200進一步具備室(樹脂材料容納部)212和柱塞213。室212設置於下模型腔塊210的模具表面的與上模100的殘料部113相對的位置。柱塞213從室212的內部貫通至與下模型腔塊210的模具表面的相反側。並且,在下模基塊210a內部設置有傳遞驅動源210b。傳遞驅動源210b配置在柱塞213的正下方,並和柱塞213連接。然後,藉由以傳遞驅動源210b驅動柱塞213而使柱塞213能夠相對於室212在成型模1000(上模100和下模200)的開閉方向上移動。 The lower mold cavity block 210 and the lower mold base block 210a are the main constituent elements. The lower mold cavity block 210 has a lower mold base block 210a fixed on a surface opposite to the mold surface (surface opposite to the upper mold 100). The lower mold cavity block 210 includes a substrate mounting portion 211. The substrate mounting portion 211 is provided on the mold surface of the lower mold cavity block 210 at a position opposed to the cavity 111 of the upper mold 100. The lower mold 200 further includes a chamber (resin material storage portion) 212 and a plunger 213. The chamber 212 is provided at a position of the mold surface of the lower mold cavity block 210 facing the residual material portion 113 of the upper mold 100. The plunger 213 penetrates from the inside of the chamber 212 to the side opposite to the mold surface of the lower mold cavity block 210. A transmission driving source 210b is provided inside the lower mold base 210a. The transmission driving source 210 b is disposed directly below the plunger 213 and is connected to the plunger 213. Then, by driving the plunger 213 with the transmission driving source 210b, the plunger 213 can be moved in the opening and closing direction of the molding die 1000 (the upper die 100 and the lower die 200) with respect to the chamber 212.

並且,圖1的樹脂成型裝置進一步具有固定台板(第1台板)1100以及可動台板(第2台板)1200。上模100安 裝在固定台板1100的下表面,下模200安裝在可動台板1200的上表面。 The resin molding apparatus of FIG. 1 further includes a fixed platen (first platen) 1100 and a movable platen (second platen) 1200. The upper mold 100 is mounted on the lower surface of the fixed platen 1100, and the lower mold 200 is mounted on the upper surface of the movable platen 1200.

使用圖1的樹脂成型裝置的樹脂成型品的製造方法例如能夠以圖2~13所示般進行。下文中,將具體說明。 The manufacturing method of the resin molded article using the resin molding apparatus of FIG. 1 can be performed as shown in FIG. 2-13, for example. Hereinafter, it will be specifically described.

首先,如圖2所示,對下模200的基板載置部211供給(載置)基板1,同時向室212供給板塊(樹脂材料)20a。此時,預先藉由加熱器(未圖示)事先加熱下模200以及上模100。另外,板塊20a沒有特別限定,可以是熱塑性樹脂,也可以是熱固性樹脂,例如可使用環氧樹脂和矽酮樹脂等熱固性樹脂。 First, as shown in FIG. 2, the substrate 1 is supplied (mounted) to the substrate mounting portion 211 of the lower mold 200, and a plate (resin material) 20 a is supplied to the chamber 212 at the same time. At this time, the lower mold 200 and the upper mold 100 are heated by a heater (not shown) in advance. The plate 20a is not particularly limited, and may be a thermoplastic resin or a thermosetting resin. For example, a thermosetting resin such as an epoxy resin and a silicone resin can be used.

接著,如圖3~5所示,進行閉模和樹脂成型。 Next, as shown in Figs. 3 to 5, mold closing and resin molding are performed.

首先,如圖3所示,使可動台板1200沿箭頭V1的方向上升。由此,使下模200和可動台板1200一起上升,並如圖所示,使下模200的模具表面和上模100的模具表面接觸。此時,板塊20a藉由下模200的熱量而熔融,並如圖所示,成為熔融樹脂(流動性樹脂)20b。 First, as shown in FIG. 3, the movable platen 1200 is raised in the direction of the arrow V1. Thereby, the lower mold 200 and the movable platen 1200 are raised together, and as shown in the figure, the mold surface of the lower mold 200 and the mold surface of the upper mold 100 are brought into contact. At this time, the plate 20a is melted by the heat of the lower mold 200, and becomes a molten resin (flowable resin) 20b as shown in the figure.

接著,如圖4所示,使用傳遞驅動源210b使柱塞213沿箭頭T1的方向上升。由此,如圖所示,將柱塞213推入(上推)到室212內,而將熔融樹脂20b填充到殘料部113、流道112以及型腔111內。 Next, as shown in FIG. 4, the plunger 213 is raised in the direction of the arrow T1 using the transmission drive source 210b. Thereby, as shown in the figure, the plunger 213 is pushed (upwardly) into the chamber 212, and the molten resin 20b is filled into the residual material portion 113, the flow path 112, and the cavity 111.

之後,如圖5所示,藉由上模100以及下模200的熱量,使殘料部113、流道112和型腔111內的流動性樹脂20b固化成為固化樹脂。在圖5中,以符號20d表示流道112 以及型腔111內的固化樹脂(以下僅稱“固化樹脂”),以符號20d表示殘料部113內的固化樹脂(以下稱為“剩餘樹脂”或“無用樹脂部”)。由此,形成基板1的一個表面被固化樹脂20進行了樹脂成型的樹脂成型品(封裝完畢基板)1b。然後,在流動性樹脂20b固化成為固化樹脂20和剩餘樹脂(無用樹脂部)20d之後,如圖5所示,使樹脂成型品1b和無用樹脂部20d從上模100脫模。該從上模100脫模的方法沒有特別限定,例如可以使用彈出銷(未圖示)等。所述彈出銷例如可設置在上模型腔塊110內部。然後,使可動台板1200沿圖5的箭頭W1的方向下降。由此,如圖所示,上模100和下模200被開模的同時,載置在下模200的樹脂成型品1b和無用樹脂部20d,與下模200和可動台板1200一起下降。 Thereafter, as shown in FIG. 5, the flowable resin 20 b in the residual material portion 113, the flow path 112, and the cavity 111 is cured into a cured resin by the heat of the upper mold 100 and the lower mold 200. In FIG. 5, the cured resin in the runner 112 and the cavity 111 (hereinafter simply referred to as “cured resin”) is denoted by the symbol 20 d, and the cured resin (hereinafter referred to as “residual resin”) in the residue portion 113 is denoted by the symbol 20 d Or "unwanted resin section"). As a result, a resin molded product (packaged substrate) 1 b on which one surface of the substrate 1 is resin-molded with the cured resin 20 is formed. Then, after the flowable resin 20b is cured into the cured resin 20 and the surplus resin (unwanted resin portion) 20d, the resin molded article 1b and the unwanted resin portion 20d are released from the upper mold 100 as shown in FIG. 5. The method of demolding from the upper mold 100 is not particularly limited, and for example, a pop-up pin (not shown) can be used. The ejection pin may be disposed inside the upper mold cavity block 110, for example. Then, the movable platen 1200 is lowered in the direction of the arrow W1 in FIG. 5. Accordingly, as shown in the figure, the resin mold 1b and the unnecessary resin portion 20d placed on the lower mold 200 are lowered together with the lower mold 200 and the movable platen 1200 while the upper mold 100 and the lower mold 200 are opened.

接著,如圖6~13所示,卸載(向成型模外部搬運)樹脂成型品1b。 Next, as shown in FIGS. 6 to 13, the resin molded product 1 b is unloaded (conveyed to the outside of the mold).

首先,從圖5的狀態開始,如圖6和圖7所示,使卸料機300沿箭頭a1方向(從成型模1000的外部朝向上模100和下模200之間的方向)移動,並使卸料機300進入上模100和下模200之間。卸料機300相當於本發明的“樹脂成型品的搬運機構”。卸料機300如圖所示,具備用於吸附固化樹脂20以及剩餘樹脂20d的吸盤301和封裝完畢基板保持構件(樹脂成型品保持構件)302。吸盤301相當於“樹脂成型品吸附機構”,封裝完畢基板保持構件(樹脂成型品保持構件)302相當於“樹脂成型品保持機構”。 First, starting from the state of FIG. 5, as shown in FIGS. 6 and 7, the unloader 300 is moved in the direction of the arrow a1 (from the outside of the molding die 1000 toward the direction between the upper die 100 and the lower die 200), and The unloader 300 is caused to enter between the upper mold 100 and the lower mold 200. The unloader 300 corresponds to the "resin conveying mechanism" of the present invention. As shown in the figure, the unloader 300 includes a chuck 301 for adsorbing the cured resin 20 and the remaining resin 20d, and a packaged substrate holding member (resin molded product holding member) 302. The chuck 301 corresponds to a “resin molded product holding mechanism”, and the packaged substrate holding member (resin molded product holding member) 302 corresponds to a “resin molded product holding mechanism”.

接著,如圖8所示,使樹脂成型品保持構件302沿箭頭c1的方向下降,並保持樹脂成型品(封裝完畢基板)1b。如圖所示,樹脂成型品保持構件302藉由從上按壓固化樹脂20當中在流道112內固化的部分而將樹脂成型品1b按壓至下模200並保持。另外,例如代替固化樹脂20當中在流道112內固化的部分,也可以使用樹脂成型品保持構件302從上按壓型腔111內固化的部分。 Next, as shown in FIG. 8, the resin molded product holding member 302 is lowered in the direction of the arrow c1, and the resin molded product (packaged substrate) 1 b is held. As shown in the figure, the resin molded product holding member 302 presses and cures the resin molded product 1 b to the lower mold 200 by pressing a portion of the cured resin 20 cured in the flow channel 112 from above. In addition, for example, instead of the portion cured in the flow path 112 among the cured resins 20, a portion where the resin molded product holding member 302 is pressed from the top and cured in the cavity 111 may be used.

接著,如圖9所示,藉由傳遞驅動源210b使柱塞213沿箭頭T2的方向上升。由此,藉由柱塞213對無用樹脂部20d施加向上的力,而上推無用樹脂部20d。由此,如圖所示,分離無用樹脂部20d和樹脂成型品(封裝完畢基板)1b。 Next, as shown in FIG. 9, the plunger 213 is raised in the direction of the arrow T2 by the transmission drive source 210 b. Thereby, an upward force is applied to the useless resin part 20d by the plunger 213, and the useless resin part 20d is pushed up. Thereby, as shown in the figure, the unnecessary resin portion 20d and the resin molded product (packaged substrate) 1b are separated.

之後,如圖10所示,藉由傳遞驅動源210使柱塞213沿箭頭U1方向再次下降。由此,使從樹脂成型品1b分離的無用樹脂部20d被再次載置於下模200。 Thereafter, as shown in FIG. 10, the plunger 213 is lowered again in the direction of the arrow U1 by the transmission drive source 210. Thereby, the unnecessary resin portion 20d separated from the resin molded product 1b is placed on the lower mold 200 again.

接著,如圖11所示,使吸盤301沿箭頭d1的方向下降,並吸附樹脂成型品(封裝完畢基板)1b的固化樹脂20和從樹脂成型品1b分離的無用樹脂部20d。 Next, as shown in FIG. 11, the suction cup 301 is lowered in the direction of the arrow d1, and the cured resin 20 of the resin molded product (the packaged substrate) 1b and the unnecessary resin portion 20d separated from the resin molded product 1b are adsorbed.

進一步,如圖12所示,使吸盤301吸附著樹脂成型品1b以及剩餘樹脂20d並沿箭頭e1的方向上升。由此,如圖所示,使樹脂成型品1b以及剩餘樹脂20d從下模200的模具表面脫模。 Further, as shown in FIG. 12, the sucker 301 is caused to adsorb the resin molded product 1 b and the remaining resin 20 d and rise in the direction of the arrow e1. Thereby, as shown in the figure, the resin molded product 1 b and the surplus resin 20 d are released from the mold surface of the lower mold 200.

然後,如圖13所示,使卸料機300和樹脂成型品1b以及剩餘樹脂20d一起沿箭頭b1的方向(朝向成型模 1000之外)移動,並從成型模1000內退出。之後,從卸料機300分離樹脂成型品1b以及剩餘樹脂20d(未圖示)。如此,能夠製造樹脂成型品1b。 Then, as shown in FIG. 13, the unloader 300 is moved together with the resin molded product 1 b and the remaining resin 20 d in the direction of the arrow b1 (outward of the molding die 1000), and exits from the molding die 1000. After that, the resin molded product 1b and the remaining resin 20d (not shown) are separated from the unloader 300. In this way, a resin molded product 1b can be manufactured.

以上,在圖1~13中示出了本發明的樹脂成型品的搬運機構、樹脂成型裝置以及使用其的樹脂成型方法的例子。但是,本發明的樹脂成型品的搬機構、樹脂成型裝置以及樹脂成型方法不限於圖1~13的例子,而能夠進行各種變形。例如在圖1~13中,僅使用了卸料機300作為樹脂成型品搬運機構。但是,本發明不受此限定,能夠進行各種變形。 The examples of the resin-molded article transport mechanism, the resin-molding apparatus, and the resin-molding method using the same according to the present invention have been shown in FIGS. 1 to 13. However, the resin-molded article carrying mechanism, the resin-molding apparatus, and the resin-molding method of the present invention are not limited to the examples shown in FIGS. 1 to 13 and can be variously modified. For example, in FIGS. 1 to 13, only the unloader 300 is used as the resin molded product conveyance mechanism. However, the present invention is not limited to this, and various modifications can be made.

例如,在本發明中,樹脂成型品的搬運機構(卸料機)可兼具基板搬運機構(裝料機)的功能。具體而言,例如作為圖2般在基板載置部211上設置(載置)基板1的方法,也可使基板1吸附至卸料機300的吸盤301,並搬運至基板載置部211的位置。並且,本發明不限於此,例如可以使用和卸料機300不同的裝料機(基板搬運機構)將基板1搬運至基板載置部211的位置。 For example, in the present invention, the resin conveying mechanism (unloader) may serve as a substrate conveying mechanism (loader). Specifically, for example, as a method of setting (mounting) the substrate 1 on the substrate mounting portion 211 as shown in FIG. 2, the substrate 1 may be sucked onto the chuck 301 of the unloader 300 and transferred to the position. In addition, the present invention is not limited to this, and for example, the substrate 1 may be transferred to the position of the substrate mounting portion 211 using a loader (substrate transfer mechanism) different from the unloader 300.

另外,在本發明中,成型模不限於圖1~13的成型模1000的結構,能夠使用任意成型模。例如,在圖1~13的成型模1000中,雖然示出了在下模200的基板載置部211上設置(載置)基板1的例子,不過本發明不限於此,也可以在上模設置基板。另外,在圖1~13的成型模1000中,雖然僅上模具備型腔111,不過本發明不限於此,也可以僅下模具備型腔,也可以上模及下模雙方均具備型腔。 In the present invention, the molding die is not limited to the configuration of the molding die 1000 shown in FIGS. 1 to 13, and any molding die can be used. For example, in the molding die 1000 shown in FIGS. 1 to 13, although the example in which the substrate 1 is provided (mounted) on the substrate mounting portion 211 of the lower die 200 is shown, the present invention is not limited to this, and may be provided on the upper die. Substrate. In addition, in the molding die 1000 of FIGS. 1 to 13, although only the upper die is provided with the cavity 111, the present invention is not limited to this. The lower die may be provided only with the cavity, and both the upper and lower die may be provided with the cavity. .

根據本發明,例如如在本實施例中使用圖1~13進行說明般,能夠使用成型模和卸料機(樹脂成型品的搬運機構),在成型模的內部從樹脂成型品去除無用樹脂部。因此,在樹脂成型裝置中,無需在成型模的外部額外設置無用樹脂部去除部。由此,能夠抑制樹脂成型裝置的佔用區域(佔用面積)增大以及費用增加。並且,根據本發明,例如如在本實施例中使用圖1~13進行說明般,無需在成型模外部的其他段(區域)中進行無用樹脂部的去除(澆口除去)步驟。由此,由於能夠縮減以及簡化樹脂成型品的製造方法的步驟,因此能夠提高樹脂成型品的製造效率以及抑制費用。 According to the present invention, for example, as described with reference to FIGS. 1 to 13 in this embodiment, it is possible to use a molding die and an unloader (resin conveying mechanism) to remove an unnecessary resin portion from the resin molded article inside the molding die. . Therefore, in the resin molding apparatus, it is not necessary to additionally provide an unnecessary resin portion removing portion outside the molding die. This makes it possible to suppress an increase in the occupied area (occupied area) of the resin molding apparatus and increase in cost. Furthermore, according to the present invention, for example, as described in this embodiment using FIGS. 1 to 13, it is not necessary to perform a step of removing unnecessary resin portions (gate removal) in other sections (areas) outside the molding die. As a result, the steps of the method for manufacturing a resin molded product can be reduced and simplified, so that the manufacturing efficiency of the resin molded product can be improved and the cost can be suppressed.

【實施例2】 [Example 2]

接著,對本發明的其他實施例進行說明。 Next, other embodiments of the present invention will be described.

在本實施例中,就樹脂成型裝置具備與樹脂成型段不同的段,並且能夠向該不同的段內搬運成型模的例子進行說明。在本實施例中,在所述不同的段中,分離成型後的樹脂成型品和樹脂成型後的無用樹脂部。 In this embodiment, an example will be described in which the resin molding apparatus is provided with a segment different from the resin molding segment, and the mold can be conveyed into the different segment. In this embodiment, in the different stages, the resin molded product after the molding and the unnecessary resin portion after the resin molding are separated.

更具體地,如後述圖30中所說明般,本實施例的樹脂成型裝置具備升溫段S1、樹脂成型段S2、固化段S3、彈出段S4。然後,在彈出段S4中,使用本發明的樹脂成型品的搬運機構在所述成型模內保持成型後的樹脂成型品,並且在該狀態下,分離所述樹脂成型品和樹脂成型後的無用樹脂部。 More specifically, as described later in FIG. 30, the resin molding apparatus of this embodiment includes a temperature rising section S1, a resin molding section S2, a curing section S3, and an ejecting section S4. Then, in the ejection section S4, the resin molded product carrying mechanism of the present invention is used to hold the molded resin molded product in the molding die, and in this state, the resin molded product and the uselessness after the resin molding are separated. Resin department.

首先,使用圖14~19,就所述樹脂成型段的一 例及使用其的樹脂成型品的製造方法的一例進行說明。如前所述,在本實施例中,為了在所述彈出段內分離樹脂成型品和樹脂成型後的無用樹脂部,而在圖14~19的樹脂成型段內,不分離樹脂成型品和樹脂成型後的無用樹脂部。 First, an example of the resin molding section and an example of a method for manufacturing a resin molded product using the same will be described with reference to Figs. 14 to 19. As described above, in this embodiment, in order to separate the resin molded product and the unnecessary resin part after the resin molding in the ejection section, the resin molded product and the resin are not separated in the resin molding section of FIGS. 14 to 19. Useless resin part after molding.

在圖14的截面圖中,示意性地示出本實施例的所述樹脂成型段的結構。如圖所示,該樹脂成型段以成型模1000和閉模部220為主要構成要素。成型模1000具備上模(一個模)100和下模(另一個模)200。上模100和下模200相對。 In the cross-sectional view of FIG. 14, the structure of the resin molding section of this embodiment is schematically shown. As shown in the figure, the resin molding section mainly includes a molding die 1000 and a mold closing section 220. The molding die 1000 includes an upper die (one die) 100 and a lower die (another die) 200. The upper mold 100 and the lower mold 200 are opposed to each other.

上模100具備上模型腔塊110和上模基塊120。就上模型腔塊110而言,在與模具表面(與下模200相對側的表面)相反側的表面上,固定有上模基塊120。在上模型腔塊110的模具表面(與下模200相對側的面)上設置有型腔111、流道112(樹脂通道)、殘料部(剩餘樹脂容納部)113。型腔111為多個。互相鄰接的型腔111彼此藉由流道112連通。在上模型腔塊110的兩端各自設置有1個殘料部113。各殘料部113藉由鄰接的型腔111和流道112連通。然後,如後所述,殘料部113能夠容納閉模時未被容納在型腔111中的剩餘樹脂的至少一部分。並且,上模100進一步具備調整構件(板塊高度調整構件)114、彈性支撐調整構件114的調整構件用彈性構件115。調整構件114,其一部分配置在殘料部113的內部,同時由調整構件用彈性構件115固定在上模基塊120上。調整構件114能夠藉由調整構件用彈性構件115的伸縮,向成型模1000的開閉方向移動。然後, 能夠藉由調整構件114的移動從而調整殘料部113的容量,來調整型腔111內的樹脂壓。 The upper mold 100 includes an upper mold cavity block 110 and an upper mold base block 120. In the upper mold cavity block 110, the upper mold base block 120 is fixed on a surface opposite to the mold surface (the surface on the side opposite to the lower mold 200). On the mold surface of the upper mold cavity block 110 (the surface opposite to the lower mold 200), a cavity 111, a flow channel 112 (resin channel), and a residual material portion (residual resin storage portion) 113 are provided. The cavity 111 is plural. The mutually adjacent cavities 111 communicate with each other through a flow channel 112. One residual material portion 113 is provided at each end of the upper mold cavity block 110. Each of the remaining material portions 113 communicates with the cavity 111 and the flow path 112 through the adjacent cavity 111. Then, as will be described later, the residual material portion 113 can accommodate at least a portion of the remaining resin that is not contained in the cavity 111 when the mold is closed. The upper mold 100 further includes an adjustment member (plate height adjustment member) 114 and an elastic member 115 for the adjustment member that elastically supports the adjustment member 114. The adjustment member 114 is partially disposed inside the residual material portion 113, and is fixed to the upper mold base block 120 by the adjustment member elastic member 115. The adjustment member 114 can be moved in the opening and closing direction of the molding die 1000 by expansion and contraction of the adjustment member elastic member 115. Then, the resin pressure in the cavity 111 can be adjusted by adjusting the capacity of the residual material portion 113 by the movement of the adjustment member 114.

容納在室212中的樹脂材料(板塊)通常具有高度(重量)的偏差。因此,每次成型時,供給到型腔111以及殘料部113內的樹脂量有差異。所以,為了在樹脂成型時調整注入樹脂材料部分(型腔111以及殘料部113)的體積以及注入壓(樹脂壓),如上所述,使調整構件(板塊高度調整構件)114可動。並且,殘料部113可以是連通殘料部(左右的殘料部113直接連接)的結構。藉由像這樣連通殘料部113而能夠抑制由於樹脂材料(板塊)高度不同而局部樹脂材料的注入壓(注入速度)出現偏差。 The resin material (plate) contained in the chamber 212 usually has a deviation in height (weight). Therefore, the amount of resin supplied into the cavity 111 and the residual material portion 113 differs every time the molding is performed. Therefore, in order to adjust the volume and injection pressure (resin pressure) of the resin material injection portion (cavity 111 and residual material portion 113) during resin molding, the adjustment member (plate height adjustment member) 114 is movable as described above. In addition, the residual material portion 113 may have a structure that communicates with the residual material portion (the left and right residual material portions 113 are directly connected). By communicating the residual material portion 113 in this manner, it is possible to suppress variations in the injection pressure (injection speed) of the local resin material due to the difference in the height of the resin material (plate).

下模200以下模型腔塊210為主要構成要素。 The mold cavity block 210 below the lower mold 200 is a main constituent element.

下模型腔塊210具備基板載置部211。基板載置部211設置於下模型腔塊210的模具表面(與上模100相對側的表面)的與上模100的型腔111相對的位置。並且,下模200進一步具備室(樹脂材料容納部)212以及柱塞213。室212設置於下模型腔塊210的模具表面的與上模100的殘料部113相對的位置。柱塞213從室212的內部貫通至下模型腔塊210的模具表面的相反側。柱塞213相對於室212,能夠沿成型模1000(上模100以及下模200)的開閉方向移動。 The lower mold cavity block 210 includes a substrate mounting portion 211. The substrate mounting portion 211 is provided at a position of the mold surface (surface on the side opposite to the upper mold 100) of the lower mold cavity block 210 facing the cavity 111 of the upper mold 100. The lower mold 200 further includes a chamber (resin material storage portion) 212 and a plunger 213. The chamber 212 is provided at a position of the mold surface of the lower mold cavity block 210 facing the residual material portion 113 of the upper mold 100. The plunger 213 penetrates from the inside of the chamber 212 to the opposite side of the mold surface of the lower mold cavity block 210. The plunger 213 is movable with respect to the chamber 212 in the opening / closing direction of the molding die 1000 (the upper die 100 and the lower die 200).

另外,在圖14中,柱塞213進一步具備環(環狀構件)214以及凸緣部215。環214設置在柱塞213外周的與下模型腔塊210接觸的位置的一部分(圖中為2處)上。更具體而言,在柱塞213外周的2處設置凹槽,並在所述凹槽上 安裝環214,以環214的2點支持來保持柱塞213垂直。凸緣部215設置在柱塞213的下端部。 In addition, in FIG. 14, the plunger 213 further includes a ring (annular member) 214 and a flange portion 215. The ring 214 is provided on a part of the outer periphery of the plunger 213 (two places in the figure) at a position in contact with the lower mold cavity block 210. More specifically, a groove is provided at two places on the outer periphery of the plunger 213, and a ring 214 is mounted on the groove, and the plunger 213 is held vertically by two points of the ring 214 support. The flange portion 215 is provided at a lower end portion of the plunger 213.

如圖14般,藉由以環214支撐柱塞213而能夠抑制柱塞213自身的磨損,並藉由更換環214來應對磨損。環214沒有特別限定,例如可使用聚四氟乙烯等氟樹脂、工程塑料等。並且,柱塞213的形成材料也沒有特別限定。例如可使用不易磨損的超鋼合金作為柱塞213的形成材料。但是,由於能夠以環214支撐並抑制磨損,因此可代替超鋼合金而使用鋼作為柱塞213的材質。在形成柱塞213的超綱合金含鈷的情況下,清潔片材有可能與鈷產生化學反應而成為腐蝕柱塞213的原因。但是,如果將不含鈷的鋼作為柱塞213的形成材料使用的話,能夠抑制或防止該種由清潔片材造成的柱塞213的腐蝕。並且,如果代替超鋼合金而使用鋼的話,則能夠減少柱塞213自身的成本。 As shown in FIG. 14, wear of the plunger 213 can be suppressed by supporting the plunger 213 with the ring 214, and wear can be handled by replacing the ring 214. The ring 214 is not particularly limited, and for example, a fluororesin such as polytetrafluoroethylene, an engineering plastic, or the like can be used. The material for forming the plunger 213 is also not particularly limited. As a material for forming the plunger 213, for example, an ultra-steel alloy that is not easily worn can be used. However, since the ring 214 can support and suppress wear, steel can be used as the material of the plunger 213 instead of the super steel alloy. In the case where the superalloy alloy forming the plunger 213 contains cobalt, the cleaning sheet may chemically react with cobalt and cause the plunger 213 to be corroded. However, if cobalt-free steel is used as a material for forming the plunger 213, the corrosion of the plunger 213 caused by the cleaning sheet can be suppressed or prevented. In addition, if steel is used instead of the super steel alloy, the cost of the plunger 213 itself can be reduced.

閉模部220具備保持架A塊221、保持架B塊222、下模載置塊(成型模安裝構件)223以及彈性構件224。由保持架A塊221以及保持架B塊222構成保持架塊。彈性構件224配置在下模載置塊223的、與上模100相對面的相反側。下模載置塊223藉由彈性構件224被彈性支撐在保持架B塊222的上表面。下模載置塊223的下部構成周邊部突出的凸緣部。保持架A塊221固定在保持架B塊222的上表面的周邊部。並且,下模載置塊223的凸緣部的外側面以及上表面周邊部、彈性構件224的外側面被保持架A塊221所包圍。如此一來,下模載置塊223以及彈性構件224被保持架 塊(保持架A塊221以及保持架B塊222)所保持著。下模載置塊223的凸緣部以外的部分從保持架A塊221的上表面突出。下模200在與上模100相對面的相反側上,安裝於作為閉模部220一部分的下模載置塊(成型模安裝構件)223上。然後,如後所述,藉由使閉模部220沿成型模1000(上模100以及下模200)的閉模方向移動,而關閉成型模1000,同時將柱塞213推向上模100的方向,並用柱塞213將容納於樹脂材料容納部212的樹脂材料擠出至成型模1000的模具表面。如後所述,在閉模時,由於使用保持架A塊221按壓柱塞213,因此保持架A塊221相當於“柱塞按壓構件”。 The mold closing section 220 includes a holder A block 221, a holder B block 222, a lower mold mounting block (molding die mounting member) 223, and an elastic member 224. The holder block A 221 and the holder B block 222 constitute a holder block. The elastic member 224 is disposed on the opposite side of the lower mold mounting block 223 from the surface facing the upper mold 100. The lower mold mounting block 223 is elastically supported on the upper surface of the holder B block 222 by the elastic member 224. The lower portion of the lower die mounting block 223 constitutes a flange portion protruding from the peripheral portion. The holder A block 221 is fixed to a peripheral portion of the upper surface of the holder B block 222. The outer surface of the flange portion and the upper surface peripheral portion of the lower mold mounting block 223 and the outer surface of the elastic member 224 are surrounded by the holder A block 221. In this way, the lower mold mounting block 223 and the elastic member 224 are held by the holder blocks (the holder A block 221 and the holder B block 222). Portions other than the flange portion of the lower mold mounting block 223 protrude from the upper surface of the holder A block 221. The lower mold 200 is mounted on a lower mold mounting block (mold mold mounting member) 223 as a part of the mold closing portion 220 on the side opposite to the surface opposite to the upper mold 100. Then, as described later, the mold closing part 220 is moved in the mold closing direction of the molding die 1000 (the upper die 100 and the lower die 200) to close the molding die 1000 and simultaneously push the plunger 213 toward the upper die 100. Then, the resin material accommodated in the resin material accommodating portion 212 is extruded to the mold surface of the mold 1000 using the plunger 213. As described later, when the mold is closed, the holder A block 221 is used to press the plunger 213, so the holder A block 221 corresponds to a “plunger pressing member”.

並且,圖14的樹脂成型裝置進一步具備固定台板(第1台板)1100以及可動台板(第2台板)1200。上模100安裝在固定台板1100的下表面,閉模部220安裝於在保持架B塊222的下表面上的可動台板1200的上表面。 The resin molding apparatus of FIG. 14 further includes a fixed platen (first platen) 1100 and a movable platen (second platen) 1200. The upper mold 100 is mounted on the lower surface of the fixed platen 1100, and the mold closing portion 220 is mounted on the upper surface of the movable platen 1200 on the lower surface of the holder B block 222.

使用圖14的樹脂成型裝置的樹脂成型品的製造方法例如能夠如圖15~19所示般進行。下文中,將具體說明。 A method for manufacturing a resin molded article using the resin molding apparatus of FIG. 14 can be performed, for example, as shown in FIGS. 15 to 19. Hereinafter, it will be specifically described.

首先,如圖15所示,對下模200的基板載置部211供給(載置)基板1,同時對室212供給板塊(樹脂材料)20a。此時,預先使用加熱器(未圖示)事先加熱下模200以及上模100。另外,板塊20a沒有特別限定,可以是熱塑性樹脂也可以是熱固性樹脂,例如可使用環氧樹脂和矽酮樹脂等熱固性樹脂。 First, as shown in FIG. 15, the substrate 1 is supplied (mounted) to the substrate mounting portion 211 of the lower mold 200, and a plate (resin material) 20 a is supplied to the chamber 212 at the same time. At this time, the lower mold 200 and the upper mold 100 are heated in advance using a heater (not shown). The plate 20a is not particularly limited, and may be a thermoplastic resin or a thermosetting resin. For example, a thermosetting resin such as an epoxy resin and a silicone resin can be used.

接著,如圖16~19所示,進行閉模以及樹脂成 型。 Next, as shown in Figs. 16 to 19, mold closing and resin molding are performed.

首先,如圖16所示,使可動台板1200沿箭頭X1的方向上升。由此,使閉模部220和下模200與可動台板1200一起上升,並如圖所示,使下模200的模具表面和上模100的模具表面接觸。此時,板塊20a因下模200的熱量而熔融,而如圖所示,成為熔融樹脂(流動性樹脂)20b。 First, as shown in FIG. 16, the movable platen 1200 is raised in the direction of the arrow X1. Thereby, the mold closing part 220 and the lower mold 200 are raised together with the movable platen 1200, and as shown in the figure, the mold surface of the lower mold 200 and the mold surface of the upper mold 100 are brought into contact. At this time, the plate 20a is melted by the heat of the lower mold 200, and as shown in the figure, it becomes a molten resin (fluid resin) 20b.

接著,如圖17所示,使可動台板1200沿箭頭X2的方向進一步上升。由此,使閉模部220和下模200與可動台板1200一起上升,而如圖所示,使柱塞213和保持架A塊(保持架塊)221接觸。 Next, as shown in FIG. 17, the movable platen 1200 is further raised in the direction of the arrow X2. Thereby, the mold closing part 220 and the lower mold 200 are raised with the movable platen 1200, and as shown in the figure, the plunger 213 and the holder A block (holder block) 221 are brought into contact.

接著,如圖18所示,使可動台板1200沿箭頭X3的方向進一步上升。此時,如圖所示,藉由彈性構件224收縮,下模載置塊223以及下模200維持原位,保持架塊(保持架A塊221以及保持架B塊222)上升。由此,如圖所示,使用保持架A塊(保持架塊)221將柱塞213推入(上推)室212內,使熔融樹脂20b填充到殘料部113、流道112和型腔111中。 Next, as shown in FIG. 18, the movable platen 1200 is further raised in the direction of the arrow X3. At this time, as shown in the figure, as the elastic member 224 contracts, the lower mold mounting block 223 and the lower mold 200 are maintained in their original positions, and the holder blocks (the holder A block 221 and the holder B block 222) are raised. As a result, as shown in the figure, the plunger 213 is pushed into (upwardly) the chamber 212 using the holder A block (cage block) 221, and the molten resin 20b is filled in the residual material portion 113, the flow path 112, and the cavity. 111 in.

之後,如圖19所示,藉由上模100和下模200的熱量,殘料部113、流道112和型腔111內的流動性樹脂20b固化成為固化樹脂。在圖19中,以符號20表示流道112和型腔111內的固化樹脂(以下僅稱“固化樹脂”),以符號20d表示殘料部113內的固化樹脂(以下稱為“剩餘樹脂”或“無用樹脂部”)。由此,形成基板1的一個表面被固化樹脂20進行了樹脂成型的樹脂成型品(封裝完畢基板)1b。然 後,在流動性樹脂20b固化成為固化樹脂20以及剩餘樹脂(無用樹脂部)20d之後,如圖19所示,使可動台板1200沿箭頭Y1的方向下降。此時,如圖所示,施加在彈性構件224上的向上的力被解放,彈性構件224再次伸長。由此,下模載置塊223以及下模200維持原位,保持架塊(保持架A塊221以及保持架B塊222)下降。 Thereafter, as shown in FIG. 19, the fluid resin 20b in the residual material portion 113, the flow path 112, and the cavity 111 is cured into a cured resin by the heat of the upper mold 100 and the lower mold 200. In FIG. 19, the cured resin in the runner 112 and the cavity 111 (hereinafter simply referred to as “cured resin”) is denoted by the symbol 20, and the cured resin (hereinafter referred to as “residual resin”) in the residue portion 113 is denoted by the symbol 20 d. Or "unwanted resin section"). As a result, a resin molded product (packaged substrate) 1 b on which one surface of the substrate 1 is resin-molded with the cured resin 20 is formed. Then, after the flowable resin 20b is cured into the cured resin 20 and the remaining resin (unwanted resin portion) 20d, as shown in FIG. 19, the movable platen 1200 is lowered in the direction of the arrow Y1. At this time, as shown in the figure, the upward force applied to the elastic member 224 is released, and the elastic member 224 is extended again. Thereby, the lower mold mounting block 223 and the lower mold 200 are maintained in place, and the holder blocks (the holder A block 221 and the holder B block 222) are lowered.

之後,使用成型模用搬運機構(未圖示)將成型模1000和其內部的樹脂成型品1b以及剩餘樹脂20d一起搬運到樹脂成型段的外部。如此一來,能夠製造樹脂成型品1b。然後,如後所述,在與樹脂成型段不同的段中分離成型後的樹脂成型品和樹脂成型後的無用樹脂部。 After that, the molding die 1000 is transported to the outside of the resin molding section together with the resin molded product 1b and the remaining resin 20d inside the molding die 1000 using a mold transfer mechanism (not shown). In this way, a resin molded product 1b can be manufactured. Then, as described later, the resin molded product after molding and the unnecessary resin part after resin molding are separated in a segment different from the resin molding segment.

另外,作為變形例,在圖20~27中示出在進行圖14~19的樹脂成型品的製造方法之後,在樹脂成型段內將樹脂成型品1b進行脫模(從成型模取出),並卸載(向成型模外部搬運)的例子。 In addition, as a modification, FIGS. 20 to 27 show that after the resin molded product manufacturing method of FIGS. 14 to 19 is performed, the resin molded product 1b is demolded (taken out of the mold) in the resin molding stage, and Example of unloading (conveyance to the outside of the mold).

首先,如圖20所示,使可動台板1200進一步沿箭頭Y2的方向下降。由此,如圖所示,閉模部220以及下模200和可動台板一起下降,上模100和下模200被開模。由此,如圖所示,樹脂成型品1b(基板1以及固化樹脂20)和剩餘樹脂20d與下模200一起下降,而從上模100脫模。另外,例如可以利用調整構件用彈性構件115的復原力(伸長力)引起的、對調整構件114的剩餘樹脂20d的按壓,而使樹脂成型品1b以及剩餘樹脂20d從上模100脫模。 First, as shown in FIG. 20, the movable platen 1200 is further lowered in the direction of the arrow Y2. Thereby, as shown in the figure, the mold closing section 220 and the lower mold 200 are lowered together with the movable platen, and the upper mold 100 and the lower mold 200 are opened. As a result, as shown in the figure, the resin molded product 1 b (the substrate 1 and the cured resin 20) and the remaining resin 20 d are lowered together with the lower mold 200 and released from the upper mold 100. In addition, the resin molded article 1b and the remaining resin 20d may be released from the upper mold 100 by pressing the remaining resin 20d of the adjusting member 114 due to the restoring force (elongation force) of the elastic member 115 for the adjusting member.

之後,如圖21所示,藉由將可動台板1200沿 箭頭Y3的方向下降,使下模200進一步下降。在該狀態下,如圖22和圖23所示,使卸料機300沿箭頭A1的方向(從成型模1000的外部朝向上模100和下模200之間的方向)移動,並使卸料機300進入上模100和下模200之間。卸料機300如圖所示,具備用於吸附固化樹脂20以及剩餘樹脂20d的吸盤301。在圖20~27的例子中,由於在樹脂成型段內沒有分離樹脂成型品1b和剩餘樹脂(無用樹脂部)20d,因此可以不具備封裝完畢基板保持構件(樹脂成型品保持構件)302。但是,作為代替,也可以和實施例1同樣使用具備吸盤301、封裝完畢基板保持構件(樹脂成型品保持構件)302的卸料機300。 Thereafter, as shown in Fig. 21, the lower die 200 is further lowered by lowering the movable platen 1200 in the direction of arrow Y3. In this state, as shown in FIGS. 22 and 23, the unloader 300 is moved in the direction of the arrow A1 (from the outside of the molding die 1000 to the direction between the upper die 100 and the lower die 200), and the unloading is performed. The machine 300 enters between the upper mold 100 and the lower mold 200. As shown in the figure, the unloader 300 includes a suction cup 301 for adsorbing the cured resin 20 and the remaining resin 20d. In the examples of FIGS. 20 to 27, since the resin molded product 1 b and the surplus resin (unwanted resin portion) 20 d are not separated in the resin molding stage, the packaged substrate holding member (resin molded product holding member) 302 may not be provided. However, instead of the same, the unloader 300 including the suction cup 301 and the packaged substrate holding member (resin molded product holding member) 302 may be used in the same manner as in the first embodiment.

接著,如圖24所示,使吸盤301沿箭頭B1的方向下降,並吸附樹脂成型品(封裝完畢基板)1b的固化樹脂20和連接於固化樹脂20的剩餘樹脂(無用樹脂部)20d。 Next, as shown in FIG. 24, the chuck 301 is lowered in the direction of the arrow B1, and the cured resin 20 of the resin molded product (packaged substrate) 1b and the remaining resin (unwanted resin portion) 20d connected to the cured resin 20 are adsorbed.

進一步,如圖25所示,使吸盤301吸附著樹脂成型品1b和剩餘樹脂20d沿箭頭C1的方向上升。由此,如圖所示,使樹脂成型品1b和剩餘樹脂20d從下模200的模具表面脫模。此時,在剩餘樹脂20d和柱塞213未分離的情況下,柱塞213和剩餘樹脂20d一起上升。但是,如圖所示,藉由柱塞213的凸緣部215卡在下模型腔塊210上,柱塞213無法上升到規定高度以上的方式構成。於是,如圖26所示,如果使剩餘樹脂20d和吸盤301一起沿箭頭C2的方向進一步上升,則剩餘樹脂20d和柱塞213會被分離。 Further, as shown in FIG. 25, the sucker 301 is made to adsorb the resin molded article 1b and the remaining resin 20d in the direction of the arrow C1. Thereby, as shown in the figure, the resin molded product 1 b and the surplus resin 20 d are released from the mold surface of the lower mold 200. At this time, when the remaining resin 20d and the plunger 213 are not separated, the plunger 213 and the remaining resin 20d are raised together. However, as shown in the figure, since the flange portion 215 of the plunger 213 is caught on the lower mold cavity block 210, the plunger 213 cannot be raised to a predetermined height or more. Then, as shown in FIG. 26, if the remaining resin 20d and the suction cup 301 are further raised in the direction of the arrow C2, the remaining resin 20d and the plunger 213 are separated.

然後,如圖27所示,使卸料機300和樹脂成型 品1b以及剩餘樹脂20d一起沿箭頭D1的方向(朝向成型模1000之外)移動,並從成型模1000內退出。之後,使樹脂成型品1b以及剩餘樹脂20d從卸料機300分離,同時將剩餘樹脂20d從樹脂成型品1b分離(未圖示)。 Then, as shown in FIG. 27, the unloader 300 is moved together with the resin molded product 1b and the remaining resin 20d in the direction of the arrow D1 (outward of the molding die 1000), and is withdrawn from the molding die 1000. After that, the resin molded product 1b and the surplus resin 20d are separated from the unloader 300, and the surplus resin 20d is separated from the resin molded product 1b (not shown).

另外,樹脂成型段以及使用其的樹脂成型方法不限於圖14~27的例子,能夠進行各種變形。例如,代替圖14~27的樹脂成型段,可以如實施例1(圖1~13)般,將在其內部能夠分離樹脂成型品1b和剩餘樹脂(無用樹脂部)20d的樹脂成型裝置用於樹脂成型段。並且,例如,如圖28A~C所示的樹脂成型裝置般,能夠代替彈性構件224而將具備液壓機構228的樹脂成型裝置用於樹脂成型段。就圖28A~C的樹脂成型裝置而言,除了代替彈性構件224而閉模部220具備液壓機構228以外,和圖14~27的樹脂成型段(樹脂成型裝置)相同。使用圖28A~C的樹脂成型裝置的樹脂成型品的製造方法例如能夠和圖15~19或圖15~27同樣進行。圖28A為對下模200供給基板1以及板塊(樹脂材料)20a的狀態圖,相當於圖15的步驟。圖28B為使板塊20a熔融成熔融樹脂(流動性樹脂)20b,同時使可動台板1200、閉模部220以及下模200上升,使下模200和上模100接觸的狀態的圖。圖28B相當於圖16的步驟。圖28C為示出將熔融樹脂(流動性樹脂)使用柱塞213注入到型腔111、流道112以及殘料部113內的狀態的圖,相當於圖18的步驟。 In addition, the resin molding stage and the resin molding method using the same are not limited to the examples of FIGS. 14 to 27, and can be variously modified. For example, instead of the resin molding section of FIGS. 14 to 27, a resin molding apparatus capable of separating the resin molded product 1b and the remaining resin (unwanted resin portion) 20d can be used as in Example 1 (FIGS. 1 to 13). Resin molding section. In addition, for example, as in the resin molding apparatus shown in FIGS. 28A to 28C, a resin molding apparatus including a hydraulic mechanism 228 can be used in the resin molding section instead of the elastic member 224. The resin molding apparatus of FIGS. 28A to 28C is the same as the resin molding section (resin molding apparatus) of FIGS. 14 to 27 except that the mold closing section 220 includes a hydraulic mechanism 228 instead of the elastic member 224. The manufacturing method of the resin molded product using the resin molding apparatus of FIGS. 28A to 28C can be performed in the same manner as in FIGS. 15 to 19 or 15 to 27, for example. FIG. 28A is a state diagram of the substrate 1 and the plate (resin material) 20a being supplied to the lower mold 200, which corresponds to the step of FIG. 15. FIG. 28B is a view showing a state where the plate 20a is melted into a molten resin (fluid resin) 20b while the movable platen 1200, the mold closing portion 220, and the lower mold 200 are raised to bring the lower mold 200 and the upper mold 100 into contact. FIG. 28B corresponds to the step of FIG. 16. FIG. 28C is a view showing a state where molten resin (fluid resin) is injected into the cavity 111, the flow path 112, and the residue portion 113 using the plunger 213, and corresponds to the step of FIG. 18.

並且,例如在圖14~27的樹脂成型段的成型模1000中,下模200例如可以具備圖29(a)~(c)所示的結構。圖 29(a)將下模200的結構、閉模部220以及可動台板1200一起示出。圖29(a)的下模200除了下模型腔塊210具備貫通孔(殘留樹脂漏孔)218以外,和圖14~27的下模200相同。如圖所示,貫通孔218與室212連通,並從室212貫通至下模型腔塊210的與上模100的相對面的相反側。藉由該結構,能夠在樹脂成型後,使室212內的殘留樹脂從貫通孔218下落並排出。 In addition, for example, in the molding die 1000 of the resin molding stage of FIGS. 14 to 27, the lower die 200 may have a structure shown in FIGS. 29 (a) to (c), for example. FIG. 29 (a) shows the structure of the lower mold 200, the mold closing portion 220, and the movable platen 1200 together. The lower mold 200 of FIG. 29A is the same as the lower mold 200 of FIGS. 14 to 27 except that the lower mold cavity block 210 includes a through hole (residual resin leakage hole) 218. As shown in the figure, the through hole 218 communicates with the chamber 212 and penetrates from the chamber 212 to the opposite side of the lower mold cavity block 210 from the opposite surface of the upper mold 100. With this structure, after the resin is molded, the residual resin in the chamber 212 can be dropped and discharged from the through hole 218.

另外,圖29(b)為圖29(a)的柱塞213和貫通孔(殘留樹脂漏孔)218的一部分的放大圖。如圖所示,貫通孔218為多個,並以包圍柱塞213的方式配置。藉由僅在柱塞213周圍的一部分上設置貫通孔218,而柱塞213的上端部(凸緣形狀部分)卡在未設置貫通孔218的部分,柱塞213不會下落。 29 (b) is an enlarged view of a part of the plunger 213 and the through hole (residual resin leakage hole) 218 of FIG. 29 (a). As shown in the figure, there are a plurality of through holes 218 and they are arranged so as to surround the plunger 213. By providing the through hole 218 only in a part of the periphery of the plunger 213 and the upper end portion (flange-shaped portion) of the plunger 213 is caught in a portion where the through hole 218 is not provided, the plunger 213 does not fall.

並且,圖29(c)為示出柱塞213變形例的示意圖。該圖僅放大示出柱塞213的下部。在圖14~27中,如圖29(c)左側的圖所示,示出了柱塞213的下端(和保持架A塊221接觸的部分)平坦的例子。但是,柱塞213可如圖29(c)右側的圖所示,藉由為下端為帶圓形的凸狀部213a,而儘量減小(例如僅凸狀部213a前端的幾乎1個點)與保持架A塊221接觸的面積。這樣做,例如能夠減少對保持架A塊221的上表面以及柱塞213的下表面的平面性(平坦性)的依賴,而使柱塞213更加沿重力方向垂直上升。 29 (c) is a schematic diagram showing a modified example of the plunger 213. This figure shows only the lower portion of the plunger 213 in an enlarged manner. In Figs. 14 to 27, as shown in the diagram on the left side of Fig. 29 (c), an example in which the lower end of the plunger 213 (the portion in contact with the holder A block 221) is flat is shown. However, as shown in the figure on the right side of FIG. 29 (c), the plunger 213 can be made as small as possible by making the lower end a convex portion 213a with a circular shape (for example, only one point on the front end of the convex portion 213a). The area in contact with the cage A block 221. By doing so, for example, the dependence on the flatness (flatness) of the upper surface of the cage A block 221 and the lower surface of the plunger 213 can be reduced, and the plunger 213 can rise vertically in the direction of gravity.

根據如在本實施例中示出的樹脂成型段,例如能夠簡化傳遞成型用的樹脂成型裝裝置的結構。具體而 言,例如如在實施例中所示,利用壓機(閉模部)的夾緊力使柱塞上下移動而進行樹脂注入。像這樣,由於閉模機構兼作傳遞驅動機構(對成型模的模具表面注入樹脂材料的機構),而無需設置和閉模機構不同的傳遞驅動機構就能夠進行樹脂成型,因此能夠簡化樹脂成型裝置的結構。 According to the resin molding stage as shown in this embodiment, for example, the structure of a resin molding apparatus for transfer molding can be simplified. Specifically, for example, as shown in the embodiment, the plunger is moved up and down by the clamping force of the press (die closing portion) to perform resin injection. In this way, the mold closing mechanism doubles as a transmission driving mechanism (a mechanism for injecting a resin material into the mold surface of the molding die), and it is possible to perform resin molding without providing a transmission driving mechanism different from the mold closing mechanism, thereby simplifying the resin molding apparatus. structure.

以上,對樹脂成型段進行了說明。在本實施例中,如上所述,樹脂成型裝置具備升溫段、樹脂成型段、固化段、彈出段。在圖30的示意圖中示出本實施例的樹脂成型裝置以及使用其的樹脂成型品的製造方法的概略。如圖所示,該樹脂成型裝置具備升溫段S1、樹脂成型段S2、固化段S3、彈出段S4。成型模1000能夠相對於S1~S4各段進行安裝拆卸,同時能夠在S1~S4各段之間移動。升溫段S1將成型模1000升溫。樹脂成型段S2具備成型模1000和閉模部,並進行樹脂成型。固化段S3使成型模1000內的樹脂固化。彈出段S4使樹脂成型品1b從成型模1000脫模。成型模1000沒有特別限定,例如可與實施例1(圖1~13)或本實施例的圖14~29的成型模1000相同。並且,所述閉模部沒有特別限定,例如可與圖14~29的閉模部220相同。 The resin molding section has been described above. In this embodiment, as described above, the resin molding apparatus includes a temperature rising section, a resin molding section, a curing section, and an ejecting section. The schematic diagram of FIG. 30 shows the outline of the resin molding apparatus of the present embodiment and a method of manufacturing a resin molded product using the same. As shown in the figure, this resin molding apparatus includes a temperature rising section S1, a resin molding section S2, a curing section S3, and an ejecting section S4. The molding die 1000 can be mounted and disassembled with respect to each of the sections S1 to S4, and can be moved between the various sections of the S1 to S4. The temperature rise section S1 raises the temperature of the mold 1000. The resin molding section S2 includes a molding die 1000 and a mold closing section, and performs resin molding. The curing section S3 cures the resin in the molding die 1000. The ejecting section S4 releases the resin molded product 1b from the mold 1000. The molding die 1000 is not particularly limited, and may be the same as the molding die 1000 of Embodiment 1 (FIGS. 1 to 13) or FIGS. 14 to 29 of this embodiment, for example. The mold closing section is not particularly limited, and may be the same as the mold closing section 220 of FIGS. 14 to 29, for example.

在實施樹脂成型品的製造方法的情況下,例如,如圖30所示,可以使成型模1000在S1~S4各段之間循環。具體而言,例如,如圖所示,使成型1000按照升溫段S1、樹脂成型段S2、固化段S3及彈出段S4的順序移動並製造樹脂成型品1b。然後,在彈出段S4回收樹脂成型品1b之後,將成型模1000返回到升溫段S1,並再次實施樹脂成型 品的製造方法。使成型模1000移動(搬運)的機構以及方法沒有特別限定。例如可使用機械臂、轉檯等公知技術搬運成型模1000。 When the method for manufacturing a resin molded product is implemented, for example, as shown in FIG. 30, the molding die 1000 may be circulated between the stages S1 to S4. Specifically, for example, as shown in the figure, the molding 1000 is moved in the order of the temperature rising section S1, the resin molding section S2, the curing section S3, and the ejecting section S4 to manufacture a resin molded product 1b. Then, after the resin molded product 1b is recovered in the ejecting section S4, the molding die 1000 is returned to the temperature increasing section S1, and the method for manufacturing a resin molded product is performed again. The mechanism and method for moving (conveying) the molding die 1000 are not particularly limited. For example, the molding die 1000 can be transferred using a known technique such as a robot arm and a turntable.

另外,在前述的圖14~27中示出的樹脂成型品的製造方中,樹脂成型裝置的1個段兼備升溫段、樹脂成型段、固化段以及彈出段的所有功能。也就是說,在圖14~27的例子中,具備成型模1000和閉模部的樹脂成型段(圖14)如圖15~27所示,兼備升溫成型模1000的升溫段的功能、使成型模1000內的樹脂固化的固化段的功能以及使樹脂成型品1b從成型模1000脫模的彈出段的功能。 In addition, in the manufacturing method of the resin molded article shown in FIGS. 14 to 27 described above, one stage of the resin molding apparatus has all functions of a temperature rising stage, a resin molding stage, a curing stage, and an ejection stage. In other words, in the example of FIGS. 14 to 27, the resin molding section (FIG. 14) including the molding die 1000 and the mold closing section is provided with the function of the temperature rising section of the temperature rising molding die 1000, as shown in FIGS. 15 to 27. The function of the curing section for curing the resin in the mold 1000 and the function of the ejection section for releasing the resin molded product 1 b from the molding mold 1000.

對此,如圖30所示,藉由在樹脂成型裝置上設置與樹脂成型段不同的段,並使其具備與樹脂成型段不同的功能,例如能夠獲得以下效果。例如藉由在與成型段不同的所述彈出段中進行樹脂成型品從成型模的脫模,而可以不在成型模內設置彈出機構(例如銷、彈出桿等)。也就是說,能夠簡化成型模的結構。並且,例如藉由在與成型段不同的固化段中加熱成型模並使樹脂固化,在此期間,能夠在所述成型段中進行不同的樹脂成型。如此一來,由於沒必要等待樹脂在所述成型段內到固化為止的時間,會提高所述成型段的運轉效率,因此有望能夠縮短成型週期。 On the other hand, as shown in FIG. 30, by providing the resin molding apparatus with a segment different from a resin molding segment and having a function different from a resin molding segment, the following effects can be obtained, for example. For example, by ejecting the resin molded product from the molding die in the ejection section different from the molding section, an ejection mechanism (for example, a pin, an ejection lever, etc.) may not be provided in the molding mold. That is, the structure of a molding die can be simplified. Further, for example, by heating the molding die in a curing section different from the molding section and curing the resin, during this period, different resin molding can be performed in the molding section. In this way, since it is not necessary to wait for the time until the resin is cured in the molding section, the operation efficiency of the molding section will be improved, so it is expected to shorten the molding cycle.

另外,在所述固化段中,例如可以使成型模加熱升溫,並以該溫度使所述成型模中的樹脂固化。在該情況下,所述固化段使成型模升溫的功能和所述升溫段共 通。因此,在該情況下,所述升溫段能夠兼作所述固化段。 In addition, in the curing section, for example, the molding die may be heated and heated, and the resin in the molding die may be cured at the temperature. In this case, the function of the curing section to raise the temperature of the molding die is the same as that of the heating section. Therefore, in this case, the temperature increasing section can also serve as the curing section.

使用在圖30的示意圖中示出的樹脂成型裝置的樹脂成型品的製造方法,具體而言,例如能夠如圖31~33所示般進行。 The manufacturing method of the resin molded article using the resin molding apparatus shown in the schematic diagram of FIG. 30 can be performed specifically, for example as shown in FIGS. 31-33.

首先,如圖31(a)~(d)的步驟截面圖所示,在升溫段內使成型模升溫。如圖所示,該升溫段具備固定台板1110和可動台板1210。固定台板1110具備加熱器1111,可動台板1210具備加熱器1211。加熱器1111以及加熱器1211沒有特別限定,不例如可以是筒式加熱器等。可動台板1210配置在固定台板1110的下方,使用固定台板1110和可動台板1210能夠夾持成型模1000。 First, as shown in the step cross-sectional views in (a) to (d) of FIG. 31, the molding die is heated in the temperature rising section. As shown in the figure, the heating stage includes a fixed platen 1110 and a movable platen 1210. The fixed platen 1110 includes a heater 1111, and the movable platen 1210 includes a heater 1211. The heater 1111 and the heater 1211 are not particularly limited, and may not be, for example, a cartridge heater or the like. The movable platen 1210 is arranged below the fixed platen 1110, and the molding die 1000 can be clamped using the fixed platen 1110 and the movable platen 1210.

首先,如圖31(a)所示,準備成型模1000。成型1000可與圖14~27的成型模1000相同。並且,在後述的圖32和圖33中,可以使用相同的成型模1000。一方面,預先用加熱器1111和加熱器1211使固定台板1110和可動台板1210事先升溫。接著,如圖31(b)所示,使成型模1000搬運到預先升溫的升溫段內,並載置固定於可動台板1210上。將成型模1000固定於可動台板1210的方法沒有特別限定,例如可以使用靜電吸盤、機械吸盤等。接著,如圖31(c)所示,使可動台板1210上升,用固定台板1110和可動台板1210夾住(夾持)成型模1000,並升溫成型模1000。在成型模的升溫完成後,如圖31(d)所示,使可動台板1210下降。之後,將成型模1000從升溫段取出,並移動至成型段。 First, as shown in FIG. 31 (a), a molding die 1000 is prepared. The molding 1000 may be the same as the molding die 1000 of FIGS. 14 to 27. In addition, in FIGS. 32 and 33 described later, the same molding die 1000 can be used. On the one hand, the fixed platen 1110 and the movable platen 1210 are heated in advance with the heater 1111 and the heater 1211 in advance. Next, as shown in FIG. 31 (b), the molding die 1000 is transported to a temperature-raising section in which the temperature is increased in advance, and is placed and fixed on the movable platen 1210. The method of fixing the molding die 1000 to the movable platen 1210 is not particularly limited, and for example, an electrostatic chuck, a mechanical chuck, or the like can be used. Next, as shown in FIG. 31 (c), the movable platen 1210 is raised, the molding die 1000 is clamped (clamped) between the fixed platen 1110 and the movable platen 1210, and the molding die 1000 is heated. After the temperature rise of the molding die is completed, as shown in FIG. 31 (d), the movable platen 1210 is lowered. After that, the molding die 1000 is taken out from the temperature rising section and moved to the molding section.

首先,例如升溫段能夠代替圖31(a)~(d)的結 構,為圖31(e)的結構。圖31(e)的升溫段如圖所示,除了不具備固定台板1110以及加熱器1111、代替可動台板1210具備升溫台1212以外,和圖31(a)~(d)的升溫段相同。升溫台1212和可動台板1210同樣具備加熱器1211。該情況下,代替圖31(b)~(d)的步驟,如圖31(e)所示,在預先用加熱器1211升溫的升溫台1212上載置並固定成型模1000。然後,在使成型模1000升溫後,從升溫段取出,並移動至成型段。 First, for example, the heating section can replace the structure shown in Figs. 31 (a) to (d) and has the structure shown in Fig. 31 (e). As shown in FIG. 31 (e), the heating stage is the same as the heating stage of FIGS. 31 (a) to (d), except that the fixed platen 1110 and the heater 1111 are not provided instead of the movable platen 1210. . The warming plate 1212 and the movable platen 1210 also include a heater 1211. In this case, instead of the steps of FIGS. 31 (b) to (d), as shown in FIG. 31 (e), the molding die 1000 is placed and fixed on a temperature riser 1212 that has been heated in advance by a heater 1211. Then, after the molding die 1000 is heated, it is taken out from the temperature rising section and moved to the molding section.

接著,在樹脂成型段中進行樹脂成型。該樹脂成型段的樹脂成型例如能以圖14~19所說明般進行,在圖32(a)~(h)的步驟截面圖中示出不同的例子。在圖32(a)~(h)中,和圖14~27相同的構件以相同的符號示出。如圖32(a)~(h)所示,該樹脂成型段具備閉模部220、固定台板(第1台板)1100以及可動台板(第2台板)1200。閉模部220、固定台板1100以及可動台板1200可與圖14~27相同。並且,例如可在閉模部220、固定台板1100、可動台板1200等上與升溫段同樣設置加熱器(例如筒式加熱器)加熱成型模1000。 Next, resin molding is performed in a resin molding section. The resin molding in this resin molding stage can be performed, for example, as described with reference to Figs. 14 to 19, and different examples are shown in the sectional views of the steps in Figs. 32 (a) to (h). In FIGS. 32 (a) to (h), the same components as those in FIGS. 14 to 27 are shown with the same symbols. As shown in FIGS. 32 (a) to (h), the resin molding section includes a mold closing section 220, a fixed platen (first platen) 1100, and a movable platen (second platen) 1200. The mold closing section 220, the fixed platen 1100, and the movable platen 1200 may be the same as those in FIGS. 14 to 27. In addition, for example, a heater (for example, a cartridge heater) can be provided on the mold closing section 220, the fixed platen 1100, the movable platen 1200, and the like to heat the molding die 1000 in the same manner as in the temperature rise section.

首先,如圖32(a)所示,將成型模1000從升溫段搬運到樹脂成型段內,並載置於閉模部220上。 First, as shown in FIG. 32 (a), the molding die 1000 is transported from the temperature rising section to the resin molding section, and is placed on the mold closing section 220.

接著,如圖32(b)所示,使可動台板1200上升並將上模100接觸固定台板1100。在該狀態下,將上模100固定於固定台板1100,同時將下模200固定於閉模部220。此時,固定上模100以及下模200的方法沒有特別限定,例如能夠使用靜電吸盤、機械吸盤等。 Next, as shown in FIG. 32 (b), the movable platen 1200 is raised and the upper mold 100 contacts the fixed platen 1100. In this state, the upper mold 100 is fixed to the fixed platen 1100, and the lower mold 200 is fixed to the mold closing portion 220. At this time, the method of fixing the upper mold 100 and the lower mold 200 is not particularly limited, and for example, an electrostatic chuck, a mechanical chuck, or the like can be used.

接著,如圖32(c)所示,對下模200供給基板以 及板塊(樹脂材料)。該步驟例如可與圖15相同。 Next, as shown in FIG. 32 (c), a substrate and a plate (resin material) are supplied to the lower mold 200. This step may be the same as, for example, FIG. 15.

接著,使板塊(樹脂材料)熔融成熔融樹脂(流動性樹脂)。之後,如圖32(d)所示,藉由閉模部220的上升而進行閉模,同時推入(上升)下模200的柱塞,並對成型模1000的模具表面供給所述熔融樹脂(流動性樹脂)。該步驟例如可與圖16~18相同。 Next, the plate (resin material) is melted into a molten resin (fluid resin). Thereafter, as shown in FIG. 32 (d), the mold is closed by raising the mold closing section 220, and the plunger of the lower mold 200 is pushed in (up), and the molten resin is supplied to the mold surface of the molding mold 1000. (Fluid resin). This step may be the same as, for example, FIGS. 16 to 18.

接著,如圖32(e)~(h)所示,進行開模並取出成型模1000。在這些步驟中,和圖19~27不同,不進行所述熔融樹脂(流動性樹脂)的固化、樹脂成型品的脫模以及樹脂成型品向成型模外的搬運。這是因為所述熔融樹脂(流動性樹脂)的固化在後述的固化段中進行,樹脂成型品的脫模以及樹脂成型品向成型模外的搬運在後述的彈出段中進行。 Next, as shown in FIGS. 32 (e) to (h), the mold is opened and the molding die 1000 is taken out. In these steps, unlike FIGs. 19 to 27, curing of the molten resin (fluid resin), demolding of the resin molded product, and transportation of the resin molded product out of the mold are not performed. This is because the curing of the molten resin (flowable resin) is performed in a curing section described later, and the release of the resin molded product and the transfer of the resin molded product out of the molding mold are performed in an ejection section described later.

首先,如圖32(e)所示,使可動台板1200和閉模部220以及成型模1000一起下降。由此,如圖所示,將上模100從固定台板1100分離。 First, as shown in FIG. 32 (e), the movable platen 1200 is lowered together with the mold closing portion 220 and the mold 1000. Thereby, as shown in the figure, the upper mold 100 is separated from the fixed platen 1100.

接著,如圖32(f)所示,使可動台板1200和閉模部220以及成型模1000進一步一起下降。 Next, as shown in FIG. 32 (f), the movable platen 1200, the mold closing portion 220, and the molding die 1000 are further lowered together.

之後,如圖32(g)~(h)所示,使成型模1000移動至成型段外,並搬運到固化段(未圖示)內。 Thereafter, as shown in Figs. 32 (g) to (h), the molding die 1000 is moved outside the molding section, and is transferred into the curing section (not shown).

之後,使成型模1000在固化段(未圖示)內加熱升溫,並使成型模1000內的流動性樹脂固化。由此,製造樹脂成型品。另外,所述固化段例如可以具備和圖31(a)~(e)所示的升溫段相同的結構。並且,例如圖31(a)~(e)所示的 升溫段可以兼作所述固化段。藉由所述固化段使成型模1000內的流動性樹脂固化的步驟沒有特別限定,例如除了在成型模1000內填充流動性樹脂以外,可以進行和圖31(a)~(e)相同的步驟。 Thereafter, the molding die 1000 is heated and heated in a curing section (not shown), and the flowable resin in the molding die 1000 is cured. Thereby, a resin molded article is manufactured. The curing section may have, for example, the same structure as the temperature increasing section shown in FIGS. 31 (a) to (e). In addition, for example, the temperature increasing section shown in Figs. 31 (a) to (e) may double as the curing section. The step of curing the flowable resin in the molding die 1000 by the curing section is not particularly limited. For example, except that the flowable resin is filled in the molding die 1000, the same steps as those shown in FIGS. 31 (a) to (e) may be performed. .

再之後,如圖33(a)~(f)的步驟截面圖所示,在彈出段內使樹脂成型品從成型模1000脫模。如圖所示,該彈出段具備保持架230、可動台板1120以及可動台板1220。可動台板1120以及可動台板1220都能夠上下移動。可動台板1120能夠在其下表面固定上模100。可動台板1220能夠在其上表面載置並固定保持架230。保持架230具備保持架A塊231、保持架B塊232、彈出板載置塊233、彈性構件234、彈出板235以及彈出桿236。保持架A塊231、保持架B塊232、彈出板載置塊233以及彈性構件234各自具有和圖14~27的閉模部220的保持架A塊221、保持架B塊222、下模載置塊(成型模安裝構件)223以及彈性構件224相同的結構。彈出板235固定在彈出板載置塊233的上表面。彈出板235具備彈出桿236,且彈出板235的上表面能夠和下模200的下表面整體接觸。彈出桿236配置在對應下模200的柱塞的位置,並能夠在彈出板235內上下移動。如後所述,藉由使保持架A塊231上升而能夠將彈出桿236的一部分從彈出板235的上表面推出。然後,藉由這樣做,而能夠藉由彈出桿236將下模200的柱塞的一部分從下模200的上表面推出,而能夠將固化完畢的剩餘樹脂從樹脂成型品分離。 After that, as shown in the step cross-sectional views in FIGS. 33 (a) to (f), the resin molded article is released from the molding die 1000 in the ejection section. As shown in the figure, the eject section includes a holder 230, a movable platen 1120, and a movable platen 1220. Both the movable platen 1120 and the movable platen 1220 can move up and down. The movable platen 1120 can fix the upper mold 100 on the lower surface thereof. The movable platen 1220 can mount and fix the holder 230 on the upper surface thereof. The holder 230 includes a holder A block 231, a holder B block 232, an ejection plate mounting block 233, an elastic member 234, an ejection plate 235, and an ejection lever 236. The holder A block 231, the holder B block 232, the pop-up plate mounting block 233, and the elastic member 234 each have a holder A block 221, a holder B block 222, and a lower mold carrier that are the same as those of the mold closing section 220 of Figs. The block (mold mounting member) 223 and the elastic member 224 have the same structure. The ejection plate 235 is fixed to the upper surface of the ejection plate mounting block 233. The ejection plate 235 includes an ejection lever 236, and the upper surface of the ejection plate 235 can be in overall contact with the lower surface of the lower mold 200. The ejection lever 236 is arranged at a position corresponding to the plunger of the lower die 200 and can move up and down in the ejection plate 235. As described later, a part of the ejection lever 236 can be pushed out from the upper surface of the ejection plate 235 by raising the holder A block 231. By doing so, a part of the plunger of the lower mold 200 can be pushed out from the upper surface of the lower mold 200 by the ejection lever 236, and the cured residual resin can be separated from the resin molded product.

圖33(a)~(f)所示的樹脂成型品的脫模步驟能 夠如下進行。 The demolding step of the resin molded article shown in Figs. 33 (a) to (f) can be performed as follows.

首先,如圖33(a)所示,將成型模1000載置並固定在彈出板235上。固定方法沒有特別限定,例如可以使用靜電吸盤、機械吸盤等。此時,例如能夠藉由對成型模1000施加振動、熱量(升溫造成的熱膨脹)等而輔助脫模。 First, as shown in FIG. 33 (a), the molding die 1000 is placed and fixed on the ejection plate 235. The fixing method is not particularly limited, and for example, an electrostatic chuck, a mechanical chuck, or the like can be used. In this case, for example, the mold release can be assisted by applying vibration, heat (thermal expansion due to temperature rise), and the like to the mold 1000.

接著,如圖33(b)所示,使可動台板1220和保持架230以及成型模1000一起上升,將上模100固定於可動台板1120的下表面。固定方法沒有特別限定,例如可以使用靜電吸盤、機械吸盤等。 Next, as shown in FIG. 33 (b), the movable platen 1220 is raised together with the holder 230 and the molding die 1000, and the upper die 100 is fixed to the lower surface of the movable platen 1120. The fixing method is not particularly limited, and for example, an electrostatic chuck, a mechanical chuck, or the like can be used.

接著,如圖33(c)所示,使可動台板1120和上模100一起上升,同時使可動台板1220與保持架230和下模200一起下降。由此,將上模100和下模200進行開模。在該狀態下,如圖所示,使卸料機300進入上模100和下模200之間。如圖所示,該卸料機300和實施例1的圖6~13的卸料機300同樣具備用於吸附固化樹脂20以及剩餘樹脂20d的吸盤301和封裝完畢基板保持構件(樹脂成型品保持構件)302。吸盤301相當於“樹脂成型品吸附機構”,封裝完畢基板保持構件(樹脂成型品保持構件)302相當於“樹脂成型品保持機構”。 Next, as shown in FIG. 33 (c), the movable platen 1120 is raised together with the upper die 100, and the movable platen 1220 is lowered together with the holder 230 and the lower die 200. Thereby, the upper mold 100 and the lower mold 200 are opened. In this state, as shown in the figure, the unloader 300 is caused to enter between the upper mold 100 and the lower mold 200. As shown in the figure, the unloader 300 is similar to the unloader 300 of FIGS. 6 to 13 in Example 1 and includes a suction cup 301 for adsorbing the cured resin 20 and the remaining resin 20d, and a package holding member (resin molding holding Component) 302. The chuck 301 corresponds to a “resin molded product holding mechanism”, and the packaged substrate holding member (resin molded product holding member) 302 corresponds to a “resin molded product holding mechanism”.

接著,如圖33(d)所示,使可動台板1120與上模100一起下降,同時使可動台板1220與保持架230和下模200一起上升。由此,如圖所示,將卸料機使用上模100和下模200夾持並固定。進一步,如圖所示,使樹脂成型品保持構件302沿箭頭I1的方向下降,並保持樹脂成型品(封裝 完畢基板)1b。如圖所示,樹脂成型品保持構件302藉由從上按壓固化樹脂20中、在流道112內固化的部分而保持樹脂成型品1b。另外,例如可以代替固化樹脂20中、在流道112內固化的部分,而使用樹脂成型品保持構件302從上按壓在型腔111內固化的部分。進一步,使可動台板1220與保持架230和下模200一起上升。此時,如圖所示,藉由保持架A塊231的上升,彈出桿236的一部分從彈出板235的上表面推出。由此,藉由彈出桿236將下模200的柱塞的一部分從下模200的上表面推出,而如圖所示,使固化完畢的剩餘樹脂從樹脂成型品分離。 Next, as shown in FIG. 33 (d), the movable platen 1120 is lowered together with the upper mold 100, and the movable platen 1220 is raised together with the holder 230 and the lower mold 200. Thereby, as shown in the figure, the unloader is clamped and fixed using the upper mold 100 and the lower mold 200. Further, as shown in the figure, the resin molded product holding member 302 is lowered in the direction of the arrow I1, and the resin molded product (packaged substrate) 1b is held. As shown in the figure, the resin molded product holding member 302 holds the resin molded product 1 b by pressing a portion of the cured resin 20 that is cured in the flow path 112 from above. In addition, for example, instead of the portion cured in the runner 112 in the cured resin 20, a portion molded in the cavity 111 and pressed and cured by the resin molded product holding member 302 from above may be used. Further, the movable platen 1220 is raised together with the holder 230 and the lower mold 200. At this time, as shown in the figure, as the holder A block 231 is raised, a part of the ejection lever 236 is pushed out from the upper surface of the ejection plate 235. Thereby, a part of the plunger of the lower mold 200 is pushed out from the upper surface of the lower mold 200 by the ejection lever 236, and as shown in the figure, the cured residual resin is separated from the resin molded product.

之後,如圖33(e)所示,藉由卸料機的吸盤吸附樹脂成型品(封裝完畢基板)和從樹脂成型品分離完畢的剩餘樹脂。之後將卸料機與樹脂成型品和剩餘樹脂一起向彈出段的外部搬運(未圖示)。這些步驟例如可以按照圖24~27進行。 Thereafter, as shown in FIG. 33 (e), the resin molded product (the packaged substrate) and the remaining resin separated from the resin molded product are adsorbed by the suction cup of the unloader. After that, the unloader is conveyed to the outside of the ejection section (not shown) together with the resin molded product and the remaining resin. These steps can be performed according to, for example, FIGS. 24 to 27.

進一步,如圖33(f)所示,將成型模1000從可動台板1120分離。之後,將成型模1000從保持架230分離,並搬運至彈出段的外部。該成型模1000例如能夠再次搬運至圖31的升溫段內,並再次進行圖31~33中所說明的樹脂成型品的製造方法。 Further, as shown in FIG. 33 (f), the molding die 1000 is separated from the movable platen 1120. After that, the molding die 1000 is separated from the holder 230 and conveyed to the outside of the ejection section. This molding die 1000 can be transported again to the temperature-raising stage of FIG. 31, and the manufacturing method of the resin molded article demonstrated in FIGS. 31-33 can be performed again, for example.

另外,在本發明中,樹脂成型裝置的成型模的結構不限於圖1~33所示的成型模1000。在圖34~41中示出成型模的幾個變形例。 In addition, in the present invention, the structure of the molding die of the resin molding apparatus is not limited to the molding die 1000 shown in FIGS. 1 to 33. Several modifications of the molding die are shown in FIGS. 34 to 41.

圖34的截面圖示意性地示出成型模的變形 例。如圖所示,就該成型模1000而言,除了下模200具備剩餘樹脂分離構件(剩餘樹脂分離塊)216、剩餘樹脂分離構件用彈性構件217以及下模基塊210B,不具備環214以外,和圖14~33所示的成型模1000相同。在該圖中,下模型腔塊210固定在下模基塊210B的上表面。柱塞213貫通下模基塊210B。剩餘樹脂分離構件216以包圍室212的外周以及下表面的方式配置,且藉由剩餘樹脂分離構件用彈性構件217彈性支撐在下模基塊210B上。剩餘樹脂分離構件216能夠藉由剩餘樹脂分離構件用彈性構件217的伸縮而上下移動。柱塞213貫通剩餘樹脂分離構件216以及剩餘樹脂分離構件用彈性構件217。剩餘樹脂分離構件216配置在殘料部(剩餘樹脂容納部)113的正下方,能夠藉由剩餘樹脂分離構件216按壓殘料部113內部的剩餘樹脂。剩餘樹脂分離構件216上部的基板側端部如圖所示形成有向水準方向突出的突出部。由此,在上模100和下模200閉模時,所述基板的殘料部(剩餘樹脂容納部)113側的端部被下模200的模具表面和剩餘樹脂分離構件216的端部夾持。 Fig. 34 is a sectional view schematically showing a modified example of the molding die. As shown in the figure, the molding die 1000 is provided with the remaining resin separation member (residual resin separation block) 216, the remaining resin separation member elastic member 217, and the lower mold base block 210B, and does not include the ring 214. It is the same as the mold 1000 shown in FIGS. 14 to 33. In this figure, the lower mold cavity block 210 is fixed to the upper surface of the lower mold base block 210B. The plunger 213 penetrates the lower die base block 210B. The remaining resin separation member 216 is arranged so as to surround the outer periphery and the lower surface of the chamber 212, and is elastically supported on the lower mold base block 210B by an elastic member 217 for the remaining resin separation member. The remaining resin separating member 216 can be moved up and down by the expansion and contraction of the elastic member 217 for the remaining resin separating member. The plunger 213 penetrates the remaining resin separating member 216 and the elastic member 217 for the remaining resin separating member. The remaining resin separating member 216 is disposed directly below the remaining material portion (remaining resin accommodating portion) 113, and the remaining resin in the remaining material portion 113 can be pressed by the remaining resin separating member 216. As shown in the figure, a substrate-side end portion of the upper portion of the remaining resin separation member 216 is formed with a protruding portion that protrudes in the horizontal direction. As a result, when the upper mold 100 and the lower mold 200 are closed, the end portions on the remaining portion (residual resin accommodating portion) 113 side of the substrate are clamped by the mold surface of the lower mold 200 and the ends of the remaining resin separation member 216 hold.

使用圖34的成型模1000的樹脂成型品的製造方法例如能夠和圖14~27同樣進行。圖34的成型模1000藉由在樹脂的固化後進行開模能夠分離樹脂成型品的固化樹脂和殘料部113內的剩餘樹脂。使用圖34的成型模1000的樹脂成型品的製造方法的概略具體而言例如能夠在圖35~37的步驟截面圖中示出。首先,如圖35所示,對下模200的基板載置部211供給(載置)基板1,同時對室212供給板(樹脂材 料)20a。接著,和圖15~18同樣進行成型模的加熱以及閉模。由此,如圖36所示,在下模200的模具表面和上模100的模具表面接觸(閉模)的狀態下,將柱塞213推入室212內。如此一來,如圖36所示,將樹脂材料20a熔融而成的熔融樹脂20b填充至殘料部113、流道112以及型腔111內。之後,和圖19~21同樣地,在型腔111內的樹脂和殘料部113內的剩餘樹脂固化後,藉由開模而進行脫模。藉由該開模而進行脫模時,如圖37所示,在樹脂成型品1b固定於下模200的狀態下,藉由剩餘樹脂分離構件用彈性構件217的伸長,剩餘樹脂分離構件216相對於下模200上升。由此,由於在殘料部113內固化的剩餘樹脂20d能夠被剩餘樹脂分離構件216上推,因此如圖所示,能夠分離在型腔111內的固化樹脂20和在殘料部113內固化的剩餘樹脂20d。 The manufacturing method of the resin molded product using the molding die 1000 of FIG. 34 can be performed similarly to FIGS. 14-27, for example. The molding die 1000 shown in FIG. 34 can separate the cured resin of the resin molded product and the remaining resin in the residue portion 113 by opening the mold after the resin is cured. The outline of the manufacturing method of the resin molded product using the molding die 1000 of FIG. 34 can be shown, for example specifically, in the sectional drawing of the step of FIG. 35-37. First, as shown in FIG. 35, the substrate 1 is supplied (mounted) to the substrate mounting portion 211 of the lower mold 200, and a plate (resin material) 20a is supplied to the chamber 212 at the same time. Next, the mold is heated and the mold is closed in the same manner as in FIGS. 15 to 18. Accordingly, as shown in FIG. 36, the plunger 213 is pushed into the chamber 212 in a state where the mold surface of the lower mold 200 and the mold surface of the upper mold 100 are in contact (closed). In this way, as shown in FIG. 36, the molten resin 20 b obtained by melting the resin material 20 a is filled into the residual material portion 113, the flow path 112, and the cavity 111. After that, as in FIGS. 19 to 21, after the resin in the cavity 111 and the remaining resin in the residual material portion 113 are cured, the mold is released by mold opening. When demolding is performed by this mold opening, as shown in FIG. 37, in a state where the resin molded product 1b is fixed to the lower mold 200, the elastic resin member 217 for the residual resin separation member is stretched, and the residual resin separation member 216 faces each other. It rises at the lower mold 200. Thereby, since the remaining resin 20d solidified in the residual material portion 113 can be pushed up by the residual resin separating member 216, as shown in the figure, the cured resin 20 in the cavity 111 and the solidified material in the residual material portion 113 can be separated. Of the remaining resin 20d.

在圖38的截面圖中示意性地示出成型模的其他實施例。如圖所示,就該成型模1000而言,上模100不具備殘料部113。並且,形成有下模200的室212上部和上模100的流道112連通的殘料部113B。進一步,就下模200的基板載置部211的下表面而言,對應上模的型腔111的位置呈凹狀,並形成有下模型腔111B。除了這些以及不具備環214以外,圖38的成型模1000和圖14~33所示的成型模1000相同。 Another embodiment of the molding die is schematically shown in the sectional view of FIG. 38. As shown in the figure, in the molding die 1000, the upper die 100 does not include the residual material portion 113. Further, a residual material portion 113B in which the upper portion of the chamber 212 of the lower mold 200 and the flow path 112 of the upper mold 100 communicate is formed. Further, regarding the lower surface of the substrate mounting portion 211 of the lower mold 200, the position corresponding to the cavity 111 of the upper mold is concave, and a lower mold cavity 111B is formed. Except for these and without the ring 214, the molding die 1000 shown in FIG. 38 is the same as the molding die 1000 shown in FIGS. 14 to 33.

使用圖38的成型模1000的樹脂成型品的製造方法例如能夠和圖14~27同樣進行。圖38的成型模1000例如藉由使用穿孔基板,而能夠將注入至上模的型腔111的流動 性樹脂從所述基板的孔注入到下模型腔111B內。 The manufacturing method of the resin molded article using the molding die 1000 of FIG. 38 can be performed similarly to FIGS. 14-27, for example. The molding die 1000 shown in FIG. 38 can, for example, use a perforated substrate to inject a fluid resin injected into the cavity 111 of the upper mold into the lower mold cavity 111B from the hole of the substrate.

在圖39的截面圖中示意性地示出成型模另外其他的變形例。如圖所示,該成型模1000在上模100和下模200之間配置有中間模400。中間模400在室(樹脂材料容納部)212的正上方的位置上具備中間模樹脂材料容納部413。中間模樹脂材料容納部413能夠容納樹脂材料(板塊)20a,同時在閉模時和殘料部113連通,能夠將熔融(流動化)的樹脂材料(流動性樹脂)注入到殘料部113內。也就是說,中間模樹脂材料容納部413兼作中間模樹脂通道。並且,圖39的下模200不具備基板載置部211。作為代替,在圖39中,中間模400在和上模100相對側的表面上具備基板載置部411。中間模400的基板載置部411的下表面對應上模的型腔111的位置呈凹狀,並形成有中間模型腔412。除了這些以及不具備環214以外,圖39的成型模1000和圖13~33的成型模1000相同。 Another cross-sectional view of FIG. 39 schematically illustrates another modification of the molding die. As shown in the figure, the molding die 1000 is provided with an intermediate die 400 between the upper die 100 and the lower die 200. The intermediate mold 400 includes an intermediate mold resin material storage portion 413 at a position directly above the chamber (resin material storage portion) 212. The intermediate mold resin material accommodating portion 413 can accommodate the resin material (plate) 20a, and at the same time communicates with the residual material portion 113 when the mold is closed, and can inject the molten (fluidized) resin material (fluid resin) into the residual material portion 113 . That is, the intermediate mold resin material accommodating portion 413 doubles as the intermediate mold resin passage. In addition, the lower mold 200 of FIG. 39 does not include the substrate mounting portion 211. Instead, in FIG. 39, the intermediate mold 400 includes a substrate mounting portion 411 on a surface opposite to the upper mold 100. The lower surface of the substrate mounting portion 411 of the intermediate mold 400 is concave at a position corresponding to the cavity 111 of the upper mold, and an intermediate mold cavity 412 is formed. Except for these and without the ring 214, the molding die 1000 of FIG. 39 is the same as the molding die 1000 of FIGS. 13 to 33.

另外,圖40為分別從模具表面側觀察圖39的上模型腔塊110以及中間模400的平面圖。如上所述,中間模樹脂材料容納部(中間模樹脂通道)413與上模型腔塊110的殘料部113的位置,中間模型腔412與上模型腔塊110的型腔111的位置分別對應。 40 is a plan view of the upper mold cavity block 110 and the intermediate mold 400 of FIG. 39 as viewed from the mold surface side. As described above, the positions of the intermediate mold resin material accommodating portion (intermediate mold resin channel) 413 and the residual material portion 113 of the upper mold cavity block 110 correspond to the positions of the intermediate mold cavity 412 and the mold cavity 111 of the upper mold cavity block 110, respectively.

使用圖39的成型模1000的樹脂成型裝置的製造方法例如能夠和圖14~27同樣進行。在圖41(a)~(b)的步驟截面圖中示出其概略。圖41(a)為室212內容納了板塊20a的狀態。從該狀態進一步在中間模的基板載置部411上載置基 板後,藉由和16~18同樣使板塊20a熔融(流動化)之後進行閉模,而注入殘料部113、流道112以及型腔111內。並且,在圖39的成型模1000的情況下,例如能夠藉由使用穿孔基板,而將注入到上模的型腔111的流動性樹脂從所述基板的孔注入中間模型腔412內。之後,如果使所述流動性樹脂固化,則如圖41(b)般,所述流動性樹脂會成為固化樹脂20以及剩餘樹脂(無用樹脂部)20d。除此之外的步驟,如上所述,能夠和圖14~27同樣進行。 The manufacturing method of the resin molding apparatus using the molding die 1000 of FIG. 39 can be performed similarly to FIGS. 14-27, for example. 41 (a) to (b) are schematic cross-sectional views. FIG. 41 (a) shows a state where the plate 20a is contained in the chamber 212. From this state, after further placing the substrate on the substrate placing portion 411 of the intermediate mold, the plate 20a is melted (fluidized) as in 16 to 18, and the mold is closed to inject the residual material portion 113, the flow channel 112, and the mold. Cavity 111. Furthermore, in the case of the molding die 1000 shown in FIG. 39, for example, by using a perforated substrate, the fluid resin injected into the cavity 111 of the upper mold can be injected into the intermediate mold cavity 412 from the hole of the substrate. Thereafter, if the fluid resin is cured, the fluid resin becomes the cured resin 20 and the residual resin (unwanted resin portion) 20d as shown in FIG. 41 (b). The other steps can be performed in the same manner as in FIGS. 14 to 27 as described above.

另外,圖34~41的成型模1000能夠進一步任意變形。例如,雖然在圖34~41中省略了環214,但是和圖14~33一樣可以具備環214。並且,例如如圖29(a)~(c)所示,下模可以具備貫通孔(殘留樹脂漏孔)218,柱塞213的下端(和保持架A塊221接觸的部分)可以帶圓形。 In addition, the molding die 1000 of FIGS. 34 to 41 can be further arbitrarily deformed. For example, although the ring 214 is omitted in FIGS. 34 to 41, the ring 214 may be provided in the same manner as in FIGS. 14 to 33. Further, for example, as shown in FIGS. 29 (a) to (c), the lower mold may be provided with a through hole (residual resin leakage hole) 218, and the lower end of the plunger 213 (the portion contacting the holder A block 221) may be rounded. .

接著,將使用圖42~56對在所述彈出段內使樹脂成型品從成型模1000脫模的步驟的其他例子進行說明。在圖42~56中,和圖33(a)~(f)相同的構件以同一符號表示。另外,圖42~56的彈出段代替可動台板1120具備固定台板1100。 Next, another example of the step of demolding the resin molded article from the molding die 1000 in the ejection section will be described using FIGS. 42 to 56. In FIGS. 42 to 56, the same components as those in FIGS. 33 (a) to (f) are denoted by the same symbols. In addition, the pop-up section of FIGS. 42 to 56 includes a fixed platen 1100 instead of the movable platen 1120.

首先,如圖42所示,將保持樹脂成型後的樹脂成型品1b以及剩餘樹脂20d的成型模1000搬運至彈出段內。具體而言,首先,如圖所示,將成型模1000沿箭頭E1的方向(從彈出段的外部朝內的方向)搬運(移動),並使其位於固定台板1100和保持架230之間。之後,使成型模1000沿箭頭E2的方向(下方)移動,並載置固定於彈出板235上。 固定方法沒有特別限定,例如可以使用靜電吸盤、機械吸盤等。此時,例如可以藉由對成型模1000施加振動、熱量(升溫造成的熱膨脹)等而輔助脫模。 First, as shown in FIG. 42, the mold 1000 holding the resin molded product 1 b and the remaining resin 20 d after the resin molding are carried into the ejection section. Specifically, first, as shown in the figure, the molding die 1000 is transported (moved) in the direction of the arrow E1 (direction from the outside of the eject section to the inside), and is positioned between the fixed platen 1100 and the holder 230. . After that, the molding die 1000 is moved in the direction of the arrow E2 (downward), and is placed and fixed on the ejection plate 235. The fixing method is not particularly limited, and for example, an electrostatic chuck, a mechanical chuck, or the like can be used. In this case, for example, demolding can be assisted by applying vibration, heat (thermal expansion due to temperature rise), and the like to the molding die 1000.

接著,如圖43所示,使可動台板1220和保持架230以及成型模1000一起沿箭頭F1的方向上升,並將上模100固定在可動台板1120的下表面。固定方法沒有特別限定,例如能夠使用靜電吸盤、機械吸盤等。 Next, as shown in FIG. 43, the movable platen 1220 is raised together with the holder 230 and the molding die 1000 in the direction of the arrow F1, and the upper mold 100 is fixed to the lower surface of the movable platen 1120. The fixing method is not particularly limited, and for example, an electrostatic chuck, a mechanical chuck, or the like can be used.

接著,如圖44所示,使可動台板1220和保持架230以及下模200一起沿箭頭G1的方向下降。由此,將上模100和下模200進行開模。由此,如圖所示,樹脂成型品1b(固化樹脂20)以及剩餘樹脂(無用樹脂部)20d以保持在下模200的一個表面的狀態,從上模100的模具表面脫模。 Next, as shown in FIG. 44, the movable platen 1220 is lowered together with the holder 230 and the lower mold 200 in the direction of the arrow G1. Thereby, the upper mold 100 and the lower mold 200 are opened. Accordingly, as shown in the figure, the resin molded product 1b (cured resin 20) and the remaining resin (unwanted resin portion) 20d are released from the mold surface of the upper mold 100 while being held on one surface of the lower mold 200.

接著,在如圖44般將上模100和下模200進行開模的狀態下,如圖45所示,將卸料機300沿箭頭的H1的方向(從成型模1000的外部朝向內的方向)搬運(移動)。由此,如圖46所示,使卸料機300進入上模100和下模200之間。如圖45以及圖46所示,該卸料機300和實施例1的圖6~13的卸料機300同樣具備用於吸附固化樹脂20以及剩餘樹脂20d的吸盤301和封裝完畢基板保持構件(樹脂成型品保持構件)302。吸盤301相當於“樹脂成型品吸附機構”,封裝完畢基板保持構件(樹脂成型品保持構件)302相當於“樹脂成型品保持機構”。 Next, in a state where the upper mold 100 and the lower mold 200 are opened as shown in FIG. 44, as shown in FIG. 45, the unloader 300 is moved in the direction of the arrow H1 (from the outside of the molding die 1000 toward the inside). ) Carry (move). Accordingly, as shown in FIG. 46, the unloader 300 is caused to enter between the upper mold 100 and the lower mold 200. As shown in FIGS. 45 and 46, the unloader 300 is similar to the unloader 300 of FIGS. 6 to 13 of Example 1 and includes a suction cup 301 for adsorbing the cured resin 20 and the remaining resin 20 d and a packaged substrate holding member ( Resin molded product holding member) 302. The chuck 301 corresponds to a “resin molded product holding mechanism”, and the packaged substrate holding member (resin molded product holding member) 302 corresponds to a “resin molded product holding mechanism”.

接著,如圖47所示,使可動台板1220和保持架230以及下模200一起沿箭頭F2的方向上升。由此,如圖 所示,用上模100和下模200夾持並固定(夾住)卸料機。 Next, as shown in FIG. 47, the movable platen 1220 is raised with the holder 230 and the lower mold 200 in the direction of arrow F2. Thereby, as shown in the figure, the unloader is clamped and fixed (clamped) by the upper mold 100 and the lower mold 200.

接著,如圖48所示,使樹脂成型品保持構件302沿箭頭I1的方向下降,並保持樹脂成型品(封裝完畢基板)1b。如圖所示,樹脂成型品保持構件302藉由從上按壓固化樹脂20中、在流道112內固化的部分而保持樹脂成型品1b。另外,例如可以代替固化樹脂20中、在流道112內固化的部分,用樹脂成型品保持構件302從上按壓在型腔111內固化的部分。 Next, as shown in FIG. 48, the resin molded product holding member 302 is lowered in the direction of the arrow I1, and the resin molded product (packaged substrate) 1b is held. As shown in the figure, the resin molded product holding member 302 holds the resin molded product 1 b by pressing a portion of the cured resin 20 that is cured in the flow path 112 from above. In addition, for example, instead of the portion cured in the runner 112 in the cured resin 20, the portion cured in the cavity 111 may be pressed by the resin molded product holding member 302 from above.

接著,如圖49所示,使可動台板1220和保持架塊(保持架A塊231以及保持架B塊232)一起沿箭頭F3的方向上升。此時,如圖所示,藉由保持架A塊231的上升,彈出桿236的一部分被從彈出板235的上表面推出。由此,藉由彈出桿236,下模200的柱塞213的一部分被從下模200的上表面推出,而如圖所示,使固化完畢的剩餘樹脂20d從樹脂成型品1b分離。 Next, as shown in FIG. 49, the movable platen 1220 and the holder blocks (the holder A block 231 and the holder B block 232) are raised together in the direction of arrow F3. At this time, as shown in the figure, as the holder A block 231 is raised, a part of the ejection lever 236 is pushed out from the upper surface of the ejection plate 235. Thereby, a part of the plunger 213 of the lower mold 200 is pushed out from the upper surface of the lower mold 200 by the ejection lever 236, and the cured remaining resin 20d is separated from the resin molded product 1b as shown in the figure.

接著,如圖50所示,使可動台板1220和保持架230以及下模200一起沿箭頭G2的方向下降。由此,解除卸料機300的夾持。 Next, as shown in FIG. 50, the movable platen 1220 is lowered together with the holder 230 and the lower mold 200 in the direction of the arrow G2. Thereby, the clamp of the unloader 300 is cancelled | released.

接著,如圖51所示,使卸料機300的吸盤301沿箭頭J1的方向下降。由此,如圖所示,使吸盤301接觸並吸附在固化樹脂20的型腔111內固化的部分和從樹脂成型品1b分離完畢的剩餘樹脂20d。 Next, as shown in FIG. 51, the suction cup 301 of the unloader 300 is lowered in the direction of arrow J1. Thereby, as shown in the figure, the sucker 301 is brought into contact with and adsorbs the solidified portion in the cavity 111 of the cured resin 20 and the remaining resin 20d separated from the resin molded product 1b.

接著,如圖52所示,使吸盤301沿箭頭K1的方向上升。然後,如圖53所示,使吸盤301沿箭頭K2方向進 一步上升。由此,如圖所示,吸附於吸盤301的樹脂成型品1b以及剩餘樹脂20d從下模200分離。 Next, as shown in FIG. 52, the suction cup 301 is raised in the direction of the arrow K1. Then, as shown in Fig. 53, the suction cup 301 is further raised in the direction of the arrow K2. Thereby, as shown in the figure, the resin molded product 1 b and the surplus resin 20 d adsorbed on the chuck 301 are separated from the lower mold 200.

之後,如圖54所示,使卸料機300和樹脂成型品1b以及剩餘樹脂20d一起沿箭頭L1的方向(從彈出段內朝向外部的方向)移動(搬運),並退出至彈出段之外。 Thereafter, as shown in FIG. 54, the unloader 300 is moved (conveyed) in the direction of the arrow L1 (direction from the inside of the ejection section to the outside) together with the resin molded product 1b and the remaining resin 20d, and exits outside the ejection section .

再之後,如圖55所示,使可動台板1220與保持架230和下模200一起沿箭頭F4的方向上升,將成型模1000閉模。然後,在該狀態下,解除固定台板1100和成型模1000的固定。 Thereafter, as shown in FIG. 55, the movable platen 1220 is raised in the direction of arrow F4 together with the holder 230 and the lower mold 200 to close the mold 1000. Then, in this state, the fixing of the fixed platen 1100 and the mold 1000 is released.

進一步,如圖56所示,使可動台板1220與保持架230和成型模1000一起沿箭頭G3的方向下降,將成型模1000從固定台板1100分離。之後,將成型模1000從保持架230分離,並沿箭頭M1的方向(從彈出段內朝向外部的方向)移動(搬運),並退出到彈出段之外。該成型模1000例如能夠再次搬運到升溫段,並再次進行樹脂成型品的製造方法。 Further, as shown in FIG. 56, the movable platen 1220 is lowered together with the holder 230 and the molding die 1000 in the direction of the arrow G3 to separate the molding die 1000 from the fixed platen 1100. After that, the molding die 1000 is separated from the holder 230, moved (conveyed) in the direction of the arrow M1 (direction from the inside to the outside of the ejection section), and exits out of the ejection section. For example, the molding die 1000 can be transported to the temperature rising section again, and the method for manufacturing a resin molded product can be performed again.

另外,在本實施例中,主要針對具備升溫段、樹脂成型段、固化段、彈出段的每個段的樹脂成型裝置的例子進行了說明。但是,本發明不限於此。例如,本發明的樹脂成型裝置可以具備多個升溫段、樹脂成型段、固化段及彈出段之中至少1個功能的段。如此一來,例如能夠提高樹脂成型品的製造效率。並且,例如可使特定的1個段兼備所述各段中2個以上的功能。例如,在圖14~27所示的例子中,如上所述,樹脂成型裝置的1個段兼備升溫段、樹脂 成型段、固化段以及彈出段的4個所有功能。並且,本發明的樹脂成型裝置不限於此,例如可使特定的1個段兼備所述4個段中的2個或3個的功能,而與所述特定的1個段不同的段具備其他功能。例如,如上所述,同一段可兼備升溫段以及固化段的功能。 In addition, in this embodiment, an example of a resin molding apparatus having each of a temperature rising section, a resin molding section, a curing section, and an ejecting section has been described. However, the present invention is not limited to this. For example, the resin molding apparatus of the present invention may include a segment having at least one function among a plurality of temperature rising segments, a resin molding segment, a curing segment, and an ejecting segment. In this way, for example, the manufacturing efficiency of a resin molded article can be improved. In addition, for example, a specific one segment may have two or more functions in each of the segments. For example, in the examples shown in Figs. 14 to 27, as described above, one stage of the resin molding apparatus has all four functions of a heating stage, a resin molding stage, a curing stage, and an ejection stage. In addition, the resin molding apparatus of the present invention is not limited to this, and for example, a specific one segment may have functions of two or three of the four segments, and a segment different from the specific one segment may have other Features. For example, as described above, the same stage may serve as both a temperature increasing stage and a curing stage.

進一步,本發明不限於上述實施例,在不脫離本發明意旨的範圍內,根據需要能夠進行任意且適當的組合、變化、或選擇採用。 Further, the present invention is not limited to the above-mentioned embodiments, and can be arbitrarily and appropriately combined, changed, or selectively adopted as needed within a range not departing from the spirit of the present invention.

本申請案主張以2017年8月10日申請的日本申請特願2017-155866為基礎的優先權,其公開的全部納入在此。 This application claims priority based on Japanese application Japanese Patent Application No. 2017-155866 filed on August 10, 2017, the entire disclosure of which is incorporated herein.

Claims (10)

一種樹脂成型品的搬運機構,具備:樹脂成型品保持機構;和樹脂成型品吸附機構,藉由前述樹脂成型品保持機構能夠將樹脂成型品保持在成型模內,且在該狀態下,能夠分離前述成型品和樹脂成型後的無用樹脂部,藉由前述樹脂成型品吸附機構能夠吸附並搬運前述樹脂成型品。     A resin-molded product conveying mechanism includes: a resin-molded product holding mechanism; and a resin-molded product adsorption mechanism. The resin-molded product holding mechanism can hold the resin-molded product in a mold, and can be separated in this state. The molded article and the unnecessary resin portion after the resin molding can adsorb and transport the resin molded article by the resin molded article adsorption mechanism.     一種樹脂成型裝置,具有請求項請求項1所記載之搬運機構和成型模。     A resin molding apparatus includes the conveyance mechanism and the molding die described in claim 1.     如請求項2所記載之樹脂成型裝置,其中,藉由用前述樹脂成型品保持機構將前述樹脂成型品按壓至前述成型模,而能夠將前述樹脂成型品保持在前述成型模內。     The resin molding device according to claim 2, wherein the resin molded product can be held in the molding mold by pressing the resin molded product against the molding mold with the resin molded product holding mechanism.     如請求項2或3所記載之樹脂成型裝置,其中,前述成型模具備柱塞,在藉由前述樹脂成型品保持機構將前述樹脂成型品保持在前述成型模內的狀態下,藉由用前述柱塞向前述無用樹脂部施加力而能夠分離前述樹脂成型品和前述無用樹脂部。     The resin molding device according to claim 2 or 3, wherein the molding die includes a plunger, and the resin molding is held in the molding die by the resin molding holding mechanism, and the resin molding The plunger can separate the resin molded article and the unnecessary resin portion by applying a force to the unnecessary resin portion.     如請求項1至3中任一項所記載之樹脂成型裝置,其中,前述樹脂成型裝置進一步具備第1台板和第2台 板,前述成型模具備一個模和另一個模,前述一個模安裝在前述第1台板上,前述另一個模安裝在前述第2台板上。     The resin molding apparatus according to any one of claims 1 to 3, wherein the resin molding apparatus further includes a first platen and a second platen, the molding die includes one mold and the other mold, and the one mold is mounted On the first platen, the other mold is mounted on the second platen.     如請求項2或3所記載之樹脂成型裝置,其中,前述樹脂成型裝置具備升溫段、樹脂成型段、固化段、彈出段,前述成型模相對於前述各段能夠安裝拆卸,同時能夠在前述各段之間移動,前述升溫段將前述成型模升溫,前述樹脂成型段進行樹脂成型,前述固化段使前述成型模內的樹脂固化,前述彈出段使樹脂成型品從前述成型模脫模。     The resin molding device according to claim 2 or 3, wherein the resin molding device includes a temperature rising section, a resin molding section, a curing section, and an ejecting section, and the molding die can be attached to and detached from the sections, and can be attached to the sections. Moving between sections, the heating section heats the molding die, the resin molding section performs resin molding, the curing section solidifies the resin in the molding die, and the ejecting section releases the resin molded product from the molding die.     一種樹脂成型品的製造方法,具備以下步驟:樹脂成型步驟,藉由成型模進行樹脂成型;無用樹脂部分離步驟,分離樹脂成型品和無用樹脂部;和搬運步驟,將前述樹脂成型品以及前述無用樹脂部向前述成型模之外搬運。     A method for manufacturing a resin molded product includes the following steps: a resin molding step for resin molding by a molding die; an unnecessary resin part separation step for separating a resin molded product and an unnecessary resin part; and a conveying step for separating the resin molded product and the foregoing The unnecessary resin part is carried out of the molding die.     如請求項7所記載之樹脂成型品的製造方法,其中,使用請求項1所記載之搬運機構,在前述無用樹脂部分離步驟中,藉由前述樹脂成型品保持機構將樹脂成型品保持在前述成型模內,且在該狀態下,分離前述樹脂成型品和前述無用樹脂部, 在前述搬運步驟中,藉由前述吸附機構將前述樹脂成型品吸附並搬運。     The method for manufacturing a resin molded article according to claim 7, wherein the resin molded product is held by the resin molded product holding mechanism in the useless resin part separating step in the useless resin part separation step using the conveyance mechanism described in claim 1. In the molding die, in this state, the resin molded product and the useless resin portion are separated, and in the transporting step, the resin molded product is adsorbed and transported by the adsorption mechanism.     如請求項7所記載之樹脂成型品的製造方法,其中,使用請求項2至6中任一項所記載之樹脂成型裝置,在前述樹脂成型步驟中,藉由前述樹脂成型裝置所具備的前述成型模進行樹脂成型,在前述無用樹脂分離步驟中,藉由前述樹脂成型品保持機構將樹脂成型品保持在前述成型模內,且在該狀態下,分離前述樹脂成型品和前述無用樹脂部,在前述搬運步驟中,藉由前述吸附機構吸附並搬運前述樹脂成型品。     The method for manufacturing a resin molded article according to claim 7, wherein the resin molding device according to any one of claims 2 to 6 is used, and in the resin molding step, the resin molding device includes the resin molding device provided in the resin molding device. The molding die performs resin molding, and in the useless resin separation step, the resin molded product is held in the molding die by the resin molded product holding mechanism, and in this state, the resin molded product and the useless resin portion are separated, In the transporting step, the resin molded product is adsorbed and transported by the adsorption mechanism.     如請求項9所記載之樹脂成型品的製造方法,其中,前述樹脂成型裝置為請求項6所記載之樹脂成型裝置,前述樹脂成型品的製造方法進一步包括:樹脂材料容納步驟,在前述成型模的樹脂材料容納部中容納樹脂材料;成型模升溫步驟,在前述升溫段中將前述成型模升溫;樹脂固化步驟,在前述固化段中使前述成型模內的樹脂固化;和脫模步驟,在前述彈出段中使樹脂成型品從前述成型模脫模,前述樹脂材料容納步驟在前述樹脂成型段中進行。     The method for manufacturing a resin molded article according to claim 9, wherein the resin molding device is the resin molding device according to claim 6, and the method for manufacturing the resin molded article further includes a resin material accommodating step, in the molding die. A resin material accommodating part is contained in the resin material; a step of heating the mold, in which the mold is heated in the temperature rising section; a resin curing step, in which the resin in the mold is cured in the curing section; and a demolding step, in In the ejecting section, the resin molded article is demolded from the molding die, and the resin material accommodating step is performed in the resin molding section.    
TW107122798A 2017-08-10 2018-07-02 Transport mechanism of resin molded product, resin molding device, and method of manufacturing resin molded article TW201910088A (en)

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