TW201637312A - Test socket - Google Patents

Abstract

Disclosed is a test socket in which a floating member for accommodating a test object at a test is prevented from separating from a socket main body. The separation preventer of the test socket includes hooking projections which protrude from one of the floating member and the socket main body toward the other one, are elastically transformable in a direction transverse to their protruding direction, and have hooking protrusions transversely protruding from their free end portions; and a locking protrusion which is provided in the other one of the floating member and the socket main body, and engages with the hooking protrusion so that the floating member can float within a predetermined vertical range with respect to the socket main body.

Description

Test plug

The present invention relates to a test plug for testing the electrical characteristics of a test article.

The semiconductor wafer in which the fine electronic circuits are highly densely integrated is subjected to tests as to whether each electronic circuit is normal during the manufacturing process.

In order to test semiconductor wafers, contact probes for testing semiconductors have been used. This contact probe electrically connects the terminals of the semiconductor wafer to the contact points (i.e., pads) of the test circuit board on which the test signal is applied. This probe is supported in the plug body. The semiconductor wafer is housed in the plug body and subjected to testing while being housed in a floating member for elastically maintaining a floating state. In detail, during testing, the semiconductor wafer is pressed by the pusher when mounted to the floating member such that the bump terminals of the semiconductor wafer can contact the probe of the plug body. At this time, the elastic restoring force prevents the floating member from being separated from the plug body even when the floating member is swayed relative to the plug body in the floating state.

This structure for preventing the floating member from being separated from the plug body has been disclosed. The disclosed separation preventing structure includes two pairs of protrusions elastically protruding from two opposite inner walls of the floating member accommodating portion in the plug body, and two formed on the two outer walls of the floating member to lock the two pairs of protrusions For the groove.

However, the conventional structure for preventing the separation of the floating members is complicated and may have a problem that an error between the floating member and the floating member accommodating member of the plug main body causes a bump terminal of the semiconductor wafer and the probe of the plug main body Failed to align.

One or more exemplary embodiments will provide a test plug having a simple structure for preventing separation of floating members.

Another exemplary embodiment will provide a test plug in which the terminals of the test article mounted to the floating member are more precisely aligned with the probe of the plug body.

According to an aspect of the first exemplary embodiment, there is provided a test plug for testing electrical characteristics of a test article, the test plug comprising: a plug body configured to mount a plurality of probes and having the A floating member recessed in a top surface of the plug body receives a cavity, each of the probes having opposite ends exposed upward and downward; a floating member disposed to include a test article mounting portion on which the test article is mounted And being housed in the floating member accommodating cavity; and a separation preventer configured to prevent the floating member from being separated from the plug body in a state where the floating member is housed in the floating member accommodating cavity of the plug body, the separation preventer including a hook protrusion that protrudes from one of the floating member and the plug body toward the other, elastically converts in a direction transverse to a direction in which it protrudes, and has a hook protrusion that laterally protrudes from a free end portion thereof And a locking protrusion disposed in the other of the floating member and the plug body and engaged with the hook protrusion to make the floating member phase The plug body to float within a predetermined vertical range.

In an embodiment of the present invention, the other of the floating member and the plug body may include a hook protrusion receiving hole for receiving the hook protrusion, and the locking protrusion may be formed in the hook protrusion receiving hole. On the wall.

In an embodiment of the invention, the hook projections may comprise at least two hook projections branched by longitudinal cutting grooves.

Hereinafter, the exemplary embodiments will be described in detail with reference to the accompanying drawings. For the sake of convenience of description, portions that are not directly related to the concept of the present invention are omitted, and like numerals are always referred to as similar elements.

As shown in FIGS. 1 and 2, the test plug 1 for testing the electrical characteristics of a test article (eg, a semiconductor wafer) includes a plug body 100 and a floating member 200. Here, the floating member 200 is housed in the floating member accommodating cavity 101 of the plug main body 100 while accommodating the test article.

The plug body 100 has a floating member receiving cavity 101 recessed from its top.

The floating member receiving cavity 101 is provided to mount the plurality of probes 120 on a central portion of the bottom portion 140 such that both ends of each probe 120 can be vertically exposed with respect to the bottom portion 140.

The probe 120 is supported by the plug main body 100 in a state in which the upper end and the lower end of the probe 120 are exposed to be protruded. FIG. 1 illustrates that only the upper end of the probe 120 protrudes. The upper end of the probe 120 contacts a terminal (eg, a bump) of a test article to be mounted to the floating member 200. The lower end of the probe 120 contacts the pad of a test circuit board (not shown). At least one of the upper end and the lower end of the probe 120 is elastically retractable in its longitudinal direction. The plug body 100 according to this exemplary embodiment is applicable to many probes having various shapes and configurations without limitation.

In the floating member accommodating cavity 101, four ball plugs 110 are disposed on the bottom portion 140 to protrude upward to elastically float the floating member 200. Each of the ball plungers 110 includes a ball and a spring (not shown) disposed in the cylindrical container 112, the cylindrical container 112 having an upper narrow opening to allow the ball to be elastically moved without being separated. Therefore, the floating member 200 placed on the four ball plugs 110 can elastically float corresponding to the elastic movement of the ball plunger 110. The floating member 200 includes a first opening 210 (shown in FIG. 2) formed on a bottom portion 220 thereof to accommodate the ball plunger 110, respectively. The ball plunger 110 supports the floating member 200 while being inserted into the first opening 210. Here, the structure for floating the floating member 200 is not limited to the structures illustrated in FIGS. 1 and 2.

The plug body 100 includes four separation preventing pins 130 that are configured to protrude upward on the bottom portion 140 of the floating member accommodating cavity 101. Of course, the number of the separation preventing pins 130 is not limited to four. Alternatively, single or multiple separation prevention pins may be provided depending on the design.

The separation preventing pin 130 prevents the floating member 200 from being separated from the plug main body 100 while the floating member 200 is being housed in the floating member accommodating cavity 101 of the plug main body 100. Of course, when a suitable force is applied to the floating member 200 for replacement or cleaning, the floating member 200 must be forcibly separated.

As shown in FIG. 3, the separation preventing pin 130 protrudes toward the floating member 200.

The separation preventing pin 130 includes a flange end portion 131 that laterally extends from the pillar portion 133, and a hook protrusion 132-1 having a hook protrusion 134 that laterally protrudes from a free end portion opposed to the flange end portion 131. And the hook protrusion 132-2.

The hook protrusions 132-1 and 132-2 are branched into two portions by a cutting groove 136 formed in the longitudinal direction. Alternatively, the hook protrusions may be branched into three or more than three portions depending on the shape of the cutting groove. In addition, a single hook projection can be provided without a cutting groove. The hook protrusion 132-1 and the hook protrusion 132-2 are elastically changeable with respect to the cutting groove 136.

Each of the hook protrusion 132-1 and the hook protrusion 132-2 has a gradually narrowing free end. With the thus tapered structure, each of the hook protrusion 132-1 and the hook protrusion 132-2 can be easily inserted into the hook protrusion receiving hole 230 of the floating member 200.

The separation preventing pin 130 is inserted into the separation preventing pin receiving hole 142 formed on the bottom portion 140 of the floating member accommodating cavity 101 such that the hook protrusion 132-1 and the hook protrusion 132-2 protrude to the floating member accommodating cavity 101. The separation preventing pin receiving hole 142 is designed to allow the stored separation preventing pin 130 to move upward and downward, and the separated separation preventing pin 130 is prevented from being separated by the flange end portion 131. When the flange end portion 131 has a higher height, the separation preventing pin 130 can be designed to prevent the pin receiving hole 142 from moving upward and downward without being separated.

The floating member 200 has a test article receiving cavity 201 that is open upward. The test article receiving cavity 201 includes a terminal hole 222 on its bottom for receiving a bump terminal of a test article such as a semiconductor wafer (by way of example). The terminal hole 222 is generally formed by full penetration, but is not limited thereto. Alternatively, the terminal holes can be filled with electrical conductors.

As shown in FIG. 2, the bottom portion 220 of the floating member 200 includes four first openings 210 disposed at positions corresponding to the ball plungers 110 supported on the plug body 100, and cards for receiving the separation preventing pins 130. The hook protrusion 132-1 and the four hook protrusion receiving holes 230 of the hook protrusion 132-2.

The hook protrusion receiving hole 230 is formed to have a locking protrusion 234 on its inner wall to engage with the hook protrusion 132-1 and the hook protrusion 134 of the hook protrusion 132-2. Therefore, the hook protrusion 132-1 and the hook protrusion 132-2 are aligned between the four ball plugs 110 and the four first openings 210 and are accommodated in the four separation preventing pins 130 and the four hook protrusions. The holes 230 are inserted together in the case of alignment so that the terminals of the test articles mounted to the floating member 200 can be more accurately aligned with the probes 120 supported on the plug body 100.

Referring to FIGS. 3 to 5, the operation of preventing the floating member 200 from being separated from the plug body 100 is as follows.

FIG. 3 illustrates a state before the floating member 200 is housed in the floating member accommodating cavity 101 of the plug main body 100. At this time, the separation preventing pin 130 is placed on the bottom of the separation preventing pin receiving hole 142 by its own weight.

4 shows that when the floating member 200 is housed in the floating member accommodating cavity 101 of the plug body 100, the hook protrusion 132-1 and the hook protrusion 132-2 of the separation preventing pin 130 are accommodated in the hook protrusion storage. In the hole 230. The hook protrusions 132-1 and the hook protrusions 134 of the hook protrusions 132-2 are engaged with the locking protrusions 234 of the hook protrusion receiving holes 230. At this time, the protruding ball plug 110 is inserted into the first opening 210, and the floating member 200 is elastically pressing the ball plunger 110.

FIG. 5 illustrates that the floating member 200 is moved upward by the elastic restoring force of the ball plunger 110 when the pressure of the floating member 200 in FIG. 4 is released. When the floating member 200 moves upward, the separation preventing pin 130 coupled to the floating member 200 is also lifted upward by the engagement between the hook protrusion 134 and the locking protrusion 234. As a result, the floating member 200 can elastically move within the allowable range of the separation preventing pin 130, but is prevented from being separated from the plug main body 100. If the floating member 200 is lifted upward by a force stronger than a predetermined threshold, the hook protrusion 132-1 and the hook protrusion 132-2 are elastically changed, for example, with respect to the cutting groove 136, thereby self-locking the protrusion 234 releases the hook protrusion 134. As a result, the floating member 200 can be separated from the plug body 100 for replacement, repair, cleaning, and the like. Therefore, the hook protrusions 132-1 and the hook protrusions 132-2 are elastically changed without being separated by the vertical movement for testing but are forcibly separated by an appropriate force.

The test plug 1 can have a width of 15.0 mm to 100.0 mm and a length of 15.0 mm to 150.0 mm. Therefore, the width of the hook protrusion 134 can be designed to be in the range of 0.1 mm to 0.2 mm by taking into account the elastic transformation of the hook protrusion 132-1 and the hook protrusion 132-2. That is, if the width of the hook protrusion 134 is smaller than the range, the floating member 200 is separated at the time of testing. On the other hand, if the width of the hook protrusion 134 is larger than the range, the hook protrusion 134 or the locking protrusion 234 may be broken when the floating member 200 is forcibly separated.

The separation preventing structures 130, 230 are not limited to the aforementioned structures. For example, the separation preventing pin may be disposed in the floating member, and the hook protrusion receiving hole may be disposed in the plug body 100.

Further, a groove having a locking protrusion may be formed on the outer side of the floating member as a hook protrusion receiving groove, and a hook protrusion having a hook protrusion for engaging with the locking protrusion may be provided to the floating member of the plug body The outer side of the bottom that houses the cavity. At this time, the side wall of the floating member accommodating cavity may have a configuration in which the hook protrusion protrudes from the side wall in the case where the hook protrusion is accommodated in the groove. Of course, the hook projection receiving groove must be designed to elastically deform the hook projection accommodated therein.

According to an exemplary embodiment, the test plug has a simple separation preventing structure for the floating member, thereby reducing manufacturing costs.

Additionally, this separation prevention structure for the floating member is used to achieve a more precise alignment between the terminals of the test article mounted to the floating member and the probe of the plug body.

While the several exemplary embodiments have been shown and described, it will be understood that Therefore, the foregoing must be considered as illustrative only. The scope of the invention is defined by the scope of the appended claims and their equivalents. Accordingly, all suitable modifications and equivalents may fall within the scope of the invention.

1‧‧‧Test plug
100‧‧‧ plug body
101‧‧‧Floating member housing cavity
110‧‧‧ ball stopper
112‧‧‧ cylindrical container
120‧‧‧ probe
130‧‧‧Separation prevention pin
131‧‧‧Flange end section
132-1‧‧‧ hook hooks
132-2‧‧‧ hook hooks
133‧‧‧ pillars
134‧‧‧ hook protrusion
136‧‧‧ cutting trench
140‧‧‧ bottom
142‧‧‧Separation prevention pin receiving hole
200‧‧‧ floating components
201‧‧‧Test object to accommodate the cavity
210‧‧‧ first opening
220‧‧‧ bottom
222‧‧‧ terminal hole
230‧‧‧ hook hook storage hole
234‧‧‧Lock projections

The above description of the exemplary embodiments, which will be apparent from the accompanying drawings, in which the claims Figure. Figure 2 is a bottom view of the floating member. 3 to 5 are partial cross-sectional views showing an operation of preventing the floating member from being separated from the plug body.

1‧‧‧Test plug

100‧‧‧ plug body

101‧‧‧Floating member housing cavity

110‧‧‧ ball stopper

112‧‧‧ cylindrical container

120‧‧‧ probe

130‧‧‧Separation prevention pin

140‧‧‧ bottom

200‧‧‧ floating components

201‧‧‧Test object to accommodate the cavity

Claims (3)

A test plug for testing electrical characteristics of a test article, the test plug comprising: a plug body configured to mount a plurality of probes and having a floating member receiving cavity recessed from a top surface of the plug body Each of the probes has an opposite end exposed upwardly and downwardly; a floating member disposed to include a test article mounting portion mounted with the test article, and accommodated in the floating member to accommodate And a separation preventer configured to prevent the floating member from being separated from the plug body in a state where the floating member is housed in the floating member receiving cavity of the plug body, the separating The preventer includes: a hook protrusion that protrudes from the other of the floating member and the plug body toward the other of them, and is elastically changeable in a direction transverse to a direction in which it protrudes and has freedom from it a hook protrusion that protrudes laterally at the end portion; and a locking protrusion that is disposed in the other of the floating member and the plug body, and Projection engaging the hook so that the float member relative to the plug body to float within a predetermined vertical range. The test plug of claim 1, wherein the other of the floating member and the plug body includes a hook protrusion receiving hole for receiving the hook protrusion, and The locking projection is formed on an inner wall of the hook protrusion receiving hole. The test plug of claim 1, wherein the hook projection comprises at least two hook projections branched by a longitudinal cutting groove.