TW201623850A - Vacuum valve - Google Patents

Abstract

Disclosed is a vacuum valve comprising a valve body (1) which has: a valve opening (2) that is surrounded by a valve seat; a closure member (5); and a deformable seal (7) which is arranged on the closure member (5) and interacts with a sealing surface (8) of the valve seat of the valve body (1) when the vacuum valve is closed, or which is arranged on the valve seat of the valve body (1) and interacts with a sealing surface of the closure member (5) when the vacuum valve is closed, wherein the seal (7) is located at a distance from the sealing surface (8) when the vacuum valve is open. The vacuum valve further comprises at least one magnetic element (10) which can be adjusted or switched between an inactive state and an active state. The seal (7) has a magnetisable material. When the vacuum valve is closed, the at least one magnetic element (10) is in its active state and generates a magnetic field which acts on the magnetisable material of the seal (7), which magnetic field produces a force that deforms the seal (7) and presses on the sealing surface (8).

Description

Vacuum valve

The invention relates to a vacuum valve comprising a valve body having an opening surrounded by a valve seat, a closing portion, a deformable sealing member, the sealing member being disposed on the closing portion, and being in the vacuum valve a closed state acts on a sealing surface of one of the valve seats of the valve body, and the sealing member is disposed on the valve seat of the valve body, and acts on a sealing surface of one of the closed state of the vacuum valve and the closing portion, wherein the sealing member is in the vacuum One of the open states of the valve is spaced from the sealing surface and at least one magnetic element is switchable between an active state and an inert state.

It is known in the vacuum valve that a closing link is guided to the valve seat of a valve body in an L-shaped motion, and the valve opening of the valve body surrounded by the valve seat is closed when the vacuum valve is closed. And sealed. The L-shaped motion may be in the form of a first movement of a closed link on a valve stem from a closed position to an intermediate position, and a continuation of the closing of the first movement at a right angle from the intermediate position to a A second movement of the closed position in which the seal disposed on the closed link is in sealing engagement with one of the valve seats but at a distance therefrom, in which the seal is pressed against the sealing surface. One kind Such a vacuum valve is for example found in US 2011/0175011 A1. The second movement of the closing link from the intermediate position to the closed position can also be effected by pivoting a valve stem which is provided on the valve stem. Vacuum valves of this type are described, for example, in US 2010/0090145 A1 or US 5,641,149 A. The sealing member can also be arranged on the valve seat, and the sealing surface is arranged on the closing portion. If the closing link does not take a linear motion between the starting position and the intermediate position, it is also possible to carry out, for example, a movement along an arc, as is known in the shuttle valve. The pressing force acting on the closing link on all such vacuum valves must be transmitted via the valve stem, which presses the seal against the sealing surface with a sealing force. This causes undesired deformation of the part and also produces particles in a vacuum.

A vacuum valve of the aforementioned type is found in US 2014/0241848 A1. In this vacuum valve, the closing link is magnetically adjusted from the intermediate position to the closed position. For this purpose, one of the walls of the valve body is provided with an electromagnet on its inner side near the valve opening area, and the electric power can be switched between an inert state and an active state, and a ferromagnetic member is provided on the inside or in the closing position. A spring element is arranged between the closing link and the valve stem of the load-closing section, and the magnetic force resists the spring force to adjust the closing link from the intermediate position to the closed position. When the callback is adjusted from the closed position to the intermediate position, the electromagnetic field is cut off by the spring element. Therefore, it is necessary to have a proper movement between the closing step and the valve stem, which results in a complicated design and generates particles in a vacuum. In practice, the closing link is accurately positioned in the middle position, and it is necessary to make the magnetic force act on the closing link in an appropriate manner, which is also very troublesome.

An inflatable seal is disclosed by US 2012/0317887 A1 Pieces. The seal is designed in the shape of a tube with a surrounding inner chamber in which a fluid can be introduced under pressure. The seal is thus deformed and pressed against the sealing surface. Inflatable seals are found in US 5,772,950 A, US 2004/0123916 A1, GB 1 530 977 A, and US 4,080,526 A. One problem with such bulging seals is, in particular, that, based on the inherent rigidity of the material required, such seals can only achieve a far lower number of seal bulging cycles before damage, and the fluid is deformed and deformed. The number of drain cycles.

It is an object of the invention to provide an advantageous vacuum valve of the aforesaid type which allows for a simple construction. This object is achieved in the present invention by a vacuum valve having the features of claim 1 of the patent application.

In the vacuum valve of the present invention, the deformable seal has a magnetizable material. In the closed state of the vacuum valve, a magnetic field acts on the magnetizable material of the seal which is generated by at least one magnetizable element. This magnetic field creates a force that deforms the seal and presses the seal against the sealing surface.

In an advantageous embodiment of the invention, the magnetic element or at least one of the magnetic elements, preferably each magnetic element, is electrically activated and has an electromagnet. This electromagnet can be switched between its inert state and its active state. In addition, or in the alternative, at least one movable permanent magnet that is movably mounted and that is adjustable, for example, pneumatically, via a trigger path between an inert and an active state may be provided.

Through the design of the present invention, a vacuum valve can be provided, which is true The mechanical load of the closed state of the air valve, for example, the load acting on a valve stem is not large, and the closing element is attached to the valve stem.

In a vacuum valve of the present invention, the generation of particles at the time of opening and closing of the vacuum valve can be advantageously maintained to a very small extent.

In an advantageous embodiment of the invention, before the at least one magnetic component is adjusted from the inert state to the active state, or before switching, the seal is in a first state and is sealed to cover all of its circumferences. Preferably, the distance is maintained via a gap. The seal is deformed from the first state to a second state only by switching or adjusting the inert to active state via the at least one magnetic element, in which the seal is pressed against the sealing surface with all of its circumference. The gap originally existing between the seal and the sealing surface is thus closed only by the deformation of the first member of the seal to the second state. It is basically also conceivable and feasible that the deformable seal is in contact with the sealing surface in its first state, that is to say in the inert state of the at least one magnetic element (and between the sealing member and the sealing surface) The force of action is significantly less than the pressing force existing when the vacuum valve is closed in the closed state of the vacuum valve, preferably less than one tenth, and is pressed with the required force when the at least one magnetic element is switched or adjusted to the active state. On the sealing surface, it is deformed to its second state with respect to the inert state of the at least one magnetic element.

In a possible embodiment of the invention, in addition to at least one magnetic component, at least one additional magnetic component may be provided on the side of the seal away from the sealing surface. The at least one magnetic component and the at least one additional magnetic component are located on opposite sides of the seal in a closed state of the vacuum valve. The seal from its first state to its second state The deformation is performed in this example by deactivating the at least one additional magnetic element and activating the at least one magnetic element, and the deformation of the seal from its second state to its first state is via activation of the at least one additional magnetic Implementing the component and deactivating the at least one magnetic component. The deformation of the seal between the first state and the second state, in particular the return deformation of the seal to its first state, is first supported via the at least one additional magnetic element. The seal thus does not require a special inherent elasticity and can also be embodied as a non-elastic deformation. In the first state of the seal, the seal is preferably held at a distance from the sealing surface via a gap before it is deformed to the second state, but may also be slightly followed by the sealing surface, as previously described.

According to an advantageous embodiment of the invention, the closing link is adjustable between a starting position and an ending position, in which the vacuum valve has an open state. This adjustment of the closing element from the starting position to the ending position thus represents the first phase of the closing process. The second phase of the shutdown process follows, during which at least one magnetic component is activated. When at least one additional magnetic element is present, then the additional magnetic element is activated at the end of the first phase and is now deactivated. The seal is activated by the at least one magnetic element and, if necessary, deactivates the at least one additional magnetic element from its first state to its second state, in the second state it is sealed on its entire circumference by a sealing force On the surface. At the end of the first phase of the closing process, i.e. at the end of the closing section, the seal is preferably spaced from the sealing surface, particularly preferably all of its circumference is kept at a distance from the seal, but at its entire circumference at the sealing face. It is also possible to contact the sealing surface at the end of the first phase of the closing process (the force acting between the sealing member and the sealing surface is significantly less than The pressing force existing in the closed state of the vacuum valve is preferably less than one tenth. When the movement of the closing step in the first stage of the closing process is a straight line, the design of the vacuum valve of the present invention is comparable to that of a conventional L valve, and in the present invention the second portion of the L movement is closed at the vacuum valve. It is carried out by the deformation of the seal.

In the first phase of the closing process, the closing section can also be implemented with a shuttle valve type of circular motion or a butterfly valve type of rotary motion.

In an advantageous design of the seal, it has a tubular body having an internal empty chamber containing a magnetizable fluid in the empty chamber, in particular in the form of an iron-based liquid. If a magnetizable fluid is not used, the magnetizable particles in the plastic material into which a seal can be implanted may be used in addition or additionally.

1‧‧‧ valve body

2‧‧‧ valve opening

3‧‧‧ axis

4‧‧‧Shell Department

5‧‧‧Closed link

6‧‧‧ valve stem

7‧‧‧Seal

7a‧‧‧ body

7b‧‧‧Magnetizable fluid

8‧‧‧ sealing surface

9‧‧‧Actuator

10‧‧‧Magnetic components

10a‧‧‧Small tablet

10b‧‧‧ permanent magnet

10c‧‧ empty room

10d‧‧‧Spring

10e‧‧‧ Container

11‧‧‧Electrical wires

12‧‧‧Extra magnetic components

13‧‧‧Magnetizable particles

14‧‧‧Seal

Further advantages and details of the invention will be further explained below on the basis of the figures. 1 is a view of a vacuum valve according to a first embodiment of the present invention; FIG. 2 is a cross-sectional view taken along line AA of the vacuum valve in an open state; FIG. 3 corresponds to a diagram after the first stage of the closing process 2 is a cross-sectional view; FIG. 4 is equivalent to a cross-sectional view of FIG. 2, the vacuum valve is in a closed state; FIG. 5 is a magnified detailed view B; FIG. 6 is an enlarged view C; FIG. An oblique view of the vacuum valve; Figure 8 is a perspective view similar to Figure 7, in which there is no valve body; Figure 9 to Figure 11 of the vacuum valve of the present invention corresponds to the cross-sectional view of Figure 2 to Figure 4; Figure 12 Figure 9 is an enlarged detail of Figure D; Figure 13 Figure 10 is an enlarged detail view E; Figure 14 Figure 11 is an enlarged detail view F; Figure 15 and Figure 16 The third embodiment of the present invention corresponds to the detailed view of Figure 5 and Figure 6; Figure 17 and Figure 18 The fourth embodiment of the invention corresponds to the detailed views of Figs. 5 and 6.

A first embodiment of a vacuum valve of the present invention is shown in Figures 1-8. The vacuum valve has a valve body 1 which, in the embodiment, is provided with a flange on the opposite side of the valve body for connecting the vacuum valve to other components of a vacuum apparatus, such as a vacuum chamber. The valve body 1 has a passageway having a valve opening 2, the axis 3 of the valve opening.

In the embodiment shown, the valve body 1 is connected to a housing part 4 in a vacuum-tight manner. The valve body 1 and the housing portion 4 together form a valve housing.

In other embodiments, the valve body 1 can also be designed such that it separately constitutes a valve housing, or there can be a housing portion of other shape, or more than one housing portion, for forming a valve housing.

The valve housing has an internal space that constitutes a vacuum of the vacuum valve Area. A closing portion 5, which is designed in the form of a plate, is accommodated in the interior of the valve housing and can also be referred to as a valve plate.

The closing link 5 is provided on a valve stem 6. The valve stem is led out of the valve housing via a vacuum. This vacuum execution is performed linearly in the embodiment. A seal 14 is visible in FIGS. 2 to 4 for sealing between the valve stem 6 and the housing portion 4. For example, a bellows can also be used for linear execution.

A sealing member 7 with a peripheral edge is provided on the closing portion 5. The seal 7 is circular, in the exemplary embodiment, circular, while in other embodiments it may be a seal 7 of other annular closure configuration.

In the region surrounding the valve opening 2, in the closed state of the vacuum valve, the sealing member 7 interacts with this region as a valve seat of a vacuum valve, and a sealing surface 8 is provided on the valve seat, and the sealing member 7 is closed in the vacuum valve state. On it. The sealing surface 8 has a ring shape corresponding to the shape of the sealing member 7, and thus is annular in the embodiment.

The combination of the reverse mounting is also possible. According to the reverse assembly, an annular ring, for example a circular ring, is provided on the closing portion 5, and a sealing member having a corresponding annular shape is provided on the valve seat.

The closing link 5 can be linear in the embodiment, or can be linearly adjusted between the initial position and the end position. This adjustment takes place in particular at right angles to the axis 3 of the valve opening 2. To adjust the closing link 5, the valve stem 6 is axially displaced. This axial shifting of the valve stem 6 is by means of an actuator, which in the embodiment consists of a pneumatic piston-cylinder unit. Other actuators, such as electric drives The actuator can also be put into use.

The closing link 5 may also not use a linear motion between the starting and ending positions, but another movement of the closing link 5, for example along an arc, as is known in shuttle valves.

At the beginning of the closing section 5, the vacuum valve has its fully open state, see Figure 2. Preferably, the valve opening 2 is fully open, that is, the closing link 5 does not obscure the valve opening 2 as viewed in the direction of the axis 3 of the valve opening 2.

When the vacuum valve is closed from its fully open state, the closing link 5 is adjusted from its starting position to its end position during the first phase of the closing process. The end position of the closing link 5 is shown in FIG. At the end of the closing section 5, the seal 7 is first in a first state in which the seal 7 is kept at a distance from the sealing surface 8 to maintain a distance over its entire circumference. There is a gap between the seal 7 and the sealing surface 8, see Figure 5. This gap is preferably less than 1 mm wide.

Starting from the end position of the closing link 5 and the first state of the seal 7, the second phase of the closing process is performed to close the vacuum valve. In the closed state of the vacuum valve, the closing section 5 and the sealing of the sealing member 7 on the sealing surface 8 via a full circumference with a sufficiently large sealing force are used to seal the valve opening.

Here, it is also possible to design a differential pressure differential of the vacuum valve, that is, an atmospheric pressure existing on the subsequent side of the sealing member 7 of the closing section 5 can be pressed against one of the opposite sides (arbitrarily high) to seal.

The second phase of the closing process is carried out by the deformation of the first to second states by the magnetic force via the seal 7.

For this purpose, the sealing element 7 has, in the embodiment, a tubular body 7a having an internal empty chamber extending in the longitudinal direction. The empty chamber is self-closing, i.e., annular (in the embodiment, circular). There is a magnetizable fluid 7b in the empty chamber of the body 7a. The magnetizability of the fluid comes in particular from the magnetizable particles suspended therein. The magnetizable particles are composed of iron, magnetite or cobalt, or a ferromagnetic material.

The magnetizable fluid is in particular an iron-based fluid. Iron-based flow systems are well known. The suspended particles have a typical diameter of 5 nm to 10 nm. The viscosity of the iron-based fluid hardly changes with the magnetic field relative to the magnetorheological fluid. Magnetorheological fluids also have suspended magnetizable particles, but are significantly larger than iron-based fluids, typically one to three orders of magnitude larger.

The seal may also have more than one empty chamber in which a magnetizable fluid is disposed. This design is also known as "tubular shape".

An annular magnetic element 10 is provided on the valve seat. The shape of the magnetic element 10 corresponds to the shape of the seal 7, which is annular in the embodiment. The magnetic element 10 is placed in a deep recess of the valve body 1 and closed in a direction toward the outer surface of the valve body by a ferromagnetic small plate 10a. Its outer surface constitutes a sealing surface 8. Both sides of the small plate 10a are welded to the valve body 1 such that the portion of the magnetic member 10 located below it is advantageously closed by the vacuum zone. The small flat plate 10a can be regarded as a part of the magnet portion 10, or as a separate portion, and is shielded by the magnet portion 10. The magnetic element 10 can also be cast, for example, in a deep recess of the valve body 1. Yes, there is no need for a separate small tablet 10a. The outer surface of the magnetic element 10 can still form the sealing surface 8.

In the embodiment, the magnetic element 10 is adjustable between an active state and an inert state, in which it can electrically excite a magnetic field, while in an inert state it does not. An electrical lead 11 for activating or deactivating the magnetic element 10 is indicated by a dashed line in Figures 2 to 4. In particular, the magnetic element 10 has a circular electromagnet disposed below the small plate. The magnetic element 10 can also have a plurality of individual electromagnets disposed below the small plate 10a along a circle.

Other magnetic components 10 that can be activated and deactivated can also be provided. For example, such a magnetically actuatable and deactivated magnetic element 2 has a relatively twisted permanent magnet when power is activated and deactivated.

More than one magnetic element 10 may be provided, for example, an annular magnetic element 10 may be disposed on each side of the annular sealing surface formed by the surface of a valve body.

If the sealing element 7 is arranged on the valve seat, the magnetic element 10 is arranged on the closing part 5, for example in one of the deep recesses of the closing part 5, and is welded or cast into the closed part 5 with respect to the closing part 5 in.

The at least one magnetic element 10 is thus located on the side of the sealing member 7 facing the sealing surface in the closed state of the vacuum valve.

When the magnetic element 10 is activated at the end position of the closing element 5, the sealing member 7 passes through a magnetic field excited by the magnetic element 10, which acts on the magnetizable fluid 7b and attracts the fluid, deforming from the first state to the second state. . In this second state, the sealing member 7, in particular a section of the tubular body 7a interposed between the magnetizable fluid 7b and the sealing surface 8, is pressed against the sealing surface 8, see Figs. 4 and 6. The gap between the sealing member 7 and the sealing surface 8 is thus closed and generated by magnetic force The sealing force acts on the seal 7 to bring it closer to the cover 8.

The body 7a of the seal 7 is in this embodiment made of a plastic material in the form of an elastomer (Elastomer). Therefore, the body 7a and the sealing member 7 collectively have an elasticity such that when they are deformed from an initial state in which no external force acts, a returning force toward the initial state thereof is established.

To open the vacuum valve, the magnetic element 10 is placed inert during the first stage. The seal 7 is deformed from its second state to its first state due to its elasticity, as shown in FIG.

In the second phase of the opening process, the closing step is slid from its end position to its starting position.

A second embodiment of the invention is shown in Figures 9-14. The description in the first embodiment, including possible modifications, is also applicable to this embodiment, except for the differences that will be explained below.

In this embodiment the elasticity of the seal is not large, when the magnetic element 10 is deactivated, it is deformed from its second state to its first state, and/or the seal 7 is between its first and second states. The deformation should be enlarged. Thus, for example, a larger gap can be spanned between the seal and the sealing surface. For this purpose, an additional magnetic element 12 is provided on the side of the seal 7 opposite the sealing surface 8. This additional magnetic element 12 can be electrically activated and deactivated in this embodiment. The configuration of the additional magnetic element 12 can be the same as the magnetic element 10, for example, and more than one additional magnetic element 12 can be provided.

In this case, the additional magnetic element is in the first position of one of the seals 7. The piece 12 is activated and the magnetic element 10 is deactivated.

In order for the seal 7 to be deformed from its first state to its second state, the additional magnetic element 12 is deactivated and the magnetic element 10 is activated. In order for the seal 7 to be deformed from its second state to its first state, the additional magnetic element 12 is activated and the magnetic element 10 is deactivated.

When the closing element 5 is adjusted between its starting position and its end position, the additional magnetic element 12 is activated and the magnetic element 10 is deactivated. When the seal 7 is pressed against the sealing surface 8 via the deformation of the seal 7 at the end of the closing section 5, the additional magnetic element 12 is deactivated and the magnetic element 10 is activated.

Similarly, the seal may not be provided on the closing portion 5 but on the valve seat of the valve body 1. The additional magnetic element 12 is likewise provided on the valve body 1 (on the side of the seal 7 remote from the sealing surface). The sealing surface 8 is then provided on the closing section 5.

A third embodiment of the present invention is shown in Figs. 15 and 16. The description in the first embodiment, including possible modifications, is also applicable to this embodiment, except for the differences that will be explained below.

In this embodiment, a magnetizable fluid is not required in the seal 7. Instead, the magnetizable particles 13 are implanted in the material of the seal. In the active state of the at least one magnetic element 10, the particles are magnetically attracted by the magnetic element 10 such that the sealing member covers the sealing surface with a sealing force.

In Figures 15 and 16, the seal is still shown as tubular with a single internal void extending longitudinally. Thereby, the seal is apt to achieve sufficient deformability. However, the seal can also be designed to have no internal empty space or have more An internal empty room.

It is also possible that only one of the segments of the seal 7 closest to the sealing surface 8 has magnetizable particles 13.

Similarly, the sealing member may be provided on the valve seat and the at least one magnetic component 10 is disposed on the closing portion. A configuration similar to that of the second embodiment may be provided having at least one additional magnetic element disposed on the side of the seal away from the direction of the magnetic element.

A fourth embodiment of the present invention is shown in Figs. 17 and 18. The description in the first embodiment, including possible modifications, is also applicable to this embodiment, except for the differences that will be explained below.

The adjustment of the magnetic element 10 between its inert state and its active state is achieved here by a change in the position of a permanent magnet 10b. The sealing surface 8 is still formed by the outer surface of the small plate 10a that encloses the magnetic element 10. The magnetic element 10 has a container 10e having an empty chamber 10c in which the permanent magnet 10b can be placed at a distance from the small plate 10a (see Fig. 17) and a position on the small plate 10a. Slide (see Figure 18). In the illustrated embodiment, a spring 10d is present to bias the permanent magnet 10b in the direction of the small plate 10a. In order to slide the permanent magnet 10b away from the small flat plate 10a, for example, a pneumatic load can be applied to the permanent magnet 10b. The permanent magnet 10b is thus designed with reference to the piston of the pneumatic piston-cylinder unit (the pneumatic line is not shown in Figures 17 and 18 for clarity). The spring 10d can also be removed, and the sliding of the permanent magnet 10b can be performed via a fluid, and can enter a position away from the small plate 10a. It is also possible to enter the position on the small flat plate 10b.

In this embodiment an additional magnetic element 12 can be present similar to the embodiment of Figures 9-14. This can for example be designed in the form of an electromagnet or like the magnetic element 10 shown in Figures 17 and 18.

In the fourth embodiment, the sealing member 7 may also be free from a magnetizable fluid, and is designed as a seal similar to that described in the third embodiment.

Further, different designs of the vacuum valve of the present invention are conceivable and feasible. For example, one of the designs of the present invention can be used in a so-called "soft start" valve. In one such valve, the first valve opening is first opened, which only forms a very small opening section until a second valve opening is opened, the second opening opening through the actual passage of the valve, which reduces the turbulence. The valve body having the first valve opening therein may be a valve plate for closing the second opening. In the present invention, the closing of the first valve opening via a closing link can be effected by a magnetic force through a magnetic seal having a magnetizable material. The opening and closing of the first valve opening can be effected only by the seal between the first and second states. There is no longer a need to close the link to an additional movement between the start position and the end position.

In all embodiments of the invention, a magnetic force acts on a magnetizable seal material in the closed state of the vacuum valve. The force thus generated acts on the magnetizable material of the seal and in the direction of the sealing surface, via which a section of the seal presses against the sealing surface in the event of a deformation of the seal.

1‧‧‧ valve body

2‧‧‧ valve opening

3‧‧‧ axis

5‧‧‧Closed link

6‧‧‧ valve stem

7‧‧‧Seal

8‧‧‧ sealing surface

10‧‧‧Magnetic components

11‧‧‧Electrical wires

Claims (15)

A vacuum valve comprising a valve body (1) having a valve opening (2) surrounded by a valve seat, a closing portion (5), and a deformable sealing member (7) disposed at the closing portion (5) Above, and in the closed state of one of the vacuum valves, acting on one of the sealing faces (8) of the valve seat of the valve body (1), or on the valve seat of the valve body (1), and in the closed state of one of the vacuum valves Acting on a sealing surface of one of the closing links (5), wherein the sealing member (7) is kept away from the sealing surface (8) in an open state of the vacuum valve, and at least one magnetic element (10) is in an inert state and a The active state is adjustable or switchable, characterized in that the sealing member (7) has a magnetizable material, and at least one magnetic component (10) in the active state of the vacuum valve is activated to act on the sealing member. (7) A magnetic field on the magnetizable material that produces a force that deforms the seal (7) and presses against the sealing surface (8). The vacuum valve according to claim 1, wherein the sealing member is deformed from a first state to a second state by switching or adjusting from inert to active state via the at least one magnetic component (10). In the first state the seal (7) is kept at a distance from the sealing surface (8), and in the second state the seal (7) is pressed against the sealing surface (8). The vacuum valve according to claim 2, wherein the sealing member (7) has an elasticity, wherein the sealing member (7) is at the at least one magnetic element When the member (10) is adjusted or switched from its activity to its inert state, its elasticity is only deformed from its second state to its first state. The vacuum valve according to claim 1 is characterized in that at least one additional magnetic element (12) is present on the side of the sealing member (7) away from the sealing surface (8), which can be in an inert state and a Adjusting or switching between active states, wherein at least one additional magnetic element (12) generates a magnetic field in the active state of at least one additional magnetic element (12) acting on the magnetizable material of the seal, the magnetic field creating a seal The deformation of the piece and the force to keep a distance from the sealing surface (8). A vacuum valve according to claim 4, characterized in that the seal (7) is switched or adjusted from at least one additional magnetic element (12) from active to inert and via at least one magnetic element (10) Switching or adjusting from inert to active, may be in a first state in which the seal (7) is at a distance from the sealing surface (8) and deformed to a second state in which the seal is pressed against the sealing surface (8) Upper. A vacuum valve according to any one of claims 1 to 5, characterized in that the seal (7) has or consists of a tubular body (7a) having an interior Empty room. A vacuum valve according to claim 6, wherein the inner chamber of the tubular body (7a) comprises a magnetizable fluid (7b). A vacuum valve according to claim 7 of the invention, characterized in that the magnetizable flow system is an iron-based fluid. The vacuum valve according to any one of claims 1 to 8, characterized in that the magnetizable particles (13) are implanted in a plastic material of one of the seals (7). The vacuum valve according to any one of claims 1 to 9, wherein the at least one magnetic component is provided if the combination of the sealing member (7) is provided on the closing portion (5) 10) is disposed on the valve body (1), and if the combination of the sealing member (7) is disposed on the valve body (1), the at least one magnetic element (10) is disposed on the closing portion (5). A vacuum valve according to claim 10, characterized in that the at least one magnetic element (10) has at least one solenoid valve switchable between its inert state and its active state, or has at least one movable installation. A permanent magnet that is movable between a first position and a second position for adjustment between its inert state and its active state. The vacuum valve according to any one of the items 1 to 11, wherein the sealing surface (8) is provided on the magnetic element (10) or is shielded from a magnet portion (10). On the ferromagnetic small plate (10a). The vacuum valve according to any one of claims 1 to 12, wherein the closing link (5) is adjustable between a starting position and an ending position, and the vacuum is at the starting position The valve is open. The vacuum valve according to claim 13 is characterized in that, at the end of the closing step (5), the sealing member (7) is deformable between a first state and a second state via a magnetic force, and Seal (7) in the second state Pressing on the sealing surface (8) and maintaining a distance from the sealing surface (8) in the first state, or a force on the sealing surface (8), the force being less than pressing the sealing member (7) in the second state The force on the sealing surface (8). The vacuum valve according to claim 13 or 14, wherein the closing link (5) is linearly adjustable between a starting position and an ending position.