TW201601384A - Electrical contactor and electrical connecting apparatus - Google Patents

Abstract

Provided is an electrical contactor capable of fully achieving the characteristic of electrical contact with less units. The electrical contactor of the present invention includes: (1) a spiral spring operable to be a pillar plug, including a pillar plug part and a spiral spring part formed with the same wire integrally, in which the pillar plug part is in contact with a first contact object and the spiral spring part will prepare to spring and push in the direction of stretch when it is pressed; and (2) a pillar plug, being a tabular pillar plug in contact with a second contact object, in which a wire part of the base side in the aforementioned pillar plug part is electrically connected with a plane of the pillar plug and flexibly sustained in the direction of stretch through the aforementioned spiral spring part. The electrical contactor of the present invention is operable to be at least a part of electrical contactors in an electrical connecting apparatus having the electrical contactors connecting the first contact object and the second contact object electrically.

Description

Electrical contact and electrical connection device

The present invention relates to an electrical contact and an electrical connection device, for example, an electrical contact that is in contact with an electrode provided in a wiring substrate or a semiconductor integrated circuit, or an electrical connection having a plurality of electrical contacts. Device.

It is well known that electrical contacts such as electronic circuits on a wiring board that are disposed opposite each other are electrically connected to each other. Examples of such an electrical contact include those described in Patent Document 1 or Patent Document 2.

As shown in FIGS. 22 and 23, the electrical contact 1 described in Patent Document 1 has two contact pins 2 having the same shape and a coil spring 3. The contact pin 2 mainly has a locking claw 4, a locking hole 5, a flange portion 6, and a pin tip end portion 2A. The locking claws 4 are provided in two opposite directions, and are supported by the flexible supporting rod portion 4A. Thereby, the two locking claws 4 are brought close to each other. The locking hole 5 is a hole into which the locking claw 4 of the other contact pin 2 is fitted, and is formed in a rectangular shape in accordance with the width of the locking claw 4. Thereby, the two contact pins 2 are shifted by 90 degrees around the axis in the longitudinal direction. The lower side faces the surface and is relatively close to the upper and lower directions, so that the two locking claws 4 of one contact pin 2 are locked to the opening of the locking hole 5 of the other contact pin 2, The two contact pins 2 are connected. The flange portion 6 is a portion that is abutted by the coil spring 3. The two contact pins 2 are engaged in a state in which they are inserted into the coil springs 3, whereby the both ends of the coil spring 3 abut against the respective flange portions 6, and are assembled into the electrical contacts 1. Both end portions of the electrical contact 1 assembled in this manner are pin end portions 2A that are electrically connected to an external electrode or the like.

Further, as shown in FIG. 24, the electrical contact 7 described in Patent Document 2 has a plunger 8 and a coil spring 9. The plunger 8 is formed in an elongated plate shape, and has a widened portion 8A that receives the coil spring 9 at its upper portion, and a terminal portion 8B that is in contact with the electrode is formed on the upper portion of the widened portion 8A. A mandrel portion 8C that is vertically inserted into the coil spring 9 is formed in a lower portion of the widened portion 8A. The coil spring 9 has an inner diameter formed so that the mandrel portion 8C can be inserted up and down freely. The diameter of the lower end portion side of the coil spring 9 is gradually reduced, and the lower end portion having the smallest diameter is in contact with an external electrode or the like.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Publication No. 2008-516398

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2004-152495

In the electrical contact 1 described in Patent Document 1, when the locking claw 4 of one contact pin 2 repeatedly contacts the periphery of the locking hole 5 of the other contact pin 2 as the electrical contact 1 expands and contracts, Then, the locking claw 4 or the support rod portion 4A may be damaged by abrasion or the like, and insufficient durability may occur.

Further, in each of the contact pins 2, the locking claws 4 are only engaged with the locking holes 5 on the other side, and the contact area between them is small. Therefore, the coil springs 3 are mainly responsible for electrical connection. The locking claw 4 or the portion supporting the rod portion 4A must be opened and fitted into the locking hole 5 on the other side in a state of being inserted into the coil spring 3, so that it is difficult to design the inner diameter of the coil spring 3 as a hoop. Close contact with pin 2. Further, since the coil spring 3 is a compression spring and has few contact points with the contact pin 2, the adhesion between the contact pins 2 and the coil spring 3 is weak. Therefore, the contact portion between the flange portion 6 of each contact pin 2 and the coil spring 3 serves as a main current passage, but the contact area is narrow and wear, corrosion, and the like are likely to occur, and electrical contact is poor. Further, the contact end of the contact pin 2 is a V-shaped slit, and in the case where the contact object is a hemispherical bump electrode, if there is a slight positional deviation in the depth direction of the V-shape, electrical contact occurs. Sex will suddenly worsen.

Furthermore, in order to realize the electrical contacts 1 of different lengths, the contact pins 2 and the coil springs 3 must be used in accordance with the length. When the number of electrical contacts 1 is large, the cost per unit component also becomes high.

The electrical contact 7 described in Patent Document 2 is composed of a plunger 8 and a screw. The two parts of the coil spring 9 are formed, which is an advantage. However, since the inner diameter of the coil spring 9 is set to a size that allows the mandrel portion 8C of the plunger 8 to be inserted up and down freely, the plunger 8 and the coil spring 9 are not in contact with each other when they are in time contact, and electrical properties are obtained. Poor contact. The plunger 8 is electrically connected to the spring 9, mainly the junction of the widened portion 8A of the plunger 8 and the upper end portion of the spring 9. Therefore, the contact area is narrow, and it is easy to cause contact failure due to abrasion, corrosion, etc., and there is a problem that electrical contact is poor and durability is insufficient.

Further, the end portion of the coil spring 9 is in contact with one of the electrodes, but since the coil spring 9 is wound in a spiral shape, the vicinity of the cut end of the end portion is not horizontal, and electrical contact is also poor at this point. .

Furthermore, if the plunger 8 and the coil spring 9 are used to meet the length in order to realize the electrical contacts 7 of different lengths, the cost per unit component will also become high. On the other hand, in the case where only the coil springs 9 are prepared for different lengths, if the electrical contacts 7 are long, the portion of the coil spring 9 where the plunger 8 does not exist will become longer, and if the radial direction is affected by some The external force is easily deformed, and the electrical contact 7 may not fully function.

The present invention has been made in view of the above problems, and it is desired to provide an electrical contact capable of achieving sufficient electrical contact with a small number of cells, or an electrical connection device using such an electrical contact.

An electrical contact according to a first aspect of the present invention, comprising: (1) a plunger-using coil spring, wherein the plunger portion and the coil spring portion are the same The wire member is integrally formed, and the plunger portion is in contact with the first contact object, and the coil spring portion is biased to be pushed in the stretching direction when compressed; and (2) the plunger is in contact with the second contact object. In the plunger, the wire portion on the proximal end side of the plunger portion is in electrical contact with the plane of the plunger, and is supported by the coil spring portion so as to be telescopically supported in the extending direction.

Here, it is preferable that the plunger has two wire portions that sandwich the base end side of the plunger portion.

Further, preferably, the plunger portion has a wire portion facing the first contact target side, a wire portion contacting the first contact object, and a wire portion remote from the first contact object side; Preferably, the wire portion that is in contact with the first contact object extends in a wave shape, and is in contact with the first contact object by a plurality of protruding portions that protrude toward the first contact object side.

According to a second aspect of the invention, there is provided an electrical connection device having a plurality of electrical contacts for electrically contacting a first contact object and a second contact object, wherein the electrical contact is used as at least a part of the electrical contact The electrical contact of the first invention.

Here, in addition to the electrical contact (first electrical contact) of the first aspect of the invention, it is preferable to use a second electrical contact using a plunger, and the column of the first electrical contact The plug and the plunger of the second electrical contact have the same shape.

According to the first invention, it is possible to achieve a smaller number of cells An electrical contact that achieves sufficient electrical contact. According to the second aspect of the invention, the electrical connecting device to which the electrical contact of the first aspect of the invention is applied can be realized.

11‧‧‧Electrical connection device

12‧‧‧Inspected body

13‧‧‧Bump electrode (2nd contact object)

15‧‧‧Wiring substrate

16‧‧‧lower shell

17‧‧‧Upper shell

18‧‧‧Frame

19‧‧‧Guideboard

20‧‧‧Signal waveforms pay attention to electrical contacts

22‧‧‧Contact pads of wiring board (first contact target)

62‧‧‧1st plunger

63‧‧‧2nd plunger

64‧‧‧Helical spring

200‧‧‧Electrical contacts of the first embodiment

201‧‧‧Plunger and coil spring

262‧‧‧Plunger

263‧‧‧Plunger

264‧‧‧Spiral spring part

266‧‧‧Combination Department

268‧‧‧Contacts

Fig. 1 is a schematic perspective view of an electrical contact of a first embodiment.

Fig. 2 is a schematic plan view showing an electrical connecting device of a first embodiment.

Fig. 3 is a schematic cross-sectional view (cross-sectional view taken along line III-III of Fig. 2) of the electrical connecting device of the first embodiment.

Fig. 4 is a schematic cross-sectional view (cross-sectional view taken along line IV-IV of Fig. 2) of the electrical connecting device of the first embodiment.

[Fig. 5] Fig. 5 is a partially enlarged cross-sectional view showing the mounting portion of the electrical contact in the electrical connecting device of the first embodiment, showing the front or side of the electrical contact in a state where it is not in contact with the electrode of the test object. Schematic cross-section.

Fig. 6 is a partially enlarged cross-sectional view showing the mounting portion of an electrical contact in the electrical connecting device of the first embodiment, showing the front side or the side surface of the electrical contact in a state of being in contact with the electrode of the test object. Sectional view.

[Fig. 7] The signal waveform emphasizes the electrical contact schematic front view.

[Fig. 8] A schematic side view of the signal waveform focusing on the electrical contact.

Fig. 9 is a cross-sectional view taken along line IX-IX of Fig. 7;

Fig. 10 is a cross-sectional view taken along line X-X of Fig. 7;

[Fig. 11] A schematic front view of a first plunger in which a signal waveform emphasizes an electrical contact.

[Fig. 12] Signal waveform emphasizes the second plunger of the electrical contact Figure.

[Fig. 13] A schematic front view of a coil spring in which a signal waveform emphasizes an electrical contact.

Fig. 14 is a front elevational view showing the electrical contact of the first embodiment.

Fig. 15 is a schematic side view showing an electrical contact of the first embodiment.

Fig. 16 is a schematic plan view showing an electrical contact of the first embodiment.

Fig. 17 is a schematic bottom plan view showing electrical contacts of the first embodiment.

Fig. 18 is a front elevational view showing a plunger-use coil spring in the electrical contact of the first embodiment.

Fig. 19 is a schematic side view showing a plunger-use coil spring in the electrical contact of the first embodiment.

FIG. 20 is a schematic explanatory view showing an example of a shape of a contact portion of a plunger portion of a plunger-use coil spring in the electrical contact of the first embodiment.

FIG. 21 is a schematic explanatory view showing an example of a trajectory drawn by a joint portion wire of a plunger portion of a plunger-use coil spring in the electrical contact of the first embodiment.

Fig. 22 is a schematic perspective view of a conventional electrical contact (1).

FIG. 23 is an exploded perspective view of the electrical contact of FIG. 22. FIG.

Fig. 24 is a schematic perspective view of a conventional electrical contact (2).

(A) First embodiment

Hereinafter, a first embodiment of an electrical contact and an electrical connecting device according to the present invention will be described with reference to the drawings.

First, an electrical connecting device 11 according to a first embodiment of the electrical contact of the first embodiment will be described with reference to Figs. 2 to 6 . Further, in the electrical connecting device 11 of the first embodiment, the object to be inspected is a quadrangular shape, but the present invention can be applied even if the object to be inspected is of another shape.

Fig. 2 is a schematic plan view of the electrical connecting device of the first embodiment, Fig. 3 is a cross-sectional view taken along line III-III of Fig. 2, and Fig. 4 is a cross-sectional view taken along line IV-IV of Fig. 2. 5 and FIG. 6 are enlarged cross-sectional views of the mounting portion of the electrical contact in the electrical connecting device of the first embodiment, and FIG. 5 shows that the electrical contact is not in contact with the electrode of the object to be inspected. State, Fig. 6 shows a state in which the electrical contact is in contact with the electrode of the object to be inspected. Here, FIG. 5(A) and FIG. 6(A) are cross-sectional views which are depicted on the front side of the visually-available electrical contact, and FIGS. 5(B) and 6(B) are respectively visible. A cross-sectional view of the side of the sexual contact is depicted. In the following, the vertical direction in FIGS. 2 to 6 is described as "up and down".

The electrical connection device 11 is a device for conducting an electric current test or the like of the test object 12. The object to be inspected 12 is, for example, a semiconductor element such as an integrated circuit. The object 12 to be inspected is provided with a plurality of bump electrodes 13 (see FIGS. 5 and 6). The bump electrode 13 is an electrode provided on the lower surface of the test object 12. The plurality of bump electrodes 13 are provided in a row, a plurality of columns, a matrix or other arrangement under the inspection object 12.

The electrical connecting device 11 mainly has a wiring board 15, a lower case 16, an upper case 17, a frame 18, a guide plate 19, and an electrical contact.

In the electrical connecting device 11 of the first embodiment, two types of electrical contacts are used. 5 and 6 disclose the state in which one of the electrical contacts 20 is mounted. The other electrical contact 200 is an electrical contact of the first embodiment, and is mounted on the mounting portion of the electrical contact in the electrical connection device 11 almost in the same manner as the electrical contact 20 . As described later, the electrical contact 20 is better than the electrical contact 200 of the first embodiment, and is mainly used for measuring overlapping portions of the signal waveform (hereinafter, the electrical contact 20 is referred to as a signal). Waveforms pay attention to electrical contacts).

The wiring board 15 is a board-shaped wiring board that supports the lower case 16 and the upper case 17 . The wiring of the wiring board 15 is connected to the wiring of a testing machine body (not shown) that tests the object 12 to be inspected. The wiring board 15 is a member constituting an electrode on the main body side of the testing machine, and the lower end portions of the electrical contacts 20 and 200 are in contact with the contact pads 22 provided on the upper surface of the wiring board 15, and are electrically connected.

The lower side case 16 is a member for supporting the electrical contacts 20, 200 in a state of being overlapped with the upper side case 17. The lower case 16 is provided with a first support hole 16A into which the lower end portion of the power supply contacts 20 and 200 is inserted, and has a diameter slightly larger than the outer diameter of the electrical contacts 20 and 200. A plurality of first support holes 16A are respectively provided at positions corresponding to the respective bump electrodes 13 on the lower surface of the test object 12. In the first support hole 16A, a lower receiving portion 16B that receives and supports the electrical contacts 20 and 200 is formed. The lower receiving portion 16B is formed by reducing the inner diameter of the lower end portion of the first support hole 16A. The inner diameter of the lower receiving portion 16B is set so that the signal waveform to be described later is focused on the lower supporting shoulder portion 73 of the electrical contact 20 or the electric power of the first embodiment. The lower support shoulder portion 273 of the sexual contact 200 is hooked to the lower receiving portion 16B, and the lower end portions of the power supply contacts 20, 200 are penetrated. The lower side support shoulders 73, 273 of the electrical contacts 20, 200 are hooked to the lower side receiving portion 16B, whereby the electrical contacts 20, 200 are supported by the lower receiving portion 16B.

The lower case 16 is overlapped on the upper side of the wiring substrate 15. A contact pad 22 is provided at a position corresponding to each of the first support holes 16A in the upper surface of the wiring substrate 15, and is connected to the test machine body by wiring. The lower end portions of the electrical contacts 20, 200 inserted into the first support hole 16A are pressed to contact the contact pads 22 to achieve electrical contact.

A pin head fitting hole 23 (see Fig. 3) is provided in the lower casing 16. The pin head fitting hole 23 is a hole for fitting the head portion 39 of the guide pin 37. The inner diameter of the pin head fitting hole 23 is set to be almost the same as the outer diameter of the head 39 of the guide pin 37, so that the head 39 of the guide pin 37 is fitted without play.

The upper side case 17 is a member for supporting the entire electrical contacts 20, 200 in cooperation with the lower side case 16. The upper case 17 is overlapped with the lower case 16, and the lower case 16 and the upper case 17 support the electrical contacts 20 and 200 in a state in which the electrical contacts 20 and 200 are expandable and contractible. In the upper casing 17, a second support hole 17A is provided at a position corresponding to the first support hole 16A of the lower casing 16. The second support hole 17A is formed to have the same inner diameter as the upper opening of the first support hole 16A (a diameter slightly larger than the outer diameter of the electrical contacts 20 and 200), and the electrical contacts 20 and 200 can be moved up and down. It is movably stored and supported inside. A plurality of second support holes 17A are respectively provided in the respective bump electrodes 13 provided under the inspection object 12 Corresponding positions cause the upper ends of the stored electrical contacts 20, 200 to electrically contact the bump electrodes 13.

In the second support hole 17A, electric power is formed from the upper side. The upper contact portion 20B is the upper receiving portion 17B. The upper receiving portion 17B is formed by reducing the inner diameter of the upper end portion of the second support hole 17A. The inner diameter of the upper receiving portion 17B is set such that the signal waveform to be described later is focused on the upper supporting shoulder portion 79 of the electrical contact 20 or the upper supporting shoulder portion 279 of the electrical contact 200 of the first embodiment is hooked to the upper receiving portion 17B. The upper ends of the power supply contacts 20 and 200 are penetrated, whereby the electrical contacts 20 and 200 are supported by the upper receiving portion 17B.

The first contact hole 16A and the second support hole 17A constitute an electrical contact support hole 27 that receives and supports the entire electrical contacts 20 and 200. In the state in which the electrical contacts 20 and 200 are incorporated in the electrical contact support hole 27, the electrical contacts 20 and 200 are in a state of being accumulating (a state shortened by an external force), and become an electrical contact 20 The lower end portion of the 200 is pressed by the contact pad 22 provided on the upper surface of the wiring substrate 15.

The upper side case 17 is provided with a pin portion fitting hole 28 (see Fig. 3). The pin portion fitting hole 28 is a hole into which the shaft portion 40 of the guide pin 37 to be described later is fitted. The inner diameter of the pin portion fitting hole 28 is set to be almost the same as the outer diameter of the shaft portion 40 of the guide pin 37, and the shaft portion 40 of the guide pin 37 is fitted without play.

The frame 18 is a member for integrally fixing and supporting the wiring board 15, the lower case 16, and the upper case 17, and supporting the guide plate 19 so as to be movable up and down. The frame 18 mainly has an outer frame portion 31 and a solid portion The flange portion 32 is fixed, and the support flange portion 33 is moved up and down (see FIG. 4).

The outer frame portion 31 is formed in a quadrangular frame shape, and surrounds the lower side case 16, the upper side case 17, and the peripheral edge portion of the guide plate 19. A positioning pin (or a positioning hole; not shown) is provided on the lower surface of the outer frame portion 31, and the upper surface of the wiring substrate 15 corresponds to a positioning pin (or a positioning hole) on the outer frame portion 31 side. It is provided in the positioning hole (or the positioning pin; none of them are shown). Thereby, the positioning pin (or the positioning hole) on the lower surface of the outer frame portion 31 is fitted into the positioning hole (or the positioning pin) on the upper surface of the wiring substrate 15, so that the outer frame portion 31 and the wiring substrate 15 are Position and support correctly. A fixing screw 35 (see FIG. 2) is attached to the four sides of the outer frame portion 31. The fixing screws 35 are screwed into the screw holes (not shown) of the wiring board 15 through the through holes (not shown) of the four frames of the outer frame portion 31, and the outer frame portions 31 and the wiring board 15 are fixed.

The fixing flange portion 32 is provided on the inner side surface of the rectangular tubular opening portion of the outer frame portion 31 so as to face each other so as to face each other. Each of the fixing flange portions 32 is formed in a nearly semicircular plate shape extending horizontally toward the inner side. The height of the lower surface of each of the fixing flange portions 32 (the height from the wiring board 15) is set to be almost the same as the height of the overlapping lower side casing 16 and the upper side casing 17. Thereby, the lower side case 16 and the upper case 17 are superposed on the wiring board 15, and the fixing flange portions 32 and the wiring board 15 are supported by the wiring board 15. Here, when the upper case 17 and the lower case 16 are placed below the fixing flange portion 32, the lower surface of the lower case is designed to be the same as the lower surface of the outer frame portion 31.

A pin hole 38 into which the guide pin 37 is fitted is formed at the center of each of the fixing flange portions 32. The inner diameter of the pin hole 38 is set to be almost the same as the outer diameter of the shaft portion 40 of the guide pin 37.

The guide pin 37 has a head portion 39 and a shaft portion 40. The head portion 39 is formed in a disk shape having an outer diameter that is almost the same as the inner diameter of the pin head fitting hole 23 of the lower casing 16. The shaft portion 40 is formed in a round bar shape having an outer diameter that is almost the same as the inner diameter of the pin hole fitting hole 28 of the upper side case 17 and the pin hole 38 of the fixing flange portion 32.

The pin head fitting hole 23 of the lower casing 16 and the pin portion fitting hole 28 of the upper casing 17 and the pin hole 38 of each fixing flange portion 32 are provided for the guide pin 37 to pass therethrough. The axes are placed on the same axis.

The head portion 39 of the guide pin 37 is fitted to the pin head fitting hole 23 of the lower casing 16, and the shaft portion 40 is fitted to the pin portion fitting hole 28 of the upper casing 17 and the pin of the fixing flange portion 32. The holes 38 are positioned to position the lower side casing 16, the upper side casing 17, and the frame 18. The lower case 16 and the upper case 17 are supported by the lower surface of each of the fixing flange portions 32 of the frame 18 and the wiring board 15 from the upper and lower sides and supported in the opening of the frame 18, whereby the wiring boards 15 are provided. The lower side casing 16, the upper side casing 17, and the frame 18 are correctly positioned and integrally fixed to each other.

The support flange portion 33 is moved up and down, and is a portion for supporting the guide plate 19 in the opening of the frame 18 so as to be movable up and down. The support flange portion 33 is moved up and down to form an opening portion of the frame 18 having a rectangular frame shape. As shown in FIG. 4, each of the vertical movement support flange portions 33 mainly includes a plate portion 42, a guide screw hole 43, and a spring hole 44.

The plate portion 42 is a plate member that is provided in the outer frame portion 31 of the frame 18 and integrated with the frame 18, and is suspended to form two frame portions that are connected to each other. The height of the lower surface of the plate portion 42 is set to be the same height as the lower surface of the fixing flange portion 32. The height of the upper surface of the plate portion 42 is set such that the upper surface of the plate portion 42 abuts against the lower surface of the flange portion 54 of the guide plate 19, whereby the bump electrode 13 of the test object 12 and the electrical contact are made. The upper ends of the 20, 200 are most appropriately contacted. Specifically, the height of the upper surface of the plate portion 42 is set such that the bump electrodes 13 of the inspection object 12 are in contact with the upper end portions of the electrical contacts 20, 200, and the electrical contacts 20, 200 are compressed. Status (refer to Figure 6).

In the plate portion 42, a guide screw hole 43 and a spring hole 44 are provided. The guide screw hole 43 is a screw hole for screwing the guide screw 46. The guide screw hole 43 is provided only in one central portion of each plate portion 42 (see Fig. 2). The spring hole 44 is a hole for supporting the spring 47. Two spring holes 44 are provided on each side of each of the guide screw holes 43.

The guide screw 46 is a screw for regulating the position of the guide plate 19 in the opening of the frame 18 and allowing the guide plate 19 to move up and down. The guide screw 46 is composed of a head portion 48, a guiding portion 49, and a threaded rod portion 50.

The head portion 48 is a portion that presses the guide plate 19 to prevent falling off. On the upper surface of the head portion 48, a slot 104 for a flat fastener is formed.

The guide portion 49 is a portion that guides the guide plate 19 to move up and down. The guide portion 49 is provided between the head portion 48 and the threaded rod portion 50, and is fitted to the guide hole 59 of the guide plate 19 to guide the guide plate 19 to move up and down. guide The length of the portion 49 is set so that the lower surface of the head portion 48 is in contact with the guide plate 19 and supported (the state in which the guide plate 19 is pushed up by the spring 47), so that the electrical contacts 20, 200 are The upper end portion is incorporated in the reduced portion 57 of the guide plate 19. FIG. 5 shows a state in which the upper end portions of the electrical contacts 20, 200 are incorporated in the reduced portion 57 of the guide sheet 19.

The threaded rod portion 50 is a portion for fixing the guide screw 46 to the plate portion 42. The threaded rod portion 50 is screwed to the guide screw hole 43 of the plate portion 42 to fix the guide screw 46 to the plate portion 42.

The spring 47 is a member for elastically supporting the guide plate 19. The upper end of the spring 47 is attached to the spring hole 44 of the plate portion 42 to abut against the back surface of the flange portion 54 of the guide plate 19. The eight springs 47 are urged from the lower side by the guide plates 19 supported by the guide portions 49 of the four guide screws 46 so as to be movable up and down. Thereby, the flange portion 54 of the guide plate 19 is pushed upward upward before coming into contact with the lower surface of the head portion 48 of the guide screw 46, presenting a standby state before the contact.

The guiding plate 19 is configured to position and support the object to be inspected 12 when the object to be inspected 12 is attached to the electrical connecting device 11, and to make the bump electrodes 13 of the object to be inspected 12 correspond to the corresponding ones. The joints of the joints 20 and 200 are integrated. The guide plate 19 is mainly composed of a fitting recess 53 and a flange portion 54.

The recess 53 is incorporated as a portion that is incorporated into and supported by the object 12 to be inspected. The concave portion 53 is incorporated into a dish shape of a nearly quadrangular shape. The inner side of the bottom portion of the recessed portion 53 is formed in a quadrangular shape, and its size is set to be slightly larger than the outer shape of the object to be inspected 12. Here, since the object to be inspected 12 is four corners The inner side of the bottom portion of the recessed portion 53 is also formed in a square shape. However, when the object to be inspected 12 has another shape, the inner side of the bottom portion of the recessed portion 53 is also fitted to the shape of the object to be inspected 12.

The positioning of the object 12 to be inspected is designed in a state where the object to be inspected 12 is attached to the inner side of the bottom portion of the fitting recess 53. A plurality of guide holes 56 are provided in the bottom plate portion 55 of the recess 53. The guide holes 56 are openings for guiding and incorporating the respective bump electrodes 13 of the object 12 to be inspected. Each of the guide holes 56 is formed to be slightly larger than the bump electrodes 13, and can be easily incorporated into the bump electrodes 13. By the inspection object 12 being incorporated into the fitting recess portion 53, the respective bump electrodes 13 of the inspection object 12 can be positioned on the upper side of the inside of each of the guide holes 56.

At the lower end portion of the guide hole 56, a reducing portion 57 is formed which does not allow the bump electrode 13 to pass and is incorporated in the upper end portion of the electrical contacts 20, 200. The narrowing portion 57 allows the upper end portions of the electrical contacts 20 and 200 to pass through and be incorporated, so that the electrical contacts 20 and 200 can be in contact with the bump electrodes 13.

An inclined surface 53B is formed on the lower side of the upper opening 53A of the recess 53. The inclined surface 53B is a bottom portion for guiding the inspection object 12 to be guided into the concave portion 53.

The flange portion 54 is formed at a position corresponding to the four sides of the recessed portion 53 corresponding to the vertical movement support flange portion 33 of the frame 18. Each of the flange portions 54 is provided with a fish facing portion 58 to which the head portion 48 of the guide screw 46 abuts. The fisheye seat portion 58 is provided with a guide hole 59 that is fitted to the guide portion 49 of the guide screw 46 so as to be movable up and down. The guiding portion 49 of the guiding screw 46 is fitted to the guiding hole 59 of the flange portion 54 and can be moved up and down The support is dynamically supported, and the guide plate 19 is pushed upward by the spring 47 by the support of the flange portion 54. Rotating the guide screw 46 to push the insertion recess 53 of the inspection object 12 downward, whereby the guide plate 19 is pressed down, and the bump electrode 13 of the inspection object 12 and the electrical contact 20 The upper end of the 200 is in contact with each other to enable inspection.

As described above, in the electrical connecting device 11 of the first embodiment, two types of electrical contacts 20 and 200 are used. It is also possible to provide a mark in the vicinity of the upper surface of the guide hole 56 of the guide plate 19 or in the vicinity of the upper surface of the upper side receiving portion 17B of the upper side case 17 so as to indicate the electrical contact with the bump electrode 13 at the position. The contact is which of the electrical contact 20 or the electrical contact 200. For example, as the mark, different colors or symbols ("○", "△", etc.) or protrusion shapes may be mentioned, and it is also possible to design that only one of the marks is given, and the other is not given a mark. Identification.

Hereinafter, the configuration in which the signal waveform is focused on the electrical contact 20 will be described. Note that the electrical contact 200 of the first embodiment focuses on the difference between the signal waveform and the electrical contact 20.

7 to 13 are schematic projection views of the whole or constituent unit of the signal waveform focusing on the electrical contact 20, respectively. The signal waveform emphasizes the electrical contact 20, and has one first plunger 62, two second plungers 63, and one coil spring 64.

The first plunger 62 is a plate-shaped plunger, and is used as an electrode or the like which is the first contact object among the two members that are in contact with the electrical contact with the signal waveform 20 (when applied to the electric power of the first embodiment) Connecting device 11 In the case of the contact pad 22) of the wiring substrate 15, the contact is made. The first plunger 62 is formed to have conductivity, and a method of forming the same is not limited. For example, the first plunger 62 can be formed by cutting or punching a sheet material, or the first plunger 62 can be formed by a lithography technique. When the original material to be formed is not a conductive material, the conductive material may be adhered by plating or coating in a state where the outer shape is formed before the first plunger 62 is formed, so that the first plunger 62 is completed. The method of forming the second plunger 63 to be described later is also similar to the method of forming the first plunger 62.

As shown in FIG. 11, the first plunger 62 is roughly divided into a joint portion 66, a spring receiving portion 67, and a contact piece 68. The length of the first plunger 62 is made to be approximately equal to the height dimension from the contact pad 22 of the wiring substrate 15 to the upper surface of the upper casing 17 when assembled to the electrical connecting device 11 (see FIG. 5(A)).

The joint portion 66 is directly overlapped when the first plunger 62 and the two second plungers 63 are coupled to each other, and is a portion for electrically contacting the first plunger 62 and the second plunger 63. The joint portion 66 is formed in a long plate shape so that the second plunger 63 can be stably contacted over a wide area. The portion of the joint portion 66 can be divided into a joint rod portion 69, a tip end insert portion 70, and a separation preventing portion 71.

The coupling rod portion 69 is a portion for being supported by the coil spring 64, and is set to be slightly longer than the coil spring 64. The width dimension of the joint rod portion 69 is set to be approximately the same size as the inner diameter of the coil spring 64 in close contact with the small diameter portion 84. The four-turn portion of the cross-sectional shape of the joint rod portion 69 is in contact with the inner diameter portion of the coil spring 64 that abuts against the small-diameter portion 84. spiral The circular shape of the inner diameter portion of the spring 64 that abuts against the small-diameter portion 84 coincides with or slightly smaller than the circumscribed circle of the coupling rod portion 69, and the rod portion 69 is slightly tightened by the small-diameter portion 84 of the coil spring 64. State assembly (see Figures 9 and 10).

The tip insertion portion 70 is a portion for guiding the insertion of the coupling rod portion 69 into the coil spring 64 when assembled. The tip insertion portion 70 is formed at the tip end portion (the upper end portion in Fig. 11) of the coupling rod portion 69. The tip insertion portion 70 has a gently curved curved surface so as not to interfere with the insertion direction, and can be easily inserted into the coil spring 64. When the distal end insertion portion 70 is assembled, it is positioned between the contact pieces 77 of the two second plungers 63, and functions to stabilize the interval between the projections 77A of the contact piece 77. The interval between the projections 77A of the contact piece 77 is defined by the thickness of the tip insertion portion 70, that is, the thickness of the joint portion 66, and the thickness of the joint portion 66 is determined in consideration of the interval of the projections 77A of the contact piece 77.

The detachment preventing portion 71 is a portion for avoiding the detachment of the apex insertion portion 70 from the coil spring 64 when the apex insertion portion 70 is inserted into the coil spring 64. The detachment preventing portion 71 is formed at an end portion opposite to the spring receiving portion 67. The detachment preventing portion 71 is formed by projecting the proximal end portion of the distal end insertion portion 70 toward both sides. The width of the separation preventing portion 71 that protrudes toward both sides is set to be slightly larger than the inner diameter of the small diameter portion 84 of the end portion of the coil spring 64 (see FIG. 9).

The spring receiving portion 67 is a portion for receiving the coil spring 64. The spring receiving portion 67 is a step portion provided at a boundary portion between the joint portion 66 and the contact piece 68. The width of the contact piece 68 is formed wider than the width of the joint portion 66, and the step portion of their boundary becomes the spring receiving portion. 67. The end portion of the coil spring 64 abuts against the small diameter portion 84 and abuts against the spring receiving portion 67. By the elastic force of the coil spring 64, the first plunger 62 is supported by the unit of the electrical contact 22 so as to be allowed to move slightly up and down.

The contact piece 68 is a portion for electrically contacting the first contact object (contact pad 22 of the wiring substrate 15) of the electrical contact 20. The contact piece 68 is integrally provided in connection with the proximal end side (the lower side of FIG. 11) of the joint portion 66. The contact piece 68 is a rectangular plate-like portion having a width which is slightly smaller than the inner diameter of the second support hole 17A of the lower side case 16 and the second support hole 17A of the upper case 16, and is substantially rectangular. The lower receiving portion 16B of the lower casing 16 is formed by a tip end portion having a rectangular plate-like portion and a smaller size than the rectangular plate portion. The tip end portion of the contact piece 68 is formed in a curved shape so as to stably contact the contact pad 22 of the flat surface-shaped wiring substrate 15. In the contact piece 68, a lower side support shoulder portion 73 is formed at the boundary between the rectangular plate-like portion and the tip end portion. The lower side support shoulder portion 73 is hooked to the lower side receiving portion 16B of the lower side case 16 to prevent the contact piece 68 from falling off from the first support hole 16A. In a state where the lower support shoulder 73 is hooked to the lower receiving portion 16B of the lower casing 16, the end portion (the lower end portion of FIGS. 5 and 9) of the contact piece 68 protrudes downward from the first support hole 16A.

The second plunger 63 is a plate-shaped plunger that cooperates with the first plunger 62 to make the second contact between the two contact targets, that is, the first contact object (the contact pad 22 of the wiring substrate 15). The object (bump electrode 13) is electrically connected to each other. The second plunger 63 is a direct contact target with the second contact object (bump electrode 13).

As shown in FIG. 12(A), the second plunger 63 can substantially It is divided into a joint portion 75, a spring receiving portion 76, and a contact piece 77. Here, FIG. 12(A) discloses the second plunger 63 itself, and FIGS. 12(B) and (C) show a modification of the second plunger 63.

The two second plungers 63 sandwich the first plunger 62, and are assembled by the coil springs 64 in this state, and the signal waveforms are attached to the electrical contacts 20. When the joint portion 75 of the two second plungers 63 faces each other, the joint portion 66 of the first plunger 62 is sandwiched. In a state in which one of the first plungers 62 and the two second plungers 63 are electrically connected, the respective plungers 62 and 63 are in contact with the contact pads 22 and the bump electrodes 13, respectively, so that the contact pads 22 and the bump electrodes 13 are provided. Inter-electrical conduction.

The two second plungers 63 have the same shape. By making the second plunger 63 of the same shape face each other to form the signal waveform focusing on the electrical contact 20, the second contact object (bump electrode 13) can be brought into good contact. Each of the two second plungers 63 can slide independently of each other even in the sandwiched state of the first plunger 62. Even if the shape of the second contact object (bump electrode 13) is a shape such as a spherical shape which causes a change in contact height due to slight positional deviation, and since it can be independently slid, each second plunger 63 The position in the up and down direction tracks the change in the contact height and the like, and the accuracy of the electrical contact can be improved.

When the first plunger 62 and the second plunger 63 are coupled to each other, the joint portion 75 is a portion for electrically contacting the joint portion 66 of the first plunger 62 to be in electrical contact with each other. The joint portion 75 of the two second plungers 63 sandwiches the joint portion 66 of the first plunger 62 from both sides, and electrically contacts the first plunger 62 and the second plunger 63. The joint portion 75 is formed into a long plate shape so as to be able to Contact with the joint portion 66 of the first plunger 62 may be achieved in a wide area. The joint portion 75 is composed of a joint rod portion 80, a tip end insertion portion 81, and a separation preventing portion 82.

The joint rod portion 80 is a portion that is supported by the coil spring 64 in a state in which the joint portion 66 of the first plunger 62 is sandwiched, and is set to be slightly longer than the coil spring 64. The cross-sectional dimension (width, thickness dimension) of the bonding rod portion 80 is selected such that the bonding rod portion 69 of the first plunger 62 and the two bonding rod portions 80 sandwiching it are formed at eight corners in a cross-sectional viewing time. The 隅 portion (see FIG. 9) is sized to be in contact with the inner diameter portion of the small-diameter portion 84 of the coil spring 64. In other words, the inner diameter of the small diameter portion 84 of the coil spring 64 is set so as to be the size of the circumcircle of the cross-sectional shape formed by combining the rod portions 80, 69, and 80, and is designed to be the joint rod portion. The combination of 80, 69, and 80 is slightly tightened (refer to Figs. 9 and 10). In order to be in such a tightened state, the width dimension of the joint rod portion 80 is smaller than the width dimension of the joint rod portion 69 of the first plunger 62.

The tip insertion portion 81 is a portion for guiding the insertion of the coupling rod portion 80 into the coil spring 64. The distal insertion portion 81 is formed on the distal end side (the lower side in FIG. 12) than the coupling rod portion 80. The tip insertion portion 81 has a shape that does not interfere with the insertion direction so as to be smoothly inserted into the coil spring 64. For example, in a state in which the coupling rod portion 69 of the first plunger 62 and the coupling rod portion 80 of one of the second plungers 63 are inserted into the coil spring 64 in advance, the second plunger 63 of the other is finally The coupling rod 80 is inserted into the coil spring 64, at this time, The tip insertion portion 81 of the other coupling rod portion 80 can be smoothly inserted into the coil spring 64.

The detachment preventing portion 82 is a portion for avoiding the detachment of the tip insertion portion 81 from the coil spring 64 when the tip insertion portion 81 is inserted into the coil spring 64. The separation preventing portion 82 is provided at the proximal end portion of the distal end insertion portion 81 (the boundary portion between the coupling rod portion 80 and the distal end insertion portion 81). The detachment preventing portion 82 is formed by projecting the proximal end portion of the distal end insertion portion 81 toward both sides. The width dimension of the separation preventing portion 82 that protrudes toward both sides is set to be slightly larger than the inner diameter of the small diameter portion 84 of the end portion of the coil spring 64 when the combination is completed (see Fig. 10). In other words, in a state in which the two bonding rod portions 80 are overlapped on both sides of the coupling rod portion 69 of the first plunger 62, they are located on the outer side of the two separation preventing portions 82 which are superposed on both sides of the coupling rod portion 69. The four corner portions (the two corner portions on the outer side of the separation preventing portion 82 shown in Fig. 10) are set to be slightly larger than the inner diameter of the small diameter portion 84 of the end portion of the coil spring 64. .

The spring receiving portion 76 is a portion for abutting against one end of the coil spring 64 and receiving its spring force. The spring receiving portion 76 is a step portion provided at a boundary portion between the joint portion 75 and the contact piece 77. The width of the contact piece 77 is formed wider than the width of the joint portion 75, and the portion (step portion) having a difference in width at the boundary becomes the spring receiving portion 76. The second plunger 63 is slidably supported by the coil spring 64 in the electrical contact 22 by the small diameter portion 84 of the end portion of the coil spring 64 abutting against the spring receiving portion 76.

The contact piece 77 is used for the second contact object (bump electricity) The pole 13) is a member that is in contact with and is electrically connected. The contact piece 77 is integrally provided in series with the proximal end side (upper side of FIG. 12) of the joint portion 75. The contact piece 77 is formed by a nearly rectangular plate-like portion having a size slightly smaller than the inner diameter of the second support hole 17A of the upper side case 17, and an upper side receiving portion 17B penetrating the upper side case 17 The reduced portion 57 of the guide plate 19 is formed at a tip end portion of a width dimension smaller than the width dimension of the rectangular plate portion. In the contact piece 77, an upper side support shoulder portion 79 is formed at the boundary between the rectangular plate-like portion and the tip end portion. The upper side support shoulder portion 79 is hooked to the upper side receiving portion 17B of the upper side case 17, and the contact piece 77 is prevented from being pulled out from the second support hole 17A. In a state in which the upper side support shoulder portion 79 is hooked on the upper side receiving portion 17B of the upper side case 17, the upper end portion (see FIG. 12) of the contact piece 77 protrudes upward from the second support hole 17A.

The upper end of each contact piece 77 has a front end and is formed in two protrusion shapes. That is, the center of the tip end of the contact piece 77 is U-shaped to form a concave portion, and two protrusions 77A are formed on both sides of the concave portion. Further, a push surface 77B is formed in the protrusion 77A (see FIG. 8). Thereby, the two projections 77A are formed in two blade tips. The space caused by the two push-out surfaces 77B facing each other with the concave portion interposed therebetween serves to form a space in which the ridge of the bump electrode 13 is erected. Thereby, when the bump electrode 13 is in contact with the second plunger 63, the top side of the bump electrode 13 is accommodated in the space caused by the two push-out surfaces 77B, even if the bump electrode 13 and the second plunger 63 are The apex contact also prevents excessive squashing. When the two second plungers 63 sandwich the first plunger 62, the push-out surface 77B is disposed on the outer side that can be seen from the circumference (see FIG. 8). Four protrusions 77A, positively contacting the bump electrodes 13, and slightly spurted toward the bump electrode 13 with its contact point so as to be in positive electrical contact.

As shown in FIGS. 12(B) and (C), the second plunger 63 may be designed to introduce a structure (slit) so that the two protrusions 77A are easily oriented in the width direction of the second plunger 63. Expansion.

As shown in FIG. 13, the coil spring 64 covers the outer circumferences of the joint rod portions 69 and 80 of the first plunger 62 and the second plunger 63, and each end portion abuts against each of the spring receiving portions 67 and 76 and A member that supports the plungers 62 and 63 so as to be vertically movable, and electrically connects the first plunger 62 and the second plunger 63. Between the both end portions of the coil spring 64, the joint portions 66 and 75 of the first plunger 62 and the second plunger 63 are supported in a superposed state.

The coil spring 64 is formed such that the intermediate portion has a large diameter and the both end portions have a small diameter. The diameter of the intermediate portion is selected such that it does not abut against the cross-sectional shape of the coupling rod portion 69 of the first plunger 62 and the coupling rod portion 80 of the two second plungers 63 that sandwich the second plunger 62 (refer to Fig. 9), the intermediate portion is a part of the function of the coil spring that exerts expansion and contraction. The outer diameter of the intermediate portion is set to be slightly larger than the maximum width of the first plunger 62 and the second plunger 63. Both ends of the small diameter of the coil spring 64 are in close contact with the small diameter portion 84. The inner diameter of the small diameter portion 84 is set to be smaller than the cross-sectional shape of the coupling rod portion 69 that is externally connected to the first plunger 62 and the coupling rod portion 80 of the two second plungers 63 that sandwich the second plunger 63. The diameter of the circumscribed circle is also slightly smaller.

The signal waveform is focused on the electrical contact 20, and one first plunger 62 and two second plungers 63 are placed, and the respective contact pieces 68, 77 are turned toward each other. In a state in which the joint portions 66 and 75 are overlapped in the opposite direction, the coil springs 64 are integrated, and the coil springs 64 are locked at the positions of the spring receiving portions 67 and 76, so that the first plunger 62 and the first plunger 62 are The second plunger 63 is not detachably assembled and slidably assembled.

Next, the configuration of the electrical contact 200 of the first embodiment will be described. 1 and 14 to 19 are schematic perspective views or projection views of the entire or constituent unit of the electrical contact 200 of the first embodiment.

The electrical contact 200 of the first embodiment has two plungers 263 and one plunger-coaxial coil spring 201.

The two plungers 263 in the electrical contact 200 of the first embodiment are the same or the same as the two second plungers 63 of the signal-oriented electrical contact 20. Therefore, the detailed configuration of the plunger 263 is omitted (see FIG. 12). When the plunger 263 in the electrical contact 200 of the first embodiment is the same as the second plunger 63 in the signal waveform electrical contact 20, the electrical contact 200 of the first embodiment is used. Paying attention to the electrical contact 20 with the signal waveform enables the parts to be common and helps to reduce costs.

In the following description, as the symbol of each portion of the plunger 263, a symbol "200" larger than the sign corresponding to the portion of the second plunger 63 is used to specify each unit of the plunger 263.

The plunger-use coil spring 201 is a member that simultaneously functions as the first plunger 62 and the coil spring 64 in the electrical contact 20 by the one-piece member.

The plunger also uses a coil spring 201 having a plunger portion 262 and a screw The spring portion 264 is rotated.

The plunger portion 262 is a portion that functions in the same manner as the first plunger 62 of the electrical contact 20 in the signal waveform. The plunger portion 262 is the first contact object among the two members that are in contact with the electrical contact 200 of the first embodiment (in the case of the electrical connection device 11 of the first embodiment, the wiring substrate is the wiring substrate). The portion of the contact pad 22) of 15 that is in contact with the wire portion constituting the plunger portion 262 is attached to the same plane. This plane can correspond to the plane of the signal plate in which the first plunger 62 of the electrical contact 20 is placed. The plunger portion 262 has a joint portion 266 and a contact portion 268.

The contact portion 268 is a portion that is in electrical contact with the first contact object of the electrical contact 200 (contact pad 22 of the wiring substrate 15). The contact portion 268 has a shape in which the wire member connected from the coil spring portion 264 is formed along the outer shape of the contact piece 68 in the first plunger 62, and its shape is made to be nearly identical to the outer shape of the contact piece 68. Therefore, the lower support shoulder 273 and the lower support shoulder 273 are also provided, and the lower receiving portion 16B of the lower casing 16 is hooked to prevent the contact portion 268 from unnecessarily protruding from the first support hole 16A. The shape of the tip end portion of the contact portion 268 is not limited to that shown in Fig. 18, and may have another shape as exemplified in Fig. 20 . Fig. 20(A) shows an example of the shape of the tip end portion at the point of contact with two points, and Fig. 20(B) shows an example of the shape of the tip end portion which is in contact with the line, and Fig. 20 (C1) and Fig. 20 (C2) disclose a part of the plane extending from the wire. Exceeded to increase the shape of the tip end shape of the contact length.

The joint portion 266 is an inner space of the coil spring portion 264 The wire portion is sandwiched between the two plungers 263 to electrically connect the plunger portion 262 and the two plungers 263. The wire constituting the joint portion 266 is connected from the wire constituting the contact portion 268. The wire may be formed in a straight line or a curved shape on the plane so as to be sandwiched by the two plungers 263 to form the joint portion 266. The trajectory drawn by the wire is not limited. FIG. 21 discloses a few examples of the trajectories drawn by the wires of the joint portion 266. FIG. 21(A) shows an example in which the wire is slightly pulled out from the contact portion 268 to form the joint portion 266. FIG. 21(B) shows an example in which the wire portion is pulled upward from the contact portion 268 in a wave shape to form the joint portion 266. FIG. 21(C) shows an example in which the wire portion is pulled upward from the contact portion 268 in a straight line to form the joint portion 266. As shown in FIGS. 21(B) to 21(C), the length of the joint portion 266 having a certain length of length above the contact portion 268 is selected as the joint rod portion of the plunger 263 that sandwiches the joint portion 266. Below 280 length.

The coil spring portion 264 supports the two plungers 263, and when the piston 263 is compressed, the plunger 263 is pushed upward, and the contact portion 268 of the plunger portion 262 that is connected thereto is pushed downward. The coil spring portion 264 is formed such that the upper end portion and the intermediate portion have a large diameter and the lower end portion has a small diameter. The diameters of the upper end portion and the intermediate portion are selected so as not to abut against the cross-sectional shape formed by the joint portion 266 of the plunger 262 and the joint rod portion 280 of the two plungers 263 sandwiching the same (refer to FIG. 16). ). The wire of the upper end of the coil spring portion 264 is stretched in a line (diameter) in which the circular shape is divided into two in the upper end portion and the intermediate portion as viewed from above between the two plungers 263. (Refer to Figure 16). The middle portion is a portion that functions as a telescopic coil spring. The lower end portion of the small diameter of the coil spring portion 264 becomes close to the small diameter Part 284. The small diameter portion 284 is fastened to the plunger portion 262 and the portion sandwiching the two plungers 263 by a small diameter (see FIG. 17), and the plunger portion 262 and the plunger 263 are mutually engageable. The part that slides to support.

In the electrical contact 200 of the first embodiment, the small diameter portion 284 is provided only at the lower end portion of the coil spring portion 264. However, the upper end portion or the intermediate portion of the coil spring portion 264 may be designed. A portion close to the small diameter portion is provided to increase a portion in which the plunger portion 262 and the plunger 263 are slidably supported to each other so as to enable more stable support.

The signal waveform configured as described above is used as the electrical contact 20 or the electrical contact of the first embodiment, and is used as follows.

First, the object to be inspected 12 is attached to the electrical connection device 11. At this time, the test object 12 is attached to the fitting recess 53 of the guide plate 19. In other words, the object to be inspected 12 is attached to the bottom plate portion 55 while being positioned along the inclined surface 53B of the upper opening 53A. Thereby, the bump electrode 13 of the object 12 to be inspected is incorporated into the guide hole 56 of the bottom plate portion 55. Further, the signal waveform is attached to the upper end portion of the contact piece 77 of the electrical contact 20 or the upper end portion of the contact piece 277 of the electrical contact 200 of the first embodiment, and is incorporated in the reduced portion 57.

In this state, when the object to be inspected 12 is pressed, each of the bump electrodes 13 comes into contact with the protrusion 77A of the two second plungers 63 in the signal waveform of the electrical contact 20, or the first embodiment. The protrusions 277A of the two plungers 263 of the electrical contacts 200 are in contact, and the electrical contacts 20, 200 are compressed (for example, referring to the state change from FIG. 5 to FIG. state).

When the protrusions 77A, 277A of the leading ends of the contact pieces 77, 277 are about to contact the bump electrode 13, the protrusions 77A, 277A will slide in the circumferential direction on the spherical surface of the bump electrode 13, and move toward each other in a direction away from each other. It functions to positively contact the bump electrode 13.

In a state where the signal waveform is emphasized that the electrical contact 20 is compressed, the first plunger 62 and the second plunger 63 that are slidably held are surely electrically contacted. Further, in the state in which the electrical contact 200 of the first embodiment is compressed, the plunger portion 262 of the plunger-use coil spring 201 that is slidably received is electrically contacted with the plunger 263.

Here, since the two second plungers 63 or the two plungers 263 are slid independently, the projections 77A or 2 of the two second plungers 63 are considered to be deformed when the bump electrodes 13 are deformed. When the heights of the contact portions of the projections 277A of the plunger 263 are different, the two second plungers 63 or the two plungers 263 are still in contact with each other while being staggered and in contact with each other.

Thereby, the two contact objects (contact pads of the wiring substrate 15 and the bump electrodes 13) are electrically connected by the signal waveform focusing on the electrical contact 20 or the electrical contact 200 of the first embodiment. In this state, the electrical contact 20 or the electrical contact 200 of the first embodiment is transmitted through the signal waveform to transmit electrical signals between the two contact objects.

The signal waveform is focused on the electrical contact 20, and both the first plunger 62 and the second plunger 63 are formed in a flat shape, and the electrical signals are received by surface contact. On the other hand, in the electrical contact 200 of the first embodiment, the plunger The plunger portion 262 of the combined coil spring 201 is formed of a wire, and the plunger 263 is formed in a flat plate shape to receive an electrical signal by line contact. Therefore, from the viewpoint of electrical signal transmission and reception, it can be said that the performance of the signal waveform focusing on the electrical contact 20 is higher than that of the electrical contact 200 of the first embodiment.

In the inspection apparatus using the electrical connecting device 11 of the first embodiment, some of the signals read from the subject 12 are signals having a greater degree of importance in the shape of the signal waveform, and others are compared with the signal waveform. The logic ("1" or "0") at any point in time or the signal (digital signal, etc.) with a greater importance of constant voltage or constant current value. That is, some signals require strict accuracy for transmission between two contact objects, and others have lower accuracy requirements. In the electrical connecting device 11 of the first embodiment, the signal contact is used to transmit the electrical contact 20 at the signal of the former, and the electrical contact 200 of the first embodiment is used for transmitting the latter signal.

According to the electrical contact 200 of the first embodiment, the following effects can be exhibited.

According to the electrical contact 200 of the first embodiment, the function of the plunger and the function of the coil spring are exerted by the one member of the plunger and the coil spring. Therefore, the number of parts can be reduced. As a result, it is expected that there is a simple assembly process or a low price.

Further, since the portion of the plunger-use coil spring that is in contact with the first contact object has a shape similar to that of the plunger, the contact with the contact object can be made good. As described above, if it is in accordance with Patent Document 2 The technique in which the described coil spring comes into contact with the contact object is that the end portion of the spiral wire is in contact with the contact object, and thus the contact is poor.

Further, according to the electrical contact 200 of the first embodiment, as the plunger 263 of the electrical contact 200, the same member as the second plunger 63 of the electrical contact 20 can be used as the signal waveform. From this point of view, it can also make it cheap.

In the case of the electrical contact 200 of the first embodiment, when the electrical contact 200 of the first embodiment having different lengths is to be realized, the length of the plug-in coil spring 201 (for example, the contact portion) is changed. The length can be adapted to share the plunger 263 in electrical contacts of different lengths. Further, by selecting the diameter of the wire of the plunger-use coil spring 201, the interval between the two plungers 263 can be easily selected.

Further, according to the electrical contact 200 of the first embodiment, the contact portion with the first contact object is designed to use the contact portion formed by bending the coil wire, so that the degree of freedom of the tip end shape is high, and the contact can be utilized. The shape of the contact object corresponds to the shape of the tip end.

According to the electrical connection device 11 of the first embodiment, the electrical contact 20 and the electrical contact 200 of the first embodiment are used in accordance with the nature of the signal to be distributed during measurement, and the like. The electrical contacts 200 can be used between the contact objects of the two members at the signal waveform, and the electrical contacts suitable for the quality can be used everywhere. As a result, the electrical connecting device 11 of the first embodiment can be made inexpensive.

(B) Other embodiments

Although various modifications are also mentioned in the description of the first embodiment, the following modified embodiments can be further exemplified.

In the electrical connection device 11 of the first embodiment, the signal waveform-oriented electrical contact 20 and the electrical contact 200 of the first embodiment are mixed, but of course, all of the electrical contacts that can be mounted are the first implementation. The electrical contact device 200 forms an electrical connection device.

In the above, the signal waveform in which the two second plungers 63 and the first plungers 62 are provided is disclosed in the electrical contact 20, or the two plungers 263 and the one plunger-type coil spring 201. In the electrical contact 200 of the first embodiment of the plunger portion 262, the plunger or the plunger portion connected to the first contact object or the second contact object may be designed to be provided one by one. In this case, as long as the diameter of each of the two ends or one end of the coil spring 64 or the plunger-use coil spring 201 is selected as long as the plunger or the plunger portion is selected, it is designed to be supported. . On the other hand, there is one plunger connected to the first contact object, and two plungers or plunger portions connected to the second contact object. In the case where the two plunger portions are configured by the coil wire, the portion corresponding to the contact portion may be designed to be wound twice in the vertical direction.

The electrical contact of the present invention can be used in all devices that are in contact with electrodes or the like provided on a wiring board or a semiconductor integrated circuit. Further, the electrical connecting device of the present invention is a device in which at least a part of the electrical contact of the present invention is used, and the use of the device is not limited to the inspection device.

200‧‧‧Electrical contacts of the first embodiment

201‧‧‧Plunger and coil spring

262‧‧‧Plunger

263‧‧‧Plunger

264‧‧‧Spiral spring part

268‧‧‧Contacts

273‧‧‧Bottom support shoulder

Claims (6)

An electrical contact characterized by comprising: a plunger-coaxial coil spring, wherein the plunger portion and the coil spring portion are integrally formed by the same wire member, and the plunger portion is in contact with the first contact object, and the coil spring portion is And a plunger is a plate-shaped plunger that is in contact with the second contact object, and a wire portion of the proximal end side of the plunger portion is in electrical contact with a plane of the plunger. And being supported by the coil spring portion in a telescopic manner in the extending direction. The electrical contact according to claim 1, wherein the plunger is provided with two wire portions that sandwich the base end side of the plunger portion. The electrical contact according to claim 1 or 2, wherein the plunger portion has a wire portion facing the first contact target side, and a wire portion contacting the first contact object and away from The wire portion on the side of the first contact object. The electrical contact according to claim 3, wherein the wire portion that is in contact with the first contact object extends in a wave shape and is protruded by a plurality of protrusions protruding toward the first contact object side. The first contact object is in contact with the above. An electrical connection device is an electrical connection device having a plurality of electrical contacts that electrically contact a first contact object and a second contact object, and is characterized in that at least a part of the electrical contacts are used Patent application scope The electrical contact of any one of items 1 to 4. The electrical connection device according to claim 5, wherein the second electrical contact using the plunger is used in addition to the first electrical contact according to any one of claims 1 to 4. In the electrical contact, the plunger of the first electrical contact and the plunger of the second electrical contact have the same shape.