TW201510687A - Method and system of error judgment and compensation thereof - Google Patents

Abstract

Disclosure is related to a method of error judgment and compensation, and a system thereof. The method is adapted to a machining machine. The method includes firstly driving an image retrieving apparatus moving along a machining route, and capturing images along the machining route. The method then determines a compensation value according to an error found between the images and a determined path. The compensation value is incorporated to adjusting coordinates of machining member of the machine. It is noted that a relative difference is existed between the image retrieving apparatus and the machining member due to hardware tolerance. The difference may be compensated by a coordinate transformation. The compensation is made with the error adjustment due to the machining route. The adjustment is made for complying with the determined path.

Description

Image error judgment and compensation method and system

The invention relates to a technique for image error judgment and compensation, in particular to a method and system for error judgment and compensation of positioning of a processing machine using image technology.

On a general processing machine, it is usually first tried to process with some samples. The relationship between the machine tools and the samples on the machine is obtained by the machining process, including the error caused by the machining. The compensation can be further compensated for by the machine. This ensures accurate subsequent processing.

In the prior art, the pre-processing operations using some samples are mostly a contact type processing method, and the actual processing (cutting, grinding, etc.) may be performed in the processing, so some samples need to be sacrificed during the trial phase. Some losses are caused, but such a pilot phase is a necessary pre-step.

For example, a machine for cutting a glass panel is provided. Before cutting, the machine table, the glass substrate, and the cutting tool need to be positioned. After the positioning is completed, the glass substrate is cut according to the design by using a cutting tool, and then the probe is used. The position of the cutting is detected, for example, following the machining path to confirm whether there is an error. If there is an offset or an error, it will be recorded as the basis for the cutting adjustment of the next substrate.

Different from the prior art, the first steps are to perform processing trials, measurement errors, adjustments, etc. The present invention proposes a technique for judging and compensating for image errors, and the image processing technology is used in the pre-processing of the pre-processing to test the image film and obtain the compensation value. Adjusting the actual processing tools can avoid unnecessary cost loss and complete the process more efficiently.

According to an embodiment, the image error determination and compensation method is applied to a processing machine, and the method comprises: driving an image capturing device to run along a processing path of the processing machine to obtain an image taken along the processing path, and then according to The image of the processing path and a predetermined path determine the error, and the error can determine the compensation value. The purpose of the method is to adjust the position coordinate of the processing part of the processing machine according to the compensation value.

Because of the hardware design, the position coordinates of the image capturing device and the position coordinates of the processing component of the processing machine have a hardware relative distance, so that the relative distance between the two can be compensated by coordinate conversion. The position coordinates of the associated image capturing device or processing component include a horizontal direction, a vertical direction, and a rotation angle.

In an embodiment, the image capturing device continuously captures images along a processing path, and may also capture images along a plurality of locations on the processing path, and then may determine the processed components according to the captured images displayed on the display. Error, this error becomes the basis for compensating the position of the machined part. Errors include errors in the horizontal direction, errors in the vertical direction, errors in the rotation angle, or errors in the combination of directions and angles.

According to still another embodiment, the image error determination and compensation system described in the disclosure includes a processing machine, a processing component, an image capturing device, and a system host, and the image capturing device is coupled to the processing component along the carrier base. The processing path of the material is taken. The system host in the system is coupled to the image capturing device and the processing component of the processing machine. The purpose of the system host comprises driving the image capturing device to run along the processing path, and obtaining an image captured by the image capturing device along the processing path. Therefore, the error can be judged according to the image of the processing path and a predetermined path, and the position coordinates of the processing component can be adjusted according to the compensation value obtained by the error.

In an embodiment, the processing component can be a cutting machine or a grinding machine, By processing the substrate and taking an image along the path of the simulated processing by the image capture device, the aforementioned error can be determined by displaying the scale on a display of the image captured by the image capture device.

In order to further understand the technology, method and effect of the present invention in order to achieve the intended purpose, reference should be made to the detailed description and drawings of the present invention. The drawings and the annexed drawings are intended to be illustrative and not to limit the invention.

10‧‧‧Substrate

101‧‧‧Processing path

20‧‧‧Substrate

201, 203 ‧ ‧ central point

R‧‧‧Rotation angle

3‧‧‧ machine

30‧‧‧Substrate

32‧‧‧Processed parts

301‧‧‧Processing path

44‧‧‧System Host

42‧‧‧Image capture device

40‧‧‧Substrate

401‧‧‧Processing path

50‧‧‧Substrate

501‧‧‧ Path

503‧‧‧Processed parts

505‧‧‧Image capture device

60‧‧‧Substrate

601‧‧‧ cutting line

603,604,605,606,607,608,609,610‧‧‧ shooting location

701‧‧‧Preset path

702‧‧‧simulation path

81‧‧‧solid frame

801‧‧‧ center point

82‧‧‧dotted box

802‧‧‧ center point

91‧‧‧solid box

901‧‧‧ center point

92‧‧‧dotted box

902‧‧‧ center point

Step S101~S115‧‧‧One of the image error judgment and compensation process

Step S121~S137‧‧‧Image error judgment and compensation process

1 is a schematic view showing a state of substrate cutting; FIG. 2 is a schematic view showing a difference between a machine coordinate and a test coordinate; FIG. 3 is a schematic view showing a machine using the image error judgment and compensation method of the present invention; FIG. 5 is a schematic diagram showing an embodiment of an image capturing device used in the image error judging and compensating system of the present invention; FIG. 6 is a schematic view showing the image error judging of the present invention; The compensation method is applied to the schematic diagram of the embodiment of cutting the substrate; FIG. 7 is a schematic view showing the embodiment of the image error judgment and compensation method for compensating the cutting line of the present invention; FIG. 8 is a schematic view showing the image error judgment and compensation method of the present invention for compensating the bias FIG. 9 is a schematic diagram showing an embodiment of an image error judging and compensating method for compensating for offset and rotation errors; FIG. 10 is a flowchart showing an embodiment of an image error judging and compensating method according to the present invention; 11 is a flow chart describing one embodiment of the image error judging and compensating method of the present invention.

Compared with the prior art, it is necessary to perform the actual processing (such as cutting, grinding) and the probe detection procedure before the machine performs the processing. The present invention proposes an image which is adjusted and compensated without actually processing the substrate before the manufacturing step. Error judgment and compensation method and system. By using this method, it is not necessary to waste the test substrate or unnecessary equipment wear before processing, and in the future processing program, the compensation data can be continuously generated as good. The basis for the rate increase.

The image error judgment and compensation method and system described in the disclosure mainly utilizes the technique of image analysis to confirm the positioning point of the processing tool, and the non-contact pre-processing confirmation step is adopted in the process, and no additional hardware loss is generated. , including substrate waste, machine wear and so on.

1 is a schematic view showing a state in which a substrate is cut, and a substrate 10 such as a substrate of an organic or inorganic material such as glass, plastic or metal to be processed is shown, wherein the substrate 10 shown on the left side is provided. It is 10 mm, and the substrate 10 shown on the right side has a processing path 101 indicated by a broken line, and 1 mm above the substrate 10 is cut or ground by processing to form a substrate having a length of 9 mm on one side.

The prior art shows that before the actual operation of the processing machine, the cutting or grinding can be performed along the preset path by trial running, and then the error value is judged by the scale, thereby adjusting the running path of the processing component. The difference of the invention is that the image analysis technology is used to simulate the operation on the processing path, and the error of the preset path is obtained through image analysis, that is, the processing component is compensated by the error value, for example, the running path of the tool of the processing tool is adjusted.

Referring to the difference between the coordinates of the machine and the test coordinates shown in FIG. 2, the present invention uses an image capturing device carrying an image sensing component such as a CCD or a CMOS to be processed with a processing component (such as a cutting tool) on the processing machine. The coupling is such that there is a fixed hardware gap between the two positions. Therefore, there is a fixed gap between the cutting path processed by the processing component and the image captured by the image capturing device.

The figure shows that there is a coordinate system in the substrate 20, the coordinate system presents a position coordinate of the carrier of the substrate 20, and a rotary machine for controlling the rotation angle R of the carrier is provided below. This R represents the rotational coordinate of the substrate carrier. Below this coordinate system, the center point 201 of the substrate 20 is indicated by coordinates (X0, Y, R), and the coordinates of the center point 203 defined by the image capture device are represented as (X1, Y, R).

The foregoing apparatus using the image error judging and compensating method of the present invention can refer to the apparatus shown in FIG.

The figure shows a substrate 30 placed on the machine table 3, above which is provided a processing component 32, and the processing component 32 is processed along the processing path 301 on the substrate 30 through the machine control preset, for example, using a tool edge. The processing path 301 is cut. In the image error judging and compensating method of the present invention, the trajectory of the processing component 32 will be obtained based on the image analysis technique for judging the machine tool error compensation in the pre-operation, so that the processing can be performed accurately without the need for trial operation in advance. .

The invention adopts image analysis technology as a tool for judging error of pre-operation before actual processing, wherein the image capturing device carries image sensing components such as CCD (charge coupled device), CMOS (complementary metal oxide half field effect transistor) and the like. Thereby, an image near a processing path on the substrate to be processed in the processing tool is obtained.

For example, the substrate to be processed, such as a glass substrate, is cut by a cutter, so that the image capturing device carrying the image sensing component will obtain an image of a portion of the glass substrate from a specific direction (eg, above). The relative positional relationship between the picking device and the machine can be used as a basis for positioning.

In the step of positioning the image capturing device or processing the component, a center point may be provided, and a tolerance between the image capturing device and the center point of the processing component due to the hardware design relationship is adopted, so when compensating the machine table, Incorporate this tolerance. For example, the embodiment depicted in FIG. 4 is a schematic diagram of an embodiment of an application image capture device in a display system.

The figure shows a system host 44 as a controller of the image error judging and compensation system of the present invention. The system host 44 summarizes the control circuit, the driving circuit, and the signal processing circuit, including the operation of the executing machine, the position adjustment of the processing components, and the image signal. Capture and judgment of error and compensation value. The system host 44 is coupled to the processing machine. The image capturing device 42 and the processing component can drive the image capturing device 42 to operate along the processing path 401 and acquire an image captured by the image capturing device 42 along the processing path 401. The system host 44 is also responsible for data processing, including obtaining the image captured by the image capturing device 42 and comparing it with a predetermined path to determine an error including a horizontal error, a vertical error on a plane, or a Rotation error. These errors can be combined to determine a compensation value, and may also include compensation values for the horizontal direction, the vertical direction, and the rotation angle. The system host 44 can adjust the coordinate position of the machining component according to the compensation value so that the processed path conforms to the preset path. .

In this embodiment, the image capture device 42 takes a picture of the substrate 40 carried on the machine table, particularly along the processing path 401 indicated by the dashed lines. This processing path 401 should theoretically conform to a predetermined path such that the substrate 40 is cut or ground to practical needs.

In the image error determination and compensation system described in the present invention, the image capturing device 42 is first operated on the predetermined processing path 401 as a simulation processing of the actual processing machine of the test run, thereby The captured image information determines the error of the machine, so it can replace the conventional technique of adjusting the machine.

FIG. 5 is a schematic diagram showing still another embodiment of an image capturing device used in the image error judging and compensation system of the present invention.

In particular, in the hardware design, the processing component 503 in the machine table and the image capturing device 505 as the simulated processing path may be structurally coupled, and have a fixed positional difference between the two. . As shown in the figure, the substrate 50 disposed on the machine carrier is drawn with a path 501 to be processed. The machine portion directly combines the image capturing device 505 and the processing member 503 in a mechanical manner.

When the current work is to find the error of the processing of the substrate on the machine and the carrier, the combined structure can be directly operated on the processing path 501, and the photo is taken along the path 501, and the moving image can be continuously captured, or in a specific number. Taking pictures at a position, you can judge the error.

Figure 6 then schematically shows the state in which the technique disclosed in the disclosure is applied to the cutting of the substrate, There are shown a plurality of cutting lines 60 in different directions (horizontal and vertical) on the substrate 60. When the pre-determination processing between the processing component and the substrate 60 on the carrier is performed, the associated control circuit will drive the image capturing device to run along the cutting line 601. This example shows that only the image at a specific position is photographed, as shown in the figure. The dashed box indicates the shooting position 603, 604, 605, 606, 607, 608, 609, 610, that is, only a few representative position images are required to determine the machine error. These images will be displayed directly on the display provided by the system. The display screen shows the image and scale of an ideal processing path (preset path). The images of these shooting positions 603, 604, 605, 606, 607, 608, 609, 610 can be directly mapped on the display, which can be based on the human eye. Or the image recognition technology provided by the system determines the error, including the horizontal, vertical or rotation angle error.

Figure 7 is a schematic view showing an embodiment for compensating for a cutting line. This example shows a preset path 701 and a simulated path 702 obtained by analyzing the image. There is obviously a gap between the two. Hardware tolerance due to hardware design. The preset path 701 and the analog path 702 are not parallel to the two lines, and the distances at the two ends are different ΔX and ΔX', and it is obvious that there is an error of the rotation angle between the two.

FIG. 8 is a schematic diagram showing an embodiment of the image error judging and compensating method for compensating for the offset error according to the present invention.

This example shows the image of the simulated path taken by the image capturing device and the difference of the preset path, wherein the solid line frame 81 can be represented as a preset path that the substrate is expected to be cut, and the center point 801 can be the center point of the substrate. The dashed box 82 represents the image taken by the image capture device on the simulated path, and the center point 802 is also the center point of a region taken by the simulated path.

There is an offset error between the two, including both horizontal and vertical directions on the plane.

Figure 9 continues with a schematic diagram showing an embodiment of compensating for offset and rotation errors.

This example shows a solid line frame 91 and the center point judged by the solid line frame 91. 901, the solid line frame 91 can represent a path of a preset process. There is also a dashed box 92 and its center point 902, which can represent the machining path obtained after the simulation processing, and the two have errors. This example shows a rotation error and a little translation error, so the compensation value determined by this will include translation. Compensation (horizontal and vertical compensation) and a compensation value for the rotation angle.

When the machining part is adjusted later, since the whole machine is provided with a center point, the image capturing device is also positioned and has a center point, and the difference between the two should also be included in the compensation data, in combination with the aforementioned offset error. Adjust together, the adjustment method can be used to adjust the position of the machine to the machine, and the fine adjustment can be performed by using the microscope.

Figure 10 is a flow chart showing an embodiment of the image error judging and compensating method of the present invention.

According to this embodiment, before the method step, the processing machine and the processing component therein are processed, such as a cutting machine or a grinding machine, for cutting or sharpening the substrate; the processing component is further coupled with the image. The capturing device, the image capturing device can be a mechanism that couples the processing component with a photographic lens.

The substrate is carried on the carrier on the processing machine. Before the step of performing the error and compensation judgment, the substrate has been disposed on the carrier through a preliminary positioning manner, for example, a plurality of positioning points are already disposed on the substrate. As a basis for placement on the carrier, these positioning points have not solved the problem of processing yield due to errors between the workpiece and the substrate. Therefore, the present invention proposes a technique for judging errors and compensation values using images.

Starting, as described in step S101, the image capturing device is started, and the image capturing device is driven to run along a processing path of the processing machine through the control circuit or the system host, as in step S103, to obtain an image of the processing path, such as In step S105, the image includes a continuous image of the path, or a part of the image of the path, and the images will be compared with the preset path. If the position coordinate of the image capturing device and the position coordinate of the processing component of the processing machine have a tolerance generated by a hardware design, the relative distance between the image capturing device and the processing component can be compensated by a standard conversion, and the compensation is Does not affect the compensation value generated by the actual error.

For example, in step S107, the captured image will be mapped on the display, and the error can be judged by the display scale, and if it is determined in step S109, is the error within the error range? When the error is within the preset error range, the path of the processing performed by the display processing component should coincide with the preset path, and the pre-operation is completed (step S115), and the actual machining is performed. If the error is outside the preset range, the display error is too large and adjustment is required, so that the compensation value of each direction or rotation angle is generated according to the error (step S111), and adjustment is performed, as in step S103.

FIG. 11 continues to describe the flow of the image error determination and compensation method of the present invention in another embodiment.

In this example, the image capturing device is started as in step S121, and an image capturing device determines an positioning point, as in step S123. After the positioning point is confirmed, according to the range of the processed object set by the system (the range of the substrate, step S125), the image capturing device is taken along the simulated processing path, as in the process of the simulated processing, as in step S127.

The simulation process will obtain the path image continuously or at a specific position. In step S129, the image of the path will be analyzed by the image to obtain the simulation path. After the simulation path is compared with the preset path, the error can be determined. For example, in step S131, the error can be The foregoing embodiment includes an error in the horizontal direction, an error in the vertical direction, an error in the rotation angle, or an error formed by combining the directions and the angles. Accordingly, a plurality of kinds of compensation values are generated, as in step S133. According to this, the implement can be adjusted (step S135), and actual machining is performed (step S137).

The above simulation path and shooting process can still be operated after actual processing, the system will be able to obtain the error value at regular intervals, and judge whether the error is still within the range, otherwise the machine will be adjusted accordingly, so that the entire machine can be accurately processed and the production can be increased. Yield.

In summary, the present invention proposes an image error judging and compensating method, which is mainly capable of judging the error of the machine through image capturing and analysis in the pre-processing operation without finding the machine error through actual processing. Generate efficient and low-cost error judgment and compensation measures.

However, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Therefore, equivalent structural changes that are made by using the specification and the contents of the present invention are equally included in the present invention. Within the scope, it is combined with Chen Ming.

S101‧‧‧Starting image capture device

S103‧‧‧Run along the processing path

S105‧‧‧Get processing path image

S107‧‧‧ Judgment error by display scale

Is S109‧‧‧ within the margin of error?

S111‧‧‧ Generate compensation value

S113‧‧‧ adjustment

S115‧‧‧Complete the front work

Claims (10)

An image error judging and compensating method is applied to a processing machine, comprising: driving an image capturing device to run along a processing path of the processing machine, wherein a position coordinate of the image capturing device and the processing machine Between the coordinate positions of a processing component, a relative distance between the image capturing device and the processing component is compensated by a standard conversion; an image taken along the processing path is obtained; and an image according to the processing path and a predetermined path are determined. An error; generating a compensation value according to the error; and adjusting a position coordinate of the processing component of the processing machine according to the compensation value. The image error judging and compensating method according to claim 1, wherein the image capturing device is a mechanism that couples the processing component with a photographic lens. The image error judging and compensating method according to claim 2, wherein the processing component is a cutting tool or a sharpening tool. The image error judging and compensating method according to claim 1, wherein the image capturing device or the position coordinates of the processing component include a horizontal direction, a vertical direction, and a rotation angle. The image error judging and compensating method according to claim 4, wherein the error is determined by a scale on a display that displays an image obtained by the image capturing device. The image error judging and compensating method according to claim 5, wherein the error includes an error in the horizontal direction, an error in the vertical direction, an error in the rotation angle, or an error formed by combining each direction with an angle. The image error judging and compensating method according to claim 1, wherein the image capturing device continuously captures an image along the processing path or captures an image along a plurality of positions on the processing path. An image error judgment and compensation system includes: a processing machine and a processing component; An image capturing device is coupled to the processing component for performing shooting along a processing path on a substrate; and a system host coupled to an image capturing device disposed on the processing machine and the image capturing device a processing component of the processing machine for driving the image capturing device to run along the processing path, and obtaining an image captured by the image capturing device along the processing path; and an image according to the processing path and a predetermined path Determining an error, and determining a compensation value, and adjusting a position coordinate of the processing component of the processing machine according to the compensation value. The image error judging and compensating system of claim 8, wherein the processing component is a tool for cutting or grinding the substrate. The image error judging and compensating system of claim 8, further comprising a display, wherein a horizontal direction, a vertical direction and a rotation angle are displayed, wherein the error is obtained by displaying the image obtained by the image capturing device. Judging by the scale on the display.