TW201437588A - Substrate supporting apparatus and heat treatment apparatus using the same - Google Patents

Abstract

Disclosed are a substrate supporting apparatus and a heat treatment apparatus using the same. The substrate supporting apparatus includes a body member on which a plurality of heating targets are stacked to be separated from one another, and a plurality of support members that are arranged along a surface of each heating target inside the body member and support the surface of each heating target.

Description

Substrate support device and heat treatment device using the same Cross-reference to related applications

Priority is claimed on Korean Patent Application No. 2013-0002868, filed on Jan. 10, 2013, the content of

The present invention relates to a substrate supporting device and a heat treatment device using the substrate supporting device, and more particularly to a substrate capable of preventing a heating object to be heat treated from sagging and substantially uniformly transferring heat to an edge of each heated article when supporting the heating member A support device and a heat treatment device using the substrate support device.

Typically, the heater exotherms when powered, and the heater typically grows into a rod shape. At this time, since the heater is configured in terms of heat generation such that its opposite ends are different from the intermediate portion thereof, it is difficult for the heater to perform uniform heat treatment in the longitudinal direction. Further, in the heat treatment apparatus provided with such a heater, heat cannot be uniformly transmitted to the heating object.

The prior art includes Korean Patent No. 10-0835588 (titled "room Heater", announced on May 30, 2008).

The present invention relates to a substrate supporting device and a heat treatment device using the substrate supporting device capable of preventing a heating object to be heat treated from sagging when supporting a heating object, and substantially uniformly transferring heat to an edge of each of the heating articles.

According to an aspect of the present invention, there is provided a substrate supporting apparatus comprising: a body member on which a plurality of heating articles are stacked apart from each other; and a plurality of supporting members disposed along a surface of each of the heating objects in the body member And support the surface of each heated object.

Here, the support member may include: a plurality of frames disposed within the body member to be separated from each other corresponding to a surface of each of the heating articles; and a plurality of support spacers extending and supported from each of the frames separated from each other Each heated object.

Additionally, each of the support spacers can include a support bracket coupled to the frame and a support pin extending from the support bracket and supporting each of the heated items.

Moreover, each of the above-described support members may further include a rotation shaft that is provided for the above-described frame, and the support spacer is rotatably coupled to the rotation shaft.

Moreover, each of the above-described support members may further include an elastic member that elastically supports the above-described frame and the above-described support spacer.

Additionally, the substrate support device may further include an expansion section connecting the body member and the support member to allow the support member to move in the longitudinal direction.

According to an aspect of the present invention, a heat treatment apparatus is provided, which comprises The substrate supporting device described above; and a heater in which a plurality of heating objects are disposed in parallel with the support member in the body member.

Here, each heater may include: a heating unit, divided into plus a hot zone and a dummy region, the redundant zone is formed to extend from opposite ends of the heating zone, and the heating unit emits heat from the heating zone; the compensation unit is divided into a connection zone and a compensation zone, The compensation zone is formed to extend from opposite ends of the connection zone, and the compensation unit emits heat from the compensation zone; and a fixing unit, the heating unit and the compensation unit are both fixed to the fixing unit.

Moreover, each of the above heating zone and the compensation zone may be A reflection portion that reflects heat is included.

Meanwhile, the heat treatment apparatus may further include a chamber, wherein the chamber accommodates the above The heater, the body member and the support member, and the chamber includes a space for heat-treating the article.

Moreover, the heat treatment device may further comprise a high temperature cable, the above high temperature The cable is held in the above chamber and electrically connected to the heater to prevent or prevent the emitted heat from interfering with the power supplied to the heater.

Moreover, the chamber may include: a housing in which heat treatment is formed The space for heating the article; and the opening/closing door are detachably coupled to the above casing such that the above space is opened/closed.

Moreover, the heat treatment apparatus may further comprise a heat treatment material to be used for heat treatment The processing gas of the piece is injected into the gas supply unit in the above chamber.

Moreover, the gas supply unit may include: a gas supply section for supplying a processing gas; a plurality of discharge sections separated from each other inside the chamber and discharging the process gas into the chamber; and a distribution section connecting the gas supply section and the plurality of discharge sections, and distributing the process gas to the plurality of discharge sections.

Additionally, the gas supply unit may further include a discharge section that is disposed to face the discharge section and discharge the process gas supplied into the chamber.

Room 100‧‧

110‧‧‧shell

130‧‧‧Open/close the door

200‧‧‧temperature compensation heater

201‧‧‧Reflection Department

210‧‧‧Control area

211‧‧‧Edge area

213‧‧‧First adjustment zone

215‧‧‧Second adjustment area

230‧‧‧temperature sensor

213‧‧‧First sensor

213‧‧‧Second sensor

215‧‧‧ third sensor

300‧‧‧heating unit

301‧‧‧heating area

303‧‧‧Redundant area

310‧‧‧heating tube

303‧‧‧heating hotline

350‧‧‧heat connector

370‧‧‧heating leads

371‧‧‧heating fixture

373‧‧‧heating terminal

375‧‧‧heating coupling

400‧‧‧Compensation unit

401‧‧‧Compensation area

403‧‧‧Connected area

410‧‧‧Compensation tube

430‧‧‧Compensation Hotline

450‧‧‧Compensation connector

470‧‧‧Compensation lead

471‧‧‧Compensation Fixing Department

473‧‧‧Compensation terminal

475‧‧‧Compensation coupling

500‧‧‧Fixed unit

501‧‧‧heating support

502‧‧‧Compensation support

503‧‧‧heating holes

504‧‧‧Compensation hole

505‧‧‧heating fixed recess

506‧‧‧Compensation fixed recess

600‧‧‧ body components

610‧‧‧

611‧‧‧ fastening recess

613‧‧‧ fastening cover

630‧‧‧Separate parts

650‧‧‧Expansion bracket

700‧‧‧Support members

710‧‧‧Frame

711‧‧‧Support recess

730‧‧‧Support spacers

731‧‧‧Support bracket

733‧‧‧Support pins

750‧‧‧Rotary axis

770‧‧‧Flexible components

780‧‧‧ expansion section

781‧‧‧Expansion path

783‧‧‧Expanding trunnion

800‧‧‧High temperature cable

810‧‧‧ conductor

820‧‧‧tight joint

830‧‧‧Insulator

850‧‧‧Metal tube

870‧‧‧Seal

880‧‧‧Connecting components

900‧‧‧Sliding members

910‧‧‧Guiding components

930‧‧‧Removable components

1000‧‧‧Locking components

1001‧‧‧Fixed bracket

1100‧‧‧ Keeping components

1110‧‧‧Cage

1130‧‧‧Cage drive

1300‧‧‧First fixed component

1310‧‧‧First fixed channel

1500‧‧‧Second fixed component

1510‧‧‧Second fixed channel

1600‧‧‧Fixed Department

1800‧‧‧Path components

1810‧‧‧rail

1830‧‧‧ Carrier

2000‧‧‧ gas supply unit

2010‧‧‧ gas supply section

2011‧‧‧Supply

2020‧‧‧Discharge section

2021‧‧‧Draining tube

2022‧‧‧ discharge seam

2023‧‧‧dummy tube

2024‧‧‧dred slit

2030‧‧‧ allocation section

2031‧‧‧ branch tube

2040‧‧‧Draining bracket

2050‧‧‧ Angle adjuster

2051‧‧‧Adjustment rail

2053‧‧‧Adjustment

2060‧‧‧Drainage section

M‧‧‧ heating objects

C‧‧‧ controller

The above and other objects, features and advantages of the present invention will become apparent to those skilled in the <RTI Front view of the heat treatment apparatus of the first embodiment; Fig. 2 is a side view showing the heat treatment apparatus according to the first embodiment of the present invention; and Fig. 3 is a view showing the operation of the heat treatment apparatus according to the first embodiment of the present invention. FIG. 4 and FIG. 5 show a closed state of a chamber in a heat treatment apparatus according to a first embodiment of the present invention; FIGS. 6 and 7 show an open state of a chamber in the heat treatment apparatus according to the first embodiment of the present invention; 8 is a perspective view showing essential parts of a locking member in a heat treatment apparatus according to a first embodiment of the present invention; FIG. 9 is a perspective view showing a heater according to a first embodiment of the present invention; FIG. 11 is a cross-sectional view showing a heater according to a first embodiment of the present invention; Figure 12 is a side view showing a fixing unit in the first embodiment of the present invention; Figure 13 is a cross-sectional view showing a first coupling state of the heater in the first embodiment of the present invention; A cross-sectional view of a second coupled state of the heater in the first embodiment of the invention; FIG. 15 is a side view showing a coupled state of the support member of the heat treatment apparatus according to the first embodiment of the present invention; An exploded view of essential components of a support member of the heat treatment apparatus of the first embodiment of the present invention; FIG. 17 shows an operation of a support member of the heat treatment apparatus according to the first embodiment of the present invention; and FIG. 18 is a view showing the operation of the support member according to the first embodiment of the present invention. A cross-sectional view of a first example of a high temperature cable of a first embodiment; Fig. 19 is a cross-sectional view showing a second example of a high temperature cable according to a first embodiment of the present invention; and Fig. 20 is a view showing a second embodiment according to the present invention Side view of the heat treatment apparatus; Fig. 21 shows the partitioned state of the heated article in the heat treatment apparatus according to the first embodiment of the present invention; and Fig. 22 shows the addition in the heat treatment apparatus according to the first embodiment of the present invention The configuration of the temperature-compensated heater of the partition state of the hot article; FIG. 23 shows the configuration of the temperature-compensated heater of the partition state of the heated object in the heat treatment apparatus according to the second embodiment of the present invention; FIG. a heat treatment apparatus of a third embodiment; Figure 25 is a perspective view showing a gas supply unit in a heat treatment apparatus according to a third embodiment of the present invention; and Figure 26 is a view showing installation of a discharge section of a gas supply unit in the heat treatment apparatus according to the third embodiment of the present invention; And Fig. 27 shows a state of rotation of the discharge section of the air supply unit in the heat treatment apparatus according to the third embodiment of the present invention.

Hereinafter, a substrate supporting device and a heat treatment device using the substrate supporting device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the figures, the thickness of certain lines, layers, components, elements or features may be exaggerated for clarity. Moreover, the technical terms that will be referred to hereinafter are terms defined in consideration of their functions in the present invention, which may be changed according to the intention, practice, and the like of the user, so that the terms should be defined based on the contents of the specification.

Fig. 1 is a front elevational view showing a heat treatment apparatus according to a first embodiment of the present invention. Fig. 2 is a side view showing a heat treatment apparatus according to a first embodiment of the present invention. Fig. 3 is a cross-sectional view showing the operation of the heat treatment apparatus according to the first embodiment of the present invention. 4 and 5 show the closed state of the chamber in the heat treatment apparatus according to the first embodiment of the present invention. 6 and 7 show an open state of a chamber in a heat treatment apparatus according to a first embodiment of the present invention. Fig. 8 is a perspective view showing essential parts of a locking member in the heat treatment apparatus according to the first embodiment of the present invention.

1 to 8, a heat treatment apparatus according to a first embodiment of the present invention includes a heater 200, a body member 600, and a support member 700, and is capable of heat-treating a heating object M such as a substrate using heat generated by the heater 200, plus The thermal object M is housed within the body member 600 and supported by the support member 700.

The heater 200 emits heat to heat the heated object M. heating Both the object M and the heater 200 are disposed within the body member 600. The support member 700 is disposed within the body member 600 such that the heating object M is separated from the heater 200.

In the first embodiment of the invention, the temperature compensation heater is used As the heater 200. Thereby, the temperature of the heat applied to the heating object M is substantially distributed uniformly, and the heat treatment performance of the heating object M can be improved.

Here, the body member 600 and the support member 700 are constructed according to the present invention. The substrate supporting device of the first embodiment of the present invention is capable of stably supporting the heating object M while preventing the heating object M from sagging.

In the heat treatment apparatus according to the first embodiment of the present invention, The thermal object M is housed in the body member 600, and the support member 700 supports the lower side of the heating object M. The heater 200 is disposed above and spaced apart from the heating object M. As power is supplied to the heater 200, the upper portion of the heating object M can be heat-treated by the heat emitted from the heater 200.

Figure 9 is a view showing a heater according to a first embodiment of the present invention. FIG. 10 is an exploded view of FIG. 9. Figure 11 is a cross-sectional view showing a heater according to a first embodiment of the present invention, and Figure 12 is a side view showing a fixing unit in the first embodiment of the present invention. Fig. 13 is a cross-sectional view showing a first coupled state of the heater in the first embodiment of the present invention, and Fig. 14 is a cross-sectional view showing a second coupled state of the heater in the first embodiment of the present invention.

Referring to Figures 9 to 14, heating according to a first embodiment of the present invention The device 200 emits heat to the heating object M and allows the heating object M to be heated to have a substantially uniform temperature distribution.

The heater 200 includes a heating unit 300, a compensation unit 400, and a fixing Unit 500.

The heating unit 300 can be divided into a heating zone 301 and a redundant zone 303, the redundant regions extend from opposite ends of the heating zone 301. Here, heat is emitted from the heating zone 301 by the supplied electric power, and the supplied electric power is transmitted to the heating zone 301 through the redundant area 303.

The heating zone 301 may be provided with a reflecting portion 201 that reflects the emitted heat. The heat generated by the heating zone 301 can be concentrated by the reflecting portion 201 on the heating target M. Here, the reflecting portion 201 should not be deformed or oxidized by the heat emitted. Further, the reflection portion 201 should not cause a decrease in reflection efficiency due to the emitted heat.

In the first embodiment of the present invention, the reflecting portion 201 may be formed of gold And formed on the heating tube 310. First and foremost, the gold reflecting portion 201 is not deformed at a temperature of 400 ° C or higher, and the reflection efficiency is not lowered.

The reflection portion 201 may be formed on the inner wall of the heating tube 310. Formed in The reflecting portion 201 on the inner wall of the heating tube 310 can be prevented from being scratched by an external force. Alternatively, the reflecting portion 201 may be formed on the outer wall of the heating tube 310. The reflecting portion 201 formed on the outer wall of the heating tube 310 allows easy deposition.

In the first embodiment of the present invention, the reflecting portion 201 is deposited by a deposition method form. However, not limited thereto, the reflection portion 201 may be formed on the heating tube 310 using various known methods.

Here, the reflection portion 201 is provided for heating of the heater 200 The zone 301 and the compensation zone 401 reflect the heat emitted by the heater 200. In this case, the reflecting portion 201 is adapted to reflect the heat disposed on the heating object M below the heater 200. Here, when the heating object M is stacked, the naturally emitted heat can rise. The lower portion of the superposed heating object M is heat-treated in an auxiliary manner.

In addition to the heating tube 310, the heating unit 300 includes a heating hot line 330, heating connector 350 and heating lead 370.

The heating tube 310 has a hollow tubular shape and is divided into heating zones. 301 and redundant area 303. The heating tube 310 is formed of a transparent or translucent material so that heat can be easily emitted and prevented from being deformed or damaged by the emitted heat. For example, the heating tube 310 may be formed of a transparent or translucent hollow quartz tube, or a transparent or translucent hollow glass tube.

The heating hot wire 330 is inserted into the heating tube 310 to be opposite to the heating zone 301 Should, and emit heat through the supplied electricity. The heated object M can be heated by the heat generated by the heating hot wire 330. In the first embodiment of the present invention, the heating hot wire 330 may be formed of an iron chrome aluminum resistance wire.

The heating connector 350 is electrically connected to the heating hot line 330 to be redundant Area 303 corresponds. In a state where the heating heat line 330 is inserted into the heating pipe 310, the heating connector 350 stably transmits the supplied electric power to the heating hot line 330 without being deformed or damaged by the emitted heat.

Here, among the heating hot wire 330 and the heating connector 350, The heat line 330 may be formed at least in a spiral shape. Since the heating hot wire 330 and the heating hot wire 330 inserted into the heating pipe 310 in the heating connector 350 are formed at least in a spiral shape, the heating hot wire 330 and the heating connector 350 can be stably inserted into the heating pipe 310, and the heating lead 370 and the heating connection are prevented. The electrical connection between the heater 350 and the heating hot wire 330 is shorted.

In the heater 200 according to the first embodiment of the present invention, each The length of the redundant region 303 is short so that it does not interfere with each of the heating connectors 350 The movement, therefore, only the heating hot wire 330 can be formed into a spiral shape. However, preferably, the heating hot wire 330 and the heating connector 350 are both formed in a spiral shape.

When not formed into a spiral shape, it is inserted into the heating tube 310 Thereafter, the heating hot wire 330 and the heating connector 350 may both sag. The temperature of the heat emitted by the heater 200 may be uneven, and the electrical connection between the heating lead 370, the heating connector 350, and the heating hot wire 330 may be short-circuited.

The heating lead 370 acts as a terminal that supplies power to the heating hot wire 330. The heating lead 370 is electrically connected to the heating connector 350 and fixed to the fixing unit 500.

Each of the heating leads 370 includes a heating fixing portion 371 and a heating terminal 373.

The heating fixing portion 371 is electrically connected to the heating connector 350 and is positively fitted into the fixing unit 500. Since the heating fixing portion 371 is positively fitted into the fixing unit 500, it is possible to prevent the heating lead 370 from rotating.

The heat fixing portion 371 is formed into various shapes other than a circular shape. In the first embodiment of the invention, the heating fixing portion 371 is formed in a hexagonal shape. Here, the heating fixing portion 371 may be provided with a separate terminal that protrudes to facilitate electrical connection to the heating connector 350.

The heating terminal 373 protrudes from the heating fixing portion 371. The heating terminal 373 is adapted to be exposed from the fixing unit 500 so as to be powered. The heating terminal 373 is stably connected to the high temperature cable 800 (to be described below) via the connection member 880. However, not limited to the connecting member 880, the heating terminal 373 can be stably connected to the cable 800 via different known members.

Heating lead 370 can also include a heating coupler 375.

The heating coupler 375 is coupled to the heating terminal 373 so that the heating is solid The fixed portion 371 is in close contact with the fixed unit 500. In the first embodiment of the invention, the heating coupler 375 may have a nut shape to be screwed to the extended heating terminal 373. Therefore, the heating terminal 373 can be provided with a thread that screws the heating coupler 375.

When the heating coupler 375 is screwed to the heating terminal 373, it can be prevented The heating terminal 373 is rotated by the heating fixing portion 371, and the heating heat wire 330 or the heating connector 350 is prevented from rotating.

The compensation unit 400 can be divided into a connection area 403 and a compensation area 401. The compensation zone 401 extends from opposite ends of the connection zone 403. Here, the supplied electric power is transmitted to the compensation area 401 along the connection area 403, and heat is emitted from the compensation area 401 by the supplied electric power.

Each compensation zone 401 can be provided with a reflection portion that reflects the emitted heat 201. The heat generated by the compensation zone can be concentrated by the reflecting portion 201 on the heating target M. Here, the reflecting portion 201 should not be deformed or oxidized by the heat emitted. Further, the reflection portion 201 should not cause a decrease in reflection efficiency due to the emitted heat.

In the first embodiment of the present invention, the connection area 403 can be divided into The heating zone 301 corresponds, and the compensation zone 401 can be divided to correspond to the redundant zone 303.

In the first embodiment of the present invention, the reflecting portion 201 may be formed of gold And formed on the compensation tube 410. First and foremost, the gold reflecting portion 201 is not deformed at a temperature of 400 ° C or higher, and the reflection efficiency is not lowered.

The reflection portion 201 may be formed on the inner wall of the compensation tube 410. Formed in The reflection portion 201 on the inner wall of the compensation tube 410 can be prevented from being scratched by an external force. Alternatively, the reflecting portion 201 may be formed on the outer wall of the compensation tube 410. The reflecting portion 201 formed on the outer wall of the compensating tube 410 allows easy deposition.

In the first embodiment of the present invention, the reflecting portion 201 is deposited by a deposition method form. However, not limited thereto, the reflection portion 201 may be formed on the compensation tube 410 using various known methods.

In addition to the compensation tube 410, the compensation unit 400 includes a compensation hot line 430, compensation connector 450 and compensation lead 470.

The compensation tube 410 has a hollow tubular shape and is divided into a connection region 403. And compensation area 401. The compensating tube 410 is formed of a transparent or translucent material so that heat can be easily emitted and prevented from being deformed or damaged by the emitted heat. For example, the compensation tube 410 may be formed of a transparent or translucent hollow quartz tube, or a transparent or translucent hollow glass tube. In the first embodiment of the invention, the heating tube 310 and the compensation tube 410 may have the same size and material.

The compensation hot line 430 is inserted into the compensation tube 410 to be opposite to the compensation area 401 Should, and emit heat through the supplied electricity. The heated object M can be heated by the heat emitted by the compensation heat line 430. In particular, the heat emitted by the compensation heat line 430 heats the edge of the heated object M. Thereby, a substantially uniform temperature distribution can be provided at the edge and center of the heating object M. In the first embodiment of the present invention, the compensation heat line 430 may be formed of an iron chrome aluminum resistance wire.

The compensation connector 450 is electrically connected to the compensation hot line 430 to connect with Area 403 corresponds. In a state where the compensating tube 410 is inserted, the compensating connector 450 stably transmits the supplied electric power to the compensating heat line 430 without being deformed or damaged by the heat generated by the compensating heat line 430.

Here, among the compensation hot line 430 and the compensation connector 450, The reheating line 430 may be formed at least in a spiral shape. Since the compensation heat line 430 of the compensation compensation line 410 among the compensation heat line 430 and the compensation connector 450 is formed at least in a spiral shape, the compensation heat line 430 and the compensation connector 450 can be stably inserted into the compensation tube. 410, and can prevent short circuit of the electrical connection joint between the compensation lead 470, the compensation connector 450, and the compensation heat line 430.

In the heater 200 according to the first embodiment of the present invention, The length of each compensation zone 401 is formed to be shorter than the width or length of the heating object M, so the compensation connector 450 can sag in the connection zone 403. All of the compensation heat line 430 and the compensation connector 450 can be formed in a spiral shape. However, considering the lengths of the compensation zone 401 and the connection zone 403, only the compensation heat wire 430 can be formed in a spiral shape.

When not formed into a spiral shape, it is inserted into the compensation tube 410 Thereafter, both the compensation heat line 430 and the compensation connector 450 will sag. The temperature of the heat emitted by the heater 200 may be uneven, and the electrical connection joint between the compensation lead 470, the compensation connector 450, and the compensation heat line 430 may be short-circuited.

The compensation lead 470 acts as a terminal that supplies power to the compensation heat line 430. Make up The compensation lead 470 is electrically connected to the compensation connector 450 and fixed to the fixed unit 500.

Each compensation lead 470 includes a compensation fixing portion 471 and a compensation terminal 473.

The compensation fixing portion 471 is electrically connected to the compensation connector 450 and is positive Adapted to the fixed unit 500. Since the compensation fixing portion 471 is positively fitted into the fixed unit 500, the compensation lead 470 can be prevented from rotating.

The compensation fixing portion 471 is formed in various shapes other than a circular shape. In this In the first embodiment of the invention, the compensation fixing portion 471 is formed in a hexagonal shape. Here, the compensation fixing portion 471 may be provided with a separate terminal that protrudes to facilitate electrical connection to the compensation connector 450.

The compensation terminal 473 protrudes from the compensation fixing portion 471. Compensation terminal 473 It is adapted to be exposed from the fixed unit 500 so that it can be powered. Compensation terminal 473 via The connecting member 880 is stably connected to the high temperature cable 800 (which will be described below). However, not limited to the connecting member 880, the compensating terminal 473 can be stably connected to the cable 800 via different known members.

Each compensation lead 470 can also include a compensation coupling 475.

The compensation coupling 475 is coupled to the compensation terminal 473 so that the compensation is solid The fixed portion 471 is in close contact with the fixed unit 500. In the first embodiment of the present invention, the compensating coupler 475 may have a nut shape to be screwed to the extended compensating terminal 473. Therefore, the compensation terminal 473 can be provided with a thread that screws the compensation coupling 475.

When the compensation coupling 475 is screwed to the compensation terminal 473, it can be prevented The compensation terminal 473 is rotated by the compensation fixing portion 471, and the compensation heat wire 430 or the compensation connector 450 is prevented from rotating.

Both the heating unit 300 and the compensation unit 400 are fixed to the fixed order Yuan 500. The fixing units 500 are disposed in pairs and are coupled to opposite ends of the heating unit 300 and opposite ends of the compensation unit 400.

Because the heating unit 300 and the compensation unit 400 are both coupled to the fixed The unit 500 is such that the heater 200 according to the first embodiment of the present invention can be modularized.

Each fixing unit 500 may be provided with a heating support 501 and a heating hole 503. The heating support 501 is coupled to the end of the heating tube 310, and the heating terminal 373 of the heating lead 370 passes through the heating hole 503. Therefore, the heating support 501 communicates with the heating fixing recess 505, and the heating hole 503 communicates with the heating fixing recess 505.

As an example, the heating support 501 can be recessed and wound around the heating tube 310 adaptation. As another example, the heating support 501 can extend and fit into the heating tube 310.

Moreover, the heating fixing recess 505 can be shaped in the fixing unit 500 to make. The heating fixing portion 371 is fitted into the heating fixing recess 505 to prohibit or prevent the heating lead 370 from rotating. Since the heating fixing portion 371 is positively fitted into the heating fixing recess 505, when the heating coupling 375 and the heating support 501 are coupled, the heating lead 370 can be prevented from rotating.

Moreover, each fixing unit 500 can be provided with a compensation support 502 and Compensating hole 504. The compensation support 502 is coupled to the end of the compensation tube 410, and the compensation terminal 473 of the compensation lead 470 passes through the compensation hole 504. Therefore, the compensation support 502 is in communication with the compensation fixing recess 506, and the compensation hole 504 is in communication with the compensation fixing recess 506.

In the first embodiment of the invention, the compensation support 502 can be recessed And fit around the compensation tube 410. In a second embodiment of the invention, the compensating support 502 can extend and fit into the compensating tube 410.

Moreover, the compensation fixing recess 506 can be shaped in the fixing unit 500 to make. The compensation fixing portion 471 is fitted into the compensation fixing recess 506 to prohibit or prevent the compensation lead 470 from rotating. Since the compensation fixing portion 471 is positively fitted into the compensation fixing recess 506, when the compensation coupling 475 and the compensation support 502 are coupled, the compensation lead 470 can be prevented from rotating.

In the heater 200 according to the first embodiment of the present invention, The heating lead 370 and the compensation lead 470 are screwed to the fixed unit 500, so the heating unit 300 and the compensation unit 400 can be separately maintained.

In the body member 600 according to the first embodiment of the present invention, The heating objects M are separated and stacked one upon another. The body member 600 includes a seat 610 and a separator 630.

When the heater 200 is disposed in parallel with the heating object M, each seat 610 The heater 200 is supported. Here, the seat 610 is provided with a fastening recess 611 to allow the fixing unit 500 of the heater 200 to be placed and supported at the fastening recess 611. Moreover, the fastening cover 613 is detachably attached to the fastening recess 611, whereby the seat 610 can stably fix the fixing unit 500 placed and supported by the fastening recess 611. Moreover, the individual heaters 200 are detachably attached to the body member 600 by the detachable attachment of the fastening cover 613, whereby the individual heaters 200 can be easily maintained.

The seat 610 can be provided with a support member 700. Heater 200 and support member The 700 is separated by the separation member 630. When the heating objects M are arranged apart from each other, the separating member 630 can separate the seats 610 on which the heater 200 is supported from each other. Moreover, when the heating articles M are arranged apart from each other, the separating member 630 can separate the seats 610 having the supporting members 700 from each other. In addition, the separating member 630 separates the seat 610 on which the heater 200 is supported and the seat 610 having the support member 700 from each other.

The body member 600 can be provided with an expansion bracket 650. Expansion bracket 650 Connected to the body member 600, the support member 700 is coupled to the expansion bracket 650 so as to be movable in the longitudinal direction.

Figure 15 is a view showing a heat treatment pack according to a first embodiment of the present invention Side view of the coupled state of the member, Fig. 16 is an exploded view showing essential parts of the support member of the heat treatment apparatus according to the first embodiment of the present invention. Figure 17 shows the operation of a support member of a heat treatment apparatus according to a first embodiment of the present invention.

15 to 17, according to the first embodiment of the present invention The support members 700 are spaced apart from each other and disposed within the body member 600 along the surface of the heating object M. The support member 700 supports the surface of the heating object M.

Each support member 700 includes a frame 710 and a support spacer 730.

A plurality of frames 710 are coupled to the body member 600. Frame 710 is set at The body member 600 corresponds to the surface of the heating object M in a state of being separated from each other. Here, each frame 710 may be provided with a support recess 711 that holds the support spacer 730.

Support spacers 730 are provided for frame 710, support spacing The piece 730 supports the heating object M housed within the body member 600. The support spacers 730 are formed to protrude from the frame 710 in a state of being separated from each other. Here, each of the support spacers 730 includes a support bracket 731 coupled to the frame 710 and a support pin 733 extending from the support bracket 731 to support the heating object M. The support pin 733 may be in point contact or line contact with the surface of the heating object M.

The support spacer 730 can be coupled in a rotatable or liftable manner Received frame 710. Each support member 700 can further include a rotating shaft 750. A rotating shaft 750 is provided for the frame 710, and the support spacer 730 is rotatably coupled to the rotating shaft 750. In other words, the rotating shaft 750 is formed to pass through the frame 710 and the support bracket 731 such that the support spacer 730 can be rotated.

Each support member 700 can further include an elastic member 770. Elastic structure The piece 770 elastically supports the support bracket 731 and the frame 710 of the support spacer 730. The resilient member 770 resiliently supports the rotating support spacer 730. Thus, when the support spacer 730 is rotated, the elastic member 770 allows the support spacer 730 to stably support the heating object M.

For example, when the heating object M is loaded in the body member 600 or When the heating object M is unloaded from the body member 600, the support spacer 730 may be inclined to avoid interference with the heating object M. In this case, a separate actuator (not shown) may be required.

Moreover, the support spacer 730 can be returned to its original position so that The accommodating heating object M is stably supported. In this case, the elastic restoring force of the elastic member 770 may be used, or a separate actuator (not shown) may be used. Although not shown in the drawings, the support spacer 730 may be liftably coupled to the frame 710 to inhibit or prevent interference with heating the object M.

Here, the expansion section 780 may be formed such that the support member 700 can Move in the longitudinal direction. The expansion section 780 connects the body member 600 with the support member 700 such that the support member 700 can move in the longitudinal direction.

The expansion section 780 can include an expansion path 781 and an expansion trunnion 783, The brace member 700 moves along the expansion path 781 in the longitudinal direction, and the expansion trunnion 783 is coupled to the support member 700 and moves along the expansion path 781.

For example, when the expansion path 781 is in the shape of a long groove in the body member 6O0 When formed in the expansion bracket 650 of the middle or body member 600, the expansion trunnion 783 may be formed to protrude from the frame 710 of the support member 700 and slidably inserted into the expansion path 781.

Moreover, when the expansion path 781 is in the shape of a long groove at the support member 700 When formed in the frame 710, the expansion trunnion 783 can be formed to extend from the body member 600 or the expansion bracket 650 of the body member 600 and slidably inserted into the expansion path 781.

Thus, when the expansion section 780 is formed, when passing through the heater 200 When the heating is expanded or contracted, the frame 710 can be stably stretched or retracted. Therefore, it is possible to prevent the frame 710 from being bent, and the support member 700 can stably support the heating object M.

The heat treatment apparatus according to the first embodiment of the present invention may further include Room 100. The chamber 100 provides a space for heat treatment of the heating object M. Therefore, the heater 200, the body member 600, and the support member 700 are housed in the chamber 100. The chamber 100 includes a housing 110 and an opening/closing door 130.

The housing 110 is an outer casing that forms a heat treatment space for heating the article M. The opening/closing door 130 is detachably coupled to the housing 110 such that the space is opened/closed. The housing 110 and the opening/closing door 130 may set or release a closed state of the space using the locking member 1000 (described below).

The heat treatment apparatus according to the first embodiment of the present invention may further include The high temperature cable 800 is housed in the chamber 100 because both the support member 700 and the body member 600 having the heater 200.

Figure 18 is a diagram showing a high temperature cable according to a first embodiment of the present invention First Example, FIG. 19 is a cross-sectional view showing a second example of the high temperature cable according to the first embodiment of the present invention.

Referring to Figures 18 and 19, the high according to the first embodiment of the present invention The warm cable 800 is housed in the chamber 100 and electrically connected to the heater 200 to inhibit or prevent the emitted heat from interfering with the power supplied to the heater 200.

High temperature cable according to the first example of the first embodiment of the present invention 800 includes a conductor 810, an insulator 830, a metal tube 850, and a seal 870.

The conductor 810 is electrically connected to the heater 200 for supplying to the heater 200 Electricity. Conductor 810 can be formed from a copper or aluminum material. Conductor 810 can be electrically coupled to at least one of heating lead 370 and compensating lead 470 via connecting member 880.

Insulator 830 surrounds the conductor. The insulator 830 prevents heat emitted from the heater 200 from being transmitted to the conductor 810 and can shield electric power flowing along the conductor 810. Insulator 830 can include magnesium oxide that acts as a mineral insulator.

Metal tube 850 surrounds insulator 830. Can prevent metal tube 850 due to The heat emitted by the heater 200 is deformed or damaged. The metal tube 850 can be formed of stainless steel.

Seal 870 seals the end of metal tube 850. Seal 870 prevents The insulator 830 is exposed from the end of the metal tube 850. The seal 870 is formed of a quartz or glass material and is adapted to be fused to the end of the metal tube 850.

High temperature cable according to the second example of the first embodiment of the present invention 800 includes a conductor 810, an insulator 830, a metal tube 850, a seal 870, and a tight joint 820.

The conductor 810 is electrically connected to the heater 200 for supplying to the heater 200 Electricity. Conductor 810 can be formed from a copper or aluminum material. Conductor 810 can be electrically coupled to at least one of heating lead 370 and compensating lead 470 via connecting member 880.

The insulator 830 is divided and disposed along the longitudinal direction of the conductor 810 Two parts of the surrounding conductor 810. The insulator 830 prevents heat emitted from the heater 200 from being transmitted to the conductor 810 and can shield electric power flowing along the conductor 810. Insulator 830 can include a ceramic material or magnesium oxide that acts as a mineral insulator.

Metal tube 850 surrounds insulator 830. Can prevent metal tube 850 due to The heat emitted by the heater 200 is deformed or damaged. The metal tube 850 can be formed of stainless steel.

Seal 870 seals the end of metal tube 850. The seal 870 prevents the insulator 830 from being exposed from the end of the metal tube 850. The seal 870 is formed of a ceramic material, a quartz material, or a glass material and is adapted to be fused to the end of the metal tube 850. Moreover, the seal 870 is formed from a ceramic bushing and is adapted to be coupled to the end of the metal tube 850.

A tight joint 820 is coupled to the end of the conductor 810 and secures the insulator 830, metal tube 850 and seal 870. The tight joint 820 is threaded to the end of the conductor 810, thereby allowing the seal 870 to be tightly secured to the metal tube 850. Here, the conductor 810 can be provided with a thread for screwing the joint 820.

The heat treatment apparatus according to the first embodiment of the present invention may further include Sliding member 900. The sliding member 900 connects the chamber 100 with the body member 600 such that the body member 600 can be placed into and withdrawn from the space of the chamber 100. The body member 600 housed in the chamber 100 can be inserted and removed through the sliding member 900.

As the space of the chamber 100 is opened/closed, the sliding member 900 makes this The body member 600 is slidably coupled to the housing 110. The sliding member 900 allows the body member 600 to slide over the housing 110 having the chamber 100 and may include a guiding member 910 and a movable member 930.

The guiding member 910 is installed in the chamber 100 and provides the body member 600 The sliding path. The movable member 930 is provided for the body member 600 and moves along the guiding member 910.

The heat treatment apparatus according to the first embodiment of the present invention may further include The locking member 1000. The locking member 1000 sets or releases a closed state of the space in which the chamber 100 of the heating object M is heat-treated. As the locking member 1000 sets the space in the closed state, the sealing of the chamber 100 can be stably maintained.

The locking member 1000 includes a holding member 1100 and a first fixing member 1300. The holding member 1100 selects a lock setting state. The holding member 1100 can be coupled to the opening/closing door 130 via the fixing bracket 1001. The retaining member 1100 includes a cage 1110 and a cage driver 1130.

The cage 1110 is fixedly coupled to the first fixing member 1300, The holder driver 1130 reciprocates the holder 1110. For example, the cage drive 1130 can reciprocate the cage 1110 using pneumatic or hydraulic pressure. Therefore, the holder 1110 is inserted into the first fixing member 1300 by the operation of the holder driver 1130, and can be fixedly coupled to the first fixing member 1300.

The retaining member 1100 is fixedly coupled to the first fixing member 1300. First A fixing member 1300 can be provided for the housing 110 having the chamber 100. When the fixing portion 1600 described below is provided, the first fixing member 1300 may be provided for the fixing portion 1600. Here, the first fixing member 1300 may be provided with a first fixing passage 1310 into which the holder 1110 of the holding member 1100 is inserted.

When the space of the chamber 100 is closed, it is set to open/close the door

The holder 1110 of the holding member 1100 of 130 is inserted into the first fixed passage 1310 of the first fixing member 1300 by the operation of the holder driver 1130. Then, since the space of the chamber 100 is closed, the sealing of the chamber 100 can be maintained.

The locking member 1000 may further include a second fixing member 1500. second The fixing member 1500 is disposed to be spaced apart from the first fixing member 1300 such that the holding member 1100 is fixedly coupled. The second fixing member 1500 may be provided for the fixing portion 1600 because the fixing portion 1600 described below is provided. Here, the second fixing member 1500 may be provided with a second fixing passage 1510 into which the holder 1110 of the holding member 1100 is inserted.

Opening/closing the door 130 and the housing 110 when the space of the chamber 100 is opened Separately, the holder 1110 provided as the holding member 1100 for opening/closing the door 130 is inserted into the second fixed passage 1510 of the second fixing member 1500 by the operation of the holder driver 1130. Therefore, since the space of the chamber 100 is kept open, the position of the opening/closing door 130 separated from the housing 110 can be stably restricted, and And the opening/closing door 130 is easy to position.

Although not shown in the drawings, when the first fixing member 1300 is set When used to open/close the door 130, the holding member 1100 is provided for the housing 110 or the fixing portion 1600. Alternatively, when the first fixing member 1300 is provided for opening/closing the door 130, the pair of holding members 1100 are detachable and provided for the housing 110 and the fixing portion 1600. Further, when the first fixing member 1300 is provided for opening/closing the door 130, the pair of holding members 1100 are detachable and provided for the fixing portion 1600.

The heat treatment apparatus according to the first embodiment of the present invention may further include The fixing portion 1600. The fixing portion 1600 is fixedly coupled to the housing 110 having the chamber 100. The fixing portion 1600 can stably support the opening/closing door 130 as the space of the chamber 100 is opened/closed.

The heat treatment apparatus according to the first embodiment of the present invention may further include Path member 1800. The path member 1800 slidably couples the opening/closing door 130 to the fixing portion 1600 as the space of the chamber 100 is opened/closed.

The path member 1800 allows the door 130 to be opened/closed at the fixed portion 1600 Slide up and can include a rail 1810 and a carrier 1830. The guide rail 1810 is provided for the fixing portion 1600 and constitutes a sliding path of the opening/closing door 130. The carrier 1830 is configured to open/close the door 130 and move along the rail 1810.

Hereinafter, reference will be made to the description of the second embodiment according to the present invention. Heat treatment device.

Figure 20 is a view showing a heat treatment pack according to a second embodiment of the present invention Side view of the set. Referring to FIG. 20, a heat treatment apparatus according to a second embodiment of the present invention includes a heater 200, a body member 600, and a support member 700, and is capable of using The heat generated by the heater 200 heats the heating object M, which is housed in the body member 600 and supported by the support member 700.

The heat treatment apparatus according to the second embodiment of the present invention may further include At least one of the chamber 100, the high temperature cable 800, the sliding member 900, the locking member 1000, the fixing portion 1600, and the path member 1800.

Here, the heat treatment apparatus according to the second embodiment of the present invention In the same configuration as the heat treatment apparatus according to the first embodiment of the present invention, the same reference numerals are given, and the description thereof will be omitted. However, when the seats 610 on which the heaters 200 are disposed are separated from each other by the separating members 630 of the body member 600, the heater 200 disposed on the seat 610 on one side of the body member 600 and the heater 200 disposed on the body member 600 The heaters 200 on the seat 610 on one side may be alternately arranged. Therefore, the temperature distribution of the heat applied to the heating object M can be more uniformly maintained.

Hereinafter, the heat according to the first embodiment of the present invention will be described. A heat treatment operation of each of the heating articles in the processing device.

Figure 21 shows a heat treatment apparatus according to a first embodiment of the present invention The partition state of the heated article in the middle, FIG. 22 shows the arrangement of the temperature compensation heater of the partition state of the heated article in the heat treatment apparatus according to the first embodiment of the present invention.

21 and 22, a heat station according to a first embodiment of the present invention The heating device divides each of the heating objects M into a plurality of control zones 210 so as to have different temperature distributions. Thereby, the heating object M can be adapted to have a uniform temperature distribution according to the direction in which the temperature compensation heater 200 is disposed.

Here, each heater 200 includes a heating unit 300 and a compensation sheet Yuan 400. Thereby, the heating object M can be adapted to the longitudinal direction of the heater 200 Has a uniform temperature distribution.

The control area 210 is disposed along the setting direction of the temperature compensation heater 200 Set. Each control zone 210 includes at least one heater 200. In a first embodiment of the invention, each control zone 210 may include two temperature compensated heaters 200.

The plurality of control areas 210 can be divided into an edge area 211 and a plurality of adjustment areas 213 and 215. Here, as shown in FIG. 21, the plurality of adjustment areas 213 and 215 may include a first adjustment area 213 and a second adjustment area 215.

The edge region 211 is set along the setting direction of the temperature compensation heater 200 It is used to heat the opposite ends of the object M. For example, the edge region 211 may be a region heated by the temperature compensation heater 200 disposed on opposite ends of the heating object M.

The first adjustment area 213 is disposed at the edge area 211 toward the heating object The inside of the center of M. For example, the first adjustment area 213 may be an area heated by the temperature compensation heater 200 disposed inside the edge area 211.

The second adjustment area 215 is disposed in the orientation of the first adjustment area 213 to be heated The inner side of the center of the object M. For example, the second adjustment area 215 may be an area heated by the temperature compensation heater 200 disposed inside the first adjustment area 213.

Therefore, the edge region 211 and the plurality of adjustment regions 213, 215 are different Temperature distribution. Thereby, the heating target M can be uniformly heated. For example, the heat generated by the temperature compensating heater is adjusted such that the temperature of the heat generated by the temperature compensating heater 200 is highest in the edge region 211, dropping toward the center of the heating object M. Thereby, the heating target M can be uniformly heated.

Here, the heat treatment apparatus according to the first embodiment of the present invention may A temperature sensor 230 and a controller C are also included. Temperature sensor 230 detects each control The temperature of zone 210.

In the first embodiment of the present invention, the temperature sensor 230 is disposed at The heating object M between the heating object M and the temperature compensation heater 200 is heated and the temperature of each control zone 210 is detected. In the first embodiment of the present invention, the temperature sensor 230 detects the temperature of each control zone 210 to compensate for the temperature of the heat emitted by the heater.

The temperature sensor 230 can include detecting each of the plurality of control regions 210 a first sensor 231 that detects the temperature of the edge region 211, a second sensor 233 that detects the temperature of each of the plurality of control regions 210, and each of the plurality of control regions 210 Second, the third sensor 235 that adjusts the temperature of the region 215.

The temperature detected by the temperature sensor 230 is sent to the controller C. control The controller C adjusts the amount of heat emitted by the temperature compensation heater 200 included in each of the control zones 210 in accordance with the temperature detected by the temperature sensor 230.

For example, controller C can add temperature compensation for each control zone 210. The temperature of the heat generated by the heater 200 is preset to the heating temperature of the heating object M. Here, the controller C compares the temperature detected by the temperature sensor 230 with a preset temperature corresponding thereto. Thereby, the temperature of the heat generated by the temperature compensation heater 200 included in each control zone can be adjusted.

Hereinafter, heat according to a second embodiment of the present invention will be described A heat treatment operation of each of the heating articles in the processing device.

Figure 23 shows a heat treatment apparatus according to a second embodiment of the present invention. The temperature of the partitioned state of the heated object compensates for the arrangement of the heater. Referring to Fig. 23, a heat treatment apparatus according to a second embodiment of the present invention divides each of the heating articles M into a plurality of control zones 210 so as to have different temperature distributions. Thus, add The thermal object M can be adapted to have a uniform temperature distribution according to the direction in which the temperature compensation heater 200 is disposed.

Here, each temperature compensation heater 200 includes a heating unit 300 And compensation unit 400. Thereby, the heating object M can be adapted to have a uniform temperature distribution according to the longitudinal direction of the temperature compensation heater 200.

The control area 210 is disposed along the setting direction of the temperature compensation heater 200 Set. Each control zone 210 includes at least one temperature compensation heater 200. In a second embodiment of the invention, each control zone 210 may include two temperature compensated heaters 200.

The plurality of control areas 210 can be divided into an edge area 211 and a plurality of adjustment areas 213 and 215. Here, as shown in FIGS. 22 to 23, the plurality of adjustment areas 213 and 215 may include a first adjustment area 213 and a second adjustment area 215.

The edge region 211 is set along the setting direction of the temperature compensation heater 200 It is used to heat the opposite ends of the object M. For example, the edge region 211 may be a region heated by the temperature compensation heater 200 disposed on opposite ends of the heating object M.

The first adjustment area 213 is disposed at the edge area 211 toward the heating object The inside of the center of M. For example, the first adjustment area 213 may be an area heated by the temperature compensation heater 200 disposed inside the edge area 211.

The second adjustment area 215 is disposed in the orientation of the first adjustment area 213 to be heated The inner side of the center of the object M. For example, the second adjustment area 215 may be an area heated by the temperature compensation heater 200 disposed inside the first adjustment area 213.

Therefore, the edge region 211 and the plurality of adjustment regions 213, 215 are different Temperature distribution. Thereby, the heating target M can be uniformly heated. For example, temperature The amount of heat emitted by the compensation heater is adjusted such that the temperature of the heat generated by the temperature compensation heater 200 is highest in the edge region 211 and falls toward the center of the heating object M. Thereby, the heating target M can be uniformly heated.

Here, the heat treatment apparatus according to the second embodiment of the present invention may A temperature sensor 230 and a controller C are also included. Temperature sensor 230 detects the temperature of each control zone 210.

In the second embodiment of the present invention, the temperature sensor 230 is set The support spacer 730 is used to support the heating member M or under the heating object M, and the temperature sensor 230 detects the temperature of the heating object M on each of the control regions 210.

The temperature sensor 230 can include detecting each of the plurality of control regions 210 a first sensor 231 that detects the temperature of the edge region 211, a second sensor 233 that detects the temperature of each of the plurality of control regions 210, and each of the plurality of control regions 210 Second, the third sensor 235 that adjusts the temperature of the region 215.

The temperature detected by the temperature sensor 230 is sent to the controller C. control The controller C adjusts the amount of heat emitted by the temperature compensation heater 200 included in each of the control zones 210 in accordance with the temperature detected by the temperature sensor 230.

For example, controller C can compare the temperature detected by temperature sensor 230. Preheating temperature with the heating object M. Thereby, the temperature of the heat generated by the temperature compensation heater 200 included in each control zone can be adjusted.

The heat treatment apparatus according to the second embodiment of the present invention is capable of reflecting Each of the heated objects M has a true temperature and avoids defects in the heated object M caused by heat.

Hereinafter, heat according to a third embodiment of the present invention will be described. Processing device.

Figure 24 shows a heat treatment pack according to a third embodiment of the present invention. 25 is a perspective view showing a gas supply unit of a heat treatment apparatus according to a third embodiment of the present invention. 26 shows the mounting of the discharge section of the air supply unit of the heat treatment apparatus according to the third embodiment of the present invention, and FIG. 27 shows the rotation state of the discharge section of the air supply unit of the heat treatment apparatus according to the third embodiment of the present invention. .

Referring to Figures 24 to 27, the heat according to the third embodiment of the present invention The processing apparatus includes the heater 200, the body member 600, and the support member 700, and is capable of heat-treating the heating object M using the heat generated by the heater 200, which is housed in the body member 600 and supported by the support member 700.

The heat treatment apparatus according to the third embodiment of the present invention may further include At least one of the chamber 100, the high temperature cable 800, the sliding member 900, the locking member 1000, the fixing portion 1600, and the path member 1800.

Here, the heat treatment apparatus according to the third embodiment of the present invention In the same configuration as the heat treatment apparatus according to the first or second embodiment of the present invention, the same reference numerals are given, and the description thereof will be omitted.

The heat treatment apparatus according to the third embodiment of the present invention may further include Air supply unit 2000. The gas supply unit 2000 injects a process gas for heat-treating the heating object M into the chamber 100. The gas supply unit 2000 may include a gas supply section 2010, a discharge section 2020, and a distribution section 2030.

The gas supply section 2010 supplies process gas to the chamber 100. Gas supply section The 2010 is composed of a pressure vessel and is capable of supplying the compressed stored process gas into the chamber 100.

The discharge sections 2020 are separated from each other in the chamber 100, and the gas supply section 2010 The supplied process gas is discharged into the chamber 100. Each discharge section 2020 is provided with a discharge slit 2022 to allow the process gas to be stably discharged. Each discharge section 2020 can include a discharge tube 2021 and a redundant tube 2023.

The discharge pipe 2021 has a hollow shape and is provided with a discharge slit At 2022, the process gas is discharged to the heated article M through the discharge slit 2022. The discharge pipe 2021 is fixed in the chamber 100 such that the process gas is stably discharged through the discharge slit 2022.

The redundant tube 2023 has a hollow shape and is connected to the distribution section 2030 A flow path for forming a process gas is formed. The redundant tube 2023 is inserted into the discharge tube 2021 and supported in the discharge tube 2021, and is provided with a redundant slit 2024 that discharges the process gas.

Here, the opening direction of the redundant slit 2024 can be the same as the discharge slit 2022. The openings are opposite in direction. The process gas discharged through the redundant slit 2024 is looped through the hollow discharge pipe 2021 and discharged to the discharge slit 2022. Thereby, the noise caused by the discharge of the processing gas can be reduced, the discharge speed of the processing gas can be reduced, and the flow of the processing gas discharged into the chamber 100 can be stabilized.

The distribution section 2030 is connected to the gas supply section 2010 and the discharge section 2020, and is divided into A process gas supplied from the gas supply section 2010 to the plurality of discharge sections 2020 is provided. For example, the distribution section 2030 can be comprised of a manifold that distributes process gas in response to a plurality of discharge sections 2020.

Then, the gas supply section 2010 is connected to the distribution section through the supply pipe 2011 2030, the distribution section 2030 is connected to the discharge section 2020 through each branch pipe 2031. Therefore, the process gas can be transferred from the gas supply section 2010 to the discharge section 2020.

Here, the air supply unit 2000 may further include fixing the discharge section 2020 The discharge bracket 2040 to the inner surface of the chamber 100.

Further, the air supply unit 2000 may further include an angle adjuster 2050. The angle adjuster 2050 connects the discharge section 2020 with the discharge bracket 2040 to allow the discharge section 2020 to rotate. Due to the angle adjuster 2050, as the discharge section 2020 rotates, the direction in which the process gas is discharged to the heated object M can be adjusted.

Each angle adjuster 2050 can include an adjustment rail 2051 and an adjustment The protruding portion 2053, the adjustment guide rail 2051 forms a path followed by the rotation of the discharge section 2020, and the adjustment protrusion 2053 is coupled to the adjustment guide rail 2051 and moves along the adjustment guide rail 2051.

For example, when the adjustment rail 2051 is formed to be recessed or passed through the discharge tray At the time of the frame 2040, the adjustment protrusion 2053 can protrude from the discharge section 2020 to be inserted into the adjustment rail 2051 and moved along the adjustment rail 2051.

Moreover, when the adjustment rail 2051 is formed to be recessed into the discharge section 2020 At the outer peripheral surface, the adjustment protrusion 2053 can protrude from the discharge tray 2040 to be inserted into the adjustment rail 2051 and moved along the adjustment rail 2051.

Additionally, the air supply unit 2000 may further include a discharge section 2060. emission The segment 2060 is arranged to face the discharge section 2020 such that the process gas supplied into the chamber 100 is discharged. Here, the position of the discharge section 2060 is not limited. The process gas can be evenly circulated in the chamber 100 and discharged through the discharge section 2060.

According to the substrate support device and the heat using the substrate support device The device can prevent the heating object to be heat treated from sagging when supporting the heating object, and heat transfer to the edge of each heating object substantially uniformly.

According to the present invention, a substrate supporting device and the use of the substrate supporting device The heat treatment device can prevent the heating object to be heat treated from sagging when supporting the heating object, and heat transfer to the edge of each of the heating objects substantially uniformly.

Further, it is possible to prevent the heating object from sagging due to heating of the object be damaged.

Further, the support member is capable of coping with heat in response to heating the object The thermal expansion of the treatment, and the heating of the article, can be prevented from being damaged by thermal expansion of the support member.

Moreover, using the layout structure of the heater and the support member, The influence of the heat generated by the heater is avoided, and the separation distance between the heated objects can be reduced to miniaturize the heat treatment apparatus.

Further, the substrate supporting device is constructed as a drawer type, thereby having It is advantageous to maintain the inside of the chamber without disassembling the heat treatment device.

Further, each heating can be based on a modular heater The edges of the article transfer heat substantially uniformly.

Further, the heater uses a dual mode, making it easy to control Individual temperatures are produced and heat is transferred substantially uniformly to the edges of each heated article.

Moreover, the components of the heater are simplified and power can be supplied The hotline on the area that does not emit heat.

Further, the leads are easily fixed and prohibited or prevented from rotating. Prevents shorting of the electrical connection connector and prevents or prevents the hot wire from rotating.

Moreover, it is possible to prevent heat generation without a separate support structure. The area and the hot wire and connector on the area where no heat is emitted rotate.

Moreover, in terms of maintenance, the heater is easy and repaired separately and replace.

Moreover, the heating object is easy to load and unload, and can be prohibited or prevented. The surface of the heated object is damaged.

Moreover, it is possible to prohibit or prevent the heat generated by the heater from interfering with the supplied power. It is possible to prohibit or prevent the generated heat from generating foreign matter or odor in the space of the room.

Moreover, the electrical connection to the heater is adapted to avoid interference with the chamber in the space of the chamber.

In addition, the heat insulating effect of the chamber can be improved, and the heat treatment performance of the heated object can be improved.

It is apparent to those skilled in the art that the above-described exemplary first embodiment of the present invention can be variously modified without departing from the spirit or scope of the invention.

Room 100‧‧

200‧‧‧temperature compensation heater

300‧‧‧heating unit

400‧‧‧Compensation unit

500‧‧‧Fixed unit

600‧‧‧ body components

610‧‧‧

630‧‧‧Separate parts

700‧‧‧Support members

710‧‧‧Frame

730‧‧‧Support spacers

800‧‧‧High temperature cable

880‧‧‧Connecting components

900‧‧‧Sliding members

910‧‧‧Guiding components

930‧‧‧Removable components

M‧‧‧ heating objects

Claims (15)

A substrate supporting device comprising: a body member on which a plurality of heating objects are stacked apart from each other; and a plurality of supporting members disposed along a surface of each of the heating objects in the body member and supporting each of the heating The surface of the object. The substrate supporting device according to claim 1, wherein the support member comprises: a plurality of frames arranged to be separated from each other in a corresponding manner in a surface of each of the heating members; and a plurality of The support spacers extend from each of the frames separated from each other and support each of the heated articles. The substrate supporting device of claim 2, wherein each of the above-described supporting spacers comprises: a support bracket coupled to the frame; and a support pin extending from the support bracket and supporting each of the heating articles. The substrate supporting device according to claim 2, wherein each of the above-mentioned supporting members further includes a rotating shaft, the rotating shaft being provided for the frame, and the supporting spacer being rotatably coupled to the rotating shaft. The substrate supporting device of claim 4, wherein each of the above-described support members further comprises an elastic member that elastically supports the frame and the support spacer. The substrate supporting device according to claim 1, further comprising an expansion section connecting the body member and the support member to allow the branch The support member moves in the longitudinal direction. A heat treatment apparatus comprising: the substrate supporting device according to any one of claims 1 to 6; and a plurality of heaters disposed in the body member in parallel with the support member and heating the plurality of heating object. A heat treatment apparatus according to claim 7, wherein each of said heaters comprises: a heating unit divided into a heating zone and a redundant zone, said redundant zone being formed to extend from opposite ends of said heating zone And the heating unit emits heat from the heating zone; the compensation unit is divided into a connection zone and a compensation zone, the compensation zone is formed to extend from opposite ends of the connection zone, and the compensation unit emits heat from the compensation zone And a fixing unit, the heating unit and the compensation unit described above are both fixed to the fixing unit. The heat treatment apparatus according to claim 8, wherein each of the heating zone and the compensation zone includes a reflection portion that reflects heat. The heat treatment apparatus according to claim 7, further comprising a chamber that houses the heater, the body member, and the support member, and the chamber includes a space for heat-treating the article. The heat treatment apparatus according to claim 10, further comprising a high temperature cable held in the chamber and electrically connected to the heater to prohibit or prevent the generated heat and the power supplied to the heater Interference has occurred. The heat treatment apparatus according to claim 10, wherein the chamber comprises: a casing in which a heat treatment heating object is formed; and an opening/closing door detachably coupled to the casing to make the space Is turned on/off. The heat treatment apparatus according to claim 10, further comprising a gas supply unit for injecting a processing gas for heat-treating the heating article into the chamber. The heat treatment apparatus according to claim 13, wherein the gas supply unit comprises: an air supply section for supplying a processing gas; a plurality of discharge sections separated from each other inside the chamber and discharging the processing gas into the chamber; And a distribution section connecting the gas supply section and the discharge section and distributing the process gas to the plurality of discharge sections. The heat treatment apparatus according to claim 14, wherein the gas supply unit further includes a plurality of discharge sections arranged to face the discharge section and discharge the process gas supplied into the chamber.