201127551 - 六、發明說明： 【發明所屬之技術領域】 本發明係有關於利用切斷用線來切斷 卞导體晶錠 (ingot)等之線鋸。 【先前技術】[Technical Field of the Invention] The present invention relates to a wire saw for cutting a germanium conductor ingot or the like by a cutting wire. [Prior Art]
以往，作為將半導體晶錠等工件切出為薄片（SH 狀之手段已知線錯（wire saw)。該線鑛係具備複數3 引滚輪（guide roller)、及對這些導引滾輪進行旋轉驅 動之馬達等，於上述導引滾輪彼此之間捲掛切斷用線，從 而形成該線複數根排列之線群。在該線鋸中，一 , 一邊上述線 沿其軸方向高速行走，一邊工件朝向由該線形成之線群以 與線轴方向直交的方向切斷搬送，從而工 u時破切出為 複數片晶圓（waf er )。 作為此種線鋸之一，例如專利文獻丨所示之結構。被 記載於此文獻之線鋸，包括具備複數個導引滾輪之第1工 件切斷部和第2工件切斷部（主滾輪部）、以及—對線送 出/捲取裝置，從其中一個、線送出/捲取褒置送出之一 ^ 切斷用線掛於各工件切斷部之導引滾輪之間，並被另一個 線送出/捲取裝置捲取。據此，於各工件切斷部分別形成 用於切斷工件之線群。 —般，在線鋸中，適宜保持切斷用線之張力报重要。 然而，如上述專利文獻1中所記載，在且 ^ 隹具備兩個工件切斷 部之線鋸中’由於其線行走方向 "丨L w之工件切斷部的切 201127551 斷作業之影響，被導入於該方向下流側之工件切斷部之切 斷用線之張力變動。 作為抑制此張力之變動的手段，在專利文獻丨中揭示 有於兩工件切斷部彼此之間檢測切斷用線之張力的張力檢 測器、及基於該檢測值控制該張力的張力調整機構。該張 力調整機構具備用於掛設上述切斷用線之一對調節滾輪 (dancer roller)、及藉由在這些調節滾輪彼此之間被按 壓於上述切斷用線以使該切斷用線之張力變化的臂 (a〇0，並且，適宜保持被導入於下流側之工作切斷部之 線之張力地作動。 然而’在該線鑛中，由於方卜七 田於在上述張力檢測器檢測出的 切斷用線之張力變動時，張六 ^張力5周整機構才作動，因此難以Conventionally, a wire saw has been known as a method of cutting a workpiece such as a semiconductor ingot into a sheet (the SH-like method is provided. The line ore system has a plurality of guide rollers and rotationally driving the guide rollers. The motor or the like winds the cutting wire between the guide rollers to form a line group of the plurality of lines arranged in the line. In the wire saw, one side of the wire travels at a high speed along the axial direction thereof The line group formed by the line is cut and transported in a direction orthogonal to the direction of the bobbin, and is cut into a plurality of wafers at the time of the process. As one of such wire saws, for example, the patent document is The wire saw described in this document includes a first workpiece cutting portion and a second workpiece cutting portion (main roller portion) including a plurality of guide rollers, and a line feeding/winding device. One of the wire feeding/winding devices is sent out. The cutting wire is hung between the guide rollers of the workpiece cutting portions, and is taken up by another wire feeding/winding device. Each workpiece cutting portion forms a line for cutting the workpiece In the wire saw, it is important to maintain the tension of the wire for cutting. However, as described in the above-mentioned Patent Document 1, the wire saw with two workpiece cutting portions is 'walking due to its line. The influence of the cutting operation of the workpiece cutting portion of the direction "丨L w is the change in the tension of the cutting line introduced into the workpiece cutting portion on the downstream side in this direction. As a means of suppressing the change of the tension, The patent document 揭示 discloses a tension detector that detects the tension of the cutting wire between the two workpiece cutting portions, and a tension adjusting mechanism that controls the tension based on the detected value. The tension adjusting mechanism is provided to hang the above a pair of cutting wires, a dancer roller, and an arm (a〇0, which is pressed between the adjusting rollers to press the cutting wire to change the tension of the cutting wire, and It is suitable to maintain the tension of the wire which is introduced into the downstream side of the working cutting portion. However, in the line mine, when the tension of the cutting wire detected by the tension detector is changed by the armpit, Six tension ^ 5 weeks before the entire actuation mechanism, it is difficult to
獲得較高之響應性。 # M 專利文獻1 :曰本專利公開公報特開20〇〇-618〇5號 L發明内容】 本發明之目的係提供-種具備第i工件切斷部及第2 工件切斷部之線鑛’且能以高響應性（旧卿⑷適 整在兩工件切斷部之間的切斷用線之張力的線二 所有關之⑽，包括··線送出裝置，送出切斷用線Γ 二==;具備複數個第1導引滾輪及旋轉驅動這些導 驅動部，且藉由從線送出裝置送出… 線捲繞於上述各第i導引滾 之切斷用 第2工件切斷部，且備… 成件切斷用之線群； 具備複數個第2導引滾輪及旋 4 201127551 些第2導弓丨滾輪之第2驅動部，且藉由從第丨工件切斷部 導出的上述切斷用線捲繞於上述各第2導引滾輪而形成工 件切斷用之線群；線捲取裝置，捲取從上述第2工件切斷 部導出之切斷用線；張力檢測器，檢測第1工件切斷部與 第2工件切斷部之間的上述切斷用線之張力；控制裝置， 刀別調節藉由上述第1驅動部及上述第2驅動部旋轉驅動 的上述帛1 1|_引滾輪及帛2冑引滚輪之旋轉驅動速 度。此控制裝置變更上述第1導引滾輪及上述第2導引滾 輪中至少之-的旋轉速度，以使上述張力檢測器檢測出的 張力在指定範圍内。 【實施方式】 們用固式說明本發明之實施例。 第1圖概略地表不此實施例所有關的線錯之整體。該 線鑛具備上下2段之工杜+77伽· Ar? 1 * 之件切斷部ΙΑ、1B，一對線送出/捲 取裝置1 2A、1 2B，分別具有滑於卩 令'月輪（pul ley ) 16之線張力調 卽裝置15A、15B，分別具有滑於17 旁/月輪17a、18a、19a的張力檢 測器17至19，以及導引滑輪21至34等。 上述工件切斷部1A包会、，儿> 丁 已3〜水平方向排列之一對導弓丨 滾輪10a、10b，及旋轉驅動這b 、—等W滾輪1 Oa、1 Ob之黾 達11Λ、11B，同樣，上述件 … 4件切斷部1Β包含沿水平方向 排列之一對導引滾輪i 〇a、j 〇 及紅轉驅動這些導引滾鲶 l〇a、10b之馬達11A、11Be 获輪 谷工件切斷部ΙΑ、1B之導引 滾輪1 0a、1 Ob之排列方向（在 门、在圖式中為水平方向）相互平 201127551 行，且兩工件切斷部ΙΑ、1B排列在與該排列方向垂直之方 向（在圖式中為上下方向）上。 各線送出/捲取裝置1 2A、1 2B (適宜地稱為第j線送 出/捲取裝置12A、第2線送出/捲取裝置12β)分別具備周 圍被捲繞切斷用之線W之線軸（b〇bbin) 13A、l3B，及旋 轉驅動這些線軸13A、13B之線軸驅動馬達UA、ΐ4β。 從其中一個線送出/捲取裝置i 2A之線軸i 3A送出的線 W，（1)以導引滑輪2〗、22,線張力調節裝置15A之滑輪 16，張力檢測器17之滑輪丨7a，及導引滑輪24至託之順 序被掛上，（2 )以工件切斷部丨A之導引滾輪i i心之 順序一邊被嵌入其外周面之導引槽（省略圖示），一邊複 數次螺旋狀地捲繞（被捲掛）於這些導引滾輪1〇&、i彼 此之間，⑺以導引滑輪27、28，張力檢測器18之滑輪 18a’及導引滑輪29之順序被掛上’（4)以工件切斷部 1B之導引滾輪10a、10b之順序，一邊被嵌入於其外周面 之導引槽（圖示省略），—邊複數次螺旋狀捲繞（被捲掛） 於這些導引滾輪1〇a、1〇M皮此之間，（5)以導引滑輪3〇、 31，張力檢測器19之滑輪19a，線張力調整裝置ΐ5β之滑 輪16,導引滑輪33、34之順序被掛上，（6)被另一個線 送出/捲取裝置12B的線轴捲取。 15A、15B向被掛於其滑輪16的 上述線張力調整裝置 線W賦予指定之張力。 201127551 各線軸驅動馬達14A、14B之線軸13A、13β之旋轉驅動方 向，可分別正反切換。藉由該切換，線w之驅動狀態，如 第1圖中實線箭頭所示，於線w從第丨線送出/捲取裝置 12A之線軸13A送出，並被第2線送出/捲取裝置ι2β之 線軸13B被捲取之狀態（以下稱為“第i行走狀態”）、 與線W從第2線送出/捲取裝置12B之線轴UB送出，並 被第1線送出/捲取裝置12A之線轴13A捲取之狀態（以 下稱為第2订走狀態）之間切換。在這些行走狀態中，複 數根線W (適宜稱為線群）以彼此平行之狀態被張設於工 件切斷部u、1B之導引滾輪10a、1〇b之間，該線群沿其 軸方向以高速被往復驅動。 因此，此實施例所有關之上述兩線送出^ m 12A、12B兼作為本發明所有關之“線送出裝置，，和“線捲 取襄置’’ ’上述兩工件切斷部U、1B兼作為本發明所有關 之第1工件切斷部，，和“第2工件切斷部”。呈體而+， 走狀態下’上述線送出/捲取裝置12A作為本 ' 線$出裝置，，而發«能，上述線送出/ 捲取裝置126作為本發乩灵乙出/ 月所有關之，線捲取裝置，，而發揮 機上述工件切斷部1A作為本發明所有關 切斷部”而發槿撼At [ 弟1工件Get higher responsiveness. 。 。 。 。 。 。 。 。 。 。 。 M 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 〇 In addition, (10), which is related to the line 2 of the tension of the cutting line between the two workpiece cutting sections, the high-response (4), including the wire feeding device, and the cutting wire 送==; a plurality of first guide rollers are provided, and the guide driving portions are rotationally driven, and are fed from the wire feeding device. The wire is wound around the second workpiece cutting portion for cutting the respective i-th guide rollers. And a plurality of second guide rollers and a second drive portion of the second guide roller and the second guide roller, and the second drive portion derived from the second workpiece cutting portion The cutting wire is wound around each of the second guide rollers to form a wire group for cutting the workpiece; the wire winding device winds the cutting wire that is led out from the second workpiece cutting portion; and the tension detector The tension of the cutting wire between the first workpiece cutting portion and the second workpiece cutting portion is detected; the control device adjusts the blade a rotational driving speed of the 帛1 1|_ roller and the 胄 2 胄 roller that are rotationally driven by the first driving unit and the second driving unit. The control device changes the first guiding roller and the second guiding At least the rotation speed of the roller is such that the tension detected by the tension detector is within a specified range. [Embodiment] The embodiments of the present invention are described in a solid manner. FIG. 1 is a schematic view of the embodiment. The whole line of the line is faulty. The line mine has the upper and lower sections of the Du+77 gamma Ar? 1 * piece cutting part ΙΑ, 1B, a pair of line feeding/winding devices 1 2A, 1 2B, respectively卩 卩 '' pul ley 16 line tension adjusting devices 15A, 15B, respectively, having tension detectors 17 to 19 that slide on the 17 side/moon wheels 17a, 18a, 19a, and guide pulleys 21 to 34 The workpiece cutting unit 1A is wrapped, and the child is placed in the horizontal direction, and the pair of guide rollers 10a and 10b are arranged in the horizontal direction, and the wheel is driven by the b, the W roller 1 Oa, 1 Ob. Up to 11Λ, 11B, similarly, the above-mentioned parts... The four-piece cutting part 1Β includes one pair of guide rolls arranged in the horizontal direction i 〇a, j 〇 and red turn drive the motors 11A, 11Be of the guide rollers l〇a, 10b to obtain the arrangement direction of the guide rollers 1 0a, 1 Ob of the wheel workpiece cutting portion 1, 1B (at the door) In the figure, the horizontal direction is equal to the 201127551 line, and the two workpiece cutting portions ΙΑ and 1B are arranged in a direction perpendicular to the arrangement direction (upward and downward directions in the drawing). Each line feeding/winding device 1 2A, 1 2B (referred to as the j-th thread feeding/winding device 12A and the second wire feeding/winding device 12β as appropriate) respectively have a bobbin (b〇bbin) 13A around the wire W for winding and cutting. l3B, and a bobbin driving motor UA, ΐ4β that rotationally drives the bobbins 13A, 13B. The wire W sent from the bobbin i 3A of one of the wire feeding/coiling devices i 2A, (1) to guide the pulleys 2, 22, the pulley 16 of the wire tension adjusting device 15A, the pulley 丨 7a of the tension detector 17, And the order of the guide pulley 24 to the support is hung, and (2) the guide groove (not shown) of the outer peripheral surface is inserted in the order of the guide roller ii of the workpiece cutting portion 丨A, and plural times Spirally wound (screwed) between the guide rollers 1〇&, i, (7) in the order of the guide pulleys 27, 28, the pulley 18a' of the tension detector 18, and the guide pulley 29 When the guide rollers 10a and 10b of the workpiece cutting portion 1B are attached to the guide grooves 10a and 10b of the workpiece cutting portion 1B, the guide grooves (not shown) are fitted to the outer peripheral surface thereof, and the spiral winding is repeated a plurality of times. Between the guide rollers 1〇a, 1〇M, (5) guided by the pulleys 3〇, 31, the pulley 19a of the tension detector 19, the pulley 16 of the line tension adjusting device ΐ5β, The order of the pulleys 33, 34 is hung, and (6) is taken up by the bobbin of the other wire take-up/coiling device 12B. 15A and 15B apply the specified tension to the wire tension adjusting device line W which is hung on the pulley 16. 201127551 The rotational driving directions of the bobbins 13A and 13β of the respective bobbin drive motors 14A and 14B can be switched forward and reverse. By this switching, the driving state of the line w is sent from the bobbin 13A of the second-line feeding/winding device 12A to the line w as indicated by the solid arrow in Fig. 1, and is sent by the second-line feeding/winding device. The state in which the spool 13B of the ι 2β is wound (hereinafter referred to as "the i-th traveling state") and the wire W are sent out from the spool UB of the second wire feeding/winding device 12B, and the first wire is fed/winded by the first wire. The state in which the bobbin 13A of the 12A is wound up (hereinafter referred to as the second binding state) is switched. In these walking states, a plurality of root lines W (suitably referred to as line groups) are stretched in a state of being parallel to each other between the guide rollers 10a, 1b of the workpiece cutting portions u, 1B, along which the line group The shaft direction is reciprocally driven at a high speed. Therefore, the above-mentioned two-wire delivery unit m 12A, 12B according to this embodiment also serves as the "wire feeding device" and the "wire winding device" in the present invention. The first workpiece cutting portion according to the present invention and the "second workpiece cutting portion". In the case of the body and the +, in the running state, the above-mentioned wire feeding/winding device 12A is used as the 'line' device, and the wire feeding/winding device 126 is used as the hairpin. In the wire winding device, the workpiece cutting unit 1A is used as the cutting portion of the present invention.
機此，上述工件切斷部1B 關之“第2工件切斷邱”“ 巧尽毛明所有 狀離下η 而發揮機能。反之，在第2行走 ^屮 出/捲取裝置12Β作為本發明所有關之 ^送出裝置.，，而發揮機能，上述線送 ^ 為本發明所有關之“線捲取裝置，，而發揮機能:::： 201127551 切斷部1B作為本發明所有關之“第u件切斷 機把’上4工件切斷部u作為本發明 發揮 切斷部，’而發揮機能。 (第2工件 此外，本發明不限於此種線评之 切換，亦可Λ兮妙丨丨，w w ^正反方向 為該線张僅限於按一個方向被驅動。在此 “當丨丁彼 向之上流側的工件切斷部相〜 第1工件切斷部” ，丁、去如丨 丨’々日田於 工件切斷部，， τ相之1切斷部相當於“第2 於上述工件切斷部1A、1Β的側方，抓 狀之…(例如晶錢)移動的工件搬 =;°具備沿上下方向延伸的大致長方體狀的垂： 。 4卜上下-對工件保持部42A、42B，以及工 件搬送馬達43。 及 上述工件保持部4 2 A、4 2 B >VL i* nr +人 上述垂直“之其中一側面：別：：向排列成-列’從 刀別大出於上述工件切斷部 二之上方位置’分別經由切片基座（sUCebase)(圖 不省略）保持上述工件44。該被保持的工件W之方向被 設定為：基於其結晶軸’能夠得到目的之結晶方位之方向。 上側的工件保持部42A(第1工件保持部42A)於第！工件 切斷部1A之導引滾輪.、⑽之間形成的線群之中上側 的線群之上方保持工件44，下側的工件保持部㈣介於第 牛刀斷。P 1A與形成在第2工件切斷部1β的導引滾輪 1 Oa 1 Ob之間的上側之線群之間，將工件μ保持於該上 側之線群上方。 201127551 上述工件搬送馬達43與圖略的滚珠螺桿（baU screw: 聯動’使上述垂直台4卜上述兩工件保持部42A、42B、還 有分別被保持於這些工件保持部42A、42B的工件44 一體 昇降。 亦即’在該線鑛中，各工件切斷部1A、1B之導引滾輪 1 1 Ob之間成為切斷區域’ 一邊被形成於此切斷區域之 線群化/、長度方向同時被高速旋轉，一邊上述工件搬送裝 置40同時將被保持於各工件保持部42a、桃之工件^朝 向上述切斷區域之線群切斷搬送，且從被捲繞於導引滾輪 1 〇b之周圍之線群之外側朝向内側（圖中為從上側至 下側）以相同方向切斷搬送。據此，由各工件44—次同時 切斷出複數個晶圓（薄片）。 該線鋸進一步具備統括控制工件44之切斷動作的控 制益50。該控制器50藉由使上述各線送出/捲取裝置12八、 m之各線軸驅動馬達14A、"8作動而使線w向指定方向 南速驅動’並且基於上述張力檢測器π、19檢測出的線W 之張力調節線張力調節裝置15Α、15β之驅動速度以此控 制線W之張力。進而，該控制器50具備本發明所有關之“控 制裝置之機能，根據被設置於兩工件切斷部i Α、1β彼此 之間的上述張力檢測器18 (相當於本發明之張力檢測器） 之檢測值，調節各工件切斷部1A、1B之導引滚輪1〇a、i〇b 之旋轉驅動速度，使從工件切斷部1A、1B之其中一個向另 一個被導引的線W之張力控制於適當範圍内。 關於此工件切斷部1A、1B之間的線w之張力控制，利 9 201127551 用第2圖之流程圖進行說明。 當線錯起動時’控制器50首先向圖外之馬達控制電路 輸出控制訊號，來驅動各線送出/捲取裝置1 2A、i 2B之線 軸13A、13B，並且，以預先設定之旋轉數（旋轉速度）驅 動工件切斷部ΙΑ、1B之導引滚輪i〇a、i〇b(步驟s卜S3)。 然後，當導引滾輪1 〇a、1 Ob之旋轉速度達到目標值 時，控制器50基於來自張力檢測器18之輸出訊號，判斷 工件切斷部1A、1B之間的線w之張力（張力檢測值）是否 為預先被設定之容許範圍内的值（容許值）（步驟s5)， 在此判斷為“是”的情況下，轉移至步驟S3。 於此相對，當在步驟S5判斷為“否，，時，進一步判斷 張力檢測值疋否低於容許值（容許範圍内的最低值）（步 驟s7 )，在此當判斷為“是，，的情況下，控制器5〇向上 述馬達控带i電路輸出控制訊?虎，使位於線行{方向下流側 之工件切斷部1A (或1B)之導引滾輪1〇&、l〇b之旋轉速 度加快預先被設定的速度（步驟S9)。具體而言，當線w 處於上述帛走狀態（參照第丨圖中之實線箭頭）時， 使第2工件切斷部1B之導引滾輪心、⑽之旋轉速度加 决田處於第2行走狀態（參照第i圖中之虛線箭頭）時， 使第1卫件切斷部1A之導引滚輪IGa、1Gb之旋轉速度加 快。如此，若加快工件切斷部1Α、1β中位於下流側之工件 =斷。卩之導引滾輪1〇a、1〇b之碇轉速度，相應地線w向下 肌側拉緊’據此’工件切斷部j A、之間的線w之張力上 昇0 10 201127551 在此實施例中，控制器50以工件切斷部1A (或ib) 之導引滾輪10a、10b中其中一側之導引滾輪1〇a作為主衷 輪來控制其旋轉速度，關於另—側之導引滾輪i 〇b，對註 滚輪10b進行扭矩控制（torque control)，以避免線群 發生鬆弛。 另一方面，在步驟S7判斷為“否”的情況下，亦即， 張力檢測值高於容許值（容許範圍内之最高值）時，控制 器50向馬達控制電路輸出控制訊號，使工件切斷部丄a、 1 β中位於線行走方向下流側之（第2工件切斷部）導弓丨、穿 輪l〇a、1 Ob之旋轉速度減慢預先被設定之速度（步驟 S11 )。如上’若減慢工件切斷部1 a、1B中位於線行走方 向下流側之工件切斷部之導引滾輪l〇a、丨〇b之旋轉速度， 相應地線W鬆弛，工件切斷部1 a、1B之間的線w之張力下 降。 如上所述’在該線鋸中，張力檢測器18檢測工件切斷 部U、1B之間的線W之張力，在該檢測值不在容許範圍内 的情況下，控制線W之張力，以使其檢測值處於該範圍内。 而且，作為其具體手段’在該線鋸中，藉由工件切斷部i A、 1β之導引滾輪10a、10b之旋轉速度之變更來調整（變更） 線W之張力，因此，相比於以往之線鋸，亦即邊用張力产 測器檢測線之張力邊驅動專用之張力調整機構（調整滑輪W) 來調整線之張力的方式之線鋸’能夠更迅速地調整線界之 張力。亦即，在該實施例之線鋸中，藉由變更已被旋轉驅 動的導引滚輪10a、10b之旋轉速度，來控制線w之張力 11 201127551 與如已往之通；^不運行之張力調整機冑（調整滑輪）於張 力調整時才開始被驅動之線鑛相&，從張力檢測器檢測出 張力變動至線張力實際被變更為止的時滞⑴託小， 相應地線w之張力之修正更迅速化。 攸而，根據該實施例所有關之線鋸，能夠更適切地將 工件切斷部1A、1B之間的線張力保持於容許範圍内，其結 果，能夠更確實地防止線W斷線等故障。 另外，上述線鋸為本發明所有關之線鋸之理想實施例 之一例，其具體構成可在不脫離本發明要旨之範圍内進行 適宜變更。 例如，在上述實施例中，為工件切斷部丨Α、1β之間的 線W之張力調整，變更了工件切斷部u、1β中線行走方向 下流側之（本發明所有關之“第2工件切斷部，，）導引滾 輪（第2導引滾輪）10a、10b之旋轉速度，但是變更線行 走方向上流側之工件切斷部1A (或1B)之導引滾輪1〇a、 1 〇b之旋轉速度也能夠獲得同樣的作用效果。 又’如上所述，僅變更工件切斷部ΙΑ、1B中其中一個 之導引滾輪10a、l〇b之旋轉速度之外，也可變更工件切斷 部ΙΑ、1B雙方之導引滾輪10a、l〇b之旋轉速度》例如， 在相對於上述容許值的張力檢測值之偏差較大的情況下， 藉由變更工件切斷部ΙΑ、1B雙方之導引滾輪i〇a、1〇b之 旋轉速度，能夠更迅速地調整線張力。從而，當相對於上 述谷s午值的張力檢測值之偏差比指定值小的情況下，變更 工件切斷部ΙΑ、1B之其中一方之導引滾輪l〇a、l〇b之旋 12 201127551 轉速度，當上述偏差在指定值以上的情況下，變更工件切 斷°卩ΙΑ、雙方之導引滾輪10a、10b之旋轉速度，這種 控制很有效。 上述控制器50在張力檢測器18之張力檢測值偏離於 預先破設定之容許值的情況下，運算導引滾輪丨〇a、1 〇b之 方疋轉速度之補正值，使得該張力檢測值與容許值之偏差為 〇 ，並基於該補正值變更導引滾輪i〇a、1〇b之旋轉速 度也可以。亦即，上述導引滾輪l〇a、10b之旋轉速度被反 饋控制為張力檢測H 18 t張力檢測值處於預先被設定之 容許值的範圍内也可以。此控制使得在上述容許值的範圍 内驅動線W更可靠地進行。 本發月係為包括至少具備第i工件切斷部及第2工件 切斷部的線鑛之概念，例如也包含具備3個以上的工件切 :部之線鋸。例如’也可以在線送出裝置與第1工件切斷 部之間介入第3工件切斷部’也可以於第2工件切斷部與 線捲取裝置之間介入第3工件切斷部。 、 本發明所有關之線銘，在上述的構成之上，還進一步 具備張力變動緩和機構為宜。亦gp，如上所述，若為了調 整線張力’而變更工件切斷部ΙΑ、1B中至少其中—個之導 引滾輪心、1〇b之旋轉速度，則之後工件切斷部1A、1B 之間的線長發生變動，—時地發线w之鬆弛或過緊張， 根據情況，有可能成為線，發生纏結或斷線之原因，但是， :種線W之鬆弛或過緊張之發生，藉由具備緩和線張力之 k動之張力變動緩和機構可避免。 13 201127551 第3圖係模式地表示包含上述張力變動緩和機構之線 鑛之一例。在此所例示之張力變動緩和機構設於工件 部U與張力檢測器18之間’且包含滑輪53及伸張彈簧 54。滑輪53被配置成可沿與兩工件切斷部ια、ΐβ之排列 方向垂直的方向移位’在該滑輪53上掛上^。伸張彈菁 54連接該滑輪53與被固定夕辟梦 U疋之壁專，用該伸張彈簧54自身 之彈性力將上述滑㉟53向水平方向（更詳細而言該滑輪 53向線#賦予張力之方向）推壓。上述線W從靠近上述工 件切斷部1A 一側依次被掛於導引滑㉟27、上述張力變動 :和機構之滑輪53、導引滑輪52、28、張力檢測器以之 滑輪18a、及導引滑輪29。 iΛ鋸中右工件切斷部】a、j b《間的線長度變 長，則基於伸張彈箸54之彈發力，滑輪53被伸張。亦即， 滑輪53向圖式中（-）側彈性移位。據此，可防止起因於 上述線長增大之線W #彡邮 、 氣、弛。反之，若工件切斷部1 a、1B之 :的線長變短’則抗拒伸張彈簧54之彈發力，滑輪53向 [式中（+ )側移位。據此，可防止起因於上述線長減少 :線w過緊張。亦即，伴隨在工件切斷部ΐΑ、ΐβ之間的線 之變動之上述滑輪53之彈性移位，有效地緩和起因於該 線長之變動的線張力之變動。 ’隻動緩和機構之“推壓部”並不限定於第3圖所 不之伸張彈黃54。例如，該推壓部如第4圖“）、（b) 所不，也可g拓· * # 經由平行於上述各導引滑輪及導引滚輪 疋轉中心轴之支輪58而可旋轉地被支樓於固定壁等的 14 201127551 臂（arm) 56 ;及被安裝於上述支軸58，使得向該臂56賦 予其旋轉方向之推壓力的扭轉彈簣（torsion spring)， 上述滑輪53可旋轉地被支撐於上述臂56之旋轉端部。在 該機構中，藉由將上述扭轉彈簧59推壓於臂56及滑輪53 之方向設定為該滑輪53向線w賦予張力之方向（在第4圖 (a)中為（一）側方向），從而可獲得與第3圖所示之例 同樣的作用效果。 如上所述，本發明係提供具備第丨工件切斷部及第2 件切斷部，且能夠以較高的響應性適當地調整兩工件切 斷部彼此之間的切斷用線之張力的線鋸。該線鋸包括:線送 出裝置，，送出切斷用線；第1工件切斷部，具備複數個第 1導引滾輪及旋轉驅動這些導引滾輪之第i驅動部，且藉 由從線送出裝置送出之切斷用線捲繞於上述各第i導引^ 輪而形成工件切斷用之線群.货 群，第2工件切斷部，具備複數 第2導引滾輪及旋轉驅動 细 動坆些第2導引滾輪之第2驅動 4 ’且藉由從第1工件切磨 斷。P ¥出的上述切斷用線捲繞於 述各第2導引滾輪而形成t彳生+赵 成工件切斷用之線群；線捲取 置’捲取從上述第2工件切齡加、昔， 训。。 斷σΡ導出之切斷用線；張力檢 測盗，檢測在第1工件切斷 χ 辦邛與第2工件切斷部之間的上 迷切斷用線之張力；控制裝置卩門的上 動部月I·、十諠〇扩杏 刀別調即稭由上述第1驅 Ρ及上述第2驅動部旋轉 述第…m , 的上述第1導引滾輪及上 疋第2導引滾輪之旋轉驅 1導引滾輪及上㈣2導：。此控制裂置變更上述第 迷度，以使上述張力檢測号二中的至少其中-方之旋轉 以檢測出的張力在指定範圍内。 15 201127551 在該線鑛中，藉由張力檢測器檢測從第1工件切_ 至第2工件切斷部為止的切斷用線之張力，變更第^導 滾輪及第2導引滾輪中至少其中之-的旋轉速度，以使被 檢測出的張力處於指定之範圍内。亦即，藉由帛i導弓卜衰 輪之旋轉速度與第2導引滾輪之旋轉速度之差的調節，： 速地變更切斷用線之張力。從而，與如以往的線張力之檢 測後張力冑整機構才起動之構成相tb，可縮短時滞。丸 作為上述控制裝置，較佳為，基於張力檢測器檢剛出 的張力檢測值與預先被設定的容許值之偏差對上述導亏丨 滾輪之旋轉速度進行反饋控制之結構。 此時，該控制裝置例如亦可當上述偏差低於一定值 時’只變更第1導引滾輪及第2導引滾輪中其中之一旋轉 速度’當上述偏差在一定值以上時，變更g i導引滾輪及 第2導引滾輪雙方之旋轉速度。 又，本發明所有關之線鋸更佳為進一步具備張力變動 緩和機構，其緩和起因於從第〗工件切斷部至第2工件切 斷部為止的切斷用線之線長變動的線張力變動。如上所述 之導引滾輪之旋轉速度變更’雖然可能會伴隨從第丨工件 切斷部至第2工件切斷部為止的切斷用線之線長之變動發 生線鬆弛或過緊張，但是藉由具備緩和張力變動之張力變 動緩和機構，可避免起因於該張力之急變的切斷用線之鬆 弛或過緊張，使起因於該鬆弛或過緊張之切斷用線之纏結 或斷線防患於未然。 作為如上所述的張力變動緩和機構，較佳為，包括 16 201127551 於上述第〗工件 件切斷部與第2工 斷用線之滑輪；及將…， 斷部之間掛上上述切 力之方向彈性推m ⑺輪向切斷用線賦予張 汗『生推壓的推壓部，藉 斷部至上述第2牛 攸上述第1工件切 上述滑輪之彈性移I:::止的切斷用線之線長變動的 秒位，綾和線張力之變動。 【圖式簡單說明】 第1圖係表示本發明每 構之概略s。. 之A例所有關的線鋸之整體結 第2圖係表示包含於上述線鑛之第】工件切斷部與第 2工件切斷部之間的切 斷線力控制之—例之流程圖。 弟d圖係表示被導人 等入於上述線鋸的張力變動緩和 之一例之模式圖。 饿稱 第4圖（a)係表示盥坌 _ 一第3圖所不之張力變動緩和機構 不同的張力變動緩和機槿 释構之一例之正視圖，（b )係表示苴 剖面側視圖。 【主要元件符號說明】 W 線 1A、1B 工件切斷部； 10a、10b導引滾輪； 11A、11B 馬達； 12A、12B線送出/捲取裝置； 13A ' 13B 線軸； 201127551 14A、14B 線軸驅動馬達； 15A、15B 張力調節裝置； 16 滑輪； 1 7至19 張力檢測器； 17a至19b 滑輪； 21、22、24 至 31、33、34 導引滑輪 40 工件搬送裝置； 41 垂直台； 42A、42B 工件保持部； 43 工件搬送馬達； 44 工件； 50 控制器； 52 導引滑輪； 53 滑輪； 54 伸張彈簧； 56 臂； 58 支軸； 59 扭轉彈簧。 18In this case, the "second workpiece cutting blade" which is closed by the workpiece cutting unit 1B functions as a function of the η, and the second driving device/winding device 12 is used as the present invention. According to the "delivery device", the function of the above-mentioned line is the "wire winding device" of the present invention, and the function of the function is:::: 201127551 The cutting portion 1B is the "related" of the present invention. The u-cutting machine functions as a "cutting portion of the upper four workpiece cutting portion u as the present invention." (Second workpiece, the present invention is not limited to the switching of such a line comment, and it is also possible to丨, ww ^ The direction of the line is limited to being driven in one direction. In this case, "When the singer goes to the upper part of the workpiece cutting part to the first workpiece cutting part", Ding, go to Ru丨 々 々 于 于 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在;° has a substantially rectangular parallelepiped shape extending in the up and down direction: 4 b up and down - to the workpiece holding portions 42A, 42B, And the workpiece conveyance motor 43. The workpiece holding portion 4 2 A, 4 2 B > VL i* nr + one of the above-mentioned vertical "one side faces: other:: arranged in a row - column" The position "on the upper portion of the workpiece cutting portion 2" is held by the slicing base (not shown). The direction of the held workpiece W is set such that the crystal orientation of the object can be obtained based on the crystal axis ' The upper workpiece holding portion 42A (the first workpiece holding portion 42A) holds the workpiece 44 above the upper line group among the line groups formed between the guide rollers (10) of the first workpiece cutting portion 1A, The lower workpiece holding portion (four) is interposed between the first knife and the upper portion of the line group formed between the guide roller 1 Oa 1 Ob formed on the second workpiece cutting portion 1β, and the workpiece μ is held on the upper side. 201127551 The workpiece conveyance motor 43 and the ball screw (baU screw: interlocking with each other) causes the vertical table 4 to be held by the workpiece holding portions 42A and 42B, respectively. The workpiece 44 of 42B is lifted and lowered in one piece. In the line ore, the guide roller 1 1 Ob between the workpiece cutting portions 1A and 1B is a cut region, and the line formed in the cut region is grouped and rotated in the longitudinal direction at the same time. At the same time, the workpiece conveyance device 40 cuts and transports the wire holding group 42a and the workpiece of the peach to the cutting region, and the outer side of the wire group wound around the guide roller 1 〇b The conveyance is cut in the same direction toward the inside (in the drawing from the upper side to the lower side), whereby a plurality of wafers (sheets) are simultaneously cut out by the respective workpieces 44. The wire saw further has a control benefit 50 that integrally controls the cutting operation of the workpiece 44. The controller 50 drives the wire w to drive the motor 14A, "8 to the respective lines, and drives the motor 14A, "8 to drive the wire w to the south speed in the designated direction and detects based on the tension detectors π, 19 The tension of the tension line adjusting device 15 Α, 15β of the outgoing line W controls the tension of the line W. Further, the controller 50 includes the function of the control device according to the present invention, and the tension detector 18 (corresponding to the tension detector of the present invention) provided between the two workpiece cutting units i Α and 1β. The detected value adjusts the rotational driving speed of the guide rollers 1A, i〇b of the workpiece cutting portions 1A, 1B so that the line W guided from one of the workpiece cutting portions 1A, 1B to the other is guided. The tension is controlled within an appropriate range. The tension control of the line w between the workpiece cutting units 1A and 1B is described in the flowchart of Fig. 2. When the line is started, the controller 50 first The motor control circuit outside the figure outputs a control signal for driving the bobbins 13A, 13B of the respective wire feeding/winding devices 1 2A, i 2B, and drives the workpiece cutting portions ΙΑ, 1B at a predetermined number of rotations (rotation speed). Guide rollers i〇a, i〇b (step S3). Then, when the rotational speed of the guide rollers 1 〇a, 1 Ob reaches a target value, the controller 50 is based on the output signal from the tension detector 18. Judging the tension of the line w between the workpiece cutting portions 1A, 1B (When the tension detection value) is a value (admissible value) within the allowable range set in advance (step s5), if the determination is YES, the process proceeds to step S3. In contrast, when it is determined in step S5 If "No,", it is further determined whether the tension detection value is lower than the allowable value (the lowest value within the allowable range) (step s7). When the determination is "Yes," the controller 5 approaches the above. The motor control belt i circuit outputs a control signal, and the rotation speed of the guide rollers 1〇&, l〇b of the workpiece cutting portion 1A (or 1B) located on the downstream side of the line direction is increased by a preset speed. (Step S9) Specifically, when the line w is in the above-described swaying state (refer to the solid arrow in the figure), the rotation speed of the guide roller core and (10) of the second workpiece cutting portion 1B is determined. When the field is in the second traveling state (see the dotted arrow in the figure i), the rotation speed of the guide rollers IGa and 1Gb of the first guard cutting unit 1A is increased. Thus, the workpiece cutting unit 1Α, 1β is accelerated. The workpiece on the downstream side = broken. The guide roller of the 卩 1〇, 1〇b The rotational speed, correspondingly the line w is pulled down to the muscle side, and accordingly, the tension of the line w between the workpiece cutting portion j A is increased by 0 10 201127551. In this embodiment, the controller 50 is the workpiece cutting portion 1A. (or ib) one of the guide rollers 10a, 10b is guided by one of the guide rollers 1a as the main wheel to control the rotational speed thereof, and the other side of the guide roller i 〇b is used to torque the roller 10b Control (torque control) to avoid slack in the line group. On the other hand, if the determination in step S7 is "NO", that is, when the tension detection value is higher than the allowable value (the highest value within the allowable range), control The controller 50 outputs a control signal to the motor control circuit so that the workpiece cutting portion 丄a, 1 β is located on the downstream side of the line traveling direction (second workpiece cutting portion), and the rotation of the pulleys l〇a, 1 Ob The speed is slowed down by the speed set in advance (step S11). As described above, if the rotation speeds of the guide rollers l〇a and 丨〇b of the workpiece cutting portion on the downstream side in the line running direction of the workpiece cutting portions 1a and 1B are slowed down, the corresponding line W is loosened, and the workpiece cutting portion is loosened. The tension of the line w between 1 a and 1 B decreases. As described above, in the wire saw, the tension detector 18 detects the tension of the wire W between the workpiece cutting portions U and 1B, and controls the tension of the wire W so that the detected value is not within the allowable range. The detected value is within this range. Further, as a specific means, in the wire saw, the tension of the wire W is adjusted (changed) by the change of the rotational speed of the guide rollers 10a and 10b of the workpiece cutting portions i A and 1β, and therefore, compared with In the conventional wire saw, that is, the wire saw which uses a tension adjusting mechanism (adjusting the pulley W) to adjust the tension of the wire by the tension detecting device to detect the tension of the wire can adjust the tension of the wire boundary more quickly. That is, in the wire saw of this embodiment, the tension of the wire w is controlled by changing the rotational speed of the guide rollers 10a, 10b that have been rotationally driven, and the tension is adjusted as in the past; The casing (adjustment pulley) starts to be driven by the tension phase when the tension is adjusted, and the time delay of the tension change until the thread tension is actually changed from the tension detector (1) is small, and the tension of the corresponding ground line w is The correction is faster. According to the wire saw of the embodiment, the wire tension between the workpiece cutting portions 1A and 1B can be more appropriately maintained within the allowable range, and as a result, the wire W can be more reliably prevented from being broken. . Further, the wire saw is an ideal example of a wire saw according to the present invention, and the specific configuration thereof can be appropriately changed without departing from the gist of the invention. For example, in the above-described embodiment, the tension adjustment of the line W between the workpiece cutting portions 丨Α and 1β changes the downstream side of the line cutting direction of the workpiece cutting portions u and 1β (the present invention relates to the (2) the workpiece cutting portion, and the rotation speed of the guide rollers (the second guide rollers) 10a and 10b, but the guide roller 1A of the workpiece cutting portion 1A (or 1B) on the upstream side in the line running direction is changed. The same effect can be obtained by the rotation speed of 1 〇b. Further, as described above, only the rotation speeds of the guide rollers 10a and 10b of one of the workpiece cutting portions ΙΑ and 1B can be changed. When the deviation between the tension detecting values of the guide rollers 10a and 10b of the workpiece cutting portions ΙΑ and 1B is large, for example, when the deviation from the tension detection value with respect to the allowable value is large, the workpiece cutting unit 变更 is changed. The rotation speeds of the guide rollers i〇a and 1〇b of both sides of 1B can adjust the thread tension more quickly. Therefore, when the deviation of the tension detection value with respect to the valley s value is smaller than the specified value, the change is made. Guide roller l of one of the workpiece cutting portions ΙΑ, 1B When the above-mentioned deviation is equal to or greater than the specified value, the rotation speed of the workpiece cutting unit 卩ΙΑ and the guide rollers 10a and 10b of both sides is changed. This control is effective. The controller 50 calculates the correction value of the rotation speed of the guide rollers 丨〇a, 1 〇b when the tension detection value of the tension detector 18 deviates from the allowable value of the pre-break setting, so that the tension detection value is The deviation of the allowable values is 〇, and the rotation speed of the guide rollers i〇a, 1〇b may be changed based on the correction value. That is, the rotation speeds of the guide rollers l〇a, 10b are feedback-controlled to the tension detection. The H 18 t tension detection value may be within a range in which the allowable value is set in advance. This control makes it possible to drive the drive line W more reliably within the range of the allowable value. The present month includes at least the ith workpiece cut. The concept of the line ore of the second workpiece cutting unit includes, for example, a wire saw having three or more workpiece cut portions. For example, the third workpiece may be interposed between the line feed device and the first workpiece cut portion. Cutting section 'also In addition, the third workpiece cutting unit is interposed between the second workpiece cutting unit and the wire winding device. Further, in addition to the above configuration, it is preferable to further include a tension fluctuation absorbing mechanism. Gp, as described above, if the rotation speed of at least one of the guide roller cores and 1〇b in the workpiece cutting portion ΙΑ, 1B is changed in order to adjust the thread tension ', then between the workpiece cutting portions 1A and 1B The length of the line changes, and the time line is slack or too tight. Depending on the situation, it may become a line, causing tangles or disconnection. However, the occurrence or relaxation of the seed line W is borrowed. It is avoided by the tension fluctuation mitigation mechanism having the k-motion of the tension line tension. 13 201127551 Fig. 3 is a view schematically showing an example of a line ore including the above-described tension fluctuation mitigation mechanism. The tension fluctuation relieving mechanism exemplified herein is provided between the workpiece portion U and the tension detector 18, and includes a pulley 53 and a tension spring 54. The pulley 53 is disposed so as to be displaceable in a direction perpendicular to the direction in which the two workpiece cutting portions ια, ΐβ are arranged, and hung on the pulley 53. The stretcher 54 is connected to the pulley 53 and is fixed to the wall, and the above-mentioned slide 3553 is horizontally oriented by the elastic force of the extension spring 54 itself (more specifically, the pulley 53 is biased to the line #) Direction) push. The wire W is hung from the guide slip 327 in the order from the side closer to the workpiece cutting portion 1A, the tension variation: and the mechanism pulley 53, the guide pulley 52, 28, the tension detector pulley 18a, and the guide Pulley 29. In the i-saw, the right workpiece cutting portion] a, j b "the length of the line between the two becomes longer, and the pulley 53 is stretched based on the elastic force of the stretching magazine 54. That is, the pulley 53 is elastically displaced toward the (-) side in the drawing. According to this, it is possible to prevent the line W#彡, gas, and relaxation which are caused by the increase in the line length described above. On the other hand, when the line length of the workpiece cutting portions 1a and 1B is shortened, the spring force of the extension spring 54 is resisted, and the pulley 53 is displaced toward the (+) side. According to this, it is possible to prevent the above-mentioned line length from being reduced: the line w is too tight. In other words, the elastic displacement of the pulley 53 accompanying the fluctuation of the line between the workpiece cutting portion ΐΑ and the ΐβ effectively alleviates the fluctuation of the thread tension caused by the variation of the line length. The "pushing part" of the mitigation mechanism is not limited to the stretcher yellow 54 which is not shown in Fig. 3. For example, the pressing portion may be rotatably supported by the support wheels 58 parallel to the respective guide pulleys and the guide rollers to rotate the central axis, as shown in Figs. 4) and (b). a 14 201127551 arm 56 having a fixed wall or the like; and a torsion spring attached to the support shaft 58 to give the arm 56 a pressing force in a rotational direction thereof, the pulley 53 being rotatable The ground is supported by the rotating end of the arm 56. In this mechanism, the direction in which the torsion spring 59 is pressed against the arm 56 and the pulley 53 is set to the direction in which the pulley 53 applies tension to the wire w (at the 4th) (a) in the (a) side direction), the same operational effects as those in the example shown in Fig. 3 can be obtained. As described above, the present invention provides the second workpiece cutting portion and the second member cutting. And a wire saw capable of appropriately adjusting the tension of the cutting wire between the two workpiece cutting portions with high responsiveness. The wire saw includes a wire feeding device and a cutting wire for sending; The workpiece cutting unit includes a plurality of first guide rollers and an ith drive that rotationally drives the guide rollers The moving portion is wound around the respective ith guide wheels by the cutting wire sent from the wire feeding device to form a wire group for the workpiece cutting, and the second workpiece cutting portion has a plurality of (2) The guide roller and the rotation drive drive the second drive 4' of the second guide rollers to be finely ground and cut by the first workpiece. The above-mentioned cutting wire for P ¥ is wound around each of the second guides. Leading the roller to form a line group for cutting the workpieces of the t彳sheng+Zhaocheng workpiece; the winding of the wire is taken from the second workpiece to the age of the second workpiece, and the cutting line is taken. The thief detects the tension of the upper cutting line between the first workpiece cutting 第 and the second workpiece cutting unit; the upper part of the control device 卩门月 I·, 十喧〇扩杏刀The first guide roller and the second guide roller of the first guide roller and the second guide roller rotate the guide roller and the upper (four) 2 guide by the first drive and the second drive unit. The control splitting changes the above-mentioned first degree of distraction so that at least one of the above-mentioned tension detecting numbers 2 is rotated to detect the tension within the specified range. 15 201127551 In the line mine, the tension of the cutting line from the first workpiece cutting to the second workpiece cutting unit is detected by the tension detector, and at least one of the second guide roller and the second guide roller is changed. The rotation speed is such that the detected tension is within a specified range, that is, by adjusting the difference between the rotation speed of the 帛i guide bow and the rotation speed of the second guide roller: The tension of the wire is broken, so that the time lag can be shortened by the configuration tb of the tension aging mechanism after the detection of the wire tension in the past. The pellet is preferably used as the control device based on the tension detector. The deviation between the tension detection value and the allowable value set in advance is used to feedback-control the rotation speed of the guide roller. In this case, the control device may change, for example, only one of the first guide roller and the second guide roller when the deviation is less than a predetermined value. When the deviation is equal to or greater than a certain value, the gi guide is changed. The rotation speed of both the guide roller and the second guide roller. Furthermore, it is preferable that the wire saw according to the present invention further includes a tension fluctuation mitigating mechanism for mitigating a thread tension which varies due to a line length of the cutting wire from the first workpiece cutting portion to the second workpiece cutting portion. change. The change of the rotational speed of the guide roller as described above may cause a slack or excessive tension in the line length of the cutting line from the second workpiece cutting portion to the second workpiece cutting portion. By the tension fluctuation mitigation mechanism having the gentle tension fluctuation, it is possible to prevent the slack or overstress of the cutting wire caused by the sudden change of the tension, and to prevent the entanglement or disconnection of the cutting wire due to the slack or overstress. Suffering from it. The tension fluctuation mitigation mechanism as described above preferably includes a pulley of the above-mentioned workpiece workpiece cutting portion and the second work-breaking line; and the above-mentioned cutting force is hung between the broken portions. Directional elastic push m (7) The wheel is biased to the cutting line by the pressing force, and the elastic portion of the pulley is cut by the first workpiece. The second position of the line length change, the change in the twist and the thread tension. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the outline of each structure of the present invention. The entire figure of the wire saw according to the example A is a flow chart showing the control of the cutting line force between the workpiece cutting portion and the second workpiece cutting portion included in the line ore. . The figure d shows a schematic diagram of an example in which the tension of the wire saw is moderated by the guide. Hungry Weighing Figure 4 (a) shows a 张力 _ a tension fluctuation mitigation mechanism not shown in Fig. 3. A different view of the tension easing easing mechanism, and (b) shows a 剖面 cross-sectional side view. [Main component symbol description] W wire 1A, 1B workpiece cutting section; 10a, 10b guide roller; 11A, 11B motor; 12A, 12B wire feeding/winding device; 13A '13B spool; 201127551 14A, 14B spool drive motor 15A, 15B tension adjusting device; 16 pulley; 1 7 to 19 tension detector; 17a to 19b pulley; 21, 22, 24 to 31, 33, 34 guide pulley 40 workpiece conveying device; 41 vertical table; 42A, 42B Workpiece holding portion; 43 workpiece transfer motor; 44 workpiece; 50 controller; 52 guide pulley; 53 pulley; 54 extension spring; 56 arm; 58 fulcrum; 59 torsion spring. 18