TW201043983A - Test device of plate-shaped inspected object - Google Patents

Abstract

There is provided a cheap test device capable of performing accurate positioning for an inspected object. An alignment device used by the test device includes a first propeller mechanism and a first positioning mechanism respectively arranged at one edge of an opposed edge opposite to a panel carrying panel and at the other edge spaced apart with an interval along an extended direction of the corresponding edge; and a second propeller mechanism and a second positioning mechanism respectively arranged at one and the other edges of another opposed edge opposite to the panel carrying face. The propeller mechanism and the positioning mechanism each has a pressing member having the same height position as the panel carrying face and disposed at the external side of the panel carrying face, and a driving mechanism for moving the pressing member forward and backward with respect to the panel carrying face. The driving mechanism of each positioning mechanism keeps the position of the pressing member at X direction or Y direction to be releasable.

Description

[Technical Field] The present invention relates to a test apparatus for a flat-shaped object to be inspected like a liquid crystal display panel. [Prior Art] A device for performing a lighting test of a panel for a liquid crystal display panel, comprising a probe unit for energizing a subject, in particular, a positioning function for positioning a tip of the contact tweezers (ie, Alignment function). Such a device, in general, has a panel carrying portion such as an inspection stage or a workpiece stage, a stage moving mechanism that is displaced in the XYZ direction of 3 and a zero axis extending in the z direction, and is disposed on the panel carrier. When the probe unit β 2 above the portion is positioned, the probe unit is displaced relative to the panel bearing portion by the stage moving mechanism when the object to be inspected is removably adsorbed to the panel carrying portion, so that the object to be inspected The electrode is in contact with the tip of the contact. (4) In the test apparatus, not only the panel carrying portion but also the device for supporting the panel carrying portion, the backlight unit, and the like are displaced by the stage moving mechanism. Therefore, the stage moving mechanism is enlarged, and the price of the test device becomes expensive. In particular, in recent years, in the device for testing large-scale objects, the weight of the object displaced by the carrier has more than one ton, which is to avoid the movement of the stage. - The size of the test is increased, and the price of the test device is further increased. ^ : Solving the above problem, proposes that by placing the opposite side of the object to be inspected 3 201043983, the plate bearing portion will be loaded with the tip of the contactor. The recorded electrode is connected to the alignment device, and the panel bearing surface is disposed at a distance from the corresponding side of the corresponding side-interval arrangement. The pair of the second surface is disposed opposite to the panel bearing surface. The pusher, each of the pusher and the other member, and the moving mechanism of the end face of the W object to be inspected relative to the object to be inspected and moved back to the x. The mechanism causes the pressing members of the pushers to be pressed against the bearing portion, thereby advancing, so that the object to be inspected is aligned with respect to the panel to contact the tip of the electrode of the electrode of the object to be inspected. When the mechanism for advancing and retracting the pressing member by air or oil-like fluid is used as the moving mechanism of each of the pushers, the object to be inspected is pushed toward the center by the pushers, and is positioned relative to the panel carrying portion. In the aligning device f, even if the pressure applied to the two thrusters disposed on the opposite sides of the panel bearing portion or the thrusters spaced apart from each other in the extending direction of the corresponding side is only slightly different, the pushing of the pusher Pressure As a result, the object to be inspected cannot be correctly displaced, and the correct positioning cannot be performed. Patent Document 1: Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. 08-188727. The test device of the flat specimen according to the present invention includes a panel bearing portion having a rectangular panel bearing surface for receiving a flat object, and a plurality of contacts having electrodes pressed against the object to be inspected a probe unit and an alignment device for positioning the object to be inspected by the panel carrier relative to the contact.

The aligning device includes a second thruster mechanism and a second locating mechanism respectively disposed on one side and the other of the opposite sides of the facing surface of the panel, and the opposite direction respectively disposed on the bearing surface of the panel A second thruster mechanism and a second positioning mechanism on one side and the other side of the pair. Each of the pusher mechanism and the positioning mechanism includes at least one pressing member located outside the panel bearing surface and at least one driving structure for displacing the pressing member in the X direction or the γ direction, and the pressing is performed. Wide: The drive of the position mechanism is divided. The position of the cutting cattle in the Μ or γ direction is maintained as solvable: the positioning mechanism can include a motor that can control the position of the rotation angle. The (4) member of the mechanism is moved at least ... easy to elastic _ or material that is not elastically deformed or its moving direction, the source mechanism may include a driving source, and the driving source is maintained as a mechanism that can be released. The position of the 0 direction and the positioning The maintenance mechanism of the mechanism is extended by the 201043983 nut extending to the ball screw, the ball screw #, and the screwing member in the χ direction or the γ direction. The driving source of the driving mechanism of each thruster mechanism The cylinder device of the present invention may include a first and second pressure fluid source having different pressures from each other, and the first a pressure device of a second source of pressurized fluid is selectively supplied to a valve device of a drive source of the drive mechanism of the pusher mechanism. The test device of the present invention may further comprise selectively supplying at least two force fluids different in pressure from each other to An electropneumatic regulator of a drive source of the drive mechanism of the propeller mechanism. The propeller mechanism and the positioning mechanism may further comprise a support member for driving, and driving in the direction or the γ direction by the drive mechanism a moving body disposed on the panel carrying portion. The pressing member is supported by the movable body so as to be rotatable about an axis extending in the Z direction. The testing device of the present invention can further include moving the panel carrying portion The Z moving mechanism drawn in the Z direction. The testing device of the present invention may further comprise 'G 3 disposed on the panel bearing portion, by the alignment device; Jin ##地址& left button, + device for β When the body is displaced, the floating device that is lifted from the bearing surface of the panel is inspected. The floating device may include a part of the knife J not protruding from the bearing surface of the panel; a ball disposed on the panel carrying portion - a spring that is biased so that one of the balls is exposed from the panel carrying surface. The panel carrying portion may be included in the face; the open face of the war face 201043983 and The opening portion is selectively connected to at least one of a supply source of the Mobilis fluid and a reduction tank. The test apparatus of the present invention may further include a pedestal in which the first opening having a rectangular shape of the panel bearing portion is disposed. Further, the panel carrying portion may be provided with four second openings that are formed in a rectangular shape similar to the opening of the first opening, and which are arranged to form a size of the opening of the panel bearing surface.片 Ο - 对 对 : Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο Ο The pedestal may be formed by opening and forming the surface together and changing the size of the second opening π. Furthermore, the adjacent shift

The ancient a々 is generally combined with a method that does not hinder the independent movement in the X direction in the Y direction. The test apparatus of the present invention can have a wide pedestal with a rectangular i-th opening: the panel carrier is disposed between the load-bearing portions to enable the moving piece to be in the frame. The combination of the seat and the face is coupled to the pedestal. And ¥ direction movement The test device of the present invention can be configured to allow the respective moving pieces to pass through the knot moving mechanism in the X direction or the ¥ side. . Moving piece disposed on the pedestal ^The moving piece moving mechanism may include a motor at an angular position. The control device of the present invention can be used in the test device of the present invention. The probe units can be moved closer to each other/including moving the upper and lower movement mechanisms of the panel receiving portion and the separating direction. 7 201043983 The test apparatus of the present invention may further comprise a camera skirt supported by the probe unit in such a manner as to photograph the marking portion of the object from above. The test apparatus of the present invention may further comprise a support for the panel carrying portion, the probe unit being supported by the mount or the panel carrying portion. The test mount of the present invention may further comprise supporting the probe unit on the panel. Unit support mechanism. The unit supporting mechanism may be provided to be supported by the panel carrying portion so as to be movable in the X direction or the γ ancient gate Y direction.

a t-th moving body extending in the γ direction or the 乂 direction, coupled to the first moving body and the second moving extending in the υ direction or the Χ direction so as to be obliquely movable in the X direction, the Y direction, and the 2 direction The body defines a brake member that advances the end position of the second movable body, and moves the first movable body in the X direction or the υ direction, thereby moving the second movable body in the χ direction or the ¥ direction and The probe moving mechanism of the displacement. Further, the probe unit may be supported by the second movable body. The 7L support mechanism may further include extending in the γ direction or the X direction, and supporting the panel bearing portion so that the panel bearing portion can move in the γ direction or the 乂 direction, and supporting the 帛1 moving body The moving body carrier of the panel carrying portion and the unit position adjusting device for moving the moving body carrier in the longitudinal direction thereof to maintain the position of the panel carrying portion in the x direction or the X direction. The k-pin may further include a support base extending along a side of the rectangle and supported by the unit support mechanism, and supporting at a distance from the longitudinal direction of the support base to be movable in the z direction The support base 201043983 supports the probe block β of the plurality of contacts. The support base may be supported by the unit support mechanism so as to be angularly rotatable about an axis extending in the x-direction. Further, the probe unit further includes an angle at which the support base is angularly rotated with respect to the panel carrying portion, and the positional relationship between the panel carrying portion and the probe unit about the axis extending in the meandering direction is maintained at a retractable angle Adjustment agencies are also available. The probe moving mechanism may include selectively displacing the probe block in an unfolding position retracted from the panel bearing surface, positioning an alignment position of the object to be inspected, and contacting the contact electrode with the electrode of the object to be inspected A motor that contacts the position and maintains a releasable controllable position. The probe unit is respectively disposed at a portion corresponding to two adjacent sides of the rectangle, and the alignment device can be included in the opposite side of the opposite side of the panel bearing surface and read on the other side. A plurality of the first thruster mechanisms and a plurality of the second jaw positioning mechanisms arranged at a distance from each other in the direction in which the edges extend. The aligning device may include one side of the opposite side of the facing surface of the panel bearing surface and the other side respectively facing the extending direction of the corresponding side, and the first thruster mechanism is disposed at intervals And a pair of the third positioning mechanism. The alignment device may be included in one of the opposite sides of the facing side of the panel bearing surface, and the other side is spaced apart from the corresponding side by a positioning mechanism. The first ejector mechanism may be provided with a plurality of the pressing members for the yoke mechanism. The first thruster may be provided with the spacer member in the x direction or the driving direction of the driving device. Drive source for displacement, 9 201043983 The γ direction or the X direction is supported by the drive member and the plurality of pressing members are supported by the support member capable of winding around the source in the z direction. In the field positioning, each pressing member of each of the propeller mechanism and each positioning mechanism is pressed against the end face of the inspected body 6+X, _- or the end face of the γ direction, so that the object to be inspected is opposite to the panel bearing site. , the base + A, a is moved to thereby position the electrode so that the electrode of the object to be inspected contacts the tip of the contact. When the positioning is performed, the driving mechanism of each positioning mechanism maintains the position of the pressing member in the X direction or the γ direction so as to be disengageable, so that the members of the positioning mechanism (4) are not displaced in the X direction or the Y direction. Therefore, the member (4) of the positioning mechanism can be used as a member for determining the reference position of the object to be inspected in the X direction and the γ direction. As a result of the above, according to the present invention, the object to be inspected and the probe unit can be accurately positioned by pressing the pressing member of the positioning mechanism against the end faces of the object to be examined and the direction of the object by the pusher mechanism. Further, each of the pusher mechanisms and each of the positioning mechanisms may be configured to displace the light weight and the object to be inspected, so that the weight is light, and large-scale alignment of the object such as the panel bearing or the backlight unit is not required to be displaced. The device is therefore inexpensive. In addition, it is not only the pressing portion on the side of the pusher mechanism, but also the pressing member on the side of the positioning mechanism that determines the position of the tool can be moved to the object to be inspected. The driving mechanism of each positioning mechanism maintains the pressing member in the χ direction to the 4 Υ ° position to release the motor. If the motor includes a pulse motor, the pressing member of the positioning mechanism is in the χ direction. The position in the 戋y direction is not displaced as long as the motor does not rotate. The pressing member of each positioning mechanism can be made of a material that is not easily elastically deformed or elastically deformed at least in the moving direction thereof, and the position of the object to be inspected in the X direction or the γ direction can be correctly determined by such a scrap member. Positioning. [Embodiment] Ο (Description of Terms) In the present invention, in FIG. 2, Jiang: The vertical direction (the direction perpendicular to the object to be inspected by the panel bearing portion) is referred to as the Z direction or the vertical direction, and the left and right directions are used. It is called the X direction or the left and right direction, and the paper # plane direction is referred to as the y direction or the forward and backward direction; and the Jt direction is different depending on the posture of the object to be inspected during the test. Therefore, in the test apparatus of the present invention, the xy plane defined by the X direction and the γ direction may be used in any state such as a state of being a horizontal plane and a state of being inclined with respect to a horizontal plane.

(Example) A Referring to Fig. 1 to Fig. 4, the test apparatus 10 is used to display a liquid crystal panel, and the panel is a flat object 12 (see Figs. 4, 7, and the like). The device 12 is connected to a predetermined circuit for performing electrical inspections such as lighting inspection. The object 12 to be inspected has a rectangular shape of the moment $, and has a plurality of lightning electrodes at each edge portion corresponding to each side of the rectangle. Hereinafter, for the sake of easy understanding, the object to be inspected 12 will be described as having a rectangular shape having a long length of 80,000. In the example of 201043983, in the test object 12, the two edge portions corresponding to the adjacent sides of the rectangle have a plurality of electrodes spaced apart from each other in the longitudinal direction of the corresponding edge portion. (About the test device) The test device 10 includes a platform 14 which is a machine base, and a pedestal 16 which is disposed at a distance from the upper side of the platform, and is disposed on the D side of the pedestal 16 and receives the panel bearing portion 18 of the object 12 to be inspected. a plurality of probe units 20 disposed on the upper side of the panel carrying portion 18, and the unit supporting mechanism 22' for supporting the probe units 2 to the panel carrying portion 18 to photograph the object 12 to be inspected from above by the panel carrying portion a A marking portion (described later), a plurality of camera devices 24 attached to the probe unit 20, and a device for positioning the object 12 to be inspected by the panel carrier portion 18 with respect to the panel carrier portion 18 will be described later. In the example of the figure, the probe unit 2 is disposed at each portion corresponding to two adjacent sides of the rectangle. In the absence of ^^^^«βα q Λ ..., the position of the probe 70 70 is determined by the position of the electrode of the object 12 to be inspected. Further, in the example of the figure, the unit supporting mechanism 22 is disposed at each portion corresponding to the side of the rectangle. The bran is gg _ 1, , , . , , and the soap supporting mechanism 22 is not disposed at a portion where the probe unit 20 is not disposed. Further, in the example of the figure, the two camera devices 24 are disposed at intervals in the longitudinal direction of the side adjacent to the rectangle "the corresponding portion", and the camera devices 24 are disposed in the same manner. The part corresponding to the other side of the adjacent two sides. However, it is also possible to arrange a plurality of camera devices in the longitudinal direction of the probe unit 2A at intervals in the respective probe units 20. The raft 14 is supported by the gantry 25 of the test apparatus 1 (see Fig. 4). However, 12 201043983 and 'platform 14' is one of the pedestal 25's t-r* knives. The platform 14 and the pedestal 16 have the shape of a rectangular plate, and the pedestal 16 is placed at a position above the platform 14 in the Z (up and down) direction. The pedestal 1.6 is supported by the platform 14' by a plurality of supports 9 and mad 26 (see Fig. 4) and has a larger opening 16a than the object 12 to be inspected (see Figs. 1 and 4). A known backlight unit 28 is disposed between the platform 14 and the pedestal 16 (refer to Fig. 4). (About the panel bearing section)

The panel carrying portion 18, as shown in Fig. 5, has four moving pieces 30 which are combined with each other in a shape of a well. The teachings of the sands are as follows. As shown in Fig. 4 to Fig. 10, or Fig. 12 and Fig. 13, the first piece 30a of the rectangle having a small size is small and the width is small. In the 2nd κ π 罘 罘 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 4 (4) Ji 3UXY in the plane in the 丫 direction - the parallel parallel extension n extends in the X direction, the other pair of moving pieces 3 〇 in the XY plane in the X direction is separated by a ::: flat 仃 extending in the γ direction. These moving pieces % are coupled to the pedestal 16 in a two-dimensional (X-direction and Y-direction) movement in a plane (XY plane) parallel to the pedestal 16 by a mechanism 62 which will be described later. The four moving pieces 30 are formed to form a rectangular opening 32 similar to the object to be inspected 12 and the opening 16a, and are formed together with the rectangular face bearing surface w; the top surface of the 2 piece 3b. The openings 16a and 32 oppose each other to allow the light from the unit 28 to be incident on the body 12 to be received by the panel carrying surface 34. — 13 201043983 The above four moving pieces 30 are widely sized in such a manner that they can be moved two-dimensionally in the XY plane (that is, 62 is coupled to the pedestal 16. The two moving pieces adjacent to the combining mechanism will be described later). 30, in the manner of moving in the corpuscle and in the γ direction β (or Υ direction), the combination of the means can be individually moved, by means of the movable moving piece 30 in the γ square adjacent to the moving piece 30. In the case of an independent movement that does not interfere with the opposite direction (or the direction of the Χ), that is, the moving pieces are combined, and the moving pieces are combined. In the adjacent - moving sheet 3. The long side direction is 2 = 3. The long side direction 2 of the independent moving piece can be moved and combined with the adjacent moving piece ^ direction or the Χ direction: it can move in the adjacent - (toward or Χ direction) body. For the W means, for example, a tapered groove extending in the X direction (or the side of the opening: -μ opening 32 and having a cross-sectional shape of a truncated quadrangular pyramid) and slidably fitted to the H-shaped groove can be used. A combination of the so-called tailstocks of the cross-sectional shape of the cross-section. The dovetail groove is formed at the edge of the opening 32 side of the adjacent two moving pieces 3G, and the air bearing system is formed at an adjacent three-degree. Another one of the end edges of the long side. The movable piece, however, replaces the combination of the dovetail groove and the tailstock, using a guide rail and a guide member that can be slidably attached to the guide rail and is not separated separately. The means A can also be used. The mouth is provided with a plurality of floating devices j6 shown in Figs. 18 and 19 in each of the moving pieces 30. The sorting device 36, when the object to be inspected is displaced by the aligning device, The object to be inspected 2 floats up from the panel bearing surface 34, so that the movement of the object 12 to be aligned at the time of 201043983 is smoothly β. In the example shown in Figs. 18 and 19, in the example, each hoisting device 30 includes Embedding in the second sheet portion 30b such that the opening portion is at the top surface of the second sheet portion 30b Face 34) The open bottomed tubular member 38 卞, a portion of which can be disposed on the spherical body 4q of the tubular member 38 with respect to the panel bearing surface 34, and is elastically pressed to expose the portion of the spherical body 4 from the panel bearing surface 34. 42. A circular Ο 板 plate-like spherical bearing 44 disposed between the ball 4 〇 and the spring 42 and movable in the vertical direction, and a ring 46 for restricting displacement of the spherical body 4G in the tubular member %. 36, the object to be inspected 12 is received by the sphere (10), and is maintained in a state of being floated from the panel bearing surface 34. Therefore, the force of the magazine 42 is such that the object to be inspected 2 can be floated from the panel bearing surface 34. As shown in Fig. 23, the panel supporting portion 18 includes a plurality of opening portions 48 that are open to the panel carrying surface 34 and communication holes 50 that communicate with the opening portions 48 in the respective second sheet portions. In the example, each of the opening portions 48 is a hole, but may be another opening portion that is open to the panel receiving surface 34 and extends in the longitudinal direction of the second sheet portion 3汕. The communicating hole of each of the second sheet portions 30b 5〇, connected to the valve member 52 by means of the tube member 54 open/closely connected to the vacuum The pressure reducing groove 56' after the normal pressure reduction is driven by the valve driving device 58 to selectively open/close the air flow path between the pressure reducing groove 56 and the communication hole 50. After the air flow path is turned on, the opening portion 48 and The communication hole 5 is connected to the pressure reducing groove, whereby the object 12 is pressed against the spring pressure of the spring β, which is published by the lifting device, and the ball 40 is pressed down, and is vacuum-adsorbed to the panel bearing surface 15 201043983 34 in a state of displacement. Next, the lighting test of the test object 12 is performed. Contrary to the above, after the air flow path is broken, the open portion 48 and the communication hole 50 are separated from the pressure reducing groove 56. Thereby, the test object 12 is released from the panel. Adsorption of the bearing surface 34, a portion of the ball 40 slightly protrudes from the panel bearing surface 34 by the spring pressure of the spring 42. As a result of the above, the object to be inspected 12 is slightly floated from the panel bearing surface 34. In this state, the replacement of the old and new objects 12 to be inspected is aligned with the newly inspected body. The alignment is performed by displacing the object U by the alignment device as will be described later. At the time of alignment, the object to be inspected 12 abuts only on the spherical body 4, and floats from the panel bearing surface 34, so that it is smoothly and easily displaced. As shown in Fig. 23, instead of the floating device 36, a compressed air source pressure fluid source 6 is connected to the valve member 52' so that the pressure reducing groove 56 and the pressure fluid source 6 are selectively connected to each other by the valve member 52. Hole 5 can also be used. In the above case, the switching valve is used as the valve member 52. The body 12 to be inspected is placed for a long time. The p 48 is connected to the pressure fluid source 6〇, and the pressure fluid from the pressure fluid source 喷 is ejected from the open portion 48, and slightly floats from the panel bearing surface 关于 (with respect to the coupling mechanism). The coupling mechanism 62 is as shown in FIG. 1 and FIG. In order to allow the four moving pieces 30 to be coupled to the pedestal 16 in the X direction and the γ direction in the father's ancient heart, it is placed between the mouth seat 16 and the panel carrying portion 18.

In the example of the present invention, the coupling mechanism 62 includes a strip-shaped U-slider 64 that is disposed at a distance of ten 仃 in the X direction and that extends in the X direction and is disposed in the X direction. The upper portion of the i-slider 64 is in the γ-direction phase 16 201043983, and is parallel to the χ direction, and can be moved to the second slider of the strip shape of the square seat 16". The placement port is as shown in FIG. 5, - 2nd The slider 66 is movable by the coupling member 68: ::::: is combined with the -first slider 64, "2 slider =, and the yak 68 is movable in the γ direction to be coupled to the other upper slider 64. and ::6 toward the 4 pedestal 16 with one of the pair of rails 70 and the other end of the joint) moving, at the end of each slider Ο :: joint member 68, can move in the γ direction And being coupled to one of the longitudinal direction of the first slider 72 and extending in the longitudinal direction of the first slider 64 and being movable in the X direction to be coupled to the corresponding one: extending: the second sliding ...the other side of the long side direction - the pair of rails; the two 6 ^ joint members 68 can be moved two-dimensionally in the XY plane with respect to the pedestal 。. In the example of the Shishi =, each moving piece extending in the Y direction cannot be displaced by the two-in-one member 68' extends in the direction Each of the moving pieces 3 〇 is movably coupled to the second slider & track 72 extending in the χ direction. The π pieces 64 and 66 are moved by the moving piece (V direction), respectively, in the above moving direction. The position is maintained to be detachable: in the other case, 'as the moving piece moving mechanism 74, the motor t provided on the upper surface of the pedestal 16 is connected to the motor in a state T extending in the X direction, using the following machine t'Y a ball that is rotated by the motor and a mechanism that is screwed to the ball screw and coupled to the slider (four) nut by a connecting rod. The motor is like a pulse motor, and the rotation angle position is maintained at a height of 17 201043983. a motor that controls the position. For example, - the i-th slider 64 is moved by the corresponding moving piece. When moving closer to the separating direction (X direction), the knot is connected to the side of the old material (extending from丫 direction) - moving in close to each other in the separation direction (X direction) and the coupling member 68, and the moving piece 30 on the one side is connected to the other side of the =人= segment of the dovetail slot and the like Extending in the direction) a pair of moving pieces 3〇 and ^ shift The movement of the movable piece 30 moves together in the χ direction. Further, the pair of second sliding pieces 66 are coupled to the second sliding piece 藉 when moving in the separation direction (Y direction) by the corresponding moving piece moving mechanism Μ On the other side (extending in the X direction), the pair of moving pieces 30 move in the direction of the separation direction from each other, and move along with the second slider 66, and the moving piece is, for example, by the above-mentioned trailing groove and the tailstock. The one side of the joining means (extending in the γ direction) moves in the longitudinal direction (γ direction) together with the movement of the moving piece 3G and the moving piece 3q on the other side. _ Therefore 'four moving pieces 3 〇 The size of the opening 32 is moved so as to be the size of FIGS. 3 and 6. As a result, the size of the opening u 32 or the panel bearing surface 34 can be changed depending on the size of the object U to be tested. This operation is performed before the lighting test of the object 12 to be inspected. (Regarding Alignment Device) Referring to Figures 2, 4, 7 to 1B, 16 and 17, the pair of devices is included in one of the opposite sides (edges) of the panel bearing surface 34. 2, the other side is disposed at a distance from the longitudinal side of the corresponding side, and the pair of the first propeller mechanism 8〇 and the pair of first positioning mechanisms 82 are respectively arranged and 18 Ο

G 201043983 The second thruster mechanism 84 and the second positioning mechanism % on one side and the other side of the opposite side (γ side) of the panel bearing surface 34. The pusher mechanisms 80 and 84 advance and retreat the positioning mechanism 82 or % of the object to be inspected 12 on the side opposite to the arrangement side of the feeder mechanism, respectively. In contrast, the positioning mechanisms 82, 86 determine the reference position of the subject 12 in the γ direction, respectively. Υ As shown in FIG. 7 to FIG. 1A, the pusher mechanisms 8A, 84 and the positioning mechanism 82 are located at the same height position as the panel bearing surface 34, and have a pressing member 9 located outside the panel bearing surface 34 in plan view. The pillar-shaped moving body 92 of the pressing member %, the driving mechanism 94 that moves the moving body 92 or the pressing member % against the panel carrying surface 34, and the supporting plate 96 that supports the same. In the example of the figure, the moving body 92 has a branch shape extending in the up and down direction. The pressing member 90 is another member by the mounting pin 98 so that the moving body & portion can be rotated about a line extending in the x direction. — The support plate 9 6 is attached to the moving piece 3 of the panel bearing portion 18

One of the upper surfaces of the first piece portion 30a is obliquely positioned, and if 1ΛΛ-r A is attached to the longitudinal direction (X direction or γ direction) of the first piece 30a. The width direction of the two track portions 30a (the γ square door is in the direction or the X direction) is spaced apart from each other in the longitudinal direction (X direction or γ direction). As shown in Fig. 7 to Fig. 1A, the support plate 96 is mounted on a rail 100' by a guide member 10'' and mounted on the other rail 100. Therefore, a rail 100: uses a guide rail. In addition, the obstruction 100' has a female screw hole (10) opened at a plurality of positions in the X direction (or the Υ direction). 19 201043983 In another track 100, loading 1 ^ ε takes an extension in the X direction (or Υ The belt-shaped stopper die 1〇8, ^1 of the long hole 106 of the direction) is not movably provided on the support plate 96. The stopper die 1〇8 is inserted into the long hole 106' from above by screwing into the female screw hole 1 The bolt 110 of the crucible 4 is releasably attached to the other rail 1〇〇. Thereby, each of the support plates 96 is releasably fixed at a predetermined position in the \ direction (or the γ direction). 8〇, 84 and the positioning mechanism %% are respectively releasably fixed to the predetermined position in the direction of the direction (or the γ direction). Therefore, the other track 100 acts to position the thruster mechanism and the positioning mechanism in the X direction (or the γ direction). Removable fixed rail. However, the thruster mechanism and positioning mechanism are in the χ direction (or γ direction) The position can be selected by changing the position of the female screw hole 104 of the screw bolt 110 and the retaining die 108 of the threaded bolt 110, depending on the type, size, etc. of the object to be inspected 12. Each of the driving mechanisms 94 is provided on the support plate 96. One direction of the width direction (γ direction or X direction) extending in the longitudinal direction (X direction or the Υ direction) of the support plate 96 is fitted to each of the rails 112 so as to be movable in the width direction of the support plate 96. The slider 114 of the rail 112, the connecting plate 116 connecting the two sliders 114, and the driving source 11 for moving the pressing member 90 in the width direction of the supporting plate 96. The slider 114 is attached to the lower surface of the connecting plate 116. The 118 series is mounted on the upper surface of the support plate 96. The movable body 92 is placed on the connecting plate 16 in an upright state. However, the moving body 92 and the connecting plate 116 may be configured as a ''丨-structure. As shown in Fig. 10, each of the thruster mechanisms 8A, 84 is smuggled, and the Π8' is a fluid pressure cylinder mechanism using an air pressure cylinder or a hydraulic cylinder. The 20 201043983 cylinder mechanism is mounted on the support plate 96. The piston rod is coupled to the slider 114. Therefore, the thruster machine The driving mechanisms 94 of the 80, 84 drive the slider 114 forward and backward relative to the second sheet by the driving source 118, so that the pressing member 96 advances and retreats in the X direction or the γ direction with respect to the panel bearing surface 34 or the inspected crucible 12. 〇

As shown in Figs. 7 and 8, each of the drive sources 118 of the positioning mechanisms 82, 86 is a motor that can control the rotational angular position using a pulse motor. Therefore, each of the drive mechanisms 94 of the positioning mechanisms 82, 86 further includes a ball screw 12A that extends from the corresponding drive source 118 in the width direction (X direction or Y direction) of the support plate 96 and is rotated by the corresponding drive source 118. And screwed to the nut 122 of the ball screw 120. The nut 122 is attached to the web ι 6 . Each of the driving mechanisms 94 of the positioning mechanisms 82, 86 rotates the ball screw 120 by the driving source ι8, so that the nut 122 advances and retreats relative to the second piece 3b", thereby causing the pressing member 96 to face the panel bearing surface 34. Or the object to be inspected 12 advances and retreats (in the X direction or the γ direction). As shown in Fig. 20, the respective drive sources (vapor red bodies) U8 of the pusher mechanisms 8A, 84 are selectively coupled to the two pressurized fluid sources 124 126 by valve means 128. The pressurized fluid sources 124, 126 store compressed air or oil-like pressure fluids having different pressures from each other. ---- Acer MingkeTM is called a multi-valve valve driven by 128 selective drive. The valve device, each of the Guanlin Sun Yishan 0ths in the 128th is selectively driven by the valve driving device 129, and one of the driving sources ι 8 of the thruster mechanisms 8G, 84 is selectively connected to the pressure fluid source. m, 126. Thereby, the piston rod of the above-described cylinder mechanism advances and retracts relative to the cylinder, and the pressing member 96 advances and retreats with respect to the panel bearing surface 34 or 21 201043983. Further, as shown in Fig. 20, the respective driving sources (motors of the controllable position) 118 of the positioning mechanism 82, % are driven by the motor driving device 13A, and the corresponding pressing member 96 determines that the object to be inspected 12 is in the crucible. The reference position of the direction (or γ direction). Each of the reference positions is determined in advance by the type, size, and the like of the object 12 to be inspected. The alignment device having the above-described configuration, as shown in FIG. 2A, causes the pressing member 96 of the positioning mechanism 86 for the χ direction to advance and retreat in the χ direction, maintain the reference position of the body 12 in the Χ direction, and is used by the χ direction. The pressing member 96 of the pusher mechanism 84 presses the pressing member 96 of the positioning mechanism 86 for the inspection object 12 with respect to the squatting direction. Thereby, the object to be inspected 12 is aligned in the x direction. The alignment of the test object 12 in the Υ direction is performed by the positioning mechanisms 82, 82 for the γ direction and the pusher mechanisms 8 〇 8 〇 for the Υ direction. The inspection body 12 is aligned with respect to the 0 axis extending in the x-direction, as shown in Fig. 21, by the positioning mechanism 82 for the γ direction, and the pressing member 9 for the γ direction of the pusher mechanism 80, 84. 〇 Move in the direction indicated by the arrow. When the alignment is performed, the driving source of each of the thruster mechanisms is connected to the pressure fluid source 124 having a low pressure. Thereby, the object to be inspected 12 is held by the pressing member 90 with a weak force. As a result, the impact applied to the test object 12 when the test object 12 collides with the pressing member (10) is small, and damage of the test object 12 due to the impact can be prevented. During the alignment, the object to be inspected 2 is lifted from the panel bearing surface by the 22 201043983 floating device 36 shown in Figs. 8 and 9 . Therefore, when alignment is performed, as above, f is moved, and correct alignment can be performed. As described above, when the alignment is performed, the reference position of the object 12 to be inspected, and the pressing member 90 of the positioning mechanism is determined to be at least in the moving direction thereof. The pressing member 90 of each positioning mechanism is not easily worn or worn (deformed or not) It is elastically deformed, or is made of, for example, a hard resin. Thereby, the pressing member P of the pressing member 9 of the positioning mechanism pushes the object 12 to be inspected.

The drive source can also maintain the reference position. As a variant, it is easy to control the motor as the (4) source. In this case, the positional mechanism of the motor is used. However, the elastic deformation of the member 9G is considered as the case where the amount of rotation of the motor is used. = The resin structure #% of the 'propeller mechanism' may be a resin-like material having a height that does not damage the body 12. Therefore, the member 9Q' of the pusher mechanism is either a material that does not elastically deform and a material that is elastically deformable. When the object to be inspected 12 is pressed against the pressing member 90 of the positioning mechanism "86" by the pusher mechanism 8, the ball screw 12 and the nut 122 are frictional with each other as long as the driving source 118 does not When driven, the pressing members 90 of the positioning mechanisms 82, 86 can be prevented from retreating. Thereby, the reference position for positioning is not displaced. As described above, each of the driving mechanisms 94 of the positioning mechanisms 82, 86 will press the member 23. 201043983 90 The position of the terminal in the X direction or the γ direction is maintained and can be changed. The state in which the alignment of the X direction, the Υ direction and the 0 axis is completed is as shown in Fig. 16 and Fig. 17. The driving source of each of the pusher mechanisms is connected to the pressure fluid source 126 having a high pressure. Thereby, the object to be inspected 12 is held by the pressing member 90 with a strong force. The object to be inspected 12 is maintained before the end of the lighting test. The pressing member 90 is in a state of strong holding. (About the probe unit) As shown in FIGS. 7 and 11 and the like, each of the probe units 2 includes extending along the side of the rectangle (X direction or Υ direction) and supported by the unit supporting mechanism. 22-plate support base 132, at A plurality of support blocks 134 mounted on the support base 132 at a distance from the longitudinal direction of the susceptor 132 are supported by the moving block 136 of each support block 134 so as to be movable in the ζ direction, and are mounted on the moving blocks. The probe block 138 of 136. The support base 132 is removably mounted on the unit support mechanism 22 by a plurality of screw members (not shown). Each support block 134 has a protrusion from its upper end to the panel bearing surface. The protruding portion on the 34 side. Each moving block 136 is coupled to the rail 140 extending in the up and down direction on the front side (the side of the opening 32) of the support base 132, and is coupled to the upper and lower directions of the rail ι4〇. The guide 142 is assembled to the support base 132, and can be adjusted in the vertical direction by the protruding portion penetrating the support block 134 in the vertical direction and the adjusting screw 144 screwed to the moving block 144. As shown in FIG. 9 and FIG. 11, a plurality of contact 146 are arranged at a distance from each other in the X direction or the Y direction, and are supported by the tip of the connection 24 201043983 1 146 toward the panel carrying portion. Moving block Mechanism, as shown in FIG. 7, FIG. 9, FIG. 11, FIG. 15, etc., the unit support mechanism 22, the first piece 30a provided in the panel carrying portion 18, and the plate-shaped moving body carrier extending in the longitudinal direction of the first piece (4) The first Mingqin moving body 152' disposed on the moving body carrier 150 is movable to the opposite panel bearing surface Ο

The direction in which the G 34 is inclined is coupled to the second movable body B4 of the i-th movable body 152, and is attached to the second movable body 154 < the upper end of the top plate 156, and the first movable body 152 is oriented to the width of the first piece 30a. The probe moving mechanism that moves in the direction and the brake member 160 that defines the 帛2 moving body 154 before entering the end position (the position on the opening 32 side). The moving body carrier 15 is provided in the first direction in the longitudinal direction (X direction or in the direction of the moving body 15 相) in the width direction of the moving body carrier 15〇. a pair of pairs or a plurality of pairs of tracks 162 and a guide member (6) supported on each of the rails 162 and fixed to the lower side of the movable body carrier 15A in a longitudinal direction of the movable portion 162, combined with Above the i-th piece 30a. Therefore, the moving body carrier 150 can be moved in the longitudinal direction of the i-th piece 3a. The first movable body 152 is provided on the movable body in a state in which the longitudinal direction of the movable body carrier 丨5〇 (the first piece portion 30a) is spaced apart from each other and extends in parallel in the width direction of the movable body carrier I". One of the carrier 15 对 is supported by the trajectory 166 and the guide 168 is mounted on each of the rails 166 so as to be movable on the lower side of each of the rails 166 and is assembled to the lower side of the ith moving body 152, and is coupled to 25 201043983. Therefore, the first moving body 152 can be moved in the width direction of the sheet portion 30a) on the moving body carrier 150. The moving body carrier 15 (or the first and second moving bodies 152 and 154, obliquely coupled) The panel carrying surface 34' is such that the second moving body 154 is located on the side of the panel carrying surface 34. Therefore, the first and second moving bodies 152 and 154 each have a surface that faces obliquely downward and a surface that faces obliquely. The moving body 154 extends in the longitudinal direction ' of the i-th piece I and extends obliquely so that the upper portion is closer to the side of the panel receiving surface 34. Further, the second moving body 154 is provided on the i-th moving body 152. The surface facing obliquely downward is spaced apart from the i-th portion 3 in the longitudinal direction of the first sheet portion 30a. One of the width directions of 0a is coupled to the track 17A and the guide member π which is disposed on each of the tracks 17A so as to be movable in the longitudinal direction of each of the tracks 170, and is disposed on the face of the second moving body 154 which is inclined downward. The second movable body 154 is movable in the direction in which the opposite movable body 15 2 is inclined. The top plate 156 has a rectangular shape 2 which is long in the longitudinal direction of the first > And attached to the top of the second movable body 154. The probe unit is mounted on the top plate 156 and supported by the second movable body ι 54. Each of the probe moving mechanisms 158 uses the following mechanism, that is, The motor 174 on the upper side of the moving body carrier 15 is coupled to the motor 174' in a state of being extended in the χ direction (or the γ direction). The ball screw 176 rotated by the stirrup 174 is screwed to the nut of the ball screw i76.丨78, and a mechanism that is attached to the second movable body 154 and the coupling nut 178 of the support nut 178. The motor 174' is a motor that can maintain the rotational angle position as a detachable controllable position like a pulse motor. Supported by the mobile body 26 through the drag 182 150. The ball screw 176 is coupled to the rotating shaft of the motor 174, and is supported by the moving body carrier 15A through the other carriage 184. Further, the first and second moving bodies 152 and 154 are extended by obliquely upward. The hole 丨 86 formed in the first movable body 152 at the upper end and the rod 188 ′ inserted into the hole 186 from above prevent relative displacement in the vertical direction on the face facing obliquely and obliquely upward, and The relative displacement in the longitudinal direction of the first and second moving bodies 152 and 154. The first and second moving bodies 152 and 154 are separated by the compression coil spring 190 disposed around the rod member 188, and the i-th and second moving bodies 152 and 154 are separated in the longitudinal direction of the rod member 188. Relative pressure. Actually, the first movable body 152 is prevented from being displaced in the longitudinal direction of the rod 188 by the rail 166 and the guide 168, so that the second movable body 154 is biased upward by the spring 190. Further, as shown in FIG. 11, the unit support mechanism 22 includes brake members 191 and 193 provided in the first and second movable bodies 152 and 154 to define the ascending end positions of the second movable body 154, and the brake members 191 and 193. When the second moving body 154 is raised and abuts against each other, and the second moving body 154 is prevented from rising, the first and second moving bodies 152 and 154 are disposed obliquely downward and upwardly. In the unit support mechanism 22, when the first movable body 152 moves toward the test object 12 by the forward rotation of the motor 174, the second movable body 154 also moves in the same direction. At this time, the displacement generating mechanism 92 (see Figs. 7, 11, 13 and the like) for shifting the elastic force of the second movable body 154 against the spring 19 is attached to the second moving mechanism 154. 27 201043983 As shown in FIG. 7 and FIG. 11 , the displacement generating mechanism 192 includes a mouth-shaped trailer 194 & which is provided on the side of the second object body 154 on the side of the object 12 to be inspected obliquely downward. The trailer Μ 196 is attached to the trailer 10 (10) so as to be rotatable about the longitudinal direction extending in the longitudinal direction of the second moving body. In the single-turn support mechanism 22, when the first and second movable bodies 152 and 154 are moved toward the test object 12 by the motor 174, the roller 196 abuts against the brake "o. The first and second movable bodies 152 & 154 borrow When the motor 174 is further moved toward the test object 12, the second movable body 154 is prevented from being displaced by the brake member (10), and the second movable body 154 is displaced to the oblique portion at the fitting portion of the rail 17 and the guide 172. Displacement force below. With the above displacement force, as the first moving body 152 advances further, the second moving body 154 moves to the lower side. The knot & the probe unit 2〇 moves to the lower side, and the probe block 138 The needle tip of the contact is pressed against the electrode of the subject 12. At this time, the subject 12 is held by the pressing member 9 〇 with a strong force and is attracted to the panel bearing surface 34, so that even the tip of the contact is pressed. The electrode of the test object 12 can also reliably prevent the test object 12 from being displaced relative to the panel carrier portion 18 and the probe unit 20. In the above state, when the motor 174 is reversed, the roller 丨% abuts against the brake member 160. In the state, the i-th moving body 152 is opposite to the panel bearing surface "and the second The moving body 154 moves backward. During this period, the second moving body 154 rises relative to the second moving body 152 by the force of the elastic 190, and is separated from the object to be inspected. 28 201043983 When the motor 174 is further reversed, the first moving body 152 continues to retreat. However, the second movable body 154 stops rising due to the contact of the brake member 193 with the brake member 119, and in this state, the first movable body 152 is retracted to the retracted position with respect to the panel bearing surface 34. As described above, the second movable body 154 and the probe block 138 are held forward and lowered by the forward movement of the motor ι 74 with respect to the panel bearing surface 34 and the test object 12, and are maintained at the forward and downward positions, and The reverse rotation and retreat of the motor 174 are maintained at the retracted position to be released.

When the second movable body 154 or the probe block 138 is moved back to the retracted position, the panel receiving surface 34 is replaced with the object 12 to be inspected. At this time, since the object to be inspected 2 floats from the panel bearing surface 34 and the probe unit 承载 is loaded from the panel by a large rear iE ', it is easy to perform the handing over of the object to be inspected body 12 of the panel bearing surface 34. (About the camera device) As shown in FIG. 13 and the like, each of the camera devices 24 includes an inverted l-shaped support block supported by the support base 132 of the probe unit 20, and a marker portion is photographed from above (not shown). 2) camera 202. & δ has been set at the tip of the needle you are examining. The camera 202 is photographed and inspected: two specific contacts, the helmet and the spit, and the video detector-like (10) area sensor for generating video signals near the top of the 12 mark. The domain sensor can use the output signal of each camera 202 to perform image processing on the control device without the 彷泠w & Fig. 7^, and is used to obtain the test object 12 word test 4 device 1 〇, special 29 201043983 is the positional shift of the panel carrier 18 or the probe unit 2 or the like. The position offset obtained is used to drive the above-mentioned alignment device. (About the angle adjusting device) As shown in Fig. 15, the unit supporting mechanism 22 further includes moving the moving body carrier 150 in the longitudinal direction thereof, and maintaining the position in the direction (or the Y direction) of the panel bearing portion 18 to be Lift the angle adjustment device. The angle adjusting device is provided with a coupling shaft 2〇6 supported by the top plate 156 so that the support base 132 can be angularly rotated about an axis extending in the z direction with respect to the top plate 156, and is fixed to the end portion of the top plate in the longitudinal direction. The nut is screwed and screwed to the nut 208, and one end of the end portion of the support base 132 in the longitudinal direction is pressed to one of the X direction (or the γ direction) to the adjustment screw. In the above-described angle adjusting device, when the amount of screwing of the two adjusting screws 210 to the nut 2〇8 is large, the supporting base 132 is angularly rotated about the coupling shaft 2〇6, and is displaced relative to the top plate 156. Therefore, by adjusting the amount of screwing of the two adjusting screws 21 to the nut, the posture of the supporting base 132 relative to the moving piece 30 can be adjusted. (Regarding the unit position adjusting device) As shown in FIG. 2, FIG. 13, FIG. 15, and the like, the probe unit "moves to the X direction (or the Υ direction) by the moving position piece 3 of the panel position adjusting portion 18 by the unit position adjusting device. The position in the X direction (or the γ direction) is adjusted. In the illustrated example, the unit position adjusting device includes a motor 212 disposed at a controllable position of the first piece of Qiu, a ball screw 214 rotated by the motor 212, and a screw. A nut 216 coupled to the ball screw 214 and a coupling 218 coupled to the nut and the moving body carrier 150. ' 30 201043983 When the motor 212 rotates forward, the nut 216 moves in the χ direction (or γ direction) The moving body carrier 150 moves in the same direction. When the motor 212 is reversed, the nut carrier 150 is moved by the nut 216 in the Υ direction (or X direction), whereby the moving body carrier 150 or the probe unit 2 〇 The position of the X-direction (or the Υ direction) relative to the moving piece is adjusted to be releasably maintained at this position, so that the tip of each contact 146 can be brought into contact with the object to be inspected 12 = 啼❹.

Q (action of the test apparatus) As shown in Fig. 22 (A), the test apparatus 1 is moved from above in a state where each of the probe unit 2, the second movable body 92, and each of the second movable bodies 154 is retracted. The transfer of the object 12 to be inspected by the panel carrier 18. Next, as shown in Fig. 15(B), each of the pressing members 9 is advanced and the tip of each contact of the probe block 138 is moved to the upper side of the electrode of the subject η. During this period, the pusher mechanisms 8(), 84 are respectively actuated by the low fluid magic to prevent breakage of the object to be inspected. Next, as shown in Fig. 15(C), each probe block 138 lowers the tip (4) of each contact to the electrode of the subject 12. During this period, the pusher mechanisms 8〇84 are respectively actuated by high fluid pressure to prevent displacement of the object 12 to be inspected. In this state, the object 12 to be inspected is energized, and the test object 12 is tested. The above lighting test can be used to visually inspect the object 12 of the object to be inspected from above. It can also be an automatic lighting test using a video camera-like area sensor and performing image processing on the control device. 31 201043983 During the lighting test, the object to be inspected 12 is attached to the pressure reducing groove 56 by the receiving material 146 (four) on the panel (four) surface 34 = the holding portion 48. The opening portion J is not required. After the electrical test is completed, each probe unit is 2〇, each! The moving body 152 and each of the second moving bodies 154 are retracted to the position of V 7 0 in Fig. 22, and the inspected county 2 is lifted from the panel bearing surface 34, and the rod is 斟$4 £; 7 satisfies the body 12 body 12 Handover. Carrying in the panel bearing ... is inspected (another embodiment) Ref. (4) 24, test device 25G, as the panel bearing: early: 20 moves closer to each other in the direction of separation, moving the mechanism, "used to move the panel carrier 18 to The up-down direction supports the yoke ay of the pedestal 6 by the struts 26. The cymbal 252 is a so-called general elevating mechanism supported by the gantry 25 of the rafter. The backlight unit 28 is mounted on the cymbal 252. The probe unit 20 is configured to support the probe unit 2 on the gantry 25 by the probe unit 2. The probe-carrying unit 250 moves the probe-carrying unit 18 up and down by the cymbal stage 2 probe unit 2G. Let each station 254 Youcho early 70 20 be used in the same way as the test device by the point where the probe carrier 4 moves within the crucible surface. W is used in conjunction with another embodiment (aligned with another embodiment) instead of the test device 250 The gantry 252 or the like, in addition to the conventional test device, includes a mechanism for moving the panel carrying portion 18 in a direction of the U Ζ direction, a mechanism for angular rotation about the θ axis, and the like, the probe 32 201043983 unit 2 Aligning the 〇 with the object to be inspected by the above Other methods may be used. Hereinafter, an example of such alignment will be described. • In the case where the 0 moving mechanism is provided, the state in which the object to be inspected 12 is held by the advancing II mechanisms 80 and 84 and the positioning mechanisms 82 and 86 The object 12 is angularly rotated about the axis of the object, and the panel bearing portion is moved together with the two probe units by a mechanism suitable for moving the sheet moving mechanism 74 in the χ direction or the Υ direction. In the case of the moving mechanism, as shown in Fig. 25, in the state in which the object to be inspected 12 is held by the pusher mechanisms 80, 84 and the positioning mechanisms 82, 86, the subject 12 is moved by the 0 moving mechanism about the axis of θ. The angular rotation 'and the displacement of the test object 12 relative to the two probe units 20 in the x direction by the movement mechanism, and then the two probe units 20 are moved in the X direction relative to the object 12 to be inspected. In the case of the mechanism, in the state in which the object to be inspected 12 is held by the pusher mechanisms 80, 84 and the positioning mechanisms 82, 86, the object to be inspected 12 is angularly rotated about the 0 axis by the 0 moving mechanism, and borrowed.

The X-moving mechanism displaces the subject 12 relative to the two probe units 2 in the X direction, and then moves the two probe units 2 to move relative to the subject 12 in the γ direction. In the case where the 0 moving mechanism and the moving mechanism are provided, as shown in Fig. 26, the object to be inspected 2 is caused by the state in which the object to be inspected 12 is held by the pusher mechanisms 8A, 84 and the positioning mechanisms 82, 86. The moving mechanism rotates about the 0-axis angle ί·, and the object to be inspected 12 is displaced relative to the two probes 20 in the X direction by the ΧΥ moving mechanism. At this time, the two probe units 2 may not be displaced. 33 201043983 instead of the panel bearing 34 34 "on one of the opposite sides, the pair of thrusters 84 are arranged at an interval from the direction in which the corresponding sides extend, and a single thruster mechanism 84 may be arranged as shown in FIG. Alternatively, three or more thruster mechanisms 84 may be disposed. Further, instead of one of the opposite sides of the panel bearing surface 34, the pair of pusher mechanisms 84 are arranged at an interval from each other in the extending direction of the corresponding side, as shown in FIG. a plurality of pressing members 90 at intervals, a supporting member 260 that supports the pressing members 9 in a γ direction (or a χ direction), and a driving source 118 that displaces the supporting member 26 in the χ direction or the γ direction, The pivot pin 262 supported by the drive source 118 may be coupled to the support member 26 so as to be rotatable about an axis extending in the ζ direction. In the embodiment shown in Fig. 28, each of the pressing members 9 is supported by the moving body 92, and the moving body 92 is supported by the supporting member 26''. (Another embodiment of the bonding mechanism) Referring to Fig. 29, in addition to the other embodiments of the mechanism, three pairs of bonding members 270, 272, 274 are used. The port joint member 270 is coupled to the pair of rails 72 provided in the first slider 64 so as to be movable in the Υ direction, and is coupled to the yoke direction in the same manner as the joint member 68 shown in FIG. It is provided on the pair of rails 72 of the second slider 66. Each of the coupling members 272 is coupled to the other pair of lanes 72 provided in the second 'moon member 66 so as to be movable in the χ direction. Each of the coupling members 274 is coupled to a pair of rails 72 provided in the first slider 64 in a movable γ*.D type, and 34 201043983 is attached to the moving sheet extending in the γ direction so as not to be movable. Each of the moving pieces 30 extending in the z-direction is coupled to the coupling member 27A so as to be movable in the γ direction on one of the lower pair of rails, and is attached to the coupling member 274 so as not to be movable. Each of the moving pieces 30 extending in the X direction is coupled to the coupling member 272 so as to be movable in the X direction, and is disposed in the lower side by being movable in the X direction. The auxiliary coupling member (10) is coupled to the rail u of the second slider 66 so as to be movable in the X direction. In another embodiment of the coupling mechanism, when the slider cores are moved closer to each other in the separation direction (X direction), the direction of the one side of the slider 64 is transmitted through the coupling member 1 to move in the direction of the separation member (X) Moving in the direction, and connecting the other-side moving piece 30 extending in the X direction of the side-moving piece (10) by the combination means of the above-described dovetail groove and the tailstock, etc. Move in the X direction. And the pair of second sliders 66 are moved closer to each other in the separation direction (γ direction)

During the movement, the other-side moving piece 3〇 connected to the second slider “connecting to the second slider” in the X direction is moved closer to the separating direction (Υ direction) by the coupling member 272, and the borrowing is performed. The side moving piece 30 extending from the other side moving piece 3G extending in the γ direction by the combination of the above-mentioned tailing groove and the rear tail seat or the like moves along the moving side of the other side moving piece 3 () The direction of the side (Y direction). Therefore, the four moving Η v pq moving piece 30 is the size of the opening 32 by the size of the opening 32. In the manner of the size of the figure 3 and FIG. 6, the movement of the fruit piece 30 can be determined according to the test to be tested. Inspected 35 201043983 The size change opening 32 of the body 12 or the size of the panel bearing surface 34 β ^ early support mechanism 20, the coupling mechanism 62, the moving piece moving mechanism 74, the clamping mechanism 82, 86, the probe moving mechanism 158, etc. The motor that drives the driving mechanism is either a rotary motor or a wire. 1 Similarly, the driving force of each thruster mechanism is in the clamping mechanism. Rotary motor with two stages change within the range of the motor And either of the linear motors can be used. 2. The volume of the compressed air rolling varies with the pressure. Therefore, when the cylinder mechanism using compressed air is used as the driving source of the thruster mechanism, the pressing member can be greatly reduced in alignment. Impact when colliding with the object to be inspected. Therefore, it is preferable to use a cylinder mechanism using compressed air. In addition, instead of using the above motor (electric motor), in particular, the driving mechanism of the positioning mechanism 82, %, the ball screw 12 is used. The mechanism of the nut 122 is a mechanism using a rack and pinion, etc., and other driving sources such as a hydraulic motor that drives the mechanisms may be used. The panel carrying portion 18 has a configuration in which the size of the opening 32 cannot be changed, for example, the same size. The structure of the object to be inspected may also be modified. Further, the structure of the positioning mechanism may be variously modified. As in the above embodiment, instead of the two types of pressure fluid sources 124, 126, valve device 128 and valve driving device 129' may be used The voltage control outputs an appropriate electro-pneumatic regulator of the pressure fluid. At this time, the electro-pneumatic regulator will select at least two different fluids different from each other. The drive source 118 is supplied to the drive mechanism of the pusher mechanism 8A, 84. 36 201043983 The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an embodiment of a test apparatus of the present invention. Fig. 2 is a front view of the test apparatus shown in Fig. 4. Fig. 4 is a sectional view taken along line 4-4 of Fig. 3. 3 图 图! The top view of the test device shown. Ο Ο Figure 5 is a ''--me outer cut is one of the examples of the micro-camera, the panel bearing part and the pedestal that receives it are disassembled and displayed Fig. 6 is a top view showing the probe unit (four) in the test device shown in Fig. 1. The cross-sectional view taken along line 7-7 in Fig. 3 is a cross-sectional view in which the lower member of the panel carrying portion is omitted. Figure 8 is a perspective view showing the movement of one of the positioning mechanisms with the panel carrier. The cross-sectional view taken along line 9-9 in Fig. 3 is a cross-sectional view in which the lower member of the panel carrying portion is omitted. A perspective view showing one embodiment of a pusher mechanism together with a panel carrier. The copy 2 is a front view showing the probe unit and its supporting mechanism and the panel carrying portion. Figure 12 is a view for explaining the probe unit and the object to be inspected. Stereoscopic relationship of the relationship 37 201043983 Figure 13 is a perspective view of the probe unit and its support mechanism. Figure Η is a perspective view of an embodiment of the unit support mechanism viewed from one of the X directions. Fig. 15 is a perspective view of the unit supporting mechanism as seen from the direction opposite to Fig. 14. Fig. 16 is a view showing the relationship between the thruster mechanism and the positioning mechanism when positioning is performed. Fig. 17 is a front view showing a relationship between a pusher mechanism, a positioning mechanism, and an object to be inspected when the position and contact are performed. Fig. 18 is a perspective view showing an embodiment of a relationship between a panel carrying portion and a floating device. Figure 19 is a cross-sectional view showing an embodiment of a floating device. Fig. 20 is a view for explaining the positioning of the test apparatus shown in Fig. i, for explaining the state in which the object to be inspected is displaced in the direction of the orientation. The figure is for explaining the positioning of the test apparatus shown in Fig. i, and is a view for explaining a state in which the object to be inspected is wound and rotated four degrees. Figure 4, diagram showing the displacement state of the moon probe unit, (4) showing the state of the 舴 舴, μ β 卞 when the probe unit is in the retracted position Β '(Β) shows the probe unit in the middle position Also, (C) shows the state in which the probe unit is located at the contact position. Fig. 23 is a view showing the embodiment of the open portion of the panel carrying portion together with another embodiment of the floating device. Figure 24 is a diagram showing another embodiment of the test apparatus of the present invention. Figure 25 is a diagram for explaining another positioning method. Figure 26 is a diagram for explaining still another positioning method. 38 201043983 FIG. 27 is a diagram showing another embodiment of the positioning device. FIG. 28 is a view showing still another embodiment of the positioning device. FIG. 29 is a view for explaining another embodiment of the coupling mechanism, β and accepting the same. The pedestal is exploded to show a perspective view.

[Main component symbol description] 10, 250 Test device 12 Flat object 14 Platform 16 pedestal 16a, 32 Opening 18 Panel carrier 20 Probe unit 22 Unit support mechanism 24 Camera device 25 Rack 26 Support 28 Backlight unit 30 Movement Sheet 30a, 30b 1st and 2nd sheet 34 Panel bearing surface 36 Floating device 40 Ball 42 Spring 39 201043983 48 Opening 50 Connecting hole 52 Valve member 54 Tube 56 Relief tank 58 Valve drive 60 Pressure fluid source 62 Bonding mechanism 64, 66 1st and 2nd slides 68, 270, 272, 274, 276 Joint members 70, 72, 276, 278 Track 74 Moving piece moving mechanism 80, 84 Propeller mechanism 82, 86 Positioning mechanism 90 Pressing member 92 Moving Body 94 Drive mechanism 9 6 Support plate 98 Mounting pin 114 Slide 116 Link plate 118 Drive source 120 Ball screw 122 Nut 201043983 124, 126 Pressure fluid source 128 Valve device 129 Valve drive 130 Motor drive 132 Support base 134 Support Block 136 moving block 138 probe block

146 Contactor 150 Moving body carrier 152, 154 1st and 2nd moving body 156 Top plate 158 Probe moving mechanism 160 Brake 162, 166, 170 Track 164, 168, 172 Guide 174 Motor 176 Ball screw 178 Nut 180 Adapter 186 hole 188 Rod 190 Compression coil spring 192 Displacement generating mechanism 41 201043983 194 196 200 202 206 208 210 212 214 216 218 252 260 262 Trailer roller support block camera coupling shaft (angle adjustment device) Nut (angle adjustment Device) Adjusting screw (angle adjustment device) Motor (unit position adjustment device) Ball screw (unit position adjustment device) Nut (unit position adjustment device) Combination tool (unit position adjustment device) Z stage support member pivot pin 42

Claims (1)

201043983 VII. Patent application scope: 1. A test apparatus for a flat object to be inspected, which comprises a panel bearing portion having a rectangular panel bearing surface for receiving a flat object to be inspected, and having an electrode pressed against the electrode of the object to be inspected The probe unit of the plurality of contacts and the alignment of the object to be inspected by the #• panel bearing portion with respect to the contact position; ° 4 ^ μ mouth &quot;...- and w is called a small battle The first thruster mechanism and the first positioning mechanism on one side and the other side of the pair of sides, and the other side of the opposite side of the panel bearing surface, the other side a pusher mechanism and a second positioning mechanism; the pusher mechanism and the positioning mechanism respectively include at least one pressing member located outside the panel bearing surface; and at least one driving mechanism for displacing the pressing member in the x direction or the ; direction; The drive mechanism of each positioning mechanism maintains the position of the pressing member in the X or Υ direction to be detachable. ° 2. The test device as claimed in the scope of application 帛i includes a motor that can control the position of the rotation angle. ', Clamping machine 3 · The pressing member of the median mechanism of the test device j of claim 1 or 2 of the patent application, each of which is not easily elastically deformed or elastically deformed in its moving direction Production. The test device of the invention of claim 2, wherein the drive mechanism comprises /, each of the positioner pressing members is driven in the X direction or ', and driven by the drive source The institution that was released. The position of the fifth direction and the drive source are maintained. The test device of claim 4, wherein the maintenance mechanism of each positioning mechanism has a direction extending from the drive source in the χ direction or the γ direction. a screw that is rotated by the drive source, and a nut that is screwed to the screw to displace the pressing member in the X direction or the γ direction. 6. The test apparatus of claim </ RTI> wherein the drive source of the drive mechanism of each of the pusher mechanisms comprises a cylinder mechanism that uses pressurized fluid to advance and retract the pusher. 7. The test device of claim </RTI> wherein the test device further comprises a source of pressure 1 and a second source of pressure different from each other, and selectively supplying the pressure fluid of the source of the i-th and second sources of pressure to the thruster A valve device of a drive source of the drive mechanism of the mechanism. 8. The test device of claim i, wherein the step further comprises selectively supplying at least two pressure fluids different in pressure from each other to the drive of the pusher mechanism. Source of the air conditioner. 9. For example, in the scope of the patent application, the 1 m ^ ^ ^ „ 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 A moving body that is driven on the side of the square plate. Or the movement of the 丫 direction is arranged in the 〇. For example, the ninth member of the 凊 凊 之 之 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The axis is red-turned to support the movement of the panel bearing portion, and the device is advanced to step 12. "Shen," = direction of the moving mechanism. Patent test item 1 of the test device, Further, 44 201043983 is disposed on the panel carrying portion 'the floating device that floats the object to be inspected from the panel bearing surface when the object to be inspected is displaced by the alignment device. 13. Patent Application No. 12 The test device of the present invention, wherein the floating device includes a portion that can protrude and retract from the panel bearing surface, is disposed on the panel of the panel bearing portion, and is biased in such a manner that the portion of the sphere is exposed from the panel bearing surface弹簧 ❹ 14. The test device of claim 1, wherein the panel is open to the open portion of the panel bearing surface, and the open portion is selectively connected to the supply of pressurized fluid The valve device of at least one of the source and the pressure reducing groove. 15. The testing device according to the scope of the invention of claim 2, further comprising: the frame bearing portion having a rectangular shape &quot; The panel carrying portion has a second opening that forms a rectangular shape similar to the first opening of the first opening and forms the panel bearing surface together to change the size of the second opening. The four test pieces of the pedestal. The test device of claim 15 wherein the pair of moving pieces extend in the Y direction at an interval from the X direction and the other pair of the moving pieces are in the x direction. The spacers extend in parallel in the Y direction; the moving sheets collectively form the second opening and collectively form the panel bearing surface ′ and are disposed on the pedestal so as to change the size of the second opening; adjacent moving pieces are The test device is not interfered with the movement in the direction of the ¥ or the X. 7. The test device according to the first item of the patent application, further comprising 45 201043983 having the panel carrying portion and the right 'the first with a rectangle a pedestal of the opening, and a pedestal placed on the pedestal and the slab of the panel to engage the ant. The raft is coupled to the pedestal in such a manner that the moving piece can move in the x direction and the γ direction. The combination mechanism / 18. The test device of the πth patent scope, wherein the moving package causes each moving piece to move through the sister, her m + # v, "the 〇α mechanism moves in the x direction or the γ direction , a moving piece moving mechanism placed on the pedestal. 19. The test apparatus of claim 18, wherein the sheet moving mechanism comprises a controllable angle of rotation motor that causes the moving piece to move. &lt; 20. According to the first patent application, the panel carrying portion and the probe are vertically moved up and down. The test device further includes a test device in which the elements move in a direction close to each other in the separation direction, and further includes a mark portion supported on the probe sheet 21. As in the patent application, the photograph is taken from above. The camera device of the voxel. • A frame that supports the panel carrier portion as claimed in the patent scope; the probe unit 70 is supported by the frame or the panel carrier. 23·If you apply for a patent scope! Test device for supporting the probe unit to the unit support mechanism of the panel bearing portion. The bearing mechanism (4) is movable in the χ or γ direction, and is connected to the panel bearing portion, the extending direction or the χ direction! The moving body ' is coupled to the first moving body and the second 46 201043983 moving body extending in the γ direction or the 乂 direction so as to be obliquely movable in the Χ direction or the Υ direction and the Ζ direction. The brake member that moves into the end position before the moving body moves, and moves the first moving body in the X direction or the 丫 direction, thereby moving the second moving body in the X direction or the γ direction and shifting in the ζ direction a needle moving mechanism; the probe unit is supported by the second moving body. 24. The test device of claim 23, wherein the unit support mechanism further comprises extending in the meandering direction or the X direction to be on the face The plate bearing portion is supported by the panel bearing portion in the γ direction or the X direction, and the moving body carrier supporting the 移动1 moving body on the panel bearing portion, and the moving body carrier is on the long side thereof The unit position adjustment device that maintains the position in the γ: direction or the X direction with respect to the panel carrier. The test device of claim 23, wherein the probe further comprises a support base ' extending along a side of the rectangle and supported by the unit and a length of the support base The side faces are spaced apart from each other, and the probes are supported by the probes that can be moved in the Ζ direction, and the probes are supported by the support base and the support pedestal. For example, the test skirt of claim 25 of the patent scope is applied. Wherein, the support base is supported to extend around the unit support mechanism; and is angularly rotated to the axis; the support member supports the load carrier 7 卩 and the probe The needle unit is maintained as a retractable angle adjustment mechanism extending around the Ζ 27Γ two-position relationship. The test apparatus of claim 23, wherein each of the probes 47 201043983 the moving mechanism includes selectively displacing the probe block in an unfolded position retracted from the panel bearing surface by the alignment device. The aligned position of the object to be inspected, and the motor that contacts the contact position of the electrode of the object to be inspected and maintained at a controllable position that can be released. 28. The test apparatus of claim </ RTI> wherein the probe units are respectively disposed at locations corresponding to two adjacent sides of the rectangle. The test device of claim 1, wherein the aligning device comprises one of the opposite sides of the opposite side of the bearing surface of the panel and the other side are spaced apart from each other in the extending direction of the corresponding side. A plurality of the first thruster mechanisms and a plurality of the third positioning mechanisms are disposed. 30. The testing device of claim </ RTI> wherein the aligning device comprises one of one of the opposite sides of the facing side of the panel bearing surface and one of the other sides spaced apart from each other in a direction of the corresponding edge. The first thruster mechanism and the pair of first positioning mechanisms are provided. 3. The test apparatus of claim 1, wherein the pair of devices is included in one of opposite sides of the face bearing surface of the panel The first locating mechanism is disposed at a distance from one side of the spacing direction. 32. The testing device according to claim </ RTI> wherein the accommodating mechanism has a plurality of distances in the direction of the corresponding sides (four) a pressing member; the driving mechanism of the i-th thruster mechanism includes a driving source for displacing the pressing member in the X direction or the γ direction, and supporting the plurality of pressing members at intervals in the Y direction or the X direction. The support member of the drive source is supported by the rotation of the axis extending in the Z direction. 48