200911403 九、發明說明： 【發明所屬之技術領域】 田本發明係關於疊層片狀樹脂、金屬箔、CCl等材料 的豐層體隔著治具板而重疊複數個來形成的疊層體塊 件（block)之構成，且藉由熱壓接將多層基板成形之基 板成形沖壓裴置及方法。 【先前技術】 、夺近年來，對於貧訊處理裝置之基板開發，係利用將 預π材（prepreg )等細脂片、金屬箔（例如銅箔）、以 銅镇覆蓋單面或雙面之屬於樹脂板的ccl ( —per㈤ ϋ她）等材料疊層、熱壓接而形成❹層基板。多 二二反係不，可上下兩面’連基板内部均可進行配線， 11女裝t基板上之配線的數量。亦即，藉由使 造ί密度安裝元件的基板，亦可實現 以下製程㈣。 如料之多層基板係依 成電索藉t刻等t·法，在CCL的雙面的金屬箱形 二t thi CCL與金屬fl、CCL彼此及 /或金屬泊彼此之間失持有樹 CCL、樹脂片、金屬箔的疊屉且層有 熱壓接時：脂片會因熱反:發 於金屬泊或CCL。其結果形成多層基板。 此外，在製造前狀多層基^，為增加平均時間 ,基板製造片數’有時會使用如日本特開腫_12429〇 (曰本專利公開公報）所記·沖壓Μ。 不錄鋼薄板等治具板來重4複數 5 200911403 體塊件’利用沖壓裝置將該受層體塊件熱壓接。藉此， 能以一次沖壓即可使複數片多層基板成形。 【發明内容】 但在日本特開2002-124290所記载的沖壓裝置中， 亦有疊層體塊件的總高度達數十毫米的情形。將前述的 疊層體塊件進行熱壓接時，因熱傳導來充分加熱位於區 塊中心的樹腊片時會十分耗費時間，而造成減小基板製 /造片數提升的效果。此外，即使疊層體塊件整體達到加 ' 工溫度，亦可能在疊層體内部會產生殘留溫度不均（樹 脂片的硬度不均）。又，當在樹脂片硬度不均的狀態下 冲壓豐層體時，會有在多層基板發生續痕或者基板厚度 不均一的可能性發生。 本發明係為了解決前述問題而研創。亦即，本發明 的目的在提供一種可同時且在短時間内將多數的多層 基板予以成形的基板成形沖壓裝置及沖壓方法。 為了達成前述目的’以本發明之實施形態，提供一 ( 種，板成形沖壓裝置，係具有：構成部，堆疊透過治具 層有基板構成構件之疊層體而獲得疊層體塊件；沖 壓部，將疊層體塊件進行熱壓接；搬送手段，使疊層體 塊件由，成部移動至沖壓部；以及板加熱手段，在將治 具板與=層體堆疊之前，將治具板加熱至預定溫度。 述之構成於疊層體配置在沖壓部為止之期 間，$由治具板來預熱疊層體。此外，疊層體係藉由鄰 f的治具板予以預熱，因此至疊層體塊件之中心部為止 I均勻且充分地予以預熱。因此，可縮短在沖壓部之熱 壓接的時間。此外，根據本實施形態之構成，由於疊層 200911403 體塊，之中心部與上下兩端之間之溫度斜率變小，因此 在將ι層體熱壓接所得之多層基板較難以發生縐痕，而 獲得更均勻的基板厚度。 ，預定溫度被設定為高於常溫。若基板構成構 件2树脂材料為熱硬化性樹脂時，預定溫度係以未達反 應，1的溫度為佳。預定溫度最好相較於常溫下更接近 於樹，材料之反應溫度的未達反應溫度。此外，在此所 稱之樹脂材料的反應材料係指當在熱壓接前將樹脂材 - 料$所需時間保持在其溫度以下時，在無法獲得所希望 之製品品質之程度為止，在進行熱壓接前，樹脂材料之 反應或軟化等狀態變化進行的溫度。 又，板加熱手段構成亦可為：具有被加熱至預定溫 度以上之溫度的至少一個滾筒對，藉由使構成該滾筒對 的一對滾筒旋動，使被夾在一對滾筒的治具板一邊被加 熱一邊被擠出而被導入至構成部。若構成如上，可一邊 搬送治具板，—邊加熱，而可更加縮短多層基板的製造 時間。 ( 又，治具板亦可為例如不銹鋼、銘合金等金屬之 板。或者’治具板係 PEEK (Polyether ether ketone，聚 醚醚酮）、聚醯亞胺、聚醯胺醯亞胺等樹脂製的板。 此外，治具板及基板構成構件亦可構成為在被載置 於載板的狀態下’藉由搬送手段被搬入至沖壓部。例如 載板係不銹鋼、鋁合金等金屬製、或PEEK (p〇iyether ether ketone，聚醚醚酮）、聚醯亞胺、聚醯胺醯亞胺等 樹脂製的板。 如前述，根據本發明，可同時且在短時間内將多數 的多層基板予以成形。 200911403 【實施方式】 以下使用圖式’詳細說 圖係本實施形態之沖屢裝置塊。弟-本實施形態之沖壓裝置i佐目^圊―如弟一圖所示， CCL、預浸材片、銅箱之U :畜積f數個疊層有 (Stocker) 100;蓄積有福層體L的®層體蓄積件 板蓄積件勘;用 =交==，200911403 IX. Description of the Invention: [Technical Fields of the Invention] The present invention relates to a laminated body in which a plurality of layers of a laminated sheet resin, a metal foil, a CCl, and the like are stacked with a plurality of layers stacked with a jig plate. A structure of a block and a substrate forming press and method for forming a multilayer substrate by thermocompression bonding. [Prior Art] In recent years, for the development of substrates for the poor processing device, a fine grease sheet such as a prepreg, a metal foil (for example, a copper foil), and a copper or a double-sided cover are used. A material such as ccl (-per) which is a resin plate is laminated and thermocompression bonded to form a ruthenium substrate. No more than two or two, no upper and lower sides can be connected to the inside of the substrate, and the number of wiring on the 11 women's t-substrate. That is, the following process (4) can also be realized by making the substrate of the density-mounted component. If the multi-layer substrate is based on the t-method of the electric cable, the double-sided metal box-shaped two t thi CCL on the CCL and the metal fl, the CCL and/or the metal mooring between each other lose the tree CCL. When the resin sheet and the metal foil are stacked and the layer is thermocompression bonded, the fat sheet may be caused by heat: it is generated in metal pouring or CCL. As a result, a multilayer substrate is formed. In addition, in order to increase the average time, the number of sheets to be manufactured in the case of the production of the multi-layered substrate is sometimes used, for example, in Japanese Patent Laid-Open No. 12429. The fixture is not recorded, and the weight of the fixture is increased. 4 200911403 The bulk member is thermocompression bonded by the stamping device. Thereby, a plurality of multilayer substrates can be formed by one press. In the press apparatus described in Japanese Laid-Open Patent Publication No. 2002-124290, the total height of the laminated body pieces is several tens of millimeters. When the above-mentioned laminated body member is thermocompression bonded, it is very time consuming to sufficiently heat the tree wax sheet located at the center of the block due to heat conduction, resulting in an effect of reducing the number of substrate/sheets. Further, even if the entire laminated body member reaches the heating temperature, residual temperature unevenness (uneven hardness of the resin sheet) may occur inside the laminate. Further, when the layered body is pressed in a state in which the hardness of the resin sheet is uneven, there is a possibility that the multilayer substrate may be renewed or the thickness of the substrate may be uneven. The present invention has been made in order to solve the aforementioned problems. That is, an object of the present invention is to provide a substrate forming press apparatus and a press method which can form a plurality of multilayer substrates simultaneously and in a short time. In order to achieve the above object, in one embodiment of the present invention, there is provided a sheet forming press apparatus comprising: a constituent portion, a stacked laminated body having a substrate forming member through a jig layer; and a laminated bulk member; a part, the laminated body piece is thermocompression bonded; the conveying means moves the laminated body piece to the press part; and the plate heating means, before the jig plate and the = layer body are stacked, The plate is heated to a predetermined temperature. The laminated body is preheated by the jig plate during the period in which the laminate is placed in the press portion. Further, the laminated system is preheated by the jig plate of the adjacent f. Therefore, I can uniformly and sufficiently preheat the center portion of the laminated body piece. Therefore, the time for thermocompression bonding in the press portion can be shortened. Further, according to the configuration of the present embodiment, the block is laminated with 200911403 The temperature gradient between the center portion and the upper and lower ends becomes smaller, so that the multilayer substrate obtained by thermocompression bonding the ι layer body is less likely to be scarred, and a more uniform substrate thickness is obtained. The predetermined temperature is set to be high. At normal temperature. When the resin material of the plate constituent member 2 is a thermosetting resin, the predetermined temperature is not up to the reaction, and the temperature of 1 is preferred. The predetermined temperature is preferably closer to the tree than the normal temperature, and the reaction temperature of the material does not reach the reaction temperature. In addition, the term "reactive material of the resin material" as used herein means that the resin material-material is kept below its temperature before thermocompression bonding, and the desired product quality is not obtained. The temperature at which the reaction or softening of the resin material changes before the thermocompression bonding is performed. Further, the plate heating means may be configured to have at least one pair of rollers heated to a temperature higher than a predetermined temperature, by constituting the roller The pair of rollers are rotated, and the jig plate sandwiched between the pair of rollers is extruded while being heated and introduced into the constituent portion. If the configuration is as described above, the jig plate can be conveyed while being heated. The manufacturing time of the multilayer substrate can be further shortened. (Also, the fixture plate can also be a metal plate such as stainless steel or alloy, or 'PEEK (Polyether ether ketone, polyether ether) a plate made of a resin such as polyimine or polyamidimide. Further, the jig plate and the substrate constituent member may be configured to be carried by the transfer means while being placed on the carrier. The press part is, for example, a metal such as a carrier plate made of stainless steel or aluminum alloy, or a resin plate such as PEEK (p〇iyether ether ketone), polythenimine or polyamidimide. According to the present invention, a plurality of multilayer substrates can be formed simultaneously and in a short time. 200911403 [Embodiment] Hereinafter, a punching device block of the present embodiment will be described in detail with reference to the drawings. i【目目^圊―如弟一图, CCL, prepreg sheet, copper box U: several stocks of stocks f (Stocker) 100; reservoir layered accumulators with accumulated layer L Accumulation of parts; use ===,
之疊層體塊件B的構堆疊治具板J與疊層體L 予以組裝之疊層體塊件B 以構成部300 構成品蓄積件，的衫nm5GG;以及將 4〇〇。蓄& 曰體塊件B熱壓接的沖壓部 丄壯4畜積在構成〜積件5GG的疊層體塊件Β係先夢 ;?件（loafer) 600而被搬送至沖壓部4〇〇。接著‘ 冲坚部400對豐層體塊件b ~ ^ 個多#臭妬制口 P .浥灯…，坚按叶，即獲得複數 ,νί衣取後多層基板製品P藉由卸載件 (unbader) 9〇〇由沖壓部_被取出， 製程(例如將配線圖案形成在多層基板製品 ϊίί!銅箱面的處理）°此外’在治具板蓄積件200愈 300 ,間：置有用以加熱治具板】的治具板加熱 胺算純口具板1係由不_等金屬板或聚酿亞 胺等ί熱性树脂所形成之厚度數1〇〇微米程度的板。 在本？施形態之沖裝置i，治具板加熱部7〇〇係 由’口具板蓄積件200分別將治具板j—片一片拉出且加 溫度。此外’構成部由叠層體f積件‘ 口 f板加熱部700，分別將疊層體£與治具板了 一片 / 出且重豐’產生藉由治具板；將複數個疊層 體L相重豐而形成的疊層體塊件B。其中，疊層體塊件 8 200911403 B係以上下兩面形成為治具板；的方式所構成。 利用構成部300所產生的疊層體塊件Β係暫時被 ^構成品f積件，内。該構成品蓄積件500的内部 糸藉由力：:、…而被保溫在預定溫度，以使疊層體塊件B 不曰被冷卻接著，藉由裝載件600，將疊層體塊件β 係一個一個由構成品蓄積件500取出，而搬送至沖壓部 4〇〇OT的内。卩接著，沖壓部400係將疊層體塊件B在真 ，環境下可一邊一邊加熱一邊一邊施壓。藉此，含浸在 =層體L之預浸材片的熱硬化樹脂與鄰接的ccl或銅 ，甚至進行硬化。其結果能形成 及銅伯與預改材片相黏的複數個多層基板製品P。 ^著，該複數個多層基板製品P係藉由卸載件_由沖 被搬送至下游製程。其中，該等處理係 ，由沖難置1之控制器議對^具板蓄積件·、構 士部300、沖壓部400、構成品蓄積件5〇〇、襄載件働、 〜具板加熱部700及卸載件9〇〇進行控制來 、接著’說明構成部3〇〇及治具板加 : 成。第二圖係治具板加熱部7〇 ' 、 下側熱滾筒712所構成的上游側熱滾筒對;’二7 = 側熱滾筒721與下側熱滾筒722所構成 〇 ,及由亡 對720。上游側熱滾筒對71〇的上側埶滚^，熱滾同 熱滾筒712的旋轉軸呈水平且彼此平行=711及下侧 係朝垂直方向排列配置。下游側熱' 滾筒及下侧熱滾筒722之構成亦相〇 :上= 側熱滾筒對710與下游側熱滾筒對72〇係 = 度。其中，上游側熱滾筒對71。及下游侧熱= 9 200911403 積件細（第—圖）與構成部之 軛苦藉ί ”配置上游側熱滾筒71G位置相近於治具 f00畜積件，下游側熱滾筒對別位置相近於構成部 7η、ϋ，上相及下游側熱滾筒制各熱滾筒71卜 712 721、^係内設有圖未示的加熱器，熱滾筒711、 的預浸材樹脂的=!==構成疊層體L 度。在本實施形態中，由於 =':=附近具有硬化溫度的預_ : 皮加熱至約靴。其卜熱滾筒的加埶温 ^係可按照預浸材之材料特性或疊層體 ^ B =等而適當設定，而非被限定為i〇C牛 的加熱溫度亦可未高於預浸材之樹脂之玻璃轉 未示之_手段’上側熱滾 ί壓。係朝向相對應的下側熱滾筒712、722予以 =板蓄積件雇係具備圖未示之裝載件， 片一片拉出蓄積在治具板蓄積件雇内的治具板 送至治具板加熱部7〇〇。更呈體 傳 筒對-之熱，η與 搬送治具板J。 八攸』的方式， 制埶的前端到達上游側熱滾筒對川時，下 化、、滾同712、722朝圖中逆時鐘旋動。如 _滾筒爪、721係分別朝向下侧熱滾 以彈壓，因此藉由使下側熱滾筒712、722旋動，、人呈 板J係被夹入上游側熱滾筒對71〇的熱滾筒7ΐι與口爪 10 200911403 之間，且朝向下游側熱滾筒對720予以搬送。接著，當 治具板J的前端到達下游側熱滾筒對72〇時，治具板】 係被爽入下游側熱滾筒對72〇的熱滾筒721、722之間， 而更加被搬送，最後到達構成部300。 如則述’在本實施形態中，藉由熱滾筒711、712、 721 722 具板J可—邊被加熱，—邊被搬送至構成 部300。在此，治具板j由於為薄板，因此已通過治具 板加熱部700的治具板j係被加熱成與熱滾筒711、 712、721、722的表面溫度大致相同的預定溫度。 被搬送至構成部300的治具板j係被載置在載板c 之上，该載板C係被載置於構成部3〇〇的滾轴輸送機 (Roller Conveyer) 310之上。此外，構成部3⑻係具 備有取出被蓄積在疊層體蓄積件1〇〇 (第—圖）的疊^ 體L且傳送至構成部300之圖未不之裝載件。控制8〇〇 (第一圖）係控制治具板蓄積件200的裝載件、上游側 熱滾筒對710、720及構成部300的裝載件，交替重疊 治具板J與疊層體L。接著’在載置預定數（例如1〇^ 的疊層體L之後，在最上段的疊層體L之上重疊治具板 J。以此方式形成在一對治具板J之間交替疊合叠層體L 的疊層體塊件B。接著，控制器800係控制裳^ 6〇〇 (第一圖）而將載板C及其上的疊層體塊件β搬送至、冲 壓部400 (第一圖）内。其中’載板C係由不銹鋼或财 熱性樹脂（聚醯亞胺等）所構成的薄板。 以下說明本實施形態之沖壓部400的構成。第三圖 係本實施形態之沖壓部400的側視圖。沖壓部4〇〇 有：沖壓框體403 ;上部熱板部410 ;下部熱板部42〇~· 及汽缸部430。沖壓框體403係被剛體支持於其座部 11 200911403 4〇3b之上。下部熱板部42〇之固定模板42ι係被 冲壓框體403的基座部4〇3b上。此外，上部熱板 的冠套模板411係透過汽缸部430而由沖壓框體 頂棚部403a懸掛。 汽缸部43G係具有：汽缸431 ;可—邊與汽缸431 的内壁滑動，-邊上下移動的活塞432;以及由活塞似 =面中央部以垂直向下地延伸出去所形成的轴奶。 在夂缸431的下面中央部分設有貫穿孔43U，軸4 Ik著活塞432的上下移動而一邊與貫穿孔431&滑動一邊 ^下移動。上部熱板部410的冠套模板411係 軸433的下端。 &你 汽缸431的空洞部434係藉由活塞432而 J^^U)434a a^-；^KT)434b〇 及空洞部⑺434b係分別充滿液壓油。此外，該空)洞部 ()434a及空洞部（下）434b係與圖未示的油壓泵相 :。油壓泵係與控制器800 (第—圖）相連接，控制器 立係驅動油壓泵而使被注入於空洞部（上）434a及*洞 ί(，下ιΓΓ二之各個的液壓油的一方加壓而對另；減 控制由地使活塞432上下移動。因此，藉由使 °° 800控制油壓泵，可使上部熱板部410上下移動。The laminated body piece B in which the laminated body piece B is stacked and the laminated body L is assembled is formed by the constituent part 300, and the shirt nm5GG; and 4〇〇. The stamping portion of the thermal block of the block body and the block B is sturdy and the 4 pieces are stacked on the laminated body member constituting the piece 5GG. The piece is transported to the press unit 4 by the loafer 600. Hey. Then 'Chongjian 400 pairs of thick layer block pieces b ~ ^ more than # 妒 妒 mouth P. 浥 light ..., firmly press the leaf, that is to obtain the plural, νί clothes after the multilayer substrate product P by unloading parts (unbader 9〇〇 is taken out by the stamping unit _, the process (for example, the wiring pattern is formed on the multilayer substrate product ϊίί! copper box surface) ° In addition, the more than 300 in the fixture board storage unit 200, between: useful for heat treatment The fixture plate with the plate is heated to a pure plate. The plate 1 is a plate having a thickness of about 1 μm formed by a heat-resistant resin such as a metal plate or a poly-imine. In this? The punching device i, the jig plate heating unit 7 is pulled out of the jig plate j piece by the 'mouth plate accumulating member 200, and the temperature is increased. In addition, the 'composition part is formed by the laminate f-pieces' and the plate heating unit 700, and the laminates and the fixtures are respectively formed one piece/out and the weight is generated by the jig plate; the plurality of laminates are formed The laminated body piece B formed by the L phase is heavy. Among them, the laminated body member 8 200911403 B is formed by a method in which the lower two faces are formed as a jig plate. The laminated body piece produced by the constituent portion 300 is temporarily formed into a product of the product f. The inner portion of the constituent accumulator 500 is held at a predetermined temperature by a force::, ... so that the laminated block member B is not cooled, and then the stacked member block β is held by the loading member 600. One by one is taken out by the component storage member 500, and is conveyed to the inside of the press part 4〇〇OT. Next, the press part 400 presses the laminated bulk piece B while being heated in the environment and in the environment. Thereby, the thermosetting resin impregnated with the prepreg sheet of the layer body L and the adjacent ccl or copper are even hardened. As a result, a plurality of multilayer substrate products P which are bonded to the copper and the pre-modified sheets can be formed. The plurality of multilayer substrate products P are transported to the downstream process by the unloading member. Among these processes, the controller of the Difficulty Set 1 is responsible for the heating of the board, the member 300, the press unit 400, the component stack 5, the load member, and the plate heating. The portion 700 and the unloading member 9 are controlled, and then the components 3 and the jig are added. The second figure is the upstream side heat roller pair formed by the fixture plate heating portion 7'' and the lower side heat roller 712; '2 7 = the side heat roller 721 and the lower side heat roller 722 constitute the 〇, and the dead pair 720 . The upstream side heat roller rolls the upper side of the 71 〇, and the hot roll is horizontal with the rotation axis of the heat roller 712 and is parallel to each other = 711 and the lower side are arranged in the vertical direction. The composition of the downstream side heat 'roller and the lower side heat roller 722 is also opposite: the upper = side heat roller pair 710 and the downstream side heat roller pair 72 are 度 degrees. Among them, the upstream side heat roller pair 71. And the downstream side heat = 9 200911403 The integrated part is fine (first) and the yoke of the component is ί ” ” The upstream side hot roller 71G is disposed close to the fixture f00, and the downstream side heat roller is adjacent to the other position. Each of the heat-reducing rollers 71, 712, 721, 472, 721, and the lower side of the hot-rolling drum are provided with a heater (not shown), and the hot-rolling drum 711, the prepreg resin ==== constitutes a laminate In the present embodiment, since the pre-_:=========================================================================================== The body ^ B = equal and appropriate setting, rather than being limited to the heating temperature of the i〇C cow may not be higher than the glass of the resin of the prepreg, the means of the upper side of the hot rolling pressure. The lower side heat rollers 712 and 722 are provided with a plate storage unit having a load member (not shown), and the piece is pulled out and accumulated in the fixture plate assembly to be sent to the heating plate of the jig plate. The more the body is the heat of the tube, the η and the transport jig plate J. The way of the gossip, the front end of the smashing reaches the upstream side hot roll When the tube is in the middle of the tube, the lowering, and the same as 712, 722 are rotated counterclockwise in the figure. If the drum claws and the 721 series are respectively rolled toward the lower side to be elastically pressed, the lower side heat rollers 712 and 722 are rotated. The moving plate is sandwiched between the hot roller 7ΐ of the upstream side heat roller pair 71〇 and the mouth claw 10 200911403, and is conveyed toward the downstream side heat roller pair 720. Next, when the front end of the jig plate J is moved When the pair of downstream heat roller pairs 72 到达 is reached, the jig plate is cooled between the heat rollers 721 and 722 of the downstream side heat roller pair 72 ,, and is further conveyed, and finally reaches the constituent portion 300. In the present embodiment, the heat rollers 711, 712, and 721 722 are heated while being heated, and are conveyed to the component 300. Here, since the jig j is a thin plate, the jig plate has passed through the jig plate. The jig j of the heating unit 700 is heated to a predetermined temperature substantially the same as the surface temperatures of the heat rollers 711, 712, 721, and 722. The jig j that is transported to the component 300 is placed on the carrier c Above, the carrier C is placed on the roller conveyor (Roller Conveyer) 310 of the component 3〇〇 In addition, the component 3 (8) is provided with a carrier that takes out the stack L accumulated in the stacked body stack 1 (Fig. 1) and transports it to the component 300. The control is 8 ( The first figure is a loading member for controlling the jig plate accumulating member 200, the upstream side heat roller pair 710, 720, and the loading portion of the constituent portion 300, and the jig plate J and the laminated body L are alternately overlapped. After the number L (for example, the laminated body L of 1 〇 ^, the jig J is superposed on the uppermost laminated body L. In this way, the laminated body L is alternately laminated between the pair of jigs J. Laminate block B. Next, the controller 800 controls the carrier C and the laminated body piece β thereon to be transported into the pressing portion 400 (first drawing) by controlling the skirt (Fig. 1). The carrier C is a thin plate made of stainless steel or a heat-sensitive resin (polyimine or the like). The configuration of the press unit 400 of the present embodiment will be described below. Fig. 3 is a side view of the press portion 400 of the present embodiment. The press portion 4A includes a press frame 403, an upper hot plate portion 410, a lower hot plate portion 42A and a cylinder portion 430. The press frame 403 is supported by the rigid body above the seat portion 11 200911403 4〇3b. The fixed template 42 of the lower hot plate portion 42 is pressed onto the base portion 4〇3b of the frame 403. Further, the crown template 411 of the upper hot plate is suspended from the punched frame ceiling portion 403a through the cylinder portion 430. The cylinder portion 43G has a cylinder 431, a piston 432 which is slidable with the inner wall of the cylinder 431, and moves up and down, and a shaft milk which is formed by extending the piston from the center of the piston. A through hole 43U is formed in a central portion of the lower surface of the cylinder 431. The shaft 4 Ik moves up and down with the piston 432 and moves downward with the through hole 431 & The crown template 411 of the upper hot plate portion 410 is the lower end of the shaft 433. & The hollow portion 434 of the cylinder 431 is filled with hydraulic oil by the piston 432 and the 434a a^-; ^KT) 434b 〇 and the hollow portion (7) 434b, respectively. Further, the hollow portion () portion 434a and the hollow portion (lower portion) 434b are connected to a hydraulic pump (not shown). The hydraulic pump system is connected to the controller 800 (Fig.), and the controller directly drives the hydraulic pump to be injected into the hollow portion (upper) 434a and the *hole ί (the lower hydraulic oil of each of the two) One of the pressures is pressed against the other, and the lowering control causes the piston 432 to move up and down. Therefore, by controlling the hydraulic pump by the temperature of 800, the upper hot plate portion 410 can be moved up and down.
上部熱板部41〇的上部熱板412係透過隔熱 U ，固定於冠套模板411的下面。同樣地，下部妖板部 的下部熱板422係透過隔熱材423被固定於平台模 ^421的上面。上部熱板412及下部熱板422係藉:圖 ^不的加熱手段，被加熱至疊層體L之預浸材之反應溫 度以上的溫度。 沖壓框體403係覆蓋上部熱板部41〇、下部熱板部 200911403 420及汽缸部430。此外，在沖壓框體403的一侧面（圖 中右侧）設有開口 403c，裝載件600 (第一圖）係可透 過該開口 403c，使載板C及其上的疊層體塊件B載置 於下部熱板422之上。此外，沖壓部400係具有用以覆 蓋開口 403c的開閉扉442。如圖所示，開閉扉442之構 成：位於開口 403c更下方且可搬送載板C及疊層體塊 件B的第一位置（圖中實線部）、與覆蓋開口 403c之第 二位置（圖中虛線部）之間滑動。 同樣地，在沖壓框體403的另一方的側面（圖中左 側）設有開口 403d，卸載件900 (第一圖）係可透過該 開口 403d而將載板C及其上之疊層體塊件B由下部熱 板422之上取出。此外，沖壓部400係具有用以覆蓋開 口 403d的開閉扉444。如圖所示，開閉扉444係構成為 可在：位於開口部403d更為下方且可搬送載板C及疊 層體塊件B的第一位置（圖中實線部）、與覆蓋開口 403d 之第二位置（圖中虛線部）之間滑動。 在開閉扉442及開閉扉444的内側設有圖未示的墊 , 片，當開閉扉442及開閉扉444位於第二位置時，位於 沖壓框體403之内部的上部熱板部410、下部熱板部420 及汽缸部430係自外部空氣予以密閉。 沖壓部400係具有圖未示的真空泵，控制器800係 在開閉扉442及開閉扉444分別覆蓋開口 403c及403d 的狀態下驅動真空泵，藉此可將沖壓框體403的内部進 行真空抽吸。 在下部熱板422之上配置有載板C及疊層體塊件B 的狀態下，驅動油壓泵使上部熱板部410朝下方驅動， 藉此可將疊層體塊件B夾在上部熱板412與下部熱板 13 200911403 422之間而進行熱壓接。其中，在進行熱壓接時，預先 控制開閉扉442、444及真空泵而將沖壓框體403的内 部保持為真空。 如前述，在本實施形態中，由於對於將複數個疊層 體L藉由治具板J對於上下方向相重疊的疊層體塊件B 進行沖壓，因此以一次的沖壓動作來將複數個多層基板 製品P (第一圖）予以成形。此外，如前所述，在治具 板J被加熱的狀態下而構成疊層體塊件B，因此在疊層 體塊件B被搬送至沖壓部400的時間點，藉由治具板J ： 而使各疊層體L之預浸材的樹脂大致軟化成均一。因 此，可藉由沖壓部400，在短時間内將疊層體塊件B之 各疊層體L之預浸材的樹脂與銅箔或CCL接著。 此外，第三圖所示之沖壓部400係冠套模板411， 透過汽缸部430而在頂棚部403a予以懸掛，藉由汽缸部 430而使冠套模板411及固定在該冠套模板411的上部 熱板412上下驅動。但亦可將此構成為上下相反。亦即， 亦可構成為：在平台模板421與基座部403b之間配置 汽缸部，藉由汽缸，使平台模板421及固定在該平台模 板421的下部熱板部422將疊層體L載置於其上的情況 下直接驅動。 以上，以實施本發明之較佳形態來說明本發明。本 發明之範圍係僅依申請專利範圍予以限定，而非限定前 述之實施形態是理所當然。此外，本發明之實施形態之 實際裝置並不完全表示於本案之圖示或具備說明書所 記載之所有特徵。此外，在此所示之方法及裝置之變形 例係僅限於在本申請專利範圍本發明的範圍内。此外， 本發明係依不同情形，主要說明方法，但本發明之範圍 14 200911403 係以執行該方法的方式執行程式化之裝置，例如專用電 路、硬體、韌體及/或軟體（包含記錄相關軟體的電腦 讀取之媒體）。此外，實施形態之特徵亦可連同本發明 之其他實施形態的特徵一起提供。其中，在此所使用之 用語「有」、「具有」、「包含」、「具備」係意指「包含〜， 但不限定於此」。 【圖式簡單說明】 第一圖係本發明之實施形態之沖壓裝置的方塊圖。 { 第二圖係表示本發明之實施形態之沖壓裝置的構 成部與治具板加熱部的側視圖。 第三圖係表示本發明之實施形態之沖壓裝置之沖 壓部的側視圖。 【主要元件符號說明】 1 沖壓裝置 411 冠套模板 100 疊層體蓄積件 412 上部熱板 200 治具板蓄積件 413 隔熱材 300 構成部. 420 下部熱板部 310 滾軸輸送機 421 固定模板 400 沖壓部 422 下部熱板 403 沖壓框體 423 隔熱材 403a 頂棚部 430 汽缸部 403b 基座部 431 汽缸 403c 開口 431a 貫穿孔 403d 開口 432 活塞 410 上部熱板部 433 軸 15 200911403 434 空洞部 720 434a 空洞部（上） 721 434b 空洞部（下） 722 442 開閉扉 800 444 開閉扉 900 500 構成品蓄積件 B 600 裝載件 C 700 治具板加熱部 J 710 上游側熱滚筒對 L 711 上側熱滾筒 P 712 下侧熱滾筒 下游側熱滚筒對 上侧熱滾筒 下側熱滾筒 控制器 卸載件 疊層體塊件 載板 治具板 疊層體 多層基板製品 16The upper hot plate 412 of the upper hot plate portion 41 is transmitted through the heat insulating U and fixed to the lower surface of the crown template 411. Similarly, the lower hot plate 422 of the lower monster portion is fixed to the upper surface of the platform mold 421 through the heat insulating material 423. The upper hot plate 412 and the lower hot plate 422 are heated to a temperature higher than the reaction temperature of the prepreg of the laminate L by a heating means. The press frame 403 covers the upper hot plate portion 41, the lower hot plate portion 200911403 420, and the cylinder portion 430. In addition, an opening 403c is provided on one side (the right side in the drawing) of the stamping frame 403, and the loading member 600 (first drawing) is permeable to the opening 403c, so that the carrier C and the laminated body piece B thereon It is placed on the lower hot plate 422. Further, the press portion 400 has an opening and closing opening 442 for covering the opening 403c. As shown in the figure, the opening and closing 扉 442 is configured to be located at a lower position (the solid line portion in the drawing) of the carrier C and the laminated body member B located below the opening 403c and at a second position covering the opening 403c ( Slide between the dotted lines in the figure. Similarly, an opening 403d is provided on the other side (the left side in the drawing) of the stamping frame 403, and the unloading member 900 (first drawing) can pass the carrier C and the laminated body block thereon through the opening 403d. The piece B is taken out from the lower hot plate 422. Further, the press portion 400 has an opening and closing port 444 for covering the opening 403d. As shown in the figure, the opening and closing 扉 444 is configured such that a first position (solid line portion in the drawing) and a covering opening 403d at a position lower than the opening 403d and capable of transporting the carrier C and the laminated body block B are provided. The second position (the dotted line in the figure) slides between. A pad (not shown) is provided inside the opening and closing jaw 442 and the opening and closing jaw 444. When the opening and closing jaw 442 and the opening and closing jaw 444 are at the second position, the upper hot plate portion 410 and the lower portion of the heat are located inside the stamping frame body 403. The plate portion 420 and the cylinder portion 430 are sealed from the outside air. The press unit 400 has a vacuum pump (not shown), and the controller 800 drives the vacuum pump in a state where the opening and closing ports 442 and the opening and closing ports 444 cover the openings 403c and 403d, respectively, whereby the inside of the press frame 403 can be vacuumed. In a state in which the carrier C and the laminated bulk member B are disposed on the lower hot plate 422, the hydraulic pump is driven to drive the upper hot plate portion 410 downward, whereby the laminated bulk member B can be sandwiched The hot plate 412 and the lower hot plate 13 200911403 422 are thermocompression bonded. Here, in the case of thermocompression bonding, the opening and closing ports 442, 444 and the vacuum pump are controlled in advance to maintain the inner portion of the press frame 403 in a vacuum. As described above, in the present embodiment, since the multilayer block B in which a plurality of stacked bodies L are overlapped in the vertical direction by the jig J is pressed, a plurality of layers are punched by one press operation. The substrate product P (first image) is formed. Further, as described above, since the laminated body piece B is formed in a state in which the jig sheet J is heated, the jig plate J is conveyed by the jig plate J at the time when the laminated body piece B is conveyed to the press part 400. : The resin of the prepreg of each of the laminates L is substantially softened to be uniform. Therefore, the resin of the prepreg of each of the laminates L of the multilayer block B can be bonded to the copper foil or CCL in a short time by the press portion 400. Further, the stamping portion 400 shown in FIG. 3 is a crown template 411 which is suspended in the ceiling portion 403a through the cylinder portion 430, and the crown template 411 and the upper portion of the crown template 411 are fixed by the cylinder portion 430. The hot plate 412 is driven up and down. However, this can also be configured to be upside down. In other words, the cylinder portion may be disposed between the platform template 421 and the base portion 403b, and the platform template 421 and the lower hot plate portion 422 fixed to the platform template 421 may be used to carry the laminate L. Drive directly on top of it. The invention has been described above by way of a preferred embodiment of the invention. The scope of the present invention is limited only by the scope of the patent application, and the invention is not limited to the embodiments described above. Further, the actual device of the embodiment of the present invention is not fully shown in the drawings or has all the features described in the specification. Further, variations of the methods and apparatus shown herein are intended to be within the scope of the present invention. In addition, the present invention mainly describes the method according to different situations, but the scope of the present invention 14 200911403 is a device that performs stylization in the manner of executing the method, such as dedicated circuit, hardware, firmware, and/or software (including record correlation). Software computer read media). Furthermore, the features of the embodiments may be provided in conjunction with the features of other embodiments of the invention. The terms "having", "having", "including" and "having" as used herein mean "including ~, but not limited to". BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a block diagram of a press apparatus according to an embodiment of the present invention. { Fig. 2 is a side view showing a configuration portion of a press device and a jig plate heating portion according to an embodiment of the present invention. Fig. 3 is a side view showing a pressing portion of a press apparatus according to an embodiment of the present invention. [Description of main component symbols] 1 Stamping device 411 Crown template 100 Laminated body accumulation member 412 Upper hot plate 200 Fixture plate accumulator 413 Heat insulating material 300 Component. 420 Lower hot plate portion 310 Roller conveyor 421 Fixed template 400 stamping portion 422 lower hot plate 403 stamping frame 423 heat insulating material 403a ceiling portion 430 cylinder portion 403b base portion 431 cylinder 403c opening 431a through hole 403d opening 432 piston 410 upper hot plate portion 433 shaft 15 200911403 434 hollow portion 720 434a Cavity (top) 721 434b Cavity (bottom) 722 442 Opening and closing 扉800 444 Opening and closing 扉900 500 Component accumulation unit B 600 Loading member C 700 Fixing plate heating unit J 710 Upstream side heat roller pair L 711 Upper side heat roller P 712 lower side heat roller downstream side heat roller pair upper side heat roller lower side heat roller controller unloading member laminated body piece carrier plate fixture plate laminate body multilayer substrate product 16