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TW200741032A - Method for fabricating film-formed body by aerosol deposition - Google Patents

Method for fabricating film-formed body by aerosol deposition

Info

Publication number
TW200741032A
TW200741032A TW096108518A TW96108518A TW200741032A TW 200741032 A TW200741032 A TW 200741032A TW 096108518 A TW096108518 A TW 096108518A TW 96108518 A TW96108518 A TW 96108518A TW 200741032 A TW200741032 A TW 200741032A
Authority
TW
Taiwan
Prior art keywords
formed body
film
fabricating
aerosol deposition
deposition
Prior art date
Application number
TW096108518A
Other languages
Chinese (zh)
Inventor
Michiyori Miura
Seiichi Yokoyama
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of TW200741032A publication Critical patent/TW200741032A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/214—Al2O3
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/17—Deposition methods from a solid phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/328—Partly or completely removing a coating
    • C03C2218/33—Partly or completely removing a coating by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

There is provided a method for stably fabricating a film-formed body having a film thickness exceeding 30 μm by aerosol deposition. The incident angle of raw material microparticles sprayed from a nozzle on a deposition substrate is changed, thereby fabricating the film-formed body while adjusting the balance between etching and deposition of the film.
TW096108518A 2006-03-13 2007-03-13 Method for fabricating film-formed body by aerosol deposition TW200741032A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006068420A JP2009132944A (en) 2006-03-13 2006-03-13 Method for forming film-deposited body by aerosol deposition method

Publications (1)

Publication Number Publication Date
TW200741032A true TW200741032A (en) 2007-11-01

Family

ID=38509495

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096108518A TW200741032A (en) 2006-03-13 2007-03-13 Method for fabricating film-formed body by aerosol deposition

Country Status (3)

Country Link
JP (1) JP2009132944A (en)
TW (1) TW200741032A (en)
WO (1) WO2007105674A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5914348B2 (en) 2010-11-02 2016-05-11 日本碍子株式会社 Crystal manufacturing method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3265481B2 (en) * 1999-04-23 2002-03-11 独立行政法人産業技術総合研究所 Low temperature molding of brittle material ultrafine particles
JP3740523B2 (en) * 1999-05-21 2006-02-01 独立行政法人産業技術総合研究所 Ultrafine particle material flattening method
JP4075745B2 (en) * 2003-09-02 2008-04-16 Ｔｏｔｏ株式会社 Composite structure manufacturing equipment

Also Published As

Publication number Publication date
WO2007105674A1 (en) 2007-09-20
JP2009132944A (en) 2009-06-18

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