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TW200745895A - Method and system for virtual metrology prediction and prediction model building in semiconductor manufacture - Google Patents

Method and system for virtual metrology prediction and prediction model building in semiconductor manufacture

Info

Publication number
TW200745895A
TW200745895A TW095120163A TW95120163A TW200745895A TW 200745895 A TW200745895 A TW 200745895A TW 095120163 A TW095120163 A TW 095120163A TW 95120163 A TW95120163 A TW 95120163A TW 200745895 A TW200745895 A TW 200745895A
Authority
TW
Taiwan
Prior art keywords
data
prediction
virtual metrology
prediction model
semiconductor manufacture
Prior art date
Application number
TW095120163A
Other languages
Chinese (zh)
Inventor
Hung-En Tai
Haw-Jyue Luo
Original Assignee
Powerchip Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Powerchip Semiconductor Corp filed Critical Powerchip Semiconductor Corp
Priority to TW095120163A priority Critical patent/TW200745895A/en
Publication of TW200745895A publication Critical patent/TW200745895A/en

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A method for virtual metrology prediction in semiconductor manufacture. A plurality of SVIDs are selected according to processes to be fault detection and classification (FDC) data and quality control (QC) data is collected. It is determined whether the QC data satisfy the standard. If not, the FDC data and QC data are re-collected or the sampling rate is tuned. If so, a data process operation is executed to the FDC data and the QC data. An optimum prediction model is selected according to a relation index, is verified, and is tuned. When the tuning is complete, the optimum prediction model is transferred to a virtual metrology engine.
TW095120163A 2006-06-07 2006-06-07 Method and system for virtual metrology prediction and prediction model building in semiconductor manufacture TW200745895A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095120163A TW200745895A (en) 2006-06-07 2006-06-07 Method and system for virtual metrology prediction and prediction model building in semiconductor manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095120163A TW200745895A (en) 2006-06-07 2006-06-07 Method and system for virtual metrology prediction and prediction model building in semiconductor manufacture

Publications (1)

Publication Number Publication Date
TW200745895A true TW200745895A (en) 2007-12-16

Family

ID=57914553

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095120163A TW200745895A (en) 2006-06-07 2006-06-07 Method and system for virtual metrology prediction and prediction model building in semiconductor manufacture

Country Status (1)

Country Link
TW (1) TW200745895A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8095484B2 (en) 2008-05-20 2012-01-10 National Cheng Kung University System and method for automatic virtual metrology
TWI407325B (en) * 2010-05-17 2013-09-01 Nat Univ Tsing Hua Process quality predicting system and method thereof
US9829415B2 (en) 2014-03-26 2017-11-28 National Cheng Kung University Metrology sampling method and computer program product thereof
CN112824975A (en) * 2019-11-21 2021-05-21 南亚科技股份有限公司 Advanced process control system
TWI778473B (en) * 2020-05-29 2022-09-21 大陸商上海商湯智能科技有限公司 Artificial intelligence chip verification systems and methods, devices and storage media

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8095484B2 (en) 2008-05-20 2012-01-10 National Cheng Kung University System and method for automatic virtual metrology
TWI407325B (en) * 2010-05-17 2013-09-01 Nat Univ Tsing Hua Process quality predicting system and method thereof
US9829415B2 (en) 2014-03-26 2017-11-28 National Cheng Kung University Metrology sampling method and computer program product thereof
CN112824975A (en) * 2019-11-21 2021-05-21 南亚科技股份有限公司 Advanced process control system
CN112824975B (en) * 2019-11-21 2022-09-13 南亚科技股份有限公司 Advanced process control system
US11551954B2 (en) 2019-11-21 2023-01-10 Nanya Technology Corporation Advanced process control system
TWI778473B (en) * 2020-05-29 2022-09-21 大陸商上海商湯智能科技有限公司 Artificial intelligence chip verification systems and methods, devices and storage media

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