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TW200724467A - Hand of robot and work carrying robot using it - Google Patents

Hand of robot and work carrying robot using it

Info

Publication number
TW200724467A
TW200724467A TW095133100A TW95133100A TW200724467A TW 200724467 A TW200724467 A TW 200724467A TW 095133100 A TW095133100 A TW 095133100A TW 95133100 A TW95133100 A TW 95133100A TW 200724467 A TW200724467 A TW 200724467A
Authority
TW
Taiwan
Prior art keywords
hand
robot
work
placing
medium
Prior art date
Application number
TW095133100A
Other languages
Chinese (zh)
Other versions
TWI381986B (en
Inventor
Yasunori Takeuchi
Takayuki Yazawa
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of TW200724467A publication Critical patent/TW200724467A/en
Application granted granted Critical
Publication of TWI381986B publication Critical patent/TWI381986B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0054—Cooling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G61/00—Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

To provide a hand which is capable of being efficiently and uniformly cooled when a work such as a glass substrate treated under a high temperature environment is carried and which has a lightweight structure in comparison with a conventional hand, and to provide a work carrying robot using the hand. The hand includes a placing part 11 for placing a work thereon which is isolated from the outside and formed in a shape having a hollow part 11a, a medium introducing pipe 15 for introducing a cooling medium into the hollow part 11a on one end side of the placing part 11, and a medium exhaust port 17 for exhausting the cooling medium from the hollow part 11a on another end side of the placing part 11.
TW095133100A 2005-09-29 2006-09-07 Hand of robot and work carrying robot using it TWI381986B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005285510A JP4731267B2 (en) 2005-09-29 2005-09-29 Robot hand and workpiece transfer robot using the same

Publications (2)

Publication Number Publication Date
TW200724467A true TW200724467A (en) 2007-07-01
TWI381986B TWI381986B (en) 2013-01-11

Family

ID=37958336

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095133100A TWI381986B (en) 2005-09-29 2006-09-07 Hand of robot and work carrying robot using it

Country Status (4)

Country Link
JP (1) JP4731267B2 (en)
KR (1) KR101333993B1 (en)
CN (1) CN1939675B (en)
TW (1) TWI381986B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI453100B (en) * 2010-01-11 2014-09-21 Hon Hai Prec Ind Co Ltd Manipulator structure
TWI583516B (en) * 2013-01-07 2017-05-21 Nidec Sankyo Corp Industrial robots

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* Cited by examiner, † Cited by third party
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KR20090070521A (en) * 2007-12-27 2009-07-01 오에프티 주식회사 Transfer robot for spinner system, transport hand thereof and vacuum supply apparatus thereof
KR101243317B1 (en) * 2010-05-31 2013-03-13 주식회사 테라세미콘 Apparatus For Transferring Substrate
CN104647363B (en) * 2010-07-14 2016-04-20 日本电产三协株式会社 The control method of industrial robot, industrial robot and the indicating means of industrial robot
JP5266507B2 (en) * 2011-02-28 2013-08-21 アキム株式会社 Parts conveyor
WO2013073379A1 (en) * 2011-11-16 2013-05-23 日本電産サンキョー株式会社 Industrial robot
JP5959221B2 (en) * 2011-11-16 2016-08-02 日本電産サンキョー株式会社 Industrial robot
JP5609856B2 (en) * 2011-12-20 2014-10-22 株式会社安川電機 Transfer robot
JP5609857B2 (en) * 2011-12-20 2014-10-22 株式会社安川電機 Transfer robot
CN102774652A (en) * 2012-07-31 2012-11-14 深圳市华星光电技术有限公司 Supporting arm of LCD (liquid crystal display) panel handling device
US20140265394A1 (en) * 2013-03-13 2014-09-18 Varian Semiconductor Equipment Associates, Inc. Composite end effectors
US9589825B2 (en) 2014-09-10 2017-03-07 Shenzhen China Star Optoelectronics Technology Co., Ltd Glass substrate transfer system and robot arm thereof
CN104386489B (en) * 2014-09-10 2016-06-08 深圳市华星光电技术有限公司 Glass substrate transmission system and mechanical hand thereof
CN104210844B (en) * 2014-09-10 2016-11-02 深圳市华星光电技术有限公司 Glass substrate transmission system and mechanical hand thereof
CN106915099A (en) * 2015-12-28 2017-07-04 明安国际企业股份有限公司 Flat panel workpieces support meanss and its manufacture method
CN106915101B (en) * 2015-12-28 2019-01-18 明安国际企业股份有限公司 Flat panel workpieces support device and its manufacturing method
CN106915100A (en) * 2015-12-28 2017-07-04 明安国际企业股份有限公司 Flat panel workpieces support meanss and its manufacture method
JP6783459B2 (en) * 2016-10-11 2020-11-11 株式会社レクザム Work transfer robot
JP6862233B2 (en) * 2017-03-27 2021-04-21 日本電産サンキョー株式会社 Industrial robot
CN107186745B (en) * 2017-06-06 2020-03-27 惠科股份有限公司 Vacuum adsorption structure and manipulator device
JP6869136B2 (en) * 2017-07-28 2021-05-12 日本電産サンキョー株式会社 Industrial robot
CN107263547A (en) * 2017-08-10 2017-10-20 北京中科通用能源环保有限责任公司 Manipulator distributing device
JP7048281B2 (en) * 2017-12-01 2022-04-05 株式会社Subaru Robot hand
JP7117143B2 (en) * 2018-05-01 2022-08-12 東京エレクトロン株式会社 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND COMPUTER-READABLE RECORDING MEDIUM
KR102505762B1 (en) * 2018-09-10 2023-03-06 카와사키 주코교 카부시키 카이샤 robot
CN110919695B (en) * 2019-11-29 2021-04-02 Tcl华星光电技术有限公司 Mechanical arm

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JPS63162187A (en) * 1986-12-25 1988-07-05 三菱電機株式会社 Dusttight type industrial robot device
JPH04286143A (en) * 1991-03-14 1992-10-12 Hitachi Ltd Wafer treatment equipment
JPH04372390A (en) * 1991-06-14 1992-12-25 Shin Meiwa Ind Co Ltd Industrial robot device for vacuum chamber
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JPH0786374A (en) * 1993-09-16 1995-03-31 Dainippon Screen Mfg Co Ltd Substrate transfer equipment
JP3376678B2 (en) * 1994-03-11 2003-02-10 株式会社安川電機 Cooling structure of articulated industrial robot
CN2223078Y (en) * 1995-06-07 1996-03-27 吴大怡 Hollow water filling series low-speed hand bone drill bit
KR100219857B1 (en) * 1995-12-29 1999-09-01 정몽규 Spot gun cooling device of spot welding machine
WO2001006442A2 (en) * 1999-07-20 2001-01-25 Alvin Wai Lun Yip Carrier tray for integrated circuits such as microprocessors
JP4346765B2 (en) * 2000-01-04 2009-10-21 株式会社アルバック Substrate transfer robot
JP2002210690A (en) * 2001-01-12 2002-07-30 Imai Seisakusho:Kk Cooling device of robot hand in high temperature heat treatment chamber
JP3632841B2 (en) * 2001-03-29 2005-03-23 新日本石油株式会社 Manufacturing method of robot hand member
JP2002346965A (en) * 2001-05-23 2002-12-04 Assist Japan Kk Cooling hand in robot
JP2003007795A (en) * 2001-06-19 2003-01-10 Tokyo Electron Ltd Substrate treatment device
JP2003060004A (en) * 2001-08-20 2003-02-28 Yaskawa Electric Corp Robot hand
KR100482561B1 (en) * 2002-06-26 2005-04-14 현대자동차주식회사 Welding gun device for a spot welding robot system
KR20040038783A (en) * 2002-10-30 2004-05-08 가부시기가이샤 산교세이기 세이사꾸쇼 Industrial robot
JP2005230941A (en) * 2004-02-18 2005-09-02 Sankyo Seiki Mfg Co Ltd Robot for conveying glass substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI453100B (en) * 2010-01-11 2014-09-21 Hon Hai Prec Ind Co Ltd Manipulator structure
TWI583516B (en) * 2013-01-07 2017-05-21 Nidec Sankyo Corp Industrial robots

Also Published As

Publication number Publication date
CN1939675A (en) 2007-04-04
JP2007091433A (en) 2007-04-12
TWI381986B (en) 2013-01-11
KR20070036683A (en) 2007-04-03
CN1939675B (en) 2010-05-12
KR101333993B1 (en) 2013-11-27
JP4731267B2 (en) 2011-07-20

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