[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

TW200703409A - Mapping projection type electron beam apparatus and defects inspection system using such apparatus - Google Patents

Mapping projection type electron beam apparatus and defects inspection system using such apparatus

Info

Publication number
TW200703409A
TW200703409A TW095107147A TW95107147A TW200703409A TW 200703409 A TW200703409 A TW 200703409A TW 095107147 A TW095107147 A TW 095107147A TW 95107147 A TW95107147 A TW 95107147A TW 200703409 A TW200703409 A TW 200703409A
Authority
TW
Taiwan
Prior art keywords
electron beam
test piece
electron
optical system
projection type
Prior art date
Application number
TW095107147A
Other languages
Chinese (zh)
Inventor
Mamoru Nakasuji
Nobuharu Noji
Tohru Satake
Takeshi Murakami
Hirosi Sobukawa
Toru Kaga
Yuichiro Yamazaki
Ichirota Nagahama
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005059504A external-priority patent/JP2006244875A/en
Priority claimed from JP2005092314A external-priority patent/JP2006278029A/en
Priority claimed from JP2005092297A external-priority patent/JP2006278028A/en
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of TW200703409A publication Critical patent/TW200703409A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/057—Energy or mass filtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

This invention provides a mapping projection type electron beam apparatus which minimizes axial chromatic aberration and enlarges the permeability of a secondary electron so as to enable the evaluation of a test piece with high throughput. A test piece 7 is irradiated with an electron beam emitted from an electron gun 1 through a primary electronic-optical system, and the electron released from the test piece thereby is detected by a detector 12 through a secondary electronic-optical system. A Wien filter 8 consisting of a multiple pole lens for compensating the axial chromatic aberration is placed in between an enlarging lens 10 of the secondary electronic-optical system and a beam separator 5 for separating the primpary electron beam and the secondary electron beam, so as to compensate the axial chromatic aberration produced by an object lens 14 consisting of an electromagnetic lens having a magnetic gap provided at a test piece side, by the Wien filter.
TW095107147A 2005-03-03 2006-03-03 Mapping projection type electron beam apparatus and defects inspection system using such apparatus TW200703409A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005059504A JP2006244875A (en) 2005-03-03 2005-03-03 Mapping projection type electron beam device and defect inspection system using the same
JP2005092314A JP2006278029A (en) 2005-03-28 2005-03-28 Electron beam device and method for manufacturing device using it
JP2005092297A JP2006278028A (en) 2005-03-28 2005-03-28 Electron beam device and method of manufacturing device using it

Publications (1)

Publication Number Publication Date
TW200703409A true TW200703409A (en) 2007-01-16

Family

ID=36941298

Family Applications (2)

Application Number Title Priority Date Filing Date
TW095107147A TW200703409A (en) 2005-03-03 2006-03-03 Mapping projection type electron beam apparatus and defects inspection system using such apparatus
TW098110825A TWI415162B (en) 2005-03-03 2006-03-03 Mapping projection type electron beam apparatus and defects inspection system using such apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW098110825A TWI415162B (en) 2005-03-03 2006-03-03 Mapping projection type electron beam apparatus and defects inspection system using such apparatus

Country Status (3)

Country Link
US (2) US20090212213A1 (en)
TW (2) TW200703409A (en)
WO (1) WO2006093268A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9384938B2 (en) 2010-09-28 2016-07-05 Carl Zeiss Microscopy Gmbh Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
TWI583941B (en) * 2015-10-01 2017-05-21 All Ring Tech Co Ltd Grain defect detection method and device
CN110622067A (en) * 2017-03-09 2019-12-27 卡尔蔡司Smt有限责任公司 Method and apparatus for analyzing defect positions of a lithographic mask
TWI684921B (en) * 2017-07-19 2020-02-11 日商紐富來科技股份有限公司 Pattern inspection device and pattern inspection method
TWI799617B (en) * 2018-09-26 2023-04-21 日商濱松赫德尼古斯股份有限公司 Semiconductor element inspection method and semiconductor element inspection apparatus

Families Citing this family (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006244875A (en) * 2005-03-03 2006-09-14 Ebara Corp Mapping projection type electron beam device and defect inspection system using the same
WO2006093268A1 (en) * 2005-03-03 2006-09-08 Ebara Corporation Projection electron beam apparatus and defect inspection system using the apparatus
TW200700717A (en) * 2005-03-22 2007-01-01 Ebara Corp Electron beam device
WO2007013398A1 (en) * 2005-07-26 2007-02-01 Ebara Corporation Electron beam device
JP4741408B2 (en) 2006-04-27 2011-08-03 株式会社荏原製作所 XY coordinate correction apparatus and method in sample pattern inspection apparatus
JP2007335125A (en) * 2006-06-13 2007-12-27 Ebara Corp Electron beam device
JP4795883B2 (en) * 2006-07-21 2011-10-19 株式会社日立ハイテクノロジーズ Pattern inspection / measurement equipment
JP4789260B2 (en) * 2006-08-23 2011-10-12 エスアイアイ・ナノテクノロジー株式会社 Charged particle beam apparatus and aperture axis adjusting method
WO2008101714A2 (en) * 2007-02-22 2008-08-28 Applied Materials Israel, Ltd. High throughput sem tool
EP2132763B1 (en) * 2007-02-22 2014-05-07 Applied Materials Israel Ltd. High throughput sem tool
JP4966693B2 (en) * 2007-02-28 2012-07-04 株式会社日立ハイテクノロジーズ Sample conveying apparatus and method
US7926000B2 (en) * 2007-03-08 2011-04-12 Chartered Semiconductor Manufacturing Ltd. Integrated circuit system employing dipole multiple exposure
JP2008233035A (en) * 2007-03-23 2008-10-02 Toshiba Corp Substrate inspection method
US7966743B2 (en) * 2007-07-31 2011-06-28 Eastman Kodak Company Micro-structured drying for inkjet printers
JP5020745B2 (en) * 2007-08-29 2012-09-05 株式会社ニューフレアテクノロジー Drawing data creation method and charged particle beam drawing apparatus
US8467595B2 (en) * 2008-08-01 2013-06-18 Hitachi High-Technologies Corporation Defect review system and method, and program
NL2003304C2 (en) * 2008-08-07 2010-09-14 Ims Nanofabrication Ag Compensation of dose inhomogeneity and image distortion.
JP5484808B2 (en) * 2008-09-19 2014-05-07 株式会社ニューフレアテクノロジー Drawing apparatus and drawing method
TWI479530B (en) * 2008-10-01 2015-04-01 Mapper Lithography Ip Bv Electrostatic lens structure, electrostatic lens array, charged particle beamlet lithography system and method of manufacturing an insulating structure
US20100211202A1 (en) * 2009-02-13 2010-08-19 Hermes Microvision, Inc. Method and machine for examining wafers
US9768082B2 (en) * 2009-02-13 2017-09-19 Hermes Microvision Inc. Method and machine for examining wafers
JP5417428B2 (en) * 2009-02-27 2014-02-12 株式会社日立ハイテクノロジーズ Electron microscope and sample holding method
US20120119087A1 (en) * 2009-08-03 2012-05-17 Hitachi High-Technologies Corporation Charged-particle microscope
DE102009052392A1 (en) * 2009-11-09 2011-12-15 Carl Zeiss Nts Gmbh SACP process and particle-optical system for carrying out such a process
EP2339611B1 (en) * 2009-12-23 2015-11-11 ISMECA Semiconductor Holding SA Wafer handler comprising a vision system
US8872911B1 (en) * 2010-01-05 2014-10-28 Cognex Corporation Line scan calibration method and apparatus
JP5507294B2 (en) * 2010-03-05 2014-05-28 東芝機械株式会社 Grinding machine with distance measuring function
EP2385542B1 (en) * 2010-05-07 2013-01-02 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Electron beam device with dispersion compensation, and method of operating same
US20110294071A1 (en) * 2010-05-28 2011-12-01 Canon Kabushiki Kaisha Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatus
US20120320182A1 (en) * 2011-06-17 2012-12-20 Richard Hubbard Electro optical image-magnifying device
JP5777984B2 (en) * 2011-09-08 2015-09-16 株式会社日立ハイテクノロジーズ Multipole measuring device
US9053900B2 (en) 2012-04-03 2015-06-09 Kla-Tencor Corporation Apparatus and methods for high-resolution electron beam imaging
EP2674959A1 (en) 2012-06-13 2013-12-18 FEI Company Charged-particle apparatus equipped with improved Wien-type Cc corrector
US8859982B2 (en) 2012-09-14 2014-10-14 Kla-Tencor Corporation Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents
JP6165444B2 (en) * 2013-01-11 2017-07-19 株式会社日立ハイテクノロジーズ Charged particle beam equipment
US9082580B2 (en) * 2013-09-23 2015-07-14 Kla-Tencor Corporation Notched magnetic lens for improved sample access in an SEM
US10410338B2 (en) * 2013-11-04 2019-09-10 Kla-Tencor Corporation Method and system for correlating optical images with scanning electron microscopy images
EP2899743B1 (en) * 2014-01-27 2016-09-21 Fei Company Correlative optical and charged particle microscope
JP2015176683A (en) * 2014-03-14 2015-10-05 株式会社日立ハイテクノロジーズ Electrostatic chuck mechanism, and charged particle beam device
JP2016115680A (en) * 2014-12-17 2016-06-23 アプライド マテリアルズ イスラエル リミテッド Scanning charged particle beam device having aberration correction aperture and operation method thereof
DE102015202172B4 (en) 2015-02-06 2017-01-19 Carl Zeiss Microscopy Gmbh Particle beam system and method for particle-optical examination of an object
US10056224B2 (en) * 2015-08-10 2018-08-21 Kla-Tencor Corporation Method and system for edge-of-wafer inspection and review
US9472373B1 (en) * 2015-08-17 2016-10-18 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Beam separator device, charged particle beam device and methods of operating thereof
DE102015013698B9 (en) * 2015-10-22 2017-12-21 Carl Zeiss Microscopy Gmbh Method for operating a multi-beam particle microscope
EP3384279A4 (en) 2015-11-30 2019-10-09 Hermes Microvision Inc. Apparatus of plural charged-particle beams
WO2017114662A1 (en) 2015-12-31 2017-07-06 Asml Netherlands B.V. Selection of measurement locations for patterning processes
CN107039220B (en) * 2017-05-27 2019-05-03 清华大学天津高端装备研究院 A kind of electron beam optics system and increasing material manufacturing device
JP2019120654A (en) * 2018-01-11 2019-07-22 株式会社ニューフレアテクノロジー Method for inspection
DE102018202421B3 (en) 2018-02-16 2019-07-11 Carl Zeiss Microscopy Gmbh Multibeam particle beam
DE102018202428B3 (en) 2018-02-16 2019-05-09 Carl Zeiss Microscopy Gmbh Multibeam Teilchenmikroskop
WO2019166331A2 (en) 2018-02-27 2019-09-06 Carl Zeiss Microscopy Gmbh Charged particle beam system and method
US10811215B2 (en) 2018-05-21 2020-10-20 Carl Zeiss Multisem Gmbh Charged particle beam system
JP7057220B2 (en) * 2018-05-24 2022-04-19 株式会社ニューフレアテクノロジー Positioning method for multi-electron beam image acquisition device and multi-electron beam optical system
WO2019238553A1 (en) * 2018-06-12 2019-12-19 Asml Netherlands B.V. System and method for scanning a sample using multi-beam inspection apparatus
JP7092619B2 (en) * 2018-08-30 2022-06-28 株式会社キーエンス Magnifying observation device
DE102018007455B4 (en) 2018-09-21 2020-07-09 Carl Zeiss Multisem Gmbh Process for detector alignment when imaging objects using a multi-beam particle microscope, system and computer program product
DE102018007652B4 (en) 2018-09-27 2021-03-25 Carl Zeiss Multisem Gmbh Particle beam system and method for current regulation of single particle beams
DE102018124044B3 (en) 2018-09-28 2020-02-06 Carl Zeiss Microscopy Gmbh Method for operating a multi-beam particle beam microscope and multi-beam particle beam system
KR102600003B1 (en) * 2018-10-30 2023-11-09 삼성전자주식회사 Chmaber for semiconductor manufacturing process and manufacturing method for semiconductor device
JP6640975B2 (en) * 2018-12-20 2020-02-05 株式会社日立ハイテクノロジーズ Electrostatic chuck mechanism and charged particle beam device
WO2020141030A1 (en) * 2018-12-31 2020-07-09 Asml Netherlands B.V. In-lens wafer pre-charging and inspection with multiple beams
TWI743626B (en) 2019-01-24 2021-10-21 德商卡爾蔡司多重掃描電子顯微鏡有限公司 System comprising a multi-beam particle microscope, method for imaging a 3d sample layer by layer and computer program product
CN111477530B (en) 2019-01-24 2023-05-05 卡尔蔡司MultiSEM有限责任公司 Method for imaging 3D samples using a multi-beam particle microscope
US11276161B2 (en) * 2019-02-26 2022-03-15 KLA Corp. Reference image generation for semiconductor applications
WO2020188781A1 (en) * 2019-03-20 2020-09-24 株式会社日立ハイテク Charged particle beam device
US12062519B2 (en) 2019-05-31 2024-08-13 Hitachi High-Tech Corporation Beam deflection device, aberration corrector, monochromator, and charged particle beam device
DE102019005362A1 (en) 2019-07-31 2021-02-04 Carl Zeiss Multisem Gmbh Method for operating a multitude particle beam system with changing the numerical aperture, associated computer program product and multitude particle beam system
US11330164B2 (en) * 2020-03-17 2022-05-10 KLA Corp. Determining focus settings for specimen scans
JP7442375B2 (en) * 2020-04-06 2024-03-04 株式会社ニューフレアテクノロジー Multi-electron beam inspection device and multi-electron beam inspection method
JP7547227B2 (en) 2021-01-21 2024-09-09 株式会社ニューフレアテクノロジー Multi-beam image acquisition device and multi-beam image acquisition method
WO2023198378A1 (en) * 2022-04-12 2023-10-19 Asml Netherlands B.V. Wafer holder for reducing electric field distortion near wafer edge

Family Cites Families (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3472997A (en) 1966-08-26 1969-10-14 Us Navy Secondary electron collection system
FR2584234B1 (en) 1985-06-28 1988-12-09 Cameca INTEGRATED CIRCUIT TESTER WITH ELECTRON BEAM
DE3841715A1 (en) 1988-12-10 1990-06-13 Zeiss Carl Fa IMAGING CORRECTOR VIENNA TYPE FOR ELECTRONIC MICROSCOPE
EP0451370B1 (en) 1990-04-12 1996-03-27 Koninklijke Philips Electronics N.V. Correction system for a charged-particle beam apparatus
JPH09180663A (en) 1995-12-26 1997-07-11 Nikon Corp Electron gun and electron beam transfer device provided with the electron gun
JPH09270241A (en) 1996-04-01 1997-10-14 Jeol Ltd Scanning electron microscope
JP3927620B2 (en) 1996-06-12 2007-06-13 キヤノン株式会社 Electron beam exposure method and device manufacturing method using the same
WO1999009582A1 (en) 1997-08-19 1999-02-25 Nikon Corporation Object observation device and object observation method
JPH1167139A (en) * 1997-08-25 1999-03-09 Hitachi Ltd Scanning electron microscope
US6111253A (en) * 1997-09-01 2000-08-29 Jeol Ltd. Transmission electron microscope
JP2001511303A (en) * 1997-12-11 2001-08-07 フィリップス エレクトロン オプティクス ビー ヴィ Correction device for spherical aberration correction in particle-optical apparatus
DE69822802T2 (en) 1997-12-22 2004-08-05 Fei Co., Hillsboro CORRECTION DEVICE FOR CORRECTING THE CHROMATIC ERROR IN CARPUSCULAR OPTICAL DEVICES
JPH11233062A (en) 1998-02-10 1999-08-27 Jeol Ltd Wien filter and direct mapping type reflection electron microscope
JP3441955B2 (en) * 1998-02-23 2003-09-02 株式会社日立製作所 Projection type charged particle microscope and substrate inspection system
US6661008B2 (en) 1998-06-22 2003-12-09 Nikon Corporation Electron-optical system and inspection method using the same
JP2000173900A (en) 1998-12-08 2000-06-23 Canon Inc Electron beam emitting device and electron beam exposure system equipped therewith
JP2000228162A (en) 1999-02-05 2000-08-15 Jeol Ltd Electron beam device
JP4163344B2 (en) 1999-03-05 2008-10-08 株式会社東芝 Substrate inspection method and substrate inspection system
US6608308B1 (en) 1999-05-26 2003-08-19 Nikon Corporation Electrostatic lens systems for secondary-electron mapping-projection apparatus, and mapping-projection apparatus and methods comprising same
JP2001291482A (en) * 2000-04-10 2001-10-19 Nikon Corp Manufacturing method of hollow beam aperture and charged particle beam exposure apparatus and semiconductor device
US6635891B1 (en) * 1999-09-22 2003-10-21 Nikon Corporation Hollow-beam apertures for charged-particle-beam microlithography apparatus and methods for making and using same
DE69903439T2 (en) 1999-11-12 2003-07-03 Advantest Corp., Tokio/Tokyo Deflection unit for the separation of two particle beams
US6462474B1 (en) * 2000-03-21 2002-10-08 Northrop Grumman Corp. Grooved multi-stage depressed collector for secondary electron suppression
WO2001082327A2 (en) 2000-04-24 2001-11-01 Fei Company Collection of secondary electrons through the objective lens of a scanning electron microscope
TW539845B (en) * 2000-07-27 2003-07-01 Ebara Corp Sheet beam-type inspection device
EP1271605A4 (en) * 2000-11-02 2009-09-02 Ebara Corp Electron beam apparatus and method for manufacturing semiconductor device comprising the apparatus
JPWO2002037527A1 (en) * 2000-11-02 2004-03-11 株式会社荏原製作所 Electron beam apparatus and device manufacturing method using the same
JP3943022B2 (en) 2000-12-01 2007-07-11 株式会社荏原製作所 Board inspection equipment
DE10061798A1 (en) 2000-12-12 2002-06-13 Leo Elektronenmikroskopie Gmbh Monochromator for charged particles has Wien filters arranged serially in particle propagation direction, each rotated about optical axis in azimuth by 90 degrees relative to others
WO2002056332A1 (en) 2001-01-10 2002-07-18 Ebara Corporation Inspection apparatus and inspection method with electron beam, and device manufacturing method comprising the inspection apparatus
JP4103345B2 (en) 2001-06-12 2008-06-18 株式会社日立製作所 Charged particle beam equipment
US6723997B2 (en) 2001-10-26 2004-04-20 Jeol Ltd. Aberration corrector for instrument utilizing charged-particle beam
US6946655B2 (en) * 2001-11-07 2005-09-20 Applied Materials, Inc. Spot grid array electron imaging system
JP3914750B2 (en) 2001-11-20 2007-05-16 日本電子株式会社 Charged particle beam device with aberration correction device
DE10159454B4 (en) * 2001-12-04 2012-08-02 Carl Zeiss Nts Gmbh Corrector for correcting first-order, first-degree chromatic aberrations
JP2003173756A (en) * 2001-12-05 2003-06-20 Ebara Corp Electron beam device and manufacturing method of device using the same
JP4242101B2 (en) 2002-02-08 2009-03-18 日本電子株式会社 Vienna filter
JP3908963B2 (en) * 2002-02-08 2007-04-25 株式会社荏原製作所 Electron beam equipment
JP3940310B2 (en) 2002-04-04 2007-07-04 株式会社日立ハイテクノロジーズ Electron beam drawing method, drawing apparatus, and semiconductor manufacturing method using the same
JP4204902B2 (en) * 2002-06-28 2009-01-07 日本電子株式会社 Charged particle beam device with aberration correction device
US6924488B2 (en) * 2002-06-28 2005-08-02 Jeol Ltd. Charged-particle beam apparatus equipped with aberration corrector
US6770887B2 (en) 2002-07-08 2004-08-03 Ondrej L. Krivanek Aberration-corrected charged-particle optical apparatus
DE10235456B4 (en) * 2002-08-02 2008-07-10 Leo Elektronenmikroskopie Gmbh electron microscopy system
JP2004214044A (en) * 2003-01-06 2004-07-29 Ebara Corp Electron ray apparatus and manufacturing method for semiconductor device using the same
US7157703B2 (en) * 2002-08-30 2007-01-02 Ebara Corporation Electron beam system
DE60236302D1 (en) 2002-12-17 2010-06-17 Integrated Circuit Testing Multi-axis compound lens, blasting device and method of using this combined lens
JP2004214156A (en) 2003-01-09 2004-07-29 Ebara Corp Multipole lens for charged particle beam, method of use of multipole lens for charged particle beam, and charged particle beam
JP2004235225A (en) * 2003-01-28 2004-08-19 Nikon Corp Diaphragm for incident angle adjustment of charged particle beam, manufacturing method therefor and incident angle adjusting method of charged particle beam
JP4275441B2 (en) * 2003-03-31 2009-06-10 株式会社日立ハイテクノロジーズ Electron beam device with aberration corrector
JP4068003B2 (en) * 2003-05-02 2008-03-26 株式会社荏原製作所 Electron beam equipment
JP2004363085A (en) * 2003-05-09 2004-12-24 Ebara Corp Inspection apparatus by charged particle beam and method for manufacturing device using inspection apparatus
JP2004342341A (en) 2003-05-13 2004-12-02 Hitachi High-Technologies Corp Mirror electron microscope, and pattern defect inspection device using it
EP1517353B1 (en) 2003-09-11 2008-06-25 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam energy width reduction system for charged particle beam system
JP4279689B2 (en) 2004-01-08 2009-06-17 株式会社荏原製作所 Electron beam equipment
US7176459B2 (en) * 2003-12-25 2007-02-13 Ebara Corporation Electron beam apparatus
US7420164B2 (en) 2004-05-26 2008-09-02 Ebara Corporation Objective lens, electron beam system and method of inspecting defect
EP1610358B1 (en) 2004-06-21 2008-08-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Aberration correction device and method for operating same
US7282727B2 (en) 2004-07-26 2007-10-16 Retsky Michael W Electron beam directed energy device and methods of using same
WO2006093268A1 (en) 2005-03-03 2006-09-08 Ebara Corporation Projection electron beam apparatus and defect inspection system using the apparatus
TW200700717A (en) * 2005-03-22 2007-01-01 Ebara Corp Electron beam device
WO2007013398A1 (en) * 2005-07-26 2007-02-01 Ebara Corporation Electron beam device
US20070228922A1 (en) 2006-03-29 2007-10-04 Mamora Nakasuji Electron gun and electron beam apparatus field of invention

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9384938B2 (en) 2010-09-28 2016-07-05 Carl Zeiss Microscopy Gmbh Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
US9653254B2 (en) 2010-09-28 2017-05-16 Carl Zeiss Microscopy Gmbh Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
TWI609400B (en) * 2010-09-28 2017-12-21 卡爾蔡司Smt 股份有限公司 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
TWI583941B (en) * 2015-10-01 2017-05-21 All Ring Tech Co Ltd Grain defect detection method and device
CN110622067A (en) * 2017-03-09 2019-12-27 卡尔蔡司Smt有限责任公司 Method and apparatus for analyzing defect positions of a lithographic mask
TWI684921B (en) * 2017-07-19 2020-02-11 日商紐富來科技股份有限公司 Pattern inspection device and pattern inspection method
TWI799617B (en) * 2018-09-26 2023-04-21 日商濱松赫德尼古斯股份有限公司 Semiconductor element inspection method and semiconductor element inspection apparatus

Also Published As

Publication number Publication date
US20090212213A1 (en) 2009-08-27
WO2006093268A1 (en) 2006-09-08
TWI415162B (en) 2013-11-11
TW200939283A (en) 2009-09-16
US20100096550A1 (en) 2010-04-22
US8035082B2 (en) 2011-10-11

Similar Documents

Publication Publication Date Title
TW200703409A (en) Mapping projection type electron beam apparatus and defects inspection system using such apparatus
JP4553889B2 (en) Determination method of aberration coefficient in aberration function of particle optical lens
EP2508903A3 (en) Inspection device using secondary charged particle detection
TW200700717A (en) Electron beam device
EP2105943A3 (en) Environmental cell for a particle-optical apparatus
US6803571B1 (en) Method and apparatus for dual-energy e-beam inspector
KR101759186B1 (en) Charged particle beam device
EP2418674A3 (en) Ion sources, systems and methods
US20110210249A1 (en) Transmission Electron Microscope
WO2008071303A3 (en) Particle-optical arrangement
JP2021082606A (en) Electron beam imaging device and method
US10755888B2 (en) Aberration corrector and charged particle beam device
EP1783811A2 (en) Corrector for the correction of chromatic aberrations in a particle-optical apparatus
TWI673749B (en) High resolution charged particle beam device and method of operating the same
EP3419043B1 (en) Distortion correction method and electron microscope
US7423268B2 (en) Projection imaging type electron microscope
US9018581B2 (en) Transmission electron microscope
JP6783178B2 (en) electronic microscope
JP2019537228A5 (en)
EP2706553A3 (en) Particle beam device and method for operating a particle beam device
US9543115B2 (en) Electron microscope
US9589763B1 (en) Method for detecting signal charged particles in a charged particle beam device, and charged particle beam device
Müllerová et al. Collection of secondary electrons in scanning electron microscopes
JP4328192B2 (en) Multipole field generating device and aberration correcting device in charged particle optical system
WO2008027543A3 (en) Confocal secondary electron imaging