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TW200706871A - Capacitance detection type acceleration sensor - Google Patents

Capacitance detection type acceleration sensor

Info

Publication number
TW200706871A
TW200706871A TW095120619A TW95120619A TW200706871A TW 200706871 A TW200706871 A TW 200706871A TW 095120619 A TW095120619 A TW 095120619A TW 95120619 A TW95120619 A TW 95120619A TW 200706871 A TW200706871 A TW 200706871A
Authority
TW
Taiwan
Prior art keywords
acceleration sensor
capacitance detection
detection type
type acceleration
movable electrode
Prior art date
Application number
TW095120619A
Other languages
Chinese (zh)
Inventor
Kenichi Kagawa
Norihiro Asada
Original Assignee
Micro Prec Co & Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Prec Co & Ltd filed Critical Micro Prec Co & Ltd
Publication of TW200706871A publication Critical patent/TW200706871A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

A capacitance detection type acceleration sensor, comprising a movable electrode part (1) having a weight part (4) with a movable electrode (7) on its surface, a beam (5) supporting the weight part, and a fixed part (6) supporting the beam and a fixed electrode part (3) having a fixed electrode (11) disposed oppositely to the movable electrode (7) at a prescribed interval. Since the beam (5) uses a silicone rubber as a base material, the highly sensitive and small-sized capacitance detection type acceleration sensor with high impact resistance can be provided at low cost.
TW095120619A 2005-06-20 2006-06-09 Capacitance detection type acceleration sensor TW200706871A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005179287A JP2006349613A (en) 2005-06-20 2005-06-20 Capacitance detection type acceleration sensor

Publications (1)

Publication Number Publication Date
TW200706871A true TW200706871A (en) 2007-02-16

Family

ID=37570264

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095120619A TW200706871A (en) 2005-06-20 2006-06-09 Capacitance detection type acceleration sensor

Country Status (3)

Country Link
JP (1) JP2006349613A (en)
TW (1) TW200706871A (en)
WO (1) WO2006137230A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008102535A1 (en) * 2007-02-20 2008-08-28 Panasonic Corporation Inertia force sensor and composite sensor for detecting inertia force
JP2010117247A (en) * 2008-11-13 2010-05-27 Alps Electric Co Ltd Mems sensor and method for manufacturing the same
JP5381235B2 (en) * 2009-03-31 2014-01-08 富士電機株式会社 MEMS structure, MEMS device and manufacturing method thereof
JP2010236957A (en) * 2009-03-31 2010-10-21 Fuji Electric Holdings Co Ltd MEMS structure and manufacturing method thereof
JP2011045981A (en) * 2009-08-28 2011-03-10 Ritsumeikan Mems and method for manufacturing same
TWI414478B (en) * 2010-09-09 2013-11-11 Domintech Co Ltd Mems sensor capable of measuring acceleration and pressure
RU2618496C1 (en) * 2015-12-02 2017-05-03 Федеральное государственное унитарное предприятие "Российский федеральный ядерный центр - Всероссийский научно-исследовательский институт технической физики имени академика Е.И. Забабахина" Acceleration sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05264577A (en) * 1992-03-19 1993-10-12 Hitachi Ltd Acceleration sensor, air bag apparatus and body controller using the same
JPH09145740A (en) * 1995-09-22 1997-06-06 Denso Corp Acceleration sensor
JP2000221208A (en) * 1999-02-02 2000-08-11 Nitta Ind Corp Capacitance type acceleration sensor
JP2002286571A (en) * 2001-03-23 2002-10-03 Omron Corp Pressure velocity sensor
JP2005114641A (en) * 2003-10-10 2005-04-28 Tdk Corp Acceleration sensor

Also Published As

Publication number Publication date
JP2006349613A (en) 2006-12-28
WO2006137230A1 (en) 2006-12-28

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