TW200304105A - Light emitting display element, organic EL display element and method for manufacturing the same - Google Patents
Light emitting display element, organic EL display element and method for manufacturing the same Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title abstract description 18
- 239000010410 layer Substances 0.000 claims abstract description 122
- 239000002184 metal Substances 0.000 claims abstract description 85
- 229910052751 metal Inorganic materials 0.000 claims abstract description 85
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 239000012044 organic layer Substances 0.000 claims abstract description 20
- 238000007789 sealing Methods 0.000 claims description 46
- 238000000605 extraction Methods 0.000 claims description 13
- 239000002346 layers by function Substances 0.000 claims description 13
- 230000004927 fusion Effects 0.000 claims description 11
- 230000001678 irradiating effect Effects 0.000 claims description 11
- 238000000059 patterning Methods 0.000 claims description 7
- 238000010030 laminating Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 101100280944 Pisum sativum PETF gene Proteins 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/871—Self-supporting sealing arrangements
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- H—ELECTRICITY
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- H05B33/02—Details
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Abstract
Description
200304105 發明說明(1) 【發明所屬之技術領域2 本發明係關於一種對發光 示訊號用之引出電極的發光顯示=上之電極接續以供给 示裝置之一之有機el顯示敦置衣置,以及成為該發光^ 法等。 置,以及該等裝置之制九顯 【先前技術】 製造方 近年來開發有各種之自發 基本之構造係以可點亮或 t之發光顯示裝詈 將該等發光元件作平面性=列亮驅動之發光元件為I,其 以利用放電空間作區劃之元j j ί者。此等發光顯Ϊ $而 漿顯示面板)為起始,係可^ ^發光元件之P D ρ,置200304105 Description of the invention (1) [Technical field to which the invention belongs 2 The present invention relates to a light-emitting display of a lead-out electrode for a light-emitting display signal = an organic electrode display device connected to the upper electrode to supply one of the display devices, Become the light emission method. Equipment, and the manufacture of these devices. Nine displays. [Previous technology] In recent years, manufacturers have developed a variety of spontaneous basic structures. The light-emitting elements can be lit or light-emitting display devices. The light-emitting element is I, which uses the element jj ί that uses the discharge space as a division. These light-emitting displays (and display panels) are used as a starting point to set the P D ρ of the light-emitting elements.
Flu〇reSCenc J 舉出 VFE(Vac (電 (電致發光)、led(l· Display)、mm’Flu〇reSCenc J cites VFE (Vac (electric (electroluminescence), led (l · Display), mm ’
Diode) a^FED1(Jht Emitti:EL on Display)等。E m i g 是以低電壓而可得到高真 11等發光顯示裝置φ s 1 可得到色純度較高之以;:發光且藉由材;:2別 化之顯示裝置因而受到注:係-種超薄化其輕型以素 此種有機EL元件係於±仏 王杉 壓之陰極所構成之一對電=正電壓之陽極與施 層中引發電子-電洞之J f電’ ’而H由於J層 j之再結合而產生發光者。4 π 5亥有機 线藉由第 200304105 五、發明說明(2) 圖說明此種由有機E L元件所構成之有機E L顯示裝置。 有機E L顯示裝置者係由於透明基板1之單側面上順 序積層以由I T〇等之透明電極所構成之第一電極(陽極 )2、包含有由A 1 Q 3等之發光材料所構成之發光功能層 的有機層3與由A 1等之金屬電極所構成之第二電極(陰 極)4所成之有機E L元件所構成之物品,於此有機E L 元件之第一電極2及第二電極4上係形成有供給顯示訊號 用之引出電極5A及5B 。 在此,第一電極2側之引出電極5 A係於形成第一電 極2時之透明電極層2 L上形成降低配線阻抗用之金屬引 出電極層6 ,係藉由於此引出電極5 A與第二電極4之ρΘ 形成絕緣膜7 Α之方式達到防止短路之目的。又,第二電 極側之引出電極5 B者係於圖樣化之透明電極層2 L上形 成金屬引出電極層6 ,而於其上形成連接第二電極4之金 屬電極層4 L ^而於此引出電極5 B與第一電極2之間形 成絕緣膜7 B以達到防止短路之目的。又,此有機E L元 件因接觸外氣時會顯著地劣化,因此設置密封元件8將有 機E L元件之發光領域L附近密封成氣密狀。 此種有機E L顯示裝置之製造工序,首先,係於透明 基板1上形成透明電極層2 L後,將其圖樣化成顯示所須 之圖樣,而形成第一電極2 ,同時並藉由此透明電極層 L形成引出電極5A、5B之基底。接著於透明電極層2 L上形成由C r等所構成之金屬引出電極層6之後,將其 圖樣化以形成引出電極5 A、5 B 。之後,打開發光領域Diode) a ^ FED1 (Jht Emitti: EL on Display), etc. E mig is a low-voltage light-emitting display device such as high-fidelity 11 φ s 1 can be obtained with high color purity ;: light-emitting and material; 2 specialized display devices are therefore note: Department-a kind of super Thinning the light-weight organic EL element of this type is composed of a cathode of ± King Wang Shan pressure. A pair of electricity = positive voltage anode and layer induced electron-hole J f electricity '' and H due to J Recombination of layer j produces a luminescent person. The 4 π 5 Hai organic line uses the 200304105 V. Description of the Invention (2) The figure illustrates such an organic EL display device composed of organic EL elements. The organic EL display device is a light emitting device composed of a first electrode (anode) composed of a transparent electrode such as IT0, and a light emitting material composed of a light emitting material such as A 1 Q 3, which is sequentially laminated on one side of the transparent substrate 1. An article composed of an organic layer 3 of a functional layer and an organic EL element composed of a second electrode (cathode) 4 composed of a metal electrode such as A1, and the first electrode 2 and the second electrode 4 of the organic EL element The upper part is formed with lead-out electrodes 5A and 5B for supplying a display signal. Here, the lead-out electrode 5 A on the side of the first electrode 2 is formed on the transparent electrode layer 2 L when the first electrode 2 is formed, and a metal lead-out electrode layer 6 for reducing wiring resistance is formed by the lead-out electrode 5 A and the first electrode 2. The manner in which ρΘ of the two electrodes 4 forms the insulating film 7 A achieves the purpose of preventing short circuits. In addition, the lead-out electrode 5 B on the second electrode side forms a metal lead-out electrode layer 6 on the patterned transparent electrode layer 2 L, and a metal electrode layer 4 L connected to the second electrode 4 is formed thereon. An insulating film 7 B is formed between the lead-out electrode 5 B and the first electrode 2 to achieve the purpose of preventing a short circuit. In addition, the organic EL element is significantly deteriorated when exposed to outside air. Therefore, the sealing element 8 is provided to seal the vicinity of the light-emitting area L of the organic EL element in an airtight manner. In the manufacturing process of such an organic EL display device, first, a transparent electrode layer 2 L is formed on a transparent substrate 1, and then the pattern is converted into a pattern necessary for display to form a first electrode 2. The layer L forms the base of the extraction electrodes 5A, 5B. Next, a metal extraction electrode layer 6 made of Cr or the like is formed on the transparent electrode layer 2L, and then patterned to form extraction electrodes 5A, 5B. After that, open the glowing area
第6頁 200304105 五、發明說明(3) L而於形成絕緣膜7 A、7 B後,於第一電極2之露出面 上形成有機層3 ,藉由於此有機層3上以及於引出電極5 B之金屬引出電極層6上形成金屬電極層4L ,於有機層 3上形成第二電極4。之後,於其上以被覆發光領域L之 方式蓋上密封元件8以實行密封處理。 此種習知例之第二電極4之引出電極5 B係使由A 1 等所構成之金屬電極層4 L露出至密封元件8之外部,而 成為於此露出之金屬電極層4L與由I丁〇等所構成之透 明電極層2 L之間介設以金屬引出電極層6之構造。 作為此等構造之理由,係因於I T〇等所構成之透明| 電極層2 L上直接接觸以A 1等之金屬電極層4 L時易 使金屬電極層4 L產生腐蝕,且前述引出電極5 B之構造 因係使金屬電極層4 L之表面露出外部,因此以濕熱等之 影響該金屬電極層4 L之露出部份易劣化而有對第二電極 4之電力供給將產生障礙等之問題。又,使形成第二電極 4之金屬電極層4L形成於引出電極5 B上時因作為第二 電極發揮功能之部份與作為引出電極發揮功能之部份係形 成為不同之圖樣,因此形成各個不同之圖樣用之光罩係須 要有兩塊,且形成不同圖樣用之工序亦變得複雜化,因此 有加高成本等之其他問題。 為應付前述課題之其他之習知例,例如可採用第5 ΒΙφ 所示之構造(其中與前述習知例為相同之部份係標示以相 同符號並省略部份之重複說明)。於此習知例中,第二電 極4僅形成於有機層3上與搭掛於引出電極5 Β上之金屬Page 6 200304105 V. Description of the invention (3) L After forming the insulating films 7 A and 7 B, an organic layer 3 is formed on the exposed surface of the first electrode 2. Because of the organic layer 3 and the lead-out electrode 5 A metal electrode layer 4L is formed on the metal extraction electrode layer 6 of B, and a second electrode 4 is formed on the organic layer 3. Thereafter, the sealing member 8 is covered thereon in such a manner as to cover the light-emitting area L to perform a sealing process. The lead-out electrode 5 B of the second electrode 4 of this conventional example exposes the metal electrode layer 4 L composed of A 1 and the like to the outside of the sealing element 8, and the exposed metal electrode layer 4L and the I The transparent electrode layer 2 L formed by Ding et al. Is provided with a structure in which a metal extraction electrode layer 6 is interposed. As a reason for these structures, it is because of the transparent structure formed by IT0, etc. | When the metal electrode layer 4 L with A 1 or the like is directly contacted on the electrode layer 2 L, the metal electrode layer 4 L is likely to be corroded, and the aforementioned lead-out electrode The structure of 5 B is because the surface of the metal electrode layer 4 L is exposed to the outside. Therefore, the exposed portion of the metal electrode layer 4 L is easily deteriorated due to the influence of moisture and the like, and there is a problem that the power supply to the second electrode 4 will cause obstacles. problem. In addition, when the metal electrode layer 4L forming the second electrode 4 is formed on the lead-out electrode 5 B, the portions functioning as the second electrode and the parts functioning as the lead-out electrode are formed in different patterns, and thus each of them is formed. The masks for different patterns need to have two pieces, and the processes for forming different patterns also become complicated, so there are other problems such as increasing costs. In order to cope with other conventional examples of the foregoing subject, for example, the structure shown in 5 ΒΙφ may be adopted (where the same parts as the previous conventional examples are marked with the same symbols and repeated explanations of parts are omitted). In this conventional example, the second electrode 4 is formed only on the organic layer 3 and is a metal superposed on the lead-out electrode 5 Β.
第7頁 200304105 五、發明說明 引出電極 極之全體 出電極5 極層6之 於此 之圖樣, 面上甚為 L完全密 形。 惟, 間結合之 於在引出 常之熱處 有無法將 又, 不只限定 者因亦具 亦會產生 【發明内 本發 具備有供 極接續以 及成為此 製造方法 (4) 層6之 收容於 B係成 構造。 習知作|| 故可使 有利, 封因此 因第二 方式且 電極5 理工;^ 接觸阻 在此, 於此, 有發光 相同之 容】 明係為 給顯示 供給顯 種發光 上,將 一部份上的接續部份s 密封元件8内而密封成 為僅於透明電極層2乙 中,金屬電極層4係形 用單一個光罩形成,工 又,因將形成第二電極 不會產生電極劣化及產 電極4與引出電極5 B 介設有接觸面積較小之 B上形成金屬電極層4 因此於引出電極5 B表 抗充份減小之問題。 雖係例舉有機E L顯示 以發光元件為其要素之 元件之電極與引出電極 課題。 解決前述諸課題所提案 訊號之電極之發光元件 示訊號用之引出電極的 顯示裝置之一之有機E 前述電極與引出電極之 氣密狀。亦即 上形成金屬弓丨 成作為第二電 序簡單化故在 4之金屬電極 生供電障礙等 間係採用異種 接續部份S, L之前因係使 面亦產生氧化 二電 ,引 出電 極4 成本 層4 之情 金屬 又 用通 膜而 褒置作說明,但並 其他發光顯示裳置 間之接續部份因此 者’其目的為於由 所構成之對前述雷麵 發光顯示裝置、以· L顯示裝置以及其 接績部份上之電性Page 7 200304105 V. Description of the invention The overall pattern of the lead-out electrode and the electrode layer 6 of the lead-out electrode 6 is L-shaped. However, the combination of the two is because there is no way to draw it in the hot place. Not only is it limited, but it will also be generated. [Invention of this invention has a supply terminal connection and this manufacturing method (4) Layer 6 is contained in B Tie into structure. Known work || It can be advantageous, so the second method and electrode 5 are used for sealing; ^ The contact resistance is here. Here, there is the same content of luminescence. The contiguous part s on the part is sealed in the sealing element 8 so that it is only contained in the transparent electrode layer 2b. The metal electrode layer 4 is formed by a single photomask. However, since the second electrode will be formed, no electrode degradation will occur. And the metal electrode layer 4 is formed on the production electrode 4 and the lead-out electrode 5 B through a small contact area B. Therefore, the surface resistance of the lead-out electrode 5 B is sufficiently reduced. Although the organic EL display is exemplified by the problems of electrodes and lead-out electrodes of a device including a light-emitting element as its element. The light-emitting element of the electrode proposed for solving the aforementioned problems is an organic E, which is one of the display devices for the lead-out electrode of the signal. The aforementioned electrode and the lead-out electrode are airtight. That is, a metal bow is formed on it as a second electrical sequence. Therefore, a heterogeneous connection part S is used in the metal electrode of the electrode 4 in the power supply barrier. Before L, the surface also generates secondary oxides, which leads to the cost of the electrode 4. The feeling of the layer 4 metal is explained by using a film, but it is connected with other light-emitting display skirts. Therefore, its purpose is to make the above-mentioned light-emitting display device with a light-emitting display. Electrical properties of the device and its successor
200304105 五、發明說明(5) 阻抗減小而實行良好之訊號供給者。 為解決前述課題,本發明係具有以下之特徵。 申請專利範圍第1項有關之發明係一種發光顯示裝置 ,其係由具備有形成於透明基板上之第一電極、形成於該 第一電極上之至少一層以上之發光功能層與形成於前述發 光功能層上之第二電極之發光元件所構成,並接續有對前 述第二電極供給顯示訊號之引出電極者;其特徵在於:係 將前述第二電極與前述引出電極之接續部份之至少一處以 上之部份予以熔融接合者。 申請專利範圍第2項有關之發明係一種發光顯示裝置_ ,其係由具備有形成於透明基板上之第一電極、形成於Θ 第一電極上之至少一層以上之發光功能層與形成於前述發 光功能層上之第二電極之發光元件所構成,並接續有對前 述第二電極供給顯示訊號之引出電極者;其特徵在於:設 有覆蓋前述發光元件之密封元件而將前述第二電極全體以 該密封元件加以密封同時並於前述密封元件内部形成接續 前述第二電極與前述引出電極之接續部份而將該接續部份 之至少一處以上之部份予以熔融接合者。 申請專利範圍第3項之發明者係以申請專利範圍第1 項以及第2項之發光顯示裝置為前提,其特徵在於:使前 述引出電極為以與前述第二電極為不同之金屬形成者。 申請專利範圍第4項之發明者係以申請專利範圍第3 項之發光顯示裝置為前提,其特徵在於:前述第一電極為 透明電極而前述第二電極為金屬電極者。200304105 V. Description of the invention (5) A good signal supplier with reduced impedance. In order to solve the aforementioned problems, the present invention has the following features. The invention related to item 1 of the scope of the patent application is a light-emitting display device comprising a first electrode formed on a transparent substrate, at least one light-emitting functional layer formed on the first electrode, and the aforementioned light-emitting layer. The light emitting element of the second electrode on the functional layer is composed of a lead electrode for supplying a display signal to the second electrode, and is characterized in that at least one of the second electrode and a part of the lead electrode is connected. The parts above are to be fusion-bonded. The invention related to the second item of the scope of the patent application is a light-emitting display device, which comprises a light-emitting functional layer provided with a first electrode formed on a transparent substrate, at least one layer formed on the Θ first electrode, and formed on the foregoing. The second electrode on the light-emitting functional layer is composed of a light-emitting element, and is connected with a lead-out electrode for supplying a display signal to the second electrode. It is characterized in that a sealing element covering the light-emitting element is provided and the entire second electrode is provided. The sealing element is used for sealing and forming a connection part connecting the second electrode and the lead-out electrode inside the sealing element, and melting and joining at least one part of the connection part. The inventor of the third scope of the patent application is based on the premise that the light-emitting display device of the first and second scope of the patent application is characterized in that the aforementioned lead-out electrode is made of a metal different from the second electrode. The inventor of item 4 of the patent application is based on the premise that the light-emitting display device of item 3 of the patent application is applied, characterized in that the aforementioned first electrode is a transparent electrode and the aforementioned second electrode is a metal electrode.
第9頁 200304105 五、發明說明(6) 申請專利範圍第5項之發明者係以申請專利範圍第1 項至第4項之發光顯示裝置為前提,其特徵在於:前述接 續部份之熔融接合係藉由照射雷射光而實行者。 申請專利範圍第6項之發明者係以申請專利範圍第1 項至第5項之發光顯示裝置為前提,其特徵在於:前述發 光元件係有機E L元件者。 申請專利範圍第7項有關之發明係一種有機E L顯示 裝置,其係由形成於透明基板上之透明電極所構成之第一 電極與形成於該第一電極上之至少一層以上之發光功能層 所構成之有機層與形成於該有機層上之金屬電極層所構 之第二電極所形成之有機E L元件所構成,並接續有對β 述第二電極供給顯示訊號用之引出電極,其特徵在於:前 述引出電極係由形成於與前述第一電極絕緣之前述透明電 極層上之金屬引出電極層所形成,於該金屬引出電極層上 之一部份上係形成與前述第二電極接續之部份並將該等第 二電極與接續部份形成於密封元件内而將其密封成氣密狀 ,並將該接續部份上之至少一處以上之部份藉由照射雷射 光而形成熔融接合部者。 申請專利範圍第8項之發明之一種有機E L顯示裝置 之製造方法者,其特徵為包括有:於透明基板上形成所須 圖樣之透明電極層之工序;將前述透明電極層圖樣化而开 成第一電極之工序;於前述透明電極層或者透明基板上形 成金屬引出電極層之工序;於前述第一電極之露出面上形 成至少包含有一層以上之發光功能層之有機層的工序;於Page 9 200304105 V. Description of the invention (6) The inventor of item 5 of the patent application is based on the premise that the light-emitting display device of item 1 to 4 of the patent application is applied. It is implemented by irradiating laser light. The inventor applying for the patent scope item 6 is based on the premise of applying for the light emitting display devices of the patent scope scope items 1 to 5, which is characterized in that the aforementioned light emitting device is an organic EL device. The invention related to item 7 of the scope of patent application is an organic EL display device, which is composed of a first electrode composed of a transparent electrode formed on a transparent substrate and at least one light-emitting functional layer formed on the first electrode. The organic layer is composed of an organic EL element formed by a second electrode composed of a metal electrode layer formed on the organic layer, and an extraction electrode for supplying a display signal to the second electrode described above is characterized in that : The lead-out electrode is formed of a metal lead-out electrode layer formed on the transparent electrode layer insulated from the first electrode, and a portion connected to the second electrode is formed on a part of the metal lead-out electrode layer. And forming the second electrode and the spliced part in a sealing element to seal it into an airtight state, and forming at least one part of the spliced part to form a fusion joint by irradiating laser light Ministry. The applicant for a method for manufacturing an organic EL display device according to claim 8 of the patent scope includes the steps of forming a transparent electrode layer with a required pattern on a transparent substrate; and patterning the transparent electrode layer as described above. A step of forming a first electrode; a step of forming a metal extraction electrode layer on the transparent electrode layer or a transparent substrate; a step of forming an organic layer including at least one light-emitting functional layer on an exposed surface of the first electrode;
第10頁 200304105 五、發明說明(7) 前述有機層之露出面上形成第二電極且於前述金屬引出電 極層上形成接續部份之金屬電極層的工序;至少將前述金 屬電極層之全體以密封元件加以密封之密封工序;於前述 密封工序之前或之後將前述接續部份上之金屬引出電極層 與金屬電極層藉由照射雷射光予以熔融接合者。 具有前述特徵之本發明係具有以下之作用。 依申請專利範圍各項之發光顯示裝置因係將發光元件 上之供給顯示訊號之電極與引出電極之接續部份加以熔融 接合,因此即使於形成時其接續部份之接觸狀態有問題產 生,因於其後實行熔融接合,因此可落實接續部份之電% 接狀況,而可降低電性阻抗。藉此,可對發光元件良好Θ 供給訊號。 又,申請專利範圍第2項之發光顯示裝置者因係設置 覆蓋發光元件之密封元件,而以該密封元件將第二電極全 體密封,使前述接續部份形成於前述密封元件内,因此乃 可防止第二電極以及其接續部份之劣化,且可降低接續部 份之電性阻抗。又,因第二電極形成於發光功能層上與和 引出電極接續之部份上即可,因此形成單一光罩圖樣即 可,係可將工序簡單化而可降低其成本。 又,申請專利範圍第3項及第4項之發光顯示裝置者 其係將引出電極以與第二電極為不同之金屬電極形成,因0 此可將前述引出電極在透明電極層(第一電極之層)與第 二電極層之間介設而作為緩衝層。藉此,其即使於透明電 極層上形成第二電極之場合,因透明電極層與第二電極層Page 10 200304105 V. Description of the invention (7) The step of forming a second electrode on the exposed surface of the organic layer and forming a continuous metal electrode layer on the metal lead-out electrode layer; at least the entirety of the metal electrode layer A sealing process for sealing a sealing element; a person who melts and joins the metal lead-out electrode layer and the metal electrode layer on the aforementioned continuous portion before or after the aforementioned sealing step by irradiating laser light. The present invention having the aforementioned features has the following effects. The light-emitting display device according to the scope of the patent application is because the connection part of the electrode for supplying the display signal and the lead-out electrode on the light-emitting element is fusion-bonded, so even if the contact state of the connection part has a problem when it is formed, because Since the fusion bonding is performed thereafter, the electrical connection condition of the connection portion can be realized, and the electrical impedance can be reduced. Thereby, it is possible to supply a signal of a good Θ to the light-emitting element. In addition, since a light-emitting display device applying for item 2 of the patent is provided with a sealing element covering the light-emitting element, the entire second electrode is sealed with the sealing element, so that the aforementioned connection portion is formed in the aforementioned sealing element. Prevents the degradation of the second electrode and its connection part, and can reduce the electrical impedance of the connection part. In addition, since the second electrode may be formed on the light-emitting function layer and a portion connected to the lead-out electrode, a single mask pattern may be formed, which simplifies the process and reduces the cost. In addition, those who apply for the light-emitting display devices of the third and fourth patent scopes have formed the lead-out electrode with a metal electrode different from the second electrode. Therefore, the lead-out electrode can be formed on the transparent electrode layer (the first electrode). Layer) and a second electrode layer as a buffer layer. Therefore, even when the second electrode is formed on the transparent electrode layer, the transparent electrode layer and the second electrode layer are used.
第11頁 200304105 五、發明說明(8) 不直接接觸故可防止其直接接 蝕以及劣化情形之產生。 又,於本發明中,其第二 係成為異種金屬間之接續,而 因此即使為異種金屬間之接續 此,於將透明電極層圖樣化時 其上形成引出電極層,而因可 之部份,因此可將第一電極之 申請專利範圍第5項之發 之熔融接合係藉由照射雷射光 形成點狀之熔融接合部,因而 亦可確實地降低電性阻抗。 又,即使於將接續部份形 利用密封元件作密封後其亦可 至接續部份,因此可不須特別 工序之中途階段即可對接續部 元件以玻璃等之透明元件製成 續部份照射以雷射光。又,即 極為不同之金屬加以形成之場 異種金屬間之接續部份加以熔 接續部份之電性阻抗。 申請專利範圍第6項之發 有前述特徵之有機E L元件, 板上之第二電極確實地接續以 觸所會引發之第二電極之腐 電極與引出電極之接續部份 因將此接續部份熔融接合, ,其亦可降低電性阻抗。藉 ,可將該層保留一部份而於 於其上形成與第二電極接續 圖樣化工序簡易化。Page 11 200304105 V. Description of the invention (8) It is not in direct contact, so it can prevent direct corrosion and deterioration. Moreover, in the present invention, the second system is a connection between dissimilar metals, and therefore, even if it is a connection between dissimilar metals, a lead-out electrode layer is formed thereon when the transparent electrode layer is patterned, and the part which can be used is Therefore, the fusion bonding of the first electrode in the scope of patent application No. 5 can be performed to form a spot-shaped fusion bonding portion by irradiating laser light, so that the electrical impedance can be reliably reduced. In addition, even after the connection part is sealed with a sealing element, it can reach the connection part, so the connection part element can be made of a transparent element such as glass to irradiate the connection part without the need for a special process. laser. In other words, the field is formed by very different metals, and the electrical impedance of the spliced portion between the dissimilar metals and the spliced portion. For the organic EL element with the aforementioned characteristics issued in the scope of the patent application No. 6, the second electrode on the board is definitely connected to touch the spoiled electrode of the second electrode and the lead-out electrode. Fusion bonding, which can also reduce electrical impedance. By using this, a part of the layer can be reserved and the patterning process for forming a connection with the second electrode on the layer can be simplified.
光顯示裝置者,其接續部份 實行,因此可於接續部份上 即使是小面積之接續部份其I 成於密封元件内之場合,於 經由透明基板將雷射光照射 地變更發光顯示裝置之製造 份實行溶融接合。而將密封 時,亦可介以密封元件對接 使於將引出電極以與第二電 合,因藉由照射雷射光可將 融合成,因此可確實地降低For the light display device, the connection part is implemented. Therefore, even if the connection part of a small area is formed in a sealing element, the light emitting display device can be changed by irradiating laser light through a transparent substrate. The manufacturing part is melt-bonded. In the case of sealing, it is also possible to connect the lead-out electrode to the second electrode via a sealing element. Since the laser light can be fused by irradiating laser light, it can be reliably reduced.
光顯示裝置者,因可適用具 故可將非直接形成於透明基 引出電極而可實現低阻抗之For light display devices, because it is applicable, it can be formed indirectly on the transparent-based lead-out electrode and low impedance can be achieved.
第12頁 200304105 五、發明說明(9) 引出。又,藉由密封元件密封第二電極以及接續部份之物 品者其電極不會劣化且可確實地實行對第二電極之電力供 給且可將有機E L之發光功能層與外部遮斷因此可達到將 發光顯示裝置長壽命化之目的。 申請專利範圍第7項及第8項之有機E L顯示裝置以 及其製造方法者,因係於形成於透明基板上之透明電極層 上形成接續第二電極之金屬引出電極層構造,因此除可保 留部份透明電極層外,亦可形成金屬引出電極層,故可將 透明電極層之圖樣化工序予以簡單化。又,由金屬電極層 所構成之第二電極因於金屬引出電極層上形成接續部份因 此不會有金屬電極層與透明電極層直接接觸而產生電極 蝕現象之慮。又,包含接續部份,因係將金屬電極層形成 於密封元件内而密封成氣密狀,故金屬電極層無劣化之慮 ,而可對第二電極確實地供給電力。又,金屬電極層為形 成於形成有第二電極之有機層上與金屬引出電極層上之一 部份上即可,因此形成出形成第二電極之單一光罩圖樣即 可,因其可將形成工序簡單化故可降低成本。 又,於接續部份上因接續著金屬電極層與異種金屬之 金屬引出電極層,而對該接續部份藉由照射雷射光形成熔 融接合部,因此即使有異種金屬間之接續或形成時之密接 性之問題,其亦可得到低電性阻抗之接續。又,此種藉由φ 照射雷射光所實施之熔融接合處理因係介以透明基板或者 透明之密封元件將雷射光照射於接續部份,故可於密封元 件之密封工序之後實行故可在不須改變有機E L顯示裝置Page 12 200304105 V. Explanation of Invention (9). In addition, those who seal the second electrode and the contiguous parts with a sealing element will not deteriorate the electrodes, can reliably supply power to the second electrode, and can block the light-emitting functional layer of the organic EL from the outside. The purpose of extending the life of the light-emitting display device. The organic EL display devices with the scope of patent applications No. 7 and No. 8 and the method of manufacturing the organic EL display devices are based on the structure of the metal lead-out electrode layer formed on the transparent electrode layer formed on the transparent substrate to connect the second electrode. In addition to a part of the transparent electrode layer, a metal lead-out electrode layer can also be formed, so the patterning process of the transparent electrode layer can be simplified. In addition, since the second electrode composed of the metal electrode layer forms a contiguous portion on the metal lead-out electrode layer, there is no concern that the electrode electrode will be corroded due to the direct contact between the metal electrode layer and the transparent electrode layer. In addition, since the metal electrode layer is formed in the sealing element and is hermetically sealed, the metal electrode layer can be surely supplied with power to the second electrode because the metal electrode layer is hermetically sealed. In addition, the metal electrode layer may be formed on the organic layer on which the second electrode is formed and a portion of the metal lead-out electrode layer. Therefore, it is sufficient to form a single photomask pattern for forming the second electrode. The simplification of the forming process can reduce costs. In addition, since the metal electrode layer and the metal lead-out electrode layer of the dissimilar metal are connected to the continuation portion, the fusion portion is formed by irradiating laser light on the continuation portion. Therefore, even when there is continuity or formation between dissimilar metals, The problem of tightness can also be achieved with a low electrical impedance connection. In addition, since the fusion bonding process performed by irradiating laser light with φ is because the laser light is irradiated to the connection part through a transparent substrate or a transparent sealing element, it can be implemented after the sealing process of the sealing element, so Must change organic EL display device
第13頁 200304105 五、發明說明(ίο) 之製造工序之中途工序之情形下實行所須之處理。 【實施方式】 以下茲參照圖示說明本發明之實施型態(其與習知技 術相同之部份係標示以相同符號並省略一部份之說明)。 又,於以下之實施型態中係以有機E L顯示裝置為例作說 明,惟本發明亦可適用於同樣地於發光元件上具有電極以 及引出電極之構造之其他類之發光顯示裝置。 第1圖為本發明一實施型態有關之有機E L顯示裝置 之說明圖。有機E L顯示裝置係以於由玻璃等所構成之透 明基板1之單側面上順序積層以I T〇等之透明電極層 L所構成之第一電極(陽極)2、包含有A lq3等之發iP 材料所構成之至少一層以上之發光功能層的有機層3與A 1等之金屬電極層所構成之第二電極(陰極)4所成之有 機E L元件所構成,於此有機E L元件之第一電極2與第 2電極4上係形成有供給顯示訊號用之引出電極5 A、5 B。 在此,第一電極2側之引出電極5 A係於形成第一電 極2時之透明電極層2 L上形成作為阻擋層之金屬引出電 極層6 ,藉由於該引出電極層5 A與第二電極4之間形成 絕緣膜7 A係可達到防止短路之目的,而第二電極側之引 出電極5 B係於經圖樣化之透明電極層2 L之一部份上形φ 成作為阻擋層之金屬引出電極層6 ,此引出電極5 B與第 一電極2之間係形成絕緣膜7 B以達到防止短路之目的。 金屬引出電極層6之材料係為與形成第二電極4之金Page 13 200304105 V. The description of the invention (ίο) in the middle of the manufacturing process to implement the necessary processing. [Embodiment] The following describes the implementation mode of the present invention with reference to the drawings (the same parts as those in the conventional technology are marked with the same symbols and a part of the explanation is omitted). In the following implementations, an organic EL display device is used as an example for description. However, the present invention can also be applied to other types of light-emitting display devices having the same structure as an electrode on a light-emitting element and a lead-out electrode. FIG. 1 is an explanatory diagram of an organic EL display device according to an embodiment of the present invention. The organic EL display device is a first electrode (anode) composed of a transparent electrode layer L such as IT0, which is laminated on a single side of a transparent substrate 1 composed of glass, etc. in sequence. The organic EL element composed of at least one light-emitting functional layer made of a material including at least one organic layer 3 and a second electrode (cathode) 4 composed of a metal electrode layer such as A 1 is the first organic EL element. The electrodes 2 and the second electrode 4 are formed with lead electrodes 5 A and 5 B for supplying a display signal. Here, the lead-out electrode 5 A on the side of the first electrode 2 is a metal lead-out electrode layer 6 as a barrier layer formed on the transparent electrode layer 2 L when the first electrode 2 is formed. Forming an insulating film 7 between the electrodes 4 A can achieve the purpose of preventing a short circuit, and the lead-out electrode 5 B on the second electrode side is formed on a part of the patterned transparent electrode layer 2 L as a barrier layer The metal lead-out electrode layer 6 is formed with an insulating film 7 B between the lead-out electrode 5 B and the first electrode 2 to prevent short circuit. The material of the metal lead-out electrode layer 6 is made of gold that forms the second electrode 4
第14頁 200304105 五、發明說明(11) 屬電極層4 L或者透明電極層2 L為不同之導電性之金屬 材料,可使用C r等之材料’,將金屬電極層4 L全體以由 金屬或者玻璃所構成之密封元件8加以密封,而於此密封 元件8内形成金屬引出電極層6與金屬電極層4 L之接續 部份S。又,於此接續部份S上係介以透明基板1照射以 雷射光L a ,而使點狀之熔融接合部9 a至少形成一處或 依須要形成多數處。此熔融接合部9 a於密封元件8為由 玻璃等之透明元件形成時,亦可介以密封元件8而照射雷 射光L a ’而形成。 依此種實施型態之有機E L顯示裝置,因異種金屬之 金屬引出電極層6與金屬電極層4 L之接續部份S係被 射光局部加熱而熔融接合,因此可降低此接續部份S上之 電性阻抗。又,包含接續部份S因將金屬電極層4 L全體 以密封元件8加以密封因此形成第二電極4之金屬電極層 4 L係不會接觸熱能與濕氣而不會劣化。藉此乃可對第二 電極實施良好之電力供給。 茲說明本實施型態中之有機E L顯示裝置之製造方法 。作為第一工序係於透明基板1上形成透明電極層2 L並 施加以顯示所須之圖樣化加工而形成第一電極2 。此時, 圖樣化僅限於最小限度,而藉由將透明電極層2 L作為引 出電極5 A、5 B之基底加以保留係可將圖樣化處理簡易φ 化。 在下一工序中,係於引出電極5A、5 B上形成金屬 引出電極層6而接著將發光領域L加以罩蓋,而於必要之Page 14 200304105 V. Description of the invention (11) The metal electrode layer 4 L or the transparent electrode layer 2 L is a metal material with different conductivity. Materials such as C r can be used. Alternatively, a sealing element 8 made of glass is sealed, and a contiguous portion S of the metal lead-out electrode layer 6 and the metal electrode layer 4 L is formed in the sealing element 8. In addition, the continuation part S is irradiated with the laser light L a through the transparent substrate 1 to form at least one spot-shaped fusion bonding portion 9 a or a plurality of locations as required. When the sealing element 8 is formed of a transparent element such as glass, the fusion bonding portion 9a may be formed by irradiating the laser light La 'through the sealing element 8. According to such an implementation type of organic EL display device, since the spliced portion S of the metal lead-out electrode layer 6 and the metal electrode layer 4 L of the dissimilar metal is locally heated and fused by the emitted light, the spliced portion S can be reduced. Electrical impedance. In addition, since the entire metal electrode layer 4 L including the splicing portion S is sealed by the sealing element 8, the metal electrode layer 4 L forming the second electrode 4 is not exposed to thermal energy and moisture and does not deteriorate. This makes it possible to implement a good power supply to the second electrode. The manufacturing method of the organic EL display device in this embodiment is described below. As a first step, a transparent electrode layer 2 L is formed on a transparent substrate 1 and patterning processing required for display is performed to form a first electrode 2. At this time, the patterning is limited to a minimum, and the patterning process can be simplified by keeping the transparent electrode layer 2 L as the base of the lead-out electrodes 5 A and 5 B. In the next step, a metal extraction electrode layer 6 is formed on the extraction electrodes 5A and 5B, and then the light-emitting area L is covered, and if necessary,
第15頁 200304105 五、發明說明(12) 領域上形成絕緣膜7 A、7 B。接著於第一電極2之露出 面上藉由蒸鍍等形成有機層3後於該有機層3上與金屬引 出電極層6之接續部份S之上形成作為第二電極4之金屬 電極層4 L。 又,於設置覆蓋金屬電極層4 L全體之密封元件8之 密封工序之後,加工形成出藉由照射以雷射光L a或L a ’所形成之熔融接合部9 a 。此雷射光照射中之使用光源 係可得到如Y A G雷射等之所期之輸出的雷射,其輸出光 係被光學系統集光成點狀,而介以透明基板1或者透明之 密封元件8照射至接續部份。 赢 依照此種製造方法,其於將透明電極層2 L作為引出® 電極5 B之基底而保留之場合,其藉由金屬引出電極6之 仲介係不會使透明電極層2 L與第二電極4直接接觸因此 不會產生電極腐蝕現象。又,利用雷射光照射之熔融接合 部9 a之形成係於密封工序終了後實行,因此不須變更有 機E L顯示裝置之一連串之製造工序。 第2圖為揭示本發明之其他實施型態之說明圖。其與 前述實施型態相同之部份係標示以相同符號並省略部份之 重複說明。於此實施型態中,係使形成於接續部份S上之 熔融接合部9 b形成為被雷射光照出之點狀孔之樣態。藉 此,可於點狀孔之内面形成金屬引出電極層6與金屬電極φ 層4 L之熔融接合部份因此可達到與前述實施型態為相同 之作用效果。又,其製造方法係以與前述實施型態為相同 之工序加以實行。Page 15 200304105 V. Description of the invention (12) The insulating films 7 A and 7 B are formed in the field. Next, an organic layer 3 is formed on the exposed surface of the first electrode 2 by evaporation or the like, and a metal electrode layer 4 as a second electrode 4 is formed on the organic layer 3 and a connection portion S of the metal extraction electrode layer 6. L. Further, after the sealing step of providing the sealing element 8 covering the entire metal electrode layer 4L, a fusion-bonded portion 9a formed by irradiation with laser light La or La 'is processed to form. The light source used in this laser light irradiation can obtain a desired output laser such as a YAG laser. The output light is collected by the optical system into a point shape, and the transparent substrate 1 or the transparent sealing element 8 is interposed. Irradiate to the subsequent part. In accordance with this manufacturing method, when the transparent electrode layer 2 L is retained as the base of the lead-out electrode 5 B, the intermediary system of the metal lead-out electrode 6 does not make the transparent electrode layer 2 L and the second electrode 4Direct contact does not cause electrode corrosion. In addition, since the formation of the fusion-bonded portion 9a by laser light irradiation is performed after the sealing process is completed, it is not necessary to change a series of manufacturing processes of the organic EL display device. FIG. 2 is an explanatory diagram showing another embodiment of the present invention. The same parts as those in the previous embodiment are marked with the same symbols and repeated descriptions of the parts are omitted. In this embodiment, the fusion-bonding portion 9 b formed on the continuation portion S is formed into a spot-shaped hole that is illuminated by laser light. Thereby, the fusion-bonded portion of the metal lead-out electrode layer 6 and the metal electrode φ layer 4 L can be formed on the inner surface of the dot-shaped hole, so that the same effect as that of the aforementioned embodiment can be achieved. The manufacturing method is carried out in the same steps as in the aforementioned embodiment.
第16頁 200304105 五、發明說明(13) 第3圖為本發明之其他實施型態之說明圖。其中與前 述實施型態相同之部份係標示以相同符號並省略部分之重 複說明。於此實施型態中,於圖樣化出透明電極層2 L時 ,係除去引出電極5 B之基底層。藉此,第二電極4側之 引出電極5 B係藉由以C r等之金屬引出電極層6所形成 ,於密封元件8内之接續部份S上係與形成第二電極4之 金屬電極層4 L接續。於使實施型態中,藉由於密封元件 8之接續部分S上形成熔融接合部9 b係可達到與前述實 施型態相同之作用。又,此實施型態之製造方法者除透明 電極層2 L之圖樣化外係以與前述實施型態為相同之工序_ 加以實行。 響 又,於前述第1圖至第5圖中為使發明内容較容易理 解係揭示由單獨之發光領域L所構成之發光顯示裝置,但 本發明之發光顯示裝置並非只限定於此種形態,其亦可以 發光領域L為排列成多數個點矩陣狀之發光顯示裝置為對 象。 本發明因具有如上述之構成,因此可於由具備有供給 顯示訊號用之電極的發光元件所構成之接續有可對電極供 給顯示訊號用之引出電極的發光顯示裝置,以及成為該種 發光顯示裝置之一之有機E L顯示裝置以及其製造方法上 ,將電極與引出電極之接續部份上之電性阻抗減小而實行φ 良好之訊號供給。Page 16 200304105 V. Description of the invention (13) Figure 3 is an explanatory diagram of other embodiments of the present invention. Among them, the same parts as those of the aforementioned implementation are marked with the same symbols and repeated explanations of the parts are omitted. In this embodiment, when the transparent electrode layer 2 L is patterned, the base layer of the lead-out electrode 5 B is removed. Thereby, the lead-out electrode 5 B on the side of the second electrode 4 is formed by a metal lead-out electrode layer 6 made of Cr or the like, and the metal electrode forming the second electrode 4 is connected to the continuous portion S in the sealing element 8. Layer 4 L continues. In the implementation mode, the same effect as that of the foregoing implementation mode can be achieved by forming the fusion bonding portion 9b on the connection portion S of the sealing member 8. In addition, the manufacturing method of this embodiment mode is implemented by the same process as the previous embodiment mode except that the transparent electrode layer 2 L is patterned. In order to make the content of the invention easier to understand in the aforementioned first to fifth figures, a light-emitting display device composed of a single light-emitting field L is disclosed, but the light-emitting display device of the present invention is not limited to this form. It is also possible to use the light emitting area L as a light emitting display device arranged in a matrix of a plurality of dots. Since the present invention has the structure as described above, a light-emitting display device constituted by a light-emitting element provided with an electrode for supplying a display signal, and a lead-out electrode capable of supplying a display signal to the electrode, and such a light-emitting display can be provided. In the organic EL display device, which is one of the devices, and the manufacturing method thereof, the electrical impedance on the connection portion between the electrode and the lead-out electrode is reduced to implement a good signal supply of φ.
第17頁 200304105 圖式簡單說明 【圖式簡單說明】Page 17 200304105 Schematic description [Schematic description]
第 一 圖 為 本 發 明 之 實 施 型 態 有 關 之 有 機 E L 顯示裝 置 之 說 明 圖 〇 第 二 圖 為 本 發 明 之 其 他 實 施 型 態 之 說 明 圖 〇 第 二 圖 為 本 發 明 之 其 他 實 施 型 態 之 說 明 圖 〇 第 四 圖 為 習 知 例 之 有 機 E L 顯 示 裝 置 之 說 明 圖 〇 第 五 圖 為 習 知 例 之 有 機 E L 顯 示 裝 置 之 說 明 圖 〇 [ 元 件 代 表 符 號 ] 透 明 基 板 1 第 一 電 極 2 有 機 層 3 第 —- 電 極 4· 引 出 電 極 5 A 5 B 金 屬 引 出 電 極 層 6 絕 緣 膜 7 A 7 B 密 封 元 件 8 熔 融 接 合 部 9 a , 9 b 發 光 領 域 L 接 續 部 份 SThe first diagram is an explanatory diagram of an organic EL display device related to an implementation form of the present invention. The second diagram is an explanatory diagram of another implementation form of the present invention. The second diagram is an explanatory diagram of another implementation form of the present invention. The fourth figure is a description of a conventional organic EL display device. The fifth figure is a description of a conventional organic EL display device. [Element Representative Symbols] Transparent substrate 1 First electrode 2 Organic layer 3 Chapter --- Electrode 4 · Lead-out electrode 5 A 5 B Metal lead-out electrode layer 6 Insulating film 7 A 7 B Sealing element 8 Fusible joint 9 a, 9 b Light-emitting area L Continuation part S
第18頁Page 18
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