SU993007A2 - Film thickness standard - Google Patents

Description

The invention relates to metrology, namely, exemplary measures for verification and calibration of means for measuring coating thickness.

According to the main author. St. No. 813129 is a known measure of the thickness of films (coatings) comprising a substrate with a section for adjusting the thickness gauges to zero and a film deposited on the substrate, a depth-certified groove is made on the upper surface of the substrate, the film is inserted into the said groove,. Owl falls from the upper surface of the substrate fl.

However, the known measure does not provide the possibility of calibration and graduation of film thickness gauges, coatings) on parts made of different materials, for example, to measure the thickness of nickel coating on steel, brass on gshyumium alloy, etc. In order to check and calibrate thickness gauges, it is necessary to have as many measures as the types of materials used to make parts (products) coated with them, so the set of measures becomes cumbersome and expensive.

It is most advisable to have one unified measure for measuring the film thickness of the coating) applied to various materials that can be used to make parts.

The purpose of the invention is to unify the measure of film thickness.

The goal is achieved

10 in that a measure of the thickness of the films, comprising a substrate with a region for adjusting the thickness gauges to zero and a film deposited on the substrate, is grooved on the upper surface of the substrate,

15 is certified in depth, the film is inserted into the said groove, and the upper surface of the film coincides with the upper surface of the substrate, is provided with a base with a groove, and the substrate

20 is made of elements of different materials that are pressed into the groove of the base.

FIG. 1 shows a measure of the thickness of the films, front view; in fig. 2 25 the same, top view.

The measure of film thickness contains a substrate 1, on the upper surface of which there are areas 2 for adjusting to zero thickness gauges (not shown

Claims (1)

30 and. film 3, deposited on the substrate 1. On the upper surface of the substrate 1, a groove is made, the bottom 4 of which is removed from the upper surface of the substrate 1 by a non-sized} i equal to the desired one. film thickness (coating 3 .. Film 3 fills the groove so that the upper surface coincides with the upper surface of the substrate 1. The film thickness measure is provided with a base 5 with groove 6, into which the substrate 1 is pressed, made of elements (no different materials are marked Other dimensions of the measure are determined based on the dimensions of the measuring heads of the thickness gauges, as well as on the varieties of materials used for the manufacture of parts (products / subject to thickness gauge control. In the manufacture of measures the elements of different materials are The substrate 1 is pressed into the groove of the base 5, and then the upper surface of the substrate 1 and the bottom 4 of the main groove is brought to a high roughness class, which allows the depth of the main groove to be certified with high accuracy, for example, by an interference method. films (coatings 3 in the main groove check the flatness of the upper surface of the substrate 1, which ensures the coincidence of the upper surfaces of the film 3 and the substrate 1. The verification and calibration of the thickness gauge is performed using a set of measures with different thickness 3. The zero point Yenok kcal gauge power metal dissolved by mounting the gauge on the sensor portion 2 of the substrate 1 which corresponds to the material of the measured items, i.e. the material from which the part is made (product. The thickness gauge adjusts to zero on the surface of the substrate 1 in section 2 where the film coating is absent and the substrate 1 is made of elements of different materials that can be named to make the measured part (product. Then The thickness gauge sensor is moved to the area with the film (coating 3. The thickness gauge readings are compared with the certified film thickness (coating. Next, a similar calibration or calibration of the thickness gauge is performed using a different substrate element. Set of consisting of 2 or 3 measures, allows you to check the characteristics of the thickness gauge at various points on the scale. The unification of the film thickness measure is that when calibrating and calibrating coating thickness gauges, measuring the thickness of one type of coating on parts made from different materials, a single measure is used, which shortens the calibration time of the thickness gauges, and also eliminates the random errors that occurred during the exchange of measures, and the accuracy of the calibration is twisted, since the error of manufacture of this measure is the same for all ENTOV substrate. Claims of Invention Measure of film thickness according to ed. St. No. 813129, characterized in that, for the purpose of unification, it is provided with a base with a groove, and the substrate is made of elements of different materials that are pressed into the groove of the base. Sources of information taken into account during eo-spertiz 1. USSR Author's Certificate No. 813129, cl. G 01 B 7/06, 1981. ,AT 6