SU1620944A1 - Electrostatic accelerometer - Google Patents

Abstract

The invention relates to a measurement technique and is intended to measure the accelerations of moving objects. The purpose of the invention is to enhance the functionality by providing adjustment of the measurement range by changing the area of the electrodes of the reverse electrostatic converter. The device contains a tandem on an elastic PDE, stationary electrodes containing electrodes of a position sensor and an inverter, an electronic amplifier, a switching device. Adjustment of the measurement range is achieved by switching certain electrodes of the electrodes into which the electrodes of the inverse electrostatic converter are divided. 2 Il.

Description

The invention relates to a measurement technique and can be used to measure the accelerations of moving objects,

The purpose of the invention is to expand the functionality by providing adjustment of the measurement range by changing the area of the electrodes of the reverse electrostatic transducer.

FIG. 1 shows an electrostatic accelerometer; FIG. 2 is a section A-A in FIG. one.

The electrostatic accelerometer contains a mannik 1 on an elastic suspension in the form of a beam made of a single-crystal electrically conductive material, stationary electrodes 2 symmetrically located on opposite sides of the artist, consisting of electrodes of a capacitive sensor 3 position and electrodes of an inverse electrostatic converter 4. Electrodes of a reverse electrostatic converter 4 are made in the form of several electrodes, and the areas of each

symmetric par-electrodes are equal and proportional to the measurement range.

In addition to the described components and parts, the accelerometer has a capacitive position sensor, an electrostatic inverse transducer, and an electronic amplifier. These nodes form the compensation loop of the accelerometer feedback circuit.

The accelerometer works as follows.

When acting along the sensitivity axis of the measured acceleration, the pendulum 1 deviates in the direction opposite to the acceleration direction. The mast 1 of a monocrystalline electrically conductive material and the electrodes of the capacitive 3 position sensor form a differential capacitor, the change in capacitance of which is converted into an electrical signal and amplified. A voltage proportional to the measured acceleration is applied to the electrodes of the inverse electrostatic transducer 4, creating a force that tends to return the tandem 1 to its original position.

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a lie. The magnitude of the force acting on the symbol 1 is defined as

P K S -E -U, 1L

 (one)

where K is the proportionality coefficient;

S is the area of electrodes of the inverse electrostatic converter 4;

E is the constant voltage applied to the electrodes 4;

U is the voltage proportional to the measured acceleration;

d is the distance between the pilot 1 and one of the electrodes 4.

As can be seen from equation (1), the magnitude of the compensating force is determined by the values of E and S with constant acceleration.

A change in the DC voltage E applied to the electrodes A of the inverse electrostatic converter is limited by both structural and schematic reasons, as well as associated with additional hardware costs.

Therefore, connected in a certain combination of symmetric pairs of electrodes 4 to a switching device (not shown), adjust the compensating force and the measurement range of the accelerometer.

The proposed electrostatic accelerometer, in comparison with the known, allows adjustment of the measurement range, which is achieved by switching certain pairs of electrodes to which

0

five

0

6

0

five

electrodes of the reverse electrostatic converter are separated.

Claims (1)

The invention The electrostatic accelerometer, containing a movable tilting electrode on an elastic suspension in the form of a beam of single-crystal conductive material, is fixed symmetrically located on opposite sides of the electrode electrodes of a capacitive position sensor and a reverse electrostatic transducer, characterized in that by adjusting the measurement range by changing the area of the electrodes of the reverse electrostatic the transmitter, each electrode of the inverse electrostatic converter is made sectioned, each section is connected to a switching device, and the areas of each symmetric pair of sections are equal and are determined by the ratio 0 K F U HD2 where K is the proportionality coefficient; F - the value of the compensating force; E is a constant voltage applied to the electrodes of the inverter; U is the voltage proportional to the measured acceleration; e is the distance between the man and one of the inverse transducer electrodes. BUT FIG. one Editor A. Ogar Order 4243 Compiled by T. Makarova Tehred M. Morgental Proofreader S. Shekmar Circulation Subscription VNIIPI State Committee for Inventions and Discoveries at the State Committee on Science and Technology of the USSR 113035. Moscow, Zh-35, 4/5 Raushsk nab. Aa BUT FIG. 2 Proofreader S. Shekmar Subscription