SU1520260A1 - Membrane vacuum pump - Google Patents

Abstract

The invention relates to a device of membrane type vacuum pumps and can be applied in areas using foreline vacuum pumps. The purpose of the invention is to reduce the power consumed by the pump. Membranes (M) 2 and 3 are mounted in the pump casing 1, connected by a rod 4 and forming submembrane and supramembrane chambers (PC) and (NC) respectively. 5.6 and 7.8. NK 7 and 8 are equipped with inlet and exhaust valves 9,10 and 11, 12 respectively. Valve-distributor (КР) 13 has an inlet 14, communicated with the control pneumatic line 17, and two outputs (B) 15 and 16, communicated with the control elements (CU) 19, 20 and 21, 22 of valves 9, 10 and 1, 1 PCs 5 and 6 are connected by channel 23 and filled with liquid. When control air is supplied from B 15 to OU 19 and 22, valves 9 and 12 are opened, under the action of the fluid in PC 5 and 6 M 2 and 3, gas is lowered and NK 7 is absorbed. In this case, OU 20 and 21 are communicated via B 16 with the atmosphere, and valves 10 and 11 are closed. When control air is supplied from B 16 to OU 20 and 21, valves 10 and 11 are opened, under the action of pressure from a power line 18 M 2 and 3, the gas is lifted and OC 7 is ejected. At this, OU 19 and 22 communicate with the atmosphere At 15, and valves 9 and 12 are closed. Thus, potential energy of the fluid is used to drive M 2 and 3 during the suction process. 1 il.

Description

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recovered by the pump. Membranes (M) 2 and 3 are mounted in the pump casing 1, connected by the stem k and forming submembrane and supramembrane cameras (PC) and (IR) respectively. 5, 6 and 7, 8. NC 7 and 8 are equipped with inlet and exhaust valves 9, Yu and 11, 12 respectively. The valve-distributor (KP) 13 has an inlet 14, which is connected to the control pneumatic line 17, and two outlets (B) 15 and 1b, which communicate with the controls (OU) 19, 20 and 21, 22 valves 9, 10 and 11 12. PCs 5 and 6 are connected by channel 23 and filled with liquid. When supplying control air from B 15 to OU 19 and 22, valves 9 and 12 open, under

the action of the fluid in the PC 5 and 6 M 2 and 3 is lowered and the gas is sucked into the NC 7. At this, the OU 20 and 21 communicate with B through the atmosphere, and the valves 10 and 11 are closed. When control air is supplied from B 16 to OU 20 and 21, valves 10 and 11 are opened, under the action of pressure from a power line 18 M 2 and 3, the gas is lifted and OC 7 is ejected. At this, OU 19 and 22 communicate with the atmosphere At 15, and valves 9 and 12 are closed. Thus, potential energy of the fluid is used to drive M 2 and 3 during the suction process. 1 il.

The invention relates to a device for vacuum pumps of the membrane type and can be used in areas using foreline vacuum pumps.

The purpose of the invention is to reduce the power consumed by the pump.

The drawing schematically shows the proposed vacuum pump.

The vacuum pump includes a housing 1 and two membranes 2 and 3 installed oppositely in it, connected by a stem i and forming submembrane and supramembrane chambers 5, 6 and 7, 8 with housing 1, the latter being equipped with inlet and exhaust valves 9, 10 and 11, 12, valve-distributor 13 with inlet 1 and two atmospheric outlets 15 and 1b, control and power pneumatic lines 17 and 18. Inlet and exhaust valves 9-12 are provided with control elements 19-22, diaphragms 2 and 3 are installed horizontally one above the other, sub-membrane chambers 5 and 6 are connected by channel 23 and filling Eny liquid. In addition, one outlet 15 of the distributor valve 13 is additionally connected to the control bodies 19 and 22 of the intake valve 9 of the upper and exhaust valve 12 of the lower over-membrane chambers 7 and 8, the other outlet 16 with the control bodies 21 and 20 of the upper and intake valve 10 of the inlet valve 11 the lower nadmembrane chambers 7 and 8, the inlet 1 of the valve 13 is connected to the control pneumatic line 17, and the inlet valve 10 is lower

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her numbass chamber 8 is connected to the power pnevmoline 18.

The inlet valve 9 is connected to the gas source 2, the outlet 15 of the distributor valve 13 is connected to the control units 19 and 22 by means of (1 non-line 25-27, and the output 1b is connected to the control bodies 20 and 21 by means of a pneumatic line 28-30.

The vacuum pump works as follows.

In order to evacuate the source 2k, the outlet 15 of the distributor valve 13 is cut off from the atmosphere. From the control pneumatic line 17, through the inlet 14, air enters the outlet 15 of the valve of the distributor 13, and further along the pneumatic lines 25-27 - to the control organs 19 and 22. This opens the inlet valve 9, together with the supermembrane chamber 7 with the source 24, and the exhaust valve 12, together with the supermembrane chamber 8 with the atmosphere. Under the action of the weight of the fluid enclosed in sub-membrane chambers 5 and 6 and channel 23, membrane 2 and. 3, mounted in housing 1 and connected by stem k, are down synchronously downward. At this time, the output 1b is in communication with the atmosphere, and the valves 10 and 11 are closed. The process of suction into the chamber 7 is carried out.

At the end of the suction stroke, the outlet 15 is cut off from the inlet 14 and communicates with the atmosphere, and the outlet 1b is cut off from the atmosphere and communicates with the inlet 14. The valves 9 and 12, controlled by the organs 19 and 22, are closed.

and valves 10 and 11, controlled by organs 20 and 21, are opened. Air is supplied to control bodies 20 and 21 from exit 1b by pneumatic lines 28-30. At the same time, through the open valve 10, air from the power pneumatic line 18 enters the supramembrane chamber 8. Under the action of pressure of this air, membranes 2 and 3 are synchronously lifted, carried out the process of pushing gas out of the supermembrane chamber 7 through the open exhaust valve 11. repeats.

I Such an embodiment of the vacuum pump contributes to the reduction of their power consumption by using the potential energy of the fluid to drive the membrane during the suction process.

Claims (1)

Invention Formula A diaphragm vacuum pump comprising a housing and two membranes installed in it, which are connected in it forming diaphragm and supramembrane chambers forming the body, the latter being equipped with inlet and exhaust valves, characterized in that, in order to reduce power consumption, it contains an air distributor with an inlet and two atmospheric outlets that control and power pneumatic line, the inlet and exhaust valves are provided with controls, the diaphragms are installed horizontally one above the other, the diaphragm chambers are connected by a channel and filled with liquid, while one outlet of the valve distributes ate is additionally connected to the controls of the intake valve upper 0 and the exhaust valve of the lower supramembrane chambers; .