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SG11202108085UA - Transport system - Google Patents

Transport system

Info

Publication number
SG11202108085UA
SG11202108085UA SG11202108085UA SG11202108085UA SG11202108085UA SG 11202108085U A SG11202108085U A SG 11202108085UA SG 11202108085U A SG11202108085U A SG 11202108085UA SG 11202108085U A SG11202108085U A SG 11202108085UA SG 11202108085U A SG11202108085U A SG 11202108085UA
Authority
SG
Singapore
Prior art keywords
transport system
transport
Prior art date
Application number
SG11202108085UA
Inventor
Eiji Wada
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11202108085UA publication Critical patent/SG11202108085UA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0464—Storage devices mechanical with access from above
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
    • B66C13/08—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
    • B66C17/06—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports specially adapted for particular purposes, e.g. in foundries, forges; combined with auxiliary apparatus serving particular purposes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG11202108085UA 2019-01-25 2019-12-13 Transport system SG11202108085UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019011282 2019-01-25
PCT/JP2019/048872 WO2020153041A1 (en) 2019-01-25 2019-12-13 Transport system

Publications (1)

Publication Number Publication Date
SG11202108085UA true SG11202108085UA (en) 2021-08-30

Family

ID=71736768

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202108085UA SG11202108085UA (en) 2019-01-25 2019-12-13 Transport system

Country Status (8)

Country Link
US (1) US11891245B2 (en)
EP (1) EP3915902B1 (en)
JP (1) JP7211439B2 (en)
KR (1) KR102509136B1 (en)
CN (1) CN113348141B (en)
SG (1) SG11202108085UA (en)
TW (1) TWI829848B (en)
WO (1) WO2020153041A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220332500A1 (en) * 2019-09-18 2022-10-20 Murata Machinery, Ltd. Transport system and storage
US11848222B2 (en) * 2020-07-09 2023-12-19 Taiwan Semiconductor Manufacturing Company Ltd. System for a semiconductor fabrication facility and method for operating the same
KR102661744B1 (en) * 2020-11-05 2024-04-26 세메스 주식회사 Apparatus for transporting container and system for storing container with the apparatus
KR102726858B1 (en) * 2021-12-30 2024-11-07 세메스 주식회사 Stocker
TWI813393B (en) * 2022-02-17 2023-08-21 盟立自動化股份有限公司 Transfer system of overhead hoist transfer and overhead hoist transfer
JP2024011483A (en) * 2022-07-14 2024-01-25 株式会社ダイフク Conveyance system
US20240071797A1 (en) * 2022-08-26 2024-02-29 Taiwan Semiconductor Manufacturing Company, Ltd. Turntable for wafer transport system
WO2024070624A1 (en) * 2022-09-27 2024-04-04 村田機械株式会社 Storage system
CN120265559A (en) * 2022-12-05 2025-07-04 村田机械株式会社 Conveyor system
JP2024136916A (en) * 2023-03-24 2024-10-04 村田機械株式会社 Overhead transport vehicle system
KR20250054488A (en) * 2023-10-16 2025-04-23 주식회사 가치소프트 Automatic warehouse system and method for vertically loading or unloading storage container

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2616212B2 (en) * 1990-10-31 1997-06-04 日本電気株式会社 Transport system
JP2000124284A (en) * 1998-10-13 2000-04-28 Hitachi Kiden Kogyo Ltd Transfer device
JP2007191235A (en) * 2006-01-17 2007-08-02 Murata Mach Ltd Overhead traveling vehicle system
JP5088468B2 (en) * 2007-03-09 2012-12-05 村田機械株式会社 Conveying system using a suspended conveying cart
JP5648983B2 (en) 2010-11-04 2015-01-07 村田機械株式会社 Transport system and transport method
US9633879B2 (en) * 2014-05-14 2017-04-25 Murata Machinery, Ltd. Storage system in the ceiling space and storage method for goods thereby
US9415934B2 (en) * 2014-05-14 2016-08-16 Murata Machinery, Ltd. Transport system and transport method
KR101942394B1 (en) * 2014-09-25 2019-01-25 무라다기카이가부시끼가이샤 Purging device and purging method
JP6304084B2 (en) 2015-03-16 2018-04-04 株式会社ダイフク Article conveying equipment and inspection jig
JP2017030944A (en) * 2015-08-04 2017-02-09 村田機械株式会社 Conveyance system
SG11201801076VA (en) 2015-08-14 2018-03-28 Murata Machinery Ltd Conveyance system
EP3336016B1 (en) 2015-08-14 2021-06-16 Murata Machinery, Ltd. Conveyor car system
JP2018177376A (en) * 2015-09-09 2018-11-15 村田機械株式会社 Conveying system and conveying method
US10043699B2 (en) 2015-11-13 2018-08-07 Taiwan Semiconductor Manufacturing Co., Ltd. High capacity overhead transport (OHT) rail system with multiple levels
JP6766584B2 (en) 2016-10-19 2020-10-14 株式会社ダイフク Goods transport equipment
WO2018088089A1 (en) * 2016-11-08 2018-05-17 村田機械株式会社 Overhead transport vehicle and method for controlling overhead transport vehicle
JP6891058B2 (en) 2017-06-30 2021-06-18 株式会社クラレ Agricultural chemical binder, agricultural chemical granular composition and its manufacturing method

Also Published As

Publication number Publication date
US20220081207A1 (en) 2022-03-17
EP3915902A4 (en) 2022-10-05
KR102509136B1 (en) 2023-03-14
JPWO2020153041A1 (en) 2021-12-09
CN113348141B (en) 2023-02-17
TW202039336A (en) 2020-11-01
CN113348141A (en) 2021-09-03
KR20210106551A (en) 2021-08-30
JP7211439B2 (en) 2023-01-24
US11891245B2 (en) 2024-02-06
TWI829848B (en) 2024-01-21
EP3915902B1 (en) 2024-04-03
EP3915902A1 (en) 2021-12-01
WO2020153041A1 (en) 2020-07-30

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