SG11202103798VA - Method of manufacturing substrate layered body and layered body - Google Patents
Method of manufacturing substrate layered body and layered bodyInfo
- Publication number
- SG11202103798VA SG11202103798VA SG11202103798VA SG11202103798VA SG11202103798VA SG 11202103798V A SG11202103798V A SG 11202103798VA SG 11202103798V A SG11202103798V A SG 11202103798VA SG 11202103798V A SG11202103798V A SG 11202103798VA SG 11202103798V A SG11202103798V A SG 11202103798VA
- Authority
- SG
- Singapore
- Prior art keywords
- layered body
- manufacturing substrate
- substrate layered
- manufacturing
- layered
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
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- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
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- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
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- C09J201/00—Adhesives based on unspecified macromolecular compounds
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Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018202212 | 2018-10-26 | ||
JP2019101252 | 2019-05-30 | ||
PCT/JP2019/040845 WO2020085183A1 (en) | 2018-10-26 | 2019-10-17 | Substrate layered body manufacturing method and layered body |
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Publication Number | Publication Date |
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SG11202103798VA true SG11202103798VA (en) | 2021-05-28 |
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SG11202103798VA SG11202103798VA (en) | 2018-10-26 | 2019-10-17 | Method of manufacturing substrate layered body and layered body |
Country Status (8)
Country | Link |
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US (1) | US20210391292A1 (en) |
EP (1) | EP3855477A4 (en) |
JP (1) | JP7162679B2 (en) |
KR (1) | KR102582227B1 (en) |
CN (1) | CN112889131A (en) |
IL (1) | IL282337A (en) |
SG (1) | SG11202103798VA (en) |
WO (1) | WO2020085183A1 (en) |
Families Citing this family (6)
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KR20230038550A (en) * | 2020-09-10 | 2023-03-20 | 미쓰이 가가쿠 가부시키가이샤 | Compositions, Laminates and Methods of Making Laminates |
JP7511183B2 (en) | 2020-09-17 | 2024-07-05 | パナソニックIpマネジメント株式会社 | Functional device and method for manufacturing the same |
WO2022201497A1 (en) * | 2021-03-26 | 2022-09-29 | 昭和電工マテリアルズ株式会社 | Semiconductor device manufacturing method, semiconductor device, integrated circuit element, and integrated circuit element manufacturing method |
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-
2019
- 2019-10-17 CN CN201980069246.5A patent/CN112889131A/en active Pending
- 2019-10-17 JP JP2020553279A patent/JP7162679B2/en active Active
- 2019-10-17 US US17/284,833 patent/US20210391292A1/en active Pending
- 2019-10-17 SG SG11202103798VA patent/SG11202103798VA/en unknown
- 2019-10-17 WO PCT/JP2019/040845 patent/WO2020085183A1/en unknown
- 2019-10-17 EP EP19876881.4A patent/EP3855477A4/en active Pending
- 2019-10-17 KR KR1020217011470A patent/KR102582227B1/en active IP Right Grant
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Also Published As
Publication number | Publication date |
---|---|
WO2020085183A1 (en) | 2020-04-30 |
KR20210060571A (en) | 2021-05-26 |
JPWO2020085183A1 (en) | 2021-10-07 |
EP3855477A4 (en) | 2022-07-06 |
KR102582227B1 (en) | 2023-09-22 |
TW202037700A (en) | 2020-10-16 |
EP3855477A1 (en) | 2021-07-28 |
JP7162679B2 (en) | 2022-10-28 |
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US20210391292A1 (en) | 2021-12-16 |
IL282337A (en) | 2021-05-31 |
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