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SG11201600907UA - Resin sheet for hollow electronic device encapsulation and method for manufacturing hollow electronic device package - Google Patents

Resin sheet for hollow electronic device encapsulation and method for manufacturing hollow electronic device package

Info

Publication number
SG11201600907UA
SG11201600907UA SG11201600907UA SG11201600907UA SG11201600907UA SG 11201600907U A SG11201600907U A SG 11201600907UA SG 11201600907U A SG11201600907U A SG 11201600907UA SG 11201600907U A SG11201600907U A SG 11201600907UA SG 11201600907U A SG11201600907U A SG 11201600907UA
Authority
SG
Singapore
Prior art keywords
electronic device
hollow electronic
resin sheet
device package
manufacturing
Prior art date
Application number
SG11201600907UA
Inventor
Eiji Toyoda
Hiroyuki Senzai
Tsuyoshi Ishizaka
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Publication of SG11201600907UA publication Critical patent/SG11201600907UA/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3135Double encapsulation or coating and encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/10Mounting in enclosures
    • H03H9/1064Mounting in enclosures for surface acoustic wave [SAW] devices
    • H03H9/1085Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a non-uniform sealing mass covering the non-active sides of the BAW device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/568Temporary substrate used as encapsulation process aid
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/15786Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787Ceramics, e.g. crystalline carbides, nitrides or oxides

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Acoustics & Sound (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
SG11201600907UA 2013-08-07 2014-07-23 Resin sheet for hollow electronic device encapsulation and method for manufacturing hollow electronic device package SG11201600907UA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013164292 2013-08-07
JP2014129467A JP6393092B2 (en) 2013-08-07 2014-06-24 Hollow type electronic device sealing resin sheet and method for producing hollow type electronic device package
PCT/JP2014/069380 WO2015019846A1 (en) 2013-08-07 2014-07-23 Resin sheet for hollow electronic device encapsulation and method for manufacturing hollow electronic device package

Publications (1)

Publication Number Publication Date
SG11201600907UA true SG11201600907UA (en) 2016-03-30

Family

ID=52461185

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201600907UA SG11201600907UA (en) 2013-08-07 2014-07-23 Resin sheet for hollow electronic device encapsulation and method for manufacturing hollow electronic device package

Country Status (5)

Country Link
JP (1) JP6393092B2 (en)
CN (1) CN105453253B (en)
SG (1) SG11201600907UA (en)
TW (1) TW201521162A (en)
WO (1) WO2015019846A1 (en)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6497998B2 (en) * 2015-03-19 2019-04-10 日東電工株式会社 Manufacturing method of sealing sheet and package
JP6556081B2 (en) * 2016-03-24 2019-08-07 京セラ株式会社 Surface acoustic wave device
JP6759857B2 (en) * 2016-08-25 2020-09-23 日立化成株式会社 Manufacturing method of encapsulant and electronic component equipment
JP2018104649A (en) * 2016-12-28 2018-07-05 日東電工株式会社 Resin sheet
CN106684057B (en) * 2016-12-30 2019-10-22 华为技术有限公司 Chip-packaging structure and its manufacturing method
JP6975547B2 (en) * 2017-03-31 2021-12-01 ナガセケムテックス株式会社 Manufacturing method of mounting structure and laminated sheet used for it
CN110462818B (en) * 2017-03-31 2023-12-26 株式会社力森诺科 Sealing film, method for manufacturing electronic component device, and electronic component device
JP6894076B2 (en) * 2017-03-31 2021-06-23 ナガセケムテックス株式会社 Manufacturing method of mounting structure and laminated sheet used for this
CN110771037B (en) * 2017-06-23 2023-09-12 株式会社村田制作所 Elastic wave device, front-end circuit, and communication device
WO2018235876A1 (en) 2017-06-23 2018-12-27 株式会社村田製作所 Elastic wave device, front end circuit, and communications device
JP6891849B2 (en) * 2017-07-19 2021-06-18 株式会社村田製作所 Electronic module and manufacturing method of electronic module
EP3690932A4 (en) * 2017-09-29 2021-02-17 Nagase ChemteX Corporation Method for producing mounting structure, and sheet used in same
WO2019065976A1 (en) * 2017-09-29 2019-04-04 ナガセケムテックス株式会社 Method for producing mounting structure, and layered sheet used in same
JP6718106B2 (en) * 2017-12-14 2020-07-08 ナガセケムテックス株式会社 Manufacturing method of mounting structure
JP7110011B2 (en) * 2018-07-03 2022-08-01 日東電工株式会社 Sealing sheet and method for producing electronic element device
JP7211757B2 (en) * 2018-10-22 2023-01-24 新光電気工業株式会社 wiring board
JP7343989B2 (en) * 2019-03-19 2023-09-13 日東電工株式会社 Sealing sheet
JP7343988B2 (en) * 2019-03-19 2023-09-13 日東電工株式会社 Sealing sheet
JPWO2020241505A1 (en) * 2019-05-31 2020-12-03
WO2021010209A1 (en) * 2019-07-12 2021-01-21 日東電工株式会社 Sealing resin sheet
CN112786541A (en) * 2019-11-11 2021-05-11 江苏长电科技股份有限公司 Packaging structure and packaging method of cavity device group
JP7473408B2 (en) 2020-06-17 2024-04-23 日東電工株式会社 Sealing resin sheet
JP7461229B2 (en) 2020-06-17 2024-04-03 日東電工株式会社 Sealing resin sheet
JP7456860B2 (en) 2020-06-17 2024-03-27 日東電工株式会社 Sealing resin sheet
JP2022179054A (en) 2021-05-21 2022-12-02 日東電工株式会社 Resin sheet for sealing
CN114024520B (en) * 2021-11-03 2023-02-10 北京超材信息科技有限公司 Double-layer film coating process for acoustic device
CN113992174A (en) * 2021-11-03 2022-01-28 北京超材信息科技有限公司 Acoustic device packaging structure

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4383768B2 (en) * 2003-04-23 2009-12-16 スリーエム イノベイティブ プロパティズ カンパニー Film adhesive for sealing, film laminate for sealing, and sealing method
JP4872587B2 (en) * 2006-10-12 2012-02-08 日立化成工業株式会社 Sealing film and semiconductor device using the same
JP5101931B2 (en) * 2007-06-13 2012-12-19 日東電工株式会社 Thermosetting adhesive sheet

Also Published As

Publication number Publication date
JP2015053470A (en) 2015-03-19
CN105453253A (en) 2016-03-30
TW201521162A (en) 2015-06-01
CN105453253B (en) 2019-05-31
WO2015019846A1 (en) 2015-02-12
JP6393092B2 (en) 2018-09-19

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