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SG10201904874XA - Photodetector with sequential asymmetric-width waveguides - Google Patents

Photodetector with sequential asymmetric-width waveguides

Info

Publication number
SG10201904874XA
SG10201904874XA SG10201904874XA SG10201904874XA SG10201904874XA SG 10201904874X A SG10201904874X A SG 10201904874XA SG 10201904874X A SG10201904874X A SG 10201904874XA SG 10201904874X A SG10201904874X A SG 10201904874XA SG 10201904874X A SG10201904874X A SG 10201904874XA
Authority
SG
Singapore
Prior art keywords
photodetector
width waveguides
sequential asymmetric
asymmetric
sequential
Prior art date
Application number
SG10201904874XA
Inventor
Jonathan Edgar Roth
Jared Bauters
Erik Johan Norberg
Original Assignee
Juniper Networks Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Juniper Networks Inc filed Critical Juniper Networks Inc
Publication of SG10201904874XA publication Critical patent/SG10201904874XA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4207—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12138—Sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/1215—Splitter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
    • H01L31/105—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PIN type

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Light Receiving Elements (AREA)
  • Optical Integrated Circuits (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
SG10201904874XA 2018-12-27 2019-05-29 Photodetector with sequential asymmetric-width waveguides SG10201904874XA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US16/233,498 US10802213B2 (en) 2018-12-27 2018-12-27 Photodetector with sequential asymmetric-width waveguides

Publications (1)

Publication Number Publication Date
SG10201904874XA true SG10201904874XA (en) 2020-07-29

Family

ID=66999714

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201904874XA SG10201904874XA (en) 2018-12-27 2019-05-29 Photodetector with sequential asymmetric-width waveguides

Country Status (6)

Country Link
US (3) US10802213B2 (en)
EP (1) EP3675181B1 (en)
KR (2) KR102262796B1 (en)
CN (2) CN114578479B (en)
SG (1) SG10201904874XA (en)
TW (1) TWI804636B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11402575B2 (en) 2018-12-27 2022-08-02 Aurrion, Inc. Photodetector with sequential asymmetric-width waveguides

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7403350B2 (en) * 2020-02-26 2023-12-22 富士通オプティカルコンポーネンツ株式会社 Optical device and light source device using the same
US20230003926A1 (en) * 2021-06-30 2023-01-05 Juniper Networds, Inc. High bandwidth photonic integrated circuit with etalon compensation

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US4991926A (en) * 1990-04-06 1991-02-12 Litton Systems, Inc. Integrated optics decorrelator
US5137357A (en) * 1990-06-27 1992-08-11 Honeywell Inc. Interferometric signal analysis with modulation switching
US5809184A (en) 1996-10-15 1998-09-15 Doerr; Christopher Richard Polarization diversity waveguide grating receiver
JPH1114847A (en) * 1997-06-20 1999-01-22 Kokusai Denshin Denwa Co Ltd <Kdd> Coupled waveguide structure
CN100552984C (en) * 2007-09-19 2009-10-21 中国科学院半导体研究所 Germanium/silicon mixes integrated waveguide type photoelectric converter and manufacture method thereof
US20130321816A1 (en) * 2011-02-15 2013-12-05 Luxmux Technology Corporation Fully integrated complementary metal oxide semiconductor (cmos) fourier transform infrared (ftir) spectrometer and raman spectrometer
US9122003B2 (en) 2012-07-18 2015-09-01 Sumitomo Electric Industries, Ltd. Semiconductor optical device
US9239507B2 (en) * 2013-10-25 2016-01-19 Forelux Inc. Grating based optical coupler
US9310561B1 (en) * 2013-11-27 2016-04-12 Aurrion, Inc. Multiport photonic device with asymmetric waveguides
TW201620525A (en) * 2014-03-14 2016-06-16 波士頓生醫公司 Asymmetric interfering RNA compositions that silence K-RAS and methods of uses thereof
US9690045B2 (en) * 2014-03-31 2017-06-27 Huawei Technologies Co., Ltd. Apparatus and method for a waveguide polarizer comprising a series of bends
US20160116680A1 (en) * 2014-10-24 2016-04-28 Tyco Electronics Corporation Light coupling structure and optical device including a grating coupler
US20170163001A1 (en) * 2015-04-29 2017-06-08 Infinera Corporation Photonic Integrated Circuit Including Compact Lasers With Extended Tunability
CN105261667B (en) * 2015-10-30 2017-09-26 中山大学 A kind of traveling-wave structure photo detector chip and preparation method
US20170293083A1 (en) * 2016-04-11 2017-10-12 Michael Menard Optical loop enhanced optical modulators
FR3056769B1 (en) * 2016-09-23 2018-10-12 Commissariat A L'energie Atomique Et Aux Energies Alternatives DEVICE FOR COUPLING A FIRST WAVEGUIDE WITH A SECOND WAVEGUIDE
CN108563030B (en) * 2018-01-31 2023-05-26 中国地质大学（武汉） Polarization beam splitter
FR3085549B1 (en) * 2018-08-31 2021-05-14 St Microelectronics Crolles 2 Sas WAVE GUIDE
US10802213B2 (en) 2018-12-27 2020-10-13 Juniper Networks, Inc. Photodetector with sequential asymmetric-width waveguides

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11402575B2 (en) 2018-12-27 2022-08-02 Aurrion, Inc. Photodetector with sequential asymmetric-width waveguides

Also Published As

Publication number Publication date
US20210026067A1 (en) 2021-01-28
US20200209472A1 (en) 2020-07-02
CN114578479B (en) 2023-07-04
KR102262796B1 (en) 2021-06-09
EP3675181A1 (en) 2020-07-01
US20220326437A1 (en) 2022-10-13
US11402575B2 (en) 2022-08-02
US10802213B2 (en) 2020-10-13
KR20200081193A (en) 2020-07-07
TWI804636B (en) 2023-06-11
EP3675181B1 (en) 2023-11-15
KR20210068377A (en) 2021-06-09
CN114578479A (en) 2022-06-03
TW202024698A (en) 2020-07-01
CN111381317A (en) 2020-07-07
US11698486B2 (en) 2023-07-11
CN111381317B (en) 2022-03-11

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