RU2431906C1 - Method of picking up optical signal, device for realising said method and object scanning method - Google Patents

Abstract

FIELD: physics.

SUBSTANCE: method of picking up an optical signal involves decomposing light flux into spectral components, forming coherent light flux therefrom and directing the obtained flux onto the surface of a sensor in form of a CCD matrix. The matrix has at least two layers of photosensitive elements. Light flux photons are absorbed by the photosensitive elements of the layer of the matrix which is first relative their direction of motion and/or at least one of the next layers when photons break through the previous layers, and photosensitive elements of the layers accumulate electric charge by absorbing photons. The decomposed light flux is distributed on the surface of the matrix to form at least two regions, in each of which part of the spectrum of the decomposed light flux is absorbed, and the intensity value of the light flux is determined for each part of the spectrum from total charge accumulated by the photosensitive elements on all layers of the matrix in each of its regions.

EFFECT: high accuracy of determining intensity of light flux in different spectral regions.

13 cl, 10 dwg

Description

The invention relates to photoelectronic technology, in particular to a technology for recording a light signal, as well as to methods for scanning objects using this technology. The invention can be used, in particular, for scanning any color information media both for transparency and reflection (for example, film, film, etc.), for scanning any material objects (both for transparency and reflection) , including any celestial bodies, as well as cells, particles, molecules, living tissues, for flaw detection of materials and products, for photo, film and video shooting, including observation video for shooting and recording holographic objects, for observing and recording the degree of illumination of material objects and structures based on them. Moreover, the invention can be used in the following devices: movie scanners, movie cameras, video cameras, cameras, digital surveillance cameras, motion cameras, night vision cameras, etc., digital binoculars, telescopes, telescopes, electron microscopes, flaw detectors, copiers, parking sensors, medical probes , devices for artificial vision, manual input devices, geodetic recording devices, meteorological recording devices, devices for astronomical and aerial photography, stereo and 3D scanners, with Ahner document, the feedback device, registration systems, objects, devices for observing and registering the illumination of objects of material structure.

In the general case, the goal of registering a light signal is to determine the intensity of the light flux in various parts of the light spectrum.

The prior art method and device for recording light radiation in the regions of the RGB light spectrum (see US 6532086 B1, 03/11/2003). According to the method, the light flux is directed to the surface of the CCD (CCD) TDI matrix of active pixels. Moreover, the matrix has three regions (RGB), in each of which the light flux is absorbed in a certain part of the spectrum (in the “red” (R), “green” (G) and “blue” (B)). Such selective absorption of light is ensured through the use of light filters deposited on the surface of the matrix. When photons of the light flux hit the surface of the matrix, they (in most cases) are absorbed by its photosensitive elements, forming electrons. By the total accumulated charge of these electrons in each of the three mentioned regions, the light flux intensity (luminance characteristic) in each part of the spectrum (RGB) is determined.

However, these method and device allow determining the intensity of the light flux in only three regions of the visible part of the spectrum (RGB), ignoring the remaining regions. In addition, not all photons of the light flux entering the matrix surface will be absorbed by its photosensitive elements, which introduces a large error in the reliability of the data obtained.

The objective of the claimed invention is the creation of a method and device for recording a light signal that can accurately determine the intensity of the light flux (luminance characteristic) in the visible part of the spectrum and adjacent areas (ultraviolet, infrared).

In addition, the object of the invention is to provide a method for scanning objects using a method and apparatus for registering a light signal and providing the possibility of obtaining a better digital image.

The technical result of the claimed invention is to improve the accuracy of determining the intensity of the light flux in various regions of the spectrum due to the maximum "absorption" of light-sensitive elements of photons of light falling on the surface of the CCD.

The specified technical result is achieved in the method of recording the light signal due to the fact that it includes the decomposition of the light flux into spectrum components, the formation of a coherent polarized light flux from it, the direction of the resulting flux to the sensor surface in the form of a CCD matrix with at least two photosensitive layers elements providing the absorption of photons of the light flux by the photosensitive elements of the first with respect to their motion, the matrix layer and / or at least one of the its traveling layers during the breakdown by photons of the previous layers with the accumulation of layers of electric charges by the photosensitive elements, and the decomposed light flux is distributed over the matrix surface with the formation of at least two regions, in each of which a part of the spectrum of the decomposed light flux is absorbed, and then the values of the light flux intensity are determined for each part of the spectrum according to the total charge accumulated by photosensitive elements on all layers of the matrix in each of its regions.

In addition, the technical result is achieved due to the fact that

- when the light flux is directed to the sensor surface in the form of a CCD matrix, this flux has vertical polarization with respect to the sensor plane.

- at least one row of pixels from photosensitive elements are used as each of the mentioned areas of the matrix.

- a TDI matrix is used as a CCD.

The specified technical result is achieved in the CCD matrix for recording a light signal due to the fact that it contains:

at least two layers of photosensitive elements configured to absorb photons of the light flux by the photosensitive elements of the first layer of the matrix relative to their movement and / or at least one of its subsequent layers when the photons break through the previous layers and the photosensitive elements accumulate layers of electric charges, the matrix equipped with electrodes for parallel charge transfer for its flow from one layer to another and has at least two areas configured to absorption in each part of the spectrum decomposed light flux.

In addition, the specified technical result is achieved due to the fact that:

- each mentioned region of the layer is made in the form of at least one row of active pixels from photosensitive elements.

- in the last layer of the matrix, the output elements are installed, and the pixels of each row in the last layer are connected by electrodes of sequential charge transfer to transfer the accumulated charge from all layers in each row to the output elements.

The specified technical result is achieved in the method of scanning an object due to the fact that it includes:

the direction of the flow of white or ultraviolet or infrared light to the object to be scanned to obtain a light stream with spectral and brightness characteristics corresponding to the scanned area of the object, and the subsequent registration of the received light signal.

In addition, the specified technical result is achieved due to the fact that:

- use a stream of white, or ultraviolet, or infrared light with aligned spectrum amplitude.

- the scan object is moved relative to the light flux.

The standard CCD matrix (widely used in various devices) most often is an analog integrated circuit consisting of photosensitive photodiodes and using charge-coupled CCD technology. Typically, the CCD matrix consists of polysilicon, separated from the silicon substrate, which, when voltage is applied through polysilicon gates, the electric potentials near the electrodes change. Before exposure, usually by applying a certain combination of voltages to the electrodes, all previously formed charges are reset and all elements are brought to an identical state. Further, the combination of voltages at the electrodes creates a potential well in which electrons can be accumulated that are formed in a given pixel of the matrix as a result of exposure to light during exposure. The more intense the light flux during exposure, the more electrons accumulate in the potential well, respectively, the higher the total charge of this pixel.

Thus, when registering the light signal, the light flux is directed to the photosensitive surface of the CCD elements, the task of which is to convert the photon energy into an electric charge. In general, this happens as follows.

For a photon that has fallen on a CCD element, there are three options for the development of events - it will either “ricochet” from the surface, or will be absorbed in the bulk of the semiconductor (matrix material), or “will pierce through” its “working zone”. Photons that were absorbed by the matrix form an electron-hole pair if interaction with the atom of the semiconductor crystal lattice occurs, or only an electron (or hole) if the interaction was with atoms of donor or acceptor impurities. However, those photons that “ricocheted” or “pierced” the matrix through and through cannot be taken into account when determining the intensity of the light flux. Obviously, it is necessary to create a matrix in which the losses from the “rebound” and “lumbar sweep” would be minimized.

A preferred embodiment of the matrix of the claimed invention is shown in FIG. 1A and its separate layer in FIG. 1B.

The claimed matrix, in contrast to known analogues, contains not one but at least two photosensitive layers 1 of active pixels 2. Moreover, each of the layers has at least two regions 3, each of which absorbs the decomposed light flux 4 in different parts of the light spectrum.

Preferably, these areas are made in the form of one or more lines. For electron transfer from layer to layer, the matrix is equipped with electrodes 5 for parallel charge transfer. At the same time, on the last layer of the matrix, the pixels of each row (region) of the matrix are connected by electrodes 6 for sequential charge transfer to “flow” the accumulated charge on all layers in each of the regions to the output elements 7 of the matrix.

The preferred architecture of the multilayer pixel 2 in the inventive matrix is shown in figure 2.

The pixel 2 is a set of photosensitive semiconductor elements 8 placed in a multilayer substrate 9. In front of the first layer there is a lens 10 (in case reflected light is used) and a transparent electrode 11, which is separated from the first layer by an insulator 12. Each matrix layer has a zone the generation of charge carriers 13 and the zone of the potential well 14. In this case, the layers are separated from each other using transparent or translucent layers 15.

The work of the claimed matrix is as follows.

The luminous flux is preliminarily decomposed into the components of the spectrum and “aligned” to obtain a coherent polarized luminous flux (the luminous fluxes throughout the spectrum move parallel to each other). In this form, the flow is directed to the surface of the sensor in the form of a CCD matrix. In this case, it is preferable, when directed to the surface of the matrix, that the light flux has vertical polarization with respect to the plane of the sensor. The luminous flux is distributed over the matrix surface in such a way that at least two regions are formed, in each of which one of the parts of the decomposed spectrum is absorbed, i.e. the light flux with a certain wavelength is absorbed. As mentioned earlier, when photons hit the surface of the matrix, most of them interact with photosensitive elements, forming electrons and accumulating them in the zone of the potential well 14. In this case, some photons can pass through one or several layers of matrix 1, in this case, photons will be absorbed by one of the subsequent layers. Thus, a charge will also appear on the intermediate layers of the matrix.

Then, by means of electrodes 5 for parallel charge transfer, the formed electrons from all layers “flow” to the last (relative to the light flux) layer, in which, using sequential transfer electrodes 6 in each row, the charge from all layers moves to the output elements 7 of the matrix. Moreover, the total charge formed in each region of the matrix on all layers determines the intensity (luminance characteristic) of light radiation in each part of the spectrum (for each wavelength range).

It should be noted that the path of the photon and its further "fate" depend on the angle of incidence of the front of the electromagnetic wave, in the plane of which the photons move. The more uneven the surface is relative to the front of the incident wave, the greater the number of light photons can be refracted and go further deeper into the matrix, “react” to some of the matrix layers with electrons and, accordingly, can be fixed. The potential of this layer will contribute to the overall picture of the intensity of the incident radiation. Those photons whose angle of incidence in the front of the incident radiation and, accordingly, the polarization axis of which is longitudinal and the angle of incidence on the first layer will be much more than 90 degrees, will be almost completely absorbed by the first layer and will react with its electrons. Subsequently, at incidence angles ever closer to 90 degrees, photons will be able to propagate to the following layers, but at each media boundary there will be a slight deviation of the wave front to the side, greater than 90 degrees, and thus, with a greater probability, the radiation photon will react with electron in this matrix layer.

Thus, in order for the maximum number of photons to be absorbed by the matrix, it is preferable (but strictly optional) that the incident wave front tends to 90 degrees, the plane of polarization of the wave front is longitudinal, and the surface of the matrix material has such a structure (roughness) that reflection on the outer layer would provide photon capture at an angle of 90 degrees to the elements of the matrix structure. In addition, it is preferable that the surface of the matrix has a roughness of the structure, in the limit absolutely black.

Figure 3 presents a graph of the characteristic curve (HK) sensitometry. Sensitivity (or density in the case of comparison with film or film) is plotted along the Y-axis (abscissa), and the exposure or time at which the process of charge accumulation under the influence of incident photons is recorded along the X-axis (ordinates). The exposure value is measured in lux per second and has a logarithmic form for compactness of convenience of assessment and perception of final values. The values of the so-called a neutral gray standard wedge, according to which the density of blackening (underexposure) in the lower part of Kh.K. is currently measured or whitening (overexposure) in the upper part of HK, allow us to best describe the process of interaction between the number of incident light photons and their energies (and, accordingly, the spectral composition of the recorded light flux) on the registration process itself. The drawing shows that the expansion of the dynamic range is achieved in the lower part of H.K. due to the shift in the area of blackening (underexposure) Kh.K. in the lower part and registration of almost all photons (this occurs due to the construction of the very first and most sensitive layer of the matrix described above) almost an order of magnitude, and in the upper part Kh.K. by adjusting the border of whitening (overexposure), i.e. smooth bias of the registration region or reaction to the incident photon flux and the limitations of this flux in the upper part of Kh.K. (this happens roughly due to the selection of the photosensitive layer material, the amount of impurities in the material, i.e., changes in the number of charge carriers, as well as changes in the size and thickness of both the layers themselves and the light-recording regions of the matrix, and more precise adjustment and adjustment are carried out by displacement of the potential value of the layer applied to the electrode and, accordingly, displacement of the reaction zone of the potential well toward larger or smaller values). In the “white” region, all the pixels of a conventional matrix will be illuminated and it will be problematic to determine, for example, 10,0001 photons out of 100,000. In the “black” region, on the contrary, to determine single photons, pixels with high sensitivity are required and it is necessary to distinguish, for example, 3 from 4 fallen photons. Using a multilayer matrix, it is possible to vary the information retrieval from each layer and use, for example, the first layer as a layer that transmits almost all photons and is a layer of error correction. Or, conversely, use it as a highly sensitive layer. You can also change the sensitivity of the layers relative to each other, creating, for example, a logarithmic distribution of sensitivity between the layers. Thus, it is possible to expand the brightness range in which the claimed matrix operates. Existing matrices work, as a rule, only in the L or Lmax zone.

It is most preferable for the claimed method to use a TDI matrix, since it will allow the best way to record the entire spectrum of incident radiation energies. In this case, each layer will better accumulate and transfer the energy of interaction between photons and electrons, and the total charge of this interaction will be estimated and fixed.

To describe the expansion of the spectral composition of the recorded light radiation, we turn to the description of color spaces, more precisely, their models.

1) RGB space (figure 4): Red, Green, Blue - red, green, blue. The color is divided into 3 characteristics expressing the content of the primary colors. The model is additive, since these components are summed. This color space is used when displayed on the monitor screen. This means that the model is hardware dependent, on different monitors the same colors will look different. RGB color is used with different accuracy: 8-bit RGB gives 256 colors, 16-bit 65536 (scheme 5-6-5), 24-bit 16777216 (8-8-8). The brackets indicate the bits per channel.

2) CMYK space (Fig. 5): Cyan, Magenta, Yellow, Key - cyan, magenta, yellow, key (black). This format is used in printers. Saves ink. Unfortunately, you cannot create inks similar to RGB for printing. The thing is that these colors work only "in the light", i.e. through a film-filter or phosphor monitor. Colors are as if cut out by appropriate filters from a continuous spectrum. In print, everything happens exactly the opposite, i.e. paper absorbs the entire spectrum except for the color in which it is painted. It is not possible to create paints that are absolutely exactly "opposite" (complementary) to RGB colors, so you have to enter the fourth additional paint - black. Its task is to enhance the absorption of light in dark areas, to make them as black as possible, i.e. increase the tone range of printing. The four-channel CMYK is heavier than RGB and processed more slowly, taking up more memory.

3) HLS space (Fig.6): Hue, Lightness, Space - hue, brightness, saturation. A fairly common format, convenient for applying various effects. Unlike the previous two cubic spectra, RGB and CMYK HLS is conical. The HSB (Hue, Space, Brightness) and HSV (Hue, Space, Value) models, which are also conical, are very similar to it. These patterns are closest to human color perception. In addition, it is most convenient for optical and photometric calculations: the hue corresponds to the wavelength, brightness to the amount of light, saturation to intensity. So this model will be convenient when working with light sources and materials.

4) CIE XYZ space (Fig. 7): The normal color scheme is a flat color rendering model. The red color components are elongated along the X axis of the coordinate plane (horizontal), and the green color components are elongated along the Y axis (vertically). With this method of presentation, each color corresponds to a certain point on the coordinate plane. The spectral purity of colors decreases as you move along the coordinate plane to the left. But this model does not take into account brightness. This model is hardware independent, it supports much more colors than modern devices (scanners, monitors, printers) can distinguish. CIE XYZ is built on the basis of the visual capabilities of the so-called "Standard Observer", that is, a hypothetical viewer whose capabilities were carefully studied and recorded during conducted by the CIE Committee of lengthy studies of human vision. The CIE Committee conducted many experiments with a huge number of people, asking them to compare different colors, and then using the combined data of these experiments built the so-called color matching functions and the universal color space in which the range was presented visible colors, characteristic of the average person. The color matching functions are the values of each primary light component that must be present so that a person with average vision can perceive all the colors of the visible spectrum

5) CIE Lab Space (FIG. 8): Advanced XYZ Model. The ultimate goal of the CIE was to develop a repeatable system of color rendering standards for manufacturers of paints, inks, pigments and other dyes. The most important function of these standards is to provide a universal scheme within which color matching can be established. The basis of this scheme is the Standard Observer and the XYZ color space, however, the unbalanced nature of the XYZ space, due to the fact that a person distinguishes between the shades of green and yellow much better than between the shades of red and purple, made these standards difficult to implement clearly. As a result, CIE has developed more uniform color scales - CIE Lab and CIE Luv. Of these two models, the CIE Lab model is more widely used. The well-balanced Lab color space structure is based on the theory that color cannot be both green and red or yellow and blue. Therefore, the same values can be used to describe the red-green and yellow-blue attributes. When color is represented in the CIE Lab space, the L value indicates luminosity, a is the value of the red-green component, and b is the value of the yellow-blue component.

There are also other color models (such as CCY, Luv, Mansell and Ostwald models), but they are used much less frequently.

As can be seen from the presented models, the most limited and accordingly dependent space model is the RGB space model, and since Since all existing matrices register light emission according to this model, the luminance characteristic L of these matrices is rigidly tied to color characteristics and any change in the luminance range immediately leads to a change in color and vice versa.

In our case, because the luminance characteristic is measured separately from the color and the color range model is most consistent with the CIE Lab model representation, the range of measured colors and their shades is limited only by the number of steps for recording the color spectrum for a given material and matrix performance. Thus, a fundamentally different level of accuracy is achieved when processing color information and, accordingly, the range of measured and recorded color shades, limited only by the mathematical apparatus of the current representation of the CIE Lab space model.

The considered method and device for detecting light radiation can be applied when scanning various objects. In general, an object is scanned as follows.

For scanning in the region of visible radiation, white light is used, and in the case of scanning in the adjacent areas, infrared or ultraviolet light is used. In this case, it is preferable that this stream has an amplitude-aligned spectrum. The luminous flux is directed to the object of scanning, and, passing through this object to the lumen or reflected from it, the light acquires spectral and brightness characteristics corresponding to the scanned area of the object. The resulting luminous flux is decomposed into spectral components and “aligned”, forming a coherent polarized luminous flux from it. In this form, the luminous flux, which carries information about the scanned object, is directed to the surface of the CCD matrix. Next, the light signal is registered according to the method described above.

A preferred embodiment of the scanning device of this method is shown in FIG. 9.

The device contains a light source 16 (for example, a feedback LED array), an optical system 17 for normalizing the light flux, a slit mask 18, an optical system 19 (channel, path, lens system, prisms, slits and gratings) for decomposing the light flux, CCD the matrix 20, the design of which is described above, the ADC (analog-to-digital converter) 21 and the information storage device 22.

When scanning an object, the light is emitted by the light source 16 and normalized using an optical system 17, at the exit of which the light is a stream of white light or close to it, whose amplitude (brightness) is aligned over the entire frequency (spectral) range. Further, the luminous flux passes through the slit mask 18, where it is converted into a narrow light beam. A scanning object (for example, a film or a plate) is placed in the center of the slit mask, the plane of which moves perpendicular to the plane of the narrow light flux. Passing through this object of scanning to the lumen or reflecting from it, the white normalized stream of light or close to it changes its spectral composition and brightness character, namely, acquires the luminance characteristic (amplitude) for each wavelength included in the visible (400-700 nm) or the light spectrum close to it in accordance with the scanned area of the object and depending on the color mask applied to it. The light flux thus formed enters the optical system 19 and, passing through this optical channel in the part of the visible spectrum (400-700 nm) or close to the visible one, differentiates (decomposes, scatters in space due to different refraction angles for different wavelengths) by countless light waves (spectral components). In this form, the luminous flux enters the photosensitive surface of the CCD of the matrix 20. In this case, the object can be scanned line by line, i.e. step by step “flashing” the object with narrow “stripes”. In this case, when the light flux moves along the “width” of the object at each moment of time, passing through the scanning object (or reflecting from it) and unfolding with the help of an optical system, it forms a light plane on the active matrix that is expanded (expanded) in the visible (400 -700 nm) or a spectrum close to it in width, and along the length of the light flux corresponds to the width of the scanned object. Thus, when only one line (strip) is “illuminated” at the scanning object, all lines are “illuminated” on the CCD by expanding the light in the frequency spectrum. The signal from the CCD matrix is processed using the ADC 21. It accumulates a charge that carries information about the brightness characteristics of the object, summing up at certain intervals and with a given sampling frequency on many bands and layers with information about the spectral characteristics of the object, is converted to the resulting digital code image of the scanned object. From the output of the ADC information in the form of a file is fed to the storage device 22.

The method of scanning an object using the described technology for recording a light signal allows to obtain a better digital image due to:

1) Increasing the distinguishability of the gradations of gray (up to 10 times) at the same power or illumination of the object or allows you to get the same quality of distinguishability under illumination of lower illumination than by known methods. The dynamic luminance coefficient of distinguishability D (the ratio of the lightest to the darkest) using the claimed method is D = 4, and the distinguishability is 10,000, using similar methods - D = 3, the distinguishability is 1,000.

2) A significant increase in the distinguishability of the number of color shades (up to 1,600,000 times) compared with existing technologies. Using existing methods, the distinguishability of spectrum 2 to 24 degrees (linear system). Using the proposed method, the distinguishability of spectrum 2 to 48 degrees (logarithmic system).

Thus, the claimed method and device for recording a light signal (CCD), as well as a method of scanning objects provide the most accurate determination of the intensity of the light flux in each region of the light spectrum due to preliminary decomposition of the flux into spectral components and the use of several photosensitive layers.

It should be noted that the claimed group of inventions is not limited to the particular forms of implementation described in the description.

Claims (13)

1. A method of detecting a light signal, including decomposing the light flux into spectrum components, forming a coherent polarized light flux from it, directing the resulting flux to the sensor surface in the form of a CCD matrix having at least two layers of photosensitive elements that absorb photons of the light flux by photosensitive elements the first relative to their movement, the matrix layer and / or at least one of its subsequent layers during the breakdown by photons of the previous layers, with accumulation the use of photosensitive elements of layers of electric charges, moreover, the decomposed light flux is distributed over the matrix surface with the formation of at least two regions, in each of which a part of the spectrum of the decomposed light flux is absorbed, and then the values of the light flux intensity for each part of the spectrum are determined from the total charge accumulated photosensitive elements on all layers of the matrix in each of its areas. 2. The method according to claim 1, characterized in that they direct the light flux to the surface of the sensor in the form of a CCD matrix so that this flux has vertical polarization with respect to the plane of the sensor. 3. The method according to claim 1, characterized in that at least one row of pixels from photosensitive elements are used as each of the matrix areas mentioned. 4. The method according to claim 1, characterized in that the TDI matrix is used as the CCD matrix. 5. A CCD matrix for detecting a light signal, containing at least two layers of photosensitive elements, configured to absorb photons of the light flux by the photosensitive elements of the first layer of the matrix relative to their movement and / or at least one of its subsequent layers upon breakdown by the photons of the previous layers and accumulation of layers of electric charges by photosensitive elements, while the matrix is equipped with electrodes of parallel charge transfer for its flow from one layer to another and has there are at least two regions configured to absorb in each of them a part of the spectrum of the decomposed light flux. 6. The matrix according to claim 5, in which each said region of the layer is made in the form of at least one row of active pixels from photosensitive elements. 7. The matrix according to claim 6, in the last layer of which the output elements are installed, and the pixels of each row in the last layer are connected by successive charge transfer electrodes to transfer the accumulated charge from all layers in each row to the output elements. 8. A method of scanning an object, including the direction of the flux of white or ultraviolet, or infrared light to the object to be scanned to obtain a light flux with spectral and brightness characteristics corresponding to the scanned area of the object, decomposing the light flux into spectrum components, forming a coherent polarized light flux from it, direction the resulting stream to the surface of the sensor in the form of a CCD matrix having at least two layers of photosensitive elements providing the absorption of photons of the light flux by the photosensitive elements of the first layer of the matrix and / or at least one of its subsequent layers during their breakdown by the photons of the previous layers, with the accumulation of layers of electric charges by the photosensitive elements, and the decomposed light flux is distributed over the matrix surface to form at least two areas, in each of which a part of the spectrum of the decomposed luminous flux is absorbed, after which the luminous flux intensities are determined for each part of the spectrum according to the total charge accumulated by photosensitive elements on all layers of the matrix in each of its areas. 9. The method according to claim 8, in which a stream of white or ultraviolet or infrared light with equalized spectrum amplitude is directed to the scanning object. 10. The method of claim 8, wherein the scanning object is moved relative to the light flux. 11. The method according to claim 8, characterized in that the luminous flux is directed to the surface of the sensor in the form of a CCD matrix so that it has vertical polarization with respect to the plane of this sensor. 12. The method of claim 8, characterized in that at least one row of pixels from photosensitive elements are used as each of the matrix areas mentioned. 13. The method according to claim 8, characterized in that the TDI matrix is used as the CCD matrix.

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