[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

PL2524974T3 - Wtryskiwacz dla układu osadzania próżniowego oparów - Google Patents

Wtryskiwacz dla układu osadzania próżniowego oparów

Info

Publication number
PL2524974T3
PL2524974T3 PL11305604T PL11305604T PL2524974T3 PL 2524974 T3 PL2524974 T3 PL 2524974T3 PL 11305604 T PL11305604 T PL 11305604T PL 11305604 T PL11305604 T PL 11305604T PL 2524974 T3 PL2524974 T3 PL 2524974T3
Authority
PL
Poland
Prior art keywords
injector
vapour deposition
deposition system
vacuum vapour
vacuum
Prior art date
Application number
PL11305604T
Other languages
English (en)
Inventor
Jean-Louis Guyaux
Franck Stemmelen
Oliveira Christophe De
Original Assignee
Riber
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Riber filed Critical Riber
Publication of PL2524974T3 publication Critical patent/PL2524974T3/pl

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/0475PV cell arrays made by cells in a planar, e.g. repetitive, configuration on a single semiconductor substrate; PV cell microarrays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12044OLED
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B20/00Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
    • Y02B20/30Semiconductor lamps, e.g. solid state lamps [SSL] light emitting diodes [LED] or organic LED [OLED]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49401Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Sustainable Development (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Photovoltaic Devices (AREA)
PL11305604T 2011-05-18 2011-05-18 Wtryskiwacz dla układu osadzania próżniowego oparów PL2524974T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP11305604.8A EP2524974B1 (en) 2011-05-18 2011-05-18 Injector for a vacuum vapour deposition system

Publications (1)

Publication Number Publication Date
PL2524974T3 true PL2524974T3 (pl) 2014-09-30

Family

ID=44318444

Family Applications (1)

Application Number Title Priority Date Filing Date
PL11305604T PL2524974T3 (pl) 2011-05-18 2011-05-18 Wtryskiwacz dla układu osadzania próżniowego oparów

Country Status (9)

Country Link
US (1) US20120295014A1 (pl)
EP (1) EP2524974B1 (pl)
JP (1) JP2012241285A (pl)
KR (1) KR101976674B1 (pl)
CN (1) CN102787298A (pl)
DK (1) DK2524974T3 (pl)
ES (1) ES2486307T3 (pl)
PL (1) PL2524974T3 (pl)
SG (1) SG185895A1 (pl)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6038618B2 (ja) * 2011-12-15 2016-12-07 株式会社ニューフレアテクノロジー 成膜装置および成膜方法
CN102965641A (zh) * 2012-12-05 2013-03-13 中国电子科技集团公司第十八研究所 薄膜太阳电池cigs层的硒化方法
JP6488397B2 (ja) * 2014-11-07 2019-03-20 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated 真空堆積のための材料源アレンジメント及びノズル
KR101959417B1 (ko) * 2014-11-07 2019-03-18 어플라이드 머티어리얼스, 인코포레이티드 진공 증착을 위한 재료 소스 배열체 및 재료 분배 배열체
EP3234213A1 (en) * 2014-12-17 2017-10-25 Applied Materials, Inc. Material deposition arrangement, a vacuum deposition system and method for depositing material
KR102480457B1 (ko) * 2015-07-27 2022-12-22 삼성디스플레이 주식회사 증착 장치
TWI781929B (zh) 2016-04-25 2022-11-01 美商創新先進材料股份有限公司 瀉流單元和含有瀉流單元的沉積系統以及相關方法
KR20180007387A (ko) * 2016-07-12 2018-01-23 삼성디스플레이 주식회사 박막 증착 장치
KR102722614B1 (ko) * 2016-08-05 2024-10-28 삼성디스플레이 주식회사 선형 증착원 및 이를 포함하는 증착 장치
CN107955936A (zh) * 2017-12-28 2018-04-24 深圳市华星光电半导体显示技术有限公司 蒸发源和蒸镀设备
JP2020002388A (ja) * 2018-06-25 2020-01-09 株式会社アルバック 真空蒸着装置用の蒸着源
US11769652B2 (en) * 2018-07-31 2023-09-26 Taiwan Semiconductor Manufacturing Co., Ltd. Devices and methods for controlling wafer uniformity in plasma-based process

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6668939B2 (en) * 2001-06-04 2003-12-30 Larry L. Schmidt Piercing nozzle
US20040129212A1 (en) * 2002-05-20 2004-07-08 Gadgil Pradad N. Apparatus and method for delivery of reactive chemical precursors to the surface to be treated
US7611587B2 (en) * 2003-05-16 2009-11-03 Chow Peter P Thin-film deposition evaporator
US20060021574A1 (en) * 2004-08-02 2006-02-02 Veeco Instruments Inc. Multi-gas distribution injector for chemical vapor deposition reactors
US7279421B2 (en) * 2004-11-23 2007-10-09 Tokyo Electron Limited Method and deposition system for increasing deposition rates of metal layers from metal-carbonyl precursors
KR20060060994A (ko) * 2004-12-01 2006-06-07 삼성에스디아이 주식회사 증착 소스 및 이를 구비한 증착 장치
JP4440837B2 (ja) * 2005-01-31 2010-03-24 三星モバイルディスプレイ株式會社 蒸発源及びこれを採用した蒸着装置
JP4545010B2 (ja) * 2005-02-18 2010-09-15 日立造船株式会社 蒸着装置
KR100980729B1 (ko) * 2006-07-03 2010-09-07 주식회사 야스 증착 공정용 다중 노즐 증발원
WO2008004792A1 (en) * 2006-07-03 2008-01-10 Yas Co., Ltd. Multiple nozzle evaporator for vacuum thermal evaporation
KR20080097505A (ko) * 2007-05-02 2008-11-06 주성엔지니어링(주) 박막 증착 장치
US20100159132A1 (en) * 2008-12-18 2010-06-24 Veeco Instruments, Inc. Linear Deposition Source
US9062369B2 (en) * 2009-03-25 2015-06-23 Veeco Instruments, Inc. Deposition of high vapor pressure materials
JP4782219B2 (ja) * 2009-07-02 2011-09-28 三菱重工業株式会社 真空蒸着装置
KR100977374B1 (ko) * 2009-08-03 2010-08-20 텔리오솔라 테크놀로지스 인크 대면적 박막형 cigs 태양전지 고속증착 및 양산장비, 그 공정방법
KR20110024223A (ko) * 2009-09-01 2011-03-09 주식회사 선익시스템 증발 장치 및 이를 포함하는 진공 증착 장치

Also Published As

Publication number Publication date
ES2486307T3 (es) 2014-08-18
EP2524974A1 (en) 2012-11-21
KR101976674B1 (ko) 2019-05-09
DK2524974T3 (da) 2014-08-11
KR20120129812A (ko) 2012-11-28
JP2012241285A (ja) 2012-12-10
SG185895A1 (en) 2012-12-28
EP2524974B1 (en) 2014-05-07
CN102787298A (zh) 2012-11-21
US20120295014A1 (en) 2012-11-22

Similar Documents

Publication Publication Date Title
PL2524974T3 (pl) Wtryskiwacz dla układu osadzania próżniowego oparów
GB2499213B (en) A cleaner-head for a vacuum cleaner
GB2499214B (en) A cleaner-head for a vacuum cleaner
GB2497945B (en) Vacuum cleaner
GB2497944B (en) Vacuum cleaner
GB2493020B (en) Vapour deposition process for the preparation of a chemical compound
GB2493022B (en) Vapour deposition process for the preparation of a phosphate compound
EP2702918A4 (en) VACUUM CLEANER
EP2702917A4 (en) VACUUM CLEANER
EP2684979A4 (en) STEAM SEPARATION DEVICE
SG11201401635PA (en) Injection system for an apparatus for depositing thin layers by vacuum evaporation
EP2689702A4 (en) VACUUM
GB2487398B (en) A cylinder vacuum cleaner
EP2775891A4 (en) LOCK ASSEMBLY FOR A VACUUM SYSTEM
EP2921571A4 (en) VACUUM STEAM SEPARATION DEVICE
GB2506119B (en) A cleaner-head for a vacuum cleaner
GB2488188B (en) A bracket for securing an article
GB201110196D0 (en) Evacuating a chamber
GB201210750D0 (en) A microscope system
GB2487397B (en) A cylinder vacuum cleaner
EP2530705A4 (en) vacuum evaporation
GB2506120B (en) A cleaner-head for a vacuum cleaner
PL2468917T3 (pl) Wtryskiwacz do źródła odparowywania próżniowego
GB2508539B (en) Vacuum cleaner
EP2708172A4 (en) VACUUM CLEANER