KR930703477A

KR930703477A - Passivation Processor

Info

Publication number: KR930703477A
Application number: KR1019930702464A
Authority: KR
Inventors: 다다히로 오미; 요시유끼 나까하라; 다까히꼬 기지마; 다까시 사까나까; 에이지 오다; 유따까 구니모또; 마사꾸니 유까와; 후미오 나까하라
Original assignee: 다무라 마사따까; 오사까 산소 고교 가부시끼가이샤
Priority date: 1991-02-18
Filing date: 1992-02-18
Publication date: 1993-11-30
Also published as: CA2100755A1; WO1992014857A1; JPH0593256A; JP3037768B2

Abstract

본 발명은 피처리체의 온도분포를 균일하게 하는 외에, 피처리체의 양산에 적합하고, 금속관만으로 된 각종 의 피처리체의 처리에도 적용될 수 있는 등의 부동태화 처리장치를 제공하기 위한 것이다.The present invention is to provide a passivation treatment apparatus such as not only making the temperature distribution of a target object uniform, but also suitable for mass production of the target object, and also applicable to the processing of various target objects including only metal tubes.

노체(1)를 작동시킨 뒤, 분산관(10) (온도균일화 기구)에 의해 레토르트(2) (처리관체) 내에 가열된 불활성개스를 온도분포를 균일하게 한 상태로 공급하는 한편, 금속관(20) (피처리체)를 보지체에 연통상태로 보지시키고, 이 보지체를 원치(32) (이송기구)에 의해 레토르트(2)내에 수납하며, 그 후 상기 금속관(20)내에 예열된 처리개스를 공급한다. 이렇게 하여, 금속관(20)에 균일한 부동태화막이 재현성이 양호하게 형성된다. 또, 상기 노체(1)의 전기히터(4a∼41)(온도제어부), 불활성개스 공급부(6A)(불활성개스 제어부), 처리개스 공급부(6Ba, 6Bb)(처리개스제어부), 또는 윈치(32) 등이 도시되지 않은 중앙제어부에 의해 자기기록매체 등을 통해 프로그램제어되고, 금속관(20)의 원격처리, 자동처리, 대량처리 등에 실현된다.After operating the furnace body 1, the inert gas heated in the retort 2 (process tube) by the dispersion tube 10 (temperature homogenizing mechanism) is supplied in a state where the temperature distribution is uniform, while the metal tube 20 ) (To-be-processed) is held in communication with the retaining body, and the retaining body is stored in the retort 2 by the original device 32 (transfer mechanism), and the treated gas preheated in the metal tube 20 is then stored. Supply. In this way, a uniform passivation film is formed in the metal tube 20 with good reproducibility. In addition, the electric heaters 4a to 41 (temperature control unit), inert gas supply unit 6A (inert gas control unit), process gas supply units 6Ba and 6Bb (process gas control unit), or winches 32 of the furnace body 1 are provided. Is controlled by a magnetic control medium or the like by a central control unit (not shown), and is realized by remote processing, automatic processing, mass processing, and the like of the metal tube 20.

Description

Passivation Processor

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 일 실시예의 구성을 나타낸 블록구성도이다. 제2도는 처리 관체 내부를 자세히 나타낸 단면도이다. 제3도는 제2도의 A-A선 방향에서 바라본 단면도이다. 제4도는 제2도의 B-B선 단면도이다. 제5도는 분산관의 요부평면도이다. 제6도는 제5도의 C-C선 단면도이다. 제7도는 제5도의 D-D선 단면도이다. 제8도는 이송기구의 정면도이다. 제9도는 제8도의 E-E선 단면도이다. 제10도는 이송기구의 단부평면도이다.1 is a block diagram showing the configuration of an embodiment of the present invention. 2 is a cross-sectional view detailing the inside of the processing tube. 3 is a cross sectional view taken along the line A-A of FIG. 4 is a cross-sectional view taken along the line B-B in FIG. 5 is a plan view of main parts of the dispersion pipe. 6 is a cross-sectional view taken along the line C-C of FIG. 7 is a cross-sectional view taken along the line D-D of FIG. 8 is a front view of the transfer mechanism. 9 is a cross-sectional view taken along the line E-E of FIG. 10 is an end plan view of the transfer mechanism.

Claims

A processing body having an open body and an opening and closing cover at one end in the longitudinal direction inserted into the furnace body, a holding body which can be stored in the processing body and can be held in communication with the processing body, and the holding body in the processing body. A transfer mechanism capable of carrying in and out from the one end side toward the other end side in the longitudinal direction, a processing gas supply means for feeding the processing gas into the holding body, and a process for discharging the fed processing gas out of the processing tube body; A passivation apparatus comprising a gas exhaust means and an inert gas supply means for feeding an inert gas into the processing tube, wherein the inert gas supply means is a flow distribution of a heated inert gas introduced into the processing tube. Passivating apparatus characterized in that it has a temperature equalization mechanism for equalizing.

The temperature homogenizing mechanism has a hollow dispersion tube inserted into the processing tube and into which an inert gas is introduced, which is disposed on a side opposite to the inner wall of the processing tube, and formed at predetermined intervals in the circumferential direction. The passivation processing apparatus according to 1, wherein at least one pair of the penetrating heights is formed in a plurality of holes at predetermined intervals in the longitudinal direction.

The passivating apparatus according to 1 or 2, wherein the temperature homogenizing mechanism has an inert gas preheating unit arranged between the furnace body and the processing tube to heat the inert gas introduced into the processing tube.

The said retainer body has a process gas preheating part for heating the process gas introduce | transduced into the said to-be-processed object, The passivation processing apparatus in any one of 1-3 characterized by the above-mentioned.

The passivating apparatus according to any one of 1 to 4, wherein the inert gas preheating unit is a conduit for flowing the inert gas.

The passivation processing device according to any one of 1 to 5, wherein the processing gas preheating unit is a guide conduit provided in the processing pipe and allowing the processing gas to flow through the processing target body.

The passivation apparatus according to 3, wherein the guide conduit branches into a plurality of flow paths on the side of the object to be processed.

The treatment gas supply means has a treatment gas control section capable of controlling the supply amount and the supply speed of the treatment gas, and the inert gas supply means has an inert gas control section capable of controlling the supply amount and the supply speed of the inert gas. The passivation processing apparatus according to any one of 1 to 7, wherein the processing gas control unit, the inert gas control unit, and the temperature control unit are program controlled by a central control unit. .

The said processing pipe | tube is provided with the cooling means in the vicinity of the said cover, The passivation processing apparatus in any one of 1-6 characterized by the above-mentioned.

The opening and closing cover is a passivation treatment device according to 1 to 9, characterized in that the seal member made of a gum material can be mounted.

The transfer mechanism according to any one of 1 to 8, wherein the transfer mechanism has electric drive means for reciprocating the holding body in the carry-in / out direction.

The passivation processing apparatus according to 6, wherein the driving means can be program controlled by a central control unit.

The passivation apparatus according to any one of 1 to 12, wherein the furnace body has air cooling means for introducing cooling air in a longitudinal direction between the processing tube body.

The passivation apparatus according to any one of 1 to 13, wherein the target object is detachably attached to the treatment gas supply means and the treatment gas exhaust means via a joint.

The passivation apparatus according to 15, wherein the target object is a metal part.

The passivation processing apparatus according to 15, wherein the metal part is a metal tube having a predetermined size.

The passivation treatment apparatus according to any one of 1 to 16, wherein the inert gas is nitrogen gas.

The passivation treatment apparatus according to any one of 1 to 17, wherein the treatment gas is oxygen gas.

The passivation processing device according to any one of 1 to 18, wherein the target object is detachable from the holding member via a joint member.

※ Note: The disclosure is based on the initial application.