KR930002593B1 - Burn-in system - Google Patents

Abstract

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Description

Heat treatment device

1 is a front view showing a conventional heat treatment apparatus

2 is a side view showing an embodiment of the present invention

3 is a top view showing the top of the heat treatment apparatus shown in FIG.

4 is a block diagram showing a temperature adjusting means

5 is a block diagram showing a damper control mechanism.

6 is a time difference art diagram of a heater control signal.

* Explanation of symbols for main parts of the drawings

12: heat treatment device 14: partition wall material

15: whole thermostat 16: rear thermostat

51: temperature controller 52: heater

53: signal conversion circuit 54: switching circuit detection circuit

55: damper 56: comparison circuit

57: motor

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat treatment apparatus for performing burn-in treatment of an IC, and more particularly, to a heat treatment apparatus capable of uniformly heating a built-in thermostatic chamber to a predetermined temperature.

Conventionally, as shown in FIG. 1, for example, the heat treatment apparatus 1 capable of heat treatment of an IC has a. It has a thermostat (3) and a signal current supply unit (4) having an opening and closing door (2) in the front. The thermostat 3 is surrounded by the side wall portion 5, the ceiling portion 6, and the bottom portion 7 filled with the heat insulating material, and is opposite to the side wall portion 5 on one side facing the signal current supply portion 4. The heater 8 is mounted on the outer surface of the side wall portion 5, and the air heated by the heater 8 is supplied from the bottom portion 7 via a hot air circulation path 10 having a fan 9 therein. It is supplied in the thermostat 3, and the heated air in the thermostat 3 is circulated from the ceiling 6 to the heater 8 via the hot air circulation path 10, and at the same time the ceiling of the thermostat 3 The inside of the thermostat 3 is kept at a constant temperature by supplying cold air to the heater 8 from the outside by an automatic damper (not shown) installed in the heater.

In addition, indicated by (11) is the caster which enables the movement of this heat processing apparatus. However, in such a conventional heat treatment apparatus, since the hot air circulation path drawn out from the ceiling portion of the thermostat is connected to the bottom of the thermostat, the heater is connected to the bottom thereof, and the heater is disposed at the sidewall of the thermostat. As a result, the width of the heat treatment apparatus is increased. Therefore, when many heat processing apparatuses are arrange | positioned, a loss generate | occur | produces in the mounting space.

Since the hot air circulation path is only a passage for blowing heated hot air into the thermostat, it is a wasteful space that does not heat the substrate on which the IC is mounted from the viewpoint of heating the substrate on which the IC is mounted.

In the above heat treatment apparatus, in the hot air circulation path drawn out of the thermostat, the ventilation fan and the heater are arranged in the horizontal portion of the thermostat, and are heated by the heater. There is also a problem that the hot air is partially cooled while passing through the hot air circulation path, and the inside of the thermostat cannot be heated to a predetermined temperature. It may be considered to solve the above problem by heating the hot air by overheating in anticipation of the water cooled during the passage of the hot air circulation in the hot air circulation passage, but this means that the heat loss is recognized, and the thermostat is thermally efficient. I can not say that it heats me. In addition, even if the heated hot air is blown into the thermostat with a predetermined temperature, if the hot air spout in the thermostat is small, a difference in temperature is generated in the thermostat and the hot air can be discharged from the entire ceiling of the thermostat. Even if the temperature difference in the thermostatic chamber cannot be prevented completely.

Moreover, in the said heat processing apparatus, since the excess heat in this thermostatic chamber is discharged | emitted by the ceiling damper, and a cool air is sucked in, this thermostat cannot hold | maintain uniformly in predetermined temperature. Accordingly, the present invention provides a heat treatment apparatus which is compact in size so as not to widen the width of the heat treatment apparatus, and the efficiency of the mounting space can be improved, and the inside of the thermostatic chamber can be maintained at a predetermined temperature and the heat efficiency is high. It is a task.

MEANS TO SOLVE THE PROBLEM In order to solve the said technical subject, this invention is the heat processing apparatus which can heat-process in the heating state by putting the board | substrate with IC in a high temperature tank, WHEREIN: All the thermostat tank which can insert the said board | substrate from the front surface. And a hot air circulation passage through which the hot air is circulated by the whole thermostatic chamber and the rear thermostatic chamber, and the hot air circulation path is circulated by the whole thermostatic chamber and the rear thermostatic chamber, and the heating means and the hot air are circulated through the whole thermostatic chamber and the rear thermostatic chamber. By disposing a circulation means, by disposing a wind direction adjusting means for uniformly flowing hot air in the whole thermostat and the rear thermostat, and providing a temperature adjusting means for maintaining a constant temperature in the entire thermostat and the rear thermostat. It is a heat treatment device.

Since the heat treatment apparatus of this invention was comprised as mentioned above, the hot air heated by the heating means arrange | positioned in each of the all-temperature chamber and the rear-side thermostat is forcibly circulated by the hot-air circulation means by a hot air circulation means. The wind direction in the all-column and the rear thermostat is adjusted by the wind direction adjusting means, and the temperature in the all-column and the rear thermostat is kept constant by the temperature adjusting means. The ICs on the substrate are all heated uniformly.

As described above, in this heat treatment apparatus, hot air is circulated to all the thermostats disposed at the rear and the rear of the heat treatment apparatus, that is, the whole thermostat and the rear thermostat, so that the hot air circulation path is specifically drawn out from the thermostat as in the conventional apparatus. There is no need to do so, and the width of the entire heating treatment apparatus is reduced by that much. Therefore, this heat treatment apparatus can be arranged in a limited space more than in the case of the conventional apparatus.

In addition, since the hot air circulation path drawn out of the thermostat is not formed, thermal efficiency is also good. Next, an embodiment of the present invention will be described with reference to the drawings.

As shown in FIG. 2, the heat treatment apparatus 12 has a thermostat and a signal current supply part which have the opening-closing door 13 in the front and back surface, respectively. This thermostat is enclosed by the side wall part, ceiling part, and bottom part which filled the heat insulating material, and is formed. This thermostat is divided into the whole thermostat 15 and the rear thermostat 16 by arranging the plate-shaped partition wall 14 in parallel with the front and rear surfaces of the heat treatment apparatus 12. The whole thermostat 15 and the rear thermostat 16 are formed so that many board | substrates 17 with IC to be inspected can be loaded.

In the IC on the substrate 17, as in the conventional heat treatment apparatus, various inspection signals are transmitted from the signal current supply unit to inspect the durability, performance, operation state, and the like of the IC. The first blower chamber 18 is formed in the upper part of the whole thermostat 15, and the second blower chamber 19 is formed in the upper part of the rear thermostat 16. As shown in FIG.

In addition, a first heater chamber 20 is formed above the first blower chamber 18 and the second blower chamber 19, and the first heater chamber 20, the first blower chamber 18, and the second blower chamber 18 are formed. The blower chamber 19 is in communication. In the first blower chamber 18, the first blower 21, for example, the sirocco fan, which blows from the first heater chamber 20 into the whole thermostat 15, is installed, and the whole of the second blower chamber 19 is installed. A second blower 22, for example a sirocco fan, is installed, which blows air from the thermostat 16 to the first heater chamber 20.

Between the 1st blower chamber 18 and the whole thermostat 15, it is arrange | positioned in the many 1st flap 23 which can be rotated by the 1st flap drive means not shown. Moreover, the 1st heater 24 is arrange | positioned in the said 1st heater chamber 20, and the air blown by the said 2nd blower 22 can be heated. In the ceiling of the first heater chamber 20, a first damper 25 is disposed at a position located in the middle of a blowing path from the first heater 24 to the first blower 21.

In this embodiment, the first damper 25 is rotatable to the first opening 26 of the planar cross-section formed on the ceiling of the first heater chamber 20, as shown in FIG. It is formed by the first rotating plate 27, and the first rotating plate 27 rotates around the mounting shaft for attaching it to the ceiling, and normally closes the first opening 26 of the ceiling, but the rotating plate When it rotates by 90 degrees, the inside of the 1st heater chamber 20 is interrupted | blocked, and the 1st opening part 26 is divided into the 1st external air suction opening part 26a and the 1st hot air discharge opening part 26b, and the 2nd blower 22 is carried out. The hot air blown by the air is not blown into the first blower chamber 18, but is blown out of the heat treatment apparatus 12 from the first hot air discharge opening 26b, and at the same time, external air is blown out of the first outside air suction opening 26a. ) Is allowed to flow into the first blower chamber 18.

This first rotating plate 27 rotates by a first rotating plate driving means (not shown). A third blower chamber 28 is formed in the lower portion of the whole thermostat chamber 15, and a fourth blower chamber 29 is formed in the lower portion of the rear thermostat chamber 16. Further, a second heater chamber 30 is formed at the lower side of the third blower chamber 28 and the fourth blower chamber 29, and the second heater chamber 30, the third blower chamber 28, and the first blower chamber 28 are formed. The four blower chambers 29 communicate with each other.

In the third blower chamber 28, the third blower 31, for example, a sirocco fan, which blows from the whole thermostat 15 to the second heater chamber 30 is installed, and in the fourth blower chamber 29, A fourth blower 32, for example a sirocco fan, is installed, which is blown from the second heater chamber 30 into the rear thermostat 16.

Between the 4th blower chamber 29 and the rear side thermostat 16, it is arrange | positioned in the many 2nd flap 33 which can be rotated by the control flap drive means not shown. Moreover, the 2nd heater 34 is arrange | positioned in the said 2nd heater chamber 30, and the air blown by the said 3rd blower 31 can be heated. On the bottom of the second heater chamber 30, a second damper 35 is disposed at a position located in the middle of the blowing path from the second heater 34 to the fourth blower 32. As shown in FIG.

In the present embodiment, the second damper 35, like the first damper 25, is rotatable to the second horizontal opening 36 formed in the bottom surface of the second heater chamber 30. It is formed by the second rotating plate 37, and the second rotating plate 37 rotates around the mounting shaft for mounting it on the bottom, and normally closes the second opening 36 on the bottom, but the rotating plate When it rotates by 90 degrees, the inside of the 2nd heater chamber 30 is interrupted | blocked, and the 2nd opening part 36 is divided into the 2nd external air suction opening 36a and the 2nd hot air discharge opening 36b, and the 3rd blower 31 is carried out. The hot air blown by the air is not blown into the fourth blower chamber 29, and is blown out of the heat treatment apparatus from the second hot air discharge opening 36b, and at the same time, the outside air is blown from the second outside air suction opening 36a. It is possible to flow into the fourth blower chamber 29.

This second rotating plate 37 is rotated by second rotating plate driving means (not shown). On the other hand, as shown in FIG. 4, the temperature detecting means 38 is provided in each of the whole thermostat 15 and the rear thermostat 16, and the temperature detection signal output from the temperature detecting means 38 is input. The control means 39 controls the opening and closing of the first rotating plate driving means 40 and the second rotating plate driving means 41.

As described in detail above, in this embodiment, the hot air circulation passage includes the first heater chamber 20, the first blower chamber 18, the whole thermostat 15, the third blower chamber 28, and the second heater chamber ( 30), the 4th blower chamber 29, the rear thermostat 16, and the 2nd blower chamber 19 are comprised. The heating means is composed of the first heater 24 and the second heater 34. The hot air circulation means is constituted by the first blower 21 and the second blower 22. The wind direction adjusting means includes a first flap 23 driven by the first flap driving means controlled by the control means 39 and a second flap driving means controlled by the control means 39. The flap 33 is comprised.

The temperature adjusting means is provided to the temperature detecting means 38, the control means 39, the first rotating plate driving means 40, the second rotating plate driving means 41, the first damper 25, and the second damper 35. It is composed by. The effect | action of the heat processing apparatus of the above structure is demonstrated below.

In the whole thermostat 15 and the rear thermostat 16, the board | substrate 17 with IC was loaded, and each door of the whole thermostat 15 and the rear thermostat 16 is sealed. The first heater 24 and the second heater 34 are in operation. As the first to fourth blowers 21, 22, 31, and 32 operate, the heated air passes through the first heater chamber 20, the first blower chamber 18, and the whole thermostat 15. ), The third blower chamber 28, the second heater chamber 30, the rear thermostat 16, the second blower chamber 19, and the first heater chamber 20.

That is, the hot air heated by the first heater 24 is blown into the whole thermostat 15 by the first blower 21, but at that time, the first flap 23 is rotated by the first flap driving means. Hot air spreads to every corner in the rear thermostat 16. Therefore, hot air, which is generated when the first flap 23 is not installed, is not conveniently blown to the substrate 17. The hot air of the whole thermostat 15 is sucked by the third blower 31 and blown to the second heater 34. The hot air reheated by the second heater 34 is blown into the rear thermostat 16 by the fourth blower 32.

At that time, the second flap 33 is rotated by the second flap 33 driving means, and the hot air evenly spreads to all corners of the rear thermostat 16. Therefore, the hot air generated when the second flap 33 is not installed is not blown to the substrate 17 for convenience. When a test signal current flows through a large amount of ICs mounted on the substrate 17, a large amount of heat is generated by heat generation of each IC.

As a result, the temperature in the whole thermostat 15 and the rear thermostat 16 gradually rises. When the temperature in the whole thermostat 15 rises above the allowable limit, the control means 39 for inputting the temperature detection signal output by the temperature detecting means 38 disposed in the whole thermostat 15 receives the control signal. It outputs to the 1st rotating plate drive means 40, and rotates the 1st rotating plate 27. FIG.

The inside of the first heater chamber 20 is blocked by the rotation of the first rotating plate 27 to block the inflow of the hot air heated by the first heater 24 into the first blower chamber 18, and the first heater. Hot air heated by (24) is discharged from the first hot air discharge opening (26b) to the outside, and air flows into the first blower chamber (18) from the first outside air suction opening (26a). Therefore, the omberheat in the thermostat is quickly resolved by cooling by the air into which the temperature in the superheated thermostat is introduced.

Similarly, when the temperature in the rear thermostat 16 is overheated beyond the allowable limit, the rear thermostat 16 is cooled in the same manner. The cabinet air flowing into the whole thermostat 15 from the first outside air suction opening 26a is blown to every corner of the whole thermostat 15 by the rotating first flap 23, so that the inside of the whole thermostat 15 is quick. Is cooled.

When the temperature in the whole thermostat 15 and the rear thermostat 16 is cooled to a predetermined temperature, the first rotating plate driving means (by the control means 39 for inputting the temperature detection signal output from the temperature detecting means 38) ( The first rotary plate 27 and the second rotary plate 37 driven by the 40 and the second rotary plate driving means 41 rotate to close the first opening 26 and the second opening 36. As mentioned above, in this Example apparatus, the temperature in the all thermostat 15 and the rear thermostat 16 is kept constant.

While one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment. It goes without saying that the present invention can be modified without departing from the scope of the present invention.

For example, in the above embodiment, two blowing means comprising the first blower 21 and the second blower 22 are disposed above the whole thermostat 15 and the rear thermostat 16, and all of them. Although two blowing means consisting of a third blower 31 and a fourth blower 32 are disposed below the thermostat 15 and the rear thermostat 16, the first blower 21 and the fourth blower ( 32) may be omitted. In other words, it is only necessary to provide a blowing means for forcibly blowing the heated air to all of the thermostatic chamber 15 and the rear thermostatic chamber 16.

In the above embodiment, a sirocco fan is used as the blowing means, but may be a profiler fan. In the above embodiment, the first damper and the second damper are configured to block the circulation of hot air in the heater chamber by rotating the first rotating plate and the second rotating plate by 90 degrees, respectively. Similarly, the damper adjusting mechanism may be provided so that the rotation of these rotating plates is at an arbitrary angle so that the opening and closing degree of the opening by the rotating plate can be adjusted.

In addition, since the structure regarding a 1st damper and the structure regarding a 2nd damper are the same, a 1st damper is demonstrated below. A signal conversion circuit for generating a predetermined opening and closing reference signal by inputting a heater control signal for conducting control of the heater, an opening and closing detection circuit for generating an opening and closing signal according to the opening and closing degree of the damper, and an output from the signal conversion circuit Comparing the switching reference signal with the switching signal output from the opening / closing degree detection circuit to generate an opening signal or a closing signal, and performing the opening / closing operation of the damper by the opening signal or the closing signal. A damper opening / closing control unit may be provided, and a damper adjustment mechanism may be provided to automatically open and close the damper so as to be opened and closed by any opening and closing via the damper opening and closing control unit by the open signal or the closing signal from the comparison circuit. It will be described in detail with reference to the drawings,

In Fig. 5, the damper adjusting mechanism is indicated by a block diagram. The damper adjustment mechanism includes a temperature controller for performing temperature adjustment and setting in the thermostat and cooling the energization control of the heater 52, and a signal conversion circuit 53 for generating an opening and closing reference signal as an opening and closing point. In addition, the thermostat performs an opening / closing degree detection circuit 54 which generates an opening / closing signal according to the opening / closing degree of the damper 55, and compares the opening / closing reference signal with the opening / closing signal, such as a damper opening / closing control unit M (57). Has a comparison circuit 56 for driving control. The temperature regulator 51 is configured to generate a heater control signal, which is an energization control signal of the heater 52, and to send the heater signal to the signal conversion circuit 53.

As the heater control signal, for example, a ratio variable signal of on / off of heater energization can be adopted. In this case, as shown in FIG. 6, when the temperature rise in the tank is required, the heater 52 needs to be heated for a long time. Therefore, the heater 52 has the waveform shown by A in the figure. The heater control signal is output. In addition, in the case of maintaining the inside temperature or slightly increasing the inside temperature, a heater control signal having a short on-time compared to the off time is output to the heater 52 as indicated by B in the figure.

That is, the temperature inside the tank can be configured to be determined by the on / off ratio of heater energization of the heater control signal. The signal conversion circuit 53 may be configured to have a function of forming an opening / closing reference signal proportional to the ratio of on / off of heater energization of the heater control signal as the heater signal is input. In the following description, the switching reference signal becomes a voltage signal. The opening and closing detection circuit 54 is configured as having a function of forming the opening and closing signal according to the opening and closing degree of the damper 55. As a means for using the opening and closing degree signal as an opening and closing degree signal, a converter such as a general rotary encoder may be used, or as described below, the potentiometer rotates following the opening and closing of the damper by using a potentiometer. do. The comparison circuit 56 compares the opening and closing degree signal with the opening and closing reference signal. In the case shown in FIG. 5, a circuit configuration in which the open / close reference signal is formed of two signals, an open reference signal and a closed reference signal, is formed inside the comparison circuit 56. When the motor M 57 is reversely rotated to open the damper 55, and the opening and closing degree signal is equal to or greater than the closing reference signal, the motor M 57 may be rotated forward to close the damper 55.

As described above, the present invention has the following effects. In other words, since the air heated by the heater disposed in the thermostat is circulated in the thermostat, it is not necessary to install the hot air circulation path drawn out of the thermostat and the heater outside the thermostat as in the prior art, so that the width of the heat treatment apparatus can be made smaller. have. Therefore, the heat treatment apparatus of the present invention becomes small in width and therefore can save a large space for installation.

In the present invention, since the wind direction adjusting means and the temperature adjusting means are arranged, the inside of the thermostat can be quickly brought to a predetermined temperature, and the temperature difference in the thermostat can be reduced. In this way, since the temperature in the thermostat can be maintained almost constant, the IC heat treatment can be appropriately performed.

Claims (1)

A heat treatment apparatus in which a substrate equipped with an IC is placed in a high temperature bath and subjected to heat treatment in a heated state, comprising: an entire thermostat bath capable of inserting the substrate from the front side and a rear thermostat bath capable of inserting the substrate from the rear. At the same time, a hot air circulation passage through which the hot air circulates is formed by the whole thermostat and the rear thermostat, and a hot air circulation means for circulating the heating means and the hot air is disposed in the whole thermostat and the rear thermostat, A heat treatment device comprising: a wind direction adjusting means for uniformly flowing hot air in a rear thermostatic chamber; and a temperature adjusting means for maintaining a constant temperature in all the thermostatic chambers and the rear thermostatic chamber.

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