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KR880012230U - Vacuum evaporator using high power CO2 laser - Google Patents

Vacuum evaporator using high power CO2 laser

Info

Publication number
KR880012230U
KR880012230U KR2019860020933U KR860020933U KR880012230U KR 880012230 U KR880012230 U KR 880012230U KR 2019860020933 U KR2019860020933 U KR 2019860020933U KR 860020933 U KR860020933 U KR 860020933U KR 880012230 U KR880012230 U KR 880012230U
Authority
KR
South Korea
Prior art keywords
laser
high power
vacuum evaporator
evaporator
vacuum
Prior art date
Application number
KR2019860020933U
Other languages
Korean (ko)
Other versions
KR900001055Y1 (en
Inventor
이성중
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019860020933U priority Critical patent/KR900001055Y1/en
Publication of KR880012230U publication Critical patent/KR880012230U/en
Application granted granted Critical
Publication of KR900001055Y1 publication Critical patent/KR900001055Y1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR2019860020933U 1986-12-23 1986-12-23 Vacuum evaporator using a high power co2 laser beam KR900001055Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019860020933U KR900001055Y1 (en) 1986-12-23 1986-12-23 Vacuum evaporator using a high power co2 laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019860020933U KR900001055Y1 (en) 1986-12-23 1986-12-23 Vacuum evaporator using a high power co2 laser beam

Publications (2)

Publication Number Publication Date
KR880012230U true KR880012230U (en) 1988-08-27
KR900001055Y1 KR900001055Y1 (en) 1990-02-15

Family

ID=19258255

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019860020933U KR900001055Y1 (en) 1986-12-23 1986-12-23 Vacuum evaporator using a high power co2 laser beam

Country Status (1)

Country Link
KR (1) KR900001055Y1 (en)

Also Published As

Publication number Publication date
KR900001055Y1 (en) 1990-02-15

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
NORF Unpaid initial registration fee