KR20240164573A - Fluid heater - Google Patents

Abstract

The fluid heater is configured to increase the temperature of a process fluid flowing through the fluid heater. The fluid heater includes a plurality of tubes that route the process fluid through the fluid heater. One or more heaters are arranged radially inwardly of the tubes, such that the thermal energy generated by the heaters is radiated outwardly to heat the process fluid.

Description

Fluid heater

Cross-reference to related applications

This application claims the benefit of U.S. Provisional Application No. 63/323,103, filed March 24, 2022, entitled "FLUID HEATER," the disclosure of which is incorporated herein by reference in its entirety.

The present disclosure relates generally to fluid heaters. More specifically, the present disclosure relates to fluid heaters for use in semiconductor manufacturing.

Fluid heaters are configured to heat a fluid, such as a liquid. For example, fluid heaters can be used to heat a liquid, such as a solvent, during semiconductor manufacturing. Solvents used in semiconductor manufacturing are divided into two categories: non-hazardous solvents and hazardous solvents. In semiconductor manufacturing, the purity of the heated fluid must be maintained while reactively adding and maintaining heat to the fluid.

According to one aspect of the present disclosure, a fluid heater configured to increase a temperature of a process fluid comprises: a heater housing elongated along an axis between a first housing end and a second housing end; a first manifold assembly disposed within the heater housing and in fluid communication with a fluid inlet of the fluid heater; a second manifold assembly disposed within the heater housing and in fluid communication with a fluid outlet of the fluid heater; a plurality of tubes extending within the heater housing between the first manifold assembly and the second manifold assembly and fluidly connecting the first manifold assembly and the second manifold assembly; and at least one heater positioned within the heater housing, the plurality of tubes being arranged radially outwardly of the at least one heater.

In accordance with additional or alternative aspects of the present disclosure, a fluid heater configured to increase a temperature of a process fluid comprises: a heater housing having an elongated shape along an axis between a first housing end and a second housing end; a first manifold assembly disposed within the heater housing and in fluid communication with a fluid inlet; a second manifold assembly disposed within the heater housing and in fluid communication with a fluid outlet; a core disposed axially within the heater housing between the first manifold assembly and the second manifold assembly, the core being formed of a plurality of axially stacked blocks, the plurality of blocks having thermal conductivity; a plurality of tubes extending through the core between the first manifold assembly and the second manifold assembly to fluidly connect the first manifold assembly and the second manifold assembly; and at least one heater positioned within the core radially inwardly of the plurality of tubes.

According to another additional or alternative aspect of the present disclosure, a fluid heater configured to increase a temperature of a process fluid comprises: a heater housing having an elongated shape along an axis between a first housing end and a second housing end; a first manifold assembly disposed within the heater housing and in fluid communication with a first fluid port defined by one of a fluid inlet and a fluid outlet; a second manifold assembly disposed within the heater housing and in fluid communication with a second fluid port defined by the other of the fluid inlet and the fluid outlet; a core disposed within the heater housing axially between the first manifold assembly and the second manifold assembly; a plurality of tubes extending through the core; and at least one heater positioned within the core radially inwardly of the plurality of tubes. The first manifold comprises a first inner manifold having a first plurality of fluid apertures extending therethrough; a first outer manifold having a first port aperture extending therethrough, the first outer manifold being in fluid communication with the first fluid port through the first port aperture; and a first flow chamber formed between the first inner manifold and the first outer manifold, the first flow chamber providing fluid communication between the first port opening and the first plurality of fluid openings. A plurality of tubes extend between the first plurality of fluid openings and the second manifold assembly to fluidly connect the first flow chamber and the second manifold assembly.

Figure 1a is an isometric projection of the fluid heater.
Figure 1b is a cross-sectional view taken along line BB of Figure 1a.
FIG. 2 is a cross-sectional view taken along line BB of FIG. 1a with the end cap and outer housing removed.
Figure 3 is an exploded view of the fluid heater.
Figure 4 is an exploded view of the fluid handling and heating portion of the fluid heater.
Figure 5 is an enlarged cross-sectional view of an end portion of the fluid heater.
Figure 6a is a first isometric projection of the internal manifold of the manifold assembly.
Figure 6b is a second isometric projection of the internal manifold of the manifold assembly.
Figure 7a is a first isometric projection of the outer manifold of the manifold assembly.
Figure 7b is a second isometric projection of the outer manifold of the manifold assembly.
Figure 8a is an isometric projection of the first end block of the core.
Figure 8b is an isometric projection of the second end block of the core.
Fig. 9 is a cross-sectional view of a fluid heater.
Fig. 10 is a cross-sectional view of a fluid heater.

The present disclosure relates generally to fluid heaters. For example, the fluid heaters of the present disclosure can be used to heat fluids used in semiconductor manufacturing. Such fluid heaters can be used to heat liquid solvents, among other options. A fluid heater according to the present disclosure includes a separate passage for routing a fluid through the fluid heater. The fluid heater further includes an internal heater that generates heat to be applied to the fluid. The heater is disposed inwardly from the separate passage such that heat is radiated outwardly from the heater to the fluid.

Components may be considered to overlap radially if the components are arranged at a common axial position along the axis. A radial line extending orthogonal to the axis extends through each of the radially overlapping components. Components may be considered to overlap axially if the components are arranged at a common radial and circumferential position about the axis. An axial line parallel to the axis extends through the axially overlapping components. Components may be considered to overlap circumferentially when they are aligned about the axis, such that a circle centered on the axis passes through the circumferentially overlapping components.

FIG. 1a is an isometric view of a fluid heater (10). FIG. 1b is a cross-sectional view of the fluid heater (10) taken along line B-B of FIG. 1a. FIGS. 1a and 1b are described together. The fluid heater (10) includes a heater housing (12); end caps (14a, 14b); a foot (16); a fluid port (18a, 18b); a purge port (20); an electrical port (22); a manifold assembly (24); a core (26); an insulator (28); a clamp (30); a tube (32); a heater (34); and sensors (36a-36c) (collectively referred to herein as “sensor (36)” or “sensors (36)”). The core (26) includes end blocks (27a, 27b) and an intermediate block (27c) (the end blocks (27a, 27b) and the intermediate block (27c) are collectively referred to as “block (27)” or “blocks (27)”).

The fluid heater (10) is configured to receive a process fluid, such as a liquid for semiconductor manufacturing, through one of the fluid ports (18a, 18b) and to discharge the process fluid through the other of the fluid ports (18a, 18b). The fluid heater (10) increases the temperature of the process fluid flowing between the fluid ports (18a, 18b). The fluid heater (10) can be configured to increase the temperature of any desired process fluid, including a volatile, flammable solvent. The fluid heater (10) can be used to heat the solvent. The fluid heater (10) can be used to heat, among others, isopropyl alcohol (IPA), DuPont™ PlasmaSolv® EKC (e.g., EKC265, EKC830, EKC270), acetone, ethanol, toluene, methyl ethyl ketone (MEK), N-Methyl-2-pyrrolidone (NMP). The fluid heater (10) can be used in a variety of applications, such as semiconductor manufacturing. Some examples of the fluid heater (10) can be used in explosive environments. For example, the fluid heater (10) can be used in Class 1 hazardous locations, Class 1, Class 2 hazardous locations, etc. In some examples, the fluid heater (10) can heat the process fluid to about 120° C. (about 248° F.) when used in a hazardous location. In some examples, the fluid heater (10) can heat the process fluid to about 180° C. (about 356° F.) when used in non-hazardous locations.

The fluid heater (10) is typically elongated along axis AA. Axis AA is depicted along the elongated orientation of the fluid heater (10). Axis AA is typically coaxial with the cylindrical body of the fluid heater (10). Additionally, a radial direction (R) is typically depicted, with the radial direction being understood to be any direction orthogonal to axis AA. In the depicted example, the heater housing (12) is coaxial with axis AA.

A heater housing (12) surrounds the other components of the fluid heater (10). The heater housing (12) may be formed of metal, among other options. As illustrated, the fluid heater (10) is generally cylindrical. The heater housing (12) may be tubular. The heater housing (12) may be cylindrical and may be positioned coaxially with the axis AA. An end cap (14a) is positioned at a first axial end of the fluid heater (10), and an end cap (14b) is positioned at a second axial end of the fluid heater (10). The end caps (14a, 14b) abut the heater housing (12) to define an exterior of the fluid heater (10).

The fluid ports (18a, 18b) are configured to admit process fluid into the fluid heater (10) and route process fluid out of the fluid heater (10). The fluid port (18a) is disposed on the first end of the fluid heater (10). The fluid port (18a) can be configured as an inlet or an outlet for admitting or discharging process fluid from the fluid heater (10). The fluid port (18b) is disposed on the second end of the fluid heater (10). The fluid port (18b) can be the other of an inlet or an outlet for admitting or discharging process fluid from the fluid heater (10). The fluid port (18b) is typically opposite the fluid port (18a), such that process fluid enters the fluid heater (10) from one fluid port (18a, 18b) and exits the fluid heater (10) from the other fluid port (18a, 18b).

In the illustrated example, the fluid port (18a) is configured as an inlet port among the fluid ports (18a, 18b), and the fluid port (18b) is configured as an outlet port among the fluid ports (18a, 18b). In the illustrated example, the fluid port (18a) is configured to be vertically lower than the fluid port (18b). This configuration promotes the flow of process fluid through the flow paths arranged circumferentially around the core (26), as will be described in more detail below.

In the illustrated example, the fluid port (18a) extends through the end cap (14a). In this example, the fluid port (18a) includes a fitting (38a) extending through the end cap (14a). In the illustrated example, the fluid port (18b) extends through the end cap (14b). In this example, the fluid port (18b) includes a fitting (38b) extending through the end cap (14b). The fittings (38a, 38b) can be mechanically connected to each of the end caps (14a, 14b) such that the end caps (14a, 14b) support the fittings (38a, 38b). The fittings (38a, 38b) interface with the manifold assembly (24) to form a fluid connection that allows process fluid to pass between the manifold assembly (24) and the fitting (38). In some examples, the fittings (38a, 38b) are not fixedly connected to the manifold assembly (24). For example, the fittings (38a, 38b) may be threadedly connected to the end caps (14a, 14b) and may abut the manifold assembly (24) at a contact seal. In some examples, a sealing element, such as a crush seal, may be positioned between the fittings (38a, 38b) and the manifold assembly (24). The fitting (38a) may be positioned at the bottom dead center of the end cap (14a), and the fitting (38b) may be positioned at the top dead center of the end cap (14b).

A leak sensor (37) is configured to detect a leak of the process fluid. The leak sensor (37) may be mounted proximate an inlet port of one of the fluid ports (18a, 18b). In the illustrated example, the leak sensor (37) is positioned proximate the fluid port (18a). The leak sensor (37) may be configured as a fiber optic sensor, among other options.

The fluid heater (10) includes an electrical port (22). The electrical port (22) is formed on a second end of the fluid heater (10). The electrical port (22) extends through the end cap (14b) and provides a passage through which electrical wiring may extend into the interior of the fluid heater (10). While the electrical port (22) is shown extending through the end cap (14a), it is understood that the electrical port (22) may be located at other locations on the fluid heater (10), such as at the end cap (14b), among other options. The electrical port (22) includes a fitting (38c) directly connected to the end cap (14b). The fitting (38c) is mounted to and supported by the end cap (14b). Electrical wires extend through the fitting (38c). The fitting (38c) does not abut the manifold assembly (24). In the illustrated example, the insulator (28) is placed directly between the electrical port (22) and the fitting (38c).

The fluid heater (10) includes a purge port (20). The purge port (20) provides an opening through which a purge fluid, such as an inert gas (e.g., nitrogen), may flow into and out of the interior of the fluid heater (10). The purge gas flows through the fluid heater (10) to purge oxygen from the interior of the fluid heater (10) and provide an inert environment that suppresses combustion. The purge gas may enter a purge path (40) through a purge port (20) in one end cap (14a, 14b) and may exit the purge path (40) through a purge port (20) in the other end cap (14a, 14b). In the illustrated example, the axial portion of the purge path (40) is formed radially within the heater housing (12) and radially outward of the core (26). The purge path (40) is radially narrow and does not extend within the core (26). The radial thickness taken along a radial line extending in a direction away from the axis AA of the purge path (40) is thinner than the radial thickness of the insulator (28). The radial thickness of the purge path (40) is thinner than the radial thickness of the core (26). The narrow purge path (40) reduces the volume of purge gas required to effectively purge the interior of the fluid heater (10).

In the illustrated example, a plurality of purge ports (20) are formed in the end cap (14a), and a single purge port (20) is formed in the end cap (14b). However, it is to be understood that not all examples are so limited. For example, the end caps (14a, 14b) may include the same number of purge ports (20), or the end cap (14b) may include a greater number of purge ports (20) than the end cap (14a). In the illustrated example, a first purge port (20) in the end cap (14b) forms one of an inlet and an outlet for the purge fluid, and a purge port (20) in the end cap (14a) forms the other of an inlet and an outlet for the purge fluid to flow through the purge path (40) of the fluid heater (10). A second purge port (20) in the end cap (14b) forms a sensor port that enables measurement of the pressure of the purge gas. The purge gas flowing through the fluid heater (10) is configured to prevent accumulation of combustible smoke. In the illustrated example, the purge port (20) in the end cap (14b) is configured as an inlet port for the purge gas, and the purge port (20) in the end cap (14a) is configured as an outlet port for the purge gas. The purge path (40) may be configured to have the outlet purge port (20) further from the foot (16) than the inlet purge port (20). Since the purge gas (e.g., nitrogen gas) is lighter than air, positioning the inlet purge port (20) below the outlet port (20) facilitates purge flow.

In the illustrated example, the purge gas flows in a different axial direction through the fluid heater (10) compared to the process fluid. In the illustrated example, the process fluid flows in a first axial direction along axis AA from fluid port (18a) to fluid port (18b), while the purge gas flows in a second, opposite axial direction along axis AA from purge port (20) in end cap (14b) to purge port (20) in end cap (14a).

The feet (16) are configured to support the fluid heater (10) on a support surface. In the illustrated example, the fluid heater (10) includes a pair of feet (16) positioned at first and second axial ends of the fluid heater (10), respectively. In this particular example, the feet (16) are mounted to the end caps (14a) and the end caps (14b). In this particular example, the feet (16) are not mounted to the heater housing (12). However, the feet (16) may be mounted to the heater housing (12) in various alternative examples. In the illustrated example, the feet (16) may be mounted to any desired surface. The feet (16) may be mounted on a horizontal surface such that the fluid heater (10) is oriented horizontally. The feet (16) may be mounted on a vertical surface such that the fluid heater (10) is oriented vertically.

A core (26) is disposed within the heater housing (12). The core (26) is elongated and extends along the axis AA. In the illustrated example, the core (26) extends coaxially with the axis AA. The core (26) may include a cylindrical exterior. The core (26) includes one or more blocks (27). The blocks (27) are thermally conductive. The blocks (27) may be formed of a metal, such as aluminum or another metal, to readily conduct heat. In this particular example, a plurality of blocks (27) are stacked along the axis AA. In this example, the blocks (27) are coaxial with the axis AA. The blocks (27) may be formed to have a generally circular outer surface. In various examples, the core (26) is comprised of an axial stack of blocks (27), although it is to be understood that in some examples, the core (26) may include a single block (27) used to form the body of the core (26).

In the illustrated example, the core (26) is formed by end blocks (27a, 27b) and a middle block (27). The end blocks (27a, 27b) are disposed at the axial ends of the core (26) and form the most axial block (27) of the core (26). The middle block (27c) is disposed between the end blocks (27a) and the end blocks (27b). The end block (27a) is disposed at the first axial end of the fluid heater (10) and is axially positioned between the end cap (14a) and the middle block (27c). The end block (27b) is disposed at the second axial end of the fluid heater (10) and is axially positioned between the end cap (14b) and the middle block (27c). Although the core (26) is illustrated as including the middle block (27c), it is to be understood that not all examples are so limited. For example, the core (26) may be configured to have an end block (27a) positioned adjacent to an end block (27b) without intervening an intermediate block (27c).

The clamp (30) is disposed at least partially around the core (26). In the illustrated example, the fluid heater (10) includes a pair of clamps (30) that interface with the end blocks (27a, 27b). The clamps (30) are configured to interface with the heater housing (12) and the core (26) to axially position the core (26) within the heater housing (12).

An insulator (28) is disposed around the core (26). The insulator (28) is disposed between the core (26) and the heater housing (12). The insulator (28) may be formed of silicone foam, among other options. In the illustrated example, the insulator (28) is formed by a plurality of insulating layers laminated together. In the illustrated example, a portion of the insulator (28) extends radially and axially overlaps the core (26). The radially extending portion of the insulator (28) is disposed axially outward from the end blocks (27a, 27b). The radially extending portion of the insulator (28) is disposed between the manifold assembly (24) and the end caps (14a, 14b). The core (26) is axially disposed between the radially extending portions of the insulator (28). In the illustrated example, a portion of the insulator (28) that axially overlaps the core (26) is positioned axially outside the manifold assembly (24), such that the manifold assembly (24) is positioned axially between the radially extending portions of the insulator (28). The insulator (28) also surrounds the core (26) and radially overlaps the core (26).

A plurality of tubes (32) extend within the core (26). The plurality of tubes (32) are configured to convey a process fluid between an inlet port among the fluid ports (18a, 18b) and an outlet port among the fluid ports (18a, 18b). When the process fluid flows within the tubes (32), the process fluid receives thermal energy to increase its temperature. The plurality of tubes (32) can be arranged around the axis AA. The plurality of tubes (32) can be in a circular array. This circular array can be coaxial with the axis AA, although not all embodiments are so limited. The tubes (32) can be arranged circumferentially around the axis AA. In some examples, the tubes (32) can be arranged in an arched group around the axis AA. Some examples of fluid heaters (10) include layered tubes (32) that may be radially multi-layered, such that some of the tubes (32) are radially spaced (e.g., radially outwardly away from axis AA or radially inwardly toward axis AA) from the other tubes (32). In some examples, the tubes (32) may be multi-layered such that one or more of the tubes (32) radially overlap one or more of the other tubes (32). The tubes (32) are formed from a polymer. For example, the tubes (32) may be formed from perfluoroalkoxy (PFA) or other fluoropolymer, among other options.

The tubes (32) extend through the blocks (27). Each of the plurality of tubes (32) may extend axially completely through each of the blocks (27). As such, the tubes (32) may be considered to extend axially completely through the body portion of the core (26). In some examples, the tubes (32) may extend axially completely through the core (26) and at least partially into the manifold assembly (24). As such, a portion of each of the tubes (32) may radially overlap the block (27), while other portions of the tubes (32) do not radially overlap the block (27). The tubes (32) may extend straight through the blocks (27), such that the tubes (32) overlap radially with the block (27) but do not axially overlap the block (27). Each of the tubes (32) may extend elongated along the tube axis. The tube axes can be arranged parallel to axis AA. Each tube axis can be arranged parallel to another tube axis.

The tubes (32) extend through aligned bores through the block (27). Each of the series of aligned bores may be considered to form a tube passageway through which the tubes (32) extend. The material forming the block (27) extends radially inwardly and radially outwardly from the plurality of tubes (32). In this way, the tubes (32) are disposed radially within the thermally conductive material of the core (26) and radially outwardly of the thermally conductive material of the core (26).

One or more heaters (34) extend within the core (26). The heaters (34) are electrically powered. For example, the heaters (34) may be resistive heaters, among other options. In the illustrated example, the heaters (34) extend partially axially through the core (26), but not completely axially through the core (26). However, it is to be understood that not all examples are so limited. In the illustrated example, the heaters (34) extend through aligned bores of the block (27). Each of the series of aligned bores may be considered to form a heater passage (44) through which the heaters (34) extend. While FIG. 1B illustrates one heater (34), it is to be understood that the fluid heater (10) may include one or more heaters (34) within the core (26). For example, the fluid heater (10) may include one, two, three, or more heaters (34). In the illustrated example, one or more, at most all, of the heaters (34) extend parallel to the axis AA. The heaters (34) may be evenly arranged around the axis AA. The heaters (34) may be evenly spaced from the axis AA. For example, an array of three heaters (34) may be spaced 120 degrees apart from each other around the axis AA. In the illustrated example, the heaters (34) extend within each block (27) of the core (26) to directly heat each block (27).

A sensor (36) extends within the core (26). The sensor (36) may be a thermal sensor that responds to temperature changes. For example, the sensor (36) may be configured to generate data regarding temperature. As illustrated in this example, the sensor (36) may extend within only one block (27). In the illustrated example, the sensor (36) is disposed in the end block (27b). However, in other examples, more than one sensor (36) may extend through more than one block (27). The sensor (36) is disposed in a sensor bore (56) formed within the end block (27b). The sensor bore (56) does not extend completely axially through the end block (27b) and, in the illustrated example, is not formed in any other block (27) other than the end block (27b).

The sensor (36) can output a signal received by a controller (not shown) to indicate a temperature. In the illustrated example, the sensor (36) includes a sensor (36a) configured as a power modulator (PM) sensor, a sensor (36b) configured as an over-temperature (OT) sensor, and a sensor (36c) configured as an over-temperature (OT) snap switch. The sensor (36a) can measure a temperature and provide this information to a system controller. The system controller can regulate power supplied to the heater (34) based on the data generated by the sensor (36a). The sensor (36b) is configured to generate temperature information regarding a temperature exceeding a preset limit and can be configured to initiate a shutdown process when the temperature threshold is exceeded. The sensor (36c) is configured to shut down the heater (34) upon an over-temperature condition event indicated by the sensor (36b).

The controller is configured to control the supply of electrical energy to the heater (34) to generate heat by supplying power to the heater (34). The controller may have a variable set point, whereby when it detects a temperature below the set point, the controller supplies more power to the heater (34) to increase the temperature within the core (26), and when it detects a temperature above the set point, the energy supplied to the heater (34) is reduced or cut off to decrease the temperature of the core (26). In some cases, multiple set points may be used for multiple different sensors (36) to take different actions depending on which set point associated with which sensor (36) is crossed (e.g., a first upper set point where the PM sensor (36a) causes a power reduction to decrease the temperature, a first lower set point where the PM sensor (36a) causes a power increase to increase the temperature, and a second upper set point where the OT sensor (36b) is greater than the first upper set point where it causes the fluid heater (10) to be cut off).

The blocks (27) may be similarly configured to facilitate assembly of the fluid heater (10) and to provide a modular configuration that can be assembled together to form fluid heaters (34) having different axial lengths. In the illustrated example, the end blocks (27a, 27b) positioned at the axial ends of the core (26) are configured individually, while the various intermediate blocks (27c) are configured collectively. In the illustrated example, the end block (27a) is configured differently from the end block (27b) and the intermediate block (27c); the end block (27b) is configured differently from the intermediate block (27c); and each intermediate block (27c) is configured identically to the other intermediate blocks (27c). The tube passages (42) are formed by tube bores that extend axially fully through each block (27), such that the tubes (32) extend axially fully through the core (26).

The end block (27a) includes a heater bore that extends completely through the end block (27a). The end block (27b) includes a heater bore that extends only partially axially through the end block (27b). The heater bore of the end block (27b) includes a closed end such that the heater (34) does not extend completely axially through the end block (27b). One end of the heater bore through the end block (27b) is closed. The end block (27b) further includes a sensor bore (56) for various sensors (36) of the fluid heater (10). The end block (27b) is open to the heater (34) on a first axial side of the end block (27b) and closed to the heater (34) on a second axial side of the end block (27b). The end block (27b) is open to the sensor (36) on the second axial side of the end block (27b) and closed to the sensor (36) on the first axial side of the end block (27b).

The intermediate block (27c) bridges the axial gap between the end blocks (27a, 27b). It is understood that various examples may include an end block (27a) adjacent to and abutting the end block (27b) (providing a fluid heater (10) having a minimum axial length). The heater bore extends axially completely through each intermediate block (27c).

A manifold assembly (24) is positioned at the first axial end and the second axial end of the fluid heater (10). The manifold assembly (24) is configured to receive process fluid entering through a first port of the fluid ports (18a, 18b) and route the process fluid to a second port of the fluid ports (18a, 18b) that outputs the process fluid. Each manifold assembly (24) is connected to a plurality of tubes (32). The manifold assembly (24) is fluidly connected to the tubes (32) to provide process fluid to or receive process fluid from the tubes (32). The tubes (32) can extend into the manifold assembly (24) and be in direct contact with the manifold assembly (24). The plurality of tubes (32) are connected to both manifold assemblies (24). The upstream manifold assembly (24) receives process fluid from fluid ports (18a, 18b) and provides process fluid to tubes (32). The downstream manifold assembly (24) receives process fluid from tubes (32) and provides process fluid to other fluid ports (18a, 18b).

One of the manifold assemblies (24) is positioned at each axial end of the core (26). A pair of manifold assemblies (24) secure opposite ends of the core (26). In the illustrated example, a pair of manifold assemblies (24) axially secure an axial stack of blocks (27). The manifold assemblies (24) are positioned within the heater housing (12). The manifold assemblies (24) are positioned axially directly between the end caps (14a, 14b). In the illustrated example, the core (26) is positioned axially between the manifold assemblies (24). A sensor (36) is positioned between the pair of manifold assemblies (24). In the illustrated example, the sensor (36) radially overlaps the core (26). The sensor (36) does not radially overlap the manifold assemblies (24). The heater (34) is positioned between the manifold assemblies (24). In the illustrated example, the heater (34) radially overlaps the core (26). The heater (34) does not radially overlap the manifold assemblies (24).

In the illustrated example, the manifold assembly (24) is formed as a ring extending about the axis AA. In the illustrated example, each manifold assembly (24) is coaxial with the axis AA, and a pair of manifold assemblies (24) are arranged coaxially with the axis AA. It is to be understood, however, that not all examples are so limited. In the illustrated example, the manifold assembly (24) is formed as an annular ring extending about the axis AA. In the illustrated example, no portion of the manifold assembly (24) is positioned on the axis AA so as to axially overlap the axis AA, but it is to be understood that not all examples are so limited.

Each manifold assembly (24) defines a flow chamber (46) that routes process fluid between the fluid ports (18a, 18b) and the tubes (32) associated with that manifold assembly (24). In the illustrated example, the flow chamber (46) extends annularly about axis AA. The flow chamber (46) does not axially overlap axis AA, and thus axis AA does not extend through the wetted flow chamber (46). The flow chamber (46) is disposed about axis AA, and in some examples may be coaxially disposed with axis AA. The flow chamber (46) may be an annular chamber in which fluid flows entirely about axis AA.

Each of the manifold assemblies (24) includes a port opening (48) facing axially outwardly for fluid communication with the fluid ports (18a, 18b). Fittings (38a, 38b) can extend into the port openings (48) to interface with the manifold assembly (24). The manifold assembly (24) includes a single fluid path (facing axially outwardly) in fluid communication with the fluid ports (18a, 18b) and multiple fluid paths (facing axially inwardly) in fluid communication with the tubes (32). The flow chamber (46) can receive a single input and provide multiple outputs, or can receive multiple inputs and provide a single output.

While the fluid heater (10) is operating, and assuming for illustrative purposes that the fluid port (18a) is an inlet and the fluid port (18b) is an outlet, process fluid enters the fluid heater (10) through the fluid port (18a). The process fluid flows through the port opening (48) of the upstream manifold assembly (24) into a flow chamber (46) of the upstream manifold assembly (24) that borders the fluid port (18a). The process fluid flows into the tubes (32) within the flow chamber (46). A single inlet flow entering the flow chamber (46) of the upstream manifold assembly (24) is split into a plurality of outlet flows from the flow chambers (46) of the upstream manifold assembly (24). The upstream manifold assembly (24) splits the inlet flow into a greater number of outlet flows than the number of inlet flows. The outlet flows are provided to the tubes (32). The upstream manifold assembly (24) may be considered to form a flow divider.

Process fluid flows through the tube (32) into the downstream manifold assembly (24). The process fluid enters the flow chamber (46) of the downstream manifold assembly (24). The process fluid flows within the flow chamber (46) from the port opening (48) of the downstream manifold assembly (24) to the fluid port (18b) that interfaces with the downstream manifold assembly (24). The process fluid exits from the fluid heater (10) through the fluid port (18b). The multiple inlet flows entering the flow chamber (46) of the downstream manifold assembly (24) are combined into a single outlet flow that exits the flow chamber (46) of the downstream manifold assembly (24). The downstream manifold assembly (24) combines multiple inlet flows into a smaller number of outlet flows than the number of inlet flows. In the illustrated example, the downstream manifold assembly (24) integrates multiple inlet flows into a single outlet flow provided to the fluid port (18b). The downstream manifold assembly (24) may be considered to form a flow integrater.

In the exemplary embodiment described above, the fluid port (18a) forms a process fluid inlet of the fluid heater (10), and the fluid port (18b) forms a process fluid outlet of the fluid heater (10). In the illustrated example, the fluid port (18a) is positioned vertically below the fluid port (18b). In some examples, the fluid port (18a) may be positioned at a bottom dead center position of the end cap (14a), and the fluid port (18b) may be positioned at a top dead center position of the end cap (14b). When the process fluid is filled into the fluid heater (10) at a position vertically lower than the process fluid exiting the fluid heater (10), degassing of the fluid heater (10) is promoted during the initial flow of the process fluid. The process fluid is filled vertically upward to drive out any gases that may be in the fluid path when the manifold assembly (24) and the tubes (32) are filled with the process fluid. In some examples, the fluid port (18a) may be positioned at the bottom dead center of the end cap (14a), and the fluid port (18b) may be positioned at the top dead center of the end cap (14b). However, it will be appreciated that the flow may be reversed so that the inlet and outlet are reversed from the flow just described. For example, the fluid port (18b) may form the inlet, and the fluid port (18b) may form the outlet.

The two manifold assemblies (24) can be identical or at least similar to each other as described, except that one is upstream of the other and splits the process fluid flow into multiple channels while the other combines the process fluid flow into a single channel. In operation, one of the manifold assemblies (24) receives a single input flow and outputs multiple flows to the multiple channels, and the other of the manifold assemblies (24) receives multiple flows from the multiple channels and outputs a single output flow.

Each of the manifold assemblies (24) includes a central space (50). The central space (50) may be a gas-filled void, but in various embodiments, components may extend through the central space (50). For example, wiring for the heater (34) and/or the sensor (36) may extend through the central space (50) of each manifold assembly (24). In this manner, each manifold assembly (24) may be considered to define a wiring space. In the illustrated example, the wiring for the heater (34) extends through the central space (50) of the manifold assembly (24) connected to the end block (27a), and the wiring for the sensor (36) extends through the central space (50) of the manifold assembly (24) connected to the end block (27b).

The end blocks (27a, 27b) at the ends of the axial stack may include recesses (52). Wires may be routed through the recesses (52) to be connected to the heaters (34) and/or sensors (36). The recesses (52) may be considered to form a wiring space. The recesses (52) extend axially within the body portions of the end blocks (27a, 27b) such that the ends of the sensors (36) and heaters (34) are recessed from the end faces of the end blocks (27a, 27b). This configuration provides an axially compact fluid heater (10), reducing the space required for installation and operation and reducing material costs. As illustrated, the heater (34) is accessible only through a first of the recesses (52) (formed by the end block (27a)), while the sensor (36) is accessible only through a second of the recesses (52) (formed by the end block (27b)) at the opposite end of the core (26) from the first recess (52). Making the heater (34) accessible from one axial end and the sensor (36) accessible from the other axial end reduces electromagnetic interference that may affect the sensor (36), thereby providing more accurate data generated by the sensor (36) and more efficient operation of the fluid heater (10).

In some examples, a potting material (e.g., epoxy) may be placed within the recess (52) to secure the wiring or other electrical components. Embedding the electrical components within the potting material provides electrical insulation and protects the electrical components from short circuits, dust, moisture, etc.

In the illustrated example, the blocks (27) include one or more mating features (54). The mating features (54) facilitate securing the plurality of blocks (27) to one another. The mating features (54) may also perform a sealing function to seal potential leaks penetrating radially inwardly from the plurality of tubes (32) toward the heater (34) and/or the sensor (36). The mating features (54) may be formed as alternating protrusions and recesses. The recesses of one block (27) are configured to receive protrusions from an adjacent block (27). In some examples, each block (27) may include one or more recesses at one axial end and/or one or more protrusions at the other axial end for mating with the adjacent block (27). The one or more recesses and the mating protrusions may extend partially or completely around the axis AA. The one or more recesses may be formed as an annular recess, one or more arcuate recesses, etc. The one or more protrusions may be formed as an annular protrusion, one or more arched protrusions, etc.

In the illustrated example, the middle block (27c) includes a mating portion (54) formed at each of the two axial ends of the middle block (27c). The end blocks (27a, 27b) include one mating portion (54) because they are adjacent to only one other block (27). The mating portions (54) of the end blocks (27a, 27b) are oriented axially inwardly toward the middle block (27c) and abut the mating portions (54) of the middle block (27c). In the illustrated example, each of the protruding mating portions (54) is oriented in a first direction along the axis AA, and each of the concave mating portions (54) is oriented in a second direction opposite to the axis AA.

The heater (34) is positioned radially within the plurality of tubes (32). In this manner, heat flows radially outwardly from the heater (34) into the plurality of tubes (32). The heater (34) is not positioned radially outwardly of the plurality of tubes (32). In the illustrated example, no heat generating elements are positioned radially outwardly of the tubes (32). In the illustrated example, most or essentially all of the heat generated radially inwardly of the plurality of tubes (32) should be conducted radially outwardly of the plurality of tubes (32), resulting in high thermal efficiency. If the plurality of heaters (34) were positioned radially outwardly of the plurality of tubes (32), only a portion of the heat, perhaps half or less, would be conducted radially inwardly into the plurality of tubes (32), while the heat conducted radially outwardly in that configuration would not be able to reach the plurality of tubes (32) and thus would not be able to heat the process fluid, resulting in poor thermal efficiency. This result of having the heater (34) radially inward of the tube (32) allows the heater (34) to run at a lower temperature setting due to the higher heat transfer to the tube (32), which places less stress on the heater (34) and surrounding components while reducing the power consumption required to achieve the desired heating of the process fluid. Requiring less energy to be input to the heater (34) to achieve the same heat transfer also reduces the heat dissipated from the fluid heater (10), providing a safer operating environment and reducing the risk of combustion.

During operation, power is supplied to the heater (34). The heater (34) generates heat, which is conducted through the heat conductive block (27). A tube (32) extends through the heat conductive block (27) and the heat is transferred to the process fluid through the tube (32). The process fluid is heated as it flows through the tube (32), and thus the process fluid exiting the fluid heater (10) has an increased temperature compared to the process fluid entering the fluid heater (10).

The wetted portion of the fluid heater (10) is the portion directly exposed to contact with the process fluid. The wetted portion includes the manifold assembly (24) and the tube (32). The block (27) does not form the wetted portion of the fluid heater (10), and thus the thermally conductive material of the block (27) is not directly exposed to the process fluid. The process fluid contacts the material of the manifold assembly (24) and the material of the tube (32). In the illustrated example, the wetted portion of the fluid heater (10) is formed by a polymer such as PFA.

The fluid heater (10) provides significant advantages. The tubes (32) are positioned radially between the heater (34) and the exterior of the fluid heater (10), such that heat radially dissipated from the heater (34) flows into the tubes (32) before flowing outwardly from the fluid heater (10) and dissipating into the atmosphere. The tubes (32) positioned radially outwardly from the heater (34) provide efficient heating, which reduces power consumption and reduces the power level required to achieve the desired temperature. The blocks (27) are stacked along the axis AA. One or more intermediate blocks (27c) may be positioned between the end blocks (27a, 27b) to increase the axial length of the fluid heater (10). A fluid heater (34) with a longer axial length has a greater heating capacity due to the increased axial length of the tubes (32) relative to the longer axial length of the core (26), resulting in a longer residence time of the process fluid within the tubes (32).

FIG. 2 is a cross-sectional view of a fluid routing and heating portion of a fluid heater (10). A manifold assembly (24), a core (26), and a tube (32) of the fluid heater (10) are illustrated. The core (26) includes a block (27). The block (27) is formed as an end block (27a, 27b) and a middle block (27c). Each manifold assembly (24) includes an inner manifold (58) and an outer manifold (60).

The core (26) forms the central portion of the fluid routing and heating portion of the fluid heater (10). The block (27) is formed as a thermally conductive component that is axially laminated to form the core (26). The block (27) does not form a wetted portion of the fluid heater (10). While the process fluid flows through the block (27) while flowing within the tube (32), the process fluid does not contact the block (27).

A heater bore (84) is formed through each block (27) of the core (26). The heater bores (84) passing through each block (27) are axially aligned with respect to one another to form a heater passage (44) through which a heater (34) is disposed. The heater (34) extends into each block (27) of the core (26) to heat the thermally conductive material of the block (27).

The heater bore (84) is configured to receive and contain the heater (34). In the illustrated example, the end block (27a) and each of the intermediate blocks (27c) include a heater bore (84) that extends axially completely through the intermediate block (27c) and the end block (27a). The heater bore (84) of the end block (27b) does not extend axially completely through the end block (27b). A face portion of the end block (27b) that is oriented outwardly away from the intermediate block (27c) and axially overlaps the heater passage (44) is closed relative to the heater passage (44). The material forming the end block (27b) axially overlaps the heater passage (44).

In the illustrated example, the end block (27a) includes a first number of bores extending axially fully through the end block (27a) (formed by the heater bores (84), the tube bores (84) and the fastener bores (86)), and the end block (27b) includes a second number of bores extending axially fully through the end block (27b) (formed by the tube bores (84) and the fastener bores (86)). The first number of bores is greater than the second number of bores. In the illustrated example, the intermediate block (27c) includes a third number of bores extending axially fully through the intermediate block (27c) (formed by the heater bores (84), the tube bores (84) and the fastener bores (86)). The first number of bores can be equal to the third number of bores. The third number of bores can be greater than the second number of bores. The end block (27b) has fewer holes extending axially completely through the end block (27b) as compared to the end block (27a) and the intermediate block (27c), but in the illustrated example, the end block (27b) has a greater number of holes extending into the end block (27b) than the number of holes extending into the end block (27a) or the intermediate block (27c), because the sensor bores (56) are formed in the end block (27b) but not in the end block (27a) or the intermediate block (27c).

In the illustrated example, a seal (62) is positioned at the interface between each of the blocks (27). The seal (62) is positioned at the joint between adjacent blocks (27). The seal (62) is positioned radially between the tube (32) that conveys the process fluid through the core (26) and the electrical components of the fluid heater (10) (e.g., the heater (34) and the sensor (36)). The seal (62) is positioned radially so as to inhibit the flow of any process fluid that might leak into the electrical components. The seal (62) inhibits the flow of potentially flammable process fluid that might leak radially inward toward the heater (34), which may be at a temperature higher than the location of the tube (32) and which may cause combustion of the process fluid. The seal (62) may be formed as a crush seal, among other options. In the illustrated example, the sealing portion (62) is positioned in the matching portion (54) between adjacent blocks (27). For example, the sealing portion (62) may be positioned in the matching portion (54) formed as a recess and may be brought into contact by the matching portion (54) formed as a protrusion.

In the illustrated example, each manifold assembly (24) is formed of two parts. In this example, each manifold assembly (24) is formed of an inner manifold (58) and an outer manifold (60). The relative orientation of the inner and outer is with respect to the core (26). The inner manifold (58) is positioned axially inwardly closer to the core (26) than the outer manifold (60). In the illustrated example, the inner manifold (58) and the outer manifold (60) are each annular. Each manifold assembly (24) is formed by axially assembling the outer manifold (60) to the inner manifold (58). The inner manifold (58) and the outer manifold (60) are joined at a fluid-tight interface. In the illustrated example, the inner manifold (58) may be considered to form the inner ring, and the outer manifold (60) may be considered to form the outer ring.

The two manifold assemblies (24) may be identical to one another, but may be flipped for mounting to the core (26) such that both inner manifolds (58) are oriented axially inwardly toward the core (26). In some examples, the inlet manifold assembly (24) may be positioned as a mirror image of the outlet manifold assembly (24). In some examples, the inlet manifold assembly (24) may be positioned as a mirror image of the outlet manifold assembly (24) rotated about axis AA. In the example shown, the two manifold assemblies (24) are mirror images, but one manifold is rotated 180 degrees with respect to the other manifold assembly (24).

A flow chamber (46) is formed between the inner manifold (58) and the outer manifold (60). The flow chamber (46) divides or unifies the flowing process fluid between a single port opening (48) on the outer manifold (60) that is in fluid connection with one of the fluid ports (18a, 18b) and a plurality of fluid openings (64) on the inner manifold (58), each of which is connected to a plurality of tubes (32). Although the outer manifold (60) is shown as including a single port opening (48), in various other embodiments the outer manifold (60) may include a plurality of port openings (48), but with the number of port openings (48) on the outer manifold (60) being less than the number of fluid openings (64) on the inner manifold (58). The port openings (48) and the fluid openings (64) may be considered to form the flow openings of the manifold assembly (24).

Tubes (32) extend between the flow chambers (46) of the manifold assembly (24) to fluidly connect the flow chambers. Each block (27) includes a plurality of tube bores (82) extending axially within the block (27). The tube bores (82) extend axially completely through each block (27). The blocks (27) are aligned about the axis AA such that the tube bores (82) passing through each block (27) align with the tube bores (82) passing through the other blocks (27) to form tube passages (42). The tube passages (42) are open at opposite axial ends of the core (26). The tubes (32) extend through the tube passages (42) to connect with the internal components (58) of the manifold assembly (24). Note that since a plurality of tubes (32) extend through the core (26), the process fluid does not contact the blocks (27). The material of the tube (32) is positioned between the block (27) and the process fluid to isolate the process fluid from the material of the block (27). In this manner, a high purity tube (32), such as a tube (32) formed of PFA, can be used in contact with the process fluid, and the material of the block (27) can be selected to have a heat capacity and conductivity without concern for a decrease in the purity of the process fluid due to contact with the material of the block (27).

In some examples, the block (27) can be surface treated to add a suppression layer to the material of the block (27). The suppression layer is configured to suppress ions of the metal material forming the block (27) from being transferred to the process fluid flowing within the tube (32). For example, the block (27) can be treated by adding a layer of a silicon-based material to the block (27). The suppression layer is disposed within at least the tube bores (82) of each block (27). In this way, the suppression layer is disposed between the tubes (32) and the material of the block (27). The suppression layer can be formed on any surface of the block (27). For example, the suppression layer can be formed on the surfaces of the tube bores (82), the surfaces of the heater bores (84), the axial surfaces of the block (27), the radially outer surfaces of the block (27), the sensor bores (56), etc. The suppression layer can be formed as a coating. The suppression layer can be applied to the block (27) by a chemical vapor deposition process.

Process fluid enters the upstream manifold assembly (24) through a port opening (48) of the upstream manifold assembly (24). The process fluid flows through a flow chamber (46) of the upstream manifold assembly (24) and enters directly into a tube (32) from the upstream manifold assembly (24). The process fluid flows through the tube (32) and exits directly from the tube (32) into a flow chamber (46) of the downstream manifold assembly (24). The process fluid exits the downstream manifold assembly (24) through a port opening (48) of the downstream manifold assembly (24).

FIG. 3 is an exploded view of a fluid heater (10). FIG. 4 is an exploded view of the fluid handling and heating portion of the fluid heater (10). FIGS. 3 and 4 are described together. The fluid heater (10) includes a heater housing (12); end caps (14a, 14b); feet (16); fluid ports (18a, 18b); purge ports (20); electrical ports (22); manifold assembly (24); core (26); insulator (28); clamp (30); tube (32); heater (34); sensor (36); and core connector (66). The core (26) includes a block (27).

The heater housing (12) surrounds the other components of the fluid heater (10). End caps (14a, 14b) are disposed at the axial ends of the heater housing (12). The end caps (14a, 14b) can be connected to the heater housing (12) by a plurality of fasteners (68). The feet (16) support the fluid heater (10) on a surface. In the illustrated example, the feet (16) are connected to the end caps (14a, 14b) by fasteners (68), etc.

An insulator (28) is disposed around the core (26). The insulator (28) is configured to thermally insulate the core (26) and retain heat within the core (26) to more efficiently heat the process fluid flowing through the core (26). As illustrated, the insulator (28) is formed of a plurality of layers laminated radially outwardly from the core (26). In the illustrated example, the insulator (28) is formed of three sections, with the two end sections of the insulator (28a) each having at least one layer that radially and axially overlaps the core (26), and a central section of the insulator (28b) surrounding the core (26) so as to radially overlap the core (26). In the illustrated example, the central section of the insulator (28b) does not axially overlap the core (26).

A clamp (30) engages the exterior of the core (26). The clamp (30) is configured to abut a block (27) (e.g., an end block (27a, 27b)) and axially retain the core (26) within the heater housing (12). Each clamp (30) is axially positioned between a center section of the insulator (28b) and one of the end sections of the insulator (28a). In the illustrated example, the clamp (30) is positioned to axially overlap one or more layers of the insulator (28).

A core (26) is disposed within a heater housing (12). The core (26) is disposed radially inwardly of the heater housing (12) and the insulator (28). The core (26) is formed by an axial stack of blocks (27). A heater (34) is disposed within the core (26). The heater (34) extends within the block (27). A sensor (36) is supported by the core (26). One or more of the sensors (36) may extend within the core (26), for example, within one or more of the blocks (27).

The blocks (27) are secured together by core connectors (66). The core connectors (66) extend through each block (27) of the cores (26). The core connectors (66) are configured to axially secure the stack of blocks (27) together. The core connectors (66) may be considered to form an axial clamp. In the illustrated example, the core connectors (66) include a rod (70) and a stud (72). The rod (70) extends axially through the blocks (27). The studs (72) are configured to be mounted to respective axial ends of the rods (70). In some examples, the rods (70) may include threaded ends that are threadably connected to the threads of the studs (72) to secure the axial stack of blocks (27) together.

A manifold assembly (24) is mounted at an axial end of the core (26). The illustrated example includes a first manifold assembly (24) at one axial end of the core (26) and a second manifold assembly (24) at a second axial end of the core (26). An inner manifold (58) of the manifold assembly (24) is disposed adjacent the core (26). An outer manifold (60) of the manifold assembly (24) is connected to the inner manifold (58). Each fluid port (18a, 18b) interfaces with an outer manifold (60) of the manifold assembly (24) and is in fluid communication with that manifold assembly (24). The manifold assembly (24), including the inner manifold (58) and the outer manifold (60), may be formed of a polymer such as those previously mentioned. As mentioned above, this allows the process fluid to avoid contact with the metal, thereby maintaining its purity. It should be noted that the process fluid can flow completely through the fluid heater (10) without contacting the metal components. Contact between the solvent and the metal and various other types of materials should be avoided to avoid the solvent reacting with such materials to produce impurities.

A leak sensor (37) is positioned proximate to the fluid port (18a). A sensor housing (39) accommodates a sensing component of the leak sensor (37). For example, the sensor housing (39) can accommodate a fiber optic sensing component of the leak sensor (37). The sensor housing (39) can protect the optical diffusing tip of the fiber optic sensor from contacting the insulator (28) and position the sensing component to detect a leak of the process fluid.

The tubes (32) extend axially through the core (26). Each tube (32) can have an axial length that is longer than the axial length of the core (26). The longer tubes (32) can protrude axially from each end of the core (26) to interface with an internal manifold (58) of each manifold assembly (24). The tubes (32) interface with the manifold assembly (24) so that the process fluid does not directly contact the block (27). The process fluid flows through the core (26) but does not directly contact the core (26). Instead, the process fluid flows within and contacts the tubes (32) that extend through the core within the core (26).

FIG. 5 is an enlarged cross-sectional isometric view illustrating a portion of a fluid heater (10). A manifold assembly (24), a core (26), a fluid port (18b), a heater (34), a sensor (36), a clamp (30), and an insulator (28) are illustrated. The manifold assembly (24) includes an inner manifold (58) and an outer manifold (60). An end block (27b) and a portion of a middle block (27c) of the core (26) are illustrated.

A manifold assembly (24) is mounted to the core (26). In the illustrated example, an inner manifold (58) abuts the core (26). A fluid port (18a) is fluidly connected to the manifold assembly (24). In the illustrated example, an outer manifold (60) abuts the fluid port (18a). The outer manifold (60) is connected to the inner manifold (58) to form the manifold assembly (24).

A flow chamber (46) is formed within the manifold assembly (24) between an inner manifold (58) and an outer manifold (60). The inner manifold (58) and the outer manifold (60) are connected together to define the flow chamber (46). In the illustrated example, the inner manifold (58) and the outer manifold (60) are abutted at an inner connection (74) and an outer connection (76). The inner connection (74) is formed by a tongue-in-groove interface. In the illustrated example, the outer manifold (60) includes a protrusion extending into a slot formed in the inner manifold (58). Both the protrusion and the slot can extend completely annularly around the axis AA. The inner manifold (58) and the outer manifold (60) can be mechanically fused at the inner connection (74). For example, the inner manifold (58) and the outer manifold (60) can each be formed of the same or similar fluid transfer material as the tube (32), for example, a polymer such as PFA. For example, at least the fluid contacting portions of the inner manifold (58) and the outer manifold (60) can be formed of PFA, among other options. Mechanical fusion can be formed by melting together the materials of the inner manifold (58) and the outer manifold (60) at the inner connection (74). The outer connection (76) can be a mating interface. The inner manifold (58) and the outer manifold (60) can be mechanically fused at the outer connection (76), for example, by welding, among other fastening options.

A plurality of fluid holes (64) are formed through the internal manifold (58). Each fluid hole (64) is associated with a single tube (32) of the plurality of tubes (32). The fluid holes (64) provide a passage through which process fluid can enter or exit the tube (32). The fluid holes (64) provide a passage through which the tube (32) extends internally.

A recess (52) is formed in the end block (27b). The recess (52) extends to an axial end face of the end block (27b). A sensor bore (56) is open to the recess (52). As illustrated, a potting material (78) is disposed within the recess (52) to help secure and seal an electrical connection with a sensor (36) or heater (34) at the opposite end of the fluid heater (10).

Fig. 5 illustrates an interface between a short block (27b) and a middle block (27c). The mating portion (54b) on the short block (27b) is formed as a protrusion. The mating portion (54a) on the middle block (27c) is formed as a recess. The protrusion forming the mating portion (54b) of the short block (27b) extends into the recess (52) forming the mating portion (54a) of the middle block (27c) to position and align the blocks (27) with respect to each other.

In the illustrated example, the end block (27b) includes a flange (80) that protrudes from an outer surface of the end block (27b). The flange (80) extends radially outwardly away from the axis AA. The flange (80) is configured to interface with the clamp (30) and provide a location where the clamp (30) engages the core (26). The flange (80) may be formed as an annular ring that extends completely around the outer perimeter of the end block (27a). However, it is understood that the flange (80) may be formed in any desired configuration to interface with the clamp (30). For example, the flange (80) may be formed as a series of individual protrusions, a single protrusion, an array of arched protrusions, etc. The clamp (30) engages the flange (80) with the heater housing (12) and axially positions the core (26) within the heater housing (12).

A fastener bore (86) extends through the blocks (27). The fastener bore (86) passing through each block (27) is aligned with a fastener bore (86) of another one of the blocks (27) to form a fastener passage extending through the core (26). The rod (70) of the core connector (66) extends through the aligned fastener bore (86) to axially clamp the blocks (27) together to form the core (26).

Fig. 6a is a first isometric projection of the inner manifold (58). Fig. 6b is a second isometric projection of the inner manifold (58). Figs. 6a and 6b are described together. The inner manifold (58) includes a fluid hole (64), a ring body (88), an inner surface (90), an outer surface (92), an inner step (94a), an outer step (96a), a protrusion (98), an inner disk (100), and a disk hole (102).

An inner manifold (58) is configured to form a portion of a manifold assembly (24). The inner manifold (58) at least partially defines a flow chamber (46). The inner manifold (58) can be abutted with a block (27) (e.g., one of the end blocks (27a, 27b)) to mount the manifold assembly (24) to the core (26).

The ring body (88) forms the body of the inner manifold (58). The ring body (88) is configured to extend around the axis AA when the inner manifold (58) is assembled to the fluid heater (10). An inner disc (100) is radially disposed within the ring body (88). The inner disc (100) is configured to be removed from the inner manifold (58) prior to the inner manifold (58) being assembled to the fluid heater (10). A disc hole (102) extends through the inner disc (100). The disc hole (102) provides a location for aligning the inner manifold (58) during manufacturing. The inner disc (100) is removable to facilitate installation of a heater (34) and/or a sensor (36) through the inner manifold (58) mounting hole (104) of the inner manifold (58). The mounting hole (104) is a central hole passing through the inner manifold (58) formed by removing the inner disk (100). A heater (34) and/or a sensor (36) can be installed through the mounting hole (104) and wires of electrical components can pass through the mounting hole (104).

The ring body (88) is configured to interface with the outer manifold (60) to form a manifold assembly (24) and is configured to interface with a block (27) (e.g., end blocks (27a, 27b)) to mount the manifold assembly (24) to the core (26). The inner surface (90) forms an axial face of the inner manifold (58) oriented axially inwardly toward the core (26).

The receiving bore (106) extends to the inner surface (110). The receiving bore (106) is an opening through which a portion of the core connector (66) may extend inwardly while the manifold assembly (24) is mounted to the core (26). For example, the rod (70) and/or stud (72) of the core connector (66) may extend into the receiving bore (106) and be at least partially disposed within the receiving bore (106). In the illustrated example, the receiving bore (106) does not extend completely axially through the inner manifold (58).

The outer surface (92) forms an axial face of an inner manifold (58) oriented axially outwardly away from the core (26). The outer surface (92) is oriented axially toward the outer manifold (60). The outer surface (92) at least partially defines a flow chamber (46). The outer surface (92) is at least partially exposed to process fluid flowing within the flow chamber (46).

In the illustrated example, a protrusion (98) is formed on the outer surface (92). The protrusion (98) protrudes axially relative to the base surface to form the outer surface (92). The protrusion (98) protrudes axially away from the corresponding base surface. The protrusion (98) is configured to protrude into the flow chamber (46) relative to the corresponding base surface. In the illustrated example, a plurality of protrusions (98) are formed on the outer surface (92). In the illustrated example, the inner manifold (58) includes two arched protrusions (98) each partially curved about the axis AA. However, it is to be understood that the inner manifold (58) may include as many or as few protrusions (98) as desired, such as zero, one, two, three, four or more.

The fluid apertures (64) extend axially completely through the inner manifold (58). In the illustrated example, each fluid aperture (64) includes a first opening formed on the inner surface (90) and a second opening formed on the outer surface (92). In the illustrated example, each second opening is formed in a protrusion (98), such that each second opening is axially outwardly spaced from a base surface of the outer surface (92).

Each fluid aperture (64) is configured to receive a single tube (32) extending through the core (26). The tube (32) can protrude completely axially through the fluid aperture (64). In some examples, the tube (32) protrudes into a second opening formed on the outer surface (92).

As illustrated, a plurality of fluid holes (64) are arranged around the axis AA. The arrangement is circular about the axis, but in this embodiment, a complete circle is not formed from the array of tubes (32), but rather a plurality of semicircular portions are formed from the array.

In the illustrated example, the fluid holes (64) and tubes (32) may be considered to be arranged in a number of sub-arrays. In the illustrated example, the fluid holes (64), and thus the tubes (32), are arranged in first and second circumferential sub-arrays that are arranged in an arcuate manner about the axis AA. In this example, each circumferential sub-array of the fluid holes (64) is associated with a single protrusion (98). Each of the circumferential sub-arrays extends partially about the axis AA. In the illustrated example, the fluid holes (64), and thus the tubes (32), are arranged in first and second radial sub-arrays. The radial sub-arrays are arranged at different radial distances from the axis AA. In the illustrated example, the fluid holes (64), and thus the tubes (32), of the first radial sub-array are radially offset from the fluid holes (64), and thus the tubes (32), of the second radial sub-array. Stacking the fluid holes (64) and tubes (32) in a radial array provides a compact configuration of the fluid heater (10) and efficient heating of the process fluid.

The tube (32) may be affixed to the internal manifold (58). The tube (32) may be affixed to the internal manifold (58) to provide a single assembly that prevents any process fluid leakage between the tube (32) and the internal manifold (58). For example, the tube (32) may be fused to the internal manifold (58). For example, the tube (32) may be fused to the internal manifold (58) by melting the PFA material of the tube (32) at the interface and melting the PFA material of the internal manifold (58), thereby fusing the tube (32) and the internal manifold (58) together.

The inner step (94a) is formed on the outer surface (92) of the inner manifold (58). The inner step (94a) is configured to be in contact with the inner step (94b) of the outer manifold (60) when the inner manifold (58) and the outer manifold (60) are mounted together. The inner step (94a) is radially arranged between the axis AA and the fluid hole (64). In the illustrated example, the inner step (94a) is formed as an annular groove. In the illustrated example, the inner step (94a) extends completely circumferentially around the axis AA. The inner step (94a) extends from the outer surface (92) toward the inner surface (90). The inner step (94a) does not extend completely axially through the inner manifold (58).

The outer step (96a) is formed on the outer surface (92) of the inner manifold (58). The outer step (96a) is configured to be in contact with the outer step (96b) of the outer manifold (60) when the inner manifold (58) and the outer manifold (60) are mounted together. The outer step (96a) is radially arranged between the fluid hole (64) and the outer edge (108) of the inner manifold (58). The outer step (96a) is arranged radially outwardly of the inner step (94a). The fluid hole (64) is radially arranged between the inner step (94a) and the outer step (96a). The outer step (96a) is formed as an annular surface oriented axially away from the core (26). In the illustrated example, the outer step (96a) extends completely circumferentially around the axis AA. In some examples, the outer step (96a) may be a planar surface disposed in a plane perpendicular to the axis AA.

Fig. 7a is an isometric projection of an outer manifold (60). Fig. 7b is a second isometric projection of the outer manifold (60). Figs. 7a and 7b are described together. The outer manifold (60) includes a port hole (48), an inner step (94b), an outer step (96b), an inner surface (110), an outer surface (112), a flow groove (114), and a central hole (116).

An outer manifold (60) is configured to interface with an inner manifold (58) to form a manifold assembly (24). An inner surface (110) of the outer manifold (60) is configured to be oriented axially inwardly toward the core (26). An outer surface of the outer manifold (60) is configured to be oriented axially outwardly away from the core (26).

The inner surface (110) is at least partially exposed to process fluid flowing through the manifold assembly (24). The inner surface (110) at least partially defines a flow chamber (46) through the manifold assembly (24). A flow groove (114) is formed on the inner surface (110). The flow groove (114) is oriented axially inwardly toward the core (26). The flow groove (114) is formed as an annular groove extending completely annularly about the axis AA. The flow groove (114) is open axially inwardly toward the core (26). In the illustrated example, the flow groove (114) is continuous, and thus the flow chamber (46) is a continuous chamber extending completely annularly about the axis AA. The flow groove (114) is oriented such that the base of the flow groove (114) is axially positioned further away from the inner manifold (58) than the inner connection (74) between the inner manifold (58) and the outer manifold (60), and such that the base of the flow groove (114) is axially positioned further away from the inner manifold (58) than the outer connection (76) between the inner manifold (58) and the outer manifold (60). In the illustrated example, the flow groove (114) is formed as a U-shaped groove, although it is understood that other configurations are possible. In some examples, the base of the flow groove (114) may be formed as a flat surface in a plane perpendicular to the axis AA.

A port hole (48) is formed through the outer manifold (60). The port hole (48) extends between the inner surface (110) and the outer surface (112). In the illustrated example, the port hole (48) is formed through the base of the flow groove (114). The port hole (48) provides a location for process fluid to enter the flow groove (114) (from the upstream manifold assembly (24)) or exit the flow groove (from the downstream manifold assembly (24)). The port hole (48) may include a double diameter within the port hole (48). The dual diameter allows the fittings (38a, 38b) of the fluid ports (18a, 18b) to extend with a larger diameter portion (extending from the outer surface (112) into the port opening (48)) to facilitate mating the fittings (38a, 38b) with the external manifold (60), while the smaller diameter portion (extending from the inner surface (110)) limits the distance that the fluid ports (18a, 18b) can extend into the port opening (48). In some examples, a seal may be positioned within the port opening (48) between the exterior of the fluid ports (18a, 18b) and a surface defining the port opening (48).

A central hole (116) is formed through the external manifold (60). The central hole (116) provides an opening that allows access to the heater (34) and/or sensor (36) for installation, replacement, maintenance, etc. The central hole (116) facilitates maintenance and assembly of the fluid heater (10). Electrical component wires may be extended through the central hole (116).

The inner step (94b) is formed on the inner surface (110) of the outer manifold (60). The inner step (94b) is configured to abut the inner step (94a) of the inner manifold (58) when the inner manifold (58) and the outer manifold (60) are mounted together. The inner step (94b) is radially arranged between the axis AA and the port hole (48). In the illustrated example, the inner step (94b) is formed as an annular protrusion. The inner step (94b) may be considered to form an axially extending flange. In the illustrated example, the inner step (94b) extends completely circumferentially around the axis AA. The inner step (94b) extends axially away from the inner surface (110). The inner step (94b) is configured to extend into a groove forming the inner step (94a) in the illustrated example. However, it is understood that the inner step portion (94b) may be formed as a groove extending into the inner surface (90), and the inner step portion (94a) may be formed as a protrusion configured to extend into the groove of the inner step portion (94b).

The outer step (96b) is formed on the inner surface (90) of the outer manifold (60). The outer step (96b) is configured to be in contact with the outer step (96a) of the inner manifold (58) when the inner manifold (58) and the outer manifold (60) are mounted together. The outer step (96b) is radially arranged between the port hole (48) and the outer edge (108b) of the outer manifold (60). The outer step (96b) is arranged radially outwardly of the inner step (94a). The port hole (48) is radially arranged between the inner step (94b) and the outer step (96b). The outer step (96b) is formed as an annular surface oriented axially toward the core (26). In the illustrated example, the outer step (96b) extends completely circumferentially around the axis AA. The outer step (96b) may be formed as a planar surface arranged in a plane perpendicular to the axis AA.

Fig. 8a is an isometric projection of the end block (27a). Fig. 8b is an isometric projection of the end block (27b). Figs. 8a and 8b are described together. The tube bore (82), the heater bore (84), the fastening bore (86), the block body (122), the block face (124a), and the block face (124b) of each end block (27a, 27b) are illustrated. The end block (27a) includes a mating portion (54a). The end block (27b) includes a mating portion (54b).

The end blocks (27a, 27b) are configured as the most axial blocks (27) of the core (26) of the fluid heater (10). The end blocks (27a, 27b) can be directly mated together to form a core (26) having a minimum length. An intermediate block (27c) can be mounted between the end blocks (27a, 27b) to form a core (26) having a longer axial length.

The block faces (124a) of the end blocks (27a, 27b) are configured to be oriented axially outward with respect to the core (26). The block faces (124a) of the end block (27a) are configured to be oriented away from the block faces (124a) of the end block (27b). Similarly, the block faces (124a) of the end block (27b) are configured to be oriented away from the block faces (124a) of the end block (27a). The block faces (124b) of the end blocks (27a, 27b) are configured to be oriented axially inward toward each other. In an example where the intermediate block (27c) is present, the block faces (124a) are oriented axially away from the intermediate block (27c). In an example where the intermediate block (27c) is not present, the block faces (124b) are oriented axially inward toward the intermediate block (27c).

The tube bores (82) extend axially completely through each of the end blocks (27a, 27b). The protrusions (118) extend axially outwardly from the block faces (124a). The tube bores (82) are formed by the protrusions (118) in the illustrated example. The end blocks (27a, 27b) may include the same number of protrusions (118) as the tube bores (82). The protrusions (118) are configured to interface with the inner manifold (58) when the manifold assembly (24) is mounted to the end blocks (27a, 27b). In the illustrated example, the protrusions (118) are configured to extend into the fluid apertures (64) of the inner manifold (58) and be at least partially disposed within the fluid apertures (64). The protrusion (118) extends through a hole in the inner surface (90) of the inner manifold (58) into the fluid aperture (64). The tube (32) protrudes out of the protrusion (118) and into the fluid aperture (64) to mate with the inner manifold (58). The protrusion (118) extending into the inner manifold (58) minimizes the length of the tube (32) that is not disposed within or supported by the material forming the block (27). The protrusion (118) may be formed as a cylindrical protrusion, among other options.

The heater bore (84) is formed within the end blocks (27a, 27b). In the illustrated example, the heater bore (84) of the end block (27b) does not extend axially completely through the end block (27b). In the illustrated example, the heater bore (84) of the end block (27a) extends axially completely through the end block (27a), and thus the heater (34) can pass completely through the heater bore (84) of the end block (27a), such that the heater (34) extends axially completely through the end block (27a). The heater bore (84) of the end block (27b) is closed such that the heater (34) terminates within the heater bore (84) of the end block (27b).

The fastener bores (86) extend axially fully through the end blocks (27a, 27b). The fastener bores (86) provide openings through which the core connectors (66) extend through the blocks (27) to axially clamp the blocks (27) together to form the core (26). In the illustrated example, each of the end blocks (27a, 27b) includes a plurality of fastener bores (86). In the illustrated example, the fastener bores (86) are spaced 180 degrees apart.

A flange (80) protrudes radially outward from the radially outer surface of the end blocks (27a, 27b). The flange (80) is configured to abut the clamp (30) to provide a position where the clamp (30) engages the core (26).

The intermediate block (27c) (FIGS. 2b to 5) may be configured similarly to the end blocks (27a, 27b) except that the first axial face of the intermediate block (27c) is configured as the block face (124b) of the end block (27a) (including the mating portion (54a)) and the second axial face of the intermediate block (27c) is configured as the block face (124b) of the end block (27b) (including the mating portion (54b)). Furthermore, in the illustrated example, the intermediate block (27c) does not include the flange (80). The first axial face of the intermediate block (27c) may abut the block face (124b) of the end block (27b) or the second axial face of an adjacent intermediate block (27c). The second axial face of the intermediate block (27c) can abut the block face (124b) of the end block (27a) or the first axial face of the adjacent intermediate block (27c). The heater bore (84) and the tube bore (82) of the intermediate block (27c) extend completely axially through the intermediate block (27c).

FIG. 9 is a cross-sectional isometric projection of a fluid heater (10') having a reduced length compared to the fluid heater (10). The fluid heater (10') is substantially similar to the fluid heater (10) except that the fluid heater (10') has a shorter axial length than the fluid heater (10) (best seen in FIGS. 1a, 1b, 3 and 4).

The core (26) of the fluid heater (10') is formed by end blocks (27a, 27b) that are mounted adjacent to each other and directly in contact with each other. The fluid heater (10') does not include an axially intermediate block (27c) between the end blocks (27a, 27b). The fluid heater (10') has a shorter axial length than the fluid heater (10), which reduces the residence time and heat transfer to the process fluid when heated by the fluid heater (10').

FIG. 10 is an isometric projection of a fluid heater (10") having an increased length compared to the fluid heater (10) and the fluid heater (10').

The core (26) of the fluid heater (10") is formed of end blocks (27a, 27b) having a plurality of intermediate blocks (27c) arranged therebetween. The fluid heater (10") includes a greater number of intermediate blocks (27c) than the fluid heater (10), thereby providing a fluid heater having an increased axial length. The fluid heater (10") has a longer axial length than the fluid heater (10), thereby increasing the residence time and heat transfer to the process fluid when heated by the fluid heater (10').

As best seen in FIGS. 1b, 9 and 10, the fluid heater (10), the fluid heater (10'), and the fluid heater (10") have similarly configured components to provide a fluid heater of any desired length by forming cores (26) having different axial lengths using the blocks (27). The intermediate blocks (27c) are similarly configured to allow any desired number of intermediate blocks (27c), i.e., zero, one, two, three, four or more, to be interposed between the end blocks (27a, 27b) to set the axial length of the core (26). Some examples include twelve or more intermediate blocks (27c). The axial length of the fluid heater can be varied by changing the axial length of the core (26) by adding or removing intermediate blocks (27c). In general, the longer the core (26), the greater the surface area along the plurality of tubes (32) for transferring heat to the process fluid, and the greater the The heater (34) that can be installed to generate more thermal energy to heat the fluid may be larger (e.g., longer). Accordingly, a longer core (26) may be associated with a greater heating capacity.

While the present invention has been described with reference to exemplary embodiments(s), it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, it is intended that the invention not be limited to the particular embodiments(s) disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims (82)

A fluid heater configured to increase the temperature of a process fluid,
A heater housing elongated along an axis between the first housing end and the second housing end;
A first manifold assembly disposed within the heater housing and in fluid communication with the fluid inlet of the fluid heater;
A second manifold assembly disposed within the heater housing and in fluid communication with the fluid outlet of the fluid heater;
A plurality of tubes extending between the first manifold assembly and the second manifold assembly within the heater housing and fluidly connecting the first manifold assembly and the second manifold assembly; and
A fluid heater comprising at least one heater positioned within a heater housing, wherein a plurality of tubes are arranged radially outwardly of the at least one heater. A fluid heater in accordance with claim 1, wherein the plurality of tubes extend at least partially circumferentially around at least one heater. A fluid heater according to claim 1 or 2, wherein at least one heater is axially disposed between the first manifold assembly and the second manifold assembly. In the third paragraph, a fluid heater, wherein at least one heater does not radially overlap either the first manifold assembly or the second manifold assembly. A fluid heater according to any one of claims 1 to 4, wherein the plurality of tubes are arranged in either a semicircular array or a circular array around the axis. A fluid heater according to any one of claims 1 to 5, wherein one or both of the first manifold assembly and the second manifold assembly are each formed of at least one ring. In the sixth paragraph, a fluid heater, wherein one or both of the first manifold assembly and the second manifold assembly are formed with an inner manifold and an outer manifold, each of which is axially assembled to form an annular flow chamber positioned between the inner manifold and the outer manifold, and at least one of the inner manifold and the outer manifold forms at least one ring. A fluid heater in accordance with claim 7, wherein the inner manifold is in contact with the outer manifold at the inner connection portion and the outer connection portion, and the outer connection portion is positioned radially outward from the inner connection portion. In the 8th paragraph, the internal connection portion is a fluid heater formed by extending a protrusion of one of the internal manifold and the external manifold into a groove of the other of the internal manifold and the external manifold. A fluid heater according to claim 8 or 9, wherein the external connection is formed at a mating interface between the inner manifold and the outer manifold. A fluid heater according to any one of claims 6 to 10, further comprising one or more electrical components extending through at least one ring. A fluid heater in accordance with claim 11, wherein the one or more electrical components include at least one of heater wiring connected to at least one heater and sensor wiring connected to at least one sensor. A fluid heater according to any one of claims 1 to 5, wherein the first manifold assembly comprises a first inner manifold connected to a plurality of tubes and a first outer manifold opposite the first inner manifold, wherein the first inner manifold and the first outer manifold define a first flow chamber in fluid communication with the plurality of tubes. A fluid heater in accordance with claim 13, wherein the first fluid port is connected to the first external manifold, and the first fluid port forms a fluid inlet. A fluid heater according to claim 13 or 14, wherein the first internal manifold comprises a plurality of fluid holes extending completely through the first internal manifold in the axial direction, and each tube of the plurality of tubes extends into a respective fluid hole of the plurality of fluid holes. A fluid heater in claim 15, wherein the plurality of fluid holes are arranged in a first arched array extending partially around the axis and a second arched array extending partially around the axis. A fluid heater in claim 16, wherein the first arched array is spaced circumferentially from the second arched array. A fluid heater in claim 16, wherein the first arched array is arranged radially outward from the second arched array. A fluid heater in accordance with claim 15, wherein the plurality of fluid holes comprises a first subset of fluid holes positioned radially inwardly from a second subset of fluid holes. In claim 13, the first outer manifold comprises a first number of flow holes configured to allow the process fluid to flow, and the first inner manifold comprises a second number of flow holes configured to allow the process fluid to flow, the second number being greater than the first number. A fluid heater in claim 20, wherein the first number is 1 and the second number is at least 20. A fluid heater in claim 21, wherein the second number is at least 60. In any one of claims 1 to 22,
A fluid heater further comprising a core extending axially within a heater housing, wherein a plurality of tubes and at least one heater are disposed within the core. A fluid heater in claim 23, wherein the core is formed of a metal that conducts heat from at least one heater to a plurality of tubes. A fluid heater in claim 24, wherein the core is formed of a plurality of blocks stacked axially, and the plurality of tubes extend through the plurality of blocks. A fluid heater in claim 25, wherein the plurality of blocks include a plurality of axially connected mating portions. A fluid heater in accordance with claim 26, wherein the plurality of mating members include annular protrusions accommodated within annular recesses. A fluid heater according to any one of claims 25 to 27, wherein the plurality of blocks comprises a first end block forming a portion of the core axially most proximate to the first manifold assembly and a second end block forming a portion of the core axially most proximate to the second manifold assembly. A fluid heater in claim 28, wherein the plurality of blocks further include at least one intermediate block axially arranged between the first end block and the second end block. A fluid heater in claim 29, wherein at least one intermediate block comprises a plurality of intermediate blocks. A fluid heater according to any one of claims 28 to 30, wherein the first manifold assembly is mounted on the first end block and the second manifold assembly is mounted on the second end block. A fluid heater according to any one of claims 24 to 31, wherein the core is formed of aluminum. A fluid heater according to any one of claims 1 to 32, further comprising a plurality of temperature sensors positioned within the heater housing. A fluid heater in accordance with claim 33, wherein at least one heater is wired through one of the first manifold assembly and the second manifold assembly, and wherein the plurality of temperature sensors are wired through the other of the first manifold assembly and the second manifold assembly. A fluid heater according to any one of claims 1 to 34, wherein the heater housing is cylindrical. A fluid heater according to any one of claims 1 to 35, wherein the purge path is formed within the heater housing, and the purge path is at least partially disposed radially outwardly of the plurality of tubes. A fluid heater configured to increase the temperature of a process fluid,
A heater housing elongated along an axis between the first housing end and the second housing end;
A first manifold assembly disposed within the heater housing and in fluid communication with the fluid inlet;
A second manifold assembly disposed within the heater housing and in fluid communication with the fluid outlet;
A core disposed axially within the heater housing between the first manifold assembly and the second manifold assembly, the core being formed of a plurality of blocks axially stacked, the plurality of blocks having thermal conductivity;
A plurality of tubes extending through the core between the first manifold assembly and the second manifold assembly to fluidly connect the first manifold assembly and the second manifold assembly; and
A fluid heater comprising at least one heater positioned radially inwardly within a core of a plurality of tubes. A fluid heater in claim 37, wherein the plurality of blocks are formed of metal and the plurality of tubes are formed of plastic. A fluid heater in claim 38, wherein the plurality of tubes are formed of perfluoroalkoxy (PFA). A fluid heater according to claim 38 or 39, wherein the plurality of blocks are formed of aluminum. In any one of claims 37 to 40, the plurality of blocks:
a first end block forming a portion of the core axially closest to the first manifold assembly; and
A fluid heater comprising a second end block forming a portion of the core axially closest to the second manifold assembly. A fluid heater according to claim 41, wherein the first end block is configured differently from the second end block. A fluid heater according to claim 41 or 42, wherein the plurality of blocks include at least one intermediate block axially arranged between the first end block and the second end block. A fluid heater in claim 43, wherein at least one intermediate block is configured differently from the first end block and the second end block. A fluid heater according to claim 43 or 44, wherein at least one intermediate block comprises a plurality of intermediate blocks. A fluid heater in claim 45, wherein each intermediate block among a plurality of intermediate blocks is configured identically. In Article 41,
The first end block comprises a first number of bores extending axially completely through the first end block;
The second end block includes a second number of bores extending axially completely through the second end block;
A fluid heater having a first bore number greater than a second bore number. In Article 47,
The plurality of blocks include at least one intermediate block axially arranged between the first end block and the second end block;
At least one intermediate block includes a third number of bores extending axially completely through the at least one intermediate block;
A fluid heater having a third bore number greater than that of the second bore number. A fluid heater in claim 48, wherein the number of first bores is the same as the number of third bores. In any one of Articles 47 to 49,
The core defines at least one heater passage having at least one heater disposed therein, the at least one heater passage being formed by a plurality of aligned heater bores formed within a plurality of blocks;
A fluid heater wherein the heater bore of the second end block does not extend axially completely through the first end block. In any one of claims 37 to 50, the core:
A fluid heater comprising a plurality of tube passages extending axially completely through each of the plurality of blocks, the plurality of tubes being at least partially disposed within the plurality of tube passages. In claim 51, a fluid heater wherein the plurality of tubes extend completely axially through the plurality of tube passages to interface with the first manifold assembly and the second manifold assembly. A fluid heater in claim 51 or 52, wherein the fluid path through the fluid heater extends from the fluid inlet downstream to a first manifold assembly, through a plurality of tubes from the first manifold assembly, from the plurality of tubes to a second manifold assembly, and from the second manifold assembly to a fluid outlet, such that the process fluid does not contact the plurality of blocks. A fluid heater, in claim 53, further comprising an inhibition layer disposed between the tubes of the plurality of tubes and each tube passage of the plurality of tube passages. A fluid heater in claim 54, wherein the suppression layer is formed as a coating on a plurality of blocks. A fluid heater according to claim 54 or 55, wherein the inhibition layer comprises silicone. A fluid heater according to any one of claims 37 to 56, wherein the heater, the tube, the radially outer portion of the plurality of blocks, and the heater housing extend radially outwardly from the axis, in that order. A fluid heater, further comprising an insulator radially disposed between the radially outer portion of the plurality of blocks and the heater housing, in claim 57. A fluid heater in claim 58, wherein the insulator is formed by a plurality of insulating sheets laminated together. A fluid heater in claim 57, wherein the purge path for the purge gas is radially arranged between the radially outer portion of the plurality of blocks and the heater housing. A fluid heater in claim 60, wherein the purge path is radially arranged between the insulator and the heater housing. A fluid heater configured to increase the temperature of a process fluid,
A heater housing elongated along an axis between the first housing end and the second housing end;
A first manifold assembly disposed within the heater housing and in fluid communication with a first fluid port formed by one of a fluid inlet and a fluid outlet, the first manifold assembly comprising:
A first internal manifold having a first plurality of fluid holes extending through it;
A first external manifold having a first port opening extending through the first external manifold, the first external manifold being in fluid communication with the first fluid port through the first port opening; and
A first manifold assembly comprising a first flow chamber formed between a first inner manifold and a first outer manifold, the first flow chamber providing fluid communication between the first port opening and the first plurality of fluid openings;
A second manifold assembly disposed within the heater housing and in fluid communication with a second fluid port formed by the other of the fluid inlet and the fluid outlet;
A core axially disposed within the heater housing between the first manifold assembly and the second manifold assembly;
a plurality of tubes extending through the core between the first plurality of fluid holes and the second manifold assembly, fluidly connecting the first flow chamber and the second manifold assembly; and
A fluid heater comprising at least one heater positioned radially inwardly within a core of a plurality of tubes. A fluid heater in claim 62, wherein at least one heater is disposed radially inwardly of the first flow chamber. A fluid heater according to claim 62 or 63, wherein the first inner manifold comprises a first inner step portion and a first outer step portion, and the first plurality of fluid holes are radially arranged between the first inner step portion and the first outer step portion. A fluid heater in claim 64, wherein the first internal step portion includes an annular groove. A fluid heater in claim 65, wherein the external manifold comprises a second internal step portion configured to abut the first internal step portion and a second external step portion configured to abut the first external step portion. A fluid heater in claim 66, wherein the second internal step portion includes an annular protrusion configured to extend into an annular groove. A fluid heater according to claim 66 or 67, wherein the first external step is in contact with the second external step. A fluid heater in claim 68, wherein the first external step portion does not extend axially to the second external step portion. A fluid heater according to any one of claims 62 to 69, wherein the first outer manifold extends in an axial face of the first outer ring oriented toward the first inner manifold, such that the base of the flow groove is positioned further from the inner manifold than the interface between the inner manifold and the outer manifold. A fluid heater in claim 70, wherein the fluid groove is a U-shaped groove. In any one of claims 62 to 71, the first internal manifold:
an outer surface exposed to the flow chamber; and
comprising at least one protrusion protruding from the outer surface toward the outer manifold;
A fluid heater, wherein the openings of the plurality of fluid holes are formed by at least one protrusion. A fluid heater in claim 72, wherein at least one protrusion extends at least partially around the axis. A fluid heater according to claim 72 or 73, wherein at least one protrusion comprises a plurality of protrusions. A fluid heater in claim 74, wherein each of the plurality of protrusions extends in an arch shape around the axis. A fluid heater according to any one of claims 62 to 75, wherein the plurality of tubes extend into the first plurality of fluid holes. In claim 76, a fluid heater wherein the plurality of tubes are fused to the first internal manifold. A fluid heater in claim 77, wherein the plurality of tubes are formed of perfluoroalkoxy (PFA), and the first internal manifold is at least partially formed of PFA. In any one of claims 62 to 78, the second manifold assembly:
A second internal manifold having a second plurality of fluid holes extending through it;
A second external manifold having a second port hole extending through the second external manifold, the second external manifold being in fluid communication with the second fluid port through the second port hole; and
A fluid heater comprising a second flow chamber formed between a second inner manifold and a second outer manifold, the second flow chamber providing fluid communication between the second port hole and the second plurality of fluid holes. In clause 79, the second manifold assembly is identical to the first manifold assembly and is flipped with respect to the first manifold assembly, such that both the first inner manifold and the second inner manifold are oriented axially inwardly toward the core. A fluid heater. A fluid heater in claim 79, wherein the first internal manifold is arranged as a mirror image of the second internal manifold. A fluid heater in claim 79, wherein the first external manifold is arranged as a mirror image of the second external manifold rotated about an axis.