KR20230135211A - Surface Treatment INCLUDING PERFLUOROPOLYETHER-BASED SILATRANE COMPOUND and METHOD FOR FORMING A COATING LAYER - Google Patents
Surface Treatment INCLUDING PERFLUOROPOLYETHER-BASED SILATRANE COMPOUND and METHOD FOR FORMING A COATING LAYER Download PDFInfo
- Publication number
- KR20230135211A KR20230135211A KR1020220032068A KR20220032068A KR20230135211A KR 20230135211 A KR20230135211 A KR 20230135211A KR 1020220032068 A KR1020220032068 A KR 1020220032068A KR 20220032068 A KR20220032068 A KR 20220032068A KR 20230135211 A KR20230135211 A KR 20230135211A
- Authority
- KR
- South Korea
- Prior art keywords
- coating layer
- surface treatment
- compound
- perfluoropolyether
- formula
- Prior art date
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- 239000011247 coating layer Substances 0.000 title claims abstract description 52
- 238000000034 method Methods 0.000 title claims abstract description 28
- -1 SILATRANE COMPOUND Chemical class 0.000 title claims abstract description 12
- 238000004381 surface treatment Methods 0.000 title claims description 28
- 150000001875 compounds Chemical class 0.000 claims abstract description 47
- 239000002904 solvent Substances 0.000 claims abstract description 28
- 238000010894 electron beam technology Methods 0.000 claims abstract description 18
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 18
- XBRVPWBNRAPVCC-UHFFFAOYSA-N 4,6,11-trioxa-1-aza-5$l^{3}-silabicyclo[3.3.3]undecane Chemical class C1CO[Si]2OCCN1CCO2 XBRVPWBNRAPVCC-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000010438 heat treatment Methods 0.000 claims abstract description 14
- 239000012756 surface treatment agent Substances 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 27
- 238000000151 deposition Methods 0.000 claims description 23
- 239000000919 ceramic Substances 0.000 claims description 18
- 125000000524 functional group Chemical group 0.000 claims description 18
- 125000005010 perfluoroalkyl group Chemical group 0.000 claims description 14
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 8
- 125000004432 carbon atom Chemical group C* 0.000 claims description 8
- RSJKGSCJYJTIGS-BJUDXGSMSA-N undecane Chemical group CCCCCCCCCC[11CH3] RSJKGSCJYJTIGS-BJUDXGSMSA-N 0.000 claims description 3
- 239000010702 perfluoropolyether Substances 0.000 abstract description 30
- 239000000126 substance Substances 0.000 abstract description 15
- 239000003795 chemical substances by application Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 24
- 239000011248 coating agent Substances 0.000 description 24
- 238000000576 coating method Methods 0.000 description 20
- 230000008021 deposition Effects 0.000 description 20
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- 239000000377 silicon dioxide Substances 0.000 description 12
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 10
- 229910052681 coesite Inorganic materials 0.000 description 10
- 229910052906 cristobalite Inorganic materials 0.000 description 10
- 229910052731 fluorine Inorganic materials 0.000 description 10
- 235000012239 silicon dioxide Nutrition 0.000 description 10
- 229910052682 stishovite Inorganic materials 0.000 description 10
- 229910052905 tridymite Inorganic materials 0.000 description 10
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 9
- 239000011737 fluorine Substances 0.000 description 9
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 8
- RSJKGSCJYJTIGS-UHFFFAOYSA-N undecane Chemical compound CCCCCCCCCCC RSJKGSCJYJTIGS-UHFFFAOYSA-N 0.000 description 8
- 238000005299 abrasion Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- 238000011109 contamination Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical group CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000009832 plasma treatment Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000003373 anti-fouling effect Effects 0.000 description 3
- 238000010923 batch production Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- DFUYAWQUODQGFF-UHFFFAOYSA-N 1-ethoxy-1,1,2,2,3,3,4,4,4-nonafluorobutane Chemical compound CCOC(F)(F)C(F)(F)C(F)(F)C(F)(F)F DFUYAWQUODQGFF-UHFFFAOYSA-N 0.000 description 2
- 241000233805 Phoenix Species 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 125000001153 fluoro group Chemical group F* 0.000 description 2
- 235000019256 formaldehyde Nutrition 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000013007 heat curing Methods 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 125000004817 pentamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 2
- 229920000233 poly(alkylene oxides) Polymers 0.000 description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
- 239000011253 protective coating Substances 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- GETTZEONDQJALK-UHFFFAOYSA-N (trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=CC=C1 GETTZEONDQJALK-UHFFFAOYSA-N 0.000 description 1
- OKIYQFLILPKULA-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4-nonafluoro-4-methoxybutane Chemical compound COC(F)(F)C(F)(F)C(F)(F)C(F)(F)F OKIYQFLILPKULA-UHFFFAOYSA-N 0.000 description 1
- SJBBXFLOLUTGCW-UHFFFAOYSA-N 1,3-bis(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=CC(C(F)(F)F)=C1 SJBBXFLOLUTGCW-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 150000003973 alkyl amines Chemical class 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000004210 ether based solvent Substances 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000006459 hydrosilylation reaction Methods 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000005453 ketone based solvent Substances 0.000 description 1
- 229940104873 methyl perfluorobutyl ether Drugs 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- FYJQJMIEZVMYSD-UHFFFAOYSA-N perfluoro-2-butyltetrahydrofuran Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C1(F)OC(F)(F)C(F)(F)C1(F)F FYJQJMIEZVMYSD-UHFFFAOYSA-N 0.000 description 1
- BPHQIXJDBIHMLT-UHFFFAOYSA-N perfluorodecane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F BPHQIXJDBIHMLT-UHFFFAOYSA-N 0.000 description 1
- LGUZHRODIJCVOC-UHFFFAOYSA-N perfluoroheptane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F LGUZHRODIJCVOC-UHFFFAOYSA-N 0.000 description 1
- YVBBRRALBYAZBM-UHFFFAOYSA-N perfluorooctane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F YVBBRRALBYAZBM-UHFFFAOYSA-N 0.000 description 1
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 1
- AQZYBQIAUSKCCS-UHFFFAOYSA-N perfluorotripentylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F AQZYBQIAUSKCCS-UHFFFAOYSA-N 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 235000015096 spirit Nutrition 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
- C08G65/002—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds
- C08G65/005—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds containing halogens
- C08G65/007—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds containing halogens containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
- C08G65/02—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring
- C08G65/32—Polymers modified by chemical after-treatment
- C08G65/329—Polymers modified by chemical after-treatment with organic compounds
- C08G65/336—Polymers modified by chemical after-treatment with organic compounds containing silicon
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L71/00—Compositions of polyethers obtained by reactions forming an ether link in the main chain; Compositions of derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- General Chemical & Material Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
변성 실라트란 화합물을 포함하는 표면 처리제 및 이를 이용한 코팅층 형성 방법에 관한 것으로 상세하게는 대상 소재의 표면에 불소계 화합물의 코팅층을 형성하는데 적용되는 퍼플루오로폴리에테르계 변성 실라트란 화합물을 포함하는 표면 처리제 및 이를 이용한 코팅층 형성 방법에 관한 것이다.It relates to a surface treatment agent containing a modified silatrane compound and a method of forming a coating layer using the same. Specifically, a surface treatment agent containing a perfluoropolyether-based modified silatrane compound applied to form a coating layer of a fluorine-based compound on the surface of a target material. and a method of forming a coating layer using the same.
일반적으로 퍼플루오로폴리에테르-함유 화합물은 그 자체의 매우 낮은 표면 에너지로 인해 발수발유성, 내약품성, 윤활성, 이형성 및 방오성과 같은 물리적 특성을 갖는다. 특히 트리메톡시실란으로 변형된 퍼플루오로폴리에테르-함유 화합물은 유리, 금속 등에 대한 접착력이 우수하여, 이형제 및 광학 재료의 보호 코팅막을 형성하기 위해 널리 사용되고 있다. 일반적으로, 글리시독시프로필트리알콕시실란 등의 커플링제는 유리 또는 금속과 같은 물질 표면과 유기 화합물 사이에 단단한 결합을 확립하는 수단으로서 널리 알려져 있다. 상기 실란 커플링제는 자체분자 내에 유기반응기와 작용하는 라디칼 과 수분 반응성 라디칼을 갖고 있으며, 기판의 기능기와 결합하지 않은 일부 수분 반응성 라디칼은 공기 중의 수분을 촉매로하여, 자기-축합 반응을 하여 실록산으로 전환되어 단단한 코팅층을 형성한다. In general, perfluoropolyether-containing compounds have physical properties such as water and oil repellency, chemical resistance, lubricity, release property, and stain resistance due to their very low surface energy. In particular, perfluoropolyether-containing compounds modified with trimethoxysilane have excellent adhesion to glass, metal, etc., and are widely used as mold release agents and to form protective coating films for optical materials. In general, coupling agents such as glycidoxypropyltrialkoxysilane are widely known as a means of establishing a tight bond between the surface of a material such as glass or metal and an organic compound. The silane coupling agent has radicals and moisture-reactive radicals that act with organic reactors in its own molecules, and some moisture-reactive radicals that are not combined with the functional groups of the substrate undergo a self-condensation reaction to form siloxane using moisture in the air as a catalyst. It is converted to form a hard coating layer.
최근에는 퍼플루오로폴리에테르의 낮은 표면에너지를 이용하고, 상기 실란 커플링제의 다양한 기판에 대한 접착능력을 이용하는 퍼플루오로폴리에테르계 변성 트리메톡시실란 화합물이 오염방지 기능을 갖는 표면 처리제로서 이용되고 있다.Recently, perfluoropolyether-based modified trimethoxysilane compounds that utilize the low surface energy of perfluoropolyether and the adhesion ability of the silane coupling agent to various substrates have been used as a surface treatment agent with anti-fouling function. It is becoming.
대한민국 특허등록 제10-0959850호에서는 습식코팅 및 진공증착이 가능한, 퍼플루오로폴리에테르 변성 알콕시실란 화합물을 제조함에 있어서, 퍼플루오로폴리에테르 기능기와 알콕시실란기능기 사이에 폴리알킬에테르 등의 스페이서 기능기를 부여하여, 외부환경에 대한 내구성을 증대시키는 방법을 제시하고 있다. In Republic of Korea Patent Registration No. 10-0959850, in manufacturing a perfluoropolyether-modified alkoxysilane compound capable of wet coating and vacuum deposition, a spacer such as polyalkyl ether is used between the perfluoropolyether functional group and the alkoxysilane functional group. A method of increasing durability against the external environment is proposed by imparting functional groups.
미국등록특허 U5945555A호 에서는 비닐 또는 알릴 기능기를 보유하는 실라트란 화합물을 하이드로시릴레이션이 가능한 실리콘 레진에 소량 혼합한 후 120℃ 에서 30분간 가열경화하면, 다양한 소재에 접착력을 증진시킨다고 소개하고 있다. 그러나 실라트란 화합물이 진공증착 커팅 공정에 사용시 기재에 접착력이 우수하다는 기록은 없다. 그러나, 상술한 기술에 개시된 화합물들은 디스플레이 윈도우 오염방지 코팅에 기본적으로 요구되는 물성인 마찰계수를 충분히 낮추지 못하는 한계가 있다.US Patent No. U5945555A introduces that mixing a small amount of a silatrane compound containing a vinyl or allyl functional group with a silicone resin capable of hydrosilylation and then heat-curing it at 120°C for 30 minutes improves adhesion to various materials. However, there are no records showing that silatrane compounds have excellent adhesion to substrates when used in a vacuum deposition cutting process. However, the compounds disclosed in the above-described technology have a limitation in that they do not sufficiently lower the coefficient of friction, which is a basic property required for anti-pollution coatings for display windows.
본 출원인 기술인 특허출원번호 제2021-0125972호에서는 오염방지용 표면처리 화합물로서 퍼플루오로폴리에테르계 변성 실란이 사용된 표면처리제의 내용이 개시되어 있습니다. 해당특허의 경우 상술한 표면 처리 화합물인 퍼플루오로폴리에테르계 변성 실란이 포함된 표면 처리제를 피처리 대상체에 코팅함으로서, 마찰계수가 낮으면서, 내마모성 및 내화학성 등의 물성이 우수한 코팅층을 형성할 수 있다. 표면처리 공정은 용제와 함께 스프레이한 후 130℃ 이상에서 10분이상 열경화하거나, 진공증착기 내에서 열저항체를 이용한 간접 가열하여 증발, 안착시키는 것이 가능하다.Patent Application No. 2021-0125972, the applicant's technology, discloses a surface treatment agent using perfluoropolyether-based modified silane as a surface treatment compound for preventing contamination. In the case of the patent, by coating the object to be treated with a surface treatment agent containing perfluoropolyether-based modified silane, which is the surface treatment compound described above, a coating layer with a low coefficient of friction and excellent physical properties such as wear resistance and chemical resistance can be formed. You can. The surface treatment process can be done by spraying with a solvent and then heat curing at 130°C or higher for more than 10 minutes, or by indirect heating using a heat resistor in a vacuum evaporator to evaporate and settle.
그러나 상기의 표면 처리 화합물은 진공증착 공정에 적용시에는 공정 변경이 필요하다. 기존의 진공증착 방식에서 사용하는 방식인, 세라믹담체에 함침 후 일렉트론 빔으로 직접가열하는 방식에는 적용할 수 없고, 스틸울 등의 열전도율이 큰 담체에 함침한 후, 전기저항체인 발열보트위에 얹고 간접가열 방식으로 증발시켜야 한다. 일렉트론 빔에 직접 조사될 경우에는 퍼플루오로폴리에테르계 변성 알콕시실란 화합물 중의 알콕시실란 기능기 부분의 열분해가 너무 심하여, 코팅 표면이 분해생성물로 심하게 오염되는 문제점이 있다.However, the above surface treatment compounds require process changes when applied to the vacuum deposition process. It cannot be applied to the method used in the existing vacuum deposition method of impregnating a ceramic carrier and then directly heating it with an electron beam. After impregnating a carrier with high thermal conductivity such as steel wool, it is placed on a heating boat, which is an electric resistance, and indirectly heated. It must be evaporated by heating. When directly irradiated with an electron beam, the thermal decomposition of the alkoxysilane functional group portion of the perfluoropolyether-based modified alkoxysilane compound is so severe that there is a problem in that the coating surface is severely contaminated with decomposition products.
본 발명은 상기의 문제점을 해결하기 위한 것으로, 디스플레이 윈도우용 등에 오염방지 코팅막을 형성하는데 적당한 전자빔 직접 가열방식의 진공증착에 적용가능한 퍼플루오로폴리에테르계 실라트란 화합물을 포함하는 표면 처리제를 제공하는데 있다. The present invention is intended to solve the above problems, and provides a surface treatment agent containing a perfluoropolyether-based silatrane compound applicable to electron beam direct heating vacuum deposition suitable for forming an anti-contamination coating film for display windows, etc. there is.
또한, 상기 전자빔 가열방식의 진공증착이 가능한 퍼플루오로폴리에테르계 실라트란 화합물을 포함하는 표면 처리제를 이용한 코팅층 형성방법을 제공하는데 있다.In addition, the present invention provides a method of forming a coating layer using a surface treatment agent containing a perfluoropolyether-based silatrane compound capable of vacuum deposition using the electron beam heating method.
본 발명의 일 실시예에 따른 표면 처리제는 하기 화학식1의 표면 처리 화합물을 포함한다.The surface treatment agent according to an embodiment of the present invention includes a surface treatment compound of the following formula (1).
--[화학식 1] --[Formula 1]
(화학식 1은 퍼플루오로폴리에테르계 변성 실라트란(2,8,9-trioxaa-5-aza-1-silabicyclo〔3,3,3〕undecane) 구조의 화합물로서 중요한 기능기인 퍼플루오로폴리에테르 부분은 수평균 분자량이 500 내지 4,000이며, Rf는 탄소수 1 내지 4 사이의 1가 내지는 2가의 퍼플루오로알킬기이고, p/q 의 비율은 0.8 내지 1.2 사이의 범위이며, m은 0 또는 1 또는 2 이며, n은 3 또는 5이다.)(Formula 1 is a perfluoropolyether-modified silatrane (2,8,9-trioxaa-5-aza-1-silabicyclo[3,3,3]undecane) compound, and perfluoropolyether is an important functional group. The portion has a number average molecular weight of 500 to 4,000, Rf is a monovalent or divalent perfluoroalkyl group having 1 to 4 carbon atoms, the p/q ratio is in the range of 0.8 to 1.2, and m is 0 or 1 or 2, and n is 3 or 5.)
일 실시예에 있어서, 상기 표면 처리제는 상기 화학식 1의 표면 처리 화합물과 이에 대하여 용해성이 있는 용제를 포함한다. In one embodiment, the surface treatment agent includes the surface treatment compound of Formula 1 and a solvent soluble therein.
본 발명의 일 실시예에 따른 코팅층 형성방법은 하기 화학식 1의 표면 처리 화합물을 포함하는 표면 처리제를 세라믹 재질의 다공체 타블렛에 함침하여 오염방지 코팅층 형성용 타블렛을 마련하는 단계; 및 상기 타블렛을 일렉트론 빔으로 직접 가열하여 기화된 표면 처리 화합물 기재표면에 바로 증착시킴으로서 코팅층을 형성하는 단계를 포함한다. A method of forming a coating layer according to an embodiment of the present invention includes preparing a tablet for forming an anti-contamination coating layer by impregnating a porous tablet made of ceramic with a surface treatment agent containing a surface treatment compound of the following formula (1); and forming a coating layer by directly heating the tablet with an electron beam and depositing the vaporized surface treatment compound on the surface of the substrate.
--[화학식 1] --[Formula 1]
(화학식 1은 퍼플루오로폴리에테르계 변성 실라트란(2,8,9-trioxaa-5-aza-1-silabicyclo〔3,3,3〕undecane) 구조의 화합물로서, 중요한 기능기인 퍼플루오로폴리에테르 부분은 수평균 분자량이 500 내지 4,000이며, Rf는 탄소수 1 내지 4 사이의 1가 내지는 2가의 퍼플루오로알킬기이고, p/q 의 비율은 0.8 내지 1.2 사이의 범위이며, m은 0, 1 또는 2 이며, n은 3 또는 5이다.)(Formula 1 is a compound with a perfluoropolyether-modified silatrane (2,8,9-trioxaa-5-aza-1-silabicyclo[3,3,3]undecane) structure, and contains perfluoropoly, which is an important functional group. The ether portion has a number average molecular weight of 500 to 4,000, Rf is a monovalent or divalent perfluoroalkyl group having 1 to 4 carbon atoms, the p/q ratio is in the range of 0.8 to 1.2, and m is 0, 1. or 2, and n is 3 or 5.)
일 예로서, 상기 코팅층 형성방법은 일렉트론 빔으로 직접 가열하여 기재 상에 세라믹 멀티코팅층을 형성한 이후 동일한 진공 증착기 내에서 곧바로 수행되는 것이 바람직하다. As an example, the coating layer forming method is preferably performed immediately in the same vacuum evaporator after forming a ceramic multi-coating layer on a substrate by directly heating it with an electron beam.
일 예로서, 상기 기재는 무반사를 위한 세라믹 멀티코팅층이 형성된 기재, 특정칼라를 발현하기 위한 멀티 코팅층이 형성된 기재 및 빛을 반사하는 하프밀러 코팅층이 형성된 기재를 포함할 수 있다. 예시적인 예로서, 상기 기재는 디스플레이 윈도우, 터치스크린 패널인 것이 바람직하다. As an example, the substrate may include a substrate formed with a ceramic multi-coating layer for non-reflection, a substrate formed with a multi-coating layer for expressing a specific color, and a substrate formed with a half-mirror coating layer for reflecting light. As an illustrative example, the substrate is preferably a display window or a touch screen panel.
본 발명에 따르면, 일렉트론 빔으로 직접 가열하여 기화 증착시킴으로서 코팅층 마찰계수가 작으면서 내마모성이 우수하며, 내약품성이 우수한 오염방지 코팅층 형성을 위한 증착용 표면 처리제를 제조할 수 있다. 본 발명의 표면 처리제를 이용하면 피처리 대상체(기재)에 반사방지 특성을 갖는 세라믹 멀티층 코팅을 실시한 후에 바로 동일한 진공 증착기 내에서 곧이어 오염방지 코팅을 일괄공정으로 코팅할 수 있는 장점을 갖는다.According to the present invention, it is possible to manufacture a surface treatment agent for deposition to form an anti-contamination coating layer with a low coefficient of friction for the coating layer, excellent wear resistance, and excellent chemical resistance by vaporizing and depositing it by direct heating with an electron beam. Using the surface treatment agent of the present invention has the advantage of being able to immediately apply an anti-pollution coating in a batch process in the same vacuum evaporator after applying a ceramic multi-layer coating with anti-reflection properties to the object (substrate) to be treated.
이하, 본 발명의 표면 처리제 및 이를 이용한 코팅층 형성 방법을 보다 상세하게 설명하고자 한다. 본 발명은 다양한 변경을 가할 수 있고 여러 가지 형태를 가질 수 있는 바, 특정 실시예들을 본문에 상세하게 설명하고자 한다. 그러나, 이는 본 발명을 특정한 개시 형태에 대해 한정하려는 것이 아니며, 본 발명의 사상 및 기술 범위에 포함되는 모든 변경, 균등물 내지 대체물을 포함하는 것으로 이해되어야 한다. Hereinafter, the surface treatment agent of the present invention and the method of forming a coating layer using the same will be described in more detail. Since the present invention can make various changes and take various forms, specific embodiments will be described in detail in the text. However, this is not intended to limit the present invention to a specific disclosed form, and should be understood to include all changes, equivalents, and substitutes included in the spirit and technical scope of the present invention.
본 출원에서, "포함하다" 또는 "가지다" 등의 용어는 명세서 상에 기재된 특징, 성분, 단계, 공정, 조성물 또는 이들을 조합한 것이 존재함을 지정하려는 것이지, 하나 또는 그 이상의 다른 특징들이나 성분, 단계, 공정, 조성물 또는 이들을 조합한 것들의 존재 또는 부가 가능성을 미리 배제하지 않는 것으로 이해되어야 한다. In the present application, terms such as “comprise” or “have” are intended to designate the presence of features, components, steps, processes, compositions, or combinations thereof described in the specification, and are intended to indicate the presence of one or more other features or components, It should be understood that this does not exclude in advance the possibility of the presence or addition of steps, processes, compositions or combinations thereof.
또한, 다르게 정의되지 않는 한, 기술적이거나 과학적인 용어를 포함해서 여기서 사용되는 모든 용어들은 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자에 의해 일반적으로 이해되는 것과 동일한 의미를 가지고 있다. 일반적으로 사용되는 사전에 정의되어 있는 것과 같은 용어들은 관련 기술의 문맥 상 가지는 의미와 일치하는 의미를 가지는 것으로 해석되어야 하며, 본 출원에서 명백하게 정의하지 않는 한, 이상적이거나 과도하게 형식적인 의미로 해석되지 않는다.Additionally, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by a person of ordinary skill in the technical field to which the present invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related technology, and unless explicitly defined in the present application, should not be interpreted in an ideal or excessively formal sense. No.
코팅층 형성용 표면 처리제Surface treatment agent for forming a coating layer
본 발명의 일 실시예에 따른 표면 처리제는, 화학식 1의 표면 처리 화합물 및 용매를 포함한다.The surface treatment agent according to an embodiment of the present invention includes a surface treatment compound of Formula 1 and a solvent.
-[화학식 1] -[Formula 1]
상기 화학식 1의 표면처리 화합물은 퍼플루오로폴리에테르계 변성 실라트란(2,8,9-trioxaa-5-aza-1-silabicyclo〔3,3,3〕undecane) 구조의 화합물로서, 중요한 기능기인 퍼플루오로폴리에테르 부분은 수평균 분자량이 500 내지 4,000이며, Rf는 탄소수 1 내지 4 사이의 1가 내지는 2가의 퍼플루오로알킬기이고, p/q 의 비율은 0.8 내지 1.2 사이의 범위이며, m은 0 또는 1 또는 2 이며, n은 3 또는 5이다.The surface treatment compound of Formula 1 is a perfluoropolyether-based modified silatrane (2,8,9-trioxaa-5-aza-1-silabicyclo[3,3,3]undecane) structure compound, which is an important functional group. The perfluoropolyether portion has a number average molecular weight of 500 to 4,000, Rf is a monovalent or divalent perfluoroalkyl group having 1 to 4 carbon atoms, the p/q ratio is in the range from 0.8 to 1.2, and m is 0, 1, or 2, and n is 3 or 5.
본 발명의 화학식 1의 플루오로폴리에테르 기능기를 구성하는 폴리머는 폴리알킬렌옥사이드의 모든 수소원자가 불소원자로 치환되어 있다. 폴리알킬렌옥사이드의 수소원자가 불소 원자로 치환되어 있다면 오염방지의 기능을 발현할 수 있으므로 메틸렌옥사이드, 에틸렌옥사이드, 프로필렌옥사이드 등 모노머의 구조와 구성비율 등의 구체적인 구조의 제한은 없다. In the polymer constituting the fluoropolyether functional group of Formula 1 of the present invention, all hydrogen atoms of polyalkylene oxide are replaced with fluorine atoms. If the hydrogen atom of polyalkylene oxide is replaced with a fluorine atom, it can exhibit the function of preventing contamination, so there are no restrictions on the specific structure, such as the structure and composition ratio of monomers such as methylene oxide, ethylene oxide, and propylene oxide.
일 예로서, 상기 폴리머는 한쪽말단에 실라트란 기능기 또는 양말단에 실라트란 기능기를 보유할 수 있다. 다만, 코팅된 표면의 마찰게수 등을 고려할 경우, 에틸렌옥사이드 와 메틸렌옥사이드의 구성비율이 엇비슷한 것이 좋다. As an example, the polymer may have a silatran functional group at one end or a silatran functional group at both ends. However, when considering the friction factor of the coated surface, it is better for the composition ratio of ethylene oxide and methylene oxide to be similar.
일 예로서, 상기 폴리머의 수평균 분자량은 500g/mol 내지 4,000g/mol을 갖는 것이 적당하다. 분자량이 500g/mol보다 너무 작으면, 진공 증착 과정에서 피처리 대상체에 안착되지 않고 진공 증착기 외부로 배출되는 문제점이 있으며, 분자량이 4,000g/mol 보다 크면, 화합물이 증발하는 속도가 느려서 일렉트론빔에의해 분해되는 비율이 커지는 문제점이 있다. As an example, the polymer preferably has a number average molecular weight of 500 g/mol to 4,000 g/mol. If the molecular weight is too less than 500 g/mol, there is a problem that the compound is discharged outside the vacuum evaporator rather than being deposited on the object to be treated during the vacuum deposition process. If the molecular weight is greater than 4,000 g/mol, the evaporation rate of the compound is slow and the compound is exposed to the electron beam. There is a problem that the rate of decomposition increases.
상기 폴리머와 실라트란 사이에는 에틸렌옥사이드나 알킬렌의 적당한 스페이서 기능기가 존재한다. 이는 실라트란 기능기를 퍼플루오로폴리에테르 폴리머에 연결하기 위해서 필요하지만, 최종 표면처리제의 접착력 향상과 촉감 향상을 위해서 다양한 구조의 스페이서 그룹이 가능하다. 에틸렌옥사이드의 부가반응이 가능하여 1몰 또는 2몰의 부가는 촉감의 향상을 부여하며, 혹은 프로필렌 또는 펜틸렌의 구조가 가능한데, 프로필렌은 제조 공정이 평이하며 펜틸렌의 경우는 접착력이 향상된다. An appropriate spacer functional group of ethylene oxide or alkylene exists between the polymer and silatrane. This is necessary to connect the silatrane functional group to the perfluoropolyether polymer, but spacer groups of various structures are possible to improve the adhesion and tactile feel of the final surface treatment agent. An addition reaction of ethylene oxide is possible, so the addition of 1 or 2 moles provides improved tactile feel, or a structure of propylene or pentylene is possible. Propylene has an easy manufacturing process, and pentylene improves adhesion.
본 발명의 특징은 p/q 의 비율이 0.8 내지 1.2 사이의 범위인 것에 있다. p/q 의 비율이 0.8보다 작으면, 퍼플루오로폴리에테르 제조시에 불안정성으로 인해 과도한 제조비용이 발생하며, 그 비율이 1.2보다 크면 진공증착된 코팅층의 내마모성이 저하되는 문제점이 있다.A feature of the present invention is that the p/q ratio is in the range between 0.8 and 1.2. If the p/q ratio is less than 0.8, excessive manufacturing costs occur due to instability during the production of perfluoropolyether, and if the ratio is greater than 1.2, there is a problem in that the wear resistance of the vacuum-deposited coating layer is reduced.
상기 표면 처리제는 표면처리화합물과 용매를 혼합하거나, 혹은 상기 표면처리화합물과 퍼플루오로폴리에테르계 변성 트리알콕시실란과 용매를 혼합하여 제조될 수 있다. 상기 용매는 적어도 다음 중 하나의 용매를 포함한다. 즉 불소-변성 지방족 탄화수소 용매 (퍼플루오로헵탄, 퍼플루오로옥탄 및 퍼플루오로데칸), 불소-변성 방향족 탄화수소 용매(m-크실렌 헥사플루오리드 및 벤조트리플루오리드), 불소-변성 에테르 용매(메틸퍼플루오로부틸에테르 및 퍼플루오로(2-부틸테트라히드로푸란)), 불소-변성 알킬아민 용매(퍼플루오로트리부틸아민 및 퍼플루오로트리펜틸아민), 탄화수소 용매(석유 벤진, 미네랄 스피리트, 톨루엔 및 크실렌), 및 케톤 용매( 아세톤, 메틸 에틸 케톤 및 메틸 이소부틸 케톤)등에서 한 가지 이상을 사용 할 수 있다. The surface treatment agent may be prepared by mixing a surface treatment compound and a solvent, or by mixing the surface treatment compound, a perfluoropolyether-based modified trialkoxysilane, and a solvent. The solvent includes at least one of the following solvents. namely, fluorine-modified aliphatic hydrocarbon solvents (perfluoroheptane, perfluorooctane and perfluorodecane), fluorine-modified aromatic hydrocarbon solvents (m-xylene hexafluoride and benzotrifluoride), and fluorine-modified ether solvents ( Methylperfluorobutylether and perfluoro(2-butyltetrahydrofuran)), fluorine-modified alkylamine solvents (perfluorotributylamine and perfluorotripentylamine), hydrocarbon solvents (petroleum benzine, mineral spirits, toluene) and xylene), and ketone solvents (acetone, methyl ethyl ketone, and methyl isobutyl ketone).
상술한 퍼플루오로폴리에테르계 변성 실라트란 화합물이 포함된 상기 표면 처리제는 플라스틱 계열의 기판에 대해서도, 오염방지 특성이 우수하고 내마모성이 우수한 코팅층을 형성할 수 있다. 특히, 본 발명의 표면 처리제를 이용하면 피처리 대상체(기재)에 반사방지 특성을 갖는 세라믹 멀티층 코팅(실리카 또는 알루미나 증착)을 실시한 후에 동일한 진공 증착기 내에서 곧이어 상기 표면 처리제를 이용한 오염방지 코팅층을 일괄공정으로 진행할 수 있어 증착 코팅공정을 단순화시켜 공정을 효율적으로 관리할 수 있는 장점을 갖는다.The surface treatment agent containing the above-described perfluoropolyether-based modified silatrane compound can form a coating layer with excellent anti-fouling properties and excellent wear resistance even on plastic-based substrates. In particular, when using the surface treatment agent of the present invention, a ceramic multi-layer coating (silica or alumina deposition) with anti-reflection properties is applied to the object to be treated (substrate), and then an anti-contamination coating layer using the surface treatment agent is immediately applied in the same vacuum evaporator. Since it can be carried out as a batch process, it has the advantage of simplifying the deposition and coating process and managing the process efficiently.
코팅층 형성용 표면 처리제를 이용한 코팅층 형성 방법Method of forming a coating layer using a surface treatment agent for forming a coating layer
본 발명에 따른 오염방지 코팅층을 형성하기 위해서는 먼저, 하기 화학식 1의 표면 처리 화합물을 포함하는 표면 처리제를 준비한 후 세라믹 재질의 다공체 타블렛에 함침하여 오염방지 코팅층 형성용 타블렛을 마련한다. In order to form an anti-fouling coating layer according to the present invention, first, prepare a surface treatment agent containing a surface treatment compound of the following formula (1) and then impregnate it into a porous tablet made of ceramic to prepare a tablet for forming an anti-pollution coating layer.
상기 표면 처리제는 하기 화학식 1로 표기되는 퍼플루오로폴리에테르계 변성 실라트란 화합물과 이를 용해하는 용매를 혼합하여 제조할 수 있다. The surface treatment agent can be prepared by mixing a perfluoropolyether-based modified silatrane compound represented by the following formula (1) and a solvent dissolving it.
-[화학식 1] -[Formula 1]
상기 화학식 1은 퍼플루오로폴리에테르계 변성 실라트란(2,8,9-trioxaa-5-aza-1-silabicyclo〔3,3,3〕undecane) 구조의 화합물로서 중요한 기능기인 퍼플루오로폴리에테르 부분이 수평균 분자량이 500 내지 4,000이며, Rf는 탄소수 1 내지 4 사이의 1가 내지는 2가의 퍼플루오로알킬기이고, p/q 의 비율은 0.8 내지 1.2 사이의 범위이며, m은 0 또는 1 또는 2 이며, n은 3 또는 5이다. 상기 표면 처리제에 대한 구체적인 설명은 위에서 상세히 설명하였기에 중복을 피하기 위해 생략한다.The formula 1 is a perfluoropolyether-modified silatrane (2,8,9-trioxaa-5-aza-1-silabicyclo[3,3,3]undecane) compound, and perfluoropolyether is an important functional group. The portion has a number average molecular weight of 500 to 4,000, Rf is a monovalent or divalent perfluoroalkyl group having 1 to 4 carbon atoms, the p/q ratio is in the range of 0.8 to 1.2, and m is 0 or 1 or 2, and n is 3 or 5. A detailed description of the surface treatment agent is omitted to avoid duplication since it has been described in detail above.
이어서, 기재에 상기 타블렛을 일렉트론 빔으로 직접 가열함으로서 기화된 표면 처리 화합물 기재 표면에 증착시킴으로서 코팅층을 형성한다.Next, the tablet is directly heated on the substrate with an electron beam to deposit the vaporized surface treatment compound on the surface of the substrate to form a coating layer.
상기 기재는 무반사를 위한 세라믹 멀티코팅층이 형성된 기재일 수도 있고, 특정칼라를 발현하기 위한 멀티코팅층이 형성된 기재일 수 있으며, 빛을 반사하는 하프밀러 코팅층이 형성된 기재일 수도 있다 실리카 또는 알루미나 증착층이 형성된 기재체일 수 있다. 일 예로서 멀티코팅층은 SiO2 증착, Zr02증착, SiO2 증착의 순서로 적층 형성된 세라믹계 멀티코팅층일 수 있다.The substrate may be a substrate on which a ceramic multi-coating layer is formed for anti-reflection, a multi-coating layer for expressing a specific color may be formed, or a substrate on which a half-mirror coating layer that reflects light may be formed. The silica or alumina deposition layer may be formed. It may be a formed substrate. As an example, the multi-coating layer may be a ceramic-based multi-coating layer formed by stacking SiO2 deposition, ZrO2 deposition, and SiO2 deposition in the order.
예시적인 예로서, 상기 코팅층을 형성하는 단계는 상기 표면 처리제가 함침된 타블렛을 진공 증착기 내에서 전자빔을 이용하여 직접 가열하여 상기 표면처리제에 포함된 표면 처리 화합물을 증발시키는 단계 및 상기 증발된 표면 처리 화합물을 피처리 대상체의 표면에 안착시키는 단계를 포함한다. As an illustrative example, forming the coating layer includes directly heating the tablet impregnated with the surface treatment agent using an electron beam in a vacuum evaporator to evaporate the surface treatment compound contained in the surface treatment agent, and treating the evaporated surface. It includes depositing the compound on the surface of the object to be treated.
예시적인 예로서, 상기 기재(피처리 대상체)는 디스플레이 윈도우 또는 터치스크린 패널인 것이 바람직하다. As an illustrative example, the substrate (object to be treated) is preferably a display window or a touch screen panel.
상술함 코팅층 형성방법은 기재상에 반사방지 특성을 갖는 세라믹 멀티층 코팅을 실시한 후에 바로 동일한 진공 증착기 내에서 곧이어 상기 표면 처리제를 이용한 오염방지 코팅층을 일괄공정으로 진행할 수 있어 증착 코팅공정을 단순화시켜 공정을 효율적으로 관리할 수 있는 장점을 갖는다. The above-described method of forming a coating layer simplifies the deposition coating process by applying a ceramic multi-layer coating with anti-reflection properties on the substrate and then immediately performing the anti-contamination coating layer using the surface treatment agent as a batch process in the same vacuum evaporator. It has the advantage of being able to manage efficiently.
또한, 본 발명에 따라 형성된 오염방지 코팅층은 오염방지 특성이 뛰어나며, 그 내구성 또한 우수하다.In addition, the anti-pollution coating layer formed according to the present invention has excellent anti-pollution properties and is also excellent in durability.
제조예 1Manufacturing Example 1
하기 화학식 2의 퍼플루오로폴리에테르계 변성 트리메톡시실란 구조의 화합물을 마련한다. 이때, 화학식 2의 화합물에서 중요한 기능기는 퍼플루오로폴리에테르 부분이며, Rf는 탄소수 1 내지4 사이의 1가의 퍼플루오로알킬기이고, 분자량이 약 1,000g/mol 이고, p/q 의 비율은 0.8 내지 1.2 사이의 범위이며, m은 0 이며, n은 5이다.A compound having a perfluoropolyether-based modified trimethoxysilane structure of the following formula (2) is prepared. At this time, the important functional group in the compound of Formula 2 is the perfluoropolyether moiety, Rf is a monovalent perfluoroalkyl group having 1 to 4 carbon atoms, the molecular weight is about 1,000 g/mol, and the p/q ratio is 0.8. It ranges from 1.2 to 1.2, m is 0, and n is 5.
Rf-(OCF2CF2)p-(OCF2)q-CF2CH2O-(CH2CH2O)m-(CH2)n-Si(OCH3)3--[화학식 2] Rf-(OCF2CF2)p-(OCF2)q-CF2CH2O-(CH2CH2O)m-(CH2)n-Si(OCH3)3--[Formula 2]
이어서, 냉각관과 교반기를 구비한 250ml크기의 3구 플라스크에 상기 화학식 2로 표기되는 화합물 50.00g과 불소계 용매인 HFE-7200 50.00g과 Triethanolamine 7,50g과 methanol 50.00g을 투입한 후 상온에서 30분간 교반한다. 온도를 천천히 높여 메탄올 완만한 환류의 온도에서 17시간 교반한 후, 불소계 용매인 FC-3283 50.00g을 넣고 교반한 후, 용액을 취한다. 이후 THF 용매로 유기물부분을 추출하여 제거하고, 진공으로 농축하여, 하기 화학식 1로 표시되는 퍼플루오로폴리에테르계 변성 실라트란(2,8,9-trioxaa-5-aza-1-silabicyclo〔3,3,3〕undecane) 구조의 화합물을 수득하였다. 화학식 1에서 Rf 가 1가의 퍼플루오로알킬기이고, 분자량이 약 1,000g/mol 이고, p/q 의 비율이 0.8 내지 1.2 사이의 범위이며, m이 0이며, n이 5이다.Next, 50.00 g of the compound represented by Formula 2, 50.00 g of HFE-7200, a fluorine-based solvent, 7,50 g of Triethanolamine, and 50.00 g of methanol were added to a 250 ml three-necked flask equipped with a cooling pipe and a stirrer, and then stirred at room temperature for 30 minutes. Stir for a minute. Slowly increase the temperature and stir for 17 hours at a gentle reflux temperature of methanol, then add 50.00 g of FC-3283, a fluorine-based solvent, stir, and take the solution. Afterwards, the organic portion was extracted and removed with THF solvent, concentrated in vacuum, and perfluoropolyether-based modified silatrane (2,8,9-trioxaa-5-aza-1-silabicyclo[3) represented by the following formula (1): A compound with the structure ,3,3〕undecane) was obtained. In Formula 1, Rf is a monovalent perfluoroalkyl group, the molecular weight is about 1,000 g/mol, the p/q ratio is in the range of 0.8 to 1.2, m is 0, and n is 5.
-[화학식 1] -[Formula 1]
제조예 2Production example 2
하기 화학식 2의 퍼플루오로폴리에테르계 변성 트리메톡시실란 구조의 화합물을 마련한다. 이때, 화학식 2의 화합물에서 중요한 기능기는 퍼플루오로폴리에테르 부분이며, Rf는 탄소수 1 내지4 사이의 1가의 퍼플루오로알킬기이고, 분자량이 약 1,000g/mol 이고, p/q 의 비율은 0.8 내지 1.2 사이의 범위이며, m은 1 이며, n은 3이다.A compound having a perfluoropolyether-based modified trimethoxysilane structure of the following formula (2) is prepared. At this time, the important functional group in the compound of Formula 2 is the perfluoropolyether moiety, Rf is a monovalent perfluoroalkyl group having 1 to 4 carbon atoms, the molecular weight is about 1,000 g/mol, and the p/q ratio is 0.8. It ranges from to 1.2, m is 1, and n is 3.
Rf-(OCF2CF2)p-(OCF2)q-CF2CH2O-(CH2CH2O)m-(CH2)n-Si(OCH3)3--[화학식 2] Rf-(OCF2CF2)p-(OCF2)q-CF2CH2O-(CH2CH2O)m-(CH2)n-Si(OCH3)3--[Formula 2]
냉각관과 교반기를 구비한 250ml크기의 3구 플라스크에 화학식 2로 표기되는 화합물 50.00g과 불소계 용매인 HFE-7200 50.00g과 Triethanolamine 7,50g 과 methanol 50.00g을 투입한 후 상온에서 30분간 교반한다. 온도를 천천히 높여 메탄올 완만한 환류의 온도에서 17시간 교반한 후, 불소계 용매인 FC-3283 50.00g 을 넣고 교반한 후, 용액을 취한다. 이후 THF 용매로 유기물부분을 추출하여 제거하고, 진공으로 농축하여, 하기 화학식 1로 표시되는 퍼플루오로폴리에테르계 변성 실라트란(2,8,9-trioxaa-5-aza-1-silabicyclo〔3,3,3〕undecane) 구조의 화합물을 수득하였다. 화학식 1에서 Rf 가 1가의 퍼플루오로알킬기이고, 분자량이 약 1,000g/mol 이고, /q 의 비율이 0.8 내지 1.2 사이의 범위이며, m이 1이며, n이 3이다.Add 50.00 g of the compound represented by Chemical Formula 2, 50.00 g of HFE-7200, a fluorine-based solvent, 7.50 g of Triethanolamine, and 50.00 g of methanol into a 250 ml three-necked flask equipped with a cooling pipe and a stirrer, and stir at room temperature for 30 minutes. . Slowly increase the temperature and stir for 17 hours at a gentle reflux temperature of methanol, then add 50.00 g of FC-3283, a fluorine-based solvent, stir, and take the solution. Afterwards, the organic portion was extracted and removed with THF solvent, concentrated in vacuum, and perfluoropolyether-based modified silatrane (2,8,9-trioxaa-5-aza-1-silabicyclo[3) represented by the following formula (1): A compound with the structure ,3,3〕undecane) was obtained. In Formula 1, Rf is a monovalent perfluoroalkyl group, the molecular weight is about 1,000 g/mol, the /q ratio is in the range from 0.8 to 1.2, m is 1, and n is 3.
-[화학식 1] -[Formula 1]
실시예 1Example 1
제조예 2에서 제조된 퍼플루오로폴리에테르계 변성 실라트란(화학식 1로 표시되며, Rf 가 1가의 퍼플루오로알킬기이고, 분자량이 약 1,000g/mol 이고, m이 1이며, n이 3인 화합물)을 20중량부가 되도록 불소용제(FC-3283)에 용해하여, 표면 처리 코팅제를 제조하였다. 알루미나로 제작된 타블렛에 상기 표면 처리 코팅제를 0.4g을 제공한 후 용매를 휘발시켜서 진공증착용 타블렛을 제조하였다. 진공증착기 내에서 아크릴계하드코팅이 실시된 아크릴쉬트에 플라스마처리 후에, SiO2 증착, Zr02 증착, SiO2 증착의 순서로, 세라믹계 멀티코팅을 실시한 후, 곧이어 상기 진공증착용 타블렛을 일렉트론 빔으로 가열하여, 오염방지코팅층을 약 0.2 나노미터 두께로 형성시켰다.Perfluoropolyether-modified silatrane prepared in Preparation Example 2 (represented by Chemical Formula 1, where Rf is a monovalent perfluoroalkyl group, molecular weight is about 1,000 g/mol, m is 1, and n is 3) Compound) was dissolved in a fluorine solvent (FC-3283) to make 20 parts by weight to prepare a surface treatment coating agent. A tablet for vacuum deposition was prepared by adding 0.4 g of the surface treatment coating agent to a tablet made of alumina and then volatilizing the solvent. After plasma treatment on an acrylic hard coating-coated acrylic sheet in a vacuum evaporator, ceramic-based multi-coating is performed in the order of SiO2 deposition, ZrO2 deposition, and SiO2 deposition, and then the vacuum deposition tablet is heated with an electron beam, An anti-pollution coating layer was formed to a thickness of about 0.2 nanometers.
실시예2Example 2
제조예 2에서 제조된 퍼플루오로폴리에테르계 변성 실라트란(화학식 1로 표시되며, Rf 가 1가의 퍼플루오로알킬기이고, 분자량이 약 1,000g/mol 이고, m이 1이며, n이 3인 화합물)을 20중량부가 되도록 불소용제(FC-3283)에 용해하여, 표면 처리 코팅제를 제조하였다. 알루미나로 제작된 타블렛에 상기 표면 처리 코팅제를 0.4g을 제공한 후 용매를 휘발시켜서 진공증착용 타블렛을 제조하였다. 진공증착기 내에서 아크릴계하드코팅이 실시된 아크릴쉬트에 플라스마처리 후에, SiO2 증착, Zr02 증착, SiO2 증착의 순서로, 세라믹계 멀티코팅을 실시한 후, 곧이어 상기 진공증착용 타블렛을 일렉트론 빔으로 가열하여, 오염방지 코팅층을 약 0.2 나노미터 두께로 형성시켰다.Perfluoropolyether-modified silatrane prepared in Preparation Example 2 (represented by Chemical Formula 1, where Rf is a monovalent perfluoroalkyl group, molecular weight is about 1,000 g/mol, m is 1, and n is 3) Compound) was dissolved in a fluorine solvent (FC-3283) to make 20 parts by weight to prepare a surface treatment coating agent. A tablet for vacuum deposition was prepared by adding 0.4 g of the surface treatment coating agent to a tablet made of alumina and then volatilizing the solvent. After plasma treatment on an acrylic hard coating-coated acrylic sheet in a vacuum evaporator, ceramic-based multi-coating is performed in the order of SiO2 deposition, ZrO2 deposition, and SiO2 deposition, and then the vacuum deposition tablet is heated with an electron beam, An anti-pollution coating layer was formed to a thickness of about 0.2 nanometers.
비교 실시예 1Comparative Example 1
퍼플루오로폴리에테르계 변성 트리메톡시실란(화학식 2로 표기되며 Rf 가 1가의 퍼플루오로알킬기이고, 분자량이 약 1,000g/mol 이고, m이 0이며, n이 5인 화합물)을 20중량부가 되도록 불소용제(FC-3283)에 용해하여, 표면 처리 코팅제를 제조하였다. 알루미나로 제작된 타블렛에 상기 표면 처리 코팅제를 0.4g을 제공한 후 용매를 휘발시켜서 진공증착용 타블렛을 제조하였다. 진공증착기 내에서 아크릴계하드코팅이 실시된 아크릴쉬트에 플라스마처리 후에, SiO2 증착, Zr02증착, SiO2 증착의 순서로, 세라믹계 멀티코팅을 실시한 후, 곧이어 상기 진공증착용 타블렛을 일렉트론 빔으로 가열하여, 오염방지 코팅층을 약 0.2 나노미터 두께로 형성시켰다.20 weight of perfluoropolyether-modified trimethoxysilane (a compound represented by Chemical Formula 2 where Rf is a monovalent perfluoroalkyl group, molecular weight is about 1,000 g/mol, m is 0, and n is 5) It was dissolved in a fluorine solvent (FC-3283) to prepare a surface treatment coating agent. A tablet for vacuum deposition was prepared by adding 0.4 g of the surface treatment coating agent to a tablet made of alumina and then volatilizing the solvent. After plasma treatment on an acrylic hard coating-coated acrylic sheet in a vacuum evaporator, ceramic-based multi-coating is performed in the order of SiO2 deposition, ZrO2 deposition, and SiO2 deposition, and then the vacuum deposition tablet is heated with an electron beam, An anti-pollution coating layer was formed to a thickness of about 0.2 nanometers.
비교 실시예2Comparative Example 2
퍼플루오로폴리에테르계 변성 트리메톡시실란(화학식 2로 표기되며 Rf 가 1가의 퍼플루오로알킬기이고, 분자량이 약 1,000g/mol 이고, m이 1이며, n이 3인 화합물)을 20중량부가 되도록 불소용제(FC-3283)에 용해하여, 표면 처리 코팅제를 제조하였다. 알루미나로 제작된 타블렛에 상기 표면 처리 코팅제를 0.4g을 제공한 후 용매를 휘발시켜서 진공증착용 타블렛을 제조하였다. 진공증착기 내에서 아크릴계하드코팅이 실시된 아크릴쉬트에 플라스마처리후에, SiO2 증착, Zr02 증착, SiO2 증착의 순서로, 세라믹계 멀티코팅을 실시한 후, 곧이어 상기 진공증착용 타블렛을 일렉트론 빔으로 가열하여, 오염방지 코팅층을 약 0.2 나노미터 두께로 형성시켰다.20 weight of perfluoropolyether-modified trimethoxysilane (compound represented by Chemical Formula 2, where Rf is a monovalent perfluoroalkyl group, molecular weight is about 1,000 g/mol, m is 1, and n is 3) It was dissolved in a fluorine solvent (FC-3283) to prepare a surface treatment coating agent. A tablet for vacuum deposition was prepared by adding 0.4 g of the surface treatment coating agent to a tablet made of alumina and then volatilizing the solvent. After plasma treatment on an acrylic hard coating-coated acrylic sheet in a vacuum evaporator, ceramic multi-coating is performed in the order of SiO2 deposition, ZrO2 deposition, and SiO2 deposition, and then the vacuum deposition tablet is heated with an electron beam, An anti-pollution coating layer was formed to a thickness of about 0.2 nanometers.
상술한 실시예 1 및 실시예 2 및 비교 실시예 1 및 비교 실시예 2에서 수득된 코팅층의 물성을 하기와 같은 방법으로 평가하였다.The physical properties of the coating layer obtained in Examples 1 and 2 and Comparative Examples 1 and 2 described above were evaluated in the following manner.
시험방법1Test method 1
내마모시험 :Abrasion resistance test:
접촉각 측정기(CEO사, Phoenix 150)를 사용하여 내마모시험 전 수접촉각을 측정한다. 마모시험기(대성정밀사)를 사용하여 고무지우개(직경 6mm, 경도 81A) 에 500g의 하중을 부여한 상황에서, 왕복거리 20mm, 분당 40회의 속도로 3,000회를 왕복한다. 이후 내마모 시험 후의 수접촉각을 측정한다. 이는 고무지우개를 이용하는 내마모시험이라 할 수 있다.Measure the water contact angle before the abrasion test using a contact angle meter (CEO, Phoenix 150). Using an abrasion tester (Daesung Precision Co., Ltd.), a load of 500g is applied to a rubber eraser (diameter 6mm, hardness 81A), and the rubber eraser (diameter 6mm, hardness 81A) is subjected to 3,000 round trips at a speed of 40 times per minute with a round trip distance of 20mm. Afterwards, the water contact angle after the abrasion resistance test is measured. This can be said to be an abrasion test using a rubber eraser.
시험방법2Test method 2
내약품성 시험 :Chemical resistance test:
접촉각 측정기(CEO사, Phoenix 150)를 사용하여 내약품 시험 전 수접촉각을 측정한다. 마모시험기(대성정밀사)를 사용하여 고무지우개(직경 6MM, 경도 81A) 에 500g의 하중을 부여한 상황에서, 99.5% 순도의 에탄올을 20초당 한 방울의 속도로 점적하면서왕복거리 20mm, 분당 40회의 속도로 1,000회를 왕복한다. 상온에서 4시간 이상 건조한 후, 내약품 시험 후의 수접촉각을 측정하였다. 이는 에탄올과 고무지우개를 이용하는 내약품성시험이라 할 수 있다.Measure the water contact angle before the chemical resistance test using a contact angle meter (CEO, Phoenix 150). Using an abrasion tester (Daesung Precision Co., Ltd.), a load of 500g was applied to a rubber eraser (diameter 6MM, hardness 81A), and ethanol of 99.5% purity was instilled at a rate of one drop per 20 seconds, with a reciprocating distance of 20mm and 40 times per minute. It makes 1,000 round trips at speed. After drying at room temperature for more than 4 hours, the water contact angle after the chemical resistance test was measured. This can be said to be a chemical resistance test using ethanol and a rubber eraser.
표 1을 참조하면, 내마모시험 후 접촉각 변화량을 살펴보면, 실시예 1 및 실시예 2의 경우에, 비교 실시예 1 및 비교 실시예 2와 비교해서 동등하거나, 상대적으로 적은 접촉각 변화량을 보이는 것을 확인할 수 있다. Referring to Table 1, looking at the amount of change in contact angle after the abrasion test, it can be seen that Examples 1 and 2 showed the same or relatively small amount of change in contact angle compared to Comparative Example 1 and Comparative Example 2. You can.
내약품시험 후 접촉각 변화량을 살펴보면, 실시예 1 및 실시예 2의 경우에, 비교 실시예 1 및 비교 실시예 2와 비교해서 상당히 작은 접촉각 변화량을 보이는 것을 확인할 수 있다. 상기 결과를 살펴보면, 제조예 1 과 제조예 2에서 제조한 퍼플루오로폴리에테르계 변성 실라트란 표면처리 화합물을 사용하여 증착한 코팅면이 퍼플루오로폴리에테르계 변성 트리메톡시실란 표면처리제를 사용하여 증착한 코팅면보다 우수한 수준의 내구성을 나타내는 것을 확인할 수 있다.Looking at the amount of change in contact angle after the chemical resistance test, it can be seen that Examples 1 and 2 show a significantly smaller amount of change in contact angle compared to Comparative Example 1 and Comparative Example 2. Looking at the above results, the coated surface deposited using the perfluoropolyether-based modified silatrane surface treatment compound prepared in Preparation Example 1 and Preparation Example 2 was coated using a perfluoropolyether-based modified trimethoxysilane surface treatment agent. It can be confirmed that it exhibits a level of durability that is superior to that of the deposited coated surface.
특히 내약품성이 상대적으로 우수함을 알 수 있다. 따라서 트리알콕시실란 화합물을 실라트란 화합물로 변형시에, 내구성이 향상되는 것을 알 수 있다. In particular, it can be seen that chemical resistance is relatively excellent. Therefore, it can be seen that durability is improved when a trialkoxysilane compound is transformed into a silatrane compound.
본 발명에 따른 표면 처리제는 디스플레이 윈도우 등의 광학제품 또는 세라믹계열의 반사방지 코팅의 최종 보호코팅 형성에 적용됨으로서, 작업성이 우수한 오염방지 코팅방법으로 이용될 수 있다. The surface treatment agent according to the present invention can be applied to form the final protective coating of optical products such as display windows or ceramic-based anti-reflective coatings, and can be used as an anti-pollution coating method with excellent workability.
Claims (5)
-[화학식 1]
(화학식 1은 퍼플루오로폴리에테르계 변성 실라트란(2,8,9-trioxaa-5-aza-1-silabicyclo〔3,3,3〕undecane) 구조의 화합물로서, 중요한 기능기인 퍼플루오로폴리에테르 부분은 수평균 분자량이 500 내지 4,000이며, Rf는 탄소수 1 내지 4 사이의 1가 내지는 2가의 퍼플루오로알킬기이고, p/q 의 비율은 0.8 내지 1.2 사이의 범위이며, m은 0, 1 또는 2 이며, n은 3 또는 5이다.)A surface treatment agent comprising a perfluoropolyether-modified silatrane compound having a perfluoropolyether-modified silatrane structure of the following formula (1), and applicable to vacuum deposition using electron beam direct heating.
-[Formula 1]
(Formula 1 is a compound with a perfluoropolyether-modified silatrane (2,8,9-trioxaa-5-aza-1-silabicyclo[3,3,3]undecane) structure, and contains perfluoropoly, which is an important functional group. The ether portion has a number average molecular weight of 500 to 4,000, Rf is a monovalent or divalent perfluoroalkyl group having 1 to 4 carbon atoms, the p/q ratio is in the range of 0.8 to 1.2, and m is 0, 1. or 2, and n is 3 or 5.)
상기 타블렛을 일렉트론 빔으로 직접 가열하여 기화된 표면 처리 화합물 기재표면에 바로 증착시킴으로서 코팅층을 형성하는 단계를 포함하는 것을 특징으로 하는 코팅층 형성방법.
--[화학식 1]
(화학식 1은 퍼플루오로폴리에테르계 변성 실라트란(2,8,9-trioxaa-5-aza-1-silabicyclo〔3,3,3〕undecane) 구조의 화합물로서, 중요한 기능기인 퍼플루오로폴리에테르 부분은 수평균 분자량이 500 내지 4,000이며, Rf는 탄소수 1 내지 4 사이의 1가 내지는 2가의 퍼플루오로알킬기이고, p/q 의 비율은 0.8 내지 1.2 사이의 범위이며, m은 0, 1 또는 2 이며, n은 3 또는 5이다.)Preparing a tablet for forming a coating layer by impregnating a porous tablet made of ceramic with a surface treatment agent containing a surface treatment compound of the following formula (1); and
A coating layer forming method comprising forming a coating layer by directly heating the tablet with an electron beam and depositing the vaporized surface treatment compound directly on the surface of the substrate.
--[Formula 1]
(Formula 1 is a compound with a perfluoropolyether-modified silatrane (2,8,9-trioxaa-5-aza-1-silabicyclo[3,3,3]undecane) structure, and contains perfluoropoly, which is an important functional group. The ether portion has a number average molecular weight of 500 to 4,000, Rf is a monovalent or divalent perfluoroalkyl group having 1 to 4 carbon atoms, the p/q ratio is in the range of 0.8 to 1.2, and m is 0, 1. or 2, and n is 3 or 5.)
일렉트론 빔으로 직접 가열하여 기재 상에 세라믹 멀티코팅층을 형성한 이후 동일한 진공 증착기 내에서 곧바로 수행되는 것을 특징으로 하는 코팅층 형성방법.The method of claim 3, wherein the coating layer forming method is
A coating layer forming method characterized in that a ceramic multi-coating layer is formed on a substrate by direct heating with an electron beam and then immediately performed in the same vacuum evaporator.
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US5945555A (en) | 1997-11-28 | 1999-08-31 | Dow Corning Toray Silicone Co., Ltd. | Silatrane derivative, method for manufacturing same, adhesion promoter, and curable silicone composition |
KR100959850B1 (en) | 2007-11-27 | 2010-05-27 | 나노크리스탈주식회사 | Surface Treating Compound And Method Forming Coating Layer Including The Same |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US5945555A (en) | 1997-11-28 | 1999-08-31 | Dow Corning Toray Silicone Co., Ltd. | Silatrane derivative, method for manufacturing same, adhesion promoter, and curable silicone composition |
KR100959850B1 (en) | 2007-11-27 | 2010-05-27 | 나노크리스탈주식회사 | Surface Treating Compound And Method Forming Coating Layer Including The Same |
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