KR20230061092A - Inspection System of Ultrasonic Waterfall Type - Google Patents

Abstract

The present invention relates to an ultrasonic waterfall type inspection device which forms a flow path on an ultrasonic wave irradiation path to discharge water so that a water film is always formed at the ultrasonic irradiation position on an object to be inspected, thereby preventing inspection errors, and enabling accurate inspection regardless of the shape of the object to be inspected. The ultrasonic waterfall type inspection device according to the present invention may comprise: a waterfall module which includes an inflow chamber receiving water from a water supply device, and a discharge channel formed to extend downward from the inflow chamber to a predetermined length to discharge water downward; and an ultrasonic transducer which is installed coaxially on the upper surface of the discharge channel of the waterfall module to irradiate ultrasonic waves to the object to be inspected through the discharge channel and detect signals reflected from the object to be inspected.

Description

Ultrasonic Waterfall Type Inspection System {Inspection System of Ultrasonic Waterfall Type}

The present invention relates to an ultrasonic inspection apparatus, and more particularly, by dropping water on an inspection subject such as a display panel such as an OLED panel, a wafer, or an ingot, and irradiating ultrasonic waves using the falling water as a medium to detect the inspection subject in a nondestructive manner. It relates to an ultrasonic waterfall type inspection device capable of inspecting abnormalities.

In general, in the manufacturing process of liquid crystal display devices, organic light emitting display (OLED) devices, semiconductor devices, etc., performance and increasing reliability.

Conventionally, as a method of inspecting a display panel, semiconductor wafer, or ingot, when light is irradiated on a transparent member such as glass or liquid crystal display panel, wafer, ingot, etc. constituting the display panel using a light source, defects or foreign matter are generated in the part. There is a method in which light reflection occurs and detects it to determine whether or not a test object such as a display panel or a wafer or an ingot is defective.

Among display devices, an organic light emitting display (OLED) device has advantages of a wide viewing angle, excellent contrast, and a fast response speed, and thus has attracted attention as a next-generation display device.

Display panels such as organic light emitting display devices may have various types of defects during manufacturing, and foreign matter, smudges (stains), surface scratches, and air bubbles on the display panel adversely affect the performance of the display, so they are thoroughly detected through preliminary inspection. /should be removed.

As a method of inspecting a display panel, a macro inspection method in which foreign substances are detected with the naked eye and a micro inspection method in which defective states are precisely detected using a microscope are mainly used.

However, since visual inspection has a disadvantage in that precision is low and microscopic inspection requires a lot of inspection time, new inspection methods such as a non-destructive inspection method using ultrasonic waves are required.

An ultrasonic inspection apparatus is an apparatus that irradiates an object to be inspected with ultrasonic waves, receives reflected or transmitted ultrasonic waves with an ultrasonic transducer (also referred to as 'probe'), and images them.

For example, when the inspection object is a display panel such as an OLED panel, it is necessary to detect minute defects, and high resolution is required for an ultrasonic inspection device. The ultrasonic inspection apparatus can obtain a higher resolution as the frequency of the ultrasonic wave used increases, but on the other hand, the higher the frequency of the ultrasonic wave used, the greater the attenuation and the lower the S/N ratio. Since water has a lower degree of attenuation of ultrasonic waves than air, a conventional ultrasonic inspection apparatus is configured to submerge an object to perform ultrasonic inspection in a state in which water is filled between the tip of the probe and the surface of the object to be inspected. .

Then, the ultrasonic inspection apparatus focuses on the interface to be observed inside the inspection object, irradiates ultrasonic waves while maintaining a constant distance between the tip of the probe and the surface of the inspection object, and visualizes the obtained result, It is designed to know the location and depth of the defect.

As an example of such an ultrasonic inspection device, there is an ultrasonic waterfall type OLED panel inspection device disclosed in Korean Patent Registration No. 10-2132673. The ultrasonic waterfall type OLED panel inspection device is an oil film forming unit that forms an oil film by flowing water to the inspection subject, transmits ultrasonic waves to the inspection subject on which the oil film is formed, and detects the signal reflected by the difference in density of the inspection subject When inspecting air bubbles inside the OLED panel using ultrasonic waterfall non-destructive testing, including a bubble detection unit that outputs as a signal and an image processor that converts the bubble detection signal detected by the bubble detection unit into an image, the water layer is equalized to promote accuracy in OLED panel inspection.

However, conventional ultrasonic waterfall inspection devices, including the inspection device of the registered patent, require that the distance between the oil film forming unit and the inspection object to form an oil film by flowing water is close to the inspection object, so that the inspection object is a flat plane. Inspection is possible only when a uniform oil film is formed, and if the inspection object has a three-dimensional shape, such as a sphere or a cylinder, rather than a plane, an empty space is formed in the oil film, making accurate ultrasonic non-destructive testing impossible. there is a limit to

In addition, even when an object to be inspected has a flat shape such as a display panel, an oil film is not uniformly formed on the plane of the object to be inspected and an empty space is often formed. In this case, an error occurs in inspection.

Republic of Korea Patent No. 10-2132673 (registered on July 6, 2020) Republic of Korea Patent Registration No. 10-1473104 (registered on December 9, 2014)

The present invention is to solve the above problems, and an object of the present invention is to form a flow path through which water is discharged on the ultrasonic irradiation path so that an oil film can always be formed at the ultrasonic irradiation position on the test object, so that inspection errors occur It is an object of the present invention to provide an ultrasonic waterfall type inspection device capable of performing an accurate inspection regardless of the shape of an object to be inspected.

An ultrasonic waterfall inspection device according to the present invention for achieving the above object is formed with an inlet chamber receiving water from a water supply device, and extending downward to a predetermined length in the inlet chamber to discharge water to the lower side. a waterfall module having a discharge passage formed thereon; and an ultrasonic transducer coaxially installed above the discharge passage of the waterfall module, irradiating ultrasonic waves to the object through the discharge passage, and detecting a signal reflected from the object.

In the waterfall module, a module head in which a transducer installation hole through which the ultrasonic transducer is installed is formed to penetrate downward, the inlet chamber is formed at the upper end, and a discharge passage communicating with the central part of the inlet chamber is formed in the center of the module head vertically. It may include a tubular waterfall guide formed to penetrate.

At least one water supply passage may be formed in the module head to guide water supplied from the water supply device to the inlet chamber while having one end connected to the water supply device and the other end communicating with the inlet chamber.

A periphery of the inlet chamber communicates with a lower end of the water supply passage, and a vortex prevention bump for preventing vortex flow of water supplied through the water supply passage may be formed on a lower surface of the periphery of the inlet chamber to protrude at a predetermined height.

In addition, the lower end of the ultrasonic transducer may be made of a curved surface concave upward.

The periphery of the upper inlet of the discharge passage may be made of a curved surface having a curvature corresponding to that of the lower end of the ultrasonic transducer.

Alternatively, the periphery of the upper inlet of the discharge passage may be formed horizontally with respect to the ground.

The lower end of the waterfall module may be formed as a tapered surface inclined downward toward the outlet of the discharge passage from the outer periphery.

At this time, by installing a plurality of laser irradiators for irradiating lasers toward the focusing point of the ultrasonic transducer on the tapered surface, the inspection can be performed by matching the surface of the object to the focusing position of the lasers irradiated from the plurality of laser irradiators. there is.

An ultrasonic waterfall inspection device according to another aspect of the present invention is installed to be slidably lateral to the lower end of the waterfall module, and selectively communicates with the outlet of the discharge passage according to the position movement in the lateral direction while It may further include a discharge port adjusting member in which a plurality of variable discharge ports capable of changing the size or shape of the outlet of the discharge passage are formed to pass through in the vertical direction.

A dripping water correction passage may be formed at an outlet portion of a lower end of the discharge passage to be inclined downward in a movement direction of the waterfall module.

The discharge direction adjusting unit formed with the falling water correction passage is rotatably installed around a vertical axis at the lower end of the waterfall module, and the discharge direction adjusting unit rotates according to the moving direction of the waterfall module to change the direction of the falling water correction passage to the waterfall. It can be adjusted to match the moving direction of the module.

A plurality of flow prevention plates for preventing the water supplied from the water supply device from being concentrated on both sides of the inlet chamber may be vertically arranged in a zigzag pattern.

In addition, two separator plates spaced apart at intervals of 180 degrees may be vertically installed on the inner surface of the inlet chamber to divide the inlet chamber into left and right directions.

Preferably, the length of the discharge passage is smaller than the focusing distance of the ultrasonic transducer, and the diameter or width of the discharge passage is larger than the ultrasonic beam width at the focusing position of the ultrasonic transducer and smaller than the diameter of the lower end of the ultrasonic transducer.

According to the present invention, the discharge passage of the waterfall module through which water is discharged toward the test object is arranged coaxially with the ultrasonic transducer, so that the ultrasonic beam irradiated from the ultrasonic transducer is always discharged through the discharge passage to the test object as a medium. It can be reflected after irradiation. Therefore, even if no effort is made to form a uniform oil film on the surface of the object to be inspected, an accurate inspection can always be performed.

In particular, when the test object has a curved surface such as a cylinder or a three-dimensional shape, in the existing test device, water falling to the surface of the test object flows down from the test object and an oil film may not be formed right below the ultrasonic transducer. The inspection device of the present invention has an advantage in that ultrasonic non-destructive inspection can be accurately performed regardless of the shape of the inspection object because the ultrasonic beam is irradiated through the discharge passage of the waterfall module.

1 is a perspective view showing an ultrasonic waterfall type inspection device according to an embodiment of the present invention.
2 is a longitudinal cross-sectional view of an ultrasonic waterfall type inspection apparatus according to an embodiment of the present invention.
3 is a cross-sectional view showing some configurations and operating principles of an ultrasonic waterfall type inspection device according to the present invention.
4 is a cross-sectional view of a main part of an ultrasonic waterfall type inspection device according to another embodiment of the present invention.
5 is a cross-sectional view of main parts of an ultrasonic waterfall type inspection device according to another embodiment of the present invention.
6 is a view showing an example of performing a non-destructive test on a cylindrical test object using an ultrasonic waterfall type test device according to an embodiment of the present invention.
7 is a cross-sectional view of main parts of an ultrasonic waterfall type inspection device according to another embodiment of the present invention.
8 is a cross-sectional view showing main parts of the water falling state according to the low-speed movement and high-speed movement of the ultrasonic waterfall type inspection device according to the present invention.
9 is a cross-sectional view of a main part of an ultrasonic waterfall type inspection device according to another embodiment of the present invention.
10A and 10B are a cross-sectional view and a bottom view of main parts showing a modified example of the ultrasonic waterfall type inspection device shown in FIG. 9, respectively.
11 is a cross-sectional view of a main part of an ultrasonic waterfall type inspection device according to another embodiment of the present invention.
12 is a bottom view of the ultrasonic waterfall inspection device shown in FIG. 11;
FIG. 13 is a cross-sectional view of main parts of a modified example of the ultrasonic waterfall type inspection device shown in FIG. 11 .
14A is a longitudinal sectional view of an ultrasonic waterfall type inspection apparatus according to another embodiment of the present invention.
FIG. 14B is a cross-sectional view along line II of FIG. 14A.

The embodiments described in this specification and the configurations shown in the drawings are only one preferred example of the disclosed invention, and there may be various modifications that can replace the embodiments and drawings in this specification at the time of filing of the present application.

Hereinafter, referring to the accompanying drawings, the ultrasonic waterfall type inspection device will be described in detail according to the following embodiments. Like symbols in the drawings indicate like components.

1 to 3, the ultrasonic waterfall inspection apparatus according to an embodiment of the present invention includes a waterfall module 100 including a module head 110 and a waterfall guide 120, and a module head It includes an ultrasonic transducer 200 installed in the center of (110).

A transducer installation hole 111 in which the ultrasonic transducer 200 is installed is formed in the central portion of the module head 110 so as to penetrate downward. Also, on both sides of the module head 110, a plurality of water supply passages 112 connected to a water supply device (not shown) are formed to extend downward by being bent in an approximate 'L' shape. The upper end of the water supply passage 112 is connected to a water supply device (not shown) through a hose of the water supply device (not shown) to receive water. The lower end of the water supply passage 112 communicates with the inlet chamber 121 partitioned between the lower end of the module head 110 and the upper end of the waterfall guide 120 to allow water supplied from a water supply device (not shown) to flow in. It is guided into the chamber 121.

The module head 110 is connected to the linear movement device configured above the test stage (S) on which the test object (P) is placed, and the module head 110 is connected to the linear movement device while the test stage (S) is fixed. It may be configured to cause relative movement between the object P and the ultrasound transducer 200 of the module head 110 by moving in up and down, front and back and / or left and right directions. Alternatively, the module head 110 is fixed to a support structure such as a frame fixedly installed on the upper side of the inspection stage (S), and the inspection stage (S) is configured to be movable in up and down, front and back and / or left and right directions, so that the inspection target Relative motion may occur between (P) and the ultrasonic transducer 200 of the module head 110.

The waterfall guide 120 has a substantially cylindrical shape and is installed at the lower end of the module head 110 . Although the module head 110 and the waterfall guide 120 may be integrally made, they may be manufactured individually and then coupled to each other using known fastening means such as screws, bolts, clamping mechanisms, or welding.

At the upper end of the waterfall guide 120, an inlet chamber 121 communicating with the lower end of the water supply passage 112 and receiving water is formed, and a discharge passage 122 communicating with the central part of the inlet chamber 121 is formed at the central part. ) is formed to penetrate vertically. The discharge passage 122 is disposed coaxially with the ultrasonic transducer 200 and has a predetermined length and diameter from the upper end to the lower end of the waterfall guide 120 . Therefore, since ultrasonic waves irradiated from the ultrasonic transducer 200 are irradiated to the test object P through the water discharged through the discharge passage 122, the discharge passage 122 through which water is always discharged regardless of the shape of the test object P. ) through which ultrasonic waves can be irradiated to perform inspection.

As shown in FIG. 3, the length of the discharge passage 122 is smaller than the focusing distance of the ultrasonic transducer 200, and the diameter of the discharge passage 122 (when the discharge passage has a non-circular cross section, the width of the discharge passage) The smallest width) is greater than the ultrasonic beam width at the focusing position of the ultrasonic transducer 200 and smaller than the diameter of the lower end of the ultrasonic transducer 200. The ultrasonic beam width irradiated from the ultrasonic transducer 200 is focused based on the focusing position and then spreads. Therefore, when the length of the discharge passage 122 is longer than the focusing distance of the ultrasonic transducer 200 or the diameter of the discharge passage 122 is smaller than the ultrasonic beam width at the focusing position, the ultrasonic signal is generated by the interference of the discharge passage 122. Distortion may occur, which may significantly degrade the accuracy of inspection. Preferably, the diameter of the discharge passage 122 is formed to be larger than the ultrasonic beam width irradiated from the ultrasonic transducer 200 to completely exclude interference of the ultrasonic beam by the discharge passage 122 .

Depending on the type or specification of the ultrasonic transducer 200 mounted on the module head 110, the focusing position of the ultrasonic beam may change. At this time, the waterfall guide ( 120) may be easily detachable from the module head 110 so that the discharge passage 122 can be replaced with one having a different length and diameter.

Alternatively, in order to properly change the length and diameter of the discharge passage 122 in response to the change in the focusing position of the ultrasonic beam of the ultrasonic transducer 200, the waterfall guide 120 is divided into a plurality of upper and lower parts, The vertical position of the pole guide 120 may be adjusted, or the lower waterfall guide 120 may be configured to be detachable from the upper waterfall guide 120.

The inlet chamber 121 may be formed in the shape of a concave disc-shaped groove at the upper end of the waterfall guide 120, and the upper surface of the inlet chamber 121 may be closed by the lower surface of the module head 110. That is, the lower surface of the module head 110 may become the upper surface of the inflow chamber 121 . The central part of the inflow chamber 121 communicates with the upper end of the discharge passage 122, and the water supplied into the inlet chamber 121 is discharged to the outside through the discharge passage 122 in the central part. The bottom surface of the inflow chamber 121 may be formed horizontally with respect to the ground as a whole. However, when the water introduced into the inlet chamber 121 directly flows into the discharge passage 122 through the upper end of the discharge passage 122, the flow rate is small, so the water discharged through the discharge passage 122 Since a cavity is formed without filling the whole, the accuracy of measurement using ultrasonic waves may be deteriorated. Accordingly, a dam 129 is formed at a predetermined height along the periphery of the upper inlet of the discharge passage 122 so that a sufficient amount of water is stored in the inflow chamber 121 and then introduced into the discharge passage 122. desirable.

The periphery of the inflow chamber 121 communicates with the lower end of the water supply passage 112, and the water supply passage 112 communicates with the lower surface of the periphery of the inlet chamber 121 communicating with the water supply passage 112. The vortex prevention bump 123 for preventing may be formed to protrude at a certain height. Therefore, the water supplied into the inlet chamber 121 through the water supply passage 112 flows over the vortex barrier 123 toward the discharge passage 122 and falls through the discharge passage 122 to be discharged.

In addition, a plurality of posts 121a supporting an upper surface of the inlet chamber 121 may be additionally formed inside the inlet chamber 121 so as to maintain a constant space inside the inlet chamber 121 .

The ultrasonic transducer 200 is installed in the transducer installation hole 111 of the module head 110, is coaxially disposed above the discharge passage 122 of the waterfall guide 120, and passes through the discharge passage 122. It is designed to irradiate the test object (P) with ultrasonic waves using water discharged to the outside as a medium and detect the signal reflected from the test object (P), and can be configured by applying a known transducer. The signal received from the ultrasonic transducer 200 is converted into a digital signal and transmitted to an image processor (not shown), then an image is created in the image processor (not shown), and the image made by the image processor (not shown) is analyzed and inspected. A defect of the object P is detected.

The lower end of the ultrasonic transducer 200 is disposed immediately above the upper inlet of the discharge passage 122, and the water supplied into the inlet chamber 121 passes through the inlet at the upper end of the discharge passage 122. ), the lower end of the ultrasonic transducer 200 may be formed as an upwardly concave curved surface as shown in FIGS.

At this time, as shown in FIG. 4, the lower end of the ultrasonic transducer 200 is made of a curved surface concave upward, and the periphery of the upper inlet of the discharge passage 122 also has a curvature corresponding to the curved surface of the lower end of the ultrasonic transducer 200. It may be made of a curved surface. However, as shown in FIG. 5 , even when the lower end of the ultrasonic transducer 200 is formed of an upwardly concave curved surface, the periphery of the upper inlet of the discharge passage 122 may be formed horizontally with respect to the ground. At this time, it is preferable that the dam 129 is formed at a predetermined height along the rim of the upper inlet of the discharge passage 122 .

The ultrasonic waterfall type inspection device configured as described above operates as follows.

The test object P is placed on the test stage S, and the waterfall guide 120 of the waterfall module 100 is positioned to be spaced apart from the test object P by a predetermined distance. Subsequently, when water is supplied from a water supply device (not shown), water is supplied into the inlet chamber 121 through the water supply passage 112 of the module head 110 .

The water supplied into the inflow chamber 121 is introduced into the discharge passage 122 through the upper inlet of the central discharge passage 122 and then flows downward to fall onto the object P. At this time, ultrasonic waves are irradiated downward through the ultrasonic transducer 200. Since the ultrasonic transducer 200 and the discharge passage 122 are arranged coaxially, the ultrasonic beam converts the water falling through the discharge passage 122 into a medium. and is irradiated as the inspection target (P). The ultrasonic transducer 200 receives a signal reflected from the test object P, converts it into an electrical signal, and transmits the signal to an image processor (not shown).

In this way, when the ultrasonic beam is irradiated from the ultrasonic transducer 200 to the test object P to perform the test, the module head 110 and the waterfall guide 120 are attached to the linear motion device configured on the upper side of the test stage S. As a result, the entire surface of the object P is inspected while relatively moving left and right and/or forward and backward with respect to the object P.

In the ultrasonic waterfall type inspection apparatus of the present invention as described above, the discharge passage 122 of the waterfall module 100 through which water is discharged toward the inspection object P is arranged coaxially with the ultrasonic transducer 200, so that the ultrasonic wave The ultrasonic beam irradiated from the transducer 200 is always irradiated to the test object P using water discharged through the discharge passage 122 as a medium and then reflected. Therefore, even if no effort is made to form a uniform oil film on the surface of the inspection object P, an accurate inspection can always be performed.

In particular, as shown in FIG. 6, when the test object P has a curved surface such as a cylinder or a three-dimensional solid shape, in the existing test device, water falling to the surface of the test object P is removed from the test object P. Although an oil film is not formed immediately below the ultrasonic transducer 200 because it flows down, the inspection device of the present invention irradiates the water falling through the discharge passage 122 of the waterfall module 100 with an ultrasonic beam, so that the inspection object (P ), ultrasonic non-destructive testing can be performed accurately regardless of the shape.

On the other hand, as described above, when the ultrasonic transducer 200 and the discharge passage 122 are arranged coaxially and an ultrasonic beam is irradiated to the object P to perform a waterfall test, the ultrasonic transducer 200 irradiates the object P. As shown in FIG. 7, the lower end of the waterfall guide 120 is inclined downward toward the outlet of the discharge passage 122 from the outside in order to accurately position the inspection object P at the focusing position of the ultrasonic beam to be. A tapered surface 124 may be formed, and a plurality of laser irradiators 130 may be installed on the tapered surface 124 to irradiate lasers toward a focusing point of an ultrasonic beam irradiated from the ultrasonic transducer 200 . Therefore, the user can visually check the focusing position of the ultrasonic beam through the focusing position of the laser irradiated from the plurality of laser irradiators 130 and match the surface of the object P to the ultrasonic beam focusing position to accurately perform the inspection. there is.

As described above, when discharging water through the discharge passage 122 while moving the waterfall module 100 relative to the upper side of the test object P, when the moving speed of the waterfall module 100 is fast, FIG. As shown in the drawing of (B), the water column falling from the discharge passage 122 is bent in the opposite direction of the moving direction and falls to the test object P, and the ultrasonic beam irradiated from the ultrasonic transducer 200 pours water into the medium. Therefore, it may not be possible to irradiate the test object P.

Therefore, as shown in FIG. 9 , a falling water correction passage 126 inclined downward in the moving direction of the waterfall module 100 is formed at the lower end of the discharge passage 122 to correct the falling direction of water.

At this time, if the movement direction of the waterfall module 100 is changed, the inclination direction of the falling water correction passage 126 should also change. As shown in FIGS. The discharge direction adjusting unit 125 formed at an angle of 126 is rotatably installed around a vertical axis so that the discharge direction adjusting unit 125 rotates according to the moving direction of the waterfall module 100 to form a water droplet correction path 126. The direction of can be adjusted to match the movement direction of the waterfall module 100. At this time, the discharge direction adjusting unit 125 is automatically rotated by an automatic rotation means including a motor (not shown) and a power transmission member (not shown) such as a gear or belt that transmits power of the motor to the discharge direction adjusting unit 125. It is possible to change the direction of the falling water correction passage 126 by rotating to .

In addition, in order to be able to change the diameter and/or shape of the lower part of the discharge passage 122 in response to the change in ultrasonic beam width according to the change in the ultrasonic transducer 200, as shown in FIGS. 11 and 12, water An outlet adjusting member 140 having a plurality of variable outlets 141 having different diameters and/or shapes passing through in the vertical direction may be installed at the lower end of the pole guide 120 so as to slide sideways. The discharge port control member 140 is installed to be slidable in the lateral direction at the lower end of the waterfall guide 120, and according to the positional movement of the discharge port control member 140 in the lateral direction, among the plurality of variable discharge ports 141 Any one of them may be selectively communicated with the outlet at the lower end of the discharge passage 122 and the size or shape of the outlet of the discharge passage 122 may be changed.

The plurality of variable discharge ports 141 formed in the discharge port adjusting member 140 may all be formed in a straight line in the vertical direction, but as described above, to respond to the change in the falling direction of water when the waterfall module 100 moves at high speed At least one variable discharge port 141 may be a falling water correction passage 126 inclined downward in the moving direction of the waterfall module 100 (see FIG. 13 ).

Handles 142 may be provided at both ends of the outlet control member 140 so that the user can easily slide the outlet control member 140 in a lateral direction with respect to the waterfall guide 120 .

In addition, when the waterfall module 100 moves and drops water through the discharge passage 122, the water inside the inlet chamber 121 at the top of the waterfall guide 120 is concentrated to one side, and the water flows into the discharge passage 122. There may be cases where this does not flow smoothly. In order to prevent this, as shown in FIGS. 14A and 14B, two separator plates 127 spaced apart at intervals of 180 degrees are placed on the inner surface of the inlet chamber 121 to divide the inlet chamber 121 into left and right directions in the vertical direction. The water supplied from both upper ends of the inlet chamber 121 flows by arranging a plurality of flow prevention plates 128 vertically in a zigzag form in a space partitioned vertically and separated from each other by the separator 127. It is made to flow along the complicated path of the prevention plate 128, whereby even if the waterfall module 100 moves at a high speed, it is possible to effectively suppress the water from being concentrated in one direction. The plurality of flow prevention plates 128 are alternately attached to and spaced apart from each other on the inner surface of the inlet chamber 121 and the outer surface of the converter installation hole 111 to form a zigzag water flow path.

In the above, the present invention has been described in detail with reference to the examples, but those skilled in the art to which the present invention belongs will be able to make various substitutions, additions, and modifications without departing from the technical idea described above. Of course, it should be understood that such modified embodiments also belong to the protection scope of the present invention, which is defined by the appended claims below.

P: test subject S: test stage
100: waterfall module 110: module head
111: converter installer 112: water supply passage
120: waterfall guide 121: inflow chamber
122: discharge flow path 123: vortex prevention bump
124: tapered surface 125: discharge direction adjustment unit
126: falling water correction path 127: separator plate
128: flow prevention plate 129: dam
130: laser irradiator 140: discharge port control member
141: variable discharge port 142: handle part
200: ultrasonic transducer

Claims (14)

a waterfall module having an inlet chamber receiving water from a water supply device and a discharge passage extending downward to a predetermined length in the inlet chamber and discharging water downward; and,
An ultrasonic transducer installed coaxially on the upper side of the discharge passage of the waterfall module, irradiating ultrasonic waves to the test object through the discharge passage, and detecting a signal reflected from the test object;
Ultrasonic waterfall method inspection device comprising a. The waterfall module according to claim 1, wherein the waterfall module includes: a module head in which a transducer installation hole through which the ultrasonic transducer is installed is formed to penetrate downward; Ultrasonic waterfall method inspection apparatus including a tubular waterfall guide in which the discharge passage is formed to penetrate vertically. The ultrasonic water according to claim 2, wherein at least one water supply passage is formed on the module head to guide water supplied from the water supply device to the inlet chamber while one end is connected to the water supply device and the other end communicates with the inlet chamber. Pole type inspection device. The method of claim 3, wherein the periphery of the inlet chamber communicates with the lower end of the water supply passage, and a vortex prevention bump protrudes at a certain height from the lower surface of the periphery of the inlet chamber to prevent vortex flow of water supplied through the water supply passage Ultrasonic waterfall type inspection device formed to be The ultrasonic waterfall inspection apparatus according to any one of claims 1 to 3, wherein the lower end of the ultrasonic transducer has a curved surface concave upward. [Claim 6] The ultrasonic waterfall inspection device according to claim 5, wherein the periphery of the upper inlet of the discharge passage has a curved surface having a curvature corresponding to that of the lower end of the ultrasonic transducer. The ultrasonic waterfall inspection apparatus according to any one of claims 1 to 3, wherein the periphery of the upper inlet of the discharge passage is formed horizontally with respect to the ground. [4] The ultrasonic waterfall inspection device according to any one of claims 1 to 3, wherein the lower end of the waterfall module has a tapered surface that slopes downward from the outside toward the outlet of the discharge passage. The method of claim 8, wherein a plurality of laser irradiators are installed on the tapered surface to irradiate lasers toward the focusing point of the ultrasonic transducer, and the surface of the test object is aligned with the focusing position of the lasers emitted from the plurality of laser irradiators. Ultrasonic waterfall method inspection device that performs. The method of claim 1, wherein the waterfall module is slidably installed in a lateral direction at the lower end of the waterfall module, and the size or shape of the outlet of the discharge passage can be changed while selectively communicating with the outlet of the discharge passage according to the positional movement in the lateral direction. Ultrasonic waterfall type inspection apparatus further comprising a discharge port adjusting member in which a plurality of variable discharge ports are formed to pass through in the vertical direction. The ultrasonic waterfall inspection device according to claim 1, wherein a falling water correction passage is formed at an outlet of the lower end of the discharge passage, inclined downward in a moving direction of the waterfall module. 12. The method of claim 11, wherein the discharge direction adjustment unit formed with the dripping water correction passage is rotatably installed around a vertical axis at the lower end of the waterfall module, and the discharge direction adjustment unit rotates according to the moving direction of the waterfall module to correct the falling water. Ultrasonic waterfall type inspection device that adjusts the direction of the flow path to match the moving direction of the waterfall module. The method of claim 1, wherein two partition plates spaced apart at an interval of 180 degrees are vertically installed on an inner surface of the inlet chamber to divide the inlet chamber into left and right directions, and spaces on both sides of the inlet chamber are partitioned by the partition plates. Ultrasonic waterfall type inspection device in which a plurality of flow prevention plates are arranged in a zigzag shape up and down for suppressing the water supplied from the water supply device to one side. The ultrasonic waterfall method according to claim 1, wherein the length of the discharge passage is smaller than the focusing distance of the ultrasonic transducer, and the diameter or width of the discharge passage is larger than the ultrasonic beam width at the focusing position of the ultrasonic transducer and smaller than the diameter of the lower end of the ultrasonic transducer. inspection device.

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