KR20220123936A - Method for program updating of passive device using automated guided vehicle in automated material handling system - Google Patents

Abstract

The present invention relates to a technology for transmitting program update information for a passive device, which operates through RF communications with an automated guide vehicle (AGV) moving along rails under the control of an upper-level controller, through the AGV while material handling information is transmitted to/received from the AGV, thereby enabling a program of the passive device to be updated without affecting material handling work. A method for updating the program of the passive device using the AGV in an automated material handling system (AMHS) comprises: a first step in which the AGV receives material handling information and the latest program update information from the upper-level controller; a second step in which when the AGV reaches a location to communicate with the passive device, the AGV transmits the material handling information to the passive device and receives material handling response information from the passive device to perform material handling communications; a third step in which the AGV transmits, after completing the material handling communications, update information during a standby period of the corresponding cycle and receives update response information from the passive device to perform update communications; and a fourth step in which when the passive device receives all the update information from the AGV, the passive device executes the latest program update based on the update information.

Description

{Method for program updating of passive device using automated guided vehicle in automated material handling system}

The present invention relates to a program update of a passive device that performs an operation through RF communication with an unmanned transfer device that moves through a rail under the control of a higher-level controller. It relates to a technology that allows the program of a passive device to be updated while being provided from an unmanned transport device while not affecting the logistics transport operation.

In a semiconductor factory, hundreds of processes and hundreds of thousands of logistics movements occur before a semiconductor raw material wafer becomes a finished product. Accordingly, in order to reduce human error and increase the work efficiency of the factory, logistics transfer between processes is automated.

In other words, logistics transport is moved to manufacturing facilities for each production process through unmanned transport devices such as OHS (Overhead Shuttle), OHT (Overhead Hoist Transport), AGV (Automated Guided Vehicle), and RGV (Rail Guided Vehicle), and Automated Material Handling System (AMHS) has been developed and used to deliver a carrier such as a Front Opening Unified Pod (FOUP) or a cassette through a handoff process with a manufacturing facility. have.

In an automatic transport system of a semiconductor factory, when an unmanned transport device moves along a rail or delivers a material to a manufacturing facility, it communicates using a specific communication device. For example, the unmanned transport device performs RF communication with the manufacturing facility.

These devices may require program update due to a program error or a customer's request for functional improvement.

In this case, the unmanned transfer device is an active device connected to the upper system, and these active devices may automatically update a program through communication with the upper system, and such a program update method is common.

On the other hand, the program update of passive devices, that is, devices that are not directly connected to the controller or the upper system of the unmanned transfer device, and operated by communication with the unmanned transfer device, are currently manually updated by field workers. is being done

The passive device includes a manufacturing facility device that performs SEMI E84 communication with an unmanned transport device, an interlock communication device installed at a merging collision location, and a hoist device.

However, when a program update of a passive device is performed in a semiconductor factory, problems such as that the device cannot be used while the update operation is being performed and logistics transportation is interrupted occur. For example, a manufacturing facility device that performs SEMI E84 communication cannot perform a handoff operation even when the manufacturing facility is operating normally, and a merge collision interlock device cannot enter the rail of an unmanned transport vehicle, so it can be bypassed. , Hoist Communication device cannot be hoisted.

In addition, the process for updating the program during factory operation is very complex, takes a long time, and the program update time may have to be adjusted depending on the availability of patch work according to the on-site situation (due to other work in the adjacent space, etc.) Occurs.

In particular, when a horizontal deployment (factory-wide patch) is required in a factory of a certain size or larger, it is impossible to independently approve the patch work, so waiting for a long period of time occurs. .

1. Korea Patent No. 10-1616706 (Name: RF communication system and method for automatic conveyance system)

Accordingly, the present invention has been created in view of the above circumstances, and by automatically updating the program of the passive device using the unmanned transfer device and the passive device while the unmanned transfer device and the passive device perform the logistics transfer operation, It is a technical object to provide a method for updating a program of a passive device using an unmanned transport device in an automatic transport system that enables the update of the passive device to be performed quickly and safely without affecting it.

According to one aspect of the present invention for achieving the above object, it comprises an unmanned transport device that moves through a rail under the control of a host controller, and a passive device that performs an operation through RF communication with the unmanned transport device. In the program update method of the passive device using the unmanned transfer device of the automatic transfer system, the first step of receiving logistics transfer information and the latest program update information from the upper controller in the unmanned transfer device, the unmanned transfer device and the passive device When the communication position is reached, the unmanned transfer device transmits logistics transport information to the passive device, and the second step of performing logistics transport communication by receiving logistics transport response information from the passive device for this, in the unmanned transport device in the corresponding cycle A third step of transmitting update information to the passive device during the waiting period of the corresponding cycle after the logistics transport communication is completed, and receiving update response information from the passive device to perform update communication, and in the third step in the passive device When all update information is received from the unmanned transfer device, there is provided a program update method of a passive device using the unmanned transfer device in the automatic transfer system, characterized in that it includes a third step of executing the latest program update based on this. .

In addition, in the third step, the passive device provides a method for updating a program of a passive device using an unmanned transfer device in an automatic transfer system, characterized in that it receives and sequentially stores update information through a plurality of unmanned transfer devices. do.

In addition, the third step is a program version check step of transmitting the program version check request information from the unmanned transfer device to the passive device, and transmitting the current program version information from the passive device to the unmanned transfer device, If the current program version and the latest program version do not match, the update type confirmation information including the total firmware number is transmitted to the passive device, and the update type confirmation information that the passive device transmits the program reception information including the pre-stored firmware number to the unmanned transport device Step, the unmanned transport device transmits the firmware data including the firmware number and the firmware code to the passive device based on the firmware number received from the passive device, and sequentially stores the firmware data received from the unmanned transport device in the passive device, and a firmware data receiving step of transmitting the firmware data response information including the firmware number to the unmanned transfer device, until the unmanned transfer device receives the firmware data response information including the firmware number equal to the total firmware number from the passive device. There is provided a program update method of a passive device using an unmanned transfer device in an automatic transfer system, characterized in that repeating the firmware data receiving process.

In addition, there is provided a program update method of the passive device using the unmanned transfer device in the automatic transfer system, characterized in that the step of checking the program version is performed whenever the unmanned transfer device arrives at a new passive device.

In addition, in the update type checking step, when there is no pre-stored firmware number in the passive device, the program transfer request information is transmitted to the unmanned transfer device, and when there is a pre-stored firmware number, the program takeover request information is transmitted to the unmanned transfer device. There is provided a program update method of a passive device using an unmanned transport device in an automatic transport system, characterized in that the transmission is performed.

In addition, the firmware information is generated in a packet structure including a command area, a firmware INFO area, and a firmware data code area, and the command area is set to code values defined by different commands in the unmanned transfer device and the passive device. The command code transmitted from the transfer device to the passive device includes program version request, update type confirmation, firmware data code transmission, and firmware data code transmission completion. A program update method of a passive device using an unmanned transfer device in an automatic transfer system, comprising receive, receive, and data code ACK, wherein the firmware INFO area is set to a total firmware number, a firmware number, and a program version value is provided

In addition, the passive device is a device installed in a manufacturing facility that performs processing on the wafer inside the carrier moved by the unmanned transfer device, a merge collision interlock device installed on a rail, installed in an unmanned transfer device There is provided a program update method of a passive device using an unmanned transport device, characterized in that it includes a hoist device.

In addition, when the program update between the unmanned transfer device and the passive device is not performed, the unmanned transfer device collects log information from the passive device in the waiting period in which logistics transport communication between the unmanned transfer device and the passive device is not performed, or unmanned transfer There is provided a program update method of a passive device using an unmanned transfer device, characterized in that it comprises the step of transmitting, by the device, maintenance information for the passive device to the passive device.

According to the present invention, the unmanned transfer device transmits program update information to the passive device during the logistics transport process between the unmanned transport device and the passive device to perform the program update of the passive device, thereby stably without degrading the transport transport efficiency. Program updates for passive devices can be performed automatically.

1 is a view showing a schematic configuration of an automatic transfer system having a program update function of a passive device using an unmanned transfer device to which the present invention is applied.
FIG. 2 is a diagram illustrating a type of the passive device 200 shown in FIG. 1 .
3 and 4 are diagrams for explaining an RF communication method between the unmanned transport device 100 and the passive device 200 shown in FIG. 1 .
FIG. 5 is a diagram for explaining the structure of a firmware packet transmitted in the update information section shown in FIG. 4;
6 is a view for explaining a program update method of a passive device using an unmanned transfer device in the automatic transfer system according to the present invention.
7 is a diagram illustrating different cases in which the passive device 200 receives update information in FIG. 6;
8 is a view for explaining in detail a process of transmitting and receiving firmware information between the unmanned transfer device 100 and the passive device 200 in steps ST500 and ST600 of FIG. 6 .

The configuration shown in the embodiments and drawings described in the present invention is only a preferred embodiment of the present invention, and does not express all the technical spirit of the present invention, so the scope of the present invention is the embodiment and drawings described in the text should not be construed as being limited by That is, since the embodiment is capable of various changes and may have various forms, it should be understood that the scope of the present invention includes equivalents capable of realizing the technical idea. In addition, since the object or effect presented in the present invention does not mean that a specific embodiment should include all of them or only such effects, it should not be understood that the scope of the present invention is limited thereby.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Terms defined in the dictionary should be interpreted as being consistent with the meaning of the context of the related art, and cannot be interpreted as having an ideal or excessively formal meaning not explicitly defined in the present invention.

1 is a view showing a schematic configuration of an automatic transfer system having a program update function of a passive device using an unmanned transfer device to which the present invention is applied.

Referring to FIG. 1 , an automatic transfer system having a program update function of a passive device using an unmanned transfer device to which the present invention is applied is an unmanned transfer device 100 and passive for performing RF communication with the unmanned transfer device 100 . device 200 .

Here, the passive device 200 is a device operated by communication with the unmanned transfer device 100, and as shown in FIG. 2, performs processing on the wafer inside the carrier moved by the unmanned transfer device 100. It includes a device (A) installed in a manufacturing facility that do. Hereinafter, as the passive device 200, the device A installed in the manufacturing facility will be exemplified and described.

In addition, the unmanned transfer device 100 and the passive device 200 may perform RF communication based on a predetermined communication protocol, for example, SEMI E84 communication.

At this time, the unmanned transfer device 100 and the passive device 200 transmit the logistics transport information T to the passive device 200 first from the unmanned transfer device 100 as shown in FIG. 3, and the passive device ( 200 ) communicates with each other in such a way that the response information P for the logistics transport information T received from the unmanned transfer device 100 is transmitted to the unmanned transfer device 100 .

The unmanned transport device 100 is an active device and includes an unmanned vehicle controller 110 and an unmanned vehicle communication unit 120 .

The unmanned vehicle controller 110 receives and stores the latest program update information of the passive apparatus 200 of the unmanned transfer apparatus 100 from an external device including the upper system 1 . In this case, the latest program information may be received by the driverless vehicle communication unit 120 from an external device.

The latest program update information may be a program of the passive device 200, that is, the passive communication unit 210 or the passive controller 220, and includes a program version, a total firmware No., and a data code for each firmware No. In addition, the program version information may include a passive device type code and a version number.

In addition, the unmanned vehicle controller 110 transmits the logistics return information received from the upper system 1 to the passive device 200 through the unmanned vehicle communication unit 120 .

In addition, the unmanned vehicle communication unit 120 transmits the logistics return information received from the unmanned vehicle controller 110 to the passive device 200 in a preset cycle unit, and receives response information received from the passive device 200 for this. do.

In addition, the driverless vehicle communication unit 120 transmits the program update information to the passive device 200 during the waiting period in which the logistics transport information is not transmitted, and receives response information received from the passive device 200 for this. In this case, the unmanned vehicle communication unit 120 may receive program update information directly from an external device or may receive program update information from the unmanned vehicle controller 110 and transmit it to the passive device 200 .

On the other hand, the passive device 200 transmits a response signal to the logistics transport information and program update information received from the unmanned transport device 100 to the unmanned transport device 100 and transmits the logistics transport information to the facility controller 220 . send to In addition, the facility controller 200 performs a logistics transport process unique to the manufacturing facility according to the logistics transport information applied from the passive device 200 .

That is, the unmanned vehicle communication unit 120 and the passive communication unit 210 divide one cycle (25 ms) into a logistics transport information section for transmitting and receiving logistics transport information and an update information section as shown in FIG. 4 . At this time, the logistics transport information section and the update information section are not divided uniformly, the logistics transport information section is set as a section in which transmission and reception of logistics transport information to be performed in the corresponding cycle is completed, and the update information section is the transmission and reception of logistics transport information in the corresponding cycle After this is completed, it is set as a waiting period until transmission/reception of logistics transport information of the next cycle is performed.

For example, in the first cycle, the logistic transport information section is set as a section in which the unmanned transport device 100 and the passive device 200 transmit and receive logistics transport information once each other, and the update information section is passive with the unmanned transport device 100 . The device 200 is set as a section in which update information is transmitted and received four times. And, in the second period, the logistic transport information section is set as a section in which the unmanned transport device 100 and the passive device 200 transmit and receive logistic transport information twice each other, and the update information section is passive with the unmanned transport device 100 . The device 200 may be set as a section in which update information is transmitted and received three times.

At this time, the update information transmitted from the driverless vehicle communication unit 120 and the passive communication unit 210 to the opposite side is configured in a firmware packet structure as shown in FIG. 5 .

Referring to Figure 5 (A), the firmware packet is 32 bytes in size, and consists of an I/O packet part (P) and firmware packet parts (AF, PF). The firmware packet unit AF is a packet structure transmitted from the driverless vehicle communication unit 120 to the passive communication unit 210 , and the firmware packet unit PF is a packet structure transmitted from the passive communication unit 210 to the driverless vehicle communication unit 120 . to be.

The I/O packet unit P consists of 12 bytes (0 to 11), and includes a mutual identification code and communication resource information between the driverless vehicle communication unit 120 and the passive communication unit 210 .

The firmware packet part (AF, PF) consists of 20 bytes (12-31), and consists of a command area of 1 byte (12) and a firmware information area of 19 bytes (13-31), and the firmware information area is 2 It may be composed of a firmware INFO area of bytes 13 and 14, a firmware data code area of 16 bytes (15-30), and a CRC area of 1 byte (31).

Here, the command may be composed of an ASCII code value, and each code value is defined as a different command in the driverless vehicle communication unit 120 and the passive communication unit 210 .

That is, as shown in FIG. 5B , the command of the firmware packet unit AF transmitted from the driverless vehicle communication unit 120 to the passive communication unit 210 is a program version request for different code values, an update type check, It is set to include firmware data code transmission, firmware data code transmission completion, and forced termination.

In addition, as shown in FIG. 5C , the commands of the firmware packet unit PF transmitted from the passive communication unit 210 to the driverless vehicle communication unit 120 are program version ACK, receive new, and follow for different ASCII values. Set to include Receive, Data Code ACK, End ACK, Firmware Update Ready notification.

In addition, as shown in Figs. 5 (B) and (C), the firmware INFO area includes firmware total No., firmware No. It is set as the program version value.

Next, a program update method of the passive apparatus using the unmanned transfer apparatus in the automatic transfer system having the above configuration will be described with reference to the flowchart shown in FIG. 6 .

Referring to FIG. 6 , the unmanned transfer device 100 includes movement destination information from the upper system 1 , logistics transport information to be transmitted to the passive device 200 , communication resource information for communicating with the passive device 200 , and a passive device The unmanned transfer information including the latest program update information of 200 is received and stored (ST100). The latest program update information includes the program version, firmware total No., and firmware No. Includes star data code.

And, the unmanned transfer device 100 moves through the rail to the destination under the control of the upper system 1 .

At this time, when the unmanned transfer device 100 arrives at a communication position with the passive device 200, the unmanned transfer device 100 first transmits a logistics transport packet including logistics transport information to the passive device 200 (ST200) . In this case, the logistics return packet may be composed of an I/O packet unit including confirmation for the passive device 200 and communication resource setting, and a logistics return packet unit including logistics return information.

The passive device 200 transmits the logistics return response information to the unmanned transport device 100 in response to the logistics transport packet (ST300). In addition, the passive device 200 performs a corresponding logistics transport process based on the logistics transport information received from the unmanned transport device 100 . For example, the passive apparatus 200 is a manufacturing facility, and may perform processing on a wafer inside a carrier transferred through the unmanned transfer apparatus 100 .

If the unmanned transfer device 100 determines that there is no logistics transport information to be transmitted to the passive device 200 during the period (ST400), the unmanned transfer device 100 determines whether there is a remaining waiting section until the start of the next cycle, If there is a waiting period, firmware information is transmitted to the corresponding passive device 200 (ST500). The firmware information is the latest program information to update the passive device 200 .

Then, the passive device 200 generates firmware response information for the firmware information and transmits it to the unmanned transfer device 100 (ST600). At this time, the passive device 200 stores the firmware information received from the unmanned transfer device 100 .

At this time, the unmanned transfer apparatus 100 repeatedly performs steps ST600 and ST700 described above until the next cycle starts or a preset firmware information termination condition is satisfied, such as when it is determined that there is no need to transmit the firmware information (ST700). ).

Here, when it is determined that the next cycle starts, the unmanned transfer apparatus 100 performs an operation after ST200 of transmitting the logistics transfer information to the passive apparatus 200 .

In addition, when it is determined that the transmission of the firmware information is unnecessary for reasons such as the transmission of the firmware information is completed, the unmanned transfer apparatus 100 transmits only the logistics transfer information to the passive apparatus 200 from a subsequent period.

That is, the unmanned transfer apparatus 100 and the passive apparatus 200 transmit and receive logistics transfer information (X) and firmware information (Y) in the first to third cycles as shown in (A) of FIG. After the 4th cycle, only the logistics transport information (X) is transmitted and received.

On the other hand, when the logistics transport information to be transmitted to the passive device 200 by the unmanned transport device 100 does not exist and the transport transport communication with the passive device 200 is terminated (ST800), the unmanned transport device 100 is the upper controller It moves to the next destination through the rail under the control of (1).

In addition, when the communication with the unmanned transfer device 100 is terminated, the passive device 200 checks whether the reception of firmware information is completed in step ST500. Here, the passive device 200 compares the firmware total No. with the currently received firmware No. to determine whether the firmware reception is complete.

Then, the passive device 200 automatically performs a system reset of the passive device 200 using the received firmware, thereby executing firmware update (ST900). Thereafter, the passive device 200 operates with a new version.

On the other hand, in step ST900, if it is determined that the passive device 200 has not completed receiving the firmware, it performs the above-described operation with another unmanned transfer device that starts a new communication thereafter to continuously receive firmware information, and sequentially receives the firmware information. Save. Then, when the firmware reception is completed, the firmware update operation of step ST900 is performed.

That is, as shown in FIG. 7B , the passive device 200 sequentially transmits firmware information through communication with the first to third unmanned transport devices 100-1, 100-2, and 100-3. By taking over, the entire firmware information can be received.

Meanwhile, FIG. 8 is a diagram for explaining in detail a process of transmitting and receiving firmware information between the unmanned transfer apparatus 100 and the passive apparatus 200 in steps ST500 and ST600 of FIG. 6 .

Referring to FIG. 8 , in FIG. 6 , the logistics transport information is transmitted from the unmanned transport device 100 to the passive device 200 , and the passive device 200 transmits logistics transport confirmation information to the unmanned transport device 100 . In one state, the unmanned transfer apparatus 100 first transmits program version request information to the passive apparatus 200 (ST610). This operation is performed whenever the unmanned transfer device 100 reaches the new passive device 200 and transmits firmware information for the first time. The unmanned transfer apparatus 100 generates a firmware packet AF in which the command code is set to "1" (refer to FIG. 5) and transmits it to the passive apparatus 200.

The passive device 200 transmits program version response information including information on the program version of its own currently being executed to the unmanned transfer device 100 (ST620). The passive device 200 generates a firmware packet PF in which the command code is set to “1” (see FIG. 5 ) and transmits it to the unmanned transport device 100 .

Next, the unmanned transfer device 100 compares the latest stored program version with the program version received in step ST620 and, if they do not match, transmits update type confirmation information including the firmware total number to the passive device 200 . (ST630). The unmanned transfer apparatus 100 generates a firmware packet AF in which the command code is set to "2" (refer to FIG. 5) and transmits it to the passive apparatus 200.

In step ST630, when the latest program version and the program version received from the passive apparatus 200 match, the unmanned transfer apparatus 100 does not transmit update type confirmation information to the passive apparatus 200. That is, the unmanned transfer apparatus 100 does not perform the process after ST630.

When the update type confirmation information is received in step ST630, the passive device 200 generates program receiving information corresponding thereto and transmits it to the unmanned transfer device 100 (ST640).

In step ST640, if the firmware No. does not exist in the storage area for storing the firmware information, the passive device 200 generates a new receive command and program new receive information including the firmware No. "0", and the currently stored firmware No. If . is present, program takeover information including a takeover command and the currently stored firmware No. is generated and transmitted to the unmanned transfer device 100 . The passive device 200 generates a new program takeover firmware packet (PF, see FIG. 5) having a command code of “2” or a program takeover firmware packet (PF, see FIG. 5) having a command code “3”. It is transmitted to the unmanned transfer device 100 .

The unmanned transfer device 100 receives the firmware No. Firmware No. corresponding to the information. and firmware data including the firmware data code is transmitted to the passive device 200 (ST650). For example, the unmanned transfer apparatus 100 generates a firmware packet AF in which the command code is set to "3" (see FIG. 5) and transmits it to the passive apparatus 200, and in the unmanned transfer apparatus 100, the passive apparatus ( When "firmware No. 3" is received from 200), the unmanned transfer device 100 determines that up to firmware No. 3 is stored in the passive device 200, and thereafter "firmware No. 4 corresponding to the firmware data." transmitted to the passive device 200 .

The passive device 200 sequentially stores the firmware data received in step ST650 corresponding to the firmware No. in the corresponding storage area, and transmits the firmware data response information including the currently received firmware No. to the unmanned transfer device 100 . transmit (ST660).

At this time, the unmanned transfer device 100 repeatedly performs the above-described steps ST650 and ST660 until all of the firmware data corresponding to the total firmware number is transmitted to the passive device 200 .

When the unmanned transfer apparatus 100 receives the firmware data response information including the firmware number equal to the total number from the passive apparatus 200, it transmits firmware data transmission completion information to the passive apparatus 200 (ST670).

Then, the passive device 200 transmits firmware update preparation completion notification information to the unmanned transfer device 100 (ST690). Thereafter, the passive device 200 automatically executes a program update using the firmware information pre-stored in the storage area when the logistics transport communication with the unmanned transfer device 100 is terminated.

On the other hand, although FIG. 8 shows that one unmanned transfer device 100 and both firmware information are transmitted with respect to one specific passive device 200 , the total communication between the unmanned transfer device 100 and the passive device 200 . Depending on the time or the amount of firmware information, it is possible to receive and store all of the firmware information through a plurality of unmanned transfer devices 100 and firmware data transfer as shown in FIG. 7 (B).

In addition, in the present invention, when the program update between the unmanned transfer apparatus 100 and the passive apparatus 200 is not performed, in the waiting period in which the logistics transfer communication between the unmanned transfer apparatus 100 and the passive apparatus 200 is not performed. The unmanned transfer apparatus 100 may collect log information from the passive apparatus 200 .

In addition, in the present invention, when the program update between the unmanned transfer apparatus 100 and the passive apparatus 200 is not performed, in the waiting period in which the logistics transfer communication between the unmanned transfer apparatus 100 and the passive apparatus 200 is not performed. The unmanned transfer apparatus 100 may transmit maintenance information on the passive apparatus 200 to the passive apparatus 200 . In this case, the unmanned transfer apparatus 100 may receive maintenance information for the passive apparatus 200 from an external device including the upper controller 1 .

100: unmanned transport device, 110: unmanned vehicle controller,
120: driverless vehicle communication unit, 200: passive device,
210: passive communication unit, 220: passive controller.

Claims (8)

Program of a passive device using an unmanned transfer device of an automatic transport system comprising an unmanned transfer device that moves through a rail under the control of a host controller, and a passive device that performs an operation through RF communication with the unmanned transfer device In the update method,
A first step of receiving logistics transport information and the latest program update information from the upper controller in the unmanned transfer device;
When the unmanned transfer device arrives at a communication position with the passive device, the unmanned transfer device transmits the logistic return information to the passive device, and receives the logistic return response information from the passive device for this, a second step of performing the logistics return communication;
A third step of transmitting update information to the passive device during the waiting period of the corresponding cycle after the unmanned transfer device completes the logistics transport communication in the corresponding cycle, and receiving update response information from the passive device to perform update communication;
When all update information is received from the unmanned transfer device in the third step in the passive device, the passive device includes a third step of executing the latest program update based on this. How to update programs on your device.
The method of claim 1,
In the third step, the passive device receives the update information through a plurality of unmanned transfer devices in a successive manner and sequentially stores the received program update method of the passive device using the unmanned transfer device.
The method of claim 1,
The third step is a program version check step of transmitting the program version check request information from the unmanned transfer device to the passive device, and transmitting the current program version information from the passive device to the unmanned transfer device;
If the current program version of the passive device and the latest program version do not match in the unmanned transfer device, update type confirmation information including the total firmware number is transmitted to the passive device, and program receiving information including the firmware number stored in the passive device is transferred unattended. Checking the type of update sent to the device;
The unmanned transport device transmits the firmware data including the firmware number and the firmware code to the passive device based on the firmware number received from the passive device, and sequentially stores the firmware data received from the unmanned transport device in the passive device. Including the firmware data receiving step of transmitting the firmware data response information including the No. to the unmanned transfer device,
The unmanned transfer device repeats the firmware data receiving process until it receives the firmware data response information including the firmware number equal to the total firmware number from the passive device. How to update the program.
4. The method of claim 3,
The program version checking step is a program update method of a passive device using an unmanned transfer device in an automatic transfer system, characterized in that it is performed whenever the unmanned transfer device arrives at a new passive device.
4. The method of claim 3,
In the update type checking step, when there is no pre-stored firmware number in the passive device, the new program reception request information is transmitted to the unmanned transfer device, and when there is a pre-stored firmware number, the program succession request information is transmitted to the unmanned transfer device. A method for updating a program of a passive device using an unmanned transport device in an automatic transport system, characterized in that.
The method of claim 1,
The firmware information is generated in a packet structure including a command area, a firmware INFO area, and a firmware data code area,
The command area is set to code values defined by different commands in the unmanned transport device and the passive device, but the command code transmitted from the unmanned transport device to the passive device is a program version request, update type check, firmware data code transmission, firmware data code Including transmission completion, the command code transmitted from the passive device to the unmanned transport device includes a program version ACK, a new receive, a takeover, and a data code ACK,
The firmware INFO area is a program update method of a passive device using an unmanned transfer device in an automatic transfer system, characterized in that the firmware total number, firmware number, and program version values are set.
The method of claim 1,
The passive device is a device installed in a manufacturing facility that processes the wafer inside the carrier moved by the unmanned transport device, a merge collision interlock device installed on a rail, and a hoist device installed in the unmanned transport device A method for updating a program of a passive device using an unmanned transport device, comprising:
The method of claim 1,
When the program update between the unmanned transfer device and the passive device is not performed, the unmanned transfer device collects log information from the passive device or the unmanned transfer device collects log information from the passive device in the waiting period in which the logistics transport communication between the unmanned transfer device and the passive device is not performed. A program update method of a passive device using an unmanned transfer device, characterized in that it comprises the step of transmitting maintenance information for the passive device to the passive device.

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