KR20210155060A - Tip-Tilt Mechanism of Ultra-small Optical Mirror Using Displacement Amplification Structures - Google Patents

Abstract

According to the present invention, provided is a tip tilt mechanism of a micro-optical mirror, which includes: a reflector which reflects a laser; an adapter for fixing the reflector; a plurality of piezoelectric actuators disposed under the adapter and driven so that the adapter can perform translational and rotational movements; a plurality of displacement amplification structures disposed between the plurality of piezoelectric actuators and the adapter and amplifying each driving of the piezoelectric actuators to transmit amplified driving; and a base for fixing the piezoelectric actuators, wherein the displacement amplifying structure is constituted by three displacement amplifying structures arranged in parallel with each other, and the piezoelectric actuators are arranged to cross the three displacement amplifying structures arranged in parallel.

Description

Tip-Tilt Mechanism of Ultra-small Optical Mirror Using Displacement Amplification Structures

The present invention relates to a tip tilt mechanism of a micro-optical mirror using a displacement amplification structure improved in terms of size and weight in a tip tilt system of a three-point driving method.

In recent semiconductor manufacturing processes, precision measuring devices such as atomic force microscopy (AFM/STM), and large-area nano lithography, it has a driving range of several hundred μm or more, while positioning precision and Demand for nano-positioning mechanisms capable of realizing sub-nm planar motion is increasing.

Conventionally, a lot of research has been done to fabricate an ultra-precise positioning mechanism using piezoelectricity and a flexible hinge.

That is, the piezoelectric phenomenon has a resolution of less than nm, does not dissipate heat, and has the advantage of being able to generate a large force with a fast response speed. There is an advantage in that it is easy to apply various mechanisms such as an amplification structure for amplification.

In addition, since the piezoelectric element has a motion range of several μm to several tens of μm, there is a problem in that it is necessary to amplify the momentum in order to drive it in a larger range. For this, a flexible mechanism having a lever structure is generally used.

As a related prior document, Korean Patent Laid-Open Publication No. 10-2007-0093706 (2007.09.19.) discloses a scanner device, and as shown in FIG. By placing the pair of actuators and 4 lever arms connected to the actuators at 90-degree intervals based on the center of the platform, the two lever arms are paired to perform rotational movement in the X and Y directions through the two pair of lever arms. What can be implemented is disclosed.

In addition, as a related prior document, Republic of Korea Patent Registration No. 10-0872031 (2008.12.05.) discloses a non-contact scanner using a magnetic actuator, and the platform has three projections on the opposite side to which a mirror is attached 120 concentrically. Disclosed is a spherical bending hinge that is arranged in a three-point driving manner equally spaced at an interval of three degrees, and that the platform including the mirror can be tilted in the two-axis 360-degree direction.

As shown in FIG. 1, the displacement amplification structure of the 4-point driving method of FIG. 1(a) and the 3-point driving method of FIG. 1(b) may be arranged.

However, in the conventional four-point driving method shown in Fig. 1(a), four displacement amplification structures are arranged at intervals of 90 degrees with respect to the center of the reflector, and two displacement amplifier structures are paired to form two pair displacement amplifier structures. Through these, it is possible to implement rotational motion in the X, Y, direction. Since this method implements the rotational motion in the X and Y directions with four displacement amplification structures, there is a problem in that power consumption is increased and the size is increased compared to the method implemented with three displacement amplification structures. The existing three-point driving method arranges three displacement amplification structures at intervals of 120 degrees with respect to the center of the reflector, so the diameter of the base structure that fixes the displacement amplification structure is that the three actuators are spaced apart. Since the diameter of the base structure is formed to a certain size, it has to be manufactured to be large, so there is a problem in that it is difficult to miniaturize it.

Republic of Korea Patent Publication No. 10-2007-0093706 (2007.09.19.) Republic of Korea Patent Registration No. 10-0872031 (2008.12.05.)

The present invention has been devised to solve the above-described problems, and the present invention can reduce power consumption compared to the existing four-point drive method by arranging three actuators alternately with each other, unlike the existing three-point or four-point drive method, It is to provide a tip tilt mechanism for a micro-miniature optical mirror using a displacement amplification structure that can be manufactured smaller in size compared to the existing three-point and four-point driving methods.

Another object of the present invention is that the piezoelectric actuator can be disposed closer to the center of the reflector compared to the conventional three-point and four-point driving method, which has an advantage in realizing the steering angle, and through a displacement amplification structure equipped with three flexible hinges. An object of the present invention is to provide a tip tilt mechanism of a micro-optical mirror that can convert the linear motion of the piezoelectric actuator into the rotational motion of the mirror.

The tip tilt mechanism of the micro-optical mirror using the displacement amplification structure according to the present invention comprises: a reflector for reflecting a laser; an adapter for fixing the reflector; a plurality of piezoelectric actuators disposed under the adapter and driven to enable the adapter to perform translational and rotational movements; a plurality of displacement amplification structures disposed between the plurality of piezoelectric actuators and the adapter and amplifying each drive of the piezoelectric actuators to transmit the amplified drive; and a base for fixing the piezoelectric actuator; The plurality of displacement amplification structures are characterized in that they are arranged parallel to each other.

Preferably, the displacement amplifying structure is configured by arranging three displacement amplifying structures parallel to each other; The piezoelectric actuator is characterized in that it is arranged to cross three displacement amplification structures arranged in parallel.

More preferably, the displacement amplification structure comprises: a driving unit driven in contact with the piezoelectric actuator; a first lever coupled to the driving unit to rotate in one direction; and a second lever connected to the first lever and amplified by the first lever to move; The second lever is characterized in that it is connected to a control unit for controlling the steering angle of the reflector by transmitting the driving of the second lever to the adapter.

Also preferably, the displacement amplifying structure may include: a driving unit connecting a lower side of the first lever and the piezoelectric actuator; a first elastic hinge connecting the base and the first lever; a second elastic hinge connecting the first lever and the second lever; a third elastic hinge connecting the base and the second lever; and a flexible hinge connected to the second lever to drive the adjustment unit.

Also preferably, the first elastic hinge, the second elastic hinge, the third elastic hinge, and the flexible hinge are formed of an elastic material.

Also preferably, the flexible hinge is characterized in that it is arranged in a triangular shape below the central portion of the adjustment unit.

The tip tilt mechanism of the micro-optical mirror using the displacement amplification structure according to the present invention can reduce power consumption compared to the existing four-point driving method by arranging three displacement amplification structures alternately, and secondly, the existing 3 Compared to the point and four-point driving method, the displacement amplification structure can be arranged close to the center of the reflector, so it is easy to implement the steering angle. have a possible effect.

1 is a view showing the arrangement of a displacement amplification structure according to the prior art.
2 is a perspective view of a tip tilt mechanism of a micro-optical mirror using a displacement amplification structure according to the present invention.
3 is an exploded view of the tip tilt mechanism of the micro-optical mirror using the displacement amplification structure according to the present invention.
4 is a configuration diagram of a tip tilt mechanism of a micro-optical mirror using a displacement amplification structure according to the present invention.
5 is a schematic diagram of a tip tilt mechanism of a displacement amplification structure according to the present invention.
6 to 8 are arrangement diagrams of the displacement amplification structure according to the present invention.

Hereinafter, preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings.

Advantages and features of the present invention, and a method of achieving the same, will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings.

However, the present invention is not limited by the embodiments disclosed below, but will be implemented in a variety of different forms, and only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the art to which the present invention pertains It is provided to fully inform those who have the scope of the invention, and the present invention is only defined by the scope of the claims.

In addition, in the description of the present invention, when it is determined that related known techniques may obscure the gist of the present invention, a detailed description thereof will be omitted.

Figure 2 is a perspective view of the tip tilt mechanism of the micro-optical mirror using the displacement amplification structure according to the present invention, Figure 3 is an exploded view of the tip tilt mechanism of the micro-optical mirror using the displacement amplification structure according to the present invention, Figure 4 is a configuration diagram of the tip tilt mechanism of the micro-optical mirror using the displacement amplification structure according to the present invention, FIG. 5 is a schematic diagram of the tip tilt mechanism of the displacement amplification structure according to the present invention, and FIGS. 6 to 8 are in the present invention It is the arrangement diagram of the displacement amplification structure according to the following.

2 to 4, the tip tilt mechanism of the micro-optical mirror using the displacement amplification structure is, as shown in the figure, the reflector 100 that reflects the laser and the adapter 110 that fixes the reflector 100 and a displacement amplifying structure 130 for supporting and driving the adapter, a piezoelectric actuator 150 for moving the displacement amplifying structure 130, and a base 160 for fixing the piezoelectric actuator 150.

In addition, a portion of the adapter 110 , the displacement amplifying structure 130 , the piezoelectric actuator 150 , and the base 160 may be accommodated in the housing 170 and protected.

In the present invention, an embodiment of a tip tilt mechanism of a micro-optical mirror using a displacement amplification structure has been described, but the use thereof is not limited in the present invention.

For example, the adapter 110 of the tip tilt mechanism using the displacement amplification structure 130 of the present invention is equipped with a laser processing device for emitting a laser beam, or by a laser processing device installed separately after seating an object on the adapter 110 It is also possible to process an object seated on the adapter 110 .

The reflector 100 is rotated by controlling the plurality of piezoelectric actuators 150 fixed to the base 160 .

When a mechanical stress is applied to the piezoelectric actuator 150, a voltage is generated, and conversely, when a voltage is applied, the piezoelectric actuator 150 expands or contracts.

The control unit (not shown) controls the voltage applied to the piezoelectric actuator 150 so that the piezoelectric actuator 150 expands or contracts in the longitudinal direction, and this driving of the piezoelectric actuator 150 is transmitted to the reflector 100 and the reflector (100) is controlled to rotate.

In one embodiment of the present invention, a case in which there are three piezoelectric actuators 150 is exemplified, and these piezoelectric actuators 150 are controlled respectively, thereby providing a first rotational direction corresponding to a pitch direction and a yaw direction, and Two rotations in the second rotational direction are possible.

The driving of the piezoelectric actuator 150 is transmitted to the displacement amplification structure 130 in contact with the piezoelectric actuator 150. In general, the piezoelectric actuator 150 has a fast response and high resolution. However, since the driving range is small, the piezoelectric actuator (150) It is coupled with the displacement amplification structure 130 so that the driving of the motor is amplified and transmitted to the reflector 100.

The displacement amplification structure 130 may include a first lever 131 , a second lever 132 , and a flexible hinge 133 , and may be connected to the adjustment unit 134 .

The adjusting unit 134 is disposed on the upper side of the displacement amplifying structure 130 , and a flexible hinge 133 connected to the displacement amplifying structure 130 is disposed at the lower side in the center of the adjusting unit 134 to hold the flexible hinge 133 . Through the control unit 134 may be driven.

In addition, the first lever 131 and the second lever 132, the flexible hinge 133, and the adjusting unit 134 of the displacement amplifying structure 130 may be manufactured as a single body (monolithic), and through wire electric discharge machining. It is preferable to configure as a single body, but is not limited thereto.

The displacement amplification structure 130 may amplify and transmit the driving of the piezoelectric actuator 150 to the mirror mount 120 , and as a result, the driving of the piezoelectric actuator 150 to the reflector 100 may be amplified and transmitted through this.

In the piezoelectric actuator 150 , a plurality of piezoelectric actuators 150 having different outputs may be installed, or a plurality of piezoelectric actuators 150 having the same output may be installed.

In the embodiment of the present invention, a tip tilt mechanism of a micro-optical mirror having three piezoelectric actuators 150 and three displacement amplification structures 130 will be described.

In addition, the piezoelectric actuator 150 is driven by an input voltage, and is controlled to maintain a constant height by a voltage continuously input from a controller (not shown).

The piezoelectric actuator 150 may have levers each having a displacement amplification structure stacked in two stages, and a driving unit 140 connected to the piezoelectric actuator 150 and a driving unit 140 connected to the first lever ( 131) and a second lever 132 connected to the control unit 134. In addition, the number of levers can be increased as needed.

That is, the adjusting unit 134 is flexible connected to the first lever 131 of the displacement amplifying structure 130 and the second lever 132 to which the displacement of the first lever 131 is transmitted and the second lever 132 . It is driven by the operation of the hinge 133 .

Referring to FIG. 5 , the displacement amplifying structure 130 includes a driving unit 140 driven in contact with the piezoelectric actuator 150 and a first lever 131 coupled to the driving unit 140 to rotate in one direction and a first lever ( 131 , and may include a second lever 132 that is amplified and moved by the first lever 131 .

In addition, the displacement amplifying structure 130 is connected to the lower side of the first lever 132 by the piezoelectric actuator 150 and the driving unit 140 , and the first connecting the base 160 and the first lever 131 . The elastic hinge 161, the second elastic hinge 162 connecting the first lever 131 and the second lever 132, and the third elastic hinge 163 connecting the base 160 and the second lever 132 ), and the control unit 134 is driven through the flexible hinge 133 connected to the second lever 132 .

In addition, the first elastic hinge 161 , the second elastic hinge 162 , the third elastic hinge 163 , and the flexible hinge 133 may be formed of an elastic material.

6 to 8, the present invention, unlike the conventional three-point or four-point driving method, three displacement amplification structures (130-1, 130-2, 130-3)) are arranged in parallel to each other, and three piezoelectric actuators ( By arranging 150-1, 150-2, 150-3) alternately, power consumption can be reduced compared to the existing four-point driving method, and the overall size can be reduced by arranging three flexible hinges 133 having the same amplification ratio. In addition, it is possible to secure the maximum steering angle by minimizing the distance between each flexible hinge (133).

Accordingly, since the displacement amplifying structure 130 to which the flexible hinge 133 is connected can be disposed close to the center of the reflector, the steering angle can be easily realized and the size can be made small.

In addition, the flexible hinge 133 may be arranged in a triangular shape on a plane to be disposed close to the center of the reflector 100 on the lower side of the central portion of the adjusting unit 134 .

In addition, the flexible hinge 133 is preferably arranged in an equilateral triangle shape on a plane having the same distance from the adjacent flexible hinge 133, but is not limited thereto.

In addition, the three flexible hinges (133-1, 133-2, 133-3) are disposed on the upper surface of each of the displacement amplification structures (130-1, 130-2, 130-3), the first flexible hinge (133-) 1) and the third flexible hinge 133-3 may be respectively disposed on the upper inner corners of the first and third displacement amplifying structures, and the second flexible hinge 133-2 is the second displacement amplifying structure 130 -2) can be arranged in the center of one side end.

Thereby, it is possible to arrange the displacement amplification structure 130 provided with the flexible hinge 121 close to the center of the reflector 100, so that it is easy to implement a steering angle, and a tip tilt angle of a long band can be implemented, and the existing arrangement The diameter can be drastically reduced compared to the structure, so it has the effect of making it compact.

The tip tilt mechanism of the micro-optical mirror using the displacement amplification structure according to the present invention as described above is not limited to the described embodiment, but various modifications and variations can be made without departing from the spirit and scope of the present invention. It is obvious to those with ordinary knowledge in the field of Accordingly, it should be said that such modifications or variations are included in the claims of the present invention.

100: reflector 110: adapter (adapter)
130: displacement amplification structure 130-1: first displacement amplification structure
130-2: second displacement amplification structure 130-3: third displacement amplification structure
131: first lever 132: second lever
133: flexible hinge 133-1: first flexible hinge
133-2: second flexible hinge 133-3: third flexible hinge
134: control unit 140: drive unit
150: piezoelectric actuator (PZT actuator) 160: base
161: first elastic hinge 162: second elastic hinge
163: third elastic hinge 170: housing

Claims (6)

a reflector that reflects the laser;
an adapter for fixing the reflector;
a plurality of piezoelectric actuators disposed on the lower side of the adapter and driven to enable the adapter to perform translational and rotational movements;
a plurality of displacement amplification structures disposed between the plurality of piezoelectric actuators and the mirror mount, amplifying each drive of the piezoelectric actuators, and transmitting the amplified drive; and
a base for fixing the piezoelectric actuator;
The tip tilt mechanism of the microminiature optical mirror, characterized in that the plurality of displacement amplification structures are arranged parallel to each other.
The method according to claim 1,
The displacement amplification structure is
three displacement amplifying structures are arranged parallel to each other;
The piezoelectric actuator is
Tip tilt mechanism of a micro-optical mirror, characterized in that it intersects with three displacement amplification structures arranged in parallel.
The method according to claim 1,
The displacement amplification structure is
a driving unit driven in contact with the piezoelectric actuator;
a first lever coupled to the driving unit to rotate in one direction; and
a second lever connected to the first lever and the mirror mount and amplified and moved by the first lever;
The second lever, the tip tilt mechanism of the micro-optical mirror, characterized in that connected to the control unit for adjusting the steering angle of the reflector by transmitting the driving of the second lever to the adapter.
4. The method according to claim 3,
The displacement amplification structure is
a driving unit connecting the lower side of the first lever and the piezoelectric actuator;
a first elastic hinge connecting the base and the first lever;
a second elastic hinge connecting the first lever and the second lever;
a third elastic hinge connecting the base and the second lever; and
The tip tilt mechanism of the micro-optical mirror, characterized in that it comprises a flexible hinge connected to the second lever to drive the adjustment unit.
5. The method according to claim 4,
The first elastic hinge, the second elastic hinge, the third elastic hinge and the flexible hinge are tip tilt mechanism of the micro-optical mirror, characterized in that formed of an elastic material.
5. The method according to claim 4,
The flexible hinge, the tip tilt mechanism of the micro-optical mirror, characterized in that arranged in a triangular shape below the central portion of the adjustment unit.

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