KR20210004923A - Magnetic levitation transportation apparatus - Google Patents

Abstract

The present invention relates to a magnetic levitation transportation device capable of fundamentally preventing the possibility of dust generation. Specifically, according to an embodiment of the present invention, the magnetic levitation transportation device comprises: a tray provided to transport a target while supporting the target; and a transfer track having an opened upper surface for the tray to be accommodated on an inner side and including a guide unit that guides movement of the tray while levitating the tray accommodated on the inner side. The guide unit comprises: a track side levitation magnet installed in a lower part; and a track side guiding magnet installed on an upper side of the track side levitation magnet. The tray comprises: a tray side levitation magnet provided at a position facing the track side levitation magnet; and a tray side guiding magnet provided at a position facing the track side guiding magnet. The tray is levitated by the magnetic force between the track side levitation magnet and the tray side levitation magnet, and vertical vibration of the tray is suppressed by the magnetic force between the track side guiding magnet and the tray side guiding magnet.

Description

Magnetic Levitation Transfer Device {MAGNETIC LEVITATION TRANSPORTATION APPARATUS}

The present invention relates to a magnetic levitation transfer device.

The conventional automation transport system used for transporting semiconductor wafers, LCD panels, OLED panels, etc. in a production line in a general product manufacturing plant mainly utilized a conveyor system. Such a system obtains rotational force by an electric motor and applies a reduction system in the middle to convert rotational motion into linear motion to transfer raw materials and products.

However, such a conveyor system has limitations in speed increase and control due to the mechanism of the component devices, and the generation of noise, vibration, and dust is inevitable because friction occurs at each part where components change according to the application of mechanical devices. In order to reduce the occurrence of noise, vibration, and dust and the frequency of failure due to abrasion, it is necessary to periodically check the components, replace parts, and repair, which inevitably leads to an increase in maintenance costs.

In order to solve the problems of such a conventional conveyor system, a magnetic levitation transfer system using a magnetic levitation principle has been recently introduced. Such a magnetic levitation transfer system is a system constructed by applying the propulsion principle using magnetic levitation. Specifically, it is a system that applies a propulsive force to the destination while the target is floated from the track to a certain height using an electromagnetic force or a permanent magnet. .

Examples of magnetic levitation transfer devices constituting a conventional magnetic levitation transfer system have been known as Patent Documents 1 and 2. First, the magnetic levitation transfer device according to Patent Document 1 has a configuration including a track that extends along one direction and a bogie that floats and moves on the track. In particular, it is configured to float the bogie from the track by using a ferromagnetic material attached to the lower surface of the track and a floating electromagnet fixed to the bogie. In this case, there is a disadvantage that the volume of the device for levitation must be 10 times or more larger than when using a permanent magnet to implement the same levitation force, and a large number of sensors to maintain the floating state are required along the transport direction. There is a drawback that it must be disposed, and there is a problem that it is difficult to achieve miniaturization and cost reduction of the device.

In addition, the magnetic levitation transfer device according to Patent Document 2 is constructed using only a permanent magnet to levitate and propel the bogie from the track, and a contact-type guide bearing is provided to contact the bogie in order to reduce the left and right movement of the bogie. In this case, it is possible to overcome some of the problems of Patent Document 1, but if only a permanent magnet is used for the floatation and propulsion of the bogie, the magnetic force cannot be controlled, so left and right biased loads are generated during the transfer of the bogie. A large friction force can act on the contact guide bearing. This has a problem in that the lifetime of component parts such as wear of bearings can be reduced, and it can lead to an increase in the incidence of malfunction of the entire production facility due to dust generation caused by contact with the bearing.

Korean Patent Registration No. 10-1049222 (registered on July 7, 2011) Korean Patent Publication No. 10-2017-0110065 (published on October 10, 2017)

The present invention was conceived to solve the problems of the prior art as described above, it is possible to reduce the size and cost, and because the contact of the bearing is not necessary, the life of the component parts can be significantly increased, and in particular, the possibility of dust generation is fundamentally blocked. To provide a magnetic levitation transfer device that can

According to an aspect of the present invention, while supporting a target, a tray provided to transport the target; And a transfer track including a guide portion for guiding the movement of the tray while the upper surface is opened so that the tray can be accommodated inside, and the tray accommodated inside is floated, wherein the guide portion is provided at the lower side of the track Levitation magnet; And a track-side guide magnet provided on the upper side of the track-side floating magnet, wherein the tray includes: a tray-side floating magnet provided at a position opposite to the track-side floating magnet; And a tray side guide magnet provided at a position opposite to the track side guide magnet, wherein the tray is floated by magnetic force between the track side floating magnet and the tray side floating magnet, and the track side guide magnet and the tray side A vertical vibration of the tray is suppressed by magnetic force between guide magnets, and the tray includes: a main body, at least partially disposed inside the guide portion; And a plurality of magnet fixing portions protruding downward from the main body and disposed horizontally apart to form a girder accommodation space in which a part of the transfer track is accommodated, and the transfer track includes a side surface of the plurality of magnets A girder at least partially disposed inside the girder receiving space to form a predetermined gap with the fixing portion; And a propulsion electromagnet that is supported on an upper surface of the girder and provides a propulsion force for movement of the tray through magnetic force, a magnetic levitation transfer device may be provided.

In addition, the tray-side floating magnet is disposed on a lower surface of the magnet fixing part, and the tray-side guide magnet is disposed on an upper side of the tray-side floating magnet, and is disposed on an outer surface of the magnet fixing part, and the The track-side floating magnet is disposed to face a lower surface of the tray-side floating magnet, and the track-side guide magnet is disposed to face an outer surface of the tray-side guide magnet.

In addition, the track-side floating magnet and the tray-side guide magnet are each provided in plural, and the plurality of tray-side guide magnets are disposed outside each of the plurality of magnet fixing units, respectively, and the plurality of track-side floating magnets Silver, each of which is disposed to face the outer surface of the plurality of tray-side guide magnets, a magnetic levitation transfer device may be provided.

In addition, in the tray-side floating magnet, the lower end of the tray-side floating magnet is disposed below the lower end of the propulsion electromagnet, and the tray-side guide magnet has an upper end of the tray-side guide magnet higher than the lower end of the propulsion electromagnet. Arranged in, a magnetic levitation transfer device can be provided.

In addition, in the track-side floating magnet, the lower end of the track-side floating magnet is disposed below the lower end of the girder, and the track-side guide magnet is disposed at the upper end of the track-side guide magnet higher than the upper end of the girder. The magnetic levitation transfer device can be provided.

In addition, the magnet fixing part may be provided to protrude laterally than both sides of the main body, a magnetic levitation transfer device may be provided.

In addition, the tray may include a permanent propulsion magnet supported on the inner surface of the main body such that at least one side faces the propulsion electromagnet, and a magnetic levitation transfer device may be provided.

In addition, a plurality of the propulsion permanent magnets are arranged so that different polarities are alternately arranged along the moving direction of the tray, a magnetic levitation transfer device may be provided.

In addition, the guide unit further includes a guide electromagnet provided to generate a magnetic force toward a space in which the tray is accommodated, and the tray further includes a plate-shaped member coupled to a side surface of the main body to face the guide electromagnet. Including, a magnetic levitation transfer device may be provided.

In addition, the track-side floating magnet, the track-side guide magnet, the tray-side floating magnet, and the tray-side guide magnet are all provided as permanent magnets, a magnetic floating transfer device may be provided.

In addition, a repulsive force acts between the track-side floating magnet and the tray-side floating magnet, and an attractive force acts between the track-side guide magnet and the tray-side guide magnet, and a magnetic floating transfer device may be provided.

In addition, the plurality of track-side guide magnets and the plurality of tray-side guide magnets provide an attraction between the track-side guide magnets provided on one side of the tray and the tray-side guide magnets provided on one side of the tray. A magnetic levitation transfer device configured to be greater than the attractive force between the magnet and the tray-side guide magnet provided on the other side may be provided.

In addition, the guide portion further comprises a damping roller provided to protrude from the inner wall surface of the guide portion toward the tray, the damping roller, when the tray is in close contact with the inner wall surface of the guide portion, is in contact with the tray A magnetic levitation transfer device may be provided that is provided to have a buffering action.

In addition, it further includes a control unit for controlling the magnetic force of the guide electromagnet, the guide unit further comprises a gap sensor for measuring a gap between the guide electromagnet and the tray, the control unit, by the gap sensor A magnetic levitation transfer device may be provided that controls the magnetic force of the guide electromagnet so that a gap between the guide electromagnet and the tray to be sensed is maintained at a predetermined value or more.

According to the embodiments of the present invention, compared to the prior art, it is possible to reduce the size and cost of the magnetic levitation transfer device, significantly increase the life of the constituent parts, and fundamentally block the possibility of dust generation.

1 is a perspective view showing a magnetic levitation transport apparatus according to an embodiment of the present invention.
FIG. 2 is a plan view showing a transfer trajectory of FIG. 1.
3 is an AA cross-sectional view of FIG. 1.
4 is a cross-sectional view taken along BB of FIG. 1.
5 is a conceptual diagram showing the arrangement structure of the propulsion permanent magnet and the propulsion electromagnet of Figure 3;

Hereinafter, specific embodiments for implementing the spirit of the present invention will be described in detail with reference to the drawings.

In addition, when it is determined that a detailed description of a known configuration or function related to the present invention may obscure the subject matter of the present invention, a detailed description thereof will be omitted.

In addition, when a component is referred to as being'connected' or'supplied' to another component, it should be understood that it may be directly connected and supplied to the other component, but other components may exist in the middle.

The terms used in the present specification are only used to describe specific embodiments and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise.

In addition, in the present specification, expressions such as the upper side, the lower side, and the side are described with reference to the drawings in the drawings, and it should be noted in advance that if the direction of the object is changed, it may be expressed differently.

Hereinafter, a specific configuration of the magnetic levitation transfer device according to an embodiment of the present invention will be described with reference to the drawings.

1 and 2, a magnetic levitation transfer device 1 according to an embodiment of the present invention is installed in a line for manufacturing a target T such as a semiconductor wafer, a PDP panel, an LCD panel, and an OLED panel. It is used to transport the target T being manufactured. To this end, the magnetic levitation transfer device 1 may include a transfer track 10, a tray 20, and a control unit (FIGS. 3 and 30). The target (T) is fixed to the tray 20 and can be transferred on the transfer track 10, and the tray 20 to which the target T is fixed using magnetic force is a target in a state in which the target T is floating on the transfer track 10. (T) can be transferred.

3 and 4, the transfer track 10 is formed to extend in one direction, and is provided to move the tray 20 to which the target T is fixed in a floating state. At this time, the movement of the tray 20 is guided by the transfer orbit 10, and both of lifting and propelling the tray 20 and controlling the posture may be made by magnetic force. This transfer track 10 may include a base plate 110, a guide portion 120, and a rail portion 130.

The base plate 110 is disposed on the ground and provided to constitute the bottom surface of the transfer track 10. The base plate 110 may be configured as a single plate with respect to the entire length in which the transfer track 10 is extended, or a plurality of plates may be arranged in contact with each other or separated by a predetermined distance.

The guide portion 120 may be provided on the base plate 110 to constitute both sidewalls of the transfer track 10. At this time, the guide portion 120 may be provided in the shape of two flat plates extending upward from the base plate 110, and as shown in Figs. 3 and 4, a step of one or more steps is provided in a step shape on the inner surface. It may be provided in a formed shape. In addition, the guide unit 120 has an upper surface open so that the tray 20 can be accommodated therein, and guides the movement of the tray 20 while floating the tray 20 accommodated therein. The guide unit 120 may include a track-side floating magnet 122, a track-side guide magnet 124, a guide electromagnet 126, a support bracket 127, a gap sensor 128, and a damping roller 129. have.

The track-side floating magnet 122 is provided under the guide unit 120 and may be installed so that the top surface is exposed. The track-side floating magnet 122 is provided to provide a magnetic force necessary for floating the tray 20. In addition, the track-side floating magnet 122 may be provided as a permanent magnet, and a plurality of permanent magnets may be disposed over the entire length of the transfer track 10 along the extending direction of the transfer track 10. In addition, the track-side floating magnet 122 may be provided on both sides of the guide portion 120. The track side floating magnet 122 may be disposed such that the upper surface faces the bottom surface of the tray side floating magnet 220. In addition, the track-side floating magnet 122 may be disposed such that the lower end of the track-side floating magnet 122 is placed below the lower end of the girder 134.

The track-side guide magnet 124 may be provided on the upper side of the track-side floating magnet, and may be installed to expose an inner side (a side facing the inner side of the guide portion 120). For example, the track-side guide magnet 124 may be disposed so that the inner surface thereof faces the outer surface of the tray-side guide magnet 230. To this end, a portion in which the track-side floating magnet 122 is installed and a portion in which the track-side guide magnet 124 is installed may be stepped in a stepped manner. The track-side guide magnet 124 is provided to suppress the vertical vibration of the tray 20. In addition, the track-side guide magnet 124 may be provided as a permanent magnet like the track-side floating magnet 122, and a plurality of permanent magnets extends the length of the transfer track 10 along the extended direction of the transfer track 10 Can be placed across. In addition, a plurality of track-side guide magnets 124 may be provided, and a plurality of track-side guide magnets 124 may be provided on both sides of the guide portion 120. In addition, the track-side guide magnet 124 may be arranged such that the upper end of the track-side guide magnet 124 is positioned above the upper end of the girder 134.

The guide electromagnet 126 is provided to generate a magnetic force toward a space in which the tray 20 of the guide unit 120 is accommodated, and may be provided above the track-side guide magnet 124, for example. However, this is exemplary, and the position of the guide electromagnet 126 may be modified to be installed at a position other than the upper side of the track side guide magnet 124. The guide electromagnet 126 is provided to control the horizontal position of the tray 20, and for this, the guide electromagnet 126 may include a guide core 1262 and a guide coil 1264.

The guiding core 1262 is formed to protrude from the inner wall surface of the guiding portion 120, and the guiding coil 1264 may be wound. In addition, the guide coil 1264 may be connected to a power supply (not shown) provided separately for power application to receive power, thereby generating magnetic force.

The guide electromagnet 126 is connected to the control unit 30, and the on/off of the guide electromagnet 126 and the strength of magnetic force may be controlled by the control unit 30.

In addition, the guide electromagnet 126 may be provided in plural, and may be spaced apart at predetermined intervals along the extending direction of the transfer track 10 and disposed over the entire length of the transfer track 10. In addition, the guide electromagnet 126 may be provided on both sides of the guide unit 120.

A gap sensor 128 is provided to measure the gap between the guide electromagnet 126 and the tray 20. The gap sensor 128 may measure a gap between the guide electromagnet 126 and the tray 20 in real time to adjust the position of the tray 20 in the horizontal direction, and transmit it to the controller 30. The control unit 30 may control the amount of current flowing to the guide electromagnet 126 using the sensing value, thereby controlling the magnetic force that the guide electromagnet 126 acts on the plate-shaped member 250 of the tray 20 to be described later. Accordingly, the magnetic force of the guide electromagnet 126 may be controlled so that the gap between the guide electromagnet 126 and the tray 20 is maintained above a predetermined value.

The gap sensor 128 may be supported by a support bracket 127. The support bracket 127 may be fixedly installed in a hole formed in both sidewalls of the guide part 120 and provided to support the gap sensor 128.

On the other hand, the guide unit 120 may include a damping roller 129, a specific configuration and operation of the damping roller 129 will be described later.

The rail part 130 is provided in the inner receiving space of the guide part 120 and protrudes upward from the base plate 110 to be at least partially accommodated in the tray 20. Accordingly, a thrust force for movement of the tray 20 may be generated by the rail unit 130. In addition, the rail unit 130 may be extended over the entire length of the transport track 10, or may be divided into a plurality of pieces as shown in FIG. 2 to be separated at predetermined intervals. In addition, the spaced apart at this time may correspond to the length of each of the segmented rail units 130 or may be formed somewhat longer. In this case, the tray 20 does not obtain a propulsive force in the portion where the rail portion 130 is not formed, but the propulsive force received before passing through the portion acts as an inertia, so that the tray 20 is not formed by the rail portion 130 The movement does not stop even after passing through the formation area. In order to exert this function, the rail unit 130 may include a support plate 132, a girder 134 and a propulsion electromagnet 136.

The support plate 132 is fixed to the upper surface of the base plate 110 and is provided to support other portions of the rail unit 130. The girder 134 is fixed to the upper surface of the support plate 132 and is provided to be supported by the support plate 132, and is provided under the propulsion electromagnet 136 to support the propulsion electromagnet 136. In addition, the girder 134 is a portion accommodated in the girder accommodation space 216 of the tray 20 to be described later.

The propulsion electromagnet 136 generates a magnetic force to provide a propulsion force for movement of the tray 20. In addition, the propulsion electromagnet 136 may be configured as, for example, a coreless electromagnet. In other words, the propulsion electromagnet 136 may be provided in a state in which the coil is wound in the air a plurality of times without a separate core from the upper surface of the girder 134. The coils wound in this way may be fixed by being bonded to each other with an epoxy resin, for example. If the core is included in the propulsion electromagnet 136, it may be difficult to control the attitude of the tray 20 due to the occurrence of an eccentric load, but when the propulsion electromagnet 136 is provided as a coreless electromagnet, the eccentric load of the propulsion electromagnet 136 There is an effect that can be removed.

In addition, the propulsion electromagnet 136 may be connected to a power supply (not shown) provided separately for power application to receive power, thereby generating magnetic force. At this time, the propulsion electromagnet 136 may be configured to have a three-phase structure, and thus may be provided to receive three-phase AC power from a power supply device.

The propulsion electromagnet 136 is connected to the control unit 30, and the on/off of the propulsion electromagnet 136 and the strength of the magnetic force may be controlled by the control unit 30.

On the other hand, the tray 20 is provided to transport the target T on the transport trajectory 10 while supporting the target T. In addition, the tray 20 has an open lower surface so that the receiving spaces 214 and 216 accommodating the upper portion of the rail unit 130 may be concave. In addition, the tray 20 can be moved in a floating state on the transfer track 10. To this end, the tray 20 is a main body 210, a target fixing part 211, a magnet fixing part 212, a tray-side floating magnet 220, a tray-side guide magnet 230, a propulsion permanent magnet 240 And it may include a plate-shaped member 250.

A plate-shaped member 250 is coupled to the side of the main body 210, and a magnetic part accommodating space 214 is formed therein.

The target T may be fixed to the target fixing part 211. In addition, the target fixing part 211 is connected to the upper surface of the main body 210.

A tray side floating magnet 220 and a tray side guide magnet 230 may be fixedly installed on the magnet fixing part 212. In addition, the magnet fixing part 212 is connected to the lower portion of the main body 210 and may be formed to protrude downward from the main body 210. A plurality of magnet fixing parts 212 may be provided, and a plurality of magnet fixing parts 212 may be disposed on both sides of the main body 210. In addition, the plurality of magnet fixing parts 212 may be disposed spaced apart from each other in a horizontal direction. In this case, an outer surface of the magnet fixing part 212 (a surface facing the guide part 120) may have a shape protruding from an outer surface of the main body 210 (a surface facing the guide part 120). That is, the magnet fixing part 212 may be provided to protrude laterally than both sides of the main body 210.

A magnetic part receiving space 214 with an open lower surface may be formed inside the main body 210. The propulsion electromagnet 136 may be accommodated in the magnetic part receiving space 214. In addition, a girder accommodation space 216 formed below the magnetic part accommodation space 214 may be formed between the plurality of magnet fixing parts 212. At this time, the girder accommodation space 216 is formed between the plurality of magnet fixing parts 212, and the magnetic part accommodation space 214 may be formed to have a wider width than the girder accommodation space 216.

The tray side floating magnet 220 is provided in a position opposite to the track side floating magnet 122 of the transfer track 10, and the tray side guide magnet 230 is the track side guide magnet 124 of the transfer track 10. It is provided in a position opposite to. In other words, the tray-side floating magnet 220 is fixedly installed on the lower surface of the magnet fixing unit 212 so that the lower surface is exposed, and the tray-side guide magnet 230 is an outer surface (a surface facing the outside direction of the main body 210). ) May be fixedly installed on the side of the magnet fixing part 212 to be exposed. Thus, the magnetic force direction between the track-side guide magnet 124 and the tray-side guide magnet 230 and the magnetic force direction between the track-side floating magnet 122 and the tray-side floating magnet 220 cross each other, and more specifically A magnetic force direction between the track-side guide magnet 124 and the tray-side guide magnet 230 may be a horizontal direction, and a magnetic force direction between the track-side floating magnet 122 and the tray-side floating magnet 220 may be a vertical direction. The tray-side floating magnet 220 may be disposed such that the lower end of the tray-side floating magnet 220 is placed below the lower end of the propulsion electromagnet 136. In addition, the tray-side guide magnet 230 may be disposed so that the upper end of the tray-side guide magnet 230 is positioned above the lower end of the propulsion electromagnet 136. A plurality of tray-side guide magnets 230 may be provided, and each of the plurality of tray-side guide magnets 230 may be disposed outside each of the plurality of magnet fixing units 212.

The tray side floating magnet 220 and the tray side guide magnet 230 may be provided on both sides of the main body 210. In addition, both the tray side floating magnet 220 and the tray side guide magnet 230 may be provided as permanent magnets.

Accordingly, a magnetic force acts between the tray-side floating magnet 220 and the track-side floating magnet 122, and a magnetic force acts between the tray-side guide magnet 230 and the track-side guide magnet 124. At this time, the tray 20 may be maintained in a floating state by magnetic force between the track side floating magnet 122 and the tray side floating magnet 220, and the track side guide magnet 124 and the tray side guide magnet 230 Vibration in the vertical direction of the tray 20 may be suppressed by the magnetic force of the liver. In addition, the polarity of each permanent magnet is such that a repulsive force acts between the track-side floating magnet 122 and the tray-side floating magnet 220, and an attractive force acts between the track-side guide magnet 124 and the tray-side guide magnet 230. Can be set.

Here, the vertical vibration refers to a phenomenon in which the tray 20 is shaken in the vertical direction with respect to the ground while moving along the transport track 10, and the reason for the vertical vibration occurs is the track side made of a plurality of permanent magnets. Since the magnetic force between the floating magnet 122 and the tray-side floating magnet 220 has a slight difference for each section, vibration may occur during movement due to the difference in magnetic force. In addition, in some cases, there may be a section in which the track side floating magnet 122 is not provided in some sections of the transfer track 10 disposed along the manufacturing line. As described above, when the tray 20 passes through the section where the track-side floating magnet 122 is not provided, vibration may be generated in the vertical direction due to a rapid magnetic force change. Further, since the tray 20, which normally weighs several hundred kg, moves on the transfer track 10 at high speed, vibration due to the weight and movement speed of the tray 20 may also be generated at a considerable level. This vertical vibration can be reduced or eliminated as a damping action is performed by the attraction between the track-side guide magnet 124 and the tray-side guide magnet 230 acting on both sides of the tray 20. The degree of damping at this time may vary depending on the strength of attraction set between the track-side guide magnet 124 and the tray-side guide magnet 230.

On the other hand, the attraction between the track-side guide magnet 124 and the tray-side guide magnet 230 provided on one side of the tray 20 is the attraction between the track-side guide magnet 124 and the tray-side guide magnet 230 provided on the other side. It can be set to be larger. Accordingly, when the magnetic force generated in the guide electromagnet 126 is removed due to external power cut off, etc., the tray 20 may be moved toward the strong attraction due to the difference in attraction, and may be attached to the inner wall surface of the guide unit 120 . Accordingly, the tray 20 can be conveniently stored when the device is stopped.

In this way, when the tray 20 is moved toward the inner wall surface of the guide unit 120, a damping roller 129 is provided on the guide unit 120 to minimize collision with the inner wall surface of the guide unit 120 Can be. The damping roller 129 is provided so as to protrude from the inner wall surface of the guide portion 120 toward the tray 20. Accordingly, when the tray 20 moves toward the inner wall surface of the guide unit 120, the damping roller 129 first comes into contact with the tray 20, thereby providing a buffering action.

Meanwhile, a plate-shaped member 250 is coupled to a side surface of the main body 210, and the plate-shaped member 250 is provided at a position opposite to the guide electromagnet 126. In addition, the position of the tray 20 in the horizontal direction may be controlled by the magnetic force that the guide electromagnet 126 acts on the plate member 250.

Here, the horizontal position refers to a position that is skewed to the left or right with respect to the moving direction when the tray 20 moves along the transport track 10, and in principle, the tray 20 is the guide unit 120 It is preferable to move in a state located in the center of the horizontal direction of the tray 20, but depending on the difference in attraction between the track-side guide magnet 124 and the tray-side guide magnet 230 on both sides of the tray 20, the tray 20 is slightly left or It can be skewed to the right. This horizontal position can be adjusted by controlling the strength of the magnetic force applied to the plate-shaped member 250 by the guide electromagnets 126 on both sides of the tray 20.

The permanent propulsion magnet 240 is provided at a position opposite to both sides of the propulsion electromagnet 136 of the guide 120 and may be fixed to the inner walls of the receiving spaces 214 and 216 of the tray 20. In more detail, it may be fixedly installed on the inner wall of the magnetic portion receiving space 214 formed inside the tray 20. This permanent propulsion magnet 240 may generate a propulsive force under the influence of the magnetic force generated from the propulsion electromagnet 136 of the rail unit 130, and the tray 20 may move by the propulsion force thus generated.

Hereinafter, a principle in which the tray 20 moves by receiving the propulsion force by the propulsion permanent magnet 240 and the propulsion electromagnet 136 will be described with reference to FIG. 5.

5, the propulsion permanent magnet 240 may be configured in a form in which a plurality of permanent magnets are arranged, and permanent magnets of different polarities may be alternately disposed along the moving direction of the tray 20. . Accordingly, when the three-phase alternating current is supplied to the propulsion electromagnet 136, a magnetic field is formed by the propulsion electromagnet 136, and the formed magnetic field affects the propulsion permanent magnet 240 while the propulsion permanent magnet 240 is A suction force and a repulsion force are received from the propulsion electromagnet 136. A driving force is generated by the suction force and repulsive force acting in this way, and the tray 20 is moved by the driving force generated in this way. In other words, the permanent propulsion magnet 240 and the propulsion electromagnet 136 may generate a propulsion force for moving the tray 20 by the principle of a linear motor.

Returning to FIGS. 3 and 4 again, the plate-shaped member 250 is provided on both side walls of the main body 102 and may be installed at a position opposite to the guide electromagnet 126. The plate-shaped member 250 may be provided as an object exhibiting magnetism when exposed to magnetic force such as metal, and may be formed of an iron plate as an example. The plate-shaped member 250 may receive attractive force or repulsive force under the influence of the magnetic field formed by the guide electromagnet 126, and the horizontal position during the movement of the tray 20 due to the force received from both sides can be adjusted and maintained. I can.

The control unit 30 can control the power supply to the propulsion electromagnet 136 and the guide electromagnet 126, and the sensing result of the gap between the guide electromagnet 126 and the tray 20 from the gap sensor 128 It may be configured to receive and use it for control of the guide electromagnet 126. To this end, the control unit 30 may be formed of, for example, a small built-in computer, and may include a program, a memory, and a data processing unit including a CPU. The program of the control unit 30 may include an algorithm for receiving sensing information from the gap sensor 128 and controlling a current value applied to the guide electromagnet 126. In addition, the program of the control unit 30 is based on information input by a preset or separately provided input device (not shown) and/or information sensed by a separately provided sensor device (not shown), the propulsion electromagnet 136 ) May include an algorithm for controlling the moving speed and direction of the tray 20 by controlling the current value applied to it. The program of the control unit 30 may be stored in a memory such as a computer storage medium, such as a flexible disk, a compact disk, a hard disk, or a magneto-optical disk (MO), and installed in the control unit 30.

Hereinafter, the operation and effect of the magnetic levitation transfer device 1 according to the present embodiment having the configuration as described above will be described.

The magnetic levitation transfer device 1 according to this embodiment is installed on a line for manufacturing a target T such as a semiconductor wafer, a PDP panel, an LCD panel, etc. to transfer the target T being manufactured along the manufacturing line. Is provided. At this time, while the tray 20 to which the target T is fixed is guided by the transfer track 10 in a state floating on the transfer track 10, it may be moved by receiving a driving force.

At this time, the floating of the tray 20 is a magnetic force (repulsive force) acting between the track-side floating magnet 122 provided on the guide portion 120 of the transfer track 10 and the tray-side floating magnet 220 provided on the tray 20 Can be done by In addition, the tray 20 can always be maintained in a state floating on the transfer track 10. Accordingly, the tray 20 may be maintained in a floating state even when the magnetic force generated in the guide electromagnet 126 is removed due to an external power cut off or the like.

While the tray 20 is moving, the magnetic force acting between the track-side floating magnet 122 and the tray-side floating magnet 220 is not constant along the moving direction and may have a slight difference. Accordingly, vertical vibration may occur in the tray 20. This vertical vibration is reduced by magnetic force (manpower) acting between the track side guide magnet 124 provided on the guide portion 120 of the transfer track 10 and the tray side guide magnet 230 provided on the tray 20 Can be suppressed.

At this time, there may be a case in which magnetic forces acting on both sides of the tray 20 differ from each other. This difference in magnetic force causes the horizontal position of the tray 20 to be skewed to the left or right from the center of the transfer track 10. In order to adjust the position of the tray 20 in the horizontal direction, a guide electromagnet 126 may be provided on the guide portion 120 of the transfer track 10 and a plate-shaped member 250 may be provided on the tray 20. The plate-shaped member 250 becomes magnetic under the influence of a magnetic field formed in the guide electromagnet 126 and receives magnetic force from the guide electromagnet 126. Accordingly, by adjusting the strength of the magnetic field generated by the guide electromagnet 126 provided opposite to both sides of the tray 20, the horizontal position of the tray 20 may be adjusted.

In this horizontal position adjustment, the gap sensor 128 may be used, and in detail, the control unit (the control unit) so that the gap between the guide electromagnet 126 sensed by the gap sensor 128 and the tray 20 is maintained at a predetermined distance. In 30), the power supply of the guide electromagnet 126 can be controlled.

On the other hand, the propulsion force for the movement of the tray 20 is the suction force and the repulsive force acting between the propulsion electromagnet 136 provided on the rail portion 130 of the transfer track 10 and the propulsion permanent magnet 240 provided on the tray 20 Is caused by In other words, the propulsion electromagnet 136 and the propulsion permanent magnet 240 may constitute a linear motor. In addition, as the power supplied from the propulsion electromagnet 136 is controlled by the controller 30, the propulsion force for moving the tray 20 may be controlled.

When the operation of the magnetic levitation transfer device 1 is stopped, that is, when the supply of power supplied to the guide electromagnet 126 and the propulsion electromagnet 136 is stopped, the guide electromagnet that controls the horizontal position of the tray 20 The magnetic field of (126) is removed. Accordingly, the tray 20 may be moved in a direction in which the attraction between the guide magnets 124 and 230 among both sides is stronger, and may be attached to and stored on the inner wall of the guide unit 120. Even at this time, since the magnetic force between the floating magnets 122 and 220 is maintained, it is attached and stored in a floating state. In addition, when the tray 20 is attached to the guide part 120, it is buffered by the damping roller 129, so that damage due to impact may be prevented.

According to the magnetic levitation transfer device 1 according to the present embodiment, the use of electromagnets is significantly reduced compared to conventional transfer devices, so that the device can be miniaturized and cost-effective, and the track-side guide magnet 124 and Since the position of the tray 20 is adjusted and maintained by the magnetic force between the guide magnet 230 on the tray side and the magnetic force between the guide electromagnet 126 and the plate member 250, the life of the component parts is reduced due to wear of the contact type bearing member, etc. There is an effect that it can block the reduction, and the possibility of dust generation can also be fundamentally blocked.

The embodiments of the present invention have been described above as specific embodiments, but these are only examples, and the present invention is not limited thereto, and should be construed as having the widest scope in accordance with the basic idea disclosed herein. A person skilled in the art may combine/substitute the disclosed embodiments to implement a pattern of a shape not indicated, but this also does not depart from the scope of the present invention. In addition, those skilled in the art can easily change or modify the disclosed embodiments based on the present specification, and it is clear that such changes or modifications also belong to the scope of the present invention.

1: magnetic levitation transfer device 10: transfer track
110: base plate 120: guide
122: track side floating magnet 124: track side guide magnet
126: guide electromagnet 1262: guide core
1264: guide coil 127: support bracket
128: gap sensor 129: damping roller
130: rail part 132: support plate
134: girder 136: propulsion electromagnet
20: tray 210: main body
211: target fixing part 212: magnet fixing part
214: magnetic part accommodation space 216: girder accommodation space
220: tray side floating magnet 230: tray side guide magnet
240: propulsion permanent magnet 250: plate member

Claims (14)

A tray provided for transferring the target while supporting the target; And
The upper surface is opened so that the tray can be accommodated inside, and a transfer track including a guide portion for guiding the movement of the tray while floating the tray accommodated inside,
The guide unit,
A track-side floating magnet provided in the lower portion; And
It includes a track-side guide magnet provided on the upper side of the track-side floating magnet,
The tray,
A tray side floating magnet provided at a position opposite to the track side floating magnet; And
And a tray-side guide magnet provided at a position opposite to the track-side guide magnet,
The tray is floated by a magnetic force between the track side floating magnet and the tray side floating magnet, and vertical vibration of the tray is suppressed by magnetic force between the track side guide magnet and the tray side guide magnet,
The tray,
A main body at least partially disposed inside the guide portion; And
It protrudes downward from the main body, and includes a plurality of magnet fixing portions disposed horizontally apart to form a girder accommodation space in which a part of the transfer track is accommodated,
The conveying trajectory,
A girder at least partially disposed inside the girder accommodating space so that a side surface forms a predetermined gap with the plurality of magnet fixing portions; And
It is supported on the upper surface of the girder, comprising a propulsion electromagnet that provides a propulsion force for the movement of the tray through magnetic force,
Magnetic levitation transfer device. The method of claim 1,
The tray-side floating magnet is disposed on a lower surface of the magnet fixing part,
The tray-side guide magnet is disposed on the upper side of the tray-side floating magnet, and is disposed on the outer surface of the magnet fixing part,
The track side floating magnet is disposed so as to face a lower surface of the tray side floating magnet,
The track-side guide magnet is disposed to face an outer surface of the tray-side guide magnet,
Magnetic levitation transfer device. The method of claim 2,
Each of the track side floating magnet and the tray side guide magnet is provided in plural,
Each of the plurality of tray-side guide magnets is disposed outside each of the plurality of magnet fixing parts,
The plurality of track-side floating magnets are each disposed to face an outer surface of the plurality of tray-side guide magnets,
Magnetic levitation transfer device. The method of claim 1,
In the tray-side floating magnet, a lower end of the tray-side floating magnet is disposed below a lower end of the propulsion electromagnet,
The tray-side guide magnet, the upper end of the tray-side guide magnet is disposed above the lower end of the propulsion electromagnet,
Magnetic levitation transfer device. The method of claim 1,
In the track-side floating magnet, a lower end of the track-side floating magnet is disposed below the lower end of the girder,
The track-side guide magnet, the upper end of the track-side guide magnet is disposed above the upper end of the girder,
Magnetic levitation transfer device. The method of claim 1,
The magnet fixing part is provided to protrude laterally than both sides of the main body,
Magnetic levitation transfer device. The method of claim 1,
The tray includes a permanent propulsion magnet supported on the inner surface of the main body such that at least one side faces the propulsion electromagnet,
Magnetic levitation transfer device. The method of claim 7,
A plurality of the propulsion permanent magnets are arranged so that different polarities are alternately disposed along the moving direction of the tray,
Magnetic levitation transfer device. The method of claim 1,
The guide unit further includes a guide electromagnet provided to generate a magnetic force toward a space in which the tray is accommodated,
The tray further comprises a plate-shaped member coupled to a side surface of the main body to face the guide electromagnet,
Magnetic levitation transfer device. The method of claim 1,
The track side floating magnet, the track side guide magnet, the tray side floating magnet and the tray side guide magnet are all provided as permanent magnets,
Magnetic levitation transfer device. The method of claim 1,
It is configured such that a repulsive force acts between the track side floating magnet and the tray side floating magnet, and an attractive force acts between the track side guide magnet and the tray side guide magnet,
Magnetic levitation transfer device. The method of claim 3,
The plurality of track-side guide magnets and the plurality of tray-side guide magnets,
The attraction between the track-side guide magnet provided on one side of the tray and the tray-side guide magnet provided on the one side is configured to be greater than the attraction between the track-side guide magnet provided on the other side of the tray and the tray-side guide magnet provided on the other side,
Magnetic levitation transfer device. The method of claim 12,
The guide portion further comprises a damping roller provided to protrude from the inner wall surface of the guide portion toward the tray,
The damping roller, when the tray is in close contact with the inner wall surface of the guide portion, is provided to be in contact with the tray to act as a buffer,
Magnetic levitation transfer device. The method of claim 9,
Further comprising a control unit capable of controlling the magnetic force of the guide electromagnet,
The guide unit,
Further comprising a gap sensor for measuring a gap between the guide electromagnet and the tray,
The control unit,
Controlling the magnetic force of the guide electromagnet so that the gap between the guide electromagnet sensed by the gap sensor and the tray is maintained above a predetermined value,
Magnetic levitation transfer device.

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