KR20190000477A - Device handler - Google Patents

Abstract

The present invention relates to a device handler for performing classification after a test of a device. The device handler according to the present invention includes: a loading unit (100) on which a tray (2) on which a plurality of devices (1) are loaded is loaded; a test unit (300) for performing a test of the plurality of devices (1) received from the loading unit (100); a unloading unit (500) for receiving the devices (1) from the test unit (300) and loading them on the tray (2); a loading buffer unit (210) for receiving the plurality of devices (1) from the loading unit (100) at a loading position (P1) and transferring the devices (1) to the test unit (300) at a first transfer position (P2); a unloading buffer unit (220) for receiving the plurality of devices (1) from the test unit (300) at a second transfer position (P3) located to be opposite to the first transfer position (P2) and transferring them to the unloading unit (500) at a unloading position (P4); a pair of inspection transfer tools (830, 840) for performing device transfer between the first transfer position (P2) and the test unit (300) and device transfer between the test unit (300) and the second transfer position (P3); and an alternate rotation unit for performing alternate rotation and movement of the loading buffer unit (210) between the loading position (P1) and the first transfer position (P2) and alternate rotation and movement of the unloading buffer unit (210) between the second transfer position (P3) and the unloading position (P4).

Description

Device handler

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device handler, and more particularly, to a device handler for performing a post-test classification of a device.

A semiconductor device (hereinafter referred to as an "element") is subjected to various tests such as electrical characteristics, reliability test for heat and pressure by a semiconductor device inspection apparatus after completion of a packaging process.

Inspection of devices can be carried out at room temperature tests conducted at room temperature depending on kinds of devices such as memory devices, non-memory devices such as CPU (Central Processing Unit), GPU (Graphic Processing Unit), LED devices and solar devices, There are various tests such as the heating test performed.

Meanwhile, as the types of IT devices such as smart phones, smart pads, smart TVs, and the like are becoming popular, demand for non-memory devices such as CPUs, that is, LSIs (Large Scale Integration) is rapidly increasing.

However, due to the characteristics of a small number of various types of devices such as an LSI, there is a problem that it is difficult to use expensive testing equipment because the number of tests is smaller than that of a standardized memory device.

It is an object of the present invention to provide an apparatus for inspecting an element of a small variety of items at a high speed in order to solve the above problems.

The present invention has been made in order to achieve the above-mentioned object of the present invention, A loading section (100) in which a tray (2) loaded with a plurality of elements (1) is loaded; A test unit 300 for testing a plurality of devices 1 received from the loading unit 100; An unloading part 500 for receiving the element 1 from the test part 300 and loading it on the tray 2; A plurality of devices 1 are received from the loading unit 100 at a loading position P1 and are horizontally rotatable about the test unit 300. The test unit 300 receives the plurality of devices 1 at a first transfer position P2, 300; < / RTI > The testing unit 300 is rotatable around the test unit 300 and rotates about the test unit 300 at a second transfer position P3 opposite to the first transfer position P2. An unloading buffer unit 220 for receiving a plurality of devices 1 from the unloading unit 300 and for transmitting the unloading unit 500 at an unloading position P4; A pair of test transporting tools (not shown) performing device transfer between the first transfer position (P2) and the test portion (300) and device transfer between the test portion (300) and the second transfer position (830, 840); The alternating rotational movement of the loading buffer portion 210 between the loading position P1 and the first transmitting position P2 and the alternating rotational movement of the loading buffer portion 210 between the second transmitting position P3 and the unloading position P4, And an alternate rotation driving unit for driving alternate rotational movement of the loading buffer unit (210).

The device handler according to the present invention includes a loading and transporting tool 410 for picking up the element 1 from the loading unit 100 and transferring the element 1 to the loading position P1 of the loading buffer unit 210; And an unloading / transporting tool 420 for picking up the tested device 1 from the unloading position P4 of the unloading buffer unit 220 and delivering the unloading / transferring tool 420 to the unloading unit 500.

Before or after being loaded into the loading buffer portion 210 by the loading transfer tool 410, the element 1 is moved in a direction opposite to the rotational direction from the loading position P1 to the first transfer position P2, And the element 1 is rotated from the second transfer position P3 to the unloading position P3 before or after the element 1 is picked up from the unloading buffer unit 220 by the unloading / Can be secondarily rotated in the direction opposite to the direction of rotation to the second direction P4.

The primary rotation of the element 1 is performed while being picked up by the loading and conveying tool 410 and the secondary rotation of the element 1 is picked up by the unloading and conveying tool 420 Lt; / RTI >

Also, the primary rotation of the element 1 is performed in a state of being loaded in the loading buffer unit 210, and the secondary rotation of the element 1 is performed in a state of being loaded in the unloading buffer unit 220 Lt; / RTI >

The loading unit 100, the test unit 300 and the unloading unit 500 are sequentially set and the loading position P1 and the unloading position P4 are set to the loading unit 100, And the unloading unit (500) between the test unit (300) and the test unit (300), and the first transfer position (P2) and the second transfer position (P3) And is set to have an angle difference of 90 degrees around the test portion 300 with respect to the loading position P1 and the unloading position P4.

The loading buffer unit 210 may include at least one loading buffer plate 211 having a seating groove on which the device 1 is mounted and rotated alternately between the loading position P1 and the first transmitting position P2 Wherein the unloading buffer unit 220 includes one or more unloading rotations alternately rotated between the second transfer position P3 and the unloading position P4 and in which a seating groove on which the device 1 is seated is formed, And may include a buffer plate 221.

The loading buffer unit 210 includes a first loading buffer plate 211a and a second loading buffer plate 211b that are alternately rotated so as to be positioned at either the loading position P1 or the first transfer position P2, And the unloading buffer unit 220 includes a first unloading buffer plate 211a and a second unloading buffer plate 220b which are alternately rotated to be located at any one of the first transfer position P2 and the second transfer position P3, A first unloading buffer plate 221a and a second unloading buffer plate 221b.

The positions of the first transfer position (P2) and the second transfer position (P3) may be changed after testing by the test unit (300).

A device handler according to the present invention includes a loading section for loading an element in a state of being loaded on a tray, a testing section for performing a test of the element, an unloading section for loading and unloading the element after the test by the testing section, And the loading buffer unit and the unloading buffer unit for transferring the element from the loading unit to the test unit and for transferring the element from the testing unit to the unloading unit are alternately rotated around the test unit, There is an advantage of being able to perform the test on the device quickly.

Particularly, in performing an inspection for a device having a relatively small quantity and a large change in specification, it is advantageous in that replacement of a tray, a test socket, and the like is easy according to the device standard and the manufacturing cost is remarkably reduced.

1 is a conceptual diagram showing a device handler according to the present invention.
FIGS. 2A to 2E are plan views showing a process of transferring elements in a loading buffer unit, a test unit, and an unloading buffer unit in the element handler of FIG.
FIGS. 3A and 3B are schematic views showing a process of transferring a device by a test transfer tool in a loading buffer unit, a test unit, and an unloading buffer unit in the device handler of FIG.
4 is a schematic view showing a state where the device is pressed into the test socket of the test portion by the device pressing tool shown in Figs. 3A and 3B. Fig.
5A to 5E are schematic views illustrating a process of transferring a device by a test transfer tool in a loading buffer unit, a test unit, and an unloading buffer unit in a device handler according to another embodiment of the present invention.
6 is a conceptual diagram showing a modification of the device handler according to the present invention.
7 is a conceptual view showing an example of a loading transfer tool and / or an unloading transfer tool used in Figs. 1 and 6. Fig.

Hereinafter, a device handler according to the present invention will be described with reference to the accompanying drawings.

1 to 5E, a device handler according to the present invention includes a loading unit 100 in which a tray 2 loaded with a plurality of devices 1 is loaded; A test unit 300 for testing a plurality of devices 1 received from the loading unit 100; An unloading unit 500 for receiving the element 1 from the test unit 300 and loading the element 1 on the tray 2; A plurality of devices 1 are received from the loading unit 100 at a loading position P1 and are mounted on the test unit 300 at a first transfer position P2, A loading buffer unit 210 for transferring the image data; A plurality of test units 300 are provided at a second transfer position P3 which is horizontally rotatable around the test unit 300 and is located opposite to the first transfer position P2 about the test unit 300, An unloading buffer unit 220 for receiving the elements 1 of the unloading unit P4 and for transmitting the unloading unit 500 at the unloading position P4; A pair of inspection conveying tools 830 and 840 for performing device transfer between the first transfer position P2 and the test portion 300 and device transfer between the test portion 300 and the second transfer position P3 )and; The unloading buffer unit 210 between the second transfer position P3 and the unloading position P4 is operated in the alternate rotational movement of the loading buffer unit 210 between the loading position P1 and the first transfer position P2, And an alternate rotation driving unit for driving the alternate rotation movement of the light source.

The device 1 to be inspected by the device handler according to the present invention may be a memory semiconductor, a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), a system LSI (Large Scale Integration), or the like.

Particularly, the device 1 may be any device that is pressed to the test socket 310 of the test unit 300 to form one or more external terminals for performing predetermined tests.

For example, the device 1 may be a BGA device in which ball-shaped external terminals are formed on the bottom surface.

The loading section 100 can be configured as a configuration in which a tray 2 loaded with a plurality of elements 1 for testing is loaded.

For example, the loading unit 100 may include a pair of guide rails for guiding the tray 2 to be moved, and a driving unit (not shown) for moving the tray 2.

For reference, the loading unit 100 may have the same or similar configuration as the loading unit shown in FIG. 2 of Korean Patent Laid-Open No. 10-2010-0107945.

It should be noted that the loading unit 100 may be arranged in two or more rows as shown in FIG. 6 for loading a larger number of devices 1.

The unloading unit 500 can be configured in various ways as a configuration for receiving the element 1 from the test unit 300 and loading it on the tray 2. [

1 and 6, the unloading unit 500 may be configured to classify the devices 1 according to the inspection result of the test unit 300 and to classify the devices 1 into a predetermined classification They can be arranged in a double line according to their rank.

More specifically, the unloading unit 500 is configured such that the transfer lines 510 and 520 to which the trays 2 are transferred are arranged in two rows (three rows in the embodiment of FIG. 6, 510, 520 and 55) The tray 2 of the transfer line 510 of the first row by the sorting tool 530 is loaded into the tray 2 by the test part 300 after the element 1 is loaded from the unloading buffer part 220, It is possible to arrange the elements 2 inspected as non-good by the test part 300 to be loaded on the tray 2 of the transfer line 520 of the second row while leaving only the elements 1 inspected with good parts.

Meanwhile, the sorting tool 530 picks up the element 1 from the tray 2 to sort the element 1 according to the inspection result inspected by the testing unit 2 in the unloading unit 500, Various configurations are possible.

For example, the sorting tool 530 may be provided with a plurality of pickers for picking up the element 1 by the vacuum pressure so as to pick up the plurality of elements 1 in an array of 4 x 1 or the like.

The sorting tool 530 may be installed to move across the transfer line when the transfer lines 510 and 520 to which the tray 2 is transferred are arranged in two or more rows.

Furthermore, the sorting tool 530 can be moved in various directions, such as linear movement in the X-axis direction and Y-axis direction, movement in the XY axis direction, and the like in accordance with the arrangement and transfer of the tray 2 in the unloading section 500 . ≪ / RTI >

The sorting operation of the element 1 in the tray 2 constituting the unloading section 500 is performed separately from the sorting operation of the unloading section 500 in the unloading section 500 Instead of using the sorting tool 530 of FIG. 6, the unloading and transferring tool 420 may be used.

If the unloading and transferring tool 420 performs both loading and sorting from the unloading buffer unit 220 to the tray 2 when the device testing time in the testing unit 300 is relatively long, Configuration is possible.

The tray 2 of the loading unit 100 may be transferred to the unloading unit 500 by a tray transfer unit (not shown) when the device 1 is completely empty.

At this time, the device 1 may remain in the tray 2, and the devices 1 remaining in the tray 2 before the tray 2 is transferred from the loading unit 100 to the unloading unit 500 A tray rotation unit 150 (not shown) may be installed to rotate the tray 2 to remove the remaining elements 1.

The tray rotation unit 150 is installed on the conveyance path of the tray 2 between the loading unit 100 and the unloading unit 500 and receives the tray 2 from the loading unit 100 by the tray sending unit And may be configured to rotate the tray 2 and then transfer the tray 2 to the unloading portion 500.

An empty tray part (2) can be provided at one side of the tray rotating part (150) to supply the empty tray (2) with the unloading part (500) Not shown) may be additionally installed.

Meanwhile, the loading unit 100 and the unloading unit 500 may be arranged in various ways according to design conditions. However, as shown in FIGS. 1 and 6, However, the present invention is not limited thereto.

After the elements 1 are drawn out from the tray 2 by the loading and conveying tool 410 in the loading part 100, the empty trays 2 are transferred to the tested element 1 (not shown) by a tray transfer part To the unloading unit 500 so that they can be loaded.

In order to transfer the element from the loading unit 100 to the loading buffer unit 210 and to transfer the element from the unloading buffer unit 220 to the unloading unit 500, the element handler picks up the element 1, To a loading position (P1) of the buffer unit (210); And an unloading / conveying tool 420 for picking up the tested device 1 from the unloading position P4 of the unloading buffer unit 220 and delivering it to the unloading unit 500.

The loading and unloading tool 410 can be variously configured as a structure for picking up the element 1 from the loading unit 100 and transferring it to the loading position P1 of the loading buffer unit 210. [

The unloading and transferring tool 420 may be configured to pick up the tested device 1 from the unloading position P4 of the unloading buffer unit 220 and to transfer the device 1 to the unloading unit 500. [ It is possible.

For example, the loading transfer tool 410 and the unloading transfer tool 420 may include a picker for picking up and transferring the element 1 by vacuum pressure, and a transfer part for moving the pickers.

The pickers may have various configurations such as a picker disclosed in Korean Patent Laid-Open Publication No. 10-2011-0113930 as a configuration for picking up the device 1 by vacuum pressure.

The loading transfer tool 410 and the unloading / transferring tool 420 are effective in transferring a plurality of devices 1 at a time, and the transfer tool, the transfer tool, A transfer tool module shown in Korean Patent Publication No. 1020150122031, and the like.

Meanwhile, the loading / unloading tool 410 and the unloading / transporting tool 420 are configured such that each of the pickers can move at least one of the individual Z-axis movement and the entire Z-axis movement in consideration of the pickup of the element 1 desirable.

The loading / unloading tool 410 and the unloading / conveying tool 420 may be configured so that each of the pickers is rotated at least one of an individual? -Axis rotation movement and an entire? -Axis rotation movement in consideration of correction of rotation error of the picked- It is preferable to be configured to be able to move.

Here, the &thetas; -axis rotation movement means a rotation in which the picker picks up the element 1, that is, the rotation with the Z axis as the rotation axis.

In particular, as shown in FIG. 7 and FIG. 7, the loading and transporting tool 410 includes a first rotation driving unit (not shown) having a first rotation axis 11; A plurality of pickers 20 coupled to the first rotating shaft 11 in the radial direction and disposed in the circumferential direction of the first rotating shaft 11 and rotated about the first rotating shaft 11; And a second rotation driving unit having a second rotation axis 31 that is perpendicular to the first rotation axis 11 and rotating the first rotation drive unit about the second rotation axis 31 about the second rotation axis 31 .

At this time, the loading / conveying tool 410 is rotated after the element 1 is picked up, and the picked-up element is picked up by the picker 20 so that the pickup state of the element 1 by the picker 20 can be confirmed on the rotation path. Further comprising an image acquisition device (80) for acquiring an image of the back surface of the device (1), wherein the position error of the device (1) from the image acquired by the image acquisition device (80) ) Can be calculated.

On the other hand, when the pick-up state of the element 1, that is, the rotation error (the rotation error) is calculated using the image acquisition device 80, the element 1 can be accurately positioned at the loading position P1.

Particularly, in the case where the ball terminals having a fine arrangement interval are formed on the bottom surface of the element 1, precise positioning of the element 1 is required, and precise mounting of the element 1 by the loading and transporting tool 410 having the above- It becomes possible.

The test unit 300 is configured to perform testing of electrical characteristics such as DC characteristics for a plurality of devices 1 received from the loading unit 100. The test unit 300 may include a room temperature test, Various configurations are possible according to the type of test and device specification such as hot temp. Test.

For example, the test unit 300 may include one or more test sockets 310 for performing tests on each of the devices 1.

The test socket 310 is provided so that the devices 1 can be electrically connected to each other, and can have various configurations according to the type of test and the device standard.

For example, the test socket 310 may include a plurality of m × n (one of m and n is a natural number of 1 or more and a remaining natural number of 2 or more) corresponding to the number and arrangement of the devices 1 to be inspected Lt; / RTI >

In particular, the test socket 310 of the present invention can have a 2x2 array so that it can efficiently cope with inspection of a small number of various types of devices.

Specifically, the test socket 310 may include a device seating groove 311 on which the device 1 is mounted and electrically connected to the device 1, as shown in FIGS. 3A to 4.

The test result of the device 1 tested by the test socket 310 is used as data to be classified by the unloading unit 500, which will be described later.

Specifically, the testing unit 300 sequentially sets the loading unit 100, the test unit 300, and the unloading unit 500, and the loading position P1 and the unloading position P4 are respectively set to a loading The first transfer position P2 and the second transfer position P3 are set between the test section 300 and the test section 300 between the test section 300 and the unloading section 500, 300 and may be set with an angular difference of 90 degrees about the test portion 300 with respect to the loading position P1 and the unloading position P4.

The loading buffer unit 210 includes an unloading unit 500 that receives the element 1 from the test unit 300 and loads the element 1 on the tray 2; A plurality of devices 1 are received from the loading unit 100 at a loading position P1 and are mounted on the test unit 300 at a first transfer position P2, Various configurations are possible as long as they are delivered.

The unloading buffer unit 220 includes a test unit 300 that is horizontally rotatable about a test unit 300 and is disposed at a second transfer position P2, Various configurations are possible as long as the plurality of devices 1 are received from the test unit 300 at the third stage P3 and transferred to the unloading unit 500 at the unloading position P4.

For example, the loading buffer unit 210 and the unloading buffer unit 220 may include one or more buffer plates 211 for temporarily loading the elements 1, respectively.

The buffer plate 211 may be provided for temporary loading of the element 1, and may have various configurations.

By way of example, the buffer plate 211 may have one or more seating grooves 212 for temporary loading of the elements 1 to transport the elements 1.

At this time, the arrangement and the number of the seating grooves 212 may be the same as the arrangement and the number of the test sockets 310.

For example, the seating groove 212 may be arranged in an array of mxn (where one of m and n is a natural number of 1 or more, and the other is a natural number of 2 or more).

In particular, the test socket 310 may have a 2 x 2 array so that it can efficiently cope with inspection of a small variety of devices.

2A to 2E, the loading buffer unit 210 and the unloading buffer unit 220 may include a pair of buffer plates 211, and may include a pair of buffers 211, The plate 211 may be disposed at a position opposite to each other about the test socket 310 on which the test of the element 1 is performed.

The buffer plate 211 is mounted on the buffer plate 211 so that the loading unit 100 and the unloading unit 500 are moved from the first transfer position P2 to the second transfer position P3, So as to maintain the directionality of the element 1 to be mounted on the substrate 1.

The rotation direction of the buffer plate 211 is preferably rotated in a direction opposite to a rotation direction of an alternate rotation driving unit described later.

The inspection transfer tool 830, 840 can be configured in various ways as a configuration for loading and unloading the device 1 into the test socket 310 for testing.

The inspection and conveying tools 830 and 840 are arranged such that the loading unit 100 and the unloading unit 500 are disposed in a direction perpendicular to the loading and unloading direction of the tray 2 with the test unit 300 therebetween The bar and inspection transfer tool 830 and 840 can be disposed in the loading and unloading directions of the tray 2.

For example, the inspection transferring tools 830 and 840 are configured as a pair, and the pair of inspection transferring tools 830 and 840 transfer the devices between the first transfer position P 2 and the test part 300, And may be installed to perform device transfer between the test portion 300 and the second transfer position P3, respectively.

At this time, the inspection and conveying tools 830 and 840 are transferred in a direction perpendicular to the arranging direction of the loading unit 100 and the unloading unit 500, and can transfer the device 1.

3A and FIG. 4, the inspection and conveying tools 830 and 840 include pickers 831 and 841 for picking up the element 1, and a loading unit 100 and an unloading unit 500 A horizontal movement device connected to the inspection and transfer tools 830 and 840 so as to be vertically transferred to the placement direction of the inspection and transfer tools 830 and 840 and a vertical movement device for moving the inspection and transfer tools 830 and 840 in the vertical direction .

The pickers 831 and 841 are provided for pickup and loading of the element 1 and may have various shapes and structures as long as the element 1 can be picked up and loaded.

For example, the pickers 831 and 841 may include a hollow coupling member fixed to the picking block and a hollow absorption pad detachably coupled to the end of the coupling member.

The adsorption pad may be made of a flexible material such as rubber, synthetic resin, or the like.

The horizontal movement device can be configured in various ways as a configuration in which the pickers 831 and 841 are installed to be vertically transported to the loading direction of the loading unit 100 and the unloading unit 500.

The vertical movement device can be configured in various ways as long as it is installed for vertically moving and pressing the device 1 attracted by the pickers 831 and 841.

The alternating rotation driving unit may have a variety of configurations such as a rotary motor for driving the alternating rotational movement of the loading buffer unit 210 and the unloading buffer unit 220.

For example, the alternating rotation drive may be configured to rotate the loading buffer unit 210 in the second transfer position P3 and the unloading position P4 between the loading position P1 and the first transfer position P2, The unloading buffer unit 210 can drive the alternate rotation of the unloading buffer unit 210.

2A to 2E, the loading buffer unit 210 is sequentially transferred between the loading position P1 and the first transfer position P2, and at the same time, the unloading buffer unit 210 220 can be transferred from the unloading position P4 to the second transfer position P3.

As the elements 1 are moved by the alternate rotation driving unit, the loading buffer unit 210 and the unloading buffer unit 220 are alternately rotated and the directions of the elements 1 are changed. As a result, It is necessary to rotate the direction of the element 1 so that the directionality of the elements 1 can be maintained.

Therefore, a direction in which the direction of the element 1 is seated on the tray 2 and a direction in which the element 1 is loaded is additionally provided with a rotating means for matching the direction in which the element 1 is seated on the tray 2 and loaded and unloaded .

By way of example, the element 1 may be rotated by a loading transfer tool 410 and an unloading transfer tool 420.

Specifically, the element 1 is moved in the direction of rotation from the loading position Pl to the first transfer position P2 and before and after the loading of the loading buffer portion 210 by the loading / The element 1 is rotated from the second transfer position P3 to the unloading buffer portion 220 before or after the element 1 is picked up from the unloading buffer portion 220 by the unloading / And can be secondarily rotated in the direction opposite to the rotational direction to the position P4.

More specifically, the primary rotation of the element 1 is performed while being picked up by the loading / conveying tool 410, and the secondary rotation of the element 1 is picked up by the unloading / Lt; / RTI >

At this time, the rotation direction of the loading transfer tool 410 and the unloading / conveying tool 420 is rotated in the direction opposite to the rotation direction of the loading buffer unit 210 and the unloading buffer unit 220 by the alternate rotation driving unit desirable.

Meanwhile, the device 1 may be loaded in the loading buffer unit 210 and the unloading buffer unit 220, respectively.

Specifically, the primary rotation of the element 1 is performed in a state of being loaded on the loading buffer unit 210, and the secondary rotation of the element 1 is performed in a state of being loaded on the unloading buffer unit 220 .

At this time, it is preferable that the positions of the first transmitting position P2 and the second transmitting position P3 are changed after testing by the testing unit 300. [

Meanwhile, the loading buffer unit 210 and the unloading buffer unit 220 may be composed of a plurality of pairs of buffer plates 211.

The loading buffer unit 210 and the unloading buffer unit 220 may include two pairs of buffer plates 211, as shown in FIGS. 5A to 5E.

More specifically, the loading buffer unit 210 includes a first loading buffer plate (not shown) for transferring the element 1 to either the first transfer position P2 or the second transfer position P3 at the loading position P1, And a second loading buffer plate 211b for transferring the element 1 from the loading position P1 to another position and the unloading buffer unit 220 is connected to the test socket 310 And is disposed at a position facing each of the first loading buffer plate 211a and the second loading buffer plate 211b in the center thereof and is disposed at a position between any one of the first transmitting position P2 and the second transmitting position P3 And may include a first unloading buffer plate 221a and a second unloading buffer plate 221b for transferring the element 1 to the loading position P4.

More specifically, the element 1 is sequentially loaded on or transferred to the first loading buffer plate 211a and the first unloading buffer plate 221a, or transferred to the second loading buffer plate 211b, Can be sequentially stacked and transported to the transport unit 221b.

The first loading buffer plate 211a and the first unloading buffer plate 221a are transferred from the loading position P1 to either the first transfer position P2 or the second transfer position P3 And the second loading buffer plate 211b and the second unloading buffer plate 221b are rotated from the other position where the first loading buffer plate 211a and the first unloading buffer plate 221a are transferred And can be transported to the loading position P4 and rotated.

At this time, the rotational direction of the first loading buffer plate 211a, the first unloading buffer plate 221a, the first loading buffer plate 211a, and the first unloading buffer plate 221a is changed in the rotational direction .

In particular, the first loading buffer plate 211a and the first unloading buffer plate 221a may be fixed to one support structure in pairs so that rotational drive by the alternate rotary drive unit is smooth, Is rotationally driven by the alternate rotation drive section.

Meanwhile, the loading buffer unit 210, the test unit 300, and the unloading buffer unit 210 can be rotated variously by the alternate rotation driving unit.

First, the loading buffer unit 210, the test unit 300, and the unloading buffer unit 210 are fixed to one rotating structure. The rotating driving unit rotates the rotating structure to rotate the loading buffer unit 210, 300 and the unloading buffer unit 210 can be rotated at a time.

The loading buffer unit 210 and the unloading buffer unit 210 are fixed to one rotating structure except for the test unit 300. The rotating driving unit rotates the rotating structure to rotate the loading buffer unit 210 and the unloading buffer unit 210. [ The buffer unit 210 can be rotated at a time.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the appended claims. It is to be understood that both the technical idea and the technical spirit of the invention are included in the scope of the present invention.

100: loading section 210: loading buffer section
220: unloading buffer unit 500: unloading unit

Claims (9)

A loading section (100) in which a tray (2) loaded with a plurality of elements (1) is loaded;
A test unit 300 for testing a plurality of devices 1 received from the loading unit 100;
An unloading part 500 for receiving the element 1 from the test part 300 and loading it on the tray 2;
A plurality of devices 1 are received from the loading unit 100 at a loading position P1 and are horizontally rotatable about the test unit 300. The test unit 300 receives the plurality of devices 1 at a first transfer position P2, 300; < / RTI >
The testing unit 300 is rotatable around the test unit 300 and rotates about the test unit 300 at a second transfer position P3 opposite to the first transfer position P2. An unloading buffer unit 220 for receiving a plurality of devices 1 from the unloading unit 300 and for transmitting the unloading unit 500 at an unloading position P4;
A pair of test transporting tools (not shown) performing device transfer between the first transfer position (P2) and the test portion (300) and device transfer between the test portion (300) and the second transfer position (830, 840);
The alternating rotational movement of the loading buffer portion 210 between the loading position P1 and the first transmitting position P2 and the alternating rotational movement of the loading buffer portion 210 between the second transmitting position P3 and the unloading position P4, And an alternate rotation driving unit for driving alternate rotational movement of the loading buffer unit (210). The method according to claim 1,
A loading transfer tool 410 for picking up the element 1 from the loading unit 100 and transferring the element 1 to the loading position P1 of the loading buffer unit 210;
And an unloading / conveying tool (420) for picking up the tested device (1) from the unloading position (P4) of the unloading buffer unit (220) Device handler. The method of claim 2,
Before or after being loaded into the loading buffer portion 210 by the loading transfer tool 410, the element 1 is moved in a direction opposite to the rotational direction from the loading position P1 to the first transfer position P2, Rotated,
The element 1 is moved from the second transfer position P3 to the unloading position P4 before or after the element 1 is picked up from the unloading buffer unit 220 by the unloading / Is rotated in a second direction opposite to the direction of rotation of the element handler. The method of claim 3,
The primary rotation of the element 1 is performed in a state of being picked up by the loading and transporting tool 410,
Characterized in that the secondary rotation of the element (1) is carried out in the state of being picked up by the unloading transfer tool (420). The method of claim 3,
The primary rotation of the element 1 is performed in a state of being loaded on the loading buffer unit 210,
Characterized in that the secondary rotation of the element (1) is performed in a state of being loaded on the unloading buffer unit (220). The method according to any one of claims 1 to 5,
The loading unit 100, the test unit 300, and the unloading unit 500 are sequentially set,
The loading position P1 and the unloading position P4 are set between the loading unit 100 and the test unit 300 between the test unit 300 and the unloading unit 500, And,
The first transfer position P2 and the second transfer position P3 are opposite to each other with respect to the test portion 300 and the test position of the test portion 300 is different from that of the test portion 300 with respect to the loading position P1 and the unloading position P4, Is set with an angular difference of 90 DEG about the axis (300). The method of claim 6,
The loading buffer unit 210 may include at least one loading buffer plate 211 having a seating groove on which the device 1 is mounted and rotated alternately between the loading position P1 and the first transmitting position P2 ≪ / RTI &
The unloading buffer unit 220 may include at least one unloading buffer plate (not shown) having a seating groove on which the device 1 is mounted, which is alternately rotated between the second transfer position P3 and the unloading position P4. 221). ≪ / RTI > The method of claim 7,
The loading buffer unit 210 includes a first loading buffer plate 211a and a second loading buffer plate 211b that are alternately rotated so as to be positioned at either the loading position P1 or the first transfer position P2, 211b)
The unloading buffer unit 220 includes a first unloading buffer plate 221a and a second unloading buffer plate 221b which are alternately rotated to be located at any one of the first transfer position P2 and the second transfer position P3, And an unloading buffer plate (221b). The method of claim 6,
Wherein the positions of the first transfer position (P2) and the second transfer position (P3) are changed after testing by the test unit (300).

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