KR20170130351A - Tank for liquid chemical substance - Google Patents

Abstract

(2) for liquid chemicals in which contamination of liquefied chemicals is preferably prevented, which can be suitably used as tanks for high purity liquid chemicals such as high purity trichlorosilane. The tank 2 has a tank main body 4 and a connecting unit 6 attached to the tank main body 4. The connection unit 6 includes a chemical flow path 8 having a dipping portion 8a to be immersed in a chemical substance in the tank main body 4 and a leading portion 8b to be led from the tank main body 4, And a gas flow path 10 directed from the one end communicated with the gas flow path 10. The leading portion 8b of the chemical flow path 8 is provided with a first opening and closing valve means 14 located on the downstream side in view of the chemical filling direction into the tank main body 4 and a second opening and closing valve means 14 located on the upstream side The second opening / closing valve means 16 is disposed. The gas flow path 10 is provided with a third opening / closing valve means 20 located on the downstream side in the gas inflow direction to the tank main body 4 and a fourth opening / closing valve means 22 located on the upstream side in the gas inflow direction, Respectively. The connection unit 6 is provided between the first open / close valve means 14 and the second open / close valve means 16 in the chemical flow path 8, (12) for connecting a portion between the second open / close valve means (20) and the fourth open / close valve means (22). And the fifth open / close valve means 24 is disposed in the connection flow path 12.

Description

[0001] TANK FOR LIQUID CHEMICAL SUBSTANCE [0002]

The present invention relates to a method and apparatus for dispensing liquid chemicals from a chemical source such as a liquid chemical manufacturing apparatus to a location where a chemical consuming apparatus located apart from the chemical supplying source is installed, To a tank which is repeatedly used for supplying the water.

As is well known, it is necessary to supply high purity trichlorosilane to an epitaxial wafer production apparatus, and in general, the following supply mode is employed. The high-purity trichlorosilane produced in the high-purity trichlorosilane production apparatus is filled in a tank, the high-purity trichlorosilane charged in the tank is transferred to an epitaxial wafer producing apparatus, To the manufacturing apparatus. When the high purity trichlorosilane in the tank is consumed, the tank is returned to the region where the trichlorosilane production apparatus is equipped for reuse, and the tank is filled with high purity trichlorosilane again.

As a tank used in a supply mode as described above of a liquid chemical substance such as high purity trichlorosilane, there is a tank disclosed in Patent Document 1 below. This tank is composed of a tank body and a connection unit attached to the tank body. The connecting unit includes a chemical flow path having a dipping portion immersed in a liquid chemical substance such as high purity trichlorosilane in the tank main body and a running portion extending from the tank main body and a gas flow path directed from the one end communicating with the tank main body . An opening / closing valve means is disposed in the chemical flow path, and an opening / closing valve means is disposed in the gas flow path. Further, a connecting passage for connecting the opening / closing valve means in the chemical flow path and the opening / closing valve means in the gas flow path is also disposed, and the connecting / closing valve means is also disposed in the connecting flow path. In Patent Document 1, it is also described that the connecting unit is cleaned with an inert gas such as helium (however, the cleaning style is not necessarily clearly described).

Japanese Patent Publication No. 2011-500470

However, it is important that a chemical such as high-purity trichlorosilane is prevented from being contaminated by contact with air, liquid or the like as much as possible to maintain high purity. However, in the tank disclosed in Patent Document 1, Each of them is disposed outside only a single opening / closing valve means, and thus prevention of contamination is not necessarily sufficient.

DISCLOSURE OF THE INVENTION The present invention has been made in view of the above facts and it is an object of the present invention to provide a method and apparatus for removing contaminants from a liquefied chemical substance which can be suitably used as a tank for a highly pure liquid chemical substance such as high purity trichlorosilane, To provide a tank for an improved liquid chemical substance that is prevented as much as possible.

As a result of intensive studies and events, the inventors of the present invention found that the above-mentioned technical problem can be solved by making the connection unit provided in the tank main body to have a unique constitution in which the double opening / closing valve means is disposed in each of the chemical flow path and the gas flow path I got it.

That is, according to the present invention, there is provided a tank for a liquid chemical substance capable of achieving the main technical problem, comprising: a tank for a liquid chemical substance having a tank body and a connection unit attached to the tank body;

Wherein the connection unit includes a chemical flow path having a dipping portion immersed in the chemical substance in the tank main body and a leading portion led out from the tank main body and a gas flow path directed from one end communicated with the tank main body,

The first opening / closing valve means located on the downstream side in the chemical substance filling direction into the tank main body and the second opening / closing valve means located on the upstream side in the chemical substance filling direction are disposed in the extended portion of the chemical substance flow path And,

The gas flow path is provided with third open / close valve means located on the downstream side as viewed in the gas inflow direction into the tank main body and fourth open / close valve means located on the upstream side in the gas inflow direction,

A portion between the first opening / closing valve means and the second opening / closing valve means in the chemical flow path and a portion between the third opening / closing valve member and the fourth opening / closing valve means in the gas flow passage are connected And a fifth opening / closing valve means is disposed in the connecting passage

Wherein the tank is provided with a tank.

Suitably, the connection adapter is applied to the chemical consuming apparatus to which the chemical source and the connection adapter are attached,

Wherein each of the connection adapters has a chemical substance connecting flow path whose one end is connected to the chemical substance supply source or the chemical substance consuming device and the other end is connected to the leading end of the chemical substance flow path, And one end connected to the gas supply source, and the other end connected to the outflow end of the gas flow path, and the other end connected to the gas supply source, And a second gas supply passage connected to the gas supply source at the other end,

Closing valve means located downstream of the one end of the first gas supply passage as viewed in a direction toward the inside of the tank main body and a second opening / closing valve means located downstream of the first gas supply passage in a direction toward the inside of the tank main body, Closing valve means located upstream of the one end of the supply passage,

Wherein the gas connection passage includes an eighth open / close valve means located downstream of the one end of the second gas supply passage in a direction toward the inside of the tank main body, The ninth opening / closing valve means located upstream of the one end of the flow path is disposed,

The tenth open / close valve means is disposed in the first gas supply passage,

And the eleventh open / close valve means is disposed in the second gas supply passage.

According to the tank of the present invention, as will be clearly understood from the following description, when the tank body is filled with the liquid chemical in the region where the liquid chemical manufacturing apparatus is equipped, When transporting the tank to the area where the consuming device is installed, when supplying the chemical substance of the tank body to the chemical consuming device in the area where the chemical consuming device is equipped, and when the tank in which the chemical substance in the tank body is consumed It is sufficiently reliably prevented that the chemical is contaminated in any case when it is returned to the area where the chemical manufacturing apparatus is equipped.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a simplified diagram showing a suitable embodiment of a tank constructed in accordance with the present invention;
2 is a partial plan view of the tank shown in Fig.
Fig. 3 is a schematic view for explaining the tank usage style when the liquid chemical is charged into the tank main body of the tank shown in Fig. 1. Fig.
Fig. 4 is a schematic view for explaining a tank usage style when supplying the liquid chemical substance from the tank main body of the tank shown in Fig. 1 to the chemical consuming device. Fig.
Fig. 5 is a schematic view showing an additional connecting unit applied to the tank shown in Fig. 1. Fig.

Hereinafter, a tank constructed in accordance with the present invention will be described in more detail with reference to the accompanying drawings.

1, the tank 2 constructed in accordance with the present invention is constituted by a tank body 4 and a connection unit 6 attached to the tank body 4. As shown in Fig. The tank body 4, which can be made of a suitable material such as stainless steel, may have a suitable hollow structure. However, in the illustrated embodiment, the tank body 4 has a cylindrical shape elongated in a transverse direction (left and right direction in FIG. 1) (The left side and the right side in Fig. 1) are convex. A connection unit 6 is laid on the upper surface of the tank main body 4. As shown in Fig.

2, the connection unit 6 includes a chemical flow path 8, a gas flow path 10, and a connection flow path 12. As shown in Fig.

The chemical flow path 8 has a dipping portion 8a which is immersed in a liquid chemical substance (not shown) filled in the tank main body 4 and a extending portion 8b which is led from the tank main body 4. [ Closing valve means 14, that is, the first opening / closing valve means 14, located on the downstream side in view of the chemical filling direction (downward in FIG. 1) to the tank main body 4, is formed in the extended portion 8b of the chemical flow path 8, And an opening / closing valve means located on the upstream side in the chemical filling direction, that is, a second opening / closing valve means 16 are disposed. In the illustrated embodiment, the second opening / closing valve means 16 is disposed at the leading end of the chemical flow path 8. As can be understood by referring to Fig. 2, the chemical flow path 8 includes a straight tubular member extending straight and a substantially elongated curved elastic member defining the flow path, and the first opening / closing valve means 14 and the second opening / 2 valve valve unit 16, in the illustrated embodiment, a ball valve member having a manual operation handle is interposed as necessary and connected. The interconnections between the tubular members can be achieved by a suitable connection style such as welding and the connection of the valve members to the straight tubular member and the elec- tronic retention member is achieved by connecting the connecting flange, And by fastening by suitable fastening means, such as bolts and nuts, through the appropriate packing to the connecting flange in which it is placed. The connection with the tank main body 4 can be performed by connecting the flange 18 (Fig. 2) attached to the required portion of the pipe member in a state of hermetically closing the opening formed in the tank main body 4. [

The gas flow path 10 is directed from one end communicating with the tank main body 4. The gas flow path 10 is provided with an opening / closing valve means, that is, a third opening / closing valve means 20 located on the downstream side in the gas inflow direction (downward in FIG. 1) to the tank main body 4, Closing valve means located on the upstream side of the bore, that is, the fourth opening / closing valve means 22 are disposed. In the illustrated embodiment, the fourth opening / closing valve means 22 is disposed at the leading end of the gas flow path 10. This gas flow path 10 also has a straight tubular member and a substantially elongated curved straight tubular member which define the flow path and define the flow channel as well as the chemical flow path 8 and the third open / close valve means 20 and fourth It is preferable that the valve member is constituted by connecting an appropriate valve member constituting the opening / closing valve means 22, in the illustrated embodiment, a ball valve member having a manual operation handle interposed as necessary. The connection with the tank main body 4 can be performed by connecting the flange 23 (Fig. 2) attached to the required portion of the pipe member in a state of hermetically closing the opening formed in the tank main body 4. [

The connection channel 12 is connected to a portion between the first opening / closing valve means 14 and the second opening / closing valve means 16 in the chemical flow path 8, Closing valve means (20) and the fourth opening / closing valve means (22). An open / close valve means, that is, a fifth open / close valve means 24 is disposed in the connecting flow path 12. As shown in Fig. 2, the connection channel 12 is a straight tube member that extends straight and defines a flow path, and a suitable valve member constituting the fifth opening / closing valve means 24, in the illustrated embodiment, And a ball valve member having an operation handle interposed therebetween. One end (the right end in FIG. 1) of the connection channel 12 communicates with the extended portion 8b of the chemical channel 8 and the other end (left end in FIG. 1) communicates with the gas channel 10 . More specifically, as shown in Fig. 2, one end of a pipe member constituting the connection channel 12 is connected to a connection portion formed on a side face of the pipe member constituting the chemical channel 8, One end of the other tubular member constituting the connecting flow path 12 is connected to the connecting portion formed on the side surface of the tubular member constituting the gas flow path 10 and is connected to the gas flow path 10, Respectively.

Next, the usage style of the tank 2 will be described as described above.

[Charging of chemical]

3, when a liquid chemical substance such as trichlorosilane is charged in the tank main body 4 of the tank 2, a chemical substance supply source 26 such as a liquid chemical substance manufacturing facility or a liquid chemical substance storage facility ) Are present. A connection adapter 28 is attached to the chemical supply source 26. The connection adapter 28 includes a chemical connecting passage 30 and a gas connecting passage 32. One end of the chemical connection passage 30 is connected to the chemical supply source 26 and the other end of the gas connection passage 32 is open to the atmosphere through a suitable chemical removing means (not shown) . On the other hand, the other end of the chemical connecting passage 30 and the other end of the gas connecting passage 32 are connected to each other in the connecting unit 6 of the tank 2 when the liquid chemical is filled in the tank main body 4 Is connected to a leading end of the chemical flow path (8) and a leading end of the gas flow path (10). The connection adapter 28 further includes a first gas supply passage 34 and a second gas supply passage 36. One end of the first gas supply passage 34 is connected to the chemical connection passage 30 and the other end of the second gas supply passage 36 is connected to the gas connection passage 32. The other end of the first gas supply passage 34 and the other end of the second gas supply passage 36 are connected to a gas supply source 37 for supplying a seal gas composed of an inert gas such as argon, hydrogen, nitrogen and helium . Closing valve means located downstream of the one end of the first gas supply passage 34 as viewed in the direction toward the inside of the tank main body 4 (leftward in FIG. 1) That is, the seventh open / close valve means 38 and the opening / closing valve means located upstream of the one end of the first gas supply passage 34 as viewed in the direction toward the inside of the tank main body 4, 40 are disposed. The gas connection passage 32 is provided with opening and closing valve means located on the downstream side of the one end of the second gas supply passage 36 as viewed in the direction toward the inside of the tank main body 4 Closing valve means 42 and an opening / closing valve means located on the upstream side of the one end of the second gas supply passage 36 as viewed in the direction toward the inside of the tank main body 4, namely, the ninth opening / closing valve means 44 . Closing valve means, that is, the tenth opening / closing valve means 46 and the opening / closing valve means, that is, the eleventh opening / closing valve means 48, are disposed in the first air supply passage 34 and the second air supply passage 36, . The chemical connecting passage 30, the gas connecting passage 32, the first gas supplying passage 34 and the second gas supplying passage 36 are constituted by appropriately connecting appropriate tubular members through necessary opening / closing valve means can do. The opening / closing valve means can be preferably configured as a ball valve having a manual operation handle.

After connecting the connection unit 6 of the tank 2 and the connection adapter 28 attached to the chemical supply source 26 as shown in Fig. 3, the following process is performed.

1. Confirm Confidentiality

In the initial state in which the first to eleventh switching valve means 14, 16, 20, 22, 24, 38, 40, 42, 44, 46 and 48 are closed, the sixth opening / closing valve means 38 and the eighth The chemical connection flow path 30 and the gas connection flow path 30 are opened in such a manner that the opening and closing valve means 42 is opened and the tenth opening and closing valve control means 46 and the eleventh opening and closing valve means 48 are opened, 32). Subsequently, it is checked whether or not airtightness is ensured in the entire facility, in other words, whether or not leakage of the chemical substance and the seal gas occurs. After confirming that airtightness is ensured, the tenth opening / closing valve control means 46 and the eleventh opening / closing valve means 48 are closed.

2. Gas replacement

Then, the second opening / closing valve means 16, the fourth opening / closing valve means 22, the fifth opening / closing valve means 24 and the ninth opening / closing valve means 44 are opened, The sealing gas is caused to flow through the chemical connecting passage 30 and the gas connecting passage 32 in this way and the gas present in the chemical connecting passage 30 and the gas connecting passage 32 is purged . Thereafter, the tenth opening / closing valve means 46 is closed and the fifth opening / closing valve means 24 is closed.

3. Charging

Then, the first and second open / close valve means 14, the third open / close valve means 20 and the seventh open / close valve means 40 are opened, And flows the liquid chemical substance into the tank main body 4 through the chemical flow path 8. [ The charged amount of the liquid chemical substance into the tank main body 4 can be measured by loading the entirety of the tank 2 on a load cell (not shown) via an appropriate chassis (not shown) Can be recognized by measuring the variation. Alternatively, it may be recognized as an integrated flowmeter disposed in the chemical flow path 8 or the chemical connection flow path 30. When the required amount of the liquid chemical substance is filled in the tank main body 4, the seventh open / close valve means 40 is closed to stop the charging, and the tenth open / close valve means 46 is opened, And discharges the liquid chemical substance staying in the connection flow path 30 and the chemical flow path 8 into the tank main body 4.

4. Gas pressure

The third open / close valve means 20 is closed to introduce a seal gas into the tank main body 4 to apply a pressure of about 100 kPaG, and then the first open / close valve means 14 is closed. When the pressure is lowered due to the absorption of the seal gas into the chemical substance, the first opening / closing valve means 14 is opened to increase the pressure by introducing the sealing gas.

5. Gas replacement

Thereafter, the fifth opening / closing valve means 24 is opened to purge the gas in the chemical connecting passage 30 and the gas connecting passage 32 by the sealing gas.

6. Sealing

Then, the fourth opening / closing valve means 22, the eighth opening / closing valve means 42 and the ninth opening / closing valve means 44 are closed, the tenth opening / closing valve means 46 is closed, Closing means 38, second open / close control valve 16 and fifth open / close control valve 24 are closed. At this time, it is preferable to make a state in which a positive pressure due to the seal gas is generated in the flow path from the second opening / closing valve means 16 to the fourth opening / closing valve means 22 via the fifth opening / closing valve means 24 Do.

7. Pressure Relief

Then, it is preferable that dehydration opening / closing valve means (for example, as shown in Fig. 1) disposed on the downstream side of the sixth opening / closing valve means 38 as viewed in the direction toward the tank main body 4 in the chemical substance connecting passage 30 Closing valve means (not shown) disposed downstream of the eighth open / close valve means 42 as viewed in the direction toward the tank main body 4 of the gas connection passage 32 and / The static pressure in the material connecting passage 30 and / or the gas connecting passage 32 is released. Thereafter, the chemical connecting passage 30 and the gas connecting passage 32 are separated from the chemical passage 8 and the gas passage 10 in the connecting unit 6 of the tank 2, respectively. Therefore, the tank 2 is allowed to be transported to a region remote from the region where the chemical supply source 26 is installed (region where a chemical consuming device described later is equipped). (Not shown) such as a fitting cap or an insertion stopper is detachably mounted on the leading end of the chemical flow path 8 and the leading end of the gas flow path 10.

[Supply of chemicals]

4, the tank 2 in which a necessary amount of the liquid chemical substance is filled in the tank main body 4 as described above is transported by an appropriate transport means (not shown) such as a dedicated track car, And is conveyed to an area where a chemical consuming device 50 such as a wafer manufacturing device is equipped. The chemical consuming device 50 is provided with a connection adapter 28 '. This connection adapter 28 'may be substantially the same as the connection adapter 28 shown in FIG. 3, that is, the connection adapter 28 attached to the chemical substance supply source 26. In Fig. 4, the number of the corresponding component in the connection adapter 28 is added to each constituent element of the connecting adapter 28 ', in which "'" is added. A description of the configuration of the connection adapter 28 'is omitted to avoid duplication of description.

The other end of the chemical connection passage 30 'at one end of the connection adapter 28' is connected to the chemical consuming device and the other end of the gas connection passage 32 ' Of the connection unit 4 of the tank 2 is connected to the leading end of the chemical passage 8 and the leading end of the gas passage 10 in the connecting unit 4 of the tank 2, The connection adapter 28 'attached to the connection adapter 50 is connected. Then the following process is carried out.

1. Confirmation of confidentiality and 2. Gas substitution

Initially, 1. Confirmation performed on the filling of the chemical and 2. Confirmation of gas tightness and gas substitution are performed in the same way as gas substitution. Then, the ninth opening / closing valve means 44 'is closed.

3. Supply Pretreatment

Thereafter, the eleventh open / close valve means 48 ', the eighth open / close valve means 42', the fourth open / close valve means 22 and the third open / close valve means 20 are opened, (4) is set to the necessary static pressure.

4. Supply

Then, the first and second opening / closing valve means 14, the second opening / closing valve means 16, the sixth opening / closing valve means 38 'and the seventh opening / closing valve means 40' Is supplied to the chemical consuming device (50) through the chemical flow path and the chemical connecting flow path (30 '). The supply amount of the liquid chemical substance to the chemical consuming apparatus 50, in other words, the remaining amount of the liquid chemical substance in the tank main body 4, is set to, for example, the entirety of the tank 2 via a proper chassis (not shown) (Not shown) to measure the variation in the weight of the tank 2, thereby recognizing it.

5. Suspension and cleaning

When substantially all of the liquid chemical substance in the tank main body 4 is discharged and supplied to the chemical consuming device 50, the seventh open / close valve means 40 'is closed so that the liquid chemical The supply of the substance is stopped and the eleventh open / close valve means 48 'is closed, and the tenth open / close valve means 44' is opened to depressurize the inside of the tank main body 4. Then, the tenth opening / closing valve means 46 is opened to return the liquid chemical substance remaining in the chemical substance connecting passage 30 'and the chemical substance passage 8 back into the tank main body 4.

6. Gas pressurization 7. Gas displacement 8. Sealing 9. Pressure release

6. Gas pressurization, 7. Gas substitution, 8. Sealing and 9. Pressurization as in the case of gas pressurization, 5. Gas substitution, 6. Sealing and 7. Dissipation, . In this way, the tank 2 is allowed to be returned to the area where the chemical supply source 26 is installed, from the area where the chemical consumption device 50 is installed. At this time, it is preferable that an appropriate closing means (not shown) such as a fitting cap or an insertion stopper is detachably mounted on the leading end of the chemical flow path 8 and the leading end of the gas flow path 10.

In the supply of the liquid chemical substance and / or the supply of the liquid chemical substance as described above, the leading end of the chemical substance flow path 8 in the connection unit 4 of the tank 2, Of the chemical connecting passage 30 (30 ') and the gas connecting passage 32 (32') of the connecting unit 28 (28 ') to the leading end of the gas passage 10 When the other end is difficult to connect, the auxiliary connection adapter 52 can be used as shown in Fig. The auxiliary connection adapter 52 is suitable for connecting to the leading end of the chemical flow path 8 at one end and a chemical auxiliary connection (not shown) suitable for connecting to the other end of the chemical connection flow path 30 A gas auxiliary connection passage 56 suitable for connecting to the other end of the gas connection passage 32 or 32 'and the other end suitable for connection to the leading end of the gas passage 10 . The twelfth open / close valve means 58 and the thirteenth open / close valve means 60 are disposed in the chemical auxiliary flow passage 54 and the auxiliary connection flow passage 56, respectively. The twelfth open / close valve means 58 and the thirteenth open / close valve means 60 are arranged in the order of the second open / close valve means 16 and the fourth open / close valve means 22, respectively, when the auxiliary adapter 52 is used. It is opened and closed by opening and closing.

2: tank
4: tank body
6: connection unit
8: Chemicals Euro
10:
12: Connection channel
14: first opening / closing valve means
16: second open / close valve means
20: the third opening / closing valve means
22: Fourth opening / closing valve means
24: the fifth opening / closing valve means
26: Chemical source
28 and 28 ': connection adapter
30 and 30 ': chemical substance connecting flow path
32 and 32 ': gas connection channel
34 and 34 ': the first gas supply passage
36 and 36 ': the second gas supply passage
37 and 37 ': gas source
38 and 38 ': sixth on-off valve means
40 and 40 ': Seventh open / close valve means
42 and 42 ': the eighth open / close valve means
44 and 44 ': ninth opening / closing valve means
46 and 46 ': the tenth opening / closing valve means
48 and 48 ': the eleventh open / close valve means
50: Chemical Consumption Device
52: Auxiliary connection adapter
54: chemical auxiliary connection channel
56: gas assisted connection channel
58: the twelfth opening / closing valve means
60: the thirteenth opening / closing valve means

Claims (2)

A combination of a tank for a liquid chemical substance having a tank main body and a connection unit attached to the tank main body, and a chemical supply source to which a connection adapter is attached,
Wherein the connection unit includes a chemical flow channel having a dipping portion immersed in the chemical substance in the tank body and a running portion extended from the tank body and a gas flow path directed from one end communicated with the tank main body ,
The first opening / closing valve means located on the downstream side in the chemical substance filling direction into the tank main body and the second opening / closing valve means located on the upstream side in the chemical substance filling direction are disposed in the extended portion of the chemical substance flow path And,
The gas flow path is provided with third open / close valve means located on the downstream side as viewed in the gas inflow direction into the tank main body and fourth open / close valve means located on the upstream side in the gas inflow direction,
A portion between the first opening / closing valve means and the second opening / closing valve means in the chemical flow path and a portion between the third opening / closing valve member and the fourth opening / closing valve means in the gas flow passage are connected And a fifth opening / closing valve means is disposed in the connecting passage,
Wherein each of the connection adapters has a chemical substance connecting flow path whose one end is connected to the chemical substance supply source or the chemical substance consuming device and the other end is connected to the leading end of the chemical substance flow path, And one end connected to the gas supply source, and the other end connected to the outflow end of the gas flow path, and the other end connected to the gas supply source, And a second gas supply passage connected to the gas supply source at the other end,
Closing valve means located downstream of the one end of the first gas supply passage as viewed in a direction toward the inside of the tank main body and a second opening / closing valve means located downstream of the first gas supply passage in a direction toward the inside of the tank main body, Closing valve means located upstream of the one end of the supply passage,
Wherein the gas connection passage includes an eighth open / close valve means located downstream of the one end of the second gas supply passage in a direction toward the inside of the tank main body, The ninth opening / closing valve means located upstream of the one end of the flow path is disposed,
The tenth open / close valve means is disposed in the first gas supply passage,
And the eleventh open / close valve means is disposed in the second gas supply passage. A combination of a tank for a liquid chemical substance having a tank main body and a connection unit attached to the tank main body, and a chemical consuming device to which a connection adapter is attached,
Wherein the connection unit includes a chemical flow path having a dipping portion immersed in the chemical substance in the tank main body and a leading portion led out from the tank main body and a gas flow path directed from one end communicated with the tank main body,
The first opening / closing valve means located on the downstream side in the chemical substance filling direction into the tank main body and the second opening / closing valve means located on the upstream side in the chemical substance filling direction are disposed in the extended portion of the chemical substance flow path And,
The gas flow path is provided with third open / close valve means located on the downstream side as viewed in the gas inflow direction into the tank main body and fourth open / close valve means located on the upstream side in the gas inflow direction,
A portion between the first opening / closing valve means and the second opening / closing valve means in the chemical flow path and a portion between the third opening / closing valve member and the fourth opening / closing valve means in the gas flow passage are connected And a fifth opening / closing valve means is disposed in the connecting passage,
Wherein each of the connection adapters has a chemical substance connecting flow path whose one end is connected to the chemical substance supply source or the chemical substance consuming device and the other end is connected to the leading end of the chemical substance flow path, A first gas supply passage whose one end is connected to the chemical substance supply passage and the other end is connected to a gas supply source, and a second gas supply passage which is connected to the gas supply passage at one end, Includes a second gas supply passage connected to the gas supply source,
Closing valve means located downstream of the one end of the first gas supply passage as viewed in a direction toward the inside of the tank main body and a second opening / closing valve means located downstream of the first gas supply passage in a direction toward the inside of the tank main body, Closing valve means located upstream of the one end of the supply passage,
Wherein the gas connection passage includes an eighth open / close valve means located downstream of the one end of the second gas supply passage in a direction toward the inside of the tank main body, The ninth opening / closing valve means located upstream of the one end of the flow path is disposed,
The tenth open / close valve means is disposed in the first gas supply passage,
And the eleventh open / close valve means is disposed in the second gas supply passage.

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