KR20160105005A - Thin biosensor display platform - Google Patents

Abstract

The present invention relates to a film type biosensor display platform. The film type biosensor display platform related to an example of the present invention comprises: a substrate; a biosensor mounted on at least a part of the substrate, and generating sensor signals from an object to be tested; a display part mounted on at least a part of the substrate, and displaying the sensor signals generated by the biosensor; and a circuit which electrically connects the biosensor and the display part. The circuit can be integrally formed with the substrate by being printed on the substrate. The biosensor display platform is thin and flexible.

Description

[0001] Thin biosensor display platform [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin type biosensor display platform, and more particularly, to a platform capable of instantaneously confirming bio-signal information by mounting a biosensor and a display unit on a flexible substrate and integrating them.

Biosensors are machines that measure the state and concentration of substances, especially organic compounds, using the functions of living things. Most use enzymatic reactions to examine the substance. Biosensors, such as enzymes, microorganisms, animal and plant cells, and the like, are sensors that utilize the selective reaction of a biocatalyst with a specific substance. Therefore, a measurement device in which a biocatalyst is immobilized is called a biosensor.

There are many kinds of biosensors such as enzyme sensors, immunosensors, and DNA sensors. Recently, however, blood glucose sensors for checking blood glucose levels in diabetic patients have been widely used.

Generally, the glucose sensor used in the market has a problem that the sensor part is disposable and can not be continuously measured. Therefore, it is difficult to measure the change in blood glucose at night when a user sleeps.

Also, unlike disposable blood glucose sensors, currently used continuous blood glucose sensors require a specialist to install a sensor, and a display unit for measuring blood glucose changes such as a separate monitor is required.

In such a technical situation and market situation, biosensor consumers need a biosensor capable of repeatedly and continuously measuring biological conditions such as blood sugar as well as being easily mounted on the body.

Therefore, the present invention proposes a biosensor platform that can meet the above-described technology and market needs.

It is an object of the present invention to provide a flexible and thin biosensor display platform to a user.

Specifically, the biosensor measurement value can be displayed integrally on the ultra-thin flexible display platform, thereby broadening the collection and display of biosignal information.

In addition, it is possible to construct a wearable bio-signal information system capable of attaching to and detaching from various curved surfaces of various bodies. With the development of a simple bio-signal display platform, it is desired to achieve a point of care (POC) suitable for telemedicine, emergency treatment, There is a purpose.

It is also intended to drive the platform's biosensor and display with low power.

It is to be understood that both the foregoing general description and the following detailed description of the present invention are exemplary and explanatory and are not intended to limit the invention to the precise form disclosed. It can be understood.

A thin-type biosensor display platform according to one embodiment of the present invention for realizing the above-mentioned problems includes a substrate, a biosensor mounted on at least a part of the substrate and generating a sensing signal from the measurement object, A display unit for displaying a sensing signal generated by the biosensor, and a circuit for electrically connecting the biosensor and the display unit. The circuit may be directly printed on the substrate to be integrally formed.

Further, the substrate may be a flexible substrate.

In addition, the biosensor may include at least one of an electro-chemical sensor and a piezoelectric sensor that is thinly formed on the substrate.

Also, the display unit may use at least one of a light emitting diode (LED), a thermochromic display (TCD), and an electrochromic display (ECD).

In addition, the LED element may include a sealing structure in which a plurality of sealing materials having different refractive indexes are laminated, and the interface between the sealing materials may be convex or concave.

In addition, the circuit includes a TFT (Thin Film Transistor) element, wherein the TFT element is a zinc tin oxide (ZTO) semiconductor layer coated on the gate insulating layer, and the gate insulating layer is made of acetonitile and ethylene A solution of aluminum nitrate nonahydrate in a concentration of 0.1 M or a solution of zirconium in a concentration of 0.2 M in 2-methoxyethanol solvent in a mixed solution of ethylene glycol Solution.

In addition, the circuit may include an A / D converter that receives an analog signal of the biosensor and outputs the analog signal as a digital signal.

In addition, the substrate may be 10 cm or less in width, 5 cm or less in length, and 3 mm or less in thickness.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and it is an object of the present invention to provide a flexible and thin biosensor display platform to a user.

Specifically, since the biosensor measurement values can be displayed integrally on the ultra-thin flexible display platform, it is possible to broaden the collection and display of biosignal information.

In addition, it is possible to construct a wearable bio-signal information system capable of attaching and detaching to various curved surfaces of various bodies, and development of a simple bio-signal display platform makes it possible to achieve a point of care (POC) appropriate for telemedicine, emergency treatment, and at-home medical treatment.

In addition, the platform biosensor and display can be driven with a small power.

Further, it is possible to provide a solution-processed TFT element having a threshold voltage of 5 V or less and electron mobility of 8 cm < 2 > / Vs or less.

In addition, a biosensor platform including a thin film circuit panel having a driving speed of 10 kHz or more can be provided.

It should be understood, however, that the effects obtained by the present invention are not limited to the above-mentioned effects, and other effects not mentioned may be clearly understood by those skilled in the art to which the present invention belongs It will be possible.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate a preferred embodiment of the invention and, together with the description, serve to provide a further understanding of the technical idea of the invention, It should not be construed as limited.
1 is an external view of a thin type biosensor display platform according to an embodiment of the present invention.
2 is a cross-sectional view of an LED device according to an embodiment of the present invention.
3A to 3C are cross-sectional views showing an encapsulation structure of an LED in which encapsulating materials having different refractive indexes are stacked according to an embodiment of the present invention.
FIG. 4 is a graph illustrating changes in light output of an LED according to an embodiment of the encapsulant stacking method according to an embodiment of the present invention.
FIGS. 5A through 5C illustrate escape paths of LED light in different encapsulation structures according to an embodiment of the present invention. FIG.
6 is a diagram illustrating the structure of a TCD according to an embodiment of the present invention.
FIG. 7 is a graph showing the exothermic temperature of a Mo electrode according to an applied electric power according to an embodiment of the present invention. FIG.
FIG. 8 is a photograph showing a change in color of an element with time when driven at 1.05 W according to an embodiment of the present invention. FIG.
9 is a graph illustrating a temperature change with time when driven at 1.05 W according to an embodiment of the present invention.
10 illustrates a process for fabricating a PTA solution of an ECD according to an embodiment of the present invention.
Figure 11 is a diagram illustrating film coating using spin coating in accordance with one embodiment of the present invention.
12 is a view illustrating a WO3 film coating using an electrochemical deposition method.
13 is a photograph showing a drive evaluation result of an ECD element according to an embodiment of the present invention
14 is a photograph showing the coating uniformity of polyaniline according to the deposition time according to one embodiment of the present invention.
15 is a photograph showing a change in characteristics of an ECD device according to an embodiment of the present invention.
16 is a diagram illustrating an ITO pattern design for partial deposition according to an embodiment of the present invention.
17 and 18 show results of driving an ECD element according to an embodiment of the present invention.
FIGS. 19A and 19B are transfer curves and output curves showing the electrical characteristics of a ZTO TFT using a 0.1 M aluminum sulfate hydrate oxide gate insulating layer according to an embodiment of the present invention. FIG.
20A and 20B are transfer curves and output curves showing the electrical characteristics of a ZTO TFT using a 0.1M aluminum nitrate nonahydrate oxide gate insulating layer according to an embodiment of the present invention.
21A and 21B are transfer curves and output curves showing the electrical characteristics of a ZTO TFT using a 0.2M aluminum chloride oxide gate insulation layer according to an embodiment of the present invention.
22A and 22B are transfer curves and output curves showing the electrical characteristics of a ZTO TFT using a DI water based 0.2M zirconium oxide gate insulating layer according to an embodiment of the present invention.
23A and 23B are transfer curves and output curves showing the electrical characteristics of a ZTO TFT using a 2-methoxyethanol-based 0.2M zirconium oxide gate insulating layer according to an embodiment of the present invention.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. In addition, the embodiment described below does not unduly limit the contents of the present invention described in the claims, and the entire configuration described in this embodiment is not necessarily essential as the solution means of the present invention.

1 is an external view of a thin type biosensor display platform according to an embodiment of the present invention.

1, the thin type biosensor display platform may include a substrate 100, a biosensor 200, a display unit 300, a circuit 400, a power supply unit 500, and the like.

However, the components shown in Fig. 1 are not essential, and a thin biosensor display platform having more or fewer components may be implemented.

First, the substrate 100 is a body to which each constitution of the present invention is mounted, and is formed of a flexible material.

For example, the (100) plate may be made of polybutylene terephthalate, polyethylene terephthalate, polysulfone, polyether, polyether imide, Or PAR (polyarylate).

Also, for convenience, when the substrate 100 is used as a wearable device of the present invention, the substrate 100 is preferably formed to have a width of 10 cm or less, a length of 5 cm or less, and a thickness of 3 mm or less.

Next, the biosensor 200 is a system for converting information into a recognizable signal such as a color, a fluorescence, or an electrical signal by using a biological element or imitating a biological system when obtaining information from a measurement object. That is, the sensor is mounted on at least a part of the substrate and generates a detection signal from the measurement object.

The signal conversion method of the biosensor 200 may be electochemical, thermal, optical, or mechanical.

Biosensor (200) methods widely used in existing research equipment include electrophoresis, mass spectrometry, and fluorescence analysis. The electrophoresis method has a disadvantage that the reproducibility is poor, the separation of the alkaline protein and the polymer protein is difficult, and the automation is not easy. In addition, the mass spectrometry can analyze unknown samples, but it is difficult to miniaturize them, and it is difficult to analyze a large number of samples at a very high speed. In addition, fluorescence analysis has the disadvantage of uniformly labeling all biomaterials with fluorescent materials.

Recently, surface plasmon resonance (SPR) is a method that can recognize the interaction of biomaterial by measuring the change of refractive index. It is possible to measure the interaction between molecules by using optical principle without separate labeling substance such as fluorescent light of this method, and it is possible to measure progress of reaction in real time.

On the other hand, as a functional requirement of the operation of the biosensor 200, the electrochemical method is driven with a current of 10 nA to 10 mA and a voltage of 0.4 V or less. In addition, the optical system is driven at 12V, which limits the size of the apparatus. In the present invention, a piezoelectric type biosensor 200 using a piezoelectric device, which is advantageous in that an electrophotographic method driven by a low voltage is available and another method requiring a small electric power is implemented in order to implement a small platform, can also be used in the present invention. Also, blood glucose sensors, electrocardiograms, urine / saliva, and respiratory gas sensors that can be driven in this manner are advantageous for implementing the present invention.

Next, the display unit 300 displays a sensing signal generated by the biosensor 200. [ Since the display unit 300 is mounted on the substrate 100, it is preferable to have flexibility. Therefore, it is preferable that at least one of a light emitting diode (LED), a thermochromic display (TCD), and an electrochromic display (ECD) is used as the flexible display unit 300.

First, a LED is a semiconductor device that emits light by flowing a current through a compound such as gallium arsenide, and injects a small number of carriers (electrons or holes) using a p-n junction structure of m semiconductors and emits light by recombination thereof.

FIG. 2 is a cross-sectional view of an LED according to an embodiment of the present invention. Referring to FIG. 2, the LED device includes an LED chip mounted on a substrate made of alumina to form a sidewall made of alumina, It can be manufactured with a structure in which an encapsulant is applied.

3A to 3C are cross-sectional views illustrating an encapsulation structure of an LED in which encapsulating materials having different refractive indices are stacked according to an embodiment of the present invention.

3A is an LED device in which encapsulating materials having different refractive indexes are stacked, two encapsulating material interfaces are flat, and the reflection of light generated in the LED chip is reduced.

FIG. 3B is a view showing an example in which the interface between two stacked sealing materials is made by concave with a radius of curvature of 20 mm and the angle of incidence at the interface is changed. The interface between two stacked sealing materials is made convex to a radius of curvature of 20 mm The incident angle at the interface is changed.

The results of the LED light output according to the three structures are as follows.

FIG. 4 is a graph illustrating changes in light output of an LED according to an embodiment of the encapsulant stacking method according to an embodiment of the present invention.

As a result of the test, the light output of the LED device was increased by about 0.6% when the interfacial structure of the laminated encapsulation layer was made flat, compared with the case where the interfacial structure of the laminated encapsulation layer was made flat, The light output increased by about 10.5% when it was made convex.

On the other hand, the light escape path and the light extraction efficiency of the LED device according to each bag structure were compared.

FIGS. 5A through 5C illustrate escape paths of LED light in different encapsulation structures according to an embodiment of the present invention. FIG.

Referring to FIG. 5A, the light output of the LED device having the sealing structure laminated in a flat shape is analyzed. As a result, when the laminate of the encapsulant is flat, it has a light escape path as shown in FIG. 5A, The same critical angle 23.18 ° as in the one case. In addition, since the light which can not escape out of the LED element is reflected and absorbed into the LED element, the light output is hardly improved. In this case, the light extraction efficiency becomes about 8.07%.

Next, referring to FIG. 5B, when the light output of the LED device having the sealing structure stacked in the concave shape is analyzed, when the laminated form of the sealing material is concave, the LED device has the light escape path as shown in FIG. The critical angle of light that can escape to the outside of the device is finer than the flat stacked bag structure. However, the light which has not escaped out of the LED element is reflected and enters into the curved surface as shown in (b) and (c) of FIG. 5b. At this time, the incident angle changes by Ø according to the vertical normal to the curved surface. Therefore, the critical angle of light extracted in the concave case is 23.74 °, the light extraction efficiency is increased to 8.46%, and the light extraction efficiency is increased as compared with the case of flattening.

Referring to FIG. 5C, when the light output of the LED device having the sealing structure stacked in a convex shape is analyzed, when the stacked form of the sealing material is concave, the LED device has a light escape path as shown in FIG. 5C, The critical angle of light that can escape to the outside increases. In addition, light that can not escape from the LED element is reflected, and enters into a curved surface as shown in (b) and (c) of FIG. 5c. At this time, the incidence angle changes by Ø according to the vertical normal to the curved surface. Therefore, the critical angle of light extracted in the convex case is 24.73 °, and the light extraction efficiency is increased to 9.1%, so that the light extraction efficiency is increased as compared with the case of flattening.

As a result, when a plurality of encapsulants of the LED element have different refractive indices and the interface between the encapsulated encapsulants is convex or concave, the light efficiency can be improved and an efficient display with a small power can be realized.

Next, a thermochromic display (TCD) is a display in which the crystal structure changes according to the temperature and the color changes.

FIG. 6 is a diagram illustrating a structure of a TCD according to an embodiment of the present invention. Referring to FIG. 6, a structure of a TCD according to an embodiment of the present invention is shown in FIG. , 3000 Å (t), and 40 ℃ ± 2 ℃ as the thermochromic material, the 45 ℃ temp.

Next, the heating temperature of the Mo electrode by Joule heating was optimized.

FIG. 7 is a graph showing the exothermic temperature of a Mo electrode according to an applied electric power according to an embodiment of the present invention. FIG. As a result of the experiment, it was judged that 45 ℃ could be reached when 1 ~ 1.5W power was applied.

Next, the color change time was optimized according to the heat treatment condition of the thermo chromic material.

division Heat treatment condition Condition 1 Hot plate 100 ℃ 10 minutes Condition 2 Hot plate 200 ℃ 10 minutes Condition 3 Electric furnace 100 ℃ 10min → 200 ℃ 5min Condition 4 Electric furnace 100 ℃ 10min → 200 ℃ 10min Condition 5 Electric furnace 100 ℃ for 5 minutes → 200 ℃ for 15 minutes

division Hot plate heating temperature 45 ° C 70 ℃ 100 ℃ Condition 1 Yellow → transparent 60 6.49 3.87 Transparent → yellow 11 17.68 27.61 Condition 2 Yellow → transparent 24 5.67 4.16 Transparent → yellow 6.27 17.99 42.59 Condition 3 Yellow → transparent 1.29 7.54 3.68 Transparent → yellow 13.76 17.78 47.67 Condition 4 Yellow → transparent 41.50 7.54 4.61 Transparent → yellow 9.95 16.78 27.25 Condition 5 Yellow → transparent 30.47 7.14 5.03 Transparent → yellow 8.49 14.04 37.49

As a result of the experiment, as shown in Table 1 and Table 2, when the time for color change is short, the process using a 200 ° C hot plate is excellent, and since the consumed power decreases with a short time, It was judged that the process used was appropriate. However, the color change time due to the temperature error range of the material may be changed.

Next, TCD using Joule heating was fabricated and operated.

In order to fabricate the thermochromic device, the electrode was formed using 0.5mm line width and screen printing equipment was used as a printing method. The curing conditions were 10 minutes at 200 占 폚 in a hot plate and about 10 占 퐉 in a thermochromic discoloration film thickness.

FIG. 8 is a photograph showing color change of a device according to time when driven at 1.05 W according to an embodiment of the present invention. FIG. 9 is a photograph showing a change in temperature with time when driven at 1.05 W according to an embodiment of the present invention. FIG.

As shown in FIGS. 8 and 9, when the driving condition was 1.05 W (15 V, 0.07 A), the device began to discolor after about 24 seconds, and completely discolored after about 40 seconds.

Next, an electrochromic display (ECD) refers to a display device using a substance that changes color by applying voltage or integrating a current.

10 illustrates a process for fabricating a PTA solution of an ECD according to an embodiment of the present invention.

In order to fabricate an inorganic material-based ECD device using WO ₃ , a solution preparation recipe as shown in FIG. 10 was obtained.

First, 2.94 g of Na ₂ WO ₄ was dissolved in 100 ml of H ₂ O (distilled water) to prepare PTA, and 6 ml of HCl (37%) was added using a syringe to form a yellow precipitate. The resulting yellow precipitate was washed with water using a funnel and filter paper, and then dissolved in 15 ml of hydrogen peroxide (H ₂ O ₂ , 30 wt%) to obtain a PTA solution.

Next, FIG. 11 is a view showing a film coating using spin coating according to an embodiment of the present invention, and FIG. 12 is a view showing a WO ₃ film coating using an electrochemical deposition method.

As shown in FIG. 11, WO ₃ was coated by spin coating and a device was fabricated by chemical vapor deposition. In preparing the device, 40 ml of PTA solution was added to 100 ml of distilled water to prepare an electrolytic solution. The prepared PTA electrolytic solution was placed in a beaker, and an electrochemical deposition apparatus was used to form an ITO substrate between the working electrode and the counter electrode, a constant potential difference V given by keeping 40 minutes was a film WO _3, WO ₃ and the substrate film is coated with heat-treated for one hour at the 140 ℃ hot plate improves the adhesion to the substrate.

FIG. 13 is a photograph showing the result of driving evaluation of an ECD device according to an embodiment of the present invention. As a result of the driving of the manufactured device, WO ₃ film coating by the spin coating method is not properly performed. However, WO ₃ It was confirmed that the film coating partially occurred, and it was confirmed that the coating showed a transparent color and a deep blue color within ± 5V.

In order to fabricate an organic-based ECD device using poly-aniline, the following experimental procedure was performed and experimental results were obtained.

First, 0.91 mL (~ 0.1 M) of aniline was added to a solution of 19.02 g (~0.1 M) of electrolytic p-toluenesulfonic acid in 100 mL of distilled water to obtain an electrochemical synthesis recipe of aniline. It was obtained by stirring and left standing.

Next, a mixed solution composed of the electrolyte and the solvent prepared above was placed in an electrode and synthesized using a cyclic voltammetric method. The potential of the platinum oxidation electrode with respect to the saturated carbomer electrode was adjusted in a range of -0.2 V to +0.8 V The sample was deposited on the working electrode surface at a scanning rate of 20 mV / sec. The voltage was maintained at + 0.7V and left for about 20 minutes.

In addition, to improve the uniformity of the poly-aniline coating, the uniformity test of the polyaniline coating was performed according to the deposition time.

14 is a photograph showing the coating uniformity of polyaniline according to the deposition time according to one embodiment of the present invention.

As a result of the deposition for 20 minutes, the result of color change according to the driving voltage showed the most transparent degree at -54, but it was confirmed that the uniform coating was not formed as a whole when the results of 0V and 4V were observed.

In addition, as a result of the 25-minute deposition, the result of the color change according to the driving voltage showed that the coating uniformity of the poly-anilin was improved, but the partial coloring was not performed.

In addition, as a result of 30 minutes deposition, the result of color change according to the driving voltage showed uniform coating of polyaniline as a whole, and it was confirmed that color implementation also operates most stable within ± 4V.

In addition, as a result of 40 minutes of deposition, the result of the color change according to the driving voltage was that the coating of polyaniline was uniformly performed as a whole, but the coating of polyaniline was excessively performed, so transparency was not ensured when driving at -5 V, In addition, there were many parts with green light, so it was difficult to distinguish colors.

As a result, it was confirmed that the deposition was most preferable for 30 minutes.

15 is a photograph showing a change in characteristics of an ECD device according to an embodiment of the present invention.

In order to improve the color uniformity and the driving voltage, the characteristics of the ECD device after annealing were examined.

Referring to FIG. 15, as a result of the non-heat treatment, the coating of polyaniline was uniformly performed as a whole, but coating of polyaniline was excessively performed, so that it was difficult to distinguish color due to a lot of green portions in addition to a portion of blue light.

As a result of the heat treatment, the driving voltage after the heat treatment was lowered by about 1 to 2 V, and the discoloration due to the driving voltage became clear. This is because evaporation of the solvent by heat treatment after deposition removes the impurities.

Next, the following experiment was conducted to partially deposit poly-aniline.

First, in order to fabricate the ITO pattern, as shown in FIG. 16, the limit of the width of the electrode pattern is 200 占 퐉 with the film mask, and when it is more than 500 占 퐉, the distance between the electrodes is 1 mm. In addition, using the common electrode in which the three patterns are integrated into one, the partial deposition of the PA using the electrochemical deposition method is facilitated. In the case of individual driving, the common electrode portion is cut off and used to enable partial driving.

In the CV method, the scan range (-0.2V to 0.8V) and the scan rate (20mV / s) are used. In the case of the It method, the retention time is 30 minutes. Heat treatment is performed at 100 ° C for 2 to 3 minutes Poly-aniline was coated by electrochemical vapor deposition.

17 and 18 show results of driving an ECD element according to an embodiment of the present invention.

In FIG. 17, as a result of driving according to the entire voltage application, when -5 V was applied to the cell, it was confirmed that the green light became weaker and partially becomes transparent compared to when the cell was not driven. It was confirmed that it is dark blue in comparison with when it was not driven.

18 shows that, even when the electrolyte is injected as a whole, the color change occurs only at the portion where the voltage is applied. As a result of driving according to the partial voltage application, it is possible to confirm that the electric signal generated in the biosensor It was confirmed that the level of the sample entered into the biosensor can be displayed according to the signal outputted through the circuit.

Next, the circuit 400 is printed on a substrate by a direct printing technique to be integrally formed, and electrically connects each constitution of the present invention such as a biosensor and a display. The circuit 400 may include various elements necessary for the present invention such as an A / D converter that converts the analog circuit output from the biosensor to digital and outputs the digital signal to the display unit.

On the other hand, direct printing technology is very advantageous as a technique for implementing the circuit 400 for a flexible and thin biosensor platform. Not only can the circuit be very thin, but it is also very efficient in terms of time and cost of fixing.

Hereinafter, a direct printing technique (printing electronic technique) applicable to the present invention will be described.

Printed electronics is a technology that can reduce cost and increase productivity by direct patterning without the need for expensive, large-scale vacuum equipment and additional processes for patterning that are used in the traditional electronics industry.

Printing process technology enables ink materials to be processed at low temperatures, enabling the implementation of electronic devices on flexible plastic substrates, which can lead to a revolution in all areas where semiconductors, devices, and circuits such as RFID tags, lighting, display solar cells, Has potential.

Thin film transistors (TFT) can be implemented on a substrate by using this printing process technology.

Among the electrical characteristics of the TFT, the threshold voltage and the electron mobility are parameters that must be essentially met for low voltage driving.

In order to realize a TFT having a low threshold voltage and a high electron mobility, the following process is performed.

First, a high-k gate dielectric material for the solution process used in the insulating layer of the TFT was synthesized.

 For the preparation of the gate dielectric solution, the dissolution of aluminum precursors was examined by using acetonitile and ethylene glycol as a solvent.

Precusor Solvent Total concentration Stir Dissolve Aluminum acetate basis Acetonitile (7ml)
Ethylene glycol (13ml) 0.2M 24hr △ Aluminum oxide X Aluminum nitride X Aluminum sulfate hydrate △ Aluminum acetate basis Acetonitile (3.5ml)
Ethylene glycol (6.5ml) 0.2M X 0.1M X Aluminum sulfate hydrate 0.2M X 0.1M △ Aluminum nitrate nonahydrate 0.2M O Aluminum chloride O

Table 3 is a table showing experimental results of dissolution of aluminum precursors according to a solvent according to one embodiment of the present invention.

As shown in Table 3, the precursors except for aluminum nitrate nonahydrate and aluminum chloride were opaque or translucent. In addition, the dissolution of aluminum nitrate nonahydrate and aluminum chloride was completed for more than 24 hours, and the solutions that did not dissolve did not dissolve although they gave changes in external environment such as temperature, time and stirrpm. To dissolve the material, a small amount of nitric acid or hydrochloric acid was added, but only layer separation occurred.

In addition, we have tested the dissolution of 2-methoxyethanol and DI water, which are widely used as solvents in solution-processed oxide TFTs.

Precusor Solvent Total concentration Stir Dissolve Aluminum nitrate nonahydrate 2-methoxyethanol) 0.2M 24hr O Aluminum chloride O Zirconyl chloride octahydrate O Aluminum nitrate nonahydrate DI water O Aluminum chloride X Zirconyl chloride octahydrate O

Table 4 is a table showing the dissolution of aluminum and zirconium precursors according to the solvent according to one embodiment of the present invention.

The nitrate and chloride precursors of aluminum and zirconium were tested for their solubility. The reaction was complete within 10 hours as shown in Table 4 and completely dissolved when aluminum chloride in DI water was not dissolved.

In addition, the solubility of aluminum and zirconium mixtures was investigated.

Ratio
(Al: Zr) Solvent Total
concentration Stir Dissolve 2: 1 2-methoxyethanol 0.3M 10hr △ 1: 1 △ 1: 2 O 2: 1 DI water △ 1: 1 △ 1: 2 △

Table 5 is a table showing the degree of dissolution according to the ratio of solutions mixed with Al and Zr according to one embodiment of the present invention.

Aluminum nitrate nonahydrate and zirconyl chloride octahydrate were used, and 2-methoxyethanol and Di water as shown in Table 4 were used as a solvent.

As shown in Table 5, most of the solutions were in a semi-transparent state and completely dissolved when the ratio of aluminum to zirconium was 1: 2 and 2-methoxyethanol was used as a solvent.

Next, fabrication and characterization of the TFT device according to the gate dielectric material fabricated in the above experiment were performed.

As a basic experiment for the application of printing process, we fabricated TFT device using spin coating after synthesis of gate dielectric and semiconductor solution, ensured uniformity of characteristic evaluation, and fabricated TFT with inverted staggered structure.

In order to evaluate the gate dielectric, thin film is formed by spin coating using the synthesized solution. The surface is observed through a primary optical microscope, leakage is confirmed through a secondary multimeter, a tertiary metal-insulator-metal (MIM) structure And the breakdown voltage was evaluated.

In addition, ZTO solution was prepared by using Zinc acetate dihydrate and tin chloride to coat the semiconductor, and spin coating was applied to the insulating layer prepared as a basic experiment for the printing process. The TFT device performance in the thermally grown SiO2 substrate reference.

The TFT device treats bare Si wafer with UV / O ₃ and baking and annealing gate dielectric solution prepared by using spin coater, and baking and annealing after UV / O ₃ treatment and ZTO solution coating. evaporator and source and drain evaporation (aluminum).

First, electrical characteristics of TFT based on acetonitile and ethylene glycol solvent were examined.

FIGS. 19A and 19B are transfer curves and output curves showing the electrical characteristics of a ZTO TFT using a 0.1 M aluminum sulfate hydrate oxide gate insulating layer according to an embodiment of the present invention. FIG.

Referring to FIGS. 19A and 19B, in the case of a ZTO TFT using a 0.1M aluminum sulfate hydrate oxide gate insulating layer, the off current in the transfer curve is as high as 10 ^-8 A or more. In the form of the output curve, the pinch-off and saturation regions appear, but the leakage current is high and the saturation region is unstable. In addition, it can be confirmed that when the number of coatings is increased, a severe distortion occurs in the transfer curve and the leakage current is increased.

Next, FIGS. 20A and 20B are transfer curves and output curves showing the electrical characteristics of a ZTO TFT using a 0.1M aluminum nitrate nonahydrate oxide gate insulating layer according to an embodiment of the present invention.

20A and 20B, in the case of the ZTO TFT using a 0.1M aluminum nitrate nonahydrate oxide gate insulating layer, the on and off currents of the transfer curve are all high and the ohmic contact is good in the output curve. . In addition, it can be seen that the pinch off and saturation region is stable except for the gate voltage of 40 V, the transfer curve is formed when the number of coatings is increased, and the pinch off region is improved.

21A and 21B are transfer curves and output curves showing the electrical characteristics of a ZTO TFT using a 0.2M aluminum chloride oxide gate insulating layer according to an embodiment of the present invention.

Referring to FIGS. 21A and 21B, in the case of a ZTO TFT using a 0.2M aluminum chloride oxide gate insulation layer, the off curve of the transfer curve is high, but the ohmic resistance of the output curve is good, but the pinch off and saturation region are unstable. Also, it can be seen that both the transfer curve and the output curve are severely distorted and unstable when the number of coatings is increased.

As a result, the insulator using aluminum precursors greatly affects the characteristics of the TFT device, and the output curve of the TFT using aluminum nitrate nonahydrate is stable and the transfer curve and the output curve are improved as the number of coatings is increased. It can be confirmed that it is advantageous.

On the other hand, electrical characteristics of TFT based on 2-methoxyethanol and DI water were also confirmed. Zirconyl chloride octahydrate was used as a gate insulator material.

22A and 22B are transfer curves and output curves showing the electrical characteristics of a ZTO TFT using a DI water based 0.2M zirconium oxide gate insulating layer according to an embodiment of the present invention.

Referring to FIGS. 22A and 22B, a saturation region appears from a higher off current of the transfer curve and a gate voltage of 10 V or higher. And the output curve shows that the ohmic resistance is not good and the leakage current is large and the pinch off region is unstable from the gate voltage of 20V.

23A and 23B are transfer curves and output curves showing the electrical characteristics of a ZTO TFT using a 0.2M zirconium oxide gate insulating layer based on 2-methoxyethanol according to an embodiment of the present invention.

Referring to FIGS. 23A and 23B, it can be seen that the off current of the transfer curve is lower than that of the previous experiments, the SS is improved, and the leakage current is present in the output curve, but the pinch off and saturation region are stable.

In conclusion, 2-methoxyethanol can be used as a solvent rather than Di water as a solvent, and molybdenum concentration and multi-coating are required to improve the characteristics of TFT using zirconium.

Meanwhile, a thin film type battery may be used as the power supply unit 500, which improves the convenience of the thin type biosensor display platform.

The thin-type biosensor display platform described above is not limited to the above-described embodiments and experimental examples, but all or a part of the embodiments may be selectively combined so that various modifications may be made to the embodiments It is possible.

The present invention can be used to detect environmental substances such as environmental hormones, BOD of wastewater, heavy metals, pesticides in the field of clinical diagnosis / medical as well as environment.

In the military field, it can be used as a biosensor for detecting biochemical weapons such as sarin and anthrax. In the industrial field, it is possible to control the growth conditions of microorganisms or to control the growth rate of certain chemical substances Can be used to monitor for

In addition, since the biosensor measurement value can be displayed integrally on the ultra-thin flexible display platform, it is expected that the collection and display of bio-signal information will be very wide, and wearable bio-signal information system And the development of a simple bio-signal display platform is expected to enable appropriate point of care (POC) for telemedicine, emergency treatment, and at-home medical care.

100: substrate
200: Biosensor
300:
400: circuit
500: Battery

Claims (8)

Board;
A biosensor mounted on at least a part of the substrate and generating a sensing signal from a measurement object;
A display unit mounted on at least a part of the substrate and displaying a sensing signal generated by the biosensor; And
And a circuit for electrically connecting the biosensor and the display unit,
Wherein the circuit is directly printed on the substrate to be integrally formed. The method according to claim 1,
Wherein the substrate is a flexible substrate. The method according to claim 1,
Wherein the biosensor comprises at least one of an electromechanical sensor and a piezoelectric sensor that is thinly formed on the substrate. The method according to claim 1,
Wherein the display unit uses at least one of a light emitting diode (LED), a thermochromic display (TCD), and an electrochromic display (ECD). 5. The method of claim 4,
The device of the LED includes a sealing structure in which a plurality of sealing materials having different refractive indices are stacked,
Wherein an interface between the plurality of sealing materials is convex or concave. The method according to claim 1,
The circuit includes a TFT (Thin Film Transistor) element,
In the TFT device, a Zinc tin oxide (ZTO) semiconductor layer is coated on the gate insulating layer,
The gate insulating layer may be formed by dissolving aluminum nitrate nonahydrate (precursor aluminum nitrate nonahydrate) in a concentration of 0.1 M in a mixed solution of acetonitile and ethylene glycol, or in a solvent of 2-methoxyethanol Zirconium (Zironium) is dissolved in a concentration of 0.2M. The method according to claim 1,
Wherein the circuit includes an A / D converter that receives an analog signal of the biosensor and outputs the analog signal as a digital signal. The method according to claim 1,
Wherein the substrate has a width of 10 cm or less, a length of 5 cm or less, and a thickness of 3 mm or less.

Images