KR20160078672A - Head limiting movement range of laser spot and atomic force microscope having the same - Google Patents
Head limiting movement range of laser spot and atomic force microscope having the same Download PDFInfo
- Publication number
- KR20160078672A KR20160078672A KR1020140188493A KR20140188493A KR20160078672A KR 20160078672 A KR20160078672 A KR 20160078672A KR 1020140188493 A KR1020140188493 A KR 1020140188493A KR 20140188493 A KR20140188493 A KR 20140188493A KR 20160078672 A KR20160078672 A KR 20160078672A
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- KR
- South Korea
- Prior art keywords
- spot
- cantilever
- laser spot
- movement restricting
- head
- Prior art date
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/02—Monitoring the movement or position of the probe by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
- G01Q60/42—Functionalisation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
- Y10S977/853—Biological sample
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a head for improving usability by limiting a moving range of a laser spot and an atomic force microscope having the head.
A head according to an embodiment of the present invention is a head for measuring deflection of the cantilever using laser light reflected on the surface of the cantilever in order to obtain information on a surface of a sample using a tip of a cantilever . The head comprising: spot moving means configured to move the laser spot so as to position the laser spot on the surface of the cantilever; And movement restricting means configured to limit a movement range of the laser spot which can be moved by the spot movement means to a predetermined range; .
Description
BACKGROUND OF THE
Scanning Probe Microscope (SPM) is a microscope that scans microscopic probes produced through MEMS processes, etc., and scans the surface of the specimens, and displays the 3D surface images of the specimens. Such a scanning probe microscope can be classified into an AFM (Atomic Force Microscope), a Scanning Tunneling Microscope (STM), and the like according to a measurement method.
FIG. 1 is a schematic perspective view of an atomic microscope in which a conventional XY scanner and a Z scanner are separated, and FIG. 2 is a schematic conceptual view of a head used in an atomic microscope having the structure of FIG.
1, the
The
The
Referring to FIG. 2, the
The
In order to place the laser spot in the center of the
The spot region (hereinafter referred to as spot region) of the laser spot which can be adjusted by the
However, the widely designed spot area causes inconvenience in use. The user adjusts the laser spots to the upper surface of the
(Patent Document 1)
Korean Patent No. 10-0646441
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a head having improved usability by limiting a moving range of a laser spot and an atomic microscope having the same.
The problems of the present invention are not limited to the above-mentioned problems, and other problems not mentioned can be clearly understood by those skilled in the art from the following description.
According to an aspect of the present invention, there is provided a head for irradiating a laser beam onto a surface of a cantilever using a tip of a cantilever, Of the head. The head comprising: spot moving means configured to move the laser spot so as to position the laser spot on the surface of the cantilever; And movement restricting means configured to limit a movement range of the laser spot which can be moved by the spot movement means to a predetermined range; .
According to another aspect of the present invention, the spot moving means has a knob and a screw forming portion, and moves the laser spot by a linear movement of an end portion by the rotation of the knob. The movement restricting means limits the rotation of the knob to a predetermined range.
According to another aspect of the present invention, the restricting means is a protruding portion protruding to the outer circumferential surface of the spot moving means, and a latching portion is formed so that the protruding portion can be caught.
According to still another aspect of the present invention, the movement restricting means is detachable to the spot moving means, and the restricting means includes a protruding portion protruding to the outer circumferential surface thereof, and the locking portion is formed so that the protruding portion can be caught.
According to another feature of the present invention, the movement restricting means restricts the positionable region of the laser spot, and controls the movement of the laser spot in the center of the locatable region of the laser spot so that the target point of the surface of the predetermined cantilever is located. A limiting means is mounted on the spot moving means.
An atomic force microscope according to an embodiment of the present invention includes a head having the above-described structure.
According to the head and the atomic force microscope having the head according to the present invention, the laser spot can be easily positioned on the surface of the cantilever by limiting the movement range of the laser spot to a predetermined range, thereby providing high usability and convenience .
1 is a schematic perspective view of an atomic force microscope in which a conventional XY scanner and a Z scanner are separated.
2 is a schematic conceptual view of a head used in an atomic force microscope having the structure of FIG.
3 is a conceptual diagram schematically showing a laser spot adjusting mechanism provided in a head of a general atomic microscope.
4 is a schematic perspective view schematically showing the restricting means and the engaging portion;
Fig. 5 is a schematic top view for explaining the action of the restricting means and the engaging portion of Fig. 4;
BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and the manner of achieving them, will be apparent from and elucidated with reference to the embodiments described hereinafter in conjunction with the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims.
It is to be understood that elements or layers are referred to as being "on " other elements or layers, including both intervening layers or other elements directly on or in between.
Although the first, second, etc. are used to describe various components, it goes without saying that these components are not limited by these terms. These terms are used only to distinguish one component from another. Therefore, it goes without saying that the first component mentioned below may be the second component within the technical scope of the present invention.
Like reference numerals refer to like elements throughout the specification.
The sizes and thicknesses of the individual components shown in the figures are shown for convenience of explanation and the present invention is not necessarily limited to the size and thickness of the components shown.
It is to be understood that each of the features of the various embodiments of the present invention may be combined or combined with each other partially or entirely and technically various interlocking and driving is possible as will be appreciated by those skilled in the art, It may be possible to cooperate with each other in association.
Hereinafter, a head and an atomic force microscope according to the present invention will be described with reference to the accompanying drawings.
Fig. 3 is a conceptual view schematically showing a laser spot adjusting mechanism provided in a head of a general atomic microscope, Fig. 4 is a schematic perspective view schematically showing a restricting means and a catching part, Fig. 5 is a cross- Is a schematic top view for explaining the negative action.
Prior to the detailed description, the configurations illustrated in Figs. 3 to 5 only show those related to configurations performing the function of positioning the laser spot on the upper surface of the cantilever, among various configurations of heads provided in the atomic microscope Be careful about points. (For example, a configuration in which the laser light reflected on the upper surface of the cantilever is positioned at the center of the optical detecting device, a configuration of the Z scanner, etc.) other than the configurations exemplified in Figs. 3 to 5, According to the configuration of the head is satisfactory. For example, the other configurations may follow the configurations of Figs. 1 and 2, or may follow the configuration of the head of the atomic microscope of a totally different type.
Referring to FIG. 3, a
The laser
Spot moving means 27A and 27B are provided to change the laser light path that is reflected from the
A spring (not shown) provides an elastic force to the
The spot moving means 27A is moved up and down by rotation to rotate the
Referring to Figs. 4 and 5, the movement restricting means 40, which is further added to the
The movement restricting means 40 limits the spot moving means 27A and 27B so that the laser spot can be moved only within a predetermined range. The
In the meantime, the hollow 41 is closed to the upper side and opened to the lower side in the present embodiment, but the present invention is not limited thereto, and the hollow 41 may be opened to the upper side.
When the
On the outer circumferential surface of the movement restricting means 40, a protruding
5, the rotation of the spot moving means 27A, 27B is restricted by the physical interference between the projecting
Since the pitches of the
Hereinafter, a method of providing the movement restricting means 40 to the spot moving means 27A, 27B will be described.
The
First, the reference (predetermined) cantilever is mounted on the
Thereafter, as shown in Fig. 5, the
If the reference cantilever is to be changed or the moving region of the laser spot must be changed again due to any cause (for example, abrasion of a portion in contact with the spot moving means 27A, 27B, etc.) .
If the
In addition, the
On the other hand, in the case of using another cantilever which is completely different from the reference cantilever, the movement restricting means 40 may be removed from the spot moving means 27A, 27B and the existing method may be used. That is, since the
Other than the above-described configuration, the configuration of the heads and atomic force microscopes of the XE series and NX series of Park Systems Inc., which is the applicant of this patent, can be followed. However, the present invention is not limited thereto.
While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, You will understand. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.
23 ... The laser
27A, 27B ... The spot moving means 27a ... Knob
27b ... Screw forming
30 ...
40 ... Movement restricting means 41 ... Hollow
42 ... projection part
Claims (6)
Spot moving means configured to move the laser spot so as to position the laser spot on the surface of the cantilever; And
Movement restricting means configured to limit a movement range of the laser spot which can be moved by the spot movement means to a predetermined range; ≪ / RTI >
Wherein the spot moving means has a knob and a screw forming portion and moves the laser spot by linear motion of the end portion by the rotation of the knob,
Wherein the movement restricting means limits the rotation of the knob to a predetermined range.
Wherein the movement restricting means is a protrusion protruding from the outer circumferential surface of the spot moving means,
And the engaging portion is formed to engage with the projection.
Wherein the movement restricting means is detachable to the spot moving means,
Wherein the movement restricting means has a protruding portion protruding from the outer circumferential surface thereof,
And the engaging portion is formed to engage with the projection.
The movement restricting means limits the positionable area of the laser spot,
Characterized in that the movement restricting means is mounted on the spot moving means such that a desired point on the surface of the predetermined cantilever is located at the center of the locatable region of the laser spot.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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KR1020140188493A KR101678183B1 (en) | 2014-12-24 | 2014-12-24 | Head limiting movement range of laser spot and atomic force microscope having the same |
US14/757,519 US9645168B2 (en) | 2014-12-24 | 2015-12-23 | Head limiting movement range of laser spot and atomic force microscope having the same |
Applications Claiming Priority (1)
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KR1020140188493A KR101678183B1 (en) | 2014-12-24 | 2014-12-24 | Head limiting movement range of laser spot and atomic force microscope having the same |
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KR20160078672A true KR20160078672A (en) | 2016-07-05 |
KR101678183B1 KR101678183B1 (en) | 2016-11-22 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08101219A (en) * | 1994-09-30 | 1996-04-16 | Shimadzu Corp | Scanning probe microscope |
KR20040092608A (en) * | 2003-04-24 | 2004-11-04 | 대한민국(서울대학교 총장) | Head of atomic force microscope |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5157251A (en) * | 1991-03-13 | 1992-10-20 | Park Scientific Instruments | Scanning force microscope having aligning and adjusting means |
US6677567B2 (en) * | 2002-02-15 | 2004-01-13 | Psia Corporation | Scanning probe microscope with improved scan accuracy, scan speed, and optical vision |
US7478552B2 (en) * | 2006-03-21 | 2009-01-20 | Veeco Instruments Inc. | Optical detection alignment/tracking method and apparatus |
US8321960B2 (en) * | 2008-01-24 | 2012-11-27 | Shimadzu Corporation | Scanning probe microscope |
-
2014
- 2014-12-24 KR KR1020140188493A patent/KR101678183B1/en active IP Right Grant
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2015
- 2015-12-23 US US14/757,519 patent/US9645168B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08101219A (en) * | 1994-09-30 | 1996-04-16 | Shimadzu Corp | Scanning probe microscope |
KR20040092608A (en) * | 2003-04-24 | 2004-11-04 | 대한민국(서울대학교 총장) | Head of atomic force microscope |
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Publication number | Publication date |
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US20160187373A1 (en) | 2016-06-30 |
US9645168B2 (en) | 2017-05-09 |
KR101678183B1 (en) | 2016-11-22 |
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