KR20160070927A - 전파 투과형 금속질감 코팅막 및 그 제조 방법 - Google Patents
전파 투과형 금속질감 코팅막 및 그 제조 방법 Download PDFInfo
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- KR20160070927A KR20160070927A KR1020140177814A KR20140177814A KR20160070927A KR 20160070927 A KR20160070927 A KR 20160070927A KR 1020140177814 A KR1020140177814 A KR 1020140177814A KR 20140177814 A KR20140177814 A KR 20140177814A KR 20160070927 A KR20160070927 A KR 20160070927A
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- metal texture
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- chromium oxide
- texture layer
- resin film
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 55
- 239000002184 metal Substances 0.000 title claims abstract description 55
- 239000011248 coating agent Substances 0.000 title claims abstract description 20
- 238000000576 coating method Methods 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title abstract description 8
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims abstract description 39
- 229910000423 chromium oxide Inorganic materials 0.000 claims abstract description 39
- 239000011347 resin Substances 0.000 claims abstract description 29
- 229920005989 resin Polymers 0.000 claims abstract description 29
- 239000010410 layer Substances 0.000 claims description 75
- 238000000151 deposition Methods 0.000 claims description 40
- 230000008021 deposition Effects 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 22
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 16
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 15
- 229910052738 indium Inorganic materials 0.000 claims description 14
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 14
- 239000011241 protective layer Substances 0.000 claims description 14
- 239000007789 gas Substances 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 239000010408 film Substances 0.000 description 35
- 230000005540 biological transmission Effects 0.000 description 11
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 7
- 239000002994 raw material Substances 0.000 description 6
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 150000002472 indium compounds Chemical class 0.000 description 2
- 239000002932 luster Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60R—VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR
- B60R13/00—Elements for body-finishing, identifying, or decorating; Arrangements or adaptations for advertising purposes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
- H05K9/0073—Shielding materials
- H05K9/0081—Electromagnetic shielding materials, e.g. EMI, RFI shielding
- H05K9/0088—Electromagnetic shielding materials, e.g. EMI, RFI shielding comprising a plurality of shielding layers; combining different shielding material structure
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
- General Chemical & Material Sciences (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Abstract
Description
120: 금속질감층 130: 크롬 산화물층
140: 보호층 200: 증착 장비
210: 증착 챔버 220: 코팅 원료 증발기
221: 주석/인듐 원료 222: 크롬 원료
223: 전원 224: 바이아스 전원
230: 회전 테이블 241: 진공 배기구
242: 진공 게이지 250: 공정 가스 주입구
260: 투시창 270: 온도측정기
Claims (11)
- 투명한 레진 필름;
상기 레진 필름의 양면 중 어느 일면에 증착되는 금속질감층; 및
상기 금속질감층을 보호하면서 전파를 투과시킬 수 있도록 상기 금속질감층에 증착되는 크롬 산화물층; 을 포함하는, 전파 투과형 금속질감 코팅막.
- 청구항 1에 있어서,
상기 금속질감층은, 주석과 인듐 중 어느 하나 이상으로 형성되고, 두께가 150㎚ 이하인 것을 특징으로 하는, 전파 투과형 금속질감 코팅막.
- 청구항 1에 있어서,
상기 크롬 산화물층은, 두께가 1.0㎛이하인 것을 특징으로 하는, 전파 투과형 금속질감 코팅막.
- 청구항 1에 있어서,
상기 레진 필름의 양면 중 어느 일면에는 헤어라인이 형성된 것을 특징으로 하는, 전파 투과형 금속질감 코팅막.
- 청구항 1 내지 청구항 4 중 어느 한 항에 있어서,
상기 크롬 산화물층에 도포되는 보호층을 더 포함하는, 전파 투과형 금속질감 코팅막.
- 투명한 레진 필름을 증착용 챔버에 설치하는 단계;
진공이 형성된 상기 챔버 내에 공정가스로 아르곤과 질소 분위기를 형성시키는 단계;
상기 레진 필름의 양면 중 어느 일면에 금속질감층을 증착시키는 제1증착단계;
상기 제1증착단계동안 발생된 잔여물을 배출하고, 진공이 형성된 챔버 내에 공정가스로 아르곤, 질소 및 산소 분위기를 형성시키는 단계; 및
상기 금속질감층에 크롬 산화물층을 증착시키는 제2증착단계; 를 포함하는, 전파 투과형 금속질감 코팅막 제조 방법.
- 청구항 6에 있어서,
상기 제1증착단계는, 주석과 인듐 중 어느 하나 이상으로 상기 금속질감층을 형성시키되, 상기 금속질감층의 두께를 150㎚ 이하로 형성시키는 것을 특징으로 하는, 전파 투과형 금속질감 코팅막 제조 방법.
- 청구항 6에 있어서,
상기 제2증착단계는, 상기 크롬 산화물층의 두께를 1.0㎛이하로 형성시키는 것을 특징으로 하는, 전파 투과형 금속질감 코팅막 제조 방법.
- 청구항 8에 있어서,
상기 제2증착단계는, 공정 가스 중 O2의 비율이 7% 이상인 것을 특징으로 하는, 전파 투과형 금속질감 코팅막 제조 방법.
- 청구항 6에 있어서,
상기 설치하는 단계 이전에, 상기 레진 필름의 양면중 어느 일면에 헤어라인을 형성시키는 단계를 더 포함하는, 전파 투과형 금속질감 코팅막 제조 방법.
- 청구항 6 내지 청구항 10 중 어느 한 항에 있어서,
상기 제2증착단계 이후에, 상기 크롬 산화물층에 보호층을 도포하는 단계를 더 포함하는, 전파 투과형 금속질감 코팅막 제조 방법.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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KR1020140177814A KR101664617B1 (ko) | 2014-12-10 | 2014-12-10 | 전파 투과형 금속질감 코팅막 및 그 제조 방법 |
US14/715,142 US20160174421A1 (en) | 2014-12-10 | 2015-05-18 | Metal texture coating for transmitting electric wave and manufacturing method thereof |
DE102015210617.9A DE102015210617A1 (de) | 2014-12-10 | 2015-06-10 | Metalltexturbeschichtung zur Übertragung einer elektromagnetischen Welle und Herstellungsverfahren dafür |
CN201510323574.7A CN106191782B (zh) | 2014-12-10 | 2015-06-12 | 用于传输电波的金属质涂层及其制造方法 |
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KR1020140177814A KR101664617B1 (ko) | 2014-12-10 | 2014-12-10 | 전파 투과형 금속질감 코팅막 및 그 제조 방법 |
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KR20160070927A true KR20160070927A (ko) | 2016-06-21 |
KR101664617B1 KR101664617B1 (ko) | 2016-10-12 |
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US (1) | US20160174421A1 (ko) |
KR (1) | KR101664617B1 (ko) |
CN (1) | CN106191782B (ko) |
DE (1) | DE102015210617A1 (ko) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007162125A (ja) * | 2005-11-21 | 2007-06-28 | Toyoda Gosei Co Ltd | 樹脂製品及びその製造方法並びに金属皮膜の成膜方法 |
KR20090020292A (ko) * | 2007-08-23 | 2009-02-26 | 재단법인 송도테크노파크 | 고분자 재료의 금속 질감을 부여하기 위한 다층 박막 구조및 그 제조 방법 |
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JP4147743B2 (ja) * | 1998-02-24 | 2008-09-10 | 旭硝子株式会社 | 光吸収性反射防止体とその製造方法 |
JP2005249773A (ja) * | 2004-02-02 | 2005-09-15 | Toyota Motor Corp | レーダ装置ビーム経路内用成形品 |
CN102016652B (zh) * | 2008-04-24 | 2012-12-26 | 旭硝子株式会社 | 低反射玻璃及显示器用保护板 |
KR101963525B1 (ko) * | 2010-03-01 | 2019-03-28 | 시피필름스 인코포레이션 | 낮은 방사율 및 emi 차폐 창 필름 |
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2014
- 2014-12-10 KR KR1020140177814A patent/KR101664617B1/ko active Active
-
2015
- 2015-05-18 US US14/715,142 patent/US20160174421A1/en not_active Abandoned
- 2015-06-10 DE DE102015210617.9A patent/DE102015210617A1/de active Pending
- 2015-06-12 CN CN201510323574.7A patent/CN106191782B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007162125A (ja) * | 2005-11-21 | 2007-06-28 | Toyoda Gosei Co Ltd | 樹脂製品及びその製造方法並びに金属皮膜の成膜方法 |
KR20090020292A (ko) * | 2007-08-23 | 2009-02-26 | 재단법인 송도테크노파크 | 고분자 재료의 금속 질감을 부여하기 위한 다층 박막 구조및 그 제조 방법 |
Also Published As
Publication number | Publication date |
---|---|
DE102015210617A1 (de) | 2016-06-16 |
CN106191782A (zh) | 2016-12-07 |
US20160174421A1 (en) | 2016-06-16 |
KR101664617B1 (ko) | 2016-10-12 |
CN106191782B (zh) | 2019-08-20 |
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