[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

KR20160052217A - Leak testing devices - Google Patents

Leak testing devices Download PDF

Info

Publication number
KR20160052217A
KR20160052217A KR1020140152210A KR20140152210A KR20160052217A KR 20160052217 A KR20160052217 A KR 20160052217A KR 1020140152210 A KR1020140152210 A KR 1020140152210A KR 20140152210 A KR20140152210 A KR 20140152210A KR 20160052217 A KR20160052217 A KR 20160052217A
Authority
KR
South Korea
Prior art keywords
chamber
inspected
vacuum pump
air
space
Prior art date
Application number
KR1020140152210A
Other languages
Korean (ko)
Inventor
백준현
김병주
Original Assignee
(주)동희
(주)티에스앤이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)동희, (주)티에스앤이 filed Critical (주)동희
Priority to KR1020140152210A priority Critical patent/KR20160052217A/en
Publication of KR20160052217A publication Critical patent/KR20160052217A/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

According to one aspect of the present invention, a leakage testing device comprises: a frame; a chamber made of a lower chamber installed inside the frame to be movable in an anteroposterior direction wherein an inspection object (to-be-inspected product) is fixated, and an upper chamber installed inside the frame to be movable in a vertical direction and assembled with the lower chamber to form a sealed space in which the inspection object is received; a vacuum pump which creates a vacuum state in an internal space of the inspection object and the sealed space of the chamber; a filter which filters out impurities existing in the air which is suctioned by the vacuum pump; an air supplier which supplies air to the internal space after the internal space is vacuumed by the vacuum pump to check the inspection object for a leakage; a pressure gauge for the inspection object to check for an increase in pressure in the internal space attributed to the air supplied by the air supplier; and a pressure gauge for the chamber to detect a change in pressure in the sealed space to determine whether the inspection object has a leaking portion or not. The leakage testing device is able to accurately test an inspection object for a leakage in a short time, without negatively influencing the following test.

Description

{LEAK TESTING DEVICES}

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a leakage inspection apparatus, and more particularly, to a leakage inspection apparatus capable of quickly estimating leakage of an inspected object such as a fuel tank or an engine.

2. Description of the Related Art Generally, an engine of a vehicle is a device that converts thermal energy into mechanical rotational force by rotating a crankshaft using an explosive force generated by burning fuel in a combustion chamber.

In such an engine, fuel to be burned in the combustion chamber is continuously supplied, and a fuel tank capable of storing a certain amount of fuel in the vehicle is provided for continuous supply of fuel.

Since the fuel tank must maintain a complete airtight condition, it is necessary to check the airtightness before being mounted on the actual vehicle.

Examples of the inspection method include a method of inspecting leakage through air bubbles generated after infiltration of an inspected object into water, and a method of using a special gas such as helium, such as Korean Registered Patent No. 10-1182821 (2012.09.07) have.

However, the method of inspecting the leakage through the air bubbles generated after infiltration of the inspected object into the water is difficult because it is impossible to inspect the object whose appearance changes when it is submerged in water and it is difficult to perform an accurate leak test. When the volume of the inspected object is large, It takes a long time to inspect it.

In addition, a method using a special gas such as helium may have a wide range of leakage detection and accurate leakage test, but it is necessary to remove the special gas such as helium after the inspection in order to prevent the influence of the leakage, There is a problem in that a long time is required for leakage inspection.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a leakage inspection apparatus capable of accurately and quickly detecting leakage of an inspected object.

According to an aspect of the present invention, there is provided a leakage inspection apparatus including: a frame; A lower chamber which is installed to be movable in the forward and backward directions in the frame and on which an inspection object to be inspected is fixedly mounted, and a lower chamber which is vertically movable in the frame and forms an enclosed space in which the inspected object is accommodated together with the lower chamber, A chamber; A vacuum pump for allowing the interior space of the inspected object and the closed space to be in a vacuum state; A filter for filtering foreign substances contained in the air sucked by the vacuum pump; An air supply unit for supplying air to the inner space for leakage inspection of the inspected object after the inner space is evacuated by the vacuum pump; An inspected product pressure gauge that confirms the pressure of the interior space increased by the air supplied from the air supplier; And a chamber pressure gauge for measuring a pressure change of the closed space to determine whether the inspected object is leaked.

A closed space suction pipe for connecting the chamber to the vacuum pump, and a chamber valve installed in the closed space suction pipe for opening and closing the closed space suction pipe.

A vacuum pipe connected to the vacuum pump and connected to the closed space suction pipe, and a vacuum pump valve installed in the pipe to control the opening and closing of the pipe.

The chamber pressure gauge may be provided between the chamber valve and the vacuum pump valve.

An inspected object suction pipe for connecting the inner space of the inspected object to the vacuum pump and an inspected object valve for opening and closing the inspected object suction pipe installed in the inspected object suction pipe.

An air supply pipe connected to the inspected product suction pipe to supply the air of the air supply device to the inspected product suction pipe, and an air supply valve installed in the air supply pipe to open and close the air supply pipe.

The inspected product pressure gage may be provided between the inspected product valve and the air supply valve.

When the inspected object is seated in the chamber, the inner circumferential surface of the chamber and the outer circumferential surface of the inspected object are spaced from each other by 5 to 15 mm.

According to one aspect of the present invention, leakage of an inspected object can be accurately and quickly determined by measuring a pressure difference between a chamber and an inspected object to detect leakage.

1 is a conceptual diagram illustrating a concept of a leakage testing apparatus according to an embodiment of the present invention;
2 is a graph showing changes in pressure in the internal space and the closed space with time.
3 to 6 are diagrams showing the inspection method of the leakage inspection apparatus shown in Fig.

Hereinafter, a leakage testing apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a conceptual diagram illustrating a concept of a leakage testing apparatus according to an embodiment of the present invention.

As shown in FIG. 1, a leakage inspection apparatus according to an embodiment of the present invention includes a frame 10; A lower chamber 101 which is installed to be movable in the front and rear direction in the frame 10 and in which an inspection object 20 to be inspected is fixedly seated and a lower chamber 101 which is installed movably in the vertical direction in the frame 10, (100) having an upper chamber (102) forming a closed space (100a) in which the inspected object (20) is accommodated together with the chamber (100); A vacuum pump 200 for allowing the interior space 21 of the inspected object 20 and the closed space 100a to be in a vacuum state; A filter 300 for filtering foreign substances contained in the air sucked by the vacuum pump 200; An air supplier 400 for supplying air to the internal space 21 for the leakage inspection of the inspected product 20 after the internal space 21 is evacuated by the vacuum pump 200; An inspected product pressure gauge 500 for confirming the pressure of the internal space 21 increased by the air supplied from the air supplier 400; And a chamber pressure gauge 600 for measuring a pressure change of the closed space 100a to determine whether the inspected object 20 is leaked.

The inspection object 20 to be inspected may have a certain volume of space in the interior, such as a fuel tank, and may be formed by welding or the like. Inspection items 20 such as fuel tanks that are joined through welding or the like may cause leakage, and accordingly, a procedure for inspecting leakage is required.

The frame 10 forms the overall contour of the leak testing apparatus, and various devices are installed in the frame 10. [

The frame 10 is provided with a chamber 100 in which the inspection object 20 to be inspected is fixedly mounted. A closed space 100a in which the inspected object 20 is accommodated is formed inside the chamber 100.

The chamber 100 is formed by coupling the lower chamber 101 and the upper chamber 102 to each other. The lower chamber 101 has a seat portion 101a which is installed to be movable in the front and rear direction in the frame 10 and in which the inspected object 20 is fixedly seated. The upper chamber 102 has a seat portion 101b which is vertically movable in the frame 10 and in which the inspected object 20 is fixedly seated. At this time, the flange portion of the inspected object 20 can be fitted and fixed between the lower chamber 101 and the upper chamber 102, and the inspected object 20 is seated in the closed space 100a with a predetermined leak detection space.

At this time, the shape of the inside of the chamber 100 is made to correspond to the shape of the inspected object 20 to be inspected, and the volume of the closed space 100a formed inside the chamber 100 is made larger than the volume of the inspected object 20 to be inspected . This is to reduce the inspection time by minimizing the volume of the leak detection space formed between the inside of the chamber 100 and the outside of the inspected product 20. [ For example, assuming that the inspected object 20 is 80 liters, the volume of the closed space 100a inside the chamber 100 can be set to 105 liters. To this end, the inner circumferential surface of the chamber 100 and the outer circumferential surface of the specimen 20 are spaced from each other by 5 to 15 mm when the specimen 20 is seated in the chamber 100.

Therefore, when the inspected object 20 is seated in the closed space 100a inside the chamber 100, the leakage detection space has a volume of 25 liters. By minimizing the volume of the leak detection space, the inspection time of the inspected object 20 can be shortened.

Although not shown in FIG. 1, a horizontal cylinder is installed in the frame 10 such that the lower chamber 101 is movable in the front-rear direction in the frame 10, and the upper chamber 102 is vertically Vertical cylinders may be installed to allow movement.

Meanwhile, the frame 10 is provided with an air supply unit 400 for supplying air into the inspected object 20 in order to inspect the inspected object 20 for leakage.

An inspected product pressure gauge 500 for measuring the pressure of the internal space 21 of the inspected product 20 after the air is supplied by the air supplier 400 and a pressure gauge 500 for measuring the pressure of the confined space 100a inside the chamber 100 And a chamber pressure gauge 600 may be respectively installed.

In this embodiment, the inspected product manometer 500 and the chamber manometer 600 operate in an analog manner, but the inspected object manometer 500 and the chamber manometer 600 can operate through a digital method.

Meanwhile, a vacuum pump 200 for evacuating the sealed space 100a inside the chamber 100 and the internal space 21 of the inspected object 20 is provided. And a closed space suction pipe 110 for sucking air in the closed space 100a formed in the chamber 100 by the vacuum pump 200. [ In the closed space suction pipe 110, a chamber valve 120 for opening and closing the closed space suction pipe 110 is installed.

A vacuum pump valve 220 for opening and closing the pipe 210 is installed in the pipe 210 connected to the vacuum pump 200 and connected to the closed space suction pipe 110. The vacuum pump valve 220 is opened when the air in the closed space 100a inside the chamber 100 and the air in the internal space 21 of the inspected object 20 are opened and the vacuum pump valve 220 ).

An inspected object suction pipe 140 for connecting the inner space 21 of the inspected object 20 to the vacuum pump 200 and an inspected object valve 140 installed in the inspected object suction pipe 140 for opening and closing the inspected object suction pipe 140 .

An air supply pipe 410 connected to the inspected product suction pipe 140 to supply air to the inspected product suction pipe 140 to introduce air into the internal space 21 of the inspected product 20, And an air supply valve 420 for opening and closing the air supply pipe 410.

As described above, the inspected product suction pipe 140 and the air supply pipe 410 are provided, and the inspected product valve 140 and the air supply valve 420 are provided to suck the air in the internal space 21 of the inspected product 20, Or air may be introduced into the inner space 21 of the inspected object 20. [

In this embodiment, air is injected into the internal space 21 of the inspected object 20 for leakage inspection, but helium gas may be injected instead of air.

When the helium gas is supplied instead of the air, since the helium gas particles are smaller than the air particles, it is possible to easily pass through the small water leakage area, thereby making it easier to determine whether or not the inspected object 20 is leaked.

A filter for removing foreign substances contained in the air when the air is sucked so that the closed space 100a of the chamber 100 or the internal space 21 of the inspected object 20 is in a vacuum state by using the vacuum pump 200, (300).

When the inspected product 20 such as a fuel tank is produced, foreign matter or the like is often present inside the inspected product 20. When air inside the inspected product 20 is sucked by the vacuum pump 200, Foreign substances and the like are sucked into the vacuum pump 200 side.

If a foreign matter or the like in the inspected object 20 flows into the vacuum pump 200 as described above, the vacuum pump 200 may fail. If a failure occurs in the vacuum pump 200, the operation of the leakage testing device must be interrupted, resulting in a problem of poor workability.

Therefore, by providing the filter 300, it is possible to minimize the occurrence of malfunction of the vacuum pump 200 by foreign substances, thereby preventing the operation of the leakage testing apparatus from being interrupted. As a result, the problem of deterioration in workability due to the interruption of operation of the leakage testing apparatus can be solved.

Next, a method of inspecting leakage of the inspected object 20 using the above-described leakage inspection apparatus will be described with reference to Figs. 2 to 5. Fig.

The inspected object 20 to be inspected is placed on the seating portion 101a of the lower chamber 101 and then the lower chamber 101 is moved in the forward and backward directions using a horizontal cylinder. Then, the upper chamber 102 is moved downward by a vertical cylinder to be coupled with the lower chamber 101. The chamber 100 formed by the lower chamber 101 and the upper chamber 102 is formed to enclose the inspected product 20 and a closed space 100a is formed in the chamber 100. [

3, the vacuum pump 200 is operated to open only the vacuum pump valve 220 and the chamber valve 120 so that the closed space of the chamber 100 is opened, Let the pressure (I) be 0.01 mbar.

At this time, if the sealed space pressure I does not reach 0.01 mbar within 13 seconds as in point A of FIG. 2, a leaked portion is generated in the inspected object 20 and a large amount of air It can be determined that the inspected object 20 is defective. When the inspected object 20 is determined to be defective, the vacuum pump valve 220 is closed and the inspected object valve 140 and the air supply valve 420 are opened to make the closed space pressure I equal to the atmospheric pressure, And the lower chamber 101 are separated from each other and the inspection product 20 is separated from the chamber 100, thereby ending the leakage inspection.

Here, when the vacuum pump valve 220 is operated to suck air in the chamber 100, foreign substances contained in the air are filtered by the filter 300. In this way, the life of the vacuum pump 200 can be prevented from being shortened by collecting the foreign substance using the filter 300.

On the other hand, when the sealed space pressure I becomes 0.01 mbar within 13 seconds as shown at point B in FIG. 2, the internal space pressure II of the inspected object 20 is set to 300 mbar.

The chamber valve 120 is closed so that the closed space pressure I is maintained at 0.01 mbar so that the internal space pressure II of the inspected object 20 becomes 300 mbar and the pressure of the inspected object 20 The inspected object valve 140 is opened so that the internal space pressure II becomes 0.01 mbar equal to the confined space pressure I so that the air in the internal space 21 is discharged.

After the inner space pressure II of the inspected object 20 reaches 0.01 mbar, the inspected object valve 140 is closed and the air supply valve 420 is opened as shown in Fig. 5, (21). After confirming that the internal space pressure (II) reaches 300 mbar through the inspected product pressure gauge (500), the air supply valve (420) is closed again so that the internal space pressure (II) is maintained at 300 mbar.

In the above description, the internal space pressure II is set to be 0.01 mbar and then 300 mbar. However, when the internal space pressure II is 300 mbar immediately after the inspected product valve 140 and the air supply valve 420 are simultaneously adjusted, .

6, the vacuum pump valve 220 is closed, the chamber valve 120 is opened, and the change in the closed space pressure I is measured through the chamber pressure gauge 600 for about 10 to 30 seconds It is possible to judge whether or not the inspected object 20 is leaked.

For example, when the inspected object 20 has a leaked portion, since the internal space pressure II is higher than the sealed space pressure I, the air existing in the internal space 21 flows through the leaked portion into the closed space 100a, So that the closed space pressure I is changed. That is, it is possible to determine whether or not the inspected object 20 is leaked through the pressure change of the chamber pressure gauge 600.

Whether or not the leakage of the more detailed inspection product 20 is judged is as follows.

When the sealed space pressure I measured through the chamber pressure gauge 600 is 0.011 mmar or less, which is the same as the point C in FIG. 2, it can be determined that there is no leaked portion in the inspected object 20.

If the closed space pressure I measured through the chamber pressure gauge 600 is higher than the point D in FIG. 2, it can be determined that there is a leaked portion in the inspected object 20.

If the closed space pressure I measured through the chamber pressure gauge 600 is located between point C and point D in FIG. 2, it can be judged that there is no leakage part. This is because the pressure change up to the point D is not caused by the movement of the air through the leaking part but is regarded as the pressure increase of the closed space 100a due to the temperature rise.

As a result, if it is lower than the closed space pressure (I) D measured through the chamber pressure gauge 600, it can be judged that there is no leakage part in the inspected object 20.

On the other hand, when there is no leakage part in the inspected product 20, even if a pressure difference occurs between the sealed space pressure I and the internal space pressure II, the air in the internal space 21 can not move, No pressure change occurs.

After the measurement is completed, the inspected product valve 140 and the air supply valve 420 are opened to make the sealed space pressure I and the internal space pressure II equal to the atmospheric pressure, The leakage inspection is terminated by separating the inspection object 20 from the chamber 100 by separating the lower chamber 102 and the lower chamber 101 from each other.

The inspection method of the present invention as described above includes the steps of placing the specimen 20 in the lower chamber 101 for 40 seconds in order to inspect the leakage of the specimen 20 and inspecting the lower chamber 101 It is possible to quickly determine whether or not the inspected object 20 is leaked for about one minute or so including the time required for the inspected object 20 to be separated from the object. Since the inspection method using the pressure difference between the closed space 100a and the internal space 21, it is possible to accurately determine whether or not the inspected object 20 is leaked.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not limited to the disclosed embodiments. Those skilled in the art, who understands the spirit of the present invention, can readily suggest other embodiments by adding, changing, deleting, adding, or the like of components within the scope of the same idea, I would say.

10: Frame 20: Inspection item
100: chamber 200: vacuum pump
300: filter 400: air supply
500: Inspected pressure gauge 600: Chamber pressure gauge

Claims (8)

frame;
A lower chamber which is installed to be movable in the front and rear direction in the frame and to which an inspection object to be inspected is fixedly mounted, and a lower chamber which is vertically movable in the frame and forms an enclosed space in which the inspected object is accommodated together with the lower chamber, A chamber;
A vacuum pump for allowing the interior space of the inspected object and the closed space to be in a vacuum state;
A filter for filtering foreign substances contained in the air sucked by the vacuum pump;
An air supply unit for supplying air to the inner space for leakage inspection of the inspected object after the inner space is evacuated by the vacuum pump;
An inspected product pressure gauge that confirms the pressure of the interior space increased by the air supplied from the air supplier; And
And a chamber pressure gauge for measuring a pressure change of the closed space to determine whether the inspected object is leaked.
The method according to claim 1,
A sealed space suction pipe for connecting the chamber to the vacuum pump,
And a chamber valve installed in the closed space suction pipe for opening and closing the closed space suction pipe.
3. The method of claim 2,
A joint pipe connected to the vacuum pump and joined to the closed space suction pipe,
And a vacuum pump valve installed in the composite pipe to control the opening and closing of the composite pipe.
The method of claim 3,
Wherein the chamber pressure gauge is provided between the chamber valve and the vacuum pump valve.
The method according to claim 1,
An inspected object suction pipe for connecting an internal space of the inspected object to the vacuum pump,
And an inspected product valve installed in the inspected product suction pipe for opening and closing the inspected product suction pipe.
6. The method of claim 5,
An air supply pipe connected to the inspected product suction pipe to supply the air of the air supply device to the inspected product suction pipe,
And an air supply valve installed in the air supply pipe for opening and closing the air supply pipe.
The method according to claim 6,
Wherein the inspected product pressure gage is provided between the inspected product valve and the air supply valve.
The method according to claim 1,
Wherein an inner circumferential surface of the chamber and an outer circumferential surface of the inspected object are spaced apart by 5 to 15 mm when the inspected object is seated inside the chamber.
KR1020140152210A 2014-11-04 2014-11-04 Leak testing devices KR20160052217A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020140152210A KR20160052217A (en) 2014-11-04 2014-11-04 Leak testing devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140152210A KR20160052217A (en) 2014-11-04 2014-11-04 Leak testing devices

Publications (1)

Publication Number Publication Date
KR20160052217A true KR20160052217A (en) 2016-05-12

Family

ID=56024742

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140152210A KR20160052217A (en) 2014-11-04 2014-11-04 Leak testing devices

Country Status (1)

Country Link
KR (1) KR20160052217A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018236095A1 (en) * 2017-06-21 2018-12-27 삼성전자 주식회사 Apparatus and method for inspecting ventilation
CN109580125A (en) * 2018-12-28 2019-04-05 湖南航天远望科技有限公司 A kind of hermetic seal zipper slip accurate detection device and method
KR101985809B1 (en) * 2018-12-03 2019-06-04 이성민 Leakage testing equipment for electrostatic chuck
KR20190067854A (en) * 2016-10-12 2019-06-17 후아웨이 테크놀러지 컴퍼니 리미티드 Sealing performance test method, apparatus and storage medium
KR102076456B1 (en) * 2019-09-06 2020-02-11 한전케이피에스 주식회사 Device for Testing Leakage of Air Compressors Intake Valve And Exhaust Valve
KR102312771B1 (en) 2020-12-10 2021-10-14 한국건설기술연구원 System for evaluating air leakage of concrete transport tube for hyper speed transportation system, and method for the same
WO2022025688A1 (en) * 2020-07-29 2022-02-03 주식회사 엘지에너지솔루션 Gas detection device and gas detection method for cell module assembly
WO2022055313A1 (en) * 2020-09-10 2022-03-17 피에스케이 주식회사 Substrate processing apparatus and method for sensing leakage from processing chamber
KR102390284B1 (en) * 2020-12-30 2022-04-22 이동준 Negative pressure generator for functional defect test of diver equipment

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11346743B2 (en) 2016-10-12 2022-05-31 Huawei Technologies Co., Ltd. Sealing performance test method, apparatus, and storage medium
KR20190067854A (en) * 2016-10-12 2019-06-17 후아웨이 테크놀러지 컴퍼니 리미티드 Sealing performance test method, apparatus and storage medium
WO2018236095A1 (en) * 2017-06-21 2018-12-27 삼성전자 주식회사 Apparatus and method for inspecting ventilation
US11506558B2 (en) 2017-06-21 2022-11-22 Samsung Electronics Co., Ltd. Apparatus and method for inspecting ventilation
KR101985809B1 (en) * 2018-12-03 2019-06-04 이성민 Leakage testing equipment for electrostatic chuck
CN109580125A (en) * 2018-12-28 2019-04-05 湖南航天远望科技有限公司 A kind of hermetic seal zipper slip accurate detection device and method
CN109580125B (en) * 2018-12-28 2024-01-30 湖南航天远望科技有限公司 Accurate detection device and method for leakage rate of airtight zipper
KR102076456B1 (en) * 2019-09-06 2020-02-11 한전케이피에스 주식회사 Device for Testing Leakage of Air Compressors Intake Valve And Exhaust Valve
WO2022025688A1 (en) * 2020-07-29 2022-02-03 주식회사 엘지에너지솔루션 Gas detection device and gas detection method for cell module assembly
KR20220033797A (en) * 2020-09-10 2022-03-17 피에스케이 주식회사 Apparatus for treating substrate and method for detecting leakage of processing chamber
WO2022055313A1 (en) * 2020-09-10 2022-03-17 피에스케이 주식회사 Substrate processing apparatus and method for sensing leakage from processing chamber
KR102312771B1 (en) 2020-12-10 2021-10-14 한국건설기술연구원 System for evaluating air leakage of concrete transport tube for hyper speed transportation system, and method for the same
KR102390284B1 (en) * 2020-12-30 2022-04-22 이동준 Negative pressure generator for functional defect test of diver equipment

Similar Documents

Publication Publication Date Title
KR20160052217A (en) Leak testing devices
US20140326051A1 (en) Method for detecting a leak on a non-rigid test specimen
KR102104829B1 (en) External seal structure of vacuum valve
CN114563135B (en) Full-automatic air tightness detection device and detection method
JP4665004B2 (en) Leak inspection apparatus and leak inspection method
KR100832345B1 (en) Leak rate and life cycles test system of pneumatic angle valve for vacuum
ITPD20110150A1 (en) APPARATUS FOR THE DETECTION OF LOSSES OF A HOLDING COMPONENT AND A RELATED DETECTION PROCESS
KR100889491B1 (en) Apparatus and method for testing leak of fuel tank
KR101542512B1 (en) Fuel tank leak testing devices
JP4968668B2 (en) Leak inspection device for housing etc.
JP5355199B2 (en) Airtight test apparatus and airtight test method
CN103630305A (en) Aluminium casting air tightness detector
KR101182818B1 (en) Leak testing apparatus and method
JP5108852B2 (en) Vacuum pump inspection method and vacuum pressure measuring device
KR101570476B1 (en) Sealing devices for leak testing
JP2000283879A (en) Inspection device for waterproofness of electronic equipment
JP2010071198A (en) Device and method for diagnosing failure of in-tank canister system
US11624672B2 (en) Apparatus and method for automatic leak detection
JP6522143B2 (en) Structure and method for container tightness inspection
KR101592437B1 (en) Fuel tank leak testing devices
JP4644100B2 (en) Helium leak test method and apparatus
CN204330238U (en) A kind of detection platform for connector welding sealing propertytest
EP2199655B1 (en) A leakage control mechanism for LPG cylinders
JP2018028445A (en) Airtightness inspection device for tank
RU181104U1 (en) VACUUM INPUT FOR LEAKAGE DESIGN TESTS

Legal Events

Date Code Title Description
A201 Request for examination
N231 Notification of change of applicant
E902 Notification of reason for refusal
E601 Decision to refuse application