KR20150054140A - Apparatus for treating exhaust gas using fine bubble ozone water and method for treating exhaust gas using the same - Google Patents

Abstract

The present invention relates to an apparatus for treating exhaust gas using microbubble ozone water. The apparatus for treating exhaust gas using microbubble ozone water of the present invention comprises: a chamber having an inlet into which exhaust gas flows and an outlet from which purified gas is discharged; a sulfur oxide treatment unit which is mounted inside the chamber and treats sulfur oxides (SO_x) by injecting microbubble ozone water that is supplied from a supply unit; and a nitrogen oxide treatment unit which is mounted inside the chamber and treats nitrogen oxides (NO_x) that is contained in exhaust gas passing through an injection unit by injecting a reducing agent. As the microbubble ozone water injected from the sulfur oxide treatment unit is separated into water and ozone (O_3), the water treats sulfur oxides (SO_x) contained in exhaust gas while the ozone generates a nitrogen dioxide (NO_2) by reacting with a nitrogen monoxide (NO) contained in exhaust gas. According to the present invention, provided is the apparatus for treating exhaust gas using microbubble ozone water, capable of enhancing the treatment efficiency of sulfur oxides and nitrogen oxides contained in exhaust gas using microbubble ozone water.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an exhaust gas treatment apparatus using micro-bubble ozone water,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust gas treatment apparatus using microbubble ozonated water, and more particularly, to an exhaust gas treatment apparatus using microbubble ozone water capable of treating exhaust gas.

Generally, large-scale incineration plants and facilities that treat pollution gases, including nitrogen oxides and sulfur oxides, which are harmful air pollutants emitted from combustion facilities, use a large-scale pollution gas treatment system to treat polluted gas.

In the case of a conventional pollutant treatment apparatus, the sulfur oxides are treated with Flue Gas Desulfurization (FGD) and treated with Selective Catalytic Reduction (SCR).

However, in the above-described flue gas desulfurization apparatus and selective catalytic reduction apparatus, since pollutants contained in the polluted gas are treated while a large amount of polluted gas passes through two processes of denitrification and desulfurization completely different in character, And the optimum process combination of denitrification and desulfurization processes was required.

Particularly, when the flue gas desulfurization apparatus is used, the overall scale becomes large,

In addition, in the case of the selective catalytic reduction apparatus used for the treatment of nitrogen oxides, the apparatus is operated only at a high temperature of at least 400 ° C, and the operation conditions are difficult, and expensive catalysts must be used.

SUMMARY OF THE INVENTION It is therefore an object of the present invention to solve the problems of the prior art described above by providing an exhaust gas treatment method using microbubble ozonated water capable of improving treatment efficiency of sulfur oxides and nitrogen oxides contained in exhaust gases Device.

According to the present invention, the above object is achieved by a method of manufacturing a semiconductor device, comprising: a chamber forming an inlet through which exhaust gas flows and an outlet through which purified gas flows; A sulfur oxide processing unit mounted in the chamber and spraying fine bubble ozonated water supplied from the supply unit to treat sulfur oxides (SOx); And a nitrogen oxide processing unit mounted in the chamber and spraying a reducing agent to treat nitrogen oxides (NOx) contained in the exhaust gas passing through the spray unit, wherein the microbubble ozonated water sprayed from the sulfur oxide processing unit comprises water and ozone (O ₃ ), and the water treats the sulfur oxides (SOx) contained in the exhaust gas, and the ozone reacts with nitrogen monoxide (NO) contained in the exhaust gas to generate nitrogen dioxide (NO ₂ ) Bubble ozone water is used as the exhaust gas.

In addition, the chamber may include a first flow path portion provided with the sulfur oxide processing portion and disposed long along the gravity direction; And a second flow path portion provided with the nitrogen oxide processing portion and disposed in parallel with the first flow path portion.

In addition, the chamber may include a reducing agent flowing from the nitrogen oxide, which is connected to the first flow path portion and the second flow path portion, and is contained in the exhaust gas flowing from the first flow path to the second flow path side And a connection storage unit for treating the nitrogen oxide.

The apparatus may further include a plurality of spherical packing portions provided below the at least one of the sulfur oxide processing portion and the nitrogen oxide processing portion and forming a gap to spray water or a reducing agent toward the connection storage portion.

The above object can also be achieved by an exhaust gas purifying system comprising: an inflow step of introducing an exhaust gas into a chamber according to the present invention; Bubble ozone water injection step of injecting microbubble ozone water toward the exhaust gas to treat sulfur oxides contained in the exhaust gas and to convert nitrogen dioxide contained in the exhaust gas into nitrogen dioxide; A clearing agent spraying step of spraying a reducing agent toward the exhaust gas to treat nitrogen dioxide; And an exhausting step of exhausting the exhaust gas from the chamber. The exhaust gas treating method using the microbubble ozonated water is characterized in that the exhaust gas is exhausted from the chamber.

The method may further include a nitrogen oxide reduction step of bringing the exhaust gas into contact with a reducing agent accommodated in the lower end of the chamber so that the nitrogen oxide is reduced.

According to the present invention, there is provided an exhaust gas processing apparatus using micro-bubble ozone water capable of improving treatment efficiency of sulfur oxides and nitrogen oxides.

In addition, sulfuric acid can be treated by using unstable microbubble ozonated water.

Further, by increasing the concentration of nitrogen dioxide contained in the exhaust gas by using ozone separated from the microbubble ozonated water and treating it with a reducing agent, the nitrogen oxide treatment efficiency as a whole can be increased.

Further, the exhaust gas is brought into contact with the reducing agent stored in the lower end of the chamber after the injection, thereby reducing the nitrogen oxide, thereby treating the nitrogen oxide with a double treatment, and the treatment efficiency can be improved.

1 is a schematic view of an exhaust gas treatment apparatus using microbubble ozonated water according to a first embodiment of the present invention,
2 is a view showing a phenomenon in which water and ozone are separated from microbubble ozone water sprayed in an exhaust gas treatment apparatus using the microbubble ozonated water of Fig. 1,
3 is a schematic view of an exhaust gas processing apparatus using microbubble ozonated water according to a second embodiment of the present invention,
Fig. 4 is a schematic view showing a step of introducing an exhaust gas treatment method using an exhaust gas treatment apparatus using the microbubble ozonated water of Fig. 3 and a step of injecting microbubble ozone water,
FIG. 5 is a schematic view showing the nitrogen oxide reduction step, the reducing agent aqueous solution injection step, and the exhaust step in the exhaust gas treatment method using the exhaust gas treatment apparatus using the microbubble ozonated water shown in FIG.

Prior to the description, components having the same configuration are denoted by the same reference numerals as those in the first embodiment. In other embodiments, configurations different from those of the first embodiment will be described do.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of an exhaust gas treatment apparatus according to a first embodiment of the present invention; FIG.

1 is a schematic view of an exhaust gas treatment apparatus using microbubble ozonated water according to a first embodiment of the present invention.

Referring to FIG. 1, an exhaust gas processing apparatus 100 using microbubble ozonated water according to the first embodiment of the present invention includes a chamber 110, a sulfur oxide processing unit 120, and a nitrogen oxide processing unit 130.

The chamber 110 accommodates the sulfur oxide processing unit 120 and the nitrogen oxide processing unit 130 to be described later and provides a space for substantially treating the exhaust gas. The chamber 110 is long along the flow direction of the exhaust gas.

The sulfur oxide processing unit 120 is for treating sulfur oxides (SOx) in the exhaust gas and includes a micro-bubble ozonated water generating unit 121 and a micro-bubble ozone water supplying unit 122.

The micro-bubble ozonated water generating unit 121 generates micro-bubble ozonated water and supplies the micro-bubble ozonated water to the micro-bubble ozonated water supply unit 122 to be described later. Here, the microbubble ozonated water refers to a bubble having a structure in which ozone (O ₃ ) particles are contained in microbubble-like particles composed of water. The particle diameter of the fine bubble ozonated water is approximately 50 micrometers or less, but is not limited thereto.

Fig. 2 shows a phenomenon in which water and ozone are separated from microbubble ozone water sprayed in an exhaust gas treatment apparatus using the microbubble ozonated water of Fig. 1. Fig.

Further, as shown in Fig. 2, the bubbles constituting the outer wall of the microbubble ozone water have a very unstable state, and when the bubbles are exposed to the outside air, the bubbles are broken and separated from the inside ozone.

The nitrogen oxide processing unit 130 is for treating nitrogen oxides (NOx) in the exhaust gas and includes a reducing agent storage unit 131 and a reducing agent supply unit 132.

The reducing agent storage unit 131 is provided outside the chamber 110 to store the reducing agent supplied to the reducing agent supply unit 132 described later.

In an embodiment of the present invention, the reducing agent may be an aqueous solution of sodium sulfite (Na ₂ SO ₃ ) or an aqueous solution of sodium sulfide (Na ₂ S), but is not limited thereto.

The reducing agent supply unit 132 is provided in the chamber 110 with a plurality of nozzles spaced apart from each other along the width direction of the chamber 110. The reducing agent supply unit 132 may supply the reducing agent supplied from the reducing agent storage unit 131 to the chamber 110, respectively.

Hereinafter, an exhaust gas treatment method using the above-described exhaust gas treatment apparatus using microbubble ozonated water will be described.

1, an exhaust gas treatment method using microbubble ozonated water according to the first embodiment of the present invention includes an inflow step S110, a microbubble ozonated water injection step S120, a reducing agent injection step S130, S140).

The introduction step S110 is a step of introducing the exhaust gas into the chamber 110, and introduces the exhaust gas into the chamber 110 through the inlet 111. [

The microbubble ozone water injection step (S120) injects the microbubble ozone water toward the exhaust gas. The microbubble ozone water injection step injects the microbubble ozone water generated from the microbubble ozone water generation part toward the exhaust gas simultaneously with the inflow of the exhaust gas.

At this time, the microbubble ozone water injected from the microbubble ozone water supply part 122 is broken into unstable bubbles and separated into ozone (O ₃ ) and water inside. At this time, the separated ozone O ₃ reacts with nitrogen monoxide NO contained in the exhaust gas to generate nitrogen dioxide (NO ₂ ) through the following formula, and nitrogen monoxide (NO) in the exhaust gas, While the concentration of nitrogen dioxide (NO ₂ ) increases.

[Chemical Formula]

NO + O ₃ -> NO ₂ + O ₂

Further, in this process, the water separated from the microbubble ozonated water in the unstable state treats and reduces sulfur oxides (SOx), and flows to the lower side of the chamber 110. The exhaust gas containing a higher concentration of nitrogen dioxide (NO ₂ ) flows along the chamber 110 and flows into the nitrogen oxide processing section 130 side when sulfur oxide is reduced and flows into the chamber 110.

The reducing agent injecting step (S130) is a step of injecting a reducing agent toward the introduced exhaust gas.

That is, in this step, the reducing agent supply unit 132 injects the reducing agent supplied from the reducing agent storage unit 131 into the exhaust gas side, so that the reducing agent reacts with the nitrogen dioxide (NO ₂ ) through the following chemical reaction, ).

First, the case where sodium sulfite (Na ₂ SO ₃ ) is used as a reducing agent is as follows.

[Chemical Formula]

2NO ₂ + 4Na ₂ SO ₃ -> N ₂ + 4Na ₂ SO ₄

The case where sodium sulfide (Na ₂ S) is used as a reducing agent is as follows.

[Chemical Formula]

2NO ₂ + Na ₂ S -> N ₂ + Na ₂ SO ₄

The exhausting step S140 is a step of exhausting the exhaust gas passing through the nitrogen oxide processing part 130 to the outside of the chamber 110 through the outflow part.

Therefore, according to the present embodiment, the microbubble ozone water is sprayed to treat the sulfur oxides (SOx), and at the same time, the pretreatment step of converting nitrogen monoxide (NO) into nitrogen dioxide (NO ₂ ) The efficiency can be improved.

Hereinafter, an exhaust gas processing apparatus using the microbubble ozonated water according to the second embodiment of the present invention will be described.

3 is a schematic view of an exhaust gas treatment apparatus using microbubble ozonated water according to a second embodiment of the present invention.

3, an exhaust gas processing apparatus 200 using micro-bubble ozonated water according to a second embodiment of the present invention includes a chamber 210, a sulfur oxide processing unit 220, a nitrogen oxide processing unit 230, 240).

The chamber 210 accommodates a sulfur oxide processing unit 220, a nitrogen oxide processing unit 230 and a packing unit 240 to be described later to provide a space for substantially treating the exhaust gas, A second flow path portion 214, a connection storage portion 215, and the like.

The first flow path portion 213 has an inlet 211 through which exhaust gas flows into the first flow path portion 213 and another end connected to a connection storage portion 215 which will be described later. Provides a space for treating the cargo (SOx), and is formed long along the gravity direction.

The second flow path portion 214 is formed with an outlet 212 through which the exhaust gas is exhausted after being processed and the other end is connected to the connection storage portion 215. In the state where the nitrogen oxide processing portion 230 is accommodated To provide a space for treating nitrogen oxides (NOx).

The second flow path portion 214 is elongated along the gravity direction and is disposed in parallel with the first flow path portion 213.

The connection storage unit 215 interconnects the first flow path unit 213 and the second flow path unit 214 and connects a space for temporarily storing the reducing agent supplied from the nitrogen oxide processing unit 230 to provide.

The chamber 210 having the above-described structure will be described again. The second flow path portion 214 having the first flow path portion 213 having the inlet port 211 at the upper end thereof and the outlet port 212 at the upper end thereof is connected And the chamber 215 is designed to have a U-shaped structure as a whole. Therefore, the exhaust gas flows into the first flow path portion 213, passes through the connection storage portion 215, and finally exhausts to the outside through the second flow path portion 214.

The sulfur oxide processing unit 220 is for processing sulfur oxides (SOx) in the exhaust gas and includes a micro-bubble ozonated water producing unit 221 and a micro-bubble ozonated water supplying unit 222.

The micro-bubble ozonated water generator 221 generates micro-bubble ozonated water and supplies the micro-bubble ozonated water to the micro-bubble ozonated water supply unit 222 described later. At this time, the microbubble ozone water 221 refers to a bubble having a structure in which ozone (O ₃ ) particles are contained in microbubble-like particles composed of water. The particle diameter of the fine bubble ozonated water is approximately 50 micrometers or less, but is not limited thereto.

The fine bubble ozone water supply part 222 is provided with a plurality of nozzles which are spaced apart from each other in the width direction inside the first flow path part 213. Further, the microbubble ozonated water supply unit 222 is connected to the microbubble ozonated water generation unit 221 described above so as to supply the microbubble ozonated water to the lower side.

The nitrogen oxide processing unit 230 is for treating nitrogen oxides (NOx) in the exhaust gas and includes a reducing agent storage unit 231 and a reducing agent supply unit 232.

The reducing agent storage unit 231 is provided outside the second flow path unit 214 to store the reducing agent supplied to the reducing agent supply unit 232 described later.

The reducing agent supply unit 232 is provided with a plurality of nozzles that are spaced apart from each other along the width direction within the second flow path unit 214. The reducing agent supply unit 232 may supply the reducing agent supplied from the reducing agent storage unit 231 to the chamber 110, That is, to the connection storage unit 215 side.

The packing part 240 is provided in each of the first flow path part 213 and the second flow path part 214 and has a plurality of spherical members which form a gap to uniformly spray the fluid supplied to the upper end from the lower end, . However, the shape of the packing part 240 is not limited to the spherical shape as long as it can form a gap and uniformly disperse the fluid.

That is, the packing unit 240 is installed below the sulfuric acid processing unit 220 of the first flow path unit 213 and below the nitrogen oxide processing unit 230 of the second flow path unit 214, Bubble ozone water supplied from the nitrogen oxide processing unit 220 and the reducing agent supplied from the nitrogen oxide processing unit 230 are uniformly sprayed.

The diameter of the packing part 240 and the porosity formed by the packing part 240 are preferably determined in consideration of the conditions such as the flow rate of the exhaust gas to be treated and the volume of the chamber 210.

Hereinafter, an exhaust gas treatment method using the above-described exhaust gas treatment apparatus using microbubble ozonated water will be described.

The method for treating exhaust gas using microbubble ozonated water according to the second embodiment of the present invention is characterized in that the inflow step S210, the microbubble ozonated water injection step S220, the nitrogen oxide reduction step S230, the reducing agent injection step S240, Step S250.

FIG. 4 schematically shows a step of introducing an exhaust gas treatment method using the exhaust gas processing apparatus using the microbubble ozonated water of FIG. 3 and a step of injecting microbubble ozone water.

Referring to FIG. 4, the introduction step S210 is a step of introducing exhaust gas into the chamber 210, and introduces the exhaust gas into the first flow path portion 213 through the inlet 211.

The microbubble ozonated water injection step S220 is a step of injecting microbubble ozone water toward the exhaust gas.

That is, in this step, the exhaust gas flows into the first flow path portion 213 and the minute bubble ozone water generated from the fine bubble ozone water producing portion 221 is supplied to the lower packing portion 240 through the fine bubble supplying portion 222, .

At this time, as the microbubble ozone water supply part 222 is detached, the microbubble ozone water is destroyed in an unstable bubble wall, and the ozone O ₃ inside the microbubble ozone is separated from water. At this time, the separated ozone (O ₃ ) reacts with nitrogen monoxide (NO) contained in the exhaust gas to generate nitrogen dioxide (NO ₂ ) through the following formula, and the nitrogen dioxide (NO ₂ ) .

[Chemical Formula]

NO + O ₃ -> NO ₂ + O ₂

Further, in this process, the water separated from the microbubble ozonated water in the unstable state is treated and reduced in the sulfur oxides (SOx), and is sent down to the connection storage part 215 on the lower side.

At this time, the minute bubble ozonated water or water separated therefrom is uniformly sprayed by the gap formed by the packing portion 240 while passing through the packing portion 240 provided below the sulfur oxide processing portion 220. As the minute bubble ozonated water or water separated therefrom is uniformly sprayed while passing through the packing part 240, the area in contact with the exhaust gas as a whole increases and the treatment efficiency also increases.

On the other hand, after passing through the SOx processing unit (220), sulfur oxides (SOx) contained in exhaust gas is reduced by the water is separated from the micro-bubbles of ozone water, the concentration of nitrogen dioxide (NO ₂₎ by the ozone (O ₃₎ Is increased.

FIG. 5 is a schematic view showing a nitrogen oxide reduction step, a reducing agent injection step, and an exhaust step in the exhaust gas treatment method using the exhaust gas treatment apparatus using the microbubble ozonated water of FIG.

Referring to FIG. 5, the nitrogen oxide reduction step (S230) is a step of passing the exhaust gas through a reducing agent stored in the connection storage unit 215 to reduce nitrogen oxide (NOx).

That is, after the exhaust gas passes through the first flow path 213, the exhaust gas passes through the connection storage unit 215, and a part of the nitrogen dioxide NO ₂ contained therein is temporarily stored in the connection storage unit 215. the reaction is treated with sodium sulfate and produce a (Na ₂ SO _4).

[Chemical Formula]

2NO ₂ + 4Na ₂ SO ₃ -> N ₂ + 4Na ₂ SO ₄

[Chemical Formula]

2NO ₂ + Na ₂ S -> N ₂ + Na ₂ SO ₄

The reducing agent injecting step S240 is a step of treating the nitrogen oxides (NOx) by injecting a reducing agent toward the exhaust gas.

That is, the exhaust gas that has continuously passed through the first flow path portion 213 and the connection storing portion 215 reaches the nitrogen oxide processing portion 230. The reducing agent provided from the reducing agent storage unit 220 and injected through the reducing agent supply unit 221 reacts with nitrogen dioxide (NO ₂ ) through the above-described chemical reaction to treat nitrogen oxides (NOx).

Also in this reaction, since the packing portion 240 disposed below the nitrogen oxide processing portion 230 of the second flow path portion 214 uniformly disperses the reducing agent and sprayed downward, the contact area between the exhaust gas and the reducing agent becomes And the processing efficiency is improved.

The exhausting step S250 is a step of exhausting the exhaust gas passing through the nitrogen oxide processing part 230 to the outside of the chamber 210 through the outflow part 212. [

In other words. In this step, the exhaust gas that has passed through the nitrogen oxide processing unit 230 flows along the second flow path portion 214 and is finally exhausted to the outside through the outflow portion 212.

Therefore, according to this embodiment, it is possible to improve the nitrogen oxide treatment efficiency at the time of spraying the reducing agent by spraying the microbubble ozonated water, treating the sulfur oxide, and pretreating the nitrogen oxide. Further, by allowing the exhaust gas to come in contact with the reducing agent accommodated in the lower end of the chamber, the nitrogen oxide reduction performance can be improved.

The scope of the present invention is not limited to the above-described embodiments, but may be embodied in various forms of embodiments within the scope of the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims.

110: chamber 120: sulfuric acid treatment section
130: nitrogen oxide processing unit

Claims (6)

A chamber for forming an inlet through which the exhaust gas flows and an outlet through which the purified gas flows out;
A sulfur oxide processing unit mounted in the chamber and spraying fine bubble ozonated water supplied from the supply unit to treat sulfur oxides (SOx);
And a nitrogen oxide processing unit mounted in the chamber, for processing nitrogen oxide (NOx) contained in exhaust gas that has passed through the injection unit by injecting a reducing agent,
The microbubble ozone water sprayed from the sulfur oxide treatment unit is separated into water and ozone (O ₃ ), and water treats sulfur oxides (SOx) contained in the exhaust gas, and ozone treats nitrogen monoxide (NO) (NO ₂ ) is produced by reacting with the microbubble ozone water. The method according to claim 1,
Wherein the chamber is provided with the sulfuric acid treatment unit and has a first flow path portion disposed along the gravity direction; And a second flow path portion provided with the nitrogen oxide processing portion and disposed in parallel with the first flow path portion. 3. The method of claim 2,
Wherein the chamber is connected to the first flow path portion and the second flow path portion, the reducing agent flowing from the nitrogen oxide is stored, and the nitrogen oxide contained in the exhaust gas flowing from the first flow path to the second flow path side, Wherein the microbubble ozonated water is used as the exhaust gas. The method of claim 3,
Further comprising a plurality of spherical packing portions provided below the at least one of the sulfur oxide processing portion and the nitrogen oxide processing portion and forming a gap to spray water or a reducing agent toward the connection storage portion side. And an exhaust gas treatment device. An inflow step of introducing an exhaust gas into the chamber;
Bubble ozone water injection step of injecting microbubble ozone water toward the exhaust gas to treat sulfur oxides contained in the exhaust gas and to convert nitrogen dioxide contained in the exhaust gas into nitrogen dioxide;
A reducing agent spraying step of spraying a reducing agent toward the exhaust gas to treat nitrogen dioxide;
And exhausting the exhaust gas from the chamber. ≪ Desc / Clms Page number 19 > 6. The method of claim 5,
And a nitrogen oxide reducing step of bringing the exhaust gas into contact with a reducing agent contained in the lower end of the chamber so as to reduce the nitrogen oxide.

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