KR20140143707A - Inspection apparatus, calibration and inspection method of the inspection apparatus - Google Patents

Abstract

A test device for a test target such as a sensor panel enables calibration to remove errors due to stray capacitance of a cable, and also enables the measurement of minute capacitance of the sensor panel with reasonable preciseness. When a sensor panel is separated, a calibration unit (46) of a sensor panel test device (1) supplies an AC signal from a signal unit (11) to at least one among a plurality of second cables (37), and adjusts the voltage and phase of AC power corresponding to a current meter of a current detection unit (41) in a calibration signal unit (42) to make the output of the current meter of the current detection unit (41), which is electrically connected to a first cable (36), into zero. When the output of the current meter becomes 0, the voltage and phase of the AC power is stored. In the test of the sensor panel, an AC signal is generated in the AC power of the calibration signal unit (42) based on the stored voltage and phase.

Description

TECHNICAL FIELD [0001] The present invention relates to an inspection apparatus, a calibration method of a test apparatus, and a method of inspecting the inspection apparatus.

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an inspection apparatus that mainly uses a sensor panel of an electrostatic capacity type.

BACKGROUND ART [0002] Conventionally, a touch panel device for detecting a touch position (touch position device) is known as a capacitive touch panel device. The sensor panel of the capacitive touch panel device has a structure in which a first pattern transparent conductive layer (first pattern transparent conductive layer) and a second pattern transparent conductive layer are formed on a transparent substrate formed, for example, by glass or the like . The pattern transparent whole layer can be formed by forming a film using indium tin oxide (ITO), for example.

The two pattern transparency layers are disposed so as to cross each other at right angles and each function as an electrode. In the following, the first and second pattern transparency layers may be referred to as a first electrode and a second electrode. The first electrode and the second electrode are arranged so as to face each other with a gap in the thickness direction of the sensor panel therebetween.

According to the above configuration, a kind of capacitor is formed at the intersection portion of the first electrode and the second electrode, and the capacitance of the capacitor is changed by approaching or contacting a conductive object (for example, a human body). The touch panel device can detect a touched position on the sensor panel by detecting a change in the capacitance. This method is called a projection type capacitance type (projection type capacitance type), and is excellent in that it can detect a touch position with high accuracy.

However, in the manufacturer of the touch panel device, it is very important to inspect the sensor panel in order to secure the quality of the product by avoiding the inclusion of defective products.

As one of the inspection methods, a contact made of a needle-like conductive probe is directly brought into contact with each electrode arranged in the horizontal and vertical directions and the wiring connected thereto, (Short-circuiting) with the adjacent electrode (wiring) has been conventionally conducted.

However, in the method in which the contact is directly brought into contact with the contact member in this way, the electrode and the contact made of the ITO film are not stable, and the electrical characteristics can not be accurately measured due to instability of contact resistance caused by the oxide film. Further, since the contactor is in direct contact with an electrode or the like to be inspected, there is a problem that a scratch is formed and the quality is deteriorated.

In order to improve the detection precision of a predetermined touch input position on a touch panel assembled as disclosed in Patent Document 1, a method of inspecting electrical characteristics such as a resistance value of the entire touch panel has been proposed.

In addition to the technique disclosed in Patent Document 1, a contact portion is brought into contact with a crossing portion of an electrode while supplying an inspection signal to each electrode, and both parts of the electrode and the like are inspected based on the detection signal of the contact.

(Patent Document 1) Japanese Patent Application Laid-Open No. 2005-274225

However, in this inspection method, it is necessary to conduct inspection by bringing the contacts into contact with all the intersecting portions of the electrodes arranged in the lateral and longitudinal directions. Therefore, when the number of electrodes is increased, a long time is required for moving the contactor, and the inspection time is significantly increased.

It is also conceivable to measure the capacitance at the intersection of the first electrode and the second electrode in the course of the inspection. However, this capacitance is about 10 pF even if it is large. However, the unintended capacitance Component (so-called stray capacitance) is about 100 pF, and this stray capacitance is a major cause for lowering the measurement accuracy. Therefore, it is required to appropriately remove the influence of the stray capacitance from the viewpoint of increasing the accuracy of inspection.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an apparatus for inspecting an object to be inspected such as a sensor panel, which realizes a calibration for eliminating an error caused by a floating capacity of a cable, So that a capacitance can be measured with good precision.

The problem to be solved by the present invention is as described above, and the solution of this problem and its effect will be described below.

According to a first aspect of the present invention, there is provided a panel-like inspection object comprising: a plurality of first conductors arranged in parallel; and a plurality of second conductors arranged in parallel arranged so as to intersect each other when viewed from the thickness direction of the panel The following arrangement of the inspection apparatus of the inspection object is provided. That is, the inspection apparatus includes a first wiring body, a second wiring body, a signal portion, a signal supply / output portion, a current detection portion, a detection switching portion, and a calibration signal portion. A plurality of the first wiring bodies are provided and electrically connected to each of the first conductors at the time of inspection. A plurality of the second wiring bodies are provided and electrically connected to each of the second conductors at the time of inspection. The signal portion is an AC power supply for supplying an AC signal. The signal supply switching unit may switch whether to supply or block an AC signal of the signal portion to each of the plurality of second conductors via the second wiring member. The current detecting section includes a plurality of ammeters capable of detecting a current flowing in the first conductor. The detection switching unit may switch whether to connect or disconnect each of the first conductors via the ammeter and the first wiring member. The calibration signal section includes a plurality of ac power supplies capable of supplying an ac signal to each of the ammeter. Each of the AC power supplies of the calibration signal section is configured to be able to change its voltage and phase.

Accordingly, it is possible to realize the calibration for eliminating the error caused by the stray capacitance of the cable or the like. Further, since the AC power source of the calibration signal portion is controlled to remove the current due to the stray capacitance or the like, the ammeter of the current detecting portion can detect the current itself based on the capacitance of the intersection portion of the first conductor and the second conductor . Therefore, the minute capacitance of the sensor panel can be measured with good precision by properly setting the range of the ammeter.

In the above inspection apparatus, it is preferable to have the following configuration. That is, the inspection apparatus includes a calibration section for controlling at least the signal section, the current detection section, and the calibration signal section. Wherein the calibrating unit is configured to calibrate the current measurement unit of the ammeter of the current detecting unit electrically connected to the first wiring body while supplying an AC signal of the signal portion to at least one of the second wiring bodies, The voltage and phase of the AC power supply corresponding to the ammeter in the calibration signal portion are adjusted so that the output becomes zero. The calibration section acquires and stores calibration parameters which are parameters of a voltage and a phase given to the AC power supply of the calibration signal section when the output of the ammeter becomes zero. Further, the calibration section generates an AC signal to the AC power source of the calibration signal section based on the stored calibration parameter when inspecting the object to be inspected.

Accordingly, the voltage and phase of the AC power source of the calibration signal portion for removing the current due to the stray capacitance are automatically determined. Therefore, the labor of calibration can be reduced.

In the above inspection apparatus, it is preferable to have the following configuration. That is, the calibration unit may be configured such that, at the time of calibration, the state of the signal supply transfer unit is switched to the calibration parameter so that the state of the signal supply transfer unit is changed so as to change the second wiring member as a supply source of the signal of the signal unit I remember it. The calibration section generates an AC signal to the AC power source of the calibration signal section based on the calibration parameter stored corresponding to the state of the signal supply transfer section when the inspected object is inspected.

Accordingly, even if the stray capacitance or the like changes depending on which of the second wiring bodies is used as a signal supply source, the calibration can be performed correspondingly, and thus the measurement accuracy can be maintained satisfactorily.

In the above inspection apparatus, it is preferable that the calibration section controls the detection switching section so that a plurality of the first wiring bodies and the ammeter of the current detection section corresponding thereto are simultaneously connected at the time of calibration.

As a result, it is possible to concurrently perform the calibration work for a plurality of ammeters, so that the time required for the calibration can be effectively shortened.

In the above inspection apparatus, it is preferable to have the following configuration. That is, the inspection apparatus includes an inspection section for controlling at least the signal section, the current detection section, the signal supply / transfer section, and the detection / transfer section. Wherein the inspection unit controls the signal supply / reception unit so as to supply an AC signal of the signal portion to one selected from the plurality of second conductors, and controls one of the plurality of the first conductors, And controls the detection change unit to connect the ammeter of the detection unit. The inspection section may be configured to detect a current flowing through the selected second conductor from a supply end which is an end to which an AC signal of the signal portion is supplied, And a current phase difference which is a difference between the phase of the current flowing through the forming circuit and the circuit resistance which is the resistance of the forming circuit when the circuit reaching the measuring end which is the end of the side to which the ammeter is connected is referred to as a forming circuit Is measured by detecting the current by the ammeter. Further, the inspection unit inspects the abnormality of the first conductor and the second conductor on the basis of the obtained measurement value of the formed circuit.

Thus, whether or not the first conductor and the second conductor are uniformly formed can be determined by obtaining the measurement value of the forming circuit. In addition, the non-contact inspection can be realized without using a contactor or the like, so that the tact time can be remarkably shortened.

In the above inspection apparatus, it is preferable that the inspection unit measures the forming circuit measured value and measures the capacitance at the intersection portion of the selected first conductor and the second conductor.

Therefore, the inspection time can be further shortened because it is possible to perform the inspection using the inspection time efficiently.

In the inspecting apparatus, the inspecting unit may be configured such that the selected first conductor is common, and the selected second conductor is sequentially changed from one side in the longitudinal direction of the first conductor to the other side, It is preferable to check the abnormality of the first conductor and the second conductor by judging whether the circuit resistance or the current phase difference of the first conductor and the second conductor increases or decreases monotonously.

Further, in the inspection apparatus described above, the inspection section may be configured such that the selected second conductor is made common, and the selected first conductor is sequentially changed from one side in the longitudinal direction of the second conductor to the other side, It is preferable to check the abnormality of the first conductor and the second conductor by judging whether the circuit resistance or the current phase difference of the circuit increases or decreases monotonously.

Accordingly, whether or not the shapes of the first conductor and the second conductor are uniform can be reasonably determined.

The above inspection apparatus may be configured as follows. That is, the inspection unit may include: a first forming circuit that is the forming circuit configured by respectively selecting the first conductor and the second conductor; and a selection circuit that selects the first conductor from among the first conductor selected in the first forming circuit One of the first conductor and the second conductor is moved in a direction away from the supply end of the second conductor with respect to the conductor, By determining whether or not the circuit resistance or the current phase difference is the same between the first conductor and the second forming circuit which is the forming circuit constituted by moving one in the direction closer to the measuring end of the body Inspect the sieve for abnormalities.

This also makes it possible to reasonably determine whether or not the shapes of the first conductor and the second conductor are uniform.

According to a second aspect of the present invention, there is provided a panel-like inspection object, comprising: a plurality of first conductors arranged in parallel; and a plurality of second conductors arranged in parallel arranged so as to cross each other when viewed in the thickness direction of the panel In the inspection apparatus for an object to be inspected, the following calibration method is provided. That is, the inspection apparatus includes a first wiring body, a second wiring body, a signal portion, a signal supply / output portion, a current detection portion, a detection switching portion, and a calibration signal portion. A plurality of the first wiring bodies are provided and electrically connected to each of the first conductors at the time of inspection. A plurality of the second wiring bodies are provided and electrically connected to each of the second conductors at the time of inspection. The signal portion is an AC power supply for supplying an AC signal. The signal supply switching unit may switch whether to supply or block an AC signal of the signal portion to each of the plurality of second conductors via the second wiring member. The current detecting section includes a plurality of ammeters capable of detecting a current flowing in the first conductor. The detection switching unit may switch whether to connect or disconnect each of the first conductors via the ammeter and the first wiring member. The calibration signal section includes a plurality of ac power supplies capable of supplying an ac signal to each of the ammeter. Each of the AC power supplies of the calibration signal section is configured to be able to change its voltage and phase. The calibration method includes a signal condition adjustment step, a signal condition storage step, and a calibration signal generation step. Wherein the signal condition adjusting step includes a step of adjusting the current value of the current detection unit electrically connected to the first wiring body while supplying the alternating signal of the signal portion to at least one of the second wiring bodies in a state in which the inspection object is separated, The voltage and phase of the AC power supply corresponding to the ammeter in the calibration signal portion are adjusted so that the output of the AC power supply becomes zero. In the signal condition storage step, a calibration parameter which is a parameter of a voltage and a phase given to the AC power source of the calibration signal portion when the output of the ammeter becomes 0 is acquired and stored. In the calibration signal generating step, an AC signal is generated on the AC power source of the calibration signal section based on the stored calibration parameter when inspecting the object to be inspected.

Accordingly, it is possible to realize the calibration for eliminating the error caused by the stray capacitance of the cable or the like. Further, since the AC power source of the calibration signal portion is controlled to remove the current due to the stray capacitance or the like, the ammeter of the current detecting portion can detect the current itself based on the capacitance of the intersection portion of the first conductor and the second conductor . Therefore, the minute capacitance of the sensor panel can be measured with good precision by properly setting the range of the ammeter. In addition, since the voltage and phase of the AC power source of the calibration signal portion for removing the current due to the stray capacitance are automatically determined, the labor of calibration can be reduced.

According to a third aspect of the present invention, there is provided a panel-like inspection object, comprising: a plurality of first conductors arranged in parallel and a plurality of second conductors arranged in parallel so as to cross each other when viewed in the thickness direction of the panel In the inspection apparatus for an object to be inspected, the following inspection method is provided. That is, the inspection apparatus includes a first wiring body, a second wiring body, a signal portion, a signal supply / output portion, a current detection portion, a detection switching portion, and a calibration signal portion. A plurality of the first wiring bodies are provided and electrically connected to each of the first conductors at the time of inspection. A plurality of the second wiring bodies are provided and electrically connected to each of the second conductors at the time of inspection. The signal portion is an AC power supply for supplying an AC signal. The signal supply switching unit may switch whether to supply or block an AC signal of the signal portion to each of the plurality of second conductors via the second wiring member. The current detecting section includes a plurality of ammeters capable of detecting a current flowing in the first conductor. The detection switching unit may switch whether to connect or disconnect each of the first conductors via the ammeter and the first wiring member. The calibration signal section includes a plurality of ac power supplies capable of supplying an ac signal to each of the ammeter. Each of the AC power supplies of the calibration signal section is configured to be able to change its voltage and phase. The inspection method includes a transfer step, a formation circuit measurement value acquisition step, and a determination step. Wherein the signal transmission and reception unit controls the signal supply and reception unit to supply an AC signal of the signal portion to one selected from the plurality of second conductors, And controls the detection switching unit to connect the ammeter of the current detecting unit. In the forming circuit measurement value acquisition step, the selected second conductor is supplied with the selected signal from the supply terminal, which is the end to which the AC signal of the signal portion is supplied, through the intersection of the selected second conductor and the selected first conductor. 1 circuit is a circuit that reaches the measuring end which is the end of the conductor on the side to which the ammeter is connected, the circuit resistance which is the resistance of the forming circuit and the phase difference of the current flowing in the forming circuit The current value is measured by detecting the current value by the ammeter. The determination step determines whether or not the first conductor and the second conductor are abnormal based on the obtained measurement value of the forming circuit.

Thus, whether or not the first conductor and the second conductor are uniformly formed can be determined by obtaining the measurement value of the forming circuit. Further, since the contactless inspection is realized without using a contactor or the like, the tact time can be remarkably shortened.

1 is a conceptual diagram showing the overall configuration of a sensor panel inspection apparatus according to an embodiment of the present invention.
2 is a view showing a state in which the sensor panel inspection apparatus is calibrated in a state in which the sensor panel is detached.
3 is a graph showing the relationship between the voltage phase of the signal portion and the current phase detected by the ammeter of the current detecting portion.
4 is a diagram showing a forming circuit when the sensor panel inspecting apparatus inspects the positions (1, 4) in the sensor panel.
5 is a diagram schematically showing a forming circuit.
6 is a table showing the relationship between the coordinates of the position to be inspected and the resistance value of the forming circuit.
7 is a vector diagram showing the relationship between the resistance value of the forming circuit and the phase of the current.

Next, embodiments of the present invention will be described with reference to the drawings. 1 is a conceptual diagram showing the overall configuration of a sensor panel inspection apparatus 1 according to an embodiment of the present invention. Fig. 2 is a view showing the calibration of the sensor panel inspection apparatus 1 with the sensor panel removed. 3 is a graph showing the relationship between the voltage phase of the signal portion 11 and the current phase detected by the ammeter of the current detecting portion 41. In Fig.

A sensor panel inspection apparatus 1 shown in FIG. 1 is configured to be able to inspect the sensor panel 50, which is an object to be inspected. Fig. 1 shows a state in which the sensor panel 50 is set in the sensor panel inspection apparatus 1. Fig.

The sensor panel 50 is a major component of a touch panel device. The sensor panel 50 includes a transparent substrate made of glass or the like and a plurality of elongated first electrodes (first conductor And a plurality of elongated second electrodes (second conductors) 52 in the transverse direction are provided so as to cross each other.

The first electrode 51 and the second electrode 52 are disposed in a matrix shape so as to cross each other when viewed in the thickness direction of the sensor panel 50. More specifically, M first electrodes 51 are arranged at equal intervals in the horizontal direction in FIG. 1, and N second electrodes are arranged at equal intervals in the longitudinal direction of FIG. 1. In the following description, the direction in which the first electrodes 51 are arranged side by side is referred to as the x direction, and the direction in which the second electrodes 52 are arranged side by side is referred to as the y direction.

As a result, an M × N matrix is formed by the two electrodes 51 and 52. 1, a predetermined gap is formed between the first electrode 51 and the second electrode 52 in the thickness direction of the sensor panel 50. In addition,

The shapes of the first electrode 51 and the second electrode 52 are all of a constant size and have a pattern such that a plurality of small diamond shapes are put on a shoehorn and a wide width portion and a narrow width portion Are repeated alternately in the longitudinal direction. The first electrode (51) and the second electrode (52) intersect with each other when seen from the plane in the narrow width portion. Accordingly, almost all of the area (hereinafter, referred to as a touch area) in which the touch position detection can be performed by any one of the first electrode 51 and the second electrode 52 is covered .

In the touch area, a sensor coordinate system is set by the relationship between the first electrode 51 and the second electrode 52 arranged in a matrix. This coordinate system can be represented by the coordinates in the x direction and the y direction. Specifically, the intersections of both electrodes at the lower left corner of the touch region in Fig. 1 are set to (1, 1) and the intersections at the upper right corner are set to (M, N).

Although the number of the first electrode 51 and the number of the second electrode 52 is four (M = 4, N = 4) in the sensor panel 50 of FIG. 1, . Also, the shape of the first electrode 51 and the second electrode 52 is not limited to the above. For example, the shape of the electrode having a constant width can be changed.

The first electrode 51 and the second electrode 52 may be formed of a pattern transparent conductive layer (not shown) by a known method such as sputtering or evaporation using ITO (Indium Tin Oxide) ). However, the material of the electrode is not limited to ITO, and various materials such as indium zinc oxide (IZO) and the like can be used.

A first tab wiring portion 56 and a second tab wiring portion 57 are formed on the substrate so as to be connected to the first electrode 51 and the second electrode 52. [ The first tab wiring portion 56 and the second tab wiring portion 57 are formed at a position away from the touch region and include a first electrode 51 and a second electrode 52, (Not shown in the drawing) of the driver circuit (not shown).

In this embodiment, the first tab wiring portion 56 and the second tab wiring portion 57 are made of a paste material (specifically, a silver paste) having conductivity (conductivity) And is formed by screen printing using a screen printing method. However, the present invention is not limited to this configuration. For example, copper paste may be used in place of the silver paste, or another printing method such as inkjet printing may be used instead of screen printing. The first tab wiring portion 56 and the second tab wiring portion 57 may be patterned by selectively etching after depositing various metal films having conductivity.

The sensor panel inspecting apparatus 1 of the present embodiment checks whether or not the electrostatic capacitance at the electrode crossing portion in the sensor panel 50 is in accordance with the design and the electrodes 51 and 52 It is used to check whether it is correctly formed or not. This sensor panel inspection apparatus 1 includes a first cable (a first wiring body (first wiring body)) 36, a second cable (a second wiring body) 37, a signal portion A signal supply switching section 31, a detection switching section 32, a current detection section 41, a calibration signal section 41, (calibration signal unit) 42, and a controller unit (control unit) 45 as main components.

The first cable 36 and the second cable 37 are made of electric wires having conductivity. The first cable 36 is electrically connected to the first electrode 51 through the first tab wiring portion 56 of the sensor panel 50 when the sensor panel 50 is set in the sensor panel inspecting apparatus 1, And the second cable 37 is electrically connected to the second electrode 52 through the second tab wiring portion 57 of the sensor panel 50.

The signal unit 11 is configured as an AC power supply for supplying an AC signal of a predetermined voltage. The AC signal supplied from the signal unit 11 can be set so that the effective value of the voltage falls within the range of 1 V to 10 V within the range of 10 kHz to 1000 kHz, for example. One end of the signal portion 11 is grounded and the other end thereof is electrically connected to the signal supply /

The signal unit 11 is connected to the controller unit 45 and can generate an AC signal based on a control command from the controller unit 45. [

The signal supply switching unit 31 may select all or a part of the plurality of second electrodes 52 and electrically connect the selected second electrode 52 and the signal unit 11. [ The signal supply / changeover unit 31 includes a plurality of switches corresponding to the second electrodes 52, respectively. In the figure, the numbers "1" to "4" are attached to the respective switches, and this number corresponds to the y coordinate in the sensor coordinate system. Each of the switches is configured to be capable of ON / OFF operation and is electrically connected to the corresponding second electrode 52 through the second cable 37 and the second tab wiring portion 57.

The signal supply switching unit 31 is connected to the controller unit 45 and can switch on and off the switches based on a control command from the controller unit 45. [

The detection switch section 32 can select all or part of the plurality of first electrodes 51 and electrically connect the selected first electrode 51 and the current detection section 41. [ The detection switch section 32 includes a plurality of switches corresponding to the first electrodes 51, respectively. In the figure, the numbers "1" to "4" are attached to each switch, and this number corresponds to the x-coordinate in the sensor coordinate system. These switches are configured to be capable of ON / OFF operation and are electrically connected to the corresponding first electrode 51 through the first cable 36 and the first tab wiring portion 56.

The detection switch section 32 is also connected to the controller unit 45 like the signal supply switch section 31 so that the switches can be switched on and off based on a control command from the controller unit 45. [

The current detecting section 41 is provided with a plurality of ammeters arranged so as to correspond to the plurality of first electrodes 51, respectively. Each ammeter transmits the value of the detected current to the controller unit 45.

The calibration signal section 42 is provided with a plurality of AC power sources arranged corresponding to the amperage of the current detecting section 41, respectively. One end of the AC power source is grounded, and the other end thereof is connected to the ammeter.

This AC power source can generate an AC signal having a frequency coinciding with the signal portion 11 described above. Each of the AC power sources is configured so that the voltage and phase of the AC signal output based on the control command from the controller unit 45 can be changed independently.

The controller unit 45 is configured as a microcomputer, and includes a CPU serving as an operation unit and a ROM, a RAM, and the like as a storage unit not shown in the figure. In the ROM of the controller unit 45, a program for operating the sensor panel inspecting apparatus 1 is stored.

The program includes a calibration program for realizing the calibration method according to the present embodiment by means of the sensor panel inspection apparatus 1. The program also includes an inspection program for realizing the inspection method according to the present embodiment by means of the sensor panel inspection apparatus 1.

The calibration method includes a signal condition adjustment step, a signal condition storage step, and a calibration signal generation step, which will be described later in detail. Therefore, the calibration program includes a signal condition adjusting step, a signal condition storing step, and a calibration signal generating step corresponding to each of the steps.

Although the details will be described later, the inspection method includes a transfer process, a formation circuit measurement value acquisition process, and a determination process. Therefore, the inspection program includes a transfer step, a formation circuit measurement value acquisition step, and a determination step corresponding to each of the above steps.

The hardware and the software cooperate to function as the controller unit 45 as the calibration unit 46 and the checking unit 47. [

The calibration unit 46 sends control signals to the signal unit 11, the signal supply / output unit 31, the detection / switching unit 32, the current detection unit 41, and the calibration signal unit 42 as the previous stage of the inspection And determines the parameters necessary for the calibration. This operation is performed with the sensor panel 50 removed.

The inspection unit 47 is provided with a signal unit 11, a signal supply / output unit 31, a detection / switching unit 32, a current detection unit 41, and a signal detection unit 41 in a state where the sensor panel 50 is set in the sensor panel inspection apparatus 1. [ And sends a control signal to the calibration signal section 42 to control the sensor panel 50.

First, the calibration operation will be described with reference to FIG. This calibration operation is usually performed when the sensor panel inspection apparatus 1 is used for the first time or when the installation location of the apparatus is changed.

The sensor panel inspecting apparatus 1 is provided with an operation unit which is not shown in the drawings but is operated to instruct the execution of inspection or calibration. 2, in which the sensor panel 50 is not attached to the sensor panel inspection apparatus 1, the controller unit 45 (the calibration unit 46) One of the four switches constituting the signal supply switching section 31 is turned on while the AC signal is being generated, and the other three are turned off. Further, the controller unit 45 turns ON one of the four switches constituting the detection change section 32 and turns OFF the remaining three switches. In the present description, it is assumed that the switch of "1" is turned on in the signal supply switch part 31 and the switch of "1" is turned on in the detection switch part 32 respectively.

The signal portion 11 generates an AC signal in a state where the second cable 37 corresponding to the switch of "1" of the signal supply switch portion 31 is connected to the signal portion 11. Thus, in the ammeter of the current detecting section 41 corresponding to the switch of "1" in the detection switch section 32, the stray capacitance (stray capacitance) of the first cable 36 connected to the switch of "1" The current flows.

The calibration operation in the sensor panel inspection apparatus 1 of the present embodiment includes determining conditions for controlling the calibration signal unit 42 to eliminate the influence on the ammeter by the current. Specifically, the controller unit 45 (the calibration unit 46) reads the output of the ammeter connected to the switch " 1 " in the detection switching unit 32, The voltage and phase of the AC power supply corresponding to the ammeter are changed in the section 42 to find a condition that the output of the ammeter becomes zero (signal condition adjusting step).

In the case where the current flowing through the current detecting unit 41 at the time of calibration is due to only the influence of the stray capacitance described above, the phase of the waveform detected by the ammeter is shifted from the phase of the signal portion 11 Which is precisely 90 DEG ahead of the voltage phase. However, in reality, the phase difference of the waveform flowing through the ammeter of the current detection unit 41 becomes a value smaller than 90 degrees, and it is difficult to calculate this by calculation. This is because the resistances of the wiring and the switches constituting the circuit (for example, the resistance of the first cable 36 and the ON resistance of the switches of the detection / transfer section 32) are affected. Therefore, in order to properly remove the influence of the current, it is necessary to finely adjust the phase as well as the voltage of the AC power source in the calibration signal section 42. [

When the output of the ammeter in the current detection unit 41 becomes 0, the controller unit 45 stores the conditions (voltage and phase parameters) given to the AC power source at that time in the above-mentioned storage unit (RAM or the like) (Signal condition storage step).

The above operation is repeated while switching the switches to be turned on in the detection switching unit 32 from "1" to "2", "3", and "4". Accordingly, in a state in which the switch 1 is turned on in the signal supply switch section 31, an AC power supply (not shown) of the calibration signal section 42, which is necessary for eliminating the influence of the stray capacitance of each first cable 36, (Hereinafter, may be referred to as a calibration parameter) to be given to the voltage and phase.

However, the operation of acquiring the above-described calibration parameters may be performed simultaneously by a plurality of ammeters of the current detecting section 41. More specifically, the controller unit 45 outputs the output of the ammeter of the current detecting unit 41 connected to each switch in a state in which the switches (for example, all four) are turned on in the detection switching unit 32 The voltage and phase of the AC power supply of the corresponding calibration signal unit 42 are changed. Then, the controller unit 45 acquires the parameters of voltage and phase to be given to the respective AC power sources in order to make the output of each ammeter zero, and stores them in the storage unit. With this configuration, the time required for the calibration can be remarkably shortened.

When the calibration parameter is acquired for all of the ammeter (AC power source of the calibration signal section 42) of the current detecting section 41, the switch to be turned on in the signal supply switching section 31 is changed from "1" to "2" , &Quot; 3 ", and " 4 ", the same operation as described above is repeated. Accordingly, the calibration parameters to be given to the respective AC power sources of the calibration signal section 42 corresponding to the states of the four switches of the signal supply switching section 31 can be obtained.

In the present embodiment, calibration is performed by controlling the calibration signal unit 42 comprising an alternating voltage source of the ammeter common as described above. This analogue calibration is significantly superior to the (digital) calibration of only offsetting the numerical value from the measured value in terms of inspection accuracy. That is, the inspection by the sensor panel inspection apparatus 1 of this embodiment includes the measurement of the capacitance at the intersection of the first electrode 51 and the second electrode 52, and even if this capacitance is large Lt; / RTI > On the other hand, the influence of the above stray capacitance reaches about 100 pF. Therefore, in the digital calibration method of measuring the electrostatic capacity in the state that the stray capacitance is included and then calculating the offset capacitance, it is necessary to set the range of the ammeter of the current detection unit 41 to be 110 pF or more . On the other hand, according to the calibration method of the present embodiment, since the floating capacitance component has already been removed in the current measurement step, the capacitance can be measured without any problem if it is a range capable of measuring about 20 pF. Therefore, the minute capacitance can be measured with good precision by utilizing the high resolution measurement range of the ammeter.

The work required for the calibration is thus completed, and the inspection of the sensor panel 50 will be described next. 4 is a diagram showing a forming circuit when the sensor panel inspecting apparatus 1 inspects the positions 1 and 4 in the sensor panel 50. Fig. 5 is a diagram schematically showing a forming circuit. 6 is a table showing the relationship between the coordinates of the position to be inspected and the resistance value of the forming circuit. 7 is a vector diagram showing the relationship between the resistance value of the forming circuit and the phase of the current.

First, a method of inspection will be described with reference to FIG. The sensor panel inspection apparatus 1 according to the present embodiment can measure the capacitance at the intersection of the first electrode 51 and the second electrode 52 and measure the capacitance of the first electrode 51 and the second electrode 52. [ The uniformity of the shape of the first electrode 51 and the second electrode 52 is inspected on the basis of the resistance value of the electrode 52 (or a value varying with the resistance value). This corresponds to the fact that there is a growing demand for inspecting not only the conduction / short-circuit (conduction / short-circuit) of the electrode but also the thickness / thinness of the electrode.

This will be described in detail below. The first electrode 51 and the second electrode 52 disposed on the sensor panel 50 cross each other at M × N locations. As described above, since a gap is formed between the first electrode 51 and the second electrode 52, it can be considered that a capacitor is formed at the intersection portion.

In addition, the first electrode 51 and the second electrode 52 are formed of the ITO conductive film as described above, and this ITO corresponds to an excellent low resistivity (low resistivity) in relation to other transparent electrode materials And the like. Therefore, when the M × N number of intersection portions formed by the first electrode 51 and the second electrode 52 are considered, the intersection portion and the other intersection portions adjacent to the intersection portion in the x direction or the y direction It is conceivable that there is one resistance in each case. In the following description, each resistance may be referred to as a " unit resistance (unit resistance) ".

As described above, the first electrode 51 and the second electrode 52 have a pattern shape such that diamond patterns are repeatedly formed. However, the shape of the diamond is different from the shape of the first electrode 51 and the second electrode 52 52). The intervals in which the first electrodes 51 are arranged side by side and the intervals in which the second electrodes 52 are arranged side by side are equal to each other. Therefore, as long as the shape of the first electrode 51 and the second electrode 52 does not have an abnormality (for example, the thickness / thickness of the electrode) and the pattern is uniformly formed, It is a matter of course that the resistance value of the resistance regarded as being in the x direction or the y direction is constant regardless of whether the direction is the x direction or the y direction.

It is also conceivable that a resistance is present between the connection portion of the first electrode 51 and the first tab wiring portion 56 and the intersection closest to the connection portion. The shape of the first electrode 51 in the vicinity of this connection portion is set so that the resistance value of the resistance coincides with the resistance value of the unit resistance described above. This also applies to the second electrode 52.

As described above, the first electrode 51 and the second electrode 52 can be regarded as having a plurality of resistors (unit resistance) arranged with a constant resistance value as indicated by a chain line or a solid line in Fig. 4 have.

Here, a case of examining (1, 4) in the sensor coordinate system will be considered. In this case, the inspection unit 47 selects the first electrode 51 corresponding to the x-coordinate of the object to be inspected from the first electrodes 51 existing in each of the four electrodes, The second electrode 52 corresponding to the y coordinate of the object to be inspected is selected and the detection switch unit 32 and the signal supply switch unit 31 are controlled so that these electrodes are to be inspected. More specifically, the checking section 47 turns on the switch "1" in the detection switching section 32 and turns on the switch "4" in the signal supply switching section 31.

Accordingly, the ammeter of the signal portion 11 and the current detecting portion 41 is connected by an L-shaped circuit shown by a thick line in Fig. The circuit drawn by this bold line is connected to the first electrode 51 via the electrode intersecting portion indicated by (1, 4) from the connecting portion of the second electrode 52 and the second tab wiring portion 57 And reaches the connection portion of the first tab wiring portion 56.

The end of the second electrode 52 connected to the second tab wiring portion 57 is an end portion to which an AC signal from the signal portion 11 is supplied. . The end portion of the first electrode 51 connected to the first tab wiring portion 56 is the end portion of the current detecting portion 41 to which the ammeter is connected. .

As shown in Fig. 4, the L-shaped circuit corresponding to the coordinates (1, 4) includes five resistors connected in series and a capacitor formed at the intersection of the electrodes.

The inspection of the coordinates (x, y) is performed by flowing an AC signal to a circuit that bends in an L-shape in the coordinates. Hereinafter, this circuit may be referred to as a " forming circuit (forming circuit) ". This forming circuit corresponds to one-to-one correspondence with coordinates to be inspected. In the present embodiment, since there are M x N coordinates to be inspected, there are M x N number of forming circuits.

5 shows the state in which the above-described forming circuit of the sensor panel 50 is connected to the sensor panel inspecting apparatus 1 (in this figure, the calibration signal unit 42 is omitted) . The alternating current (i) flowing through this circuit is measured by the ammeter of the current detecting section 41.

Further, since the forming circuit varies in various ways according to the coordinates (x, y) of the position to be inspected, the resistance value of the forming circuit also changes. Taking this into consideration, the inspection section 47 previously calculates the resistance value of the forming circuit for any coordinates (x, y) and stores it in the RAM or the like. An example of the memory contents is shown in Fig. 6. According to this table, the resistance value of the forming circuit in the case of (1, 4) is five units of the unit resistance, and the resistance value of the forming circuit in case of (1, It can be seen that the resistance is two.

The inspection unit 47 calculates the phase of the output of the ammeter of the current detection unit 41 in the state where the AC signal is generated in the signal unit 11 to calculate the capacitance in the above forming circuit, The resistance value of the circuit (measurement value of the forming circuit) is obtained.

The AC signal generated by the signal unit 11 at this time is the same as that in the calibration described with reference to Fig. The AC power supply of the calibration signal section 42 is controlled by the calibration section 46 so as to generate an AC signal based on the calibration parameters stored in accordance with the state of the signal supply / Calibration signal generating step in the calibration method of the embodiment). For this reason, the precision of the capacitance obtained based on the output of the ammeter is good.

The capacitance thus obtained is compared with a predetermined determination reference value, and when it is out of the allowable range, it is determined that the capacitance is defective. Also, the acquired resistance value is compared with a predetermined determination reference value, and if the resistance value is out of the allowable range, it is determined that the shape of the electrodes 51 and 52 is defective with an error (determination step).

(1, 1), (1, 2), (M-1, N), (M, N) This is done for all coordinates while switching. However, the order of coordinates to be inspected is not limited to the above, but may be determined appropriately.

The determination method of good / defective products is not limited to the above. For example, instead of obtaining the resistance value of the forming circuit by phase detection, the output phase of the current detected by the ammeter as the forming circuit measurement value may be obtained. 7, when the capacitance C of the forming circuit is constant, the difference [theta] between the phase of the detected current and the voltage phase of the signal portion 11 increases as the resistance value of the forming circuit increases . Therefore, it may be determined whether or not the shapes of the electrodes 51 and 52 are abnormal based on this phase.

The relationship between the resistance values of a plurality of forming circuits (or values varying according to the resistance value) obtained by repeating the measurement while changing the coordinates of the position to be inspected is determined by determining whether or not the shape of the electrodes 51 and 52 is abnormal It may be based on.

For example, if the y coordinate is constant and the x coordinate is incremented by one, it is evident from Fig. 6 that the resistance value of the forming circuit increases by one unit resistance. With respect to the accuracy of the shape of the electrodes 51 and 52, the y coordinate is fixed as shown in coordinates (1, 1), (2, 1), (3, 1) It is also possible to determine whether the resistance value of the forming circuit is monotonically increasing (or whether the phase difference of the current is monotonously decreasing) when the x-coordinate is increased.

As described above, even when the x-coordinate is constant and the y-coordinate is increased by 1, the resistance value of the forming circuit increases by one unit resistance. Therefore, for example, when the x coordinate is fixed and the y coordinate is increased as shown in the coordinates (3, 1), (3, 2), (3, 3) The accuracy of the shape of the electrodes 51 and 52 can be determined by examining whether monotone is increasing (or whether the phase difference of the current is monotonously decreasing).

As clearly shown in FIG. 6, there is a relation that the resistance values of the forming circuits are the same in the coordinates (x, y) and (x + 1, y - 1). It is possible to determine whether the resistance value of the forming circuit (or the phase difference of the current) is the same for the coordinates (2, 4), (3, 3) 52 can be determined accurately.

As described above, the sensor panel inspection apparatus 1 according to the present embodiment has the sensor panel 50 as an object to be inspected. In the sensor panel 50, a plurality of first electrodes 51 And a plurality of second electrodes 52 arranged side by side cross each other when viewed in the thickness direction of the panel. The sensor panel inspecting apparatus 1 includes a first cable 36, a second cable 37, a signal portion 11, a signal supply / output portion 31, a current detecting portion 41, A changeover section 32, and a calibration signal section 42. A plurality of first cables 36 are provided and electrically connected to each of the first electrodes 51 at the time of inspection. A plurality of second cables 37 are provided and are electrically connected to each of the second electrodes 52 at the time of inspection. The signal unit 11 is an AC power supply for supplying an AC signal. The signal supply switching unit 31 can switch whether the AC signal of the signal portion 11 is supplied to or blocked from each of the plurality of second electrodes 52 via the second cable 37. [ The current detecting unit 41 includes a plurality of ammeters capable of detecting a current flowing through the first electrode 51. The detection switching unit 32 can switch whether to connect or disconnect each of the first electrodes 51 via the ammeter and the first cable 36. [ The calibration signal section 42 has a plurality of ac power supplies capable of supplying ac signals to the respective ammeter. Each of the AC power supplies of the calibration signal section 42 is configured to be able to change its voltage and phase.

Accordingly, it is possible to realize the calibration for eliminating the error caused by the stray capacitance of the first cable 36 or the like. The ammeter of the current detecting section 41 is controlled by the capacitance of the intersection portion of the first electrode 51 and the second electrode 52, It is possible to detect the current per se based on the current. Therefore, the minute capacitance of the sensor panel 50 can be measured with good precision by properly setting the range of the ammeter.

The sensor panel inspection apparatus 1 of the present embodiment further includes a calibration section 46 for controlling at least the signal section 11, the current detection section 41 and the calibration signal section 42. The calibration section 46 supplies the AC signal of the signal section 11 to at least one of the second cables 37 when the sensor panel 50 performs the separated calibration, The voltage and the phase of the AC power supply corresponding to the ammeter are adjusted in the calibration signal section 42 so that the output of the ammeter of the current detecting section 41 connected to the ammeter 41 is zero. Further, the calibration section 46 acquires and stores calibration parameters which are parameters of the voltage and phase given to the AC power source of the calibration signal section 42 when the output of the ammeter becomes zero. When the sensor panel 50 is inspected, the calibration section 46 generates an alternating current signal to the alternating current power source of the calibration signal section 42 on the basis of the stored calibration parameters.

Accordingly, the voltage and phase of the AC power source of the calibration signal part for removing the current due to the stray capacitance are automatically determined by the calibration part 46. [ Therefore, the labor of calibration can be reduced.

The calibration section 46 of the sensor panel inspecting apparatus 1 according to the present embodiment is provided with a signal supply change-over section (not shown) for changing the second cable 37 serving as a supply source of the signal of the signal section 11 31, the state of the signal supply / transfer section 31 and the acquired calibration parameter are stored in association with each other. The calibration section 46 generates an AC signal to the AC power source of the calibration signal section 42 on the basis of the calibration parameter stored corresponding to the state of the signal supply / .

Accordingly, even if the stray capacitance or the like changes depending on which of the second cables 37 is used as the signal supply source, the calibration can be performed correspondingly, so that the measurement accuracy can be maintained satisfactorily.

The calibration section 46 of the sensor panel inspecting apparatus 1 of the present embodiment is configured such that the plurality of first cables 36 and the ammeter of the current detecting section 41 corresponding thereto are simultaneously connected at the time of calibration, (32).

As a result, it is possible to concurrently perform the calibration work for a plurality of ammeters, so that the time required for the calibration can be effectively shortened.

The sensor panel inspection apparatus 1 of the present embodiment further includes an inspection section 47 for controlling at least the signal section 11, the current detection section 41, the signal supply changeover section 31 and the detection changeover section 32 do. The inspection unit 47 controls the signal supply / supply unit 31 so as to supply the AC signal of the signal unit 11 to one selected from the four second electrodes 52, and the four first electrodes 51 And the detection switch unit 32 to connect the selected one of the current detection units 41 and 41 to the corresponding ammeter of the current detection unit 41. [ The inspection unit 47 detects the intersection of the selected second electrode 52 and the selected first electrode 51 from the supply end which is the end of the selected second electrode 52 to which the AC signal of the signal portion 11 is supplied, The circuit which reaches the measuring end which is the end of the selected first electrode 51 to which the ammeter is connected is used as a forming circuit and the phase of the current flowing through the forming circuit The current phase difference, which is a difference, is measured as a formation circuit measurement value by detecting the current by an ammeter. Then, the inspection section 47 examines the abnormality of the first electrode 51 and the second electrode 52 on the basis of the obtained formation circuit measured value.

Thus, it can be judged whether or not the pattern shapes of the first electrode 51 and the second electrode 52 are uniformly formed by obtaining the forming circuit measured value (value varying according to the resistance value or the resistance value) . In addition, since the non-contact inspection without using a contactor or the like is realized, the tact time can be remarkably shortened.

In the sensor panel inspecting apparatus 1 according to the present embodiment, the inspecting unit 47 measures the forming circuit measured value and measures the measured values at the intersections of the selected first electrode 51 and the second electrode 52 The capacitance is measured.

Therefore, the inspection time can be further shortened because it is possible to perform the inspection using the inspection time efficiently.

In the sensor panel inspecting apparatus 1 of the present embodiment, the inspecting unit 47 has the first electrode 51 to be selected in common and the second electrode 52 to be selected as the length of the first electrode 51 (In other words, by changing the x-coordinate of the inspection position and sequentially changing the y-coordinate from one side to the other side), the circuit of the forming circuit It is possible to check the abnormality of the first electrode 51 and the second electrode 52 by judging whether the resistance or the current phase difference increases or decreases monotonously.

In addition, the inspection unit 47 has a common second electrode 52 and sequentially changes the selected first electrode 51 from one side in the longitudinal direction of the second electrode 52 to the other side By determining whether the circuit resistance or the current phase difference of the forming circuit is monotonicly increasing or decreasing (by fixing the y-coordinate of the inspection position and sequentially changing the x-coordinate from one side to the other side) And the second electrode 52 can be inspected.

It is possible to reasonably determine whether the pattern shapes of the first electrode 51 and the second electrode 52 are uniform.

The inspection unit 47 also includes a first forming circuit which is a forming circuit configured by selecting the first electrode 51 and the second electrode 52 (in other words, by selecting the inspection position (x, y)), One of the first electrodes 51 is moved in the direction away from the supply end of the second electrode 52 with respect to the first electrode 51 selected in the first forming circuit, (X + 1) in the direction closer to the measuring end of the first electrode 51 with respect to the second electrode 52 selected in the first forming circuit (in other words, The first electrode 51 and the second electrode 52 are determined by judging whether or not the circuit resistance or the current phase difference is the same between the first electrode 51 and the second electrode 52, May be examined.

This also makes it possible to reasonably determine whether or not the pattern shapes of the first electrode 51 and the second electrode 52 are uniform.

Although the preferred embodiments of the present invention have been described above, the above configuration can be changed as follows, for example.

The calibration method and the inspection method of the above embodiments are not limited to being performed in combination with each other. That is, the calibration method of the above-described embodiment may be combined with another inspection method, for example, an inspection method for measuring only the capacitance without measuring the resistance value of the forming circuit. Further, the inspection method of the above embodiment may be combined with another calibration method, for example, a digital calibration method of calculating a measurement value by offset calculation.

The object to be inspected is not limited to the sensor panel 50 of the touch panel device. That is, the present invention is widely applicable to a case where a plurality of first conductors arranged in parallel and a plurality of second conductors arranged in parallel are arranged so as to cross each other when viewed from the thickness direction of the panel, Can be applied.

1: Sensor panel inspection device (inspection device)
31: Signal supply switching part
32:
36: first cable (first wiring body)
37: second cable (second wiring body)
41: current detector
42: Calibration signal part
45: Controller unit (control unit)
46: Calibration part
47:
50: Sensor panel (object to be inspected)
51: first electrode (first conductor)
52: second electrode (second conductor)
56: first tap wiring portion
57: second tab wiring portion

Claims (11)

A plurality of first conductors (first conductors) arranged side by side and a plurality of second conductors arranged side by side crossing each other when viewed in the thickness direction of the panel, As a device,
A plurality of first wiring bodies (first wiring bodies) electrically connected to each of the first conductors at the time of inspection,
A plurality of second wiring bodies electrically connected to each of the second conductors at the time of inspection,
An alternating-current signal portion for supplying an alternating-current signal,
A signal supply switching section (signal supply switching section) capable of switching whether each of the plurality of second conductors is supplied with an AC signal of the signal section or blocked via the second wiring body,
A current detecting unit (current detecting unit) having a plurality of ammeters capable of detecting a current flowing through the first conductor,
A detection switching section which can switch whether to connect or disconnect each of the first conductors via the ammeter and the first wiring body,
A calibration signal unit having a plurality of ac power sources capable of supplying an ac signal to each of the ammeters,
Respectively,
Wherein each of the AC power supplies of the calibration signal section is configured to be capable of changing its voltage and phase.
The method according to claim 1,
And a calibration section for controlling at least the signal section, the current detection section, and the calibration signal section,
The calibration unit includes:
Wherein an output of the ammeter of the current detecting unit electrically connected to the first wiring body is 0 when the AC signal of the signal portion is supplied to at least one of the second wiring bodies at the time of calibrating the object to be inspected Adjusting the voltage and phase of the AC power supply corresponding to the ammeter in the calibration signal section,
A calibration parameter which is a parameter of a voltage and a phase given to the AC power supply of the calibration signal portion when the output of the ammeter becomes 0,
And generates an AC signal to the AC power source of the calibration signal section based on the stored calibration parameter when inspecting the object to be inspected.
3. The method of claim 2,
The calibration unit includes:
The state of the signal supply transfer unit and the calibration parameter are stored in association with each other while the state of the signal supply transfer unit is switched so as to change the second wiring member to be a supply source of the signal of the signal unit,
And generates an alternating current signal to the alternating current power source of the calibration signal section based on the calibration parameter stored corresponding to the state of the signal supply transfer section at the time of inspecting the object to be inspected.
The method according to claim 2 or 3,
Wherein the calibration unit controls the detection switching unit so that a plurality of the first wiring bodies and an ammeter of the current detecting unit corresponding thereto are simultaneously connected at the time of calibration.
5. The method according to any one of claims 1 to 4,
And an inspection section for controlling at least the signal section, the current detection section, the signal supply transfer section and the detection transfer section,
In inspecting the object to be inspected,
Controls the signal supply / reception unit to supply an AC signal of the signal portion to one of the plurality of second conductors,
Controls the detection switching unit to connect one selected from the plurality of first conductors and the ammeter of the corresponding current detecting unit,
In the first conductor selected via the intersection of the selected second conductor and the selected first conductor from the supply end which is the end of the selected second conductor to which the AC signal of the signal portion is supplied, (A forming circuit) is a circuit that reaches a measuring end (a measuring end) which is an end of a side to which an ammeter is connected, a circuit resistance which is a resistance of the forming circuit and a current And the phase difference is measured by detecting the current by the ammeter,
(Abnormality) of the first conductor and the second conductor on the basis of the obtained measurement value of the forming circuit.
6. The method of claim 5,
Wherein the inspection unit measures the forming circuit measurement value and measures the electrostatic capacitance at the intersection portion of the selected first conductor and the second conductor.
The method according to claim 5 or 6,
The inspection unit may be configured such that the selected first conductor is common and the selected second conductor is sequentially changed from one side (one side) to the other side (in the longitudinal direction) of the first conductor, Wherein the abnormality of the first conductor and the second conductor is checked by judging whether the circuit resistance or the current phase difference of the circuit increases or decreases monotonically.
8. The method according to any one of claims 5 to 7,
The checking unit may be configured to select the second conductor in common and change the selected first conductor from one side in the longitudinal direction of the second conductor to the other side in sequence so that the circuit resistance or the current phase difference Wherein the abnormality of the first conductor and the second conductor is checked by judging whether or not the first conductor and the second conductor are increased or decreased by monotonous.
9. The method according to any one of claims 5 to 8,
Wherein,
A first forming circuit that is the forming circuit configured by respectively selecting the first conductor and the second conductor;
The selection of the first conductor is moved one way in a direction away from the feed end of the second conductor with respect to the first conductor selected in the first forming circuit and the selection of the second conductor And a second forming circuit which is the forming circuit formed by moving one of the first conductor and the second conductor in a direction close to the measuring end of the first conductor with respect to the second conductor selected in the first forming circuit
Wherein the abnormality of the first conductor and the second conductor is checked by determining whether or not the circuit resistance or the current phase difference is the same between the first conductor and the second conductor.
An inspection apparatus for inspecting a plurality of first conductors arranged side by side and a plurality of second conductors arranged side by side so as to cross each other when viewed in the thickness direction of the panel,
A plurality of first wiring bodies electrically connected to the first conductors at the time of inspection,
A plurality of second wiring bodies electrically connected to each of the second conductors at the time of inspection,
An alternating-current source signal part for supplying an alternating-
A signal supply switching unit capable of switching, with respect to each of the plurality of second conductors, whether or not an AC signal of the signal portion is supplied or blocked via the second wiring body,
A current detector having a plurality of ammeters capable of detecting a current flowing in the first conductor;
A detection switching section capable of switching whether to connect or disconnect each of the first conductors via the ammeter and the first wiring body,
A calibration signal section having a plurality of ac power sources capable of supplying an ac signal to each of the ammeter
Respectively,
The calibration method of an inspection apparatus configured so that each of the AC power sources of the calibration signal portion is capable of changing its voltage and phase,
Wherein an AC signal of the signal portion is supplied to at least one of the second wiring bodies so that the output of the ammeter of the current detecting portion electrically connected to the first wiring body becomes 0 while the object to be inspected is separated, A signal condition adjusting step of adjusting the voltage and phase of the AC power supply corresponding to the ammeter in the calibration signal portion;
A signal condition storage step of acquiring and storing a calibration parameter which is a parameter of a voltage and a phase given to the AC power supply of the calibration signal part when the output of the ammeter becomes 0;
A calibration signal generating step of generating an AC signal to the AC power source of the calibration signal section on the basis of the stored calibration parameter at the time of inspecting the object to be inspected
The calibration method comprising the steps of:
An inspection apparatus for inspecting a plurality of first conductors arranged side by side and a plurality of second conductors arranged side by side so as to cross each other when viewed in the thickness direction of the panel,
A plurality of first wiring bodies electrically connected to the first conductors at the time of inspection,
A plurality of second wiring bodies electrically connected to each of the second conductors at the time of inspection,
An alternating-current source signal part for supplying an alternating-
A signal supply switching unit capable of switching, with respect to each of the plurality of second conductors, whether or not an AC signal of the signal portion is supplied or blocked via the second wiring body,
A current detector having a plurality of ammeters capable of detecting a current flowing in the first conductor;
A detection switching unit capable of switching whether to connect or disconnect each of the first conductors via the ammeter and the first wiring body,
A calibration signal section having a plurality of ac power sources capable of supplying an ac signal to each of the ammeter
Respectively,
Wherein each of the AC power supplies of the calibration signal section is configured to be able to change its voltage and phase,
Wherein the control unit controls the signal supply transfer unit so as to supply an AC signal of the signal portion to one selected from the plurality of second conductors and controls one of the plurality of first conductors and the ammeter of the corresponding current detection unit A switching step of controlling the detection /
Via the intersection of the selected second conductor and the selected first conductor, from the supply end which is the end of the selected second conductor to which the AC signal of the signal portion is supplied, Which is a resistance of the forming circuit and a current phase difference which is a difference in phase between a current flowing in the forming circuit and a current phase difference in a current flowing in the forming circuit, A measured value obtained by measuring the current by means of the ammeter,
And a determination step of determining the presence or absence of an abnormality in the first conductor and the second conductor based on the obtained value of the forming circuit
The method comprising the steps of:

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