KR20140070209A - Improved Surface Acoustic Wave Atomizer for Electrostatic Deposition, and Spray-Type Pattern Forming Apparatus and Substrate Coating Apparatus Having the Same - Google Patents

Abstract

Discloses are an improved surface acoustic wave atomizer for an electrostatic deposition, and a spray-type pattern forming apparatus and a substrate coating apparatus having the same. A surface acoustic wave atomizer according to an embodiment of the present invention comprises: an ink storage part for storing an ink solution; a surface acoustic wave generator for generating a surface acoustic wave by vibrating the ink solution stored in the ink storage part, so as to generate positively charged particles; a power supply connected to at least one electrode which is provided on the ink storage part; and an ink circulator connected to the ink storage part to supply and recover the ink solution to the ink storage part by a circulating method, wherein the ink solution stored in the ink storage part is maintained at a predetermined constant viscosity by the ink circulator.

Description

TECHNICAL FIELD [0001] The present invention relates to an improved electrostatic spraying surface acoustic wave spraying apparatus, and a spray type pattern forming apparatus and a substrate coating apparatus having the same.

The present invention relates to an improved electrostatic spray-wearing surface acoustic-wave spraying apparatus, and a spray-type pattern forming apparatus and a substrate-coating apparatus having the same.

More specifically, the present invention provides an ink solution used in an electrostatic spraying apparatus using a surface acoustic wave in a circulating manner, thereby maintaining a constant viscosity even when an ink solution for generating charged particles is continuously used, A plurality of patterns or thin films applied on the substrate are maintained in a constant viscosity to improve the quality of the final product and minimize the possibility of occurrence of defects, and a spray type pattern forming apparatus and a substrate coating apparatus .

Generally, in order to manufacture parts of FPD or FPD such as PDP panel, LCD panel, or organic EL panel such as OLED (organic light emitting device), a substrate or a work piece such as glass, A pattern such as R, G, or B pixels should be formed on the surface of the substrate. As one of such pattern forming apparatuses, in the prior art, a photoresist (PR) solution or a metal paste (hereinafter collectively referred to as "ink") is formed on a substrate To form a pattern.

(Hereinafter referred to as "surface acoustic wave spraying apparatus ") using a surface acoustic wave (SAW) as one of the spraying apparatuses for applying ink in the above- Is used.

More specifically, FIG. 1A is a schematic perspective view of a surface acoustic wave atomizing apparatus and a spraying pattern forming apparatus having the same according to the related art.

Referring to FIG. 1A, a spray pattern forming apparatus 100 of the prior art includes a surface acoustic wave spraying apparatus 111. The surface acoustic wave spraying device 111 is connected to a power supply 216 connected to one or more electrodes 118 provided on the ink reservoir 114. Further, the substrate 130 is grounded via the electrode plate 132 for supporting the substrate. When the voltage is applied by the power supply device 116, the surface acoustic wave atomizer 111 applies the surface acoustic wave generated by the surface acoustic wave generator 112 to the ink solution S supplied to the ink reservoir 114, And the generated charged particles are sprayed in a spraying manner through a plurality of pattern holes 122 formed in the mask 120 and electrostatically deposited on the substrate 130 to form a plurality of The pattern 124a can be formed.

1B is a schematic perspective view of a surface acoustic wave atomizing apparatus and a spraying pattern forming apparatus having the same according to another prior art.

Referring to FIG. 1B, in the spray pattern forming apparatus 100 according to another conventional technique, the mask 120 is not used unlike the case of FIG. 1A. Therefore, the surface acoustic wave spraying apparatus 111 vibrates the ink solution S provided to the ink reservoir 114 using the surface acoustic wave generated by the surface acoustic wave generator 112 to generate charged particles of positive ions , The generated charged particles are sprayed on the substrate 130 in a spray manner to form a thin film 124b (e.g., a protective cover) that is applied over the surface of the substrate 130. [

However, in the surface acoustic wave atomizing apparatus 111 and the spraying pattern forming apparatus 100 having the same in the prior art shown in Figs. 1A and 1B, the ink solution S provided in the ink reservoir 114 is formed on the surface As the charged particles are generated by the vibration generated by the elastic wave generating device 112, the viscosity of the ink solution S in the ink reservoir 114 is changed. Accordingly, when ten substrates 130 are used, for example, the plurality of patterns 124a or the entire surface of the thin film 124b coated on the ten substrates 130 are different in viscosity from each other, There is a problem that it is difficult to form a plurality of patterns 124a or thin films 124b having a single viscosity.

In the case where the plurality of patterns 124a or 124b formed on different substrates 130 have different viscosities, the amount of ink remaining on the substrate 130 after the curing process is different from each other, The thickness (i.e., height) of the pattern 124a or the thin film 124b is different from each other, so that it is difficult to achieve the uniformity of quality of the final product, and in the worst case, defects may occur.

1C is a schematic view showing a plan view and a front cross-sectional view of a floating type substrate coating apparatus according to the related art. Such a float-type substrate coating apparatus according to the prior art was filed by the present applicant as a Korean Patent Application No. 10-2009-0106473 entitled " Floating-type coating system and method "issued on Nov. 5, Korean Patent No. 10-1043051, filed on June 14, 2004, which is incorporated herein by reference.

1C, in a floating type substrate coating apparatus 140 according to the related art, a substrate 130 is vacuum-adsorbed on a suction pad 144 provided on a pair of sliders 198 of a transfer device 184 Mounted on the third floating unit 176c of the unloading region through the second floating unit 176b of the coating region from the first floating unit 176a of the loading region along a pair of linear motion guides 196 . When the substrate 130 passes over the second air floating unit 176b in the coating area, the nozzle device 178 applies the coating liquid.

However, in the floating type thin film coating system 140 according to the related art, as shown in FIG. 1C, in order to apply the coating liquid on the substrate 130, the nozzle apparatus 178 and the nozzle apparatus 178, (150) should be used. Accordingly, since the expensive nozzle apparatus 178 and the gantry 150 are used in the floating type thin film coating system 140 of the related art, there arises a problem that not only the entire structure is complicated but also the total manufacturing cost is increased.

Therefore, there is a need for a new method for solving the problems of the above-described conventional techniques.

Korean Patent No. 10-1043051

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems of the prior art, and it is an object of the present invention to provide an ink jet recording apparatus in which an ink solution used in an electrostatic spraying apparatus using surface acoustic waves is supplied in a circulating manner, A plurality of patterns or thin films applied by a spray method are maintained to maintain a constant viscosity, thereby improving the quality of the final product and minimizing the possibility of occurrence of defects, and a spray method A pattern forming apparatus, and a substrate coating apparatus.

An electrostatic spraying surface acoustic wave spraying apparatus according to a first aspect of the present invention includes: an ink storage portion for storing an ink solution; A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir; A power supply connected to one or more electrodes provided on the ink reservoir; And an ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir, wherein the ink solution in the ink reservoir is circulated by the ink circulation device, And the viscosity is maintained.

A spray pattern forming apparatus according to a second aspect of the present invention includes: a substrate; An electrode plate which supports the substrate and to which a grounded or negative voltage is applied; A mask provided below the substrate, the mask having a plurality of pattern holes; And a surface acoustic wave spraying device provided at a lower portion of the mask, wherein the surface acoustic wave spraying device comprises: an ink storage portion storing an ink solution; A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir; A power supply connected to one or more electrodes provided on the ink reservoir; And an ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir, wherein the ink solution in the ink reservoir is circulated by the ink circulation device, And the viscosity is maintained.

A spray pattern forming apparatus according to a third aspect of the present invention includes: a substrate; An electrode plate which supports the substrate and to which a grounded or negative voltage is applied; And a surface acoustic wave spraying device provided at a lower portion of the substrate (230), wherein the surface acoustic wave spraying device comprises: an ink storage portion for storing an ink solution; A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir; A power supply connected to one or more electrodes provided on the ink reservoir; And an ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir, wherein the ink solution in the ink reservoir is circulated by the ink circulation device, And the viscosity is maintained.

A substrate coating apparatus according to a fourth aspect of the present invention includes: a first floating unit for floating a substrate in a loading region; A surface acoustic wave spraying device provided at a lower portion of the coating area and spraying ink onto the lower surface of the substrate; A mask provided between the surface acoustic wave spraying device and the substrate on the coating area, the mask having a plurality of pattern holes; A third floating unit for floating the substrate in the unloading area; A transfer device for transferring the substrate from the first floating unit to the third floating unit via the coating area; And an electrode plate provided on the coating region and to which a ground state or a negative voltage is applied, wherein the surface acoustic wave spraying apparatus comprises: an ink storage portion storing an ink solution; A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir; A power supply connected to one or more electrodes provided on the ink reservoir; And an ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir, wherein the ink solution in the ink reservoir is circulated by the ink circulation device, And the viscosity is maintained.

A substrate coating apparatus according to a fifth aspect of the present invention includes: a first floating unit for floating a substrate in a loading region; A surface acoustic wave spraying device provided at a lower portion of the coating area and spraying ink onto the lower surface of the substrate; A third floating unit for floating the substrate in the unloading area; A transfer device for transferring the substrate from the first floating unit to the third floating unit via the coating area; And an electrode plate provided on the coating region and to which a ground state or a negative voltage is applied, wherein the surface acoustic wave spraying apparatus comprises: an ink storage portion storing an ink solution; A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir; A power supply connected to one or more electrodes provided on the ink reservoir; And an ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir, wherein the ink solution in the ink reservoir is circulated by the ink circulation device, And the viscosity is maintained.

According to a sixth aspect of the present invention, there is provided a substrate coating apparatus comprising: first and second supporting members for fixing and supporting a substrate; A surface acoustic wave spraying device provided at a lower portion of the substrate, the surface acoustic wave spraying device spraying ink onto a lower surface of the substrate; A driving device for moving the surface acoustic wave spraying device on a lower surface of the substrate; And an electrode plate provided on the upper surface of the substrate and to which a grounded state or a negative voltage is applied, wherein the surface acoustic wave spraying apparatus comprises: an ink storage portion for storing an ink solution; A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir; A power supply connected to one or more electrodes provided on the ink reservoir; And an ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir, wherein the ink solution in the ink reservoir is circulated by the ink circulation device, And the viscosity is maintained.

According to a seventh aspect of the present invention, there is provided a substrate coating apparatus comprising: an adsorption member for adsorbing and fixing an upper surface of a substrate on an upper surface of a substrate; A vacuum pumping device connected to the adsorption member; A surface acoustic wave spraying device provided at a lower portion of the substrate, the surface acoustic wave spraying device spraying ink onto a lower surface of the substrate; A driving device for moving the surface acoustic wave spraying device on a lower surface of the substrate; And an electrode plate provided on the upper surface of the substrate and to which a grounded state or a negative voltage is applied, wherein the surface acoustic wave spraying apparatus comprises: an ink storage portion for storing an ink solution; A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir; A power supply connected to one or more electrodes provided on the ink reservoir; And an ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir, wherein the ink solution in the ink reservoir is circulated by the ink circulation device, And the viscosity is maintained.

The following advantages are achieved by using the improved electrostatic spray-wearing surface acoustic-wave spraying apparatus, the spray-type pattern-forming apparatus and the substrate-coating apparatus having the same according to the present invention.

1. Since the ink solution is supplied in a circulating manner in the surface acoustic wave spraying apparatus, it is possible to maintain a constant viscosity of the ink solution even when the charged particles are sprayed by the spray method.

2. Since the viscosity of the ink-receiving layer is maintained constant, a plurality of patterns or thin films applied by the spraying method maintain a constant viscosity so that the thickness (i.e., height) of a plurality of patterns or thin films It is uniform.

3. The uniformity of the quality of the final product is achieved, thereby minimizing the likelihood of failure.

4. The surface acoustic wave spraying apparatus according to the present invention is applied to the substrate coating apparatus, so that the overall configuration of the substrate coating apparatus is simplified and the manufacturing cost is greatly reduced.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

1A is a schematic perspective view of a conventional surface acoustic wave atomizing apparatus and a spraying pattern forming apparatus having the same.
1B is a schematic perspective view of a surface acoustic wave atomizing apparatus and a spraying pattern forming apparatus having the same according to another conventional art.
1C is a schematic view showing a plan view and a front cross-sectional view of a floating type substrate coating apparatus according to the related art.
2A is a schematic perspective view of a surface acoustic wave spraying apparatus according to an embodiment of the present invention.
FIG. 2B is a schematic perspective view of a spray pattern forming apparatus according to a first embodiment having a surface acoustic wave spraying apparatus of the present invention. FIG.
2C is a schematic perspective view of a spray pattern forming apparatus according to a second embodiment having a surface acoustic wave spraying apparatus of the present invention.
FIG. 2D is a schematic view showing a top view and a front sectional view of the substrate coating apparatus according to the first embodiment of the present invention.
FIG. 2E is a plan view and a front sectional view of a substrate coating apparatus according to a second embodiment of the present invention.
FIG. 2F is a schematic view showing a top view and a front sectional view of a substrate coating apparatus according to a third embodiment of the present invention.
FIG. 2G is a schematic plan view and a front sectional view of a substrate coating apparatus according to a fourth embodiment of the present invention. FIG.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described with reference to embodiments and drawings of the present invention.

2A is a schematic perspective view of a surface acoustic wave spraying apparatus according to an embodiment of the present invention.

2A, a surface acoustic wave spraying apparatus 211 according to an embodiment of the present invention includes an ink storage 214 for storing an ink solution S; A surface acoustic wave generator 212 for generating a surface acoustic wave (SAW) to generate charged particles of positive ions by vibrating the ink solution S in the ink reservoir 214; A power supply 216 connected to one or more electrodes 218 provided on the ink reservoir 214; And an ink circulation device (208) connected to the ink reservoir (214) and circulatingly supplying and recovering the ink solution (S) to the ink reservoir (214), wherein the ink reservoir ) Is characterized in that the ink solution (S) in the ink circulation device (208) maintains a predetermined constant viscosity by the ink circulation device (208).

The ink circulation apparatus 208 described above includes an ink supply member 202 for supplying the ink solution S to the ink reservoir 214 via an ink supply line 202a; And an ink recovery member (204) for recovering the ink solution (S) from the ink reservoir (214) through an ink return line (204a), wherein the ink supply member (202) and the ink recovery member And a recycle member 206 for adjusting the viscosity of the ink solution S recovered by the ink recovery member 204 to the predetermined constant viscosity.

FIG. 2B is a schematic perspective view of a spray pattern forming apparatus according to a first embodiment of the present invention having a surface acoustic wave spraying apparatus.

Referring to FIG. 2B, the apparatus 200 for forming a spray pattern according to the first embodiment of the present invention includes a substrate 230; An electrode plate 232 which supports the substrate 230 and to which a grounded state or a negative voltage (or a negative voltage) is applied; A mask 220 provided below the substrate 230 and having a plurality of pattern holes 222; And a surface acoustic wave spraying device 211 provided at a lower portion of the mask 220. The surface acoustic wave spraying device 211 includes an ink storage 214 for storing the ink solution S; A surface acoustic wave generator 212 for generating a surface acoustic wave (SAW) to generate charged particles of positive ions by vibrating the ink solution S in the ink reservoir 214; A power supply 216 connected to one or more electrodes 218 provided on the ink reservoir 214; And an ink circulation device (208) connected to the ink reservoir (214) and circulatingly supplying and recovering the ink solution (S) to the ink reservoir (214), wherein the ink reservoir ) Is characterized in that the ink solution (S) in the ink circulation device (208) maintains a predetermined constant viscosity by the ink circulation device (208). Although the electrode plate 232 is illustrated as being in the grounded state in the embodiment of FIG. 2B, those skilled in the art will appreciate that the electrode plate 232 may be attached to the cathode of the power supply 216 or a separately provided power supply (not shown) (Or negative voltage) may be applied to the power source.

2C is a schematic perspective view of a spray pattern forming apparatus according to a second embodiment of the present invention, which includes a surface acoustic wave spraying apparatus.

Referring to FIG. 2C, an apparatus 200 for forming a spray pattern according to a second embodiment of the present invention includes a substrate 230; An electrode plate (232) supporting the substrate (230) and to which a grounded or negative voltage is applied; And a surface acoustic wave spraying device 211 provided at a lower portion of the substrate 230. The surface acoustic wave spraying device 211 includes an ink storage 214 for storing the ink solution S; A surface acoustic wave generator 212 for generating a surface acoustic wave (SAW) to generate charged particles of positive ions by vibrating the ink solution S in the ink reservoir 214; A power supply 216 connected to one or more electrodes 218 provided on the ink reservoir 214; And an ink circulation device (208) connected to the ink reservoir (214) and circulatingly supplying and recovering the ink solution (S) to the ink reservoir (214), wherein the ink reservoir ) Is characterized in that the ink solution (S) in the ink circulation device (208) maintains a predetermined constant viscosity by the ink circulation device (208).

Hereinafter, the detailed configuration and operation of the surface acoustic wave atomizing apparatus 211 and the spraying pattern forming apparatus 200 having the same according to the embodiment of the present invention will be described in detail.

Referring again to FIGS. 2A to 2C, the surface acoustic wave atomizing apparatus 211 according to the embodiment of the present invention includes an ink reservoir 214 for storing the ink solution S. FIG. The ink reservoir 214 is connected to the ink circulator 208. [ The ink circulation device 208 includes an ink supply member 202 connected to the ink reservoir 214 through an ink supply line 202a; And an ink recovery member 204 connected to the ink reservoir 214 through an ink return line 204a. The ink supply member 202 supplies the ink solution S to the ink reservoir 214 through the ink supply line 202a and the ink recovery member 204 is connected to the ink reservoir 204a through the ink return line 204a 214). ≪ / RTI > Accordingly, in the surface acoustic wave spraying apparatus 211, the ink solution S is supplied to the ink reservoir 214 in a circulating manner to maintain the flow state in the ink reservoir 214, ) Can be maintained at a predetermined constant viscosity,

The surface acoustic wave atomizing device 211 may optionally include a recycle member 206 connected to the ink supply member 202 and the ink recovery member 204, respectively. In this recycle member 206, the viscosity of the ink solution S recovered by the ink recovery member 204 can be adjusted to a predetermined constant viscosity. Then, the ink solution S may be supplied to the ink supply member 202 and supplied to the ink reservoir 214 through the ink supply line 202a. In this case, since the ink solution S is recycled, the waste of the ink solution S is reduced, and the overall cost can be reduced.

In the apparatus 200 for spray pattern formation according to the first and second embodiments of the present invention shown in Figs. 2B and 2C, when a voltage is applied to the power supply unit 216 of the surface acoustic wave spraying apparatus 211 The surface acoustic wave atomizer 211 vibrates the ink solution S of the ink reservoir 214 using surface acoustic waves generated by the surface acoustic wave generator 212 to generate charged particles of positive ions.

The charged particles are sprayed through a plurality of pattern holes 222 formed in the mask 220 and electrostatically deposited on the substrate 230 to form a plurality of patterns 224a (see the embodiment of FIG. 2B) Or sprayed onto the substrate 230 in a spray manner to form a fully coated thin film 224b (e.g., a protective cover) on the surface of the substrate 230 (see the embodiment of FIG. 2C). 2A, since the charged particles are generated in a state in which the ink solution S is maintained at the predetermined constant viscosity, the plurality of patterns 224a or the thin films 224b are formed on the substrate 230. In this case, Are formed with a uniform thickness (i.e., height) while maintaining a constant viscosity. Thus, uniformity of quality of the final product is achieved, thereby minimizing the likelihood of failure.

FIG. 2D is a schematic view showing a top view and a front sectional view of the substrate coating apparatus according to the first embodiment of the present invention.

Referring to FIG. 2D, the substrate coating apparatus 240 according to the first embodiment of the present invention includes a first floating unit 276a for lifting the substrate 230 in the loading region; A surface acoustic wave spraying device 211 provided below the coating area and spraying ink onto the lower surface of the substrate 230; A mask 220 provided between the surface acoustic wave spraying device 211 and the substrate 230 on the coating area, the mask 220 having a plurality of pattern holes 222; A third floating unit 276c for floating the substrate 230 in the unloading region; A transfer device (284) for transferring the substrate (230) from the first float unit (276a) to the third float unit (276c) through the coating area; And an electrode plate (232) provided on the coating region and to which a ground state or a negative voltage is applied, wherein the surface acoustic wave spraying apparatus (211) comprises: an ink storage portion (214) for storing the ink solution (S); A surface acoustic wave generator 212 for generating a surface acoustic wave (SAW) to generate charged particles of positive ions by vibrating the ink solution S in the ink reservoir 214; A power supply 216 connected to one or more electrodes 218 provided on the ink reservoir 214; And an ink circulation device (208) connected to the ink reservoir (214) and circulatingly supplying and recovering the ink solution (S) to the ink reservoir (214), wherein the ink reservoir ) Is characterized in that the ink solution (S) in the ink circulation device (208) maintains a predetermined constant viscosity by the ink circulation device (208).

FIG. 2E is a plan view and a front sectional view of a substrate coating apparatus according to a second embodiment of the present invention.

Referring to FIG. 2E, a substrate coating apparatus 240 according to a second embodiment of the present invention includes a first floating unit 276a for lifting a substrate 230 in a loading region; A surface acoustic wave spraying device 211 provided below the coating area and spraying ink onto the lower surface of the substrate 230; A third floating unit 276c for floating the substrate 230 in the unloading region; A transfer device (284) for transferring the substrate (230) from the first float unit (276a) to the third float unit (276c) through the coating area; And an electrode plate (232) provided on the coating region and to which a ground state or a negative voltage is applied, wherein the surface acoustic wave spraying apparatus (211) comprises: an ink storage portion (214) for storing the ink solution (S); A surface acoustic wave generator 212 for generating a surface acoustic wave (SAW) to generate charged particles of positive ions by vibrating the ink solution S in the ink reservoir 214; A power supply 216 connected to one or more electrodes 218 provided on the ink reservoir 214; And an ink circulation device (208) connected to the ink reservoir (214) and circulatingly supplying and recovering the ink solution (S) to the ink reservoir (214), wherein the ink reservoir ) Is characterized in that the ink solution (S) in the ink circulation device (208) maintains a predetermined constant viscosity by the ink circulation device (208).

The substrate coating apparatus 240 according to the first and second embodiments of the present invention shown in FIGS. 2D and 2E, respectively, can be transported by a separate transport apparatus (not shown) such as a robot arm And may further include a cleaning device 234 for cleaning the lower surface of the electrode plate 232.

The surface acoustic wave spraying apparatus 211 used in the substrate coating apparatus 240 according to the first and second embodiments of the present invention shown in Figs. 2D and 2E, respectively, And a recycle member 206 connected to the recovery member 204, respectively. In this recycle member 206, the viscosity of the ink solution S recovered by the ink recovery member 204 can be adjusted to a predetermined constant viscosity. Then, the ink solution S may be supplied to the ink supply member 202 and supplied to the ink reservoir 214 through the ink supply line 202a. In this case, since the ink solution S is recycled, the waste of the ink solution S is reduced, and the overall cost can be reduced.

Hereinafter, the specific configuration and operation of the substrate coating apparatus 240 according to the embodiment of the present invention will be described in detail.

Referring again to Figures 2d and 2e, in the substrate coating apparatus 240 according to the embodiment of the present invention, the substrate 230 is supported by a pair of sliders 298 of the transfer device 284, ), And is guided along a pair of linear motion guides 296 to the first floating unit 276a of the loading area through the coating area where the surface acoustic wave spraying device 211 is provided, And is transferred onto the third lifting unit 276c.

When a voltage is applied to the power source device 216 of the surface acoustic wave spraying device 211 when the substrate 230 passes over the surface acoustic wave spraying device 211 in the coating area, the surface acoustic wave spraying device 211 applies a surface acoustic wave The surface acoustic wave generated by the generating device 212 is used to vibrate the ink solution S in the ink reservoir 214 to generate charged particles of positive ions.

Charged particles are sprayed through a plurality of pattern holes 222 formed in the mask 220 and electrostatically deposited on the substrate 230 to form a plurality of patterns (not shown) (see the embodiment of FIG. 2D) (E. G., A protective cover) on the surface of the substrate 230 (see the embodiment of FIG. 2e), or sprayed onto the substrate 230 in a spray manner.

As described in detail above with reference to FIG. 2A, since the charged particles are generated in a state where the ink solution S is maintained at a predetermined constant viscosity, A plurality of patterns (not shown) or thin films (not shown) are formed with a uniform thickness (i.e., height) while maintaining a constant viscosity. Thus, uniformity of quality of the final product is achieved, thereby minimizing the likelihood of failure.

FIG. 2F is a schematic view showing a top view and a front sectional view of a substrate coating apparatus according to a third embodiment of the present invention.

Referring to FIG. 2F, the substrate coating apparatus 240 according to the third embodiment of the present invention includes first and second support members 280a and 280b for fixing and supporting the substrate 230; A surface acoustic wave spraying device 211 provided below the substrate 230 for spraying ink onto the lower surface of the substrate 230; A driving device (M) for moving the surface acoustic wave spraying device (211) on a lower surface of the substrate (230); And an electrode plate 232 provided on the upper surface of the substrate 230 and to which a grounded or negative voltage is applied. The surface acoustic wave spraying apparatus 211 includes an ink reservoir (214); A surface acoustic wave generator 212 for generating a surface acoustic wave (SAW) to generate charged particles of positive ions by vibrating the ink solution S in the ink reservoir 214; A power supply 216 connected to one or more electrodes 218 provided on the ink reservoir 214; And an ink circulation device (208) connected to the ink reservoir (214) and circulatingly supplying and recovering the ink solution (S) to the ink reservoir (214), wherein the ink reservoir ) Is characterized in that the ink solution (S) in the ink circulation device (208) maintains a predetermined constant viscosity by the ink circulation device (208). The electrode plate 232 is connected to the upper surface of the substrate 230 in cooperation with the surface acoustic wave spraying device 211 when the surface acoustic wave spraying device 211 is moved by the driving device M from the lower surface of the substrate 230. [ .

FIG. 2G is a schematic plan view and a front sectional view of a substrate coating apparatus according to a fourth embodiment of the present invention. FIG.

Referring to FIG. 2G, the substrate coating apparatus 240 according to the fourth embodiment of the present invention includes an adsorption member 282 for adsorbing and fixing the upper surface of the substrate 230 at the top of the substrate 230, A vacuum pumping device 284 connected to the adsorption member 282; A surface acoustic wave spraying device 211 provided below the substrate 230 for spraying ink onto the lower surface of the substrate 230; A driving device (M) for moving the surface acoustic wave spraying device (211) on a lower surface of the substrate (230); And an electrode plate (232) provided on the upper surface of the substrate (230) and to which a ground state or a negative voltage is applied, wherein the surface acoustic wave spraying device (211) A portion 214; A surface acoustic wave generator 212 for generating a surface acoustic wave (SAW) to generate charged particles of positive ions by vibrating the ink solution S in the ink reservoir 214; A power supply 216 connected to one or more electrodes 218 provided on the ink reservoir 214; And an ink circulation device (208) connected to the ink reservoir (214) and circulatingly supplying and recovering the ink solution (S) to the ink reservoir (214), wherein the ink reservoir ) Is characterized in that the ink solution (S) in the ink circulation device (208) maintains a predetermined constant viscosity by the ink circulation device (208). The electrode plate 232 is connected to the upper surface of the substrate 230 in cooperation with the surface acoustic wave spraying device 211 when the surface acoustic wave spraying device 211 is moved by the driving device M from the lower surface of the substrate 230. [ .

The substrate coating apparatus 240 according to the third and fourth embodiments of the present invention shown in FIGS. 2F and 2G is provided between the surface acoustic wave atomizing apparatus 211 and the substrate 230, And a mask 220 having a pattern hole 222 of a pattern shape. Accordingly, when the mask 220 is not used, the surface acoustic wave spraying apparatus 211 forms a thin film (not shown) (for example, a protective cover) by spraying ink on the lower surface of the substrate 230 When the mask 220 is used, the surface acoustic wave spraying device 211 forms a plurality of patterns (not shown) corresponding to the plurality of pattern holes 222 by spraying ink on the lower surface of the substrate 230 do.

In addition, the substrate coating apparatus 240 according to the third and fourth embodiments of the present invention shown in FIGS. 2F and 2G, respectively, can be transported by a separate transport apparatus (not shown) such as a robot arm And may further include a cleaning device 234 for cleaning the lower surface of the electrode plate 232.

In the substrate coating apparatus 240 according to the third and fourth embodiments of the present invention shown in FIGS. 2F and 2G described above, the substrate 230 is supported on the first and second support members 280a and 280b Except that the surface acoustic wave atomizing device 211 is moved by the driving device M on the lower surface of the substrate 230 while the ink is ejected in a state where the surface acoustic wave spraying device 211 is fixedly supported by the suction member 282, 2D and 2E in which the ink is ejected while the substrate 230 is being transported by the transfer device 284 to the floating state by the first and third floating units 276a and 276c with the apparatus 211 stopped, It should be noted that the present invention is substantially the same as the first and second embodiments of the present invention shown in the drawings. Therefore, detailed description of the specific configuration and operation of the substrate coating apparatus 240 according to the third and fourth embodiments of the present invention will be omitted.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

100, 200: pattern forming device 111, 211: surface acoustic wave spraying device
112, 212: Surface acoustic wave generating device 114, 214:
116, 216: power source device 118, 218: electrode 120, 220: mask
122, 222: pattern holes 124a, 224a: patterns 124b, 224b: thin film
130, 230: substrate 132, 232: electrode plate 140, 240:
144, 244: Adsorption pad 150: Gantry 184, 284:
196, 198: Linear motion guide 198, 198: Slider
176a, 276a, 176b, 176c, 276c: floating unit 178: nozzle unit
202: ink supply member 202a; Ink supply line 204:
204a: ink recovery duct 206: recycle member 208: ink circulation device
234: Cleaning device 280a280b: Supporting member 282:
284: Vacuum pumping device M: Drive device

Claims (22)

In the surface acoustic wave spraying apparatus,
An ink storage portion for storing the ink solution;
A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir;
A power supply connected to one or more electrodes provided on the ink reservoir; And
An ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir,
Lt; / RTI >
Wherein the ink solution in the ink reservoir maintains a predetermined constant viscosity by the ink circulating device
Surface acoustic wave spraying apparatus. The method according to claim 1,
The ink circulating device
An ink supply member for supplying the ink solution to the ink reservoir through an ink supply line; And
An ink recovery unit for recovering the ink solution from the ink reservoir through an ink recovery duct,
Wherein the surface acoustic wave spraying device comprises: 3. The method of claim 2,
Wherein the surface acoustic wave atomizing device further comprises a recycled member connected to the ink supply member and the ink recovery member and adapted to adjust the viscosity of the ink solution recovered by the ink recovery member to the predetermined constant viscosity, Spray device. In a spray pattern forming apparatus,
Board;
An electrode plate which supports the substrate and to which a grounded or negative voltage is applied;
A mask provided below the substrate, the mask having a plurality of pattern holes; And
And a surface acoustic wave spraying device
, ≪ / RTI &
The surface acoustic wave spraying apparatus
An ink storage portion for storing the ink solution;
A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir;
A power supply connected to one or more electrodes provided on the ink reservoir; And
An ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir,
Lt; / RTI >
Wherein the ink solution in the ink reservoir maintains a predetermined constant viscosity by the ink circulating device
Spray pattern forming apparatus. 5. The method of claim 4,
The ink circulating device
An ink supply member for supplying the ink solution to the ink reservoir through an ink supply line; And
An ink recovery unit for recovering the ink solution from the ink reservoir through an ink recovery duct,
Wherein the pattern forming apparatus is a spraying type pattern forming apparatus. 6. The method of claim 5,
Wherein the surface acoustic wave atomizing device further comprises a recycling member connected to the ink supply member and the ink recovery member and further comprising a recycle member for adjusting the viscosity of the ink solution recovered by the ink recovery member to the predetermined constant viscosity, . A spray pattern forming apparatus comprising:
Board;
An electrode plate which supports the substrate and to which a grounded or negative voltage is applied; And
A surface acoustic wave spraying device provided at a lower portion of the substrate,
, ≪ / RTI &
The surface acoustic wave spraying apparatus
An ink storage portion for storing the ink solution;
A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir;
A power supply connected to one or more electrodes provided on the ink reservoir; And
An ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir,
Lt; / RTI >
Wherein the ink solution in the ink reservoir maintains a predetermined constant viscosity by the ink circulating device
Spray pattern forming apparatus. 8. The method of claim 7,
The ink circulating device
An ink supply member for supplying the ink solution to the ink reservoir through an ink supply line; And
An ink recovery unit for recovering the ink solution from the ink reservoir through an ink recovery duct,
Wherein the pattern forming apparatus is a spraying type pattern forming apparatus. 9. The method of claim 8,
Wherein the surface acoustic wave atomizing device further comprises a recycling member connected to the ink supply member and the ink recovery member and further comprising a recycle member for adjusting the viscosity of the ink solution recovered by the ink recovery member to the predetermined constant viscosity, . In the substrate coating apparatus,
A first floating unit for floating the substrate in the loading area;
A surface acoustic wave spraying device provided at a lower portion of the coating area and spraying ink onto the lower surface of the substrate;
A mask provided between the surface acoustic wave spraying device and the substrate on the coating area, the mask having a plurality of pattern holes;
A third floating unit for floating the substrate in the unloading area;
A transfer device for transferring the substrate from the first floating unit to the third floating unit via the coating area; And
And an electrode plate provided on the coating region and to which a grounded or negative voltage is applied,
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The surface acoustic wave spraying apparatus
An ink storage portion for storing the ink solution;
A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir;
A power supply connected to one or more electrodes provided on the ink reservoir; And
An ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir,
Lt; / RTI >
Wherein the ink solution in the ink reservoir maintains a predetermined constant viscosity by the ink circulating device
Substrate coating apparatus. 11. The method of claim 10,
Wherein the substrate coating apparatus is transportably provided by a separate transfer device and further comprises a cleaning device for cleaning the lower surface of the electrode plate. The method according to claim 10 or 11,
The ink circulating device
An ink supply member for supplying the ink solution to the ink reservoir through an ink supply line; And
An ink recovery unit for recovering the ink solution from the ink reservoir through an ink recovery duct,
And a substrate coating apparatus. 13. The method of claim 12,
Wherein the surface acoustic wave atomizing device further comprises a recycle member connected to the ink supply member and the ink recovery member, respectively, for regulating the viscosity of the ink solution recovered by the ink recovery member to the predetermined constant viscosity, Device. In the substrate coating apparatus,
A first floating unit for floating the substrate in the loading area;
A surface acoustic wave spraying device provided at a lower portion of the coating area and spraying ink onto the lower surface of the substrate;
A third floating unit for floating the substrate in the unloading area;
A transfer device for transferring the substrate from the first floating unit to the third floating unit via the coating area; And
And an electrode plate provided on the coating region and to which a grounded or negative voltage is applied,
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The surface acoustic wave spraying apparatus
An ink storage portion for storing the ink solution;
A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir;
A power supply connected to one or more electrodes provided on the ink reservoir; And
An ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir,
Lt; / RTI >
Wherein the ink solution in the ink reservoir maintains a predetermined constant viscosity by the ink circulating device
Substrate coating apparatus. 15. The method of claim 14,
Wherein the substrate coating apparatus is transportably provided by a separate transfer device and further comprises a cleaning device for cleaning the lower surface of the electrode plate. 16. The method according to claim 14 or 15,
The ink circulating device
An ink supply member for supplying the ink solution to the ink reservoir through an ink supply line; And
An ink recovery unit for recovering the ink solution from the ink reservoir through an ink recovery duct,
And a substrate coating apparatus. 17. The method of claim 16,
Wherein the surface acoustic wave atomizing device further comprises a recycle member connected to the ink supply member and the ink recovery member, respectively, for regulating the viscosity of the ink solution recovered by the ink recovery member to the predetermined constant viscosity, Device. In the substrate coating apparatus,
First and second supporting members for fixing and supporting the substrate;
A surface acoustic wave spraying device provided at a lower portion of the substrate, the surface acoustic wave spraying device spraying ink onto a lower surface of the substrate;
A driving device for moving the surface acoustic wave spraying device on a lower surface of the substrate; And
And an electrode plate provided on the upper surface of the substrate,
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The surface acoustic wave spraying apparatus
An ink storage portion for storing the ink solution;
A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir;
A power supply connected to one or more electrodes provided on the ink reservoir; And
An ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir,
Lt; / RTI >
Wherein the ink solution in the ink reservoir maintains a predetermined constant viscosity by the ink circulating device
Substrate coating apparatus. In the substrate coating apparatus,
An adsorption member for adsorbing and fixing the upper surface of the substrate at the top of the substrate;
A vacuum pumping device connected to the adsorption member;
A surface acoustic wave spraying device provided at a lower portion of the substrate, the surface acoustic wave spraying device spraying ink onto a lower surface of the substrate;
A driving device for moving the surface acoustic wave spraying device on a lower surface of the substrate; And
And an electrode plate provided on the upper surface of the substrate,
≪ / RTI >
The surface acoustic wave spraying apparatus
An ink storage portion for storing the ink solution;
A surface acoustic wave generator generating a surface acoustic wave to generate charged particles of positive ions by vibrating the ink solution in the ink reservoir;
A power supply connected to one or more electrodes provided on the ink reservoir; And
An ink circulation device connected to the ink reservoir and circulatingly supplying and recovering the ink solution to the ink reservoir,
Lt; / RTI >
Wherein the ink solution in the ink reservoir maintains a predetermined constant viscosity by the ink circulating device
Substrate coating apparatus. 20. The method according to claim 18 or 19,
Wherein the electrode plate moves on the upper surface of the substrate in cooperation with the surface acoustic wave spraying device when the surface acoustic wave spraying device moves on the lower surface of the substrate by the driving device. 20. The method according to claim 18 or 19,
Wherein the substrate coating apparatus further comprises a mask provided between the surface acoustic wave atomizing apparatus and the substrate, the mask including a plurality of pattern holes. 20. The method according to claim 18 or 19,
Wherein the substrate coating apparatus is transportably provided by a separate transfer device and further comprises a cleaning device for cleaning the lower surface of the electrode plate.

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