KR20130143503A - Composite container with an inner reservoir, and dispensing device - Google Patents

Abstract

Provided are a composite container with an inner reservoir which can reduce remaining rate and deviation thereof in comparison with an existing composite container and a distribution device distributing a stored fluid by including the composite container with the inner reservoir. The composite container (100) with the inner reservoir stores the inner reservoir (110) of a resin material in a steel container. An outlet and inlet unit (111) of the inner reservoir is located on the center of the composite container with the inner reservoir, and the inner reservoir includes a concave unit (113) for a remaining fluid which collects and stores the remaining fluid under the outlet and inlet unit on a central axis.

Description

COMPOSITE CONTAINER WITH AN INNER RESERVOIR, AND DISPENSING DEVICE}

The present invention relates to an inner bag composite container in which an inner container made of resin is provided in a steel outer container, and a dispensing device for dispensing a storage fluid provided with the inner bag composite container.

For example, in a forced container for storing food and drugs, a resin inner container for storing the food and drugs is used to prevent corrosion of the food and drugs due to direct contact with the inner surface of the forced container. The form of the inner side bag composite container 10 shown in FIG. 10 accommodated in the forced outer side container is employ | adopted.

In the inner bag composite container 10, the inner container 1 has a main body portion 1a made of polyethylene and formed in a bag shape, and an entrance 1b for filling in and out of the container body is integrally formed with the container main body portion. Formed. Moreover, the outer peripheral surface of the entrance 1b is shape | molded by the male screw shape.

On the other hand, in the outer container 2 of the inner bag composite container 10, the body 2a which consists of a cylindrical steel plate, and the fingerboard 2b which consists of steel plates are wound, and an accommodating part is formed.

Then, the body 2a and the top plate 2c are wound in a state where the doorway 1b is protruded from the opening formed in the top plate 2c made of steel sheet after the inner container 1 is loaded in the housing portion. The inner bag composite container 10 which accommodated the resin inner container 1 in the steel outer container 2 is produced. After the filling is injected into the inner bag composite container 10, the cap 3 is screwed to the doorway 1b protruding from the top plate 2c to seal the filling.

Examples of the chemical liquid include, for example, CMP slurry, photoresist, developer, etching solution, cleaning liquid, etc. in the semiconductor field, and photoresist, color resist, color filter material and the like in the liquid crystal field. In addition, some of these chemical liquids require light shielding, and the use of the inner bag composite container 10 is also advantageous in this respect because the forced outer container 2 has light shielding properties.

When handling chemical liquids in the semiconductor field, etc., high cleanliness is required not only for the inner container 1 but also for the inner bag composite container 10. In addition, high cleanliness is also required for discharging the chemical liquid, and a method of discharging the cap 3 by using a dispenser having a discharging tube attached to the cap 3 is selected. This includes a pump-up system for sucking up chemicals with a pump or a pressurization system for extruding chemicals by injecting and pressurizing nitrogen gas or the like into a can.

Japanese Patent Publication No. 2007-45429

As the inner bag composite container for chemical liquids used in the semiconductor field as described above, a so-called fail-can, which has a content of 20 liters, is widely used. In addition, as described above, the chemical liquid used in the semiconductor field due to the high cleanliness requirement is discharged in a pressurized manner by using a dispenser. However, when the amount of remaining liquid in the pail can decrease, the chemical liquid is discharged together with the pressurized gas. Occurs. Since the chemical liquid containing such bubbles causes defects in the final product, the discharge of the chemical liquid is stopped before foam inclusion occurs. Of course, it is not necessarily permitted to remove the dispenser and discharge the remaining liquid from the entrance and exit of the inner bag composite container, for example, from the high cleanliness request.

On the other hand, the chemical liquid used in the semiconductor field etc. is very expensive so that it may be said to be 10,000 yen / liter, for example, and it is necessary to reduce the residual amount in an inner bag composite container as much as possible from a cost point of view.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and in the inner bag composite container in which an inner container made of a resin is accommodated in an outer container, the remaining amount of liquid can be reduced and the variation in the amount can be reduced. It is an object of the present invention to provide an inner bag composite container, and further to provide a dispensing device having such an inner bag composite container for dispensing the containing fluid.

In order to achieve the above object, the present invention is configured as follows.

In other words, the inner bag composite container according to the first embodiment of the present invention is a bag-shaped bag for storing a fluid, and is formed by winding a finger plate into a resin inner container and a cylindrical body, and forming the inner bag. An outer bag formed of a forcible container for storing a container, wherein the top plate having an opening through which the entrance and exit portion protrudes is provided with an inner bag compound container having an outer container that is attached to the fuselage against the fingerboard, wherein the inner container is placed in the inner container. The opening and the opening in the outer container are located on a central axis passing through the center of the diameter of the inner bag composite container, and the inner container is the bottom surface of the inner container just below the entrance part on the central axis. Concave portion for protruding from the outside to be formed to collect and store the remaining liquid And it characterized in that it has.

Moreover, the distribution apparatus in 2nd Embodiment of this invention is a tube which can be attached to the inner side bag composite container in the said 1st Embodiment, and the entrance part of the inner side container which protruded from the opening of an outer side container, The front end is A discharge tube for guiding the fluid stored in the inner container out of the container, which is located in the recess of the inner container and is guided to the outside of the container; And a gas supply mechanism for supplying gas into the container and discharging the gas out of the container through the discharge tube.

(Effects of the Invention)

According to the inner bag composite container in 1st Embodiment of this invention, the entrance / exit part of the fluid to accommodate is arrange | positioned on the central axis of an inner container, and also the recessed part for balance on the central axis just under the said entrance part in the bottom face of an inner container. Formed wealth. Moreover, the dispensing apparatus in 2nd Embodiment of this invention is equipped with such an inner bag composite container. Therefore, when the discharge tube is attached to the inlet and outlet of the inner container to discharge the fluid from the inner container, the residual liquid near the end of discharge is collected in the recess for the remaining liquid, and the container is discharged through the discharge tube from the recess. It is discharged to the outside. Therefore, since the remaining amount of liquid in the inner container depends on the volume of the recessed portion for remaining liquid, the amount of remaining liquid can be reduced as compared with the conventional one, and the variation in the remaining amount of liquid can also be reduced. In addition, in the inner container, the entrance and the recess for the remaining liquid are located on the center axis of the container, so that the distal end of the discharge tube attached to the entrance and exit can always be disposed in the recess for the remaining liquid. This viscosity contributes to the reduction of the variation in the residual amount.

1: A is a figure which shows the inner bag composite container in 1st Embodiment of this invention, and is a figure which shows the right half part in cross section.
It is a top view of the inner side bag composite container shown in FIG. 1A.
FIG. 1C is an enlarged view of the fluid inlet / outlet part (part A in FIG. 1A) in the inner bag composite container shown in FIG. 1A.
It is a figure which shows schematic structure of the dispensing apparatus in 2nd Embodiment of this invention provided with the inside bag composite container in 1st Embodiment of this invention.
It is a figure which shows the inner bag composite container at the time of pressurizing the inside of a container in the distribution apparatus shown in FIG.
It is a figure which shows an example of the length adjustment part which may be provided in the discharge tube with which the distribution apparatus shown in FIG. 2 is equipped.
5 is a view for explaining the operation of the length adjustment unit shown in FIG.
It is a graph which shows the change of each displacement amount of the fingerboard and a top plate when the inner bag composite container shown in FIG. 1A is pressurized.
FIG. 7: is a modified example of the inner bag composite container shown in FIG. 1A, and is a figure which shows the form which attached a handing.
It is a top view of the inside bag composite container top plate in the modification of the inside bag composite container shown in FIG. 1A.
It is sectional drawing of the inner side bag composite container shown in FIG. 8A.
It is a figure which shows the inner side container in the inner side bag composite container shown in FIG. 8A, (a) is a top view of an inner side container, (b) shows sectional drawing, respectively.
It is a figure explaining the state of a discharge tube in the state before pressurization which attached the distribution apparatus shown in FIG. 2 to the inner bag composite container shown in FIG. 8A.
It is a figure explaining the state of a discharge tube in the state in the pressurization which attached the distribution apparatus shown in FIG. 2 to the inner bag composite container shown in FIG. 8A.
10 is a view showing a conventional inner bag composite container.

EMBODIMENT OF THE INVENTION The inner bag composite container which is 1st Embodiment of this invention, and the dispensing apparatus in 2nd Embodiment provided with this inner bag composite container are demonstrated below, referring drawings. In addition, in each figure, the same code | symbol is attached | subjected about the same or same component part. In addition, although each of the following embodiments employs the "fail can" of about 18 or about 20 liters as an outer container as an example, it is not limited to this. That is, the forced container which accommodates the inner container whose inner volume is about 10-60 liters, for example, about 10, 40, 60 liters can be used as an outer container.

First embodiment:

1A, the inner bag composite container 100 in this embodiment is shown. This inner bag composite container 100 includes an inner container 110 and an outer container 120 as a basic configuration. Here, the outer container 120 is formed of a fail can as an example of steel which is formed by winding a finger plate 122 on a cylindrical body 121 using a can steel material. This fail can is a fail can based on "forced pale" prescribed | regulated to JISZ1620 (1995), The content is about 20 liters. Here, description of "conformity" is based on the following reason. That is, in a normal fail can, as shown in FIG. 10, the entrance and exit for a thing is arrange | positioned at the peripheral edge part isolate | separated from the center of a top plate. On the other hand, the top plate 123 of the outer container 120 has the center of the diameter of the inner bag composite container 100 as shown in Figs. 1A and 1B (the both drawings may be collectively described as Fig. 1). It has an opening 123a on the central axis 101 that passes, that is, at the center of the top plate. In this respect, the outer container 120 is usually different from the fail can. In addition, the opening 123a is an opening for protruding an entrance and exit portion of the inner container 110 as described below.

Moreover, as shown in FIG. 1A, the ear 124a for the handle 124 is welded to two mutually opposing locations of the radial position in the outer surface of the fuselage 121, respectively. By installing the handle 124 in this way it is easy to transport the inner bag composite container 100. Although FIG. 1A shows the type which extended "knobs" to both the ear 124a as the handle 124, as shown in FIG. 7, it is respectively annular to two places of the diameter position of the fuselage 121, for example, It may be a "hand ring" type with a magnetic handle.

In addition, although the outer container 120 shows the form of the "taper fail" in which the outer body 120 was tapered, the outer container 120 may be the "straight fail" whose body 121 is straight. In addition, although the form of the "band type" which can be attached or detached to the body 121 with respect to the top plate 123 is shown in FIG. 1, it is not limited to this, The top plate is fixed to the detachable "lug type" or the body 121 similarly. Any form of the "winding body type" can be adopted. In addition, each of these fail can forms is prescribed | regulated to the said JIS. In addition, of course, a fail can formed by appropriately combining these forms can also be used.

The inner container 110 is a bag-shaped container for storing a fluid, and is a resin container having an entrance and exit portion 111 of a fluid. Here, the doorway part 111 is arrange | positioned on the central axis 101, ie, in the center of the top surface 114 of the inner container 110, corresponding to the opening 123a of the top plate 123 as mentioned above. In addition, the outer periphery of the entrance and exit part 111 forms the male screw.

In addition, the inner container 110 has a recessed portion 113 for projecting outward from the bottom surface 112 of the inner container 110 on the central axis 101 just below the doorway 111 as shown in FIG. 1A. Has The remaining recess 113 is a cup-shaped recess that collects and stores the remaining liquid near the end of discharging of the fluid contained in the inner container 110. In the present embodiment, the remaining recess 113 is, for example, a diameter of about 50 to about 60 mm and a depth of about 15 mm, but the shape and size thereof are not limited thereto. You can decide accordingly. In addition, in this embodiment, it aims at less than 100 GPa, for example, about 50 GPa-30 GPa as the volume of the recessed part 113 for residual liquids.

In addition, the shape, size, and target residual amount in the recessed portion 113 for remaining liquids described above are applicable regardless of the inner volume of the inner container 110.

The inner container 110 having such a configuration is made of high-density polyethylene resin and blow-molded into a bag, the capacity of which is about 20 liters, and the recess for the remaining portion of the entrance and exit portion 111 and the bottom surface 112 of the top surface 114. 113 is also formed integrally with the main body. In addition, the doorway part 111 may be separately molded and attached to the main body by fusion or the like, instead of integrally molding with the main body.

The molded inner container 110 is accommodated in the outer container 120, and protrudes the entrance and exit portion 111 of the inner container 110 to the outside of the container through the opening 123a of the top plate 123 of the outer container 120. Let's do it. In addition, the stop ring may be screwed together using a male screw of the entrance portion 111 or a separately formed engagement portion so that the protruding entrance portion 111 is not recessed into the container. In addition, a cap 118 for sealing the inner container 110 is screwed into the male screw of the doorway part 111.

On the other hand, since the inner container 110 has a recess 113 for protruding from the bottom 112, a gap 102 is formed between the bottom 112 and the fingerboard 122 as shown in FIG. 1A. . Therefore, when the fluid is accommodated in the inner container 110, a support structure for supporting the bottom face 112 from the load of the fluid to maintain the shape and function of the remaining concave portion 113 can be adopted. As this support structure, the support member 103 can be provided in the clearance gap 102, for example, ring shape, and having the height corresponded to the recessed part 113 for residual liquids. Alternatively, the leg may be integrally formed with the bottom surface 112, which protrudes into the gap 102 from the bottom surface 112 of the inner container 110, instead of providing the supporting member 103 separately. In other words, the supporting structure may be any embodiment which prevents the shape and function of the remaining recesses 113 from being damaged by the load of the stored fluid.

It is also possible to employ the following modifications to the inner bag composite container 100 described above. The inner bag composite container according to this modification will be described with reference to Figs. 8A to 8C.

The basic structure in the inner side bag composite container 105 shown to FIG. 8A-FIG. 8C is the same as the structure of the inner side bag composite container 100 mentioned above, The inner side container 110-2 and the outer side container 120-2 It is provided. Here, the inner container 110-2 corresponds to the inner container 110 of the inner bag composite container 100, and the outer container 120-2 is attached to the outer container 120 of the inner bag composite container 100. It is considerable. Hereinafter, only the upper part with the inner bag composite container 100 in the inner bag composite container 105 will be described, and the same or similar components described above can be applied, and the descriptions thereof are omitted here. do.

The difference in the outer side container 120-2 is in the top plate 123-2 corresponding to the top plate 123 mentioned above, and this top plate 123-2 is a handle (as shown to FIG. 8A and FIG. 8B). 125 and engagement portion 126.

The handle 125 is a substantially annular, for example, a U-shaped handle, and has an outer surface 123c of the top plate 123-2 with an opening 123a therebetween at a radial position of the top plate 123-2. Two are attached to.

In this modified example, the engaging portion 126 is a substantially square shape in which the outer surface 123c is recessed around the opening 123a, and is, for example, a concave portion having a depth of about 13 mm. The opening 123a is located in the bottom center part of this engaging part 126, and the granular wall 126a is formed from the bottom face of the engaging part 126 to the outer surface 123c of the top plate 123-2.

The engaging portion 126 is engaged with the rotation preventing portion 115 of the inner container 110-2 described below to prevent rotation of the inner container 110-2 in the outer container 120-2. In addition, it is possible to act as a reinforcing part for preventing deformation of the top plate 123-2 by simply forming the engaging portion 126 as compared with the flat top plate 123.

In addition, the shape, the size, and the installation position of the engaging part 126 mentioned above are an example, and the above-mentioned is not limited. In other words, the engaging portion 126 may be any shape that can prevent rotation of the inner container 110-2 in the outer container 120-2.

Next, the difference between the inner container 110-2 is that the top surface 114-2 of the inner container 110-2 has the rotation preventing portion 115.

As shown in FIG. 8C, the anti-rotation part 115 is an example formed on the top surface 114-2 of the inner container 110-2 in the radial direction of the inner container 110-2 and has a depth of 10 to 10. It is a recessed groove of about 12 mm. At the bottom of the concave rotation preventing portion 115, an entrance and exit portion 111 of the inner container 110-2 is formed.

The anti-rotation part 115 fits into the engaging portion 126 of the top plate 123-2 described above, and cooperates with the engaging portion 126 to form the inner container 110-2 in the outer container 120-2. Is prevented from rotating about the central axis 101. In detail, the rotation of the inner container 110-2 is prevented by the side wall 115a of the groove | channel rotation prevention part 115 and the granular wall 126a of the engagement part 126 contacting. In addition, the rotation of the inner container 110-2 in the outer container 120-2 occurs when the cap 118 is screwed to the doorway 111 of the inner container 110-2, for example. There is a possibility.

The shape, the size, and the installation position of the anti-rotation part 115 are examples, and are not limited to the above. That is, the rotation prevention part 115 should just have a shape corresponding to the shape of the engagement part 126 in the top plate 123-2. For example, the engaging portion 126 and the rotation preventing portion 115 may both engage with each other in a concave or convex shape, and prevent rotation when the engaging portion 126 is concave or convex, for example. The portion 115 may be a convex shape or a concave shape formed on a part of the top surface of the inner container so as to be engaged with the engaging portion 126 to prevent rotation of the inner container.

Moreover, also in the inner side container 110-2, the bottom face 112 of the inner side container 110 has the recessed part 113-2 corresponding to the recessed part 113 for balance | restoration mentioned above. However, this recessed recess 113-2 has an inclined granular portion 113b as shown in FIG. 8C as compared with the recessed recess 113. This is for shaping reasons of the inner container 110-2. In addition, the content in the recessed recess 113-2 is set to be substantially the same as in the recessed recess 113.

Also in the inner bag composite container 105 described above, the remaining amount of the remaining liquid in the inner container 110-2 is reduced as in the case of the inner bag composite container 100 in that it has the recessed portion 113-2 for the balance. In addition, the variation of the remaining amount can be reduced. In addition, in the inner bag composite container 105, the engagement portion 126 and the rotation preventing portion 115 are formed to prevent rotation of the inner container 110-2 in the outer container 120-2.

Second embodiment:

Next, a dispensing device for discharging a fluid such as a chemical liquid which is provided with the inner bag composite container 100 configured as described above, and is stored from the inner bag composite container 100 will be described.

As shown in FIG. 2, the dispensing apparatus 200 of this embodiment is a pressurization type dispenser mechanism, and is divided into the gas supply which supplies the cylindrical plug main body 201 and pressurized inert gas into the inner container 110 in large part. Device 202 and discharge tube 250. In addition, the plug main body 201 and the gas supply apparatus 202 correspond to an example of a gas supply mechanism.

The plug body 201 is, for example, a resin plug which is attached to the doorway part 111 after removing the cap 118 described above, and is sealed with a coupling ring 201r, a plug cell 201s, and a seal. Ring 2012. The coupling ring 201r is a cylindrical member, one end of which is opened in a circular shape, and on the inner circumferential surface of the opening, a female screw is engaged with the male screw for the cap formed in the doorway 111. Therefore, the coupling ring 201r of the plug body 201 can be screwed to the male screw of the entrance and exit part 111.

The other end of the coupling ring 201r is also circularly opened, and the plug cell 201s is inserted into the opening so as to be rotatable with respect to the coupling ring 201r. That is, the plug cell 201s is a disc-shaped member having a flange, and is inserted from an opening on one end side of the coupling ring 201r so that the flange contacts the coupling ring 201r so that the coupling ring 201r can be used. It is penetrated into the opening of the other end. In addition, the sealing ring 2012 is attached to the coupling ring 201r by screwing the coupling ring 201r to the screw of the doorway 111 as described above. And the flange of the plug cell 201s is sandwiched between the sealing ring 2012 and the coupling ring 201r. As a result, the sealing ring 2012 also seals the ventilation at the boundary between the coupling ring 201r and the plug cell 201s.

In the plug cell 201s, a first joint 203 made of synthetic resin detachably fixing the other end of the discharge tube 250 and a second joint 204 for connecting the gas supply device 202 are screwed. Is inserted.

The first joint 203 can use a commercially available straight type holder, and can hold the discharge tube 250 slidably along its axial direction with respect to the plug body 201 and can also be fixed by tightening a nut. have.

Here, the discharge tube 250 is made of flexible and chemically resistant resin, for example, is formed of Teflon (registered trademark), and the liquid intake port 251 located at the tip of one end thereof is the recess 113 for the remaining liquid. It is long enough to be located inside. As described above, since the discharge tube 250 is slidable using the first joint 203, the length can be adjusted so that the suction port 251 is located near the bottom of the recess 113 for the remaining liquid.

As described above, in the inner bag composite container 100, the coupling ring 201r is the entrance part 111 in that the entrance part 111 and the remaining concave part 113 are disposed on the same central axis 101. When the screw is coupled to the male screw of the), the discharge tube 250 is just lowered in a straight line, the liquid inlet 251 is disposed in the recess 113 for the remaining liquid. In this way, according to the inner bag composite container 100, the suction port 251 of the discharge tube 250 can be easily and reliably disposed in the recess 113 for the remaining liquid. In addition, since the recessed portion 113 for deformation does not deform, its volume is a constant value designed. Therefore, the remaining amount of liquid in the inner container 110 can be reduced as compared with the related art, and the variation of the remaining amount of liquid can also be reduced.

The second joint 204 is an L-shaped (elbow type) synthetic resin joint connected to the opening 2013 in the coupling ring 201r of the plug body 201, and uses a commercially available elbow quick joint. Can be used.

By connecting the hose connected to the gas supply device 202 to the second joint 204, the gas supply device 202 can supply an inert gas pressurized into the inner container 110, for example, nitrogen gas.

By using the distribution apparatus 200 comprised as mentioned above, the inside of the inner container 110 is pressurized by the gas supply apparatus 202 to the range of about 100 Kpa-about 150 Kpa, for example, and the inner container 110 is carried out. Fluid, such as a chemical liquid, stored in the c) can be extruded and discharged out of the container through the liquid discharge tube 250. Moreover, the range of about 100 Kpa-about 150 Kpa is corresponded to the pressurization range for fluid discharge.

As described above, the inner surface of the inner container 110 is pressurized to discharge the fluid so that the bottom surface 112 and the top surface 114 of the inner container 110 expand outward along the direction of the central axis 101 as shown in FIG. 3. do. Thereby, the fingerboard 122 and the top plate 123 of the outer container 120 can also be pressed to expand similarly. That is, by the fluid discharge pressurization of about 100 Kpa to about 150 Kpa in each central portion of the finger plate 122 and the top plate 123, the finger plate 122 and the top plate 123 are displaced by several tens of millimeters to the outside of the container, that is, It has a deformation amount of about 3 to about 4% of the diameters of the fingerboard 122 and the top plate 123. In detail, a displacement of about 9 mm to about 14 mm occurs in the finger plate 122, and a displacement of about 11 mm to about 14 mm occurs in the top plate 123. 6, the change of each displacement amount (expansion amount) of the finger board 122 and the top plate 123 when the inside bag 110 of the inner bag composite container 100 is pressurized is shown. In addition, in this embodiment, it is 0.5 mm as plate thickness of the finger board 122 and the top plate 123, for example.

As such, the bottom surface 112 and the top surface 114 of the inner container 110, and the base plate 122 and the top plate 123 are expanded and deformed to be present on the bottom surface 112 of the inner container 110 immediately before the fluid discharge ends. The fluid to be added can be introduced into the recess 113 for the remaining liquid. Therefore, it is possible to contribute to further reduction of the remaining amount.

On the other hand, the finger plate 122 and the top plate 123 expand, respectively, the position of the suction port 251 of the discharge tube 250 length-adjusted using the first joint 203 as described above, and the remaining concave portion. The distance between the bottoms of 113 becomes large. In order to absorb such a distance variation, the tip of the discharge tube 250 may be disposed within the recess 113 for the remaining liquid, and then the discharge tube 250 may be slightly curved. In addition, the discharge tube 250 is a length that can be stretched in the axial direction of the discharge tube 250 in accordance with the deformation of the fingerboard and the top plate at the distal end of the discharge tube 250, for example, as shown in FIG. The adjusting part 260 may be attached. By providing the length adjusting part 260, as shown in FIG. 5, even when the inner container 110 is inflated as shown by the dashed-dotted line by making the front-end | tip of the length adjusting part 260 contact the bottom of the recessed part 113 for remainders. The tip of the length adjusting unit 260 may maintain a state in contact with the bottom of the recess 113 for the remaining liquid. Therefore, even when the length adjusting unit 260 is provided, the remaining amount of liquid can be reliably reduced as compared with the conventional one, and the variation can also be reduced. In addition, the length adjustment part 260 is not limited to what was demonstrated, As long as it is a form which has a function which adjusts the length of the discharge tube 250 according to deformation | transformation of the finger board 122 and the top plate 123, of course.

Hereinafter, the discharge tube 250 mentioned above is demonstrated in detail using the inner bag composite container 105 shown to FIG. 8A-FIG. 8C as an example.

9A and 9B show the shape of the discharge tube 250 before and during liquid discharge in the inner container 110-2.

The discharge tube 250 is a so-called straight pipe type that is flexible and chemically resistant, for example, made of a resin of, for example, Teflon (registered trademark), is molded in a straight line by extrusion molding, and the winding wall is not formed. Is a tube. The discharge tube 250 is not only flexible but also resilient to the straight shape of the original shape. In addition, the discharge tube 250 in this example is an outer diameter of 8 mm and an inner diameter of 6 mm as an example.

As shown in FIG. 9A, the discharge tube 250 adjusts the length of the discharge tube 250 to be slightly curved before discharging the liquid in the inner container 110-2, that is, before the inside of the inner container 110-2 is pressed. It is installed in the composite container 105. An example of the length of the discharge tube 250 is demonstrated. In the inner bag composite container 105 before pressurization, the discharge tube 250 attached to the inlet / outlet part 111 of the inner container 110-2 was disposed in a straight line to the bottom face of the recess 113-2 for the remaining liquid. When the length at the time is L1, the length L2 obtained by adding 15 mm as an example to the length L1 is set to the length of the discharge tube 250. When the discharge tube 250 has the length L2, in the inner bag composite container 105 before pressurization, the discharge tube 250 is slightly curved as shown in Fig. 9A.

Subsequently, as shown in FIG. 9B, the liquid discharge in the inner container 110-2, that is, the inside of the inner container 110-2 is the above-mentioned pressure range for discharging the fluid, and during pressurization, the inner container 110-2 as described above. The bottom surface 112 and the top surface 114-2 of the bottom surface) and the fingerboard 122 and the top plate 123-2 of the outer container 120-2 are expanded and deformed, and the axial length of the inner bag composite container 105 is reduced. Is extended. As the inner bag composite container 105 is lengthened in the axial direction, the discharge tube 250 that has been bent with the length L2 disappears due to the restoring force and returns to a straight line in its original form. In this return state, the liquid intake port 251 located at the tip of the discharge tube 250 is located in the recessed recess 113-2, and is non-contacted, i.e., close to the bottom of the recessed recess 113-2. Is located.

That is, the length L2 of the discharge tube 250 is such that the suction port 251 of the tip of the discharge tube 250 is located in the recess for the remaining liquid of the inner container when the inside of the inner container is pressed in the above-described fluid discharge pressure range. In addition, it can be said that it is the length which is located non-contactingly, ie close to the bottom face of the recessed part 113-2 for remainders.

In addition, as an example of the above-described fluids contained in the inner containers 110 and 110-2, there are chemical liquids that require high cleanliness in handling, including storage attempts. For example, the chemical liquids used in at least one of the semiconductor field and the liquid crystal field are considerable. do. As described above, the chemical liquid in the semiconductor field is, for example, a CMP slurry, a photoresist, a developer, an etching solution, a cleaning liquid, and the like, and a liquid crystal field is a photoresist, a color resist, a color filter material and the like.

In addition, as described at the beginning of this "Mode for Invention", the outer container 120 of various contents can be used, but the content described in the above-mentioned 2nd Embodiment uses the various outer container 120. Also in this case, the deformation amount of the finger plate 122 and the top plate 123 can be similarly applied.

In addition, the inner bag composite container according to Embodiment A is a bag-shaped container for accommodating a fluid, and is formed by winding a finger board into a resin inner container and a cylindrical body, and storing the inner container. An inner bag composite container having an outer container formed of an outer container formed of a forced container, and having a top plate having an opening through which the entrance and exit portions protrude, the outer container being attached to the fuselage against the fingerboard. The opening in the doorway and the outer container is located on a central axis passing through the center of the diameter of the inner bag composite container, and the inner container is outwardly from the bottom of the inner container just below the doorway on the central axis. It has a recess for the remaining liquid that protrudes and is formed to collect and store the remaining liquid. .

In addition, in the B embodiment, in the inner bag composite container of the A embodiment, the fingerboard and the top plate are almost three to approximately three to the diameter of the fingerboard and the top plate on the outer side of the container by pressurization for fluid discharge into the inner bag composite container. It may have a deformation amount of 4%.

Further, in the C embodiment, in the inner bag composite container of the A or B embodiment, a support member having a height corresponding to the recessed portion for the remaining liquid is formed in the gap between the bottom surface of the fingerboard and the inner container. You may further provide.

In addition, in the D embodiment, in the inner bag composite container in any one of the A, B, and C embodiments, the outer container may have a handle on the outer surface of the body.

In addition, in the E aspect, in the inner bag composite container of the said D embodiment, the said handle may be a substantially annular handle attached to each of the diameter positions in the outer surface of the said fuselage | body.

In addition, in the F embodiment, in the inner bag composite container in any one of the A, B, and C embodiments, the outer container may have a handle on the outer surface of the top plate.

In addition, in the G embodiment, in the inner bag composite container in any one of the A, B, C, and F embodiments, the outer container includes an engaging portion on the top plate. The inner container may have an anti-rotation part on the top surface of the inner container, and the anti-rotation part may be configured to engage with the engaging portion to prevent rotation of the inner container in the outer container about the central axis. .

Moreover, the dispensing apparatus in H-th Embodiment can be attached to the entrance / exit part of the inner side container projecting from the opening of the inner side bag composite container and the outer side container in any one of said Gth embodiment from the said Ath embodiment. The distal end thereof is located in a recess for the remaining liquid of the inner container, and can be attached to the discharge tube for guiding the fluid contained in the inner container to the outside of the container, and the entrance and exit portion protruding from the opening. And a gas supply mechanism for supplying a gas into the inner bag composite container and discharging the fluid to the outside of the container through the discharge tube.

Moreover, in the Jth embodiment, in the distribution device of the Hth embodiment, the discharge tube is stretchable in accordance with deformation of the fingerboard and the top plate to the outside of the inner bag composite container generated by pressurization in the container by the gas supply mechanism. You may have a length adjustment part.

Moreover, in the Kth aspect, in the distribution apparatus of the Hth embodiment, the discharge tube has flexibility and shape resilience, and flexes by flexibility before pressurization in the container by the gas supply mechanism, while on the gas supply mechanism. In a state in which the fingerboard and the top plate to the outside of the inner bag composite container are deformed by the pressure in the container, the shape may be extended so as to extend in a straight line from the entrance and exit portions of the inner container to the recess for the remaining liquid. .

INDUSTRIAL APPLICABILITY The present invention is applicable to an inner bag composite container in which a resin inner container is provided in a forced outer container, and a dispensing device including the inner bag composite container and dispensing the contained fluid.

100, 105: inner bag composite container 101: central axis
102: gap 103: support member
110, 110-2: inner container 111: doorway
113: recessed portion for balance 115: rotation preventing portion
120, 120-2: outer container 121: fuselage
122: fingerboard 123, 123-2: top plate
124, 125: handle 126: engaging portion
200: distribution device 250: discharge tube
260: length adjustment unit

Claims (10)

The inner container 110 made of resin having a bag-shaped fluid receiving port 111 and the finger plate 122 are wound on a cylindrical body 121 to be molded to accommodate the inner container. An inner bag composite container, which is an outer container formed of a forced container, and has an outer container 120 to which the top plate 123 having the opening 123a protruding from the entrance portion is attached to the fuselage against the fingerboard. As 100):
The doorway part in the inner container and the opening in the outer container are located on a central axis 101 passing through the center of the diameter of the inner bag composite container,
The inner bag composite has a recessed recess 113 for protruding outwardly from the bottom surface 112 of the inner container and forming and storing the remaining liquid immediately below the doorway on the central axis. Vessel. The method of claim 1,
And the fingerboard and the top plate have a deformation amount of approximately 3 to 4% of the diameter of the fingerboard and the top plate on the outside of the container by pressurization for fluid discharge into the inner bag composite container. The method of claim 1,
An inner bag composite container further comprising a support member (103) having a height corresponding to the concave portion for the remaining liquid in the gap (102) between the bottom surface of the fingerboard and the inner container. The method of claim 1,
Wherein the outer container has a handle (124) on the outer surface of the fuselage. 5. The method of claim 4,
The handle is an inner bag composite container, wherein the handle is an approximately annular handle attached to each of the diameter positions on the outer surface of the body. The method of claim 1,
Inner bag composite container characterized in that the outer container has a handle (125) on the outer surface of the top plate. The method of claim 1,
The outer container has an engaging portion 126 to the top plate,
The inner container has an anti-rotation portion 115 on the top surface 114-2 of the inner container, and the anti-rotation portion engages with the engagement portion to prevent rotation of the inner container in the outer container about the central axis. Inner bag composite container, characterized in that to prevent. The inner bag composite container 100 according to any one of claims 1 to 7,
It is a tube attachable to the inlet / outlet part 111 of the inner container 110 which protrudes from the opening 123a of the outer container 120, The front end is located in the recessed part 113 for the remainder of an inner container, and is accommodated in an inner container. A discharge tube 250 for directing a fluid out of the container,
And a gas supply mechanism 201, 202 which is attachable to the entrance and exit portion protruding from the opening, and supplies gas into the inner bag composite container and discharges the fluid contained in the inner container to the outside of the container through the discharge tube. Dispensing device, characterized in that. The method of claim 8,
And the discharge tube has a length adjuster (260) that is stretchable in response to deformation of the fingerboard and the top plate to the outside of the inner bag composite container caused by pressurization within the container by the gas supply mechanism. The method of claim 8,
The discharge tube has flexibility and shape resilience, and is bent by flexibility before pressurization in the container by the gas supply mechanism, while fingerboard and top plate outside the inner bag composite container by pressurization in the container by the gas supply mechanism. The distribution apparatus which has a length extended linearly from the said entrance part of an inner side container to the said recessed part for residues by shape resilience in this deformed state.

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