KR20130076581A - Paste dispenser and method for controlling the same - Google Patents

Abstract

PURPOSE: A paste dispenser can impose relatively low negative pressure, compared with the minimum negative pressure which can be controlled in a negative pressure regulator', on the inside of a syringe. CONSTITUTION: A paste dispenser includes a syringe (52) accepting paste, a out-gassing unit (80) connected with the syringe through a connection line (81), and multiple control valves (91, 92) arranged on the connection line between the syringe and the out-gassing unit. The multiple control valves respectively produce different responding signals. The out-gassing unit includes a vacuum pump (82) connected to the connection line and a negative pressure regulator (83) arranged on the connection line located in between the vacuum pump and the multiple control valves.

Description

Paste Dispenser and Control Method {PASTE DISPENSER AND METHOD FOR CONTROLLING THE SAME}

The present invention relates to a paste dispenser for applying paste onto a substrate and a control method thereof.

In general, a flat panel display (FPD) is an image display device that is thinner and lighter than a television or a monitor employing a CRT. As flat panel displays, Liquid Crystal Display (LCD), Plasma Display Panel (PDP), Field Emission Display (FED), Organic Light Emitting Diodes (OLED), etc. It is used.

Among them, the liquid crystal display is a display device in which a desired image is displayed by individually supplying data signals according to image information to liquid crystal cells arranged in a matrix to adjust light transmittance of the liquid crystal cells. Liquid crystal displays are widely used because of their thinness, light weight, low power consumption and low operating voltage. The manufacturing method of the liquid crystal panel generally employed in such a liquid crystal display will be described.

First, a color filter and a common electrode are formed on an upper substrate, and a thin film transistor (TFT) and a pixel electrode are formed on the lower substrate corresponding to the upper substrate. Subsequently, after the alignment films are applied to the substrates, the alignment films are rubbed to provide a pre-tilt angle and an orientation direction to the liquid crystal molecules in the liquid crystal layer to be formed therebetween.

Then, paste is applied to at least one substrate in a predetermined pattern to form a paste pattern so as to maintain a gap between the substrates and to prevent the liquid crystal from leaking to the outside and to seal the substrates. Through the process of forming a liquid crystal layer in the liquid crystal panel is manufactured.

In the manufacture of such a liquid crystal panel, a device called a paste dispenser is used to form a paste pattern on a substrate. The paste dispenser is a dispensing head unit disposed on a frame and equipped with a stage on which a substrate is mounted, a syringe containing paste, a nozzle communicating with the syringe, and a dispensing head unit supporting frame for supporting the dispensing head unit. It is composed. Using such a paste dispenser, a linear paste pattern is formed on a substrate.

When the paste is applied onto the substrate, a gas of a predetermined pressure is supplied from the positive pressure source into the syringe, and the paste inside the syringe is discharged from the discharge port of the nozzle connected with the syringe, and at the same time, the dispensing head unit moves. do.

And when the operation | movement which paste is apply | coated on a board | substrate is complete | finished, after the gas inside a syringe is exhausted to the outside, predetermined | prescribed negative pressure is applied to the inside of a syringe by operation of a negative pressure source. Therefore, the paste present in the discharge port of the nozzle is pulled toward the syringe, whereby a phenomenon of forming a paste or leaking to the outside at the discharge port of the nozzle is prevented.

In addition, even in the standby state in which the paste is not applied on the substrate, minute negative pressure must be continuously applied to the inside of the syringe so that the paste does not form at the discharge port of the nozzle or leak out. To this end, a negative pressure regulator is installed between the syringe and the negative pressure source, and the negative pressure applied by the negative pressure source in the negative pressure regulator is adjusted to a predetermined size to act on the inside of the syringe.

On the other hand, in the atmospheric state in which the paste is not applied on the substrate, the magnitude of the negative pressure applied to the inside of the syringe must be varied depending on the viscosity of the paste contained in the syringe and the amount of the paste contained in the syringe. When the viscosity of the paste is high, the amount of negative pressure applied to the inside of the syringe should be larger than that of the case where the viscosity is low, and when the amount of the residual amount of paste is large, the amount of negative pressure applied to the inside of the syringe should be larger than when the amount of the paste is low. do.

As such, the negative pressure acting on the inside of the syringe in the atmospheric state in which the paste is not applied on the substrate needs to be finely adjusted according to various conditions including the viscosity and the remaining amount of the paste. However, in the conventional paste dispenser, since the negative pressure applied to the inside of the syringe is controlled by adjusting the magnitude of the voltage applied to the negative pressure regulator, it is difficult to finely adjust the magnitude of the negative pressure, in particular, in the negative pressure regulator. Because the minimum adjustable negative pressure (the absolute value of the pressure that can be adjusted in the negative pressure regulator) is relatively large, the limit that cannot operate a small negative pressure inside the syringe compared to the minimum negative pressure that can be adjusted in the negative pressure regulator There is.

The present invention is to solve the above-mentioned problems of the prior art, an object of the present invention, the paste dispenser and the control method which can operate a negative pressure of a small size compared to the minimum negative pressure that can be adjusted in the negative pressure regulator inside the syringe To provide.

Paste dispenser according to the present invention for achieving the above object, the syringe containing the paste, the gas discharge unit connected via the syringe and the connection line, and the connection line between the syringe and the gas discharge unit And a plurality of control valves arranged, wherein the plurality of control valves have different response speeds to control signals.

In addition, the paste dispenser according to the present invention, the syringe containing the paste, the gas discharge unit connected via the syringe and the connection line, a plurality of controls disposed on the connection line between the syringe and the gas discharge unit Including a valve, the plurality of control valve is characterized in that the flow rate per unit time is different.

In addition, the method of controlling the paste dispenser according to the present invention includes a syringe in which a paste to be applied on a substrate is accommodated, a gas supply unit and a gas discharge unit connected to the syringe, and a parallel between the syringe and the gas discharge unit. A control method of a paste dispenser comprising a first control valve and a second control valve disposed, wherein the second control valve has a higher response speed to a control signal than the first control valve, wherein: (a) the first control In a state in which the valve and the second control valve are closed, the paste is applied on the substrate while the positive pressure is applied to the inside of the syringe by the gas supply unit, and (b) the positive pressure by the gas supply unit is increased. (C) the negative pressure acting on the inside of the syringe by the gas discharge unit while the first control valve is opened; As the first and the second control valve opening in the control valve is closed, it can comprise a step in which an internal negative pressure of the control syringe.

In addition, the method of controlling the paste dispenser according to the present invention includes a syringe in which a paste to be applied on a substrate is accommodated, a gas supply unit and a gas discharge unit connected to the syringe, and a parallel between the syringe and the gas discharge unit. A first control valve and a second control valve disposed, wherein the second control valve is a method of controlling a paste dispenser having a lower flow rate per unit time than the first control valve, (a) the first control valve and In the state in which the second control valve is closed, the paste is applied on the substrate while the positive pressure is applied to the inside of the syringe by the gas supply unit, and (b) the static pressure by the gas supply unit is blocked (C) a negative pressure is applied to the inside of the syringe by the gas discharge unit while the first control valve is opened; and (d) the first agent. The second control valve is opened in a state in which the valve is closed, and the negative pressure inside the syringe may be adjusted.

In addition, the control method of the paste dispenser according to the present invention, the syringe containing the paste to be applied on the substrate, the gas supply unit and the gas discharge unit connected to the syringe, disposed between the syringe and the gas discharge unit A first control valve, which is connected in series with the first control valve between the syringe and the first control valve, and has a higher response speed or a lower flow rate per unit time than the first control valve. In the control method of the paste dispenser comprising a two control valve, (a) while the first control valve and the second control valve is closed, while the positive pressure is applied to the interior of the syringe by the gas supply unit Applying paste on the substrate, (b) blocking the static pressure by the gas supply unit, and (c) the first control valve and the second control valve. The negative pressure is applied to the inside of the syringe by the gas discharge unit in the open state; (d) The opening and closing operation of the second control valve is repeatedly performed while the first control valve is opened. It may be configured to include a step of adjusting the negative pressure inside the syringe.

The paste dispenser and its control method according to the present invention can act as a negative pressure of a small size compared to the minimum negative pressure that can be adjusted in the negative pressure regulator inside the syringe, according to the viscosity of the paste contained in the syringe and the remaining amount of the paste There is an effect that can be finely adjusted the pressure inside the syringe.

1 is a perspective view showing a paste dispenser according to the present invention.
FIG. 2 is a perspective view illustrating a dispensing head unit of the paste dispenser of FIG. 1.
3 is a block diagram illustrating a configuration for supplying and discharging gas into the syringe of the dispensing head unit of FIG. 2.
4 is a graph in which pressure changes inside the syringe of the dispensing head unit of FIG. 2 are displayed for each section.
FIG. 5 is a block diagram showing a configuration for supplying and discharging gas into the syringe of the dispensing head unit in the paste dispenser according to the third embodiment.

Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of the paste dispenser and its control method according to the present invention.

1 and 2, the paste dispenser according to the first embodiment includes a frame 10, a stage 20 mounted on the frame 10, on which the substrate S is mounted, and a stage ( A pair of guide rails 30 installed on both sides of the 20 and extending in the Y-axis direction and both ends of the pair of guide rails 30 are supported on the stage 20 and installed in the upper portion of the stage 20 and extend in the X-axis direction. The dispensing head unit support frame 40 and the dispensing head unit support frame 40 are installed to be movable in the X-axis direction, and the dispensing head unit 50 is provided with a nozzle 53 and paste. It may be configured to include a control unit (not shown) for controlling the operation of each component for the application.

On the frame 10, an X-axis table 21 for moving the stage 20 in the X-axis direction and a Y-axis table 22 for moving the stage 20 in the Y-axis direction may be provided. Accordingly, the stage 20 can be moved in the X-axis direction and the Y-axis direction by the X-axis table 21 and the Y-axis table 22. Of course, only one of the X-axis table 21 and the Y-axis table 22 is applied, so that the configuration for moving the stage 20 only in either of the X-axis direction and the Y-axis direction can be applied.

Both ends of the dispensing head unit support frame 40 may have a movable member 41 connected to the guide rail 30. By the interaction of the guide rail 30 and the mover 41, the dispensing head unit support frame 40 may be moved in the longitudinal direction of the guide rail 30, that is, in the Y-axis direction. Accordingly, the dispensing head unit 50 may be moved in the Y-axis direction by the movement in the Y-axis direction of the dispensing head unit support frame 40.

The dispensing head unit support frame 40 may be provided with a head moving guide 42 disposed in the X-axis direction, and the dispensing head unit 50 may include a head moving guide of the dispensing head unit supporting frame 40. A head moving device 51 connected with 42 may be installed. The dispensing head unit 50 may be moved in the longitudinal direction of the dispensing head unit support frame 40, that is, in the X-axis direction by the interaction of the head moving guide 42 and the head moving device 51.

As such, the dispensing head unit 50 may be moved in the X-axis direction and / or the Y-axis direction according to the XY equipment coordinate system defined by the X-axis and the Y-axis.

On the other hand, in the paste dispenser according to the first embodiment, the stage 20 is moved while the dispensing head unit 50 is stopped, or the dispensing head unit 50 is moved while the stage 20 is stopped. While the paste can be applied to the substrate (S). Hereinafter, such relative movement of the stage 20 and the dispensing head unit 50 is defined as relative movement of the nozzle 53 with respect to the substrate S.

As shown in FIG. 2, the dispensing head unit 50 includes a syringe 52 in which the paste is accommodated, a nozzle 53 in communication with the syringe 52 and in which the paste is discharged, and adjacent to the nozzle 53. Displaced sensor 54 for measuring the distance between the nozzle 53 and the substrate (S), and Y-axis drive unit 55 for moving the nozzle 53 and the displacement sensor 54 in the Y-axis direction And, it may be configured to include a Z-axis drive unit 56 for moving the nozzle 53 and the displacement sensor 54 in the Z-axis direction.

The displacement sensor 54 includes a light emitting unit 541 for emitting a laser, and a light receiving unit 542 spaced apart from the light emitting unit 541 at a predetermined interval and receiving a laser beam reflected from the substrate S. The light emitting unit After the light emitted from 541 and reflected from the substrate S is reflected, the electrical signal according to the imaging position of the laser image formed in the light receiving unit 542 is output to the control unit, the control unit based on the electrical signal based on the substrate (S) And the gap between the nozzle 53 is measured.

In addition, the dispensing head unit 50 may be provided with a cross-sectional area sensor 57 for measuring the cross-sectional area of the paste pattern (P) formed on the substrate (S). The cross-sectional area sensor 57 measures the cross-sectional area of the paste pattern P by continuously emitting a laser to the substrate S and scanning the paste pattern P. FIG. Data relating to the cross-sectional area of the paste pattern P measured from the cross-sectional area sensor 57 may be used to measure whether the paste pattern P is defective.

In addition, the dispensing head unit 50 may be provided with an imaging device 58 installed to face the substrate S at a portion adjacent to the nozzle 53. When the nozzle 53 is moved by the movement of the dispensing head unit support frame 40 in the Y-axis direction and the movement of the dispensing head unit 50 in the X-axis direction, such an imaging device 58 is connected to the nozzle ( 53 can be used to measure the current position of the instrument.

As shown in FIG. 3, the syringe 52 includes a gas supply unit 70 for supplying gas into the syringe 52, and a gas discharge unit 80 for discharging gas in the syringe 52. This can be connected.

The gas supply unit 70 may include a gas supplier 72 connected to the syringe 52 through the first connection line 71 to supply gas to the syringe 52. The gas supply unit 70 may be connected to the syringe 52 through the supply valve 73. As the gas supplier 72, for example, a blower or a compressor may be used. As the supply valve 73, a solenoid valve having a solenoid is preferably used. Meanwhile, a constant pressure regulator 74 may be provided between the gas supplier 72 and the supply valve 73 to constantly adjust the pressure of the gas supplied from the gas supplier 72. The gas supply unit 70 supplies the gas to the interior of the syringe 52 at a predetermined pressure. Accordingly, a positive pressure is formed inside the syringe 52, so that the paste contained in the syringe 52 has a nozzle. It can be discharged through the discharge port of 53.

The gas discharge unit 80 may include a vacuum pump 82 connected to the syringe 52 through the second connection line 81. The gas discharge unit 80 may be connected to the syringe 52 through a plurality of control valves 90 arranged in parallel on the second connection line (81). Here, the plurality of control valves 90 may be configured of, for example, a first control valve 91 and a second control valve 92.

A negative pressure regulator 83 is provided between the first control valve 91 and the second control valve 92 and the vacuum pump 82, and the first control valve 91 and the second control valve 92 are negative pressure. It may be connected to the vacuum pump 82 through the regulator (83). The negative pressure regulator 83 serves to constantly adjust the pressure of the gas discharged by the vacuum pump 82.

As the first control valve 91 and the second control valve 92, a solenoid valve having a solenoid may be used. The second control valve 92 has a higher response speed to the control signal than the first control valve 91. Therefore, the second control valve 92 can open and close the second connection line 81 more quickly than the first control valve 91. The magnetic force of the solenoid of the first control valve 91 is the magnetic force of the solenoid of the first control valve 91 so that the response speed of the second control valve 92 to the first control valve 91 increases. It can be larger than that. For this purpose, for example, the number of turns of the electromagnetic coil provided in the solenoid of the second control valve 92 may be larger than the number of turns of the electromagnetic coil provided in the solenoid of the first control valve 91. Also, for example, the load required for opening and closing the orifice in the second control valve 92 may be smaller than the load required for opening and closing the orifice in the first control valve 91.

On the other hand, the syringe 52 may be provided with a pressure sensor 110 for measuring the pressure inside the syringe (52). In addition, in order to make the pressure inside the syringe 52 equal to the atmospheric pressure, an exhaust valve 120 through which gas is supplied into the syringe 52 or gas is exhausted from the inside of the syringe 52 may be connected.

Hereinafter, a method of controlling the paste dispenser according to the first embodiment will be described with reference to FIG. 4.

First, in order to apply the paste onto the substrate S, in a state where both the first control valve 91 and the second control valve 92 are closed, the gas supply 72 is operated together with the supply valve 73. Open gas is supplied from the gas supplier 72 is supplied into the syringe 52 along the first connection line 71 (S1). In this case, the pressure of the gas supplied into the syringe 52 may be constantly adjusted by the positive pressure regulator 74.

When the positive pressure inside the syringe 52 becomes the application pressure PA by the gas supplied into the syringe 52, the paste contained in the syringe 52 is extruded toward the nozzle 53, thereby. The paste is discharged onto the substrate S through the discharge port of the nozzle 53. At the same time, the paste is applied on the substrate S in a predetermined pattern while the nozzle 53 is moved relative to the substrate S (S2).

When the operation of applying the paste onto the substrate S is completed, the first connection line 71 is closed by the closing operation of the supply valve 73, and the exhaust valve 120 is opened to open the interior of the syringe 52. Gas is exhausted to the outside, and thus, the pressure inside the syringe 52 may be in the same state as the atmospheric pressure Patm (S3).

In addition, the exhaust valve 120 is closed and the first control valve 91 is opened while the vacuum pump 82 is operated, and gas inside the syringe 52 is discharged along the second connection line 81. (S4), and thus, the primary negative pressure P1 is applied to the inside of the syringe 52 (S5). Here, the first control valve 91 may be opened after the exhaust valve 120 is closed, and the exhaust valve 120 may be closed after the first control valve 91 is opened, and the exhaust valve ( At the same time as the 120 is closed, the first control valve 91 may be opened. In this case, the second control valve 92 may maintain a closed state, and thus, the gas inside the syringe 52 may be discharged only through the first control valve 91. However, in order to reduce the time required to apply the primary negative pressure P1 to the inside of the syringe 52, that is, to increase the amount of gas discharged from the inside of the syringe 52, the second control valve 92 may be opened with the first control valve 91. Here, whether the second control valve 92 is opened or closed may be determined according to the viscosity of the paste contained in the syringe 52 and / or the remaining amount of the paste.

The paste present in the discharge port of the nozzle 53 is pulled toward the syringe 52 by the primary negative pressure P1 applied to the inside of the syringe 52, and thus, the paste present in the discharge port of the nozzle 53. Can be prevented from condensing to the discharge port of the nozzle 53 or leaking to the outside.

In order to maintain the standby state in which the paste is not applied onto the substrate S, the secondary negative pressure P2 having a minute size should be applied to the inside of the syringe 52. To this end, first, the first control valve 91 is closed (if the second control valve 92 is opened together with the first control valve 91 in the previous step (S4) (S5), the second control valve is closed. 92 is also closed.) The exhaust valve 120 is opened, whereby gas is introduced into the syringe 52. Therefore, the negative pressure inside the syringe 52 gradually decreases (S6).

Then, before the pressure inside the syringe 52 becomes the same as the atmospheric pressure, the second control valve 92 is opened while the exhaust valve 120 is closed and the first control valve 91 is closed. . Here, the second control valve 92 may be opened after the exhaust valve 120 is closed, and the exhaust valve 120 may be closed after the second control valve 92 is opened, and the exhaust valve ( At the same time as the 120 is closed, the second control valve 92 may be opened.

At this time, when the second control valve 92 is continuously opened, since the pressure inside the syringe 52 may be continuously lowered, the second control valve 92 is repeatedly opened and closed. . At this time, the control unit controls the opening and closing operations of the second control valve 92 based on the pressure inside the syringe 52 detected by the pressure sensor 110. As described above, while the repeated opening and closing operations of the second control valve 92 are performed, the inside of the syringe 52 is maintained at the secondary negative pressure P2 (S7).

At this time, the operation of opening the second control valve 92 while minimizing the magnitude of the voltage applied to the negative pressure regulator 83, that is, while minimizing the magnitude of the negative pressure that can be controlled by the negative pressure regulator 83. When the closing operation is repeatedly performed, the negative pressure P2 having a smaller size than the minimum negative pressure that can be adjusted by the negative pressure regulator 83 may be applied to the interior of the syringe 52.

As described above, since the paste dispenser according to the first embodiment may operate a negative pressure having a smaller magnitude than the minimum negative pressure that can be adjusted by the negative pressure regulator 83, the inside of the syringe 52. The pressure inside the syringe 52 can be finely adjusted according to the viscosity of the contained paste and the remaining amount of the paste.

Hereinafter, the paste dispenser according to the second embodiment and a control method thereof will be described. The same reference numerals are given to the same portions as those described in the first embodiment, and a detailed description thereof will be omitted.

In the paste dispenser according to the second embodiment, the plurality of control valves 90 includes a first control valve 91 and a second control valve 92 having a lower flow rate per unit time than the first control valve. Can be.

As the first control valve 91 and the second control valve 92, a solenoid valve having a solenoid may be used. The flow rate per unit time of the gas passing through the second control valve 92 is less than the flow rate per unit time of the gas passing through the first control valve 91. For example, the size of the orifice through which the gas passes through the second control valve 92 may be reduced so that the flow rate per unit time of the second control valve 92 may be smaller than the flow rate per unit time of the first control valve 91. The control valve 91 may be smaller than the size of the orifice through which the gas passes.

The other configuration of the paste dispenser according to the second embodiment is the same as that of the paste dispenser according to the first embodiment.

In the paste dispenser according to the second embodiment, when the process of applying the paste is finished, the first control valve 91 is opened to form a primary negative pressure P1 inside the syringe 52 (S5). . In this case, as in the above-described first embodiment, the second control valve 92 may maintain a closed state and may be opened together with the first control valve 91.

In addition, the first control valve 91 is closed and the exhaust valve 120 is opened, whereby gas is introduced into the syringe 52 (S6). Then, before the pressure inside the syringe 52 becomes the same as the atmospheric pressure, the exhaust valve 120 is closed and the second control valve 92 is opened.

In order to maintain the standby state in which the paste is not applied onto the substrate S, the second control having a smaller flow rate per unit time than the first control valve 91 while the first control valve 91 is closed. As the valve 92 is opened, a secondary negative pressure P2 is formed inside the syringe 52. At this time, the control unit opens the second control valve 92 based on the pressure inside the syringe 52 detected by the pressure sensor 110 so that the pressure inside the syringe 52 can be finely adjusted. Controls the operation and the closing operation to be performed repeatedly.

At this time, the operation of opening the second control valve 92 while minimizing the magnitude of the voltage applied to the negative pressure regulator 83, that is, while minimizing the magnitude of the negative pressure that can be controlled by the negative pressure regulator 83. When the closing operation is repeatedly performed, the negative pressure P2 having a smaller size than the minimum negative pressure that can be adjusted by the negative pressure regulator 83 may be applied to the interior of the syringe 52.

As described above, since the paste dispenser according to the second embodiment may operate a negative pressure having a smaller magnitude than the minimum negative pressure that can be adjusted by the negative pressure regulator 83, the inside of the syringe 52. The pressure inside the syringe 52 can be finely adjusted according to the viscosity of the contained paste and the remaining amount of the paste.

Hereinafter, the action and effect of the paste dispenser according to the second embodiment is the same as the action and effect of the paste dispenser according to the first embodiment described above.

On the other hand, in the first and second embodiments, in the standby state in which the paste is not applied onto the substrate S, the pressure inside the syringe 52 is adjusted to the minimum negative pressure that can be adjusted by the negative pressure regulator 83. In contrast, in order to maintain the secondary negative pressure P2 having a smaller size, a process of opening and closing the second control valve 92 while the first control valve 91 is closed has been described. However, as another embodiment, the viscosity of the paste is high or the residual amount of the syringe is large, so that the secondary negative pressure P, which should be acted on the inside of the syringe 52, is lower than the minimum negative pressure that the negative pressure regulator 83 can control. In a large case, the pressure inside the syringe 52 may be adjusted to the secondary negative pressure P2 while the first control valve 91 is opened and closed while the second control valve 92 is closed. In this way, the inside of the syringe 52 is controlled while controlling the opening and closing operations of the first control valve 91 and the second control valve 92 according to the viscosity of the paste contained in the syringe 52 and / or the remaining amount of the paste. Can be adjusted to the secondary negative pressure (P2).

In addition, in the first embodiment, the second control valve 92 has a configuration in which the response speed to the control signal is larger than that of the first control valve 91. In the second embodiment, the second control valve 92 Compared to the first control valve 91, a configuration in which the flow rate per unit time is small is presented. However, as another embodiment, the second control valve 92 has a larger response speed to the control signal and a smaller flow rate per unit time than the first control valve 91, so that the paste dispenser of the present invention operates. Effect can be achieved.

In addition, in the first embodiment and the second embodiment, a configuration in which two first control valves 91 and second control valves 92 are provided as the plurality of control valves 90 is provided. However, in another embodiment, the plurality of control valves 90, three or more control valves 90 having different response speeds and / or flow rate per unit time with respect to the control signal is connected in parallel, the syringe 52 of the In order to form a primary negative pressure P1 and a secondary negative pressure P2 therein, a configuration in which three or more control valves 90 are independently opened and closed may be applied.

Hereinafter, the paste dispenser and the control method thereof according to the third embodiment will be described with reference to FIG. 5. The same parts as those described in the above-described first to second embodiments are denoted by the same reference numerals and detailed description thereof will be omitted.

As shown in FIG. 5, the paste dispenser according to the third embodiment has a first control valve 91 and a second control valve 92 connected in series on a second connection line 81. That is, the first control valve 91 is disposed between the syringe 52 and the gas discharge unit 80, and the second control valve 92 is disposed between the syringe 52 and the first control valve 91. 1 is connected in series with the control valve (91). As described in the first embodiment, the second control valve 92 may have a higher response speed to the control signal than the first control valve 91. As described in the second embodiment, the second control valve 92 may have a smaller flow rate per unit time than the first control valve 91. In another embodiment, the second control valve 92 may have a higher response speed to the control signal and a smaller flow rate per unit time than the first control valve 91.

In addition, in the third embodiment, a configuration in which two first control valves 91 and a second control valve 92 are provided as the plurality of control valves 90 is provided. However, as another embodiment, the plurality of control valves 90, three or more control valves 90 having different response speed and / or flow rate per unit time to the control signal is connected in series, the syringe 52 of the In order to form a primary negative pressure P1 and a secondary negative pressure P2 therein, a configuration in which three or more control valves 90 are independently opened and closed may be applied.

Hereinafter, a control method of the paste dispenser according to the third embodiment will be described.

The process of applying the paste onto the substrate S by supplying a positive pressure into the syringe 52 is as described in the above-described first embodiment.

When the operation of applying the paste onto the substrate S is completed, the first connection line 71 is closed by the operation of the supply valve 73, and the exhaust valve 120 is opened to open the interior of the syringe 52. The gas is exhausted to the outside, whereby the pressure inside the syringe 52 may be in the same state as the atmospheric pressure Patm (S3).

Then, while the exhaust valve 120 is closed and the vacuum pump 82 is operated, the first control valve 91 and the second control valve 92 are opened, and the gas inside the syringe 52 is removed. It is discharged along the second connection line 81 (S4), thereby, the primary negative pressure (P1) is applied to the interior of the syringe 52 (S5). Here, after the exhaust valve 120 is closed, the first control valve 91 and the second control valve 92 may be opened, and the first control valve 91 and the second control valve 92 may be opened. After the exhaust valve 120 may be closed, the first control valve 91 and the second control valve 92 may be opened at the same time as the exhaust valve 120 is closed.

The paste present in the discharge port of the nozzle 53 is pulled toward the syringe 52 by the primary negative pressure P1 applied to the inside of the syringe 52, and thus, the paste present in the discharge port of the nozzle 53. Is prevented from sticking to the discharge port of the nozzle 53 or leaking to the outside.

The first control valve 91 and the second control are then operated in order to apply the secondary negative pressure P2 of minute size to the inside of the syringe 52 in the standby state in which the paste is not applied onto the substrate S. FIG. The valve 92 is closed and the exhaust valve 120 is opened, whereby gas is introduced into the syringe 52. Therefore, the negative pressure inside the syringe 52 gradually decreases (S6).

Then, before the pressure inside the syringe 52 becomes equal to the atmospheric pressure, the exhaust valve 120 is closed and the first control valve 91 and the second control valve 92 are opened. Here, after the exhaust valve 120 is closed, the first control valve 91 and the second control valve 92 may be opened, and the first control valve 91 and the second control valve 92 may be opened. After the exhaust valve 120 may be closed, the first control valve 91 and the second control valve 92 may be opened at the same time as the exhaust valve 120 is closed.

At this time, when the first control valve 91 and the second control valve 92 are continuously opened, since the pressure inside the syringe 52 may be continuously lowered, the first control valve 91 is opened. In the state, the second control valve 92 is repeatedly opened and closed. In this case, the control unit controls the repetitive opening and closing operations of the second control valve 92 based on the pressure inside the syringe 52 detected by the pressure sensor 110. As described above, while the repeated opening and closing operations of the second control valve 92 are performed, the inside of the syringe 52 is maintained at the secondary negative pressure P2 (S7).

At this time, the operation of opening the second control valve 92 while minimizing the magnitude of the voltage applied to the negative pressure regulator 83, that is, while minimizing the magnitude of the negative pressure that can be controlled by the negative pressure regulator 83. When the closing operation is repeatedly performed, the negative pressure P2 having a smaller size than the minimum negative pressure that can be adjusted by the negative pressure regulator 83 may be applied to the interior of the syringe 52.

As described above, since the paste dispenser according to the third embodiment may operate a negative pressure having a smaller magnitude than the minimum negative pressure that can be adjusted by the negative pressure regulator 83, the syringe 52 may be applied to the inside of the syringe 52. The pressure inside the syringe 52 can be finely adjusted according to the viscosity of the contained paste and the remaining amount of the paste.

On the other hand, in the first to third embodiments, a configuration in which a solenoid valve provided with a solenoid is applied to the first control valve 91 and the second control valve 92. However, as the first control valve 91 and the second control valve 92, various valves operated by a control signal, such as an electromagnetic valve having a piezoelectric element, may be used.

52: syringe 53: nozzle
70: gas supply unit 80: gas discharge unit
91: first control valve 92: second control valve

Claims (9)

Syringes in which the paste is accommodated;
A gas discharge unit connected to the syringe through a connection line; And
And a plurality of control valves disposed on the connection line between the syringe and the gas discharge unit.
The plurality of control valves paste dispenser, characterized in that the response speed is different from the control signal. Syringes in which the paste is accommodated;
A gas discharge unit connected to the syringe through a connection line; And
And a plurality of control valves disposed on the connection line between the syringe and the gas discharge unit.
The plurality of control valves paste dispenser, characterized in that different flow rate per unit time. The method according to claim 1 or 2,
And the plurality of control valves are disposed in parallel on the connection line. The method according to claim 1 or 2,
The gas discharge unit,
A vacuum pump connected to the connection line; And
And a negative pressure regulator disposed on the connection line between the vacuum pump and the plurality of control valves. The method according to claim 1 or 2,
A pressure sensor for measuring the pressure inside the syringe is further provided,
Paste dispenser, characterized in that the operation of the plurality of control valve is controlled based on the pressure inside the syringe measured by the pressure sensor. A syringe containing paste applied on a substrate, a gas supply unit and a gas discharge unit connected to the syringe, and a first control valve and a second control valve disposed in parallel between the syringe and the gas discharge unit. In the control method of the paste dispenser, the second control valve has a greater response speed to the control signal than the first control valve,
(a) applying a paste onto the substrate while a positive pressure is applied to the inside of the syringe by the gas supply unit while the first control valve and the second control valve are closed;
(b) blocking the static pressure by the gas supply unit;
(c) a negative pressure applied to the inside of the syringe by the gas discharge unit while the first control valve is opened; And
(d) controlling the paste dispenser including adjusting the negative pressure inside the syringe while the second control valve is opened while the first control valve is closed. A syringe containing paste applied on a substrate, a gas supply unit and a gas discharge unit connected to the syringe, and a first control valve and a second control valve disposed in parallel between the syringe and the gas discharge unit. In the control method of the paste dispenser, the second control valve has a lower flow rate per unit time than the first control valve,
(a) applying a paste onto the substrate while a positive pressure is applied to the inside of the syringe by the gas supply unit while the first control valve and the second control valve are closed;
(b) blocking the static pressure by the gas supply unit;
(c) a negative pressure applied to the inside of the syringe by the gas discharge unit while the first control valve is opened; And
(d) controlling the paste dispenser including adjusting the negative pressure inside the syringe while the second control valve is opened while the first control valve is closed. 8. The method according to claim 6 or 7,
The paste dispenser, characterized in that the opening operation and the closing operation of the second control valve is repeatedly performed in the step (d). A syringe containing a paste applied on a substrate, a gas supply unit and a gas discharge unit connected to the syringe, a first control valve disposed between the syringe and the gas discharge unit, the syringe and the first In the control method of the paste dispenser comprising a second control valve connected in series with the first control valve between the control valve and a response speed to the control signal or a flow rate per unit time is lower than the first control valve. ,
(a) applying a paste onto the substrate while a positive pressure is applied to the inside of the syringe by the gas supply unit while the first control valve and the second control valve are closed;
(b) blocking the static pressure by the gas supply unit;
(c) a negative pressure applied to the inside of the syringe by the gas discharge unit in a state in which the first control valve and the second control valve are opened; And
and (d) controlling the negative pressure inside the syringe while repeatedly opening and closing the second control valve while the first control valve is opened.

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