KR20130016850A - Harmfulness gas filtering apparatus - Google Patents

Abstract

PURPOSE: A harmful gas treatment apparatus is provided to prevent generated powder from being absorbed in the inner wall of a cycle line by heating harmful gas and reduce apparatus maintenance costs by increasing the operation duration of an apparatus by the same. CONSTITUTION: A harmful gas treatment apparatus includes a heating chamber(100), a cooling tank(200), a powder trap chamber(300), a wet chamber(500), and an exhaust chamber(600). A heating chamber heats gas, generates powder by oxidizing a harmful material among materials comprising gas, and discharges the gas of high temperature including the generated powder. A cooling tank rapidly cools gas discharged from the heating chamber in an air cooling method and discharges. A powder trap chamber filters powder from gas rapidly cooled and discharged through the cooling tank and discharges. A wet chamber removes a residual harmful material among materials comprising gas by performing the wet process of gas discharged from the powder trap chamber, discharges a wet processed material containing a residual harmful material which was removed, and stores in a wet tank. An exhaust chamber exhausts gas in which a residual harmful material was removed by the wet process of the wet chamber. [Reference numerals] (AA,BB,CC,DD) Gas

Description

Harmful Gas Filtering Apparatus {Harmfulness Gas Filtering Apparatus}

The present invention relates to a noxious gas treatment apparatus, and more particularly, to a noxious gas treatment apparatus capable of treating a noxious gas generated during solar cell manufacturing through an air cooling method.

Today, due to the finiteness of fossil fuels, there is a growing interest in developing alternative energy. Representative alternative energy is a solar cell that can generate electrical energy by using sunlight, which is a clean energy source.

Solar cell is a device that converts light energy transmitted from the sun to the earth into electric energy. The development of solar cell is getting full of energy with the development of technology to grow single crystal silicon. Is being developed.

Such solar cells are generally manufactured by changing an electrical property of a wafer by an oxidation, diffusion process, or depositing a desired thin film on an upper surface of the wafer, followed by lithography and etching processes.

That is, since a solar cell is manufactured through a chemical reaction deposition process using a silane gas and ammonia gas, a large amount of harmful gas is generated during manufacturing. Practically, solar cell manufacture uses more silane gas than semiconductor or LCD manufacture. Therefore, it is essential to install a noxious gas treatment apparatus near the solar cell manufacturing facility.

Conventional noxious gas processing apparatus, as in Patent Document 1, by heating the introduced harmful gas to oxidize harmful substances among the substances constituting the harmful gas to produce a powder made of silicon oxide (SiO ₂ ) and the like, and heated high temperature Of harmful gas is cooled and discharged by using a large amount of cooling water together with powder.

However, as the conventional hazardous gas treatment device is operated in a manner of cooling the harmful gas by water cooling, the powder flows through the circulation line such as a pipe together with the cooling water, and is adsorbed to the inner wall of the circulation line to flow the cooling water through the circulation line. There is a problem in that the operation duration of the device is shortened to prevent it.

KR 1020100072618 A

The present invention has been made to solve the problems described above, and provides an apparatus for treating harmful gases that can treat harmful gases generated during solar cell manufacturing through an air cooling method, an object thereof.

The hazardous gas treatment apparatus of the present invention for achieving the object as described above, by heating the gas to oxidize the harmful substances in the material constituting the gas to produce a powder (Powder), the high temperature containing the powder produced A heating chamber for discharging the gas; A cooling tank for quenching and discharging the gas discharged from the heating chamber by an air cooling method; A powder trap chamber for filtering and discharging powder from the gas quenched through the cooling tank and discharged; Wet treatment of the gas discharged from the powder trap chamber 300 to remove residual harmful substances of the material constituting the gas, and to discharge the wet treatment material containing the removed residual harmful substances (Wet Tank) A wet chamber (Wet Chamber) for storing in; Residual harmful by wet treatment of the wet chamber It is preferable to include an exhaust chamber (Exhaust Chamber) for exhausting the gas is removed material.

In addition, it is preferable that the cooling tank further comprises an air cooled cooler (Vortex Tube) for injecting clean dry air (CDA) and nitrogen (N ₂ ) for cooling.

Here, the powder trap chamber preferably comprises a plate structure having a plurality of gas passage holes formed therein and includes at least one powder trap plate for filtering powder contained in the gas.

In addition, it is preferable that the cooling tank has a plate structure having a plurality of gas passage holes formed therein and includes at least one powder trap plate for filtering the powder contained in the gas in the room.

In addition, the wet chamber is preferably provided with a spray nozzle for injecting a wet treatment material including ammonia (NH ₃ ) in the room to remove harmful substances through chemical reaction among the materials constituting the gas.

According to the noxious gas treatment device according to the present invention, by treating the noxious gas generated during solar cell manufacturing through the air cooling method, it is possible to prevent the powder generated by heating the noxious gas adsorbed to the inner wall of the circulation line, This increases the operating duration of the device, thereby reducing the cost of maintaining the device.

1 is a schematic view showing a harmful gas treatment apparatus according to an embodiment of the present invention.
2 is a diagram illustrating an internal configuration of a cooling tank in FIG. 1.
3 is a diagram illustrating an internal configuration of a powder trap chamber in FIG. 1.

Hereinafter, with reference to the accompanying drawings will be described in detail for the hazardous gas treatment apparatus according to a preferred embodiment of the present invention.

Referring to FIG. 1, the apparatus for treating harmful gases according to an embodiment of the present invention heats the introduced gas to oxidize harmful substances among substances constituting the gas to generate powder, and includes the produced powder. Heating chamber (100) for discharging the high-temperature gas, cooling tank (200) for quenching and discharging the gas discharged from the heating chamber (100) by air cooling method, and cooling Powder trap chamber 300 for filtering and discharging powder from the gas discharged by being quenched through the tank 200 and wetted gas discharged from the powder trap chamber 300 to form a gas. Wet chamber 500 to remove residual harmful substances in the material, and to discharge the wet treatment material containing the removed residual hazardous substances and store them in the wet tank 400. Residual harmful by wet treatment of the wet chamber 500 is connected to the exhaust port of the chamber 500 And an exhaust chamber 600 for exhausting the gas from which the material is removed. In addition, the method may further include a bellows 700 for delivering the gas discharged from the powder trap chamber 300 to the wet chamber 500.

Here, the heating chamber 100 may include a Kanthal heater and a SiC heater therein, and may heat the gas temperature to 400 ° C. or higher.

On the other hand, the cooling tank 200 may quench the internal gas temperature to 100 ° C or less, and is provided with an injector 210 for injecting a cooling gas therein. In this case, the injector 210 may be formed in the form of a nozzle connected to a cooling air cleaner (Vortex Tube) for injecting cooling gas such as clean dry air (CDA) for cooling and nitrogen (N ₂ ).

In addition, as illustrated in FIG. 2, the cooling tank 200 may include a powder trap plate 220 for filtering powder contained in the gas. For example, the powder trap plate 220 may have a plate structure in which a plurality of gas passage holes are formed. At this time, the cooling tank 200 may be provided with a plurality of powder trap plate 220 to increase the area that the powder can be contacted to increase the collection and filtering effect of the powder.

Meanwhile, as illustrated in FIG. 3, the powder trap chamber 300 may also include a powder trap plate 310 that filters the powder contained in the gas. For example, the powder trap plate 310 may have a plate structure in which a plurality of gas passage holes are formed. At this time, the powder trap chamber 300 may be provided with a plurality of powder trap plate 310 to increase the area that the powder can be contacted to increase the collection and filtering effect of the powder.

In addition, the powder trap chamber 300 preferably includes a see-through window 320 through which the interior case 305 can see the room.

On the other hand, the wet chamber 500 has a spray nozzle 510 for injecting a wet treatment material including ammonia (NH ₃ ), which is a basic substance for removing harmful substances through chemical reaction among materials constituting the gas, indoors. It is desirable to. In addition, the wet chamber 500 preferably has a see-through window through which the room can be viewed.

The noxious gas treatment apparatus according to the present invention is not limited to the above-described embodiments, and may be variously modified and implemented within the range permitted by the technical idea of the present invention.

100: heating chamber 200: cooling tank
210: injector 220, 310: powder trap plate
300: powder trap chamber 305: outer case
320: see-through window 400: wet tank
500: wet chamber 510: spray nozzle
600: exhaust chamber 700: bellows

Claims (5)

A heating chamber for heating the gas to oxidize harmful substances among the materials constituting the gas to produce a powder, and to discharge the hot gas containing the powder;
A cooling tank for quenching and discharging the gas discharged from the heating chamber by an air cooling method;
A powder trap chamber for filtering and discharging powder from the gas quenched through the cooling tank and discharged;
Wet treatment of the gas discharged from the powder trap chamber 300 to remove residual harmful substances of the material constituting the gas, and to discharge the wet treatment material containing the removed residual harmful substances (Wet Tank) A wet chamber (Wet Chamber) for storing in;
Residual harmful by wet treatment of the wet chamber And an exhaust chamber for exhausting the gas from which the substance has been removed.
The method of claim 1,
And an air-cooled cooler (Vortex Tube) for injecting clean dry air (CDA) and nitrogen (N ₂ ) for cooling into the cooling tank.
The method of claim 2,
The powder trap chamber,
At least one powder trap plate (Powder Trap Plate) for filtering the powder contained in the gas is composed of a plate structure having a plurality of gas passage holes formed therein, characterized in that the apparatus for treating harmful gases.
The method of claim 3,
The cooling tank,
At least one powder trap plate comprising a plate structure formed with a plurality of gas passage holes for filtering the powder contained in the gas at least one room, characterized in that the apparatus.
The method according to claim 3 or 4,
The wet chamber,
An apparatus for treating a noxious gas, comprising a nozzle for injecting a wet processing material including ammonia (NH ₃ ) in a room to remove noxious substances through chemical reaction among materials constituting the gas.

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