KR20120012693A - Tilt apparatus for a tray - Google Patents

Abstract

PURPOSE: A tilting tray apparatus is provided to guide a tray transferred from two tray entrances to a tray holder unit, thereby improving tact time. CONSTITUTION: A tray holder unit(200) prepared inside of a device main body grips a substrate tray. A tilting unit(300) controls a tilt angle of the tray holder unit while supporting the tray holder unit. A clamping/unclamping unit arranged on the lower part of the tray holder unit clamps/unclamps a substrate on the substrate tray. A rotary turn unit is arranged on the lower part of a mounting position of the substrate tray of the tray holder unit. The turn unit switches a direction of an unclamped substrate from the substrate tray.

Description

Tray tilt device {TILT APPARATUS FOR A TRAY}

The present invention relates to a tray tilt apparatus, and more particularly, to vertically transport a substrate tray vertically transferred in a substrate manufacturing process using the tray, and to unload the substrate clamped to the tray to horizontally take out the substrate. A tray tilt device which can be used.

Generally, a substrate is a flat panel display such as a plasma display panel (PDP), a liquid crystal display (LCD), and an organic light emitting diode (OLED). ), A wafer for semiconductors, glass for photomasks, and the like.

Although a substrate as a flat panel display device (FPD) and a substrate as a semiconductor wafer are different from each other in terms of materials and uses thereof, a series of processing processes for the substrates, for example, exposure, development, etching, stripping, rinsing, Processes, such as cleaning, are substantially very similar, and these processes proceed sequentially to produce a substrate.

Among the flat panel display devices (FPD), OLEDs, which are in the spotlight these days, are ultra-thin display devices that realize color images by self-emission of organic materials, and are attracting attention as next-generation display devices because of their simple structure and high light efficiency. .

The OLED manufacturing process includes a pattern forming process, an organic thin film deposition process, an encapsulation process, and a bonding process for attaching a substrate on which an organic thin film is deposited and a substrate that has undergone an encapsulation process.

Direct patterning method using FMM (Fine Metal Mask) is mainly used as a method of manufacturing a large OLED. In manufacturing a large OLED using the mask method, a mask patterned with a substrate in a chamber is horizontally The so-called horizontal upward deposition method which deposits after arrange | positioning is applied.

However, as OLEDs become larger in size, masks are becoming larger and larger in weight, and in this case, deflection of the mask occurs in the direction of gravity, making it difficult to closely adhere the mask to the substrate, thereby eventually securing the precision required for mass production. It is difficult and difficult to reduce the foot print (foot print) according to the size of the system.

Therefore, it is necessary to develop a vertical logistics system in which a process is performed by standing up a substrate. Furthermore, in developing such a vertical logistics system, an apparatus capable of horizontally shifting a vertically transferred substrate tray after a deposition process, unclamping a substrate on the tray, and transferring the substrate tray to a bonding process to prevent damage to the substrate and stably supply the substrate. Development is needed.

An object of the present invention can be clamped / unclamped the substrate on the tray in the vertical logistics substrate manufacturing process and by supplying the substrate by tilting the substrate tray, it is possible to prevent the breakage of the substrate and to stably supply the substrate (footprint) It provides a tray tilt device that minimizes foot print and improves tact time.

The above object, according to the present invention, the apparatus main body; A tray holder unit provided inside the apparatus body and holding a substrate tray; A tilt unit provided adjacent to the tray holder unit to support the tray holder unit and to adjust an inclination angle of the tray holder unit; And a clamping / unclamping unit provided under the tray holder unit to clamp / unclamp the substrate on the substrate tray.

The turn unit may further include a turn unit rotatably provided below the substrate tray mounting position of the tray holder unit to change a direction of the unclamped substrate from the substrate tray.

The apparatus may further include a substrate transfer unit provided below the substrate tray mounting position of the tray holder unit to transfer an unclamped substrate from the substrate tray.

The apparatus may further include a mobile unit provided inside the apparatus main body to move the tilt unit within the apparatus main body.

The tray holder unit may include a holder unit body supporting the substrate tray; A plurality of tray holders provided on the holder unit body to hold the substrate trays; And a holder elevating unit provided adjacent to the tray holder and configured to up / down the tray holder.

The tray holder unit may further include tray roller conveyors provided on both sides of the holder unit body to move the substrate tray to a mounting position of the holder unit body.

The tray holder unit may include a tray end stopper provided at an end portion of the holder unit body on which the substrate tray is mounted to prevent the substrate tray from being separated out of the holder unit body when the substrate tray moves along the tray roller conveyor unit; And it may further include a stopper lifting portion for up / down the tray end stopper.

The tilt unit may include a pair of tilt supports provided on both sides of the tray holder unit to support the tray holder unit and to which the tray holder unit is rotatably coupled; And a tilt power unit provided at a side of the rotation shaft of the tilt support unit to provide power for rotating the tray holder unit.

The tilt power unit may be provided as a servo motor.

The clamping / unclamping unit may include: a clamp unit pusher configured to press the clamp unit of the substrate tray below the substrate tray; And it may include a pusher power unit for providing power to the clamp unit pusher.

The pusher power unit may be provided as an air cylinder.

The turn unit may include: a substrate support part provided below the substrate tray mounting position to support the substrate below the substrate; A turn part connected to the substrate support part to rotate the substrate support part; And a turn unit lifting unit provided below the turn unit to turn the substrate support unit and the turn unit up and down.

The turn unit may be provided as a harmonic driver.

The turn unit lifting unit may be provided as a pneumatic cylinder.

The substrate transfer unit may include: a plurality of substrate transfer roller conveyors disposed below the substrate tray mounting position of the tray holder unit to transfer an unclamped substrate from the substrate tray; And a roller conveyor lifter provided at a lower portion of the substrate transfer roller conveyor to up / down the substrate transfer roller conveyor.

The moving unit may be coupled to a lower portion of the tilt unit and a moving panel unit moving integrally with the tilt unit; And an LM guide part provided below the moving panel part to move the moving panel part to a predetermined position.

The moving unit is provided on an entrance portion in a direction in which the substrate tray is mounted on the moving panel portion to transfer the substrate tray to the tray holder unit when the tray holder unit is tilted in a direction crossing the horizontal plane. It may further include a tray guide roller conveyor portion.

The tray guide roller conveyor parts are provided in pairs on both sides of the tilt unit, in both directions when the tray holder unit is tilted in an arbitrary direction crossing the horizontal plane and when the tray holder unit is rotated 180 degrees and tilted in the opposite direction. The substrate tray may be transferred to the tray holder unit.

The moving unit may further include a substrate take-out roller conveyor unit which is provided at an end portion in the direction in which the substrate tray is mounted on the moving panel portion to transfer the unclamped substrate from the substrate tray to the outside of the apparatus main body.

The apparatus main body may include: a chamber housing having an outer wall at least one tray entrance through which the substrate tray enters and a substrate entrance through which the unclamped substrate enters and exits; And it may include a lower frame for supporting the chamber housing.

According to the present invention, it is possible to clamp / unclamp a substrate on a tray in a vertical logistics substrate manufacturing process and to supply the substrate by tilting the substrate tray, thereby preventing the breakage of the substrate and stably supplying the substrate. Minimize print and improve tact time.

1 is an overall structural diagram of a vertical distribution board manufacturing system.
2 is a perspective view of a tray tilt apparatus according to an embodiment of the present invention.
3 is a perspective view of the inside of the chamber housing of Figure 2 removed.
4 is a perspective view of the tray holder unit.
5 is an enlarged plan view of FIG. 4.
6 is a perspective view of the tilt unit.
FIG. 7 is a perspective view when the tilt unit of FIG. 6 tilts the substrate tray in parallel with the ground. FIG.
8 is a plan view of the clamping / unclamping unit.
9A is an enlarged perspective view of the clamping / unclamping unit.
9B is an enlarged cross-sectional view of the clamp unit of FIG. 9A.
10 is a perspective view illustrating the operation of the clamping / unclamping unit of FIG. 9A.
11 is a perspective view of the turn unit.
12 is an enlarged perspective view of the turn unit of FIG. 11.
13 is a plan view of the turn unit.
14 is a plan view illustrating the operation of the turn unit of FIG. 13.
15 is a front view of the substrate transfer unit.
16 is a front view illustrating the operation of the substrate transfer unit of FIG. 15.
17A to 17D are perspective views illustrating the operation of the mobile unit.

In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings which illustrate preferred embodiments of the present invention and the contents described in the accompanying drawings.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference numerals in the drawings denote like elements.

Prior to the description of the drawings, the substrate described below is not limited to the organic light emitting display (OLED) or the scope of the present invention.

1 is an overall structural diagram of a vertical distribution board manufacturing system.

First, the entire vertical distribution board manufacturing system may be manufactured in a shape as shown in FIG. 1. Referring to Figure 1, the overall vertical logistics substrate manufacturing system can be largely divided into a vertical deposition system and a bonding system.

First, the vertical deposition system is a turn for supplying a dual loader (2, dual roader) to stand up the substrate and the vertical substrate supplied from the dual loader 2 to the process chamber (4, process chamber) The chamber 3 includes a turn chamber and a process chamber 4 connected to the turn chamber 3 to perform a deposition process.

The dual loader 2 is a part for supplying a substrate standing in a direction crossing the ground to a place where a process is performed. One loader may be provided in place of the dual loader 2 to supply a single board to a place where a process is performed. However, when the dual loader 2 is used as in this embodiment, the tact time may be reduced. There is an advantage.

The turn chamber 3 is a place to redirect the substrate provided from the dual loader 2 and the process chamber 4 is a place where a substantial deposition process on the substrate is carried out. The structure in which the pair of process chambers 4 are symmetrically docked on both sides of the turn chamber 3 has the advantage of further reducing the tact time with the application of the dual loader 2.

After the deposition process, the substrate is moved from the turn chamber 3 to the substrate transfer chamber 5 along the process line, and the substrate transfer chamber 5 is the tray tilt apparatus 1 according to the embodiment of the present invention. The substrate tray 10 is transferred to the furnace. The transferred substrate tray 10 is laid down by the tray tilt apparatus 1 according to an embodiment of the present invention, the substrate standing up side by side on the ground side by side to convert the substrate in the horizontal direction and then supply the substrate to the bonding system do.

The coalescence system includes a transfer chamber 6, a load lock / unload lock chamber 7, and a coalescence machine 8. The transfer chamber 6 sends the substrate in the horizontal state to the joining machine 8 by the operation of the robot 6a therein so that the deposition substrate and the separate encapsulation substrate provided in the load lock / unload lock chamber 7 are bonded to each other. It handles as much as possible, and serves to send the final substrate which has been completed to the load lock / unload lock chamber 7.

As such, when the vertical substrate in which the deposition process is completed is supplied to the bonding system in the vertical deposition system, the apparatus for tilting the substrate to change direction and stably supply the tray tilt apparatus 1 according to an embodiment of the present invention.

Hereinafter, the tray tilt apparatus 1 according to an exemplary embodiment of the present invention will be described in detail.

Figure 2 is a perspective view of the tray tilt apparatus according to an embodiment of the present invention, Figure 3 is a perspective view of the inside of the chamber housing of Figure 2 removed, Figure 4 is a perspective view of the tray holder unit, Figure 5 is an enlarged view of Figure 4 6 is a perspective view of the tilt unit, FIG. 7 is a perspective view of the tilt unit of FIG. 6 when the substrate tray is tilted parallel to the ground, FIG. 8 is a plan view of the clamping / unclamping unit, and FIG. 9A An enlarged perspective view of the clamping / unclamping unit, FIG. 9B is an enlarged cross-sectional view of the clamp unit of FIG. 9A, FIG. 10 is a perspective view illustrating the operation of the clamping / unclamping unit of FIG. 9A, and FIG. 11 is a perspective view of the turn unit. 12 is an enlarged perspective view of the turn unit of FIG. 11, FIG. 13 is a plan view of the turn unit, FIG. 14 is a plan view illustrating the operation of the turn unit of FIG. 13, FIG. 15 is a front view of the substrate transfer unit, 16 is a substrate of FIG. It is a front view explaining the operation of the song unit, and FIGS. 17A to 17D are perspective views illustrating the operation of the mobile unit.

As shown in these figures, the tray tilt device 1 according to an embodiment of the present invention is provided with the apparatus main body 100, the tray holder unit 200 which is provided inside the apparatus body and grips the substrate tray 10. And a tilt unit 300 provided adjacent to the tray holder unit 200 to support the tray holder unit 200 and adjusting the tilt angle of the tray holder unit 200, and a lower portion of the tray holder unit 200. And a clamping / unclamping unit 400 capable of clamping / unclamping a substrate on the substrate tray 10 and rotatably provided below a mounting position of the substrate tray 10 of the tray holder unit 200. A turn unit 500 for switching the direction of the unclamped substrate from 10) and a lower portion of the tray holder unit 200 at the mounting position of the substrate tray 10 to transfer the unclamped substrate from the substrate tray 10. Board transfer Provided on the internal units (600), a main apparatus 100 includes a moving unit 700 for moving the tilt unit 300 in the inside of the main assembly 100 of the apparatus.

First, the apparatus main body 100 includes a chamber housing 110 in which at least one tray entrance 111 through which the substrate tray 10 enters and outside, and a substrate entrance 112 through which the unclamped substrate enters and exits, are provided on the outer wall. It includes a lower frame 120 for supporting the housing 110.

The front and rear portions of the chamber housing 110 are provided with a tray entrance and exit 111 so that the substrate tray 10 transferred from the substrate transfer chamber 5 can enter and exit the tray tilt device 1. Within the apparatus 1 a substrate entrance 112 is provided for tilting the substrate tray 10 in parallel with the ground and after the substrate is unclamped to supply the substrate to the next process.

In the present embodiment, the substrate entrance 112 is provided with two tray entrances 111 so that both substrate entrances 112 of the substrate transfer chamber 5 can be supplied, and one substrate entrance 112 is provided at the rear portion. Is prepared.

A lower frame 120 is provided below the chamber housing 110 to support the chamber housing 110 and to support the mobile unit 700 to be described later so that the mobile unit 700 can move in the chamber housing 110. The LM rail 121 is provided on the upper surface of the lower frame 120 so that it can be provided.

4 and 5, the tray holder unit 200 is provided on a holder unit body 210 for supporting the substrate tray 10 and a holder unit body 210 to hold the substrate tray 10. A plurality of tray holders 220, a holder lifting unit 230, which is provided adjacent to the tray holders 220 and up / down of the tray holders 220, and the substrate tray 10 may include a holder unit body 210. Tray roller conveyor 240 provided on both sides of the holder unit body 210 and the end of the holder unit body 210 on which the substrate tray 10 is mounted to move to the mounting position of the holder unit body 210. When the 10 moves along the tray roller conveyor 240, the tray end stopper 250 which prevents the holder unit 210 from being separated out of the holder unit 210, and the stopper elevating the tray end stopper 250 up / down The unit 260 is included.

The holder unit body 210 basically refers to a tray-shaped rectangular frame supporting the substrate tray 10 so that the substrate tray 10 may be mounted on the tray holder unit 200. Four corner portions of the holder unit body 210 are provided with tray holders 220 each having an angular shape corresponding to each corner of the substrate tray 10 so as to hold the substrate tray 10.

When the tray holder 220 enters the holder unit body 210 when the substrate tray 10 enters the holder unit body 210, the tray holder 220 stands in the lowered state of the holder unit body 210 so as not to interfere with the movement of the substrate tray 10. When the substrate tray 10 moves to the mounting position of the tray holder unit 200, the substrate tray 10 is raised toward the substrate tray 10 by the holder lifting unit 230 to stably hold the substrate tray 10.

The holder lifting unit 230 is a power unit capable of raising or lowering the tray holder 220 and is provided adjacent to the tray holder 220, and is provided by the pneumatic cylinder in this embodiment.

The tray roller conveyor 240 is provided at both sides of the holder unit body 210 and moves the substrate tray 10 to the mounting position of the holder unit body 210 when the substrate tray 10 is vertically transferred. That is, when the substrate tray 10 is vertically conveyed, both sides of the substrate tray 10 are transported by the roller conveyor. The tray roller conveyor unit 240 is provided with a tray detachment prevention guide 241 on the side of the tray roller conveyor 240 to which the substrate tray 10 moves so that the substrate tray 10 can be stably moved. When the) moves vertically along the tray roller conveyor unit 240 to prevent the substrate tray 10 from leaving the outside of the holder unit body (210).

The tray end stopper 250 is provided at an end portion in the direction in which the substrate tray 10 is transferred to the holder unit body 210, and the substrate tray 10 is disposed on the holder unit body 210 along the tray roller conveyor 240. When the substrate tray 10 is transferred, the substrate tray 10 is prevented from passing the mounting position of the holder unit body 210. That is, the tray end stopper 250 is a component that prevents the substrate tray 10 to be accurately stopped at the mounting position of the holder unit body 210. Referring to Figure 4, the tray end stopper 250 is installed at the end of the holder unit is provided in a roller form in order to minimize the impact on the substrate tray 10 and to stably stop the substrate tray 10 Two top and bottom are provided.

The stopper elevating unit 260 is a power unit that is provided under the tray end stopper 250 to up / down the tray end stopper 250. Referring to FIG. 5, the tray end stopper 250 enters the substrate tray 10 vertically so that the substrate tray 10 stops at a mounting position of the substrate tray 10 when the substrate tray 10 enters. In this case, the stopper elevates the stopper 260. Then, when the substrate tray 10 is tilted by the tilt unit 300 and the substrate is unclamped and transported, the tray end stopper 250 is lowered by the stopper lifter 260 so as not to interfere with the transfer of the substrate. .

In this embodiment, the stopper elevating unit 260 is provided by a pneumatic cylinder like the holder elevating unit 230, but the scope of the present invention is not necessarily limited thereto, and may be provided by other power means.

Meanwhile, referring to FIGS. 6 and 7, the tilt unit 300 is provided on both sides of the tray holder unit 200 to support the tray holder unit 200, and the tray holder unit 200 is rotatably coupled thereto. And a tilt support part 310 to be provided on the side of the rotation shaft of the tilt support part 310, and a tilt power part 320 to provide power for rotating the tray holder unit 200.

The pair of tilt support parts 310 are formed at a wide bottom portion and have a long rectangular pillar shape and are coupled to both sides of the holder unit body 210 so that the tray holder unit 200 is rotatable, thus providing a tray holder unit ( 200 is rotatably supported.

The tilt power unit 320 is provided at one side of the rotation shaft of the tilt support unit 310 and is connected to the rotation shaft connecting the tray holder unit 200 to rotate the tray holder unit 200. The tilt power unit 320 may tilt the tray holder unit 200 in parallel with the ground as shown in FIG. 7 or in a direction crossing the ground as shown in FIG. 6, and a servo motor may be used for precise tilt control. Other precisely controllable power means may be used.

Next, the clamping / unclamping unit 400 powers the clamp unit pusher 410 and the clamp unit pusher 410 which press the clamp unit 20 of the substrate tray 10 from the lower portion of the substrate tray 10. It includes a pusher power unit 420 to provide.

Prior to the description of the clamping / unclamping unit 400, the substrate tray 10 used in the embodiment of the present invention will be described first. The substrate tray 10 includes a clamp unit 20 for clamping the substrate to stably hold the substrate. Referring to FIG. 8, eight clamp units 20 of the substrate tray 10 are evenly distributed along the outer circumferential surface of the substrate tray 10. Referring to FIGS. 9A to 10, the clamp unit 20 of the substrate tray 10 is formed in a '-' shape so that the center portion 21c of the clamp rotation part is rotatably coupled to the inside of the substrate tray 10. 21, a clamp portion 22 coupled to the first end 21a of the clamp rotation portion 21 to clamp the substrate to the substrate tray 10, and a second end 21b of the clamp rotation portion 21. Is coupled to the direction intersecting with and coupled to the pressing portion 23 for rotating the clamp rotating portion 21 to press the clamp portion 22 to the open state, and to the rotating shaft 21c of the central portion 21c of the clamp rotating portion 21. And an elastic member 24 to provide elastic restoring force.

As shown in FIG. 8, a total of eight clamp rotation parts 21 are provided on each side of the substrate tray 10, and each clamp rotation part 21 is connected to an elastic member 24 to rotate inside the substrate tray 10. Possibly combined. At the first end 21a of the clamp rotating part 21, a rectangular clamp part 22 is coupled in parallel with the first end 21a, and the elastic member 24 connected to the rotating shaft of the clamp rotating part 21 is a clamp part. An elastic force is provided by the 22 to clamp the substrate so that the substrate is not mounted after being mounted on the substrate tray 10. The pressing part 23 is coupled to the second end 21b of the clamp rotating part 21 in the direction crossing the second end 21b, and in the case of pressing the pressing part 23, the rotating shaft is attached to the clamp rotating part 21. The torque is generated about the clamp rotation part 21 is rotated so that the substrate is unclamped from the substrate tray 10. When the pressing force is removed from the pressing unit 23, the clamp rotating unit 21 is returned to its original position by the elastic restoring force of the elastic member 24, and the substrate may be clamped to the substrate tray 10 again.

The elastic member 24 that provides the elastic restoring force is used in the present embodiment, but the torsion spring may be provided by the elastic member 24 such as the tension spring.

The clamping / unclamping unit 400 clamps the clamp unit 20 of the substrate tray 10 under the substrate tray 10 so that the substrate can be clamped or unclamped on the substrate tray 10. The unit pusher 410 and the pusher power unit 420 for providing power to the clamp unit pusher 410.

The clamp unit pusher 410 is provided under the substrate tray 10, and the end of the clamp unit pusher 410 has an elastic material such as rubber so as not to damage the substrate tray 10 when pressing the clamp unit 20. Is provided. The pusher power unit 420 is provided at the lower portion of the clamp unit pusher 410 to provide power to up / down the clamp unit pusher 410. In this embodiment, a pneumatic cylinder is used, but other power supply means may be used. have.

9A and 10 illustrate an operation when the clamp unit pusher 410 presses the clamp unit 20 of the substrate tray 10. As described above, when the pusher power unit 420 raises the clamp unit pusher 410, the clamp unit pusher 410 presses the clamp unit 20 so that the clamp unit 20 is opened by the rotational force generated at this time. Becomes When all clamp units 20 are in an open state, the substrate may be unclamped from the substrate tray 10. On the contrary, if the pressing force of the clamp unit 20 of the substrate tray 10 is removed while the substrate is placed at the mounting position of the substrate tray 10, the clamp unit 20 is closed and the substrate is placed on the substrate tray 10. It will be clamped.

Meanwhile, referring to FIGS. 11 and 12, the turn unit 500 is provided at a lower portion of the substrate tray 10 mounting position to support the substrate at the lower portion of the substrate, and the substrate support portion 510. And a turn unit 520 connected to the substrate support part 510 to rotate the substrate support part 510, and a turn unit lifting part 530 provided below the turn part 520 to up / down the substrate support part 510 and the turn part 520. .

As shown in FIGS. 11 and 12, the substrate support part 510 is connected to a long bar-shaped member coupled to a lattice shape to support the substrate. Supporting the substrate by using the long rod-shaped members is to minimize the area where the member is in contact with the substrate to protect the substrate and to prevent the occurrence of particles and the like.

The turn part 520 is provided below the center of the substrate support part 510 and provides power for rotating the substrate support part 510. The turn unit 520 may use a harmonic driver capable of precisely controlling the substrate support 510 and realizing a high reduction ratio. In the present embodiment, the harmonic driver is used in the turn unit 520, but the scope of the present invention does not need to be limited thereto, and other rotary devices such as precision gears may be used.

The turn unit lifting unit 530 is provided below the turn unit 520 and up / down the substrate support unit and the turn unit 520. In the present embodiment, the turn unit lifting unit 530 is a pneumatic cylinder, but other similar power supply means may be used.

13 and 14, the operation of the turn unit 500 will be briefly described. When the substrate is unclamped from the substrate tray 10, the turn unit 500 is lifted by the turn unit lifting unit 530 to support the fingerboard. The additional substrate is supported, and the turn unit 520 rotates the substrate support part 510 slowly to rotate the direction of the substrate in a desired direction, and the turn unit 500 is lowered and rotated by the turn unit lift unit 530. Is taken out in the next step by the substrate transfer unit 600 described later.

Next, referring to FIGS. 4, 15, and 16, the substrate transfer unit 600 is provided below the substrate tray 10 mounting position of the tray holder unit 200 to be unclamped from the substrate tray 10. It includes a plurality of substrate transfer roller conveyor 610 for transferring the substrate, and a roller conveyor lifting unit 620 is provided in the lower portion of the substrate transfer roller conveyor 610 to up / down the substrate transfer roller conveyor 610.

The substrate transfer roller conveyor 610 is provided below the substrate tray 10 mounting position of the tray holder unit 200 to transfer the unclamped substrate from the substrate tray 10 to the substrate entrance 112 to be taken out in the next process. Substrate transport roller conveyor 610 is a plurality of symmetrical is provided so that the substrate can be transported stably and consists of a roller conveyor to transport the substrate.

The roller conveyor lifting unit 620 is provided on both sides of the substrate transfer roller conveyor 610 to support the substrate transfer roller conveyor 610 and to raise the substrate transfer roller conveyor 610 when the substrate is unclamped to transfer the substrate conveyor roller conveyor. 610 allows the substrate to be stably supported. When the substrate is turned by the turn unit 500, the substrate transport roller conveyor 610 is lowered by the roller conveyor lifter 620, and the substrate is moved together with the substrate take-out roller conveyor 740 described below after the substrate is turned. Transfer to next process.

Meanwhile, referring to FIGS. 6 to 7, 17A to 17D, the moving unit 700 is coupled to the lower portion of the tilt unit 300 and moves in a unit with the tilt unit 300. And an LM guide part 720 provided below the moving panel part 710 to move the moving panel part 710 to a predetermined position, and in a direction in which the substrate tray 10 is mounted on the moving panel part 710. A tray guide roller conveyor 730 for moving the substrate tray 10 to the tray holder unit 200 when the tray holder unit 200 is tilted in a direction crossing the horizontal plane, and the movable panel unit And a substrate take-out roller conveyor unit 740 provided at an end portion in the direction in which the substrate tray 10 on the 710 is mounted to transfer the unclamped substrate from the substrate tray 10 to the outside of the apparatus main body 100.

The moving panel part 710 is provided as a rectangular panel and the tilt support part 310 of the tilt unit 300 is supported by the moving panel part 710 to move integrally with the moving panel part 710. As the moving panel unit 710 moves, the tray unit 200 which is rotatably supported by the tilt unit 300 and the tilt unit 300 also moves.

The LM guide part 720 is provided below the moving panel part 710 to provide power for moving the moving panel part 710 to a predetermined position. The LM guide unit 720 is composed of an LM block 721 and LM rail 121, the LM block 721 is provided on the lower surface of the mobile panel to provide power and position control for the mobile panel to move. The LM rail 121 is provided on the lower frame 120 of the apparatus main body 100 and serves as a guide for the linear movement of the moving panel on the lower frame 120.

The tray guide roller conveyor portion 730 is provided in a direction in which the substrate tray 10 is vertically mounted on the moving panel portion 710, and the substrate tray 10 is moved from the substrate transfer chamber 5 to the tray holder unit 200. It serves as a guide between the substrate transfer chamber 5 and the tray holder unit 200 to be transferred to the mounting position of the.

The tray guide roller conveyor 730 is configured to guide the tray holder unit 200 in both directions in which the substrate tray 10 is mounted on the tray holder unit 200 when the tray holder unit 200 is tilted in a direction crossing the ground. A pair of left and right sides of the holder unit 200 is provided around the rotating shaft. Therefore, the trays are transported from both tray entrances 111 provided in the chamber housing 110 to guide the tray holder unit 200 to minimize the foot print and reduce the tact time. Can be improved.

The substrate take-out roller conveyor 740 is provided at an end portion in the direction in which the substrate tray 10 is mounted on the moving panel portion 710 to transfer the unclamped substrate from the substrate tray 10 to the outside of the apparatus main body 100. . The roller of the substrate take-out roller conveyor 740 is provided to have the same height as the substrate transfer roller conveyor 610 when the substrate tray 10 is in a tilted state parallel to the ground by the tilt unit 300.

The substrate taking out roller conveyor 740 moves the substrate tray 10 to the center portion on the lower frame 120 to tilt side by side with the ground, and the substrate is unclamped from the substrate tray 10 so that the substrate is moved to the next process. In the transfer, the substrate is transported on the extension line of the substrate transfer roller conveyor 610 and the substrate is stably transferred to the next process chamber through the substrate entrance 112 of the chamber housing 110.

The operation of the tray tilt device 1 having such a configuration will be described below.

First, the substrate tray 10 equipped with the substrate after the deposition process is vertically introduced from the substrate transfer chamber 5 through the tray entrance and exit 111 of the chamber housing 110. At this time, the tray holder unit 200 is tilted in a direction crossing the ground by the tilt unit 300, and the moving unit 700 adjusts the tray holder unit 200 to a position where the substrate tray 10 is inserted. Move it.

The substrate tray 10 which is vertically introduced is guided to the mounting position of the tray holder unit 200 along the tray guide roller conveyor 730 on the moving panel portion 710. The substrate tray 10 passes through the tray guide roller conveyor portion 730 to the tray roller conveyor portion 240 of the tray holder unit 200, and the substrate on the tray holder unit 200 is provided by the tray roller conveyor portion 240. The tray 10 is moved to the mounting position. Once the substrate tray 10 enters the tray holder unit 200, the tray end stopper 250 is lifted by the stopper lifter 260, and the substrate tray 10 is trayed by the tray end stopper 250. The substrate tray 10 is stopped at the mounting position on the holder unit 200. When the substrate tray 10 stops at the mounting position of the substrate tray 10 on the tray holder unit 200, the tray holder 220 is lifted by the holder lifting unit 230 to raise the substrate tray 10 to the tray holder unit 200. ) Is held at the mounting position on the

After the substrate tray 10 is gripped by the tray holder unit 200, the tilt unit 300 and the tray holder unit 200 are centered on the lower frame 120 by the LM guide part 720 of the moving unit 700. The substrate tray 10 is tilted in parallel with the ground by the tilt unit 300.

In this state, the substrate transfer roller conveyor 610 of the substrate transfer unit 600 is lifted by the roller conveyor lifter 620 and the substrate is unclamped from the substrate tray 10 by the clamping / unclamping unit 400. . The unclamped substrate is safely supported on the elevated substrate transfer roller conveyor 610, and the substrate transfer roller conveyor 610 is lowered again by the roller conveyor lifter 620, and the substrate transfer roller conveyor 610 is lowered and then turned. The unit 500 rises by the turn unit lifting unit 530.

The elevated turn unit 500 stably supports the substrate by the substrate support part 510 and rotates the substrate by about 90 degrees by the turn part 520. After the substrate is rotated, the turn unit 500 is lowered again by the turn unit elevating unit 530, and the lowered substrate is opened by the substrate transfer roller conveyor 610 in parallel with the ground to open the substrate entrance 112 of the chamber housing 110. Is conveyed toward.

When the substrate is transported in parallel with the ground, the substrate take-out roller conveyor 740 on the moving panel portion 710 takes the substrate out of the substrate transfer roller conveyor 610 and the substrate entrance 112 of the chamber housing 110 on an extension line. The substrate is then completely transferred to the chamber of the next process.

After taking out the substrate, the substrate tray 10 is again tilted in the direction crossing the ground by the tilt unit 300, and the tray holder unit 200 in which the substrate tray 10 is held is moved by the moving unit 700. The tray entrance and exit 111 of the chamber housing 110 is moved to a position where the substrate tray 10 can be taken out.

The tray holder unit 200 moved in accordance with the tray entrance and exit 111 descends the tray holder 220 by the holder lifting unit 230, and the substrate tray 10 includes the tray roller conveyor 240 and the tray guide roller. The conveyor unit 730 is taken out of the tray entrance 111 of the chamber housing 110.

As described above, according to the tray tilting apparatus 1 of the present invention, a composite apparatus capable of clamping / unclamping a substrate on a tray and supplying a substrate by tilting the substrate tray 10 in a vertical logistics substrate manufacturing process is provided. By doing so, it is possible to prevent the breakage of the substrate and to stably supply the substrate, to minimize the foot print, and to improve the tact time.

As described above, the present invention is not limited to the described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the present invention, which will be apparent to those skilled in the art. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

1: tray tilt device
10: substrate tray 20: clamp unit
100: device body 110: chamber housing
111: tray entrance 112: substrate entrance
120: lower frame 121: LM rail
200: tray holder unit 210: holder unit body
220: tray holder 230: holder lifting portion
240: tray roller conveyor 250: tray end stopper
260: stopper lifting portion 300: tilt unit
310: tilt support portion 320: tilt power unit
400: clamping / unclamping unit 410: clamping unit pusher
420: pusher power unit 500: turn unit
510: substrate support 520: turn
530: turn unit lifting unit 600: substrate transfer unit
610: substrate transport roller conveyor 620: roller conveyor lifting unit
700: mobile unit 710: mobile panel
720: LM guide part 730: tray guide roller conveyor part
740: substrate taking out roller conveyor portion

Claims (20)

Device body;
A tray holder unit provided inside the apparatus body and holding a substrate tray;
A tilt unit provided adjacent to the tray holder unit to support the tray holder unit and to adjust an inclination angle of the tray holder unit; And
And a clamping / unclamping unit provided below the tray holder unit to clamp / unclamp the substrate on the substrate tray. The method of claim 1,
And a turn unit rotatably provided below the substrate tray mounting position of the tray holder unit to change a direction of an unclamped substrate from the substrate tray. The method of claim 1,
And a substrate transfer unit provided below the substrate tray mounting position of the tray holder unit to transfer an unclamped substrate from the substrate tray. The method of claim 1,
And a moving unit provided inside the apparatus main body to move the tilt unit within the apparatus main body. The method of claim 1,
The tray holder unit,
A holder unit body for supporting the substrate tray;
A plurality of tray holders provided on the holder unit body to hold the substrate trays; And
And a holder elevating unit provided adjacent to the tray holder to up / down the tray holder. The method of claim 5,
The tray holder unit,
And a tray roller conveyor unit provided on both sides of the holder unit body to move the substrate tray to a mounting position of the holder unit body. The method of claim 6,
The tray holder unit,
A tray end stopper provided at an end portion of the holder unit body on which the substrate tray is mounted to prevent the substrate tray from being separated out of the holder unit body when the substrate tray moves along the tray roller conveyor; And
And a stopper elevating unit for up / down the tray end stopper. The method of claim 1,
The tilt unit,
A pair of tilt supports provided on both sides of the tray holder unit to support the tray holder unit and to be rotatably coupled to the tray holder unit; And
And a tilting power unit provided on a side of the rotating shaft of the tilt supporting unit to provide power for rotating the tray holder unit. The method of claim 8,
The tilt power unit is a tray tilt apparatus, characterized in that the servo motor (Servo motor). The method of claim 1,
The clamping / unclamping unit,
A clamp unit pusher for pressing the clamp unit of the substrate tray below the substrate tray; And
And a pusher power unit for providing power to the clamp unit pusher. The method of claim 10,
The pusher power unit is a tray tilt device, characterized in that the air cylinder (Air cylinder). The method of claim 2,
The turn unit,
A substrate support part provided at a lower portion of the substrate tray mounting position to support the substrate at a lower portion of the substrate;
A turn part connected to the substrate support part to rotate the substrate support part; And
And a turn unit lifting unit provided below the turn unit to turn the substrate support unit and the turn unit up and down. The method of claim 12,
The turn unit is a tray tilt device, characterized in that the harmonic driver (Harmonic driver). The method of claim 12,
And said turn unit lifting unit is a pneumatic cylinder. The method of claim 3,
The substrate transfer unit,
A plurality of substrate transfer roller conveyors provided below the substrate tray mounting position of the tray holder unit to transfer the unclamped substrate from the substrate tray; And
And a roller conveyor lifter provided at a lower portion of the substrate transfer roller conveyor to up / down the substrate transfer roller conveyor. The method of claim 4, wherein
The mobile unit,
A moving panel unit coupled to a lower portion of the tilt unit and integrally moving with the tilt unit; And
And a LM guide part provided below the moving panel part to move the moving panel part to a predetermined position. The method of claim 16,
The mobile unit,
A tray guide roller conveyor unit which is provided on the moving panel part in the direction in which the substrate tray is mounted and transfers the substrate tray to the tray holder unit when the tray holder unit is tilted in a direction crossing the horizontal plane; Tray tilt apparatus comprising a. The method of claim 17,
The tray guide roller conveyor unit,
The tray holder is provided on both sides of the tilt unit in both directions when the tray holder unit is tilted in any direction intersecting the horizontal plane and when the tray tray is rotated 180 degrees and tilted in the opposite direction. Tray tilt device characterized in that the transfer to the unit. The method of claim 16,
The mobile unit,
And a substrate take-out roller conveyor unit which is provided at an end of the substrate tray on the movable panel portion in a direction in which the substrate tray is mounted and transfers the unclamped substrate from the substrate tray to the outside of the apparatus main body. The method of claim 1,
The apparatus main body,
A chamber housing having an outer wall at least one tray entrance through which the substrate tray enters and a substrate entrance through which the unclamped substrate enters and exits; And
Tray tilt device, characterized in that it comprises a lower frame for supporting the chamber housing.

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