KR20060104030A - Chemical filters using metallic compounds and preparation method thereof - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical filter for removing gaseous substances such as ammonia and acid gas contained in various chemicals in the air, in particular, outside air introduced into a semiconductor clean room, and includes a metal oxide, a metal hydroxide, a metal salt, or a mixture thereof. 10 to 99% by weight of a metal compound comprising; And it provides an adsorbent for a chemical filter comprising an organic binder, an inorganic binder or 1 to 90% by weight thereof.

According to the present invention, by producing a chemical filter adsorbent using a metal compound comprising a metal oxide, a metal hydroxide, a metal salt or a mixture thereof, noxious gas without desorption of the adsorbed gas by the strong chemical bonding force of the metal component and the noxious gas This has the effect of increasing the removal efficiency and life of the chemical filter.

Metal compound, molding, chemical filter, double trapezoid

Description

Chemical Filters Using Metallic Compounds and Preparation Method Thereof}

1 is a view showing a manufacturing method of an adsorbent for a chemical filter according to the present invention,

Figure 2 is a view showing an adsorbent for a chemical filter of the tablet form prepared according to Example 1 according to the present invention,

3 is a perspective view showing a chemical filter according to the present invention,

4 is a block diagram showing a chemical filter according to the present invention,

5 is a block diagram showing an adsorption layer support of a chemical filter according to the present invention,

6 is a cross-sectional view showing a chemical filter according to the present invention;

7 is a perspective view showing a guide plate of the chemical filter according to the present invention,

8 is a view showing the removal efficiency of sulfur oxides using the chemical filter according to the present invention,

9 is a view showing the ammonia removal efficiency using the chemical filter according to the present invention,

10 is a view showing the formaldehyde removal efficiency using the chemical filter according to the present invention,

11 is a view showing the ozone removal efficiency using the chemical filter according to the present invention,

12 is a view showing the results of a differential pressure test of a double trapezoidal chemical filter filled with an adsorbent having a tablet form according to the present invention.

<Description of Symbols for Main Parts of Drawing>

2: frame 2 ': upper frame, lower frame

2 ": side frame 4: adsorption layer

6: adsorption layer support 8: guide plate

10: guideline 12: first mesh network

14 nonwoven fabric 16 second mesh network

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical filter for filtering and removing chemical substances in air. More specifically, the present invention relates to a chemical filter for semiconductors, precision electronic components, pharmaceuticals, and food manufacturing plants. The present invention relates to an adsorbent containing a metal compound for filtering and removing harmful gases in the air introduced into the purifier, a chemical filter using the same, and a manufacturing method thereof.

Semiconductor manufacturing processes, precision products or electronics manufacturing processes are generally manufactured in clean rooms without contaminants, and the degree of contamination of these clean rooms is an important factor directly affecting the yield of the manufactured products.

In addition, recent semiconductor devices have been highly integrated, and the diameter of wafers for manufacturing such semiconductor devices has also increased, so that in order to prevent defects of the wafers and increase production yields, Cl ₂ , HCl, NO x, Acidic gases such as SOx and H ₂ S, basic gases such as NH ₃ , NMP, and trimethylamine, which exist in the gas phase, and volatile organometallic compounds (VOCs) should be present in the air in the form of particulates to block the inflow into the clean room. .

Thus, various methods for removing contaminants such as the acid gas, basic gas, and volatile organometallic compounds have been used to overcome the above-mentioned problems. As a representative method, when the concentration of the contaminants is low, up to ppb. There is a method of removing contaminants using a chemical filter installed in a clean room.

On the other hand, activated carbon and impregnated activated carbon, which are mainly used to remove contaminants such as acid gas and basic gas among the substances contained in the harmful gas, has a problem of secondary pollution in which dust is generated by impact and abrasion. The adsorption reaction is based on physical bonding rather than chemical bonding between activated carbon and the target gas. Due to the weakness of the binding strength between the activated carbon and the gas, when a high concentration of gas enters the chemical filter filled with activated carbon, the difference in concentration in the inlet gas and the activated carbon pores Gas is adsorbed into the pores of activated carbon, but when a low concentration or general air is introduced, the gas concentration in the activated carbon pores is higher than the gas concentration of the air to be introduced, so the gas adsorbed in the activated carbon pores is degassed and passes through the chemical filter. There is a problem that the concentration of contaminants in the air increases.

Here, the impregnated activated carbon is obtained by impregnating acidic and alkaline chemicals such as KOH, KMnO ₄ , H ₃ PO ₄ on activated carbon, or Fe (NO ₃ ) ₂ , Cu (NO ₃ ) ₂ , Mn (NO ₃ ), and the like. This means that metal compounds such as Fe ₂ O ₃ , CuO, and MnO ₂ are deposited in the pores of activated carbon by impregnating metal salts and calcining at a temperature of 300 ° C. or higher. For example, after dissolving 10 g of KOH in distilled water, the solution The adsorbed activated carbon was prepared by contacting activated carbon with the activated carbon to absorb the solution into the activated carbon pores, drying the activated carbon absorbed by the solution, and distilled water to evaporate distilled water so that only KOH remains in the activated carbon pores. It is called KOH 10% impregnated activated carbon.

Such impregnated activated carbon removes harmful gases by physical and chemical bonding by attaching acid, alkaline substances or metal salts to activated carbon. When the amount of the impregnated substance exceeds a certain level, the adsorption performance decreases due to the reduction of specific surface area of the activated carbon. There is a limit to the amount of pollutants that can be attached to the activated carbon, and the impregnated substances induce chemical bonding of harmful gases, but the physical bonding of the activated carbon itself is superior to chemical bonding, so it is effective to remove harmful gases in high concentrations, but harmful gases If the concentration is low, there is a problem that can not exhibit sufficient performance.

In particular, in the case of impregnated activated carbon impregnated with acid and alkali, harmful gases are removed by an acid-base neutralization reaction, and according to the acid-base neutralization reaction, H ⁺ and OH ⁻ ions have a certain amount of water to be active. However, if the dry air is continuously supplied to the impregnated activated carbon, there is a problem that the water in the activated carbon is evaporated and the activity of the impregnated activated carbon is rapidly decreased, as well as the acid and alkali between the impregnated active component and the contaminant. As the salt is generated in the pores and the surface of the activated carbon by the neutralization reaction, the performance of the filter decreases and the pressure loss increases as the reaction time increases.

Recently, new chemical filters using small particles such as ion exchange resins and activated carbon fibers have been proposed in order to overcome problems such as deterioration in adsorption performance, dust generation and pressure loss due to impregnated activated carbon. .

For example, Korean Patent Application No. 2002-0072666 discloses a chemical filter manufactured in the form of a curved chemical structure using an ion exchange resin, and the chemical filter using the ion exchange resin can be ion exchanged with a polar gas. The chemically treated cation exchange resin or anion exchange resin can be attached to the metal mesh to secure sufficient gas flow through continuous pores, thereby reducing the pressure loss and increasing the removal efficiency.

However, the chemical filter using the ion exchange resin has to be uniformly distributed in the metal mesh as well as the adsorption performance of the ion exchange resin itself in order to have excellent harmful gas removal efficiency, the thickness of the support for filling the ion exchange resin There is a problem in that it is difficult to manufacture a chemical filter using an ion exchange resin because it is very thin, over several millimeters (mm).

In addition, another problem of the chemical filter using the above-described ion exchange resin is an adhesive such as polyvinyl acetate (PVA), ethyl vinyl acetate (EVA), urethane, polypropylene, polyethylene, urethane, etc. to attach the ion exchange resin to the support. As the adhesive is coated on the ion exchange resin, it blocks the contact between the ion exchange resin and the noxious gas, adheres the ion exchange resin to the support, or attaches the mesh network to which the ion exchange resin is adhered. Since the adhesive used for fixing is made of an organometallic compound, there is a problem in that volatile gas components are discharged from the adhesive according to the use of the adhesive.

In addition, in the chemical filter using the ion exchange resin, if the ball-type ion exchange resin is not uniformly distributed in the metal mesh, the inflow air flows to the side where the ion exchange resin is filled relatively, so that the adsorption of the ion exchange resin is carried out. There may be a problem that the performance is sharply reduced, and the amount of adsorbent that can adsorb harmful gas is reduced by desorbing the adsorbent from the support by vibration or physical impact during transport and installation of the filter using the ion exchange resin. Due to this, the flow of inflow gas to the part from which the adsorbent is detached is biased, and thus there is a problem that the harmful gas removal efficiency of the chemical filter using the ion exchange resin is reduced.

A filter manufactured by attaching a metal oxide powder having a toxic gas removal activity in addition to an ion exchange resin to a metal or ceramic support, for example, Korean Patent Application No. 2004-007440 discloses a layered filter using a metal oxide. The filter using oxide is a wet powder spray of a suspension containing a metal oxide on the support to attach the suspension, vaporize the solvent, and attach the metal oxide to the support through the sintering process. As a result, the removal efficiency can be expected to increase.

However, the filter manufactured by attaching the metal oxide to the support by a wet powder spray method is effective in a relatively small air volume and a small physical impact applied to the filter. Under conditions of air volume, vibration, and physical shock, there is a problem in that desorption of the metal oxide powder occurs over time. In addition, when the amount of the metal compound exceeds a certain amount when attached to the support, metal oxide desorption is severe and the pressure loss increases rapidly. Therefore, the amount of metal oxide that can be attached to the support is extremely limited. Therefore, the metal oxide powder is directly formed. Compared to the method of attaching the metal oxide to the support has a short filter life because the amount of the metal oxide that can adsorb the harmful gas is short.

The present invention was derived to overcome the above-mentioned problems, the metal compound, the metal compound so as to solve the problem of desorption of harmful gases and excellent removal efficiency of harmful gases at low concentrations by the chemical bonding strength of the metal components and harmful gases of the metal compounds There is a technical problem to provide a chemical filter adsorbent comprising a hydroxide, a metal salt or a mixture thereof and an organic binder, an inorganic binder or a mixture thereof.

In addition, the present invention in addition to the method of applying the adsorbent for the chemical filter to the adhesive and the support is molded in the form of balls, pellets, tablets, etc. by filling the chemical filter to maximize the amount of the active ingredient with the ability to remove harmful gases removed Improve the efficiency and filter life, reduce the pressure loss by molding the adsorbent in various sizes and shapes, solve the problem of wear and dust generation of the adsorbent by physical impact, and use the adhesive which may cause secondary pollution Instead, there is a technical problem to provide a chemical filter comprising filling the adsorbent inside the filter.

In one aspect, the present invention is characterized in that it comprises 10 to 99% by weight of a metal compound comprising a metal oxide, a metal hydroxide, a metal salt or a mixture thereof and 1 to 90% by weight of an organic binder, an inorganic binder or a mixture thereof. It provides a chemical filter adsorbent.

In another aspect, the present invention provides an adsorption layer support having a trapezoidal jig structure and filled with an adsorbent for a chemical filter therein; Two pairs of guide plates fastened to the upper and lower ends of the adsorption layer support such that the adsorption layer support has a trapezoidal jig-shaped structure; An upper frame and a lower frame to which the pair of guide plates are respectively inserted and seated; And it provides a chemical filter comprising two or more side frames connected to the upper frame and the lower frame.

Chemical filter adsorbent according to the present invention is harmful to the gas phase generated in general industrial plants such as gaseous harmful gases, petrochemicals, steelmaking, steelmaking, power plants, etc. generated during the manufacturing process of semiconductors, precision electronic components, pharmaceuticals and food manufacturing It is intended to be applied to the chemical filter used to remove gas and harmful gases in the gaseous phase introduced into the air-conditioning system and various air-conditioning systems of various buildings or industrial fields, and any adsorbent that can achieve this purpose may be applied to the adsorbent. Yes.

On the other hand, the metal compound constituting the adsorbent for the chemical filter according to the present invention can be composed of a metal oxide, a metal hydroxide, a metal salt, or the like alone or mixed, specifically the material constituting the metal oxide, metal hydroxide, metal salt The metal compound formed by mixing at least two is referred to as "composite metal compound". In this case, the complex metal compound is included in the metal compound.

The material constituting the metal compound according to the present invention may be any metal compound commonly used in the art, but preferably Fe ₂ O ₃ , Fe ₃ O ₄ , CuO, MnO ₂ , SrO, SrO ₂ , metal oxides such as CaO, zeolite, metal hydroxides such as FeO (OH), Sr (OH) ₂ , Ca (OH) ₂ , and metal salts such as FeSO ₄ , CuSO ₄ , SrCO ₃ , CaCO ₃ and the like. It is preferable to use the material, and the amount of the use is preferably 10 to 99% by weight per weight of the adsorbent for the chemical filter.

In addition, the metal compound according to the present invention can be used by mixing the activated carbon as necessary, in this case, the mixing ratio of the metal compound and the organic-inorganic binder and activated carbon is the metal per weight of the total metal compound and the mixture of the organic-inorganic binder and activated carbon It is preferable to use 10 to 90% by weight of the compound, an organic-inorganic binder, and 10 to 90% by weight of activated carbon.

In a particular embodiment, the metal compound according to the present invention is a metal oxide such as Fe ₂ O ₃ , Fe ₃ O ₄ , CuO, MnO ₂ , SrO, SrO ₂ , CaO, zeolite, FeO (OH), Sr (OH) ₂ , a mixture of at least two metal compounds such as metal hydroxides such as Ca (OH) ₂ , and metal salts such as FeSO ₄ , CuSO ₄ , SrCO ₃ , and CaCO ₃ , and has a specific weight ratio of 50:50. It is preferable to use a mixture of iron compound and strontium having a weight, a mixture of copper compound and iron compound having a weight ratio of 80:20, or a mixture of zeolite and manganese oxide having a weight ratio of 60:40, and the amount of the adsorbent for the entire chemical filter is used. It is preferable to use 10 to 99% by weight per weight.

At this time, the mixture of the iron compound and strontium shows an excellent effect to remove the acid gas, such as Cl ₂ , HCl, NOx, SOx, HF, H ₂ S specifically contained in the harmful gas, copper compound and iron compound The mixture of has a better effect in removing basic gases such as NH ₃ , NMP, trimethylamine, etc. contained in the harmful gas, the mixture of zeolite, 13X zeolite having a pore size of 1.3mm and manganese oxide It has a better effect in removing volatile organic compounds such as formaldehyde, benzene, xylene, toluene, acetic acid, chloroform and O ₃ gas contained in harmful gases. However, the mixing ratio of the composite metal compound is a mixture of a metal compound having activity with respect to the target gas to be treated, and the above mixing ratio can be changed within a range acceptable to those skilled in the art.

The binder according to the present invention is to be mixed with the metal compound to increase the binding force between the metal compound, any of the binders commonly used in the art can be used, but preferably methyl cellulose (methyl cellulose), dextrin organic binders such as dextrin, poly vinyl alcohol, graphite, and / or alumina sol, colloidal silica, aerosol, bentonite, and the like. It is preferable to use an inorganic binder, and the amount of the inorganic binder may be 1 to 90% by weight based on the total weight of the adsorbent.

On the other hand, the manufacturing method of the chemical filter adsorbent according to the present invention having the above-described configuration is as follows.

First, metal oxides such as Fe ₂ O ₃ , Fe ₃ O ₄ , CuO, MnO ₂ , SrO, SrO ₂ , CaO, zeolite, FeO (OH), Sr (OH) ₂ , Ca (OH) _2, etc. Metal compounds such as metal hydroxides, metal salts such as FeSO ₄ , CuSO ₄ , SrCO ₃ and CaCO ₃ alone or 10 to 99% by weight of at least two or more metal compounds selected from them, and organic binders and / or inorganic binders 1 to 90% by weight. % To 1 to 20% by weight of ultrapure distilled water relative to the total weight of the adsorbent is mixed at room temperature and stirred to prepare a mixture.

The mixture is then dried in a drying furnace maintained at a temperature of about 100 ° C. for 1-2 hours, preferably 1 hour 30 minutes, and then aged at room temperature for about 4 hours.

The dried mixture is then shaped into a desired shape, such as granular, ball, pellet or tablet, depending on the application and method of use to prepare the adsorbent. .

Here, the form of the chemical filter adsorbent may be manufactured in any form, such as granular, ball, pellet or tablet form, but there is no surface wear of the adsorbent and effective contact area with harmful gas. It is preferable that the tablet is formed in the form of a tablet which can increase the adsorption performance by increasing, and preferably, the tablet has a particle size of 3 to 8 mm.

In addition, the molding method of the dried mixture may be used as long as it is a molding method commonly used in the art, but preferably extrusion molding, and more preferably tableting the mixture using a tableting machine good.

On the other hand, the adsorbent prepared through the above-described process to prepare a chemical filter by filling in a separate case without using an adhesive that may cause secondary pollution to apply the adsorbent to the support bar, the chemical filter is a macroscopic view It consists of a frame constituting the appearance of the chemical filter, the adsorption layer support provided in the inside of the frame is filled with the adsorbent, guide plate for determining the shape of the adsorption layer support.

Hereinafter, the chemical filter will be described in detail with reference to the accompanying drawings. However, the following description is only for describing the present invention in detail and does not limit the scope of the present invention by the following description.

Figure 3 is a perspective view showing a chemical filter according to the present invention, Figure 4 is a block diagram showing a chemical filter according to the present invention, Figure 5 is a block diagram showing an adsorption layer support of the chemical filter according to the present invention, Figure 6 is a present invention Sectional drawing which shows the chemical filter which concerns on FIG. 7 is demonstrated together as a perspective view which shows the guide plate of the chemical filter which concerns on this invention.

As shown in FIGS. 3 to 7, the chemical filter according to the present invention includes a frame 2 constituting an external appearance of a chemical filter having a quadrangle from a macroscopic perspective, and is provided inside the frame 2 to fill an adsorbent. And a guide plate 8 for holding the adsorption layer support 6 and the adsorption layer support 6 in the form of a trapezoidal jig.

Here, the material of the frame (2), the mesh net (12, 16) and the guide plate (8) constituting the chemical filter is made of non-ferrous metals for corrosion protection against acid gas contained in the target gas to be treated. Good to do.

On the other hand, the frame 2 according to the present invention constitutes the appearance of the chemical filter, the chemical filter is configured to have a square, the upper and lower frames (2 ') and the side frame to facilitate the disassembly and assembly of the chemical filter (2 ").

In this case, the upper and lower frames 2 'are provided with a space in which the guide plate 8 is inserted therein.

The adsorption layer supporter 6 according to the present invention allows the target gas to be treated to pass through and removes the material to be treated. The adsorption layer supporter 6 may be filled with a chemical filter adsorbent inside the adsorption layer supporter 6. In order to provide a space by installing a pair so as to space the first mesh network 12 having a diameter smaller than the size of the adsorbent at a predetermined interval to secure space, and filled with the adsorbent for the chemical filter in the space secured The nonwoven fabric 14 is formed on the outer surface of the pair of first mesh nets 12 so as to form the layer 4 and to prevent the adsorbent powder and dust generated from the adsorbent layer 4 filled with the adsorbent from being discharged to the outside. ), And the second mesh net 16 is connected to the outer surface on which the nonwoven fabric 14 is installed to support the nonwoven fabric 14.

Here, the mesh diameter of the second mesh net 16 may be larger than the mesh diameter of the first mesh net 12.

On the other hand, the shape of the adsorption layer support 6 having the above-described configuration is the first mesh network 12, the nonwoven fabric 14 and the second mesh sequentially formed on both sides based on the adsorption layer 4 filled with the adsorbent The net 16 is formed in the shape of a trapezoidal jig, and the trapezoidal jig has a trapezoidal jig shape which is fastened to upper and lower portions of the first mesh net 12, the nonwoven fabric 14, and the second mesh net 16. It is formed by a guide plate 8 having a guideline 10.

As described above, the guide plate 8 is for forming and maintaining the shape of the adsorption layer support 6, and the upper and lower portions of the adsorption layer support 6 with two guide plates 8 in pairs. Is installed on both sides of the side, one side in contact with the adsorption layer support 6 is provided with a guide line 10 having a trapezoidal jig shape, each formed on the guide plate 8 of the two pairs The guideline 10 is formed so that the trapezoidal shapes correspond to each other.

Here, the guide plate 8 having the guide line 10 is seated and fixed inside the upper frame 2 'and the lower frame 2' constituting the frame 2, thereby providing the adsorption layer support ( 6) is fastened to the frame (2) to be fixed.

Meanwhile, in the chemical filter according to the present invention, the adsorption layer support 6 and the guide plate 8 are connected to the upper and lower frames 2 ', and finally the side frames 2 "are attached to the upper and lower frames ( 2 ') is connected to the iron plate of the Z bending bending (Z bending) type to be fastened, the jet bending type to increase the physical strength and stability of the filter frame refers to the iron plate bent in the' Z 'shape.

As such, fixing the frame 2 by the jet bending according to the present invention is superior in strength and stability against physical impact than the frame finished in a curved form in a flat iron plate or a 'b' shape and flows into the chemical filter. In the strong gas flow, there is an advantage that the skeleton of the chemical filter can be maintained as it is, and the volatile gas generated by the adhesive by fixing the frame 2 without the use of conventional adhesives such as urethane and epoxy chemicals, etc. It is possible to suppress the generation of secondary pollutants such as.

On the other hand, the chemical filter according to the present invention may be installed and used alone in the movement path of the target gas to be treated, it may be used by installing a plurality in the form of a tray if necessary.

Hereinafter, the present invention will be described in detail through examples. However, the following examples are only for illustrating the present invention in detail and are not intended to limit the scope of the present invention by these examples.

<Example 1>

Preparation of Adsorbent

Iron compound (FeO (OH), Fe ₂ O ₃ ) [Cocat, Korea] 180g, Strontium compound (Sr (OH) ₂ ) [Internal and external trading company, Korea] 100g, Calcium compound (Ca (OH) ₂ ) 80g, Copper compound (CuSO ₄ ) [Evergreen Chemical, Korea] 180g, Manganese Oxide (MnO ₂ ) [Internal & External Business, Korea] 180g and Zeolite [Internal & External Business, Korea] ] An organic / inorganic binder containing 40 g, 50 g of alumina sol [internal and external superior, South Korea] and 10 g of graphite [internal and external superior, South Korea] was mixed with 40 g of ultrapure distilled water using a stirrer at room temperature.

Then, the mixture was dried in a drying oven (Daeju Science, Korea) at a temperature of about 100 ° C. for about 1 hour and 30 minutes and then naturally aged for about 4 hours.

Then, the granulation was performed in the form of 16 to 20 mesh particles larger than the initial particle size in order to improve the formability of the tablet form adsorbent after the natural ripening is finished.

Then, the granulated adsorbent was formed into a tablet-type adsorbent having a particle size of 3 to 8 mm using a tableting machine having a 35 to 46 pin structure [Sejong Pharmatech, Korea], and then dried for about 3 hours at 120 ° C. in a drying furnace. It was dried to a degree to prepare an adsorbent for the final chemical filter.

As a result, the adsorbent for chemical filters produced in FIG. 2 was shown.

<Example 2>

Implemented in the same manner as in Example 1, but instead of the harmful gas active material and organic and inorganic binders, iron compounds (FeO (OH), Fe ₂ O ₃ ) [Cocat, Korea], Strontium compounds (Sr (OH) ₂ ) Corporation, South Korea], a mixture of methyl cellulose [Samsung Fine Chemical, South Korea] in a weight ratio of 45:45:10 ratio was used.

<Example 3>

The same method as in Example 1, except that instead of the harmful gas active material and organic and inorganic binders, copper compounds (CuSO ₄ ) [evergreen chemistry, Korea], iron compounds (FeO (OH), FeSO ₄ ) [Cocat, Korea], A mixture of methyl cellulose [Samsung Fine Chemical, South Korea] at a weight ratio of 70:20:10 was used.

<Example 4>

The same method as in Example 1, except that instead of harmful gas active substances and organic and inorganic binders zeolite [internal and external superiors, Korea], manganese oxide [internal and external superiors, Korea], aerosol [internal and external superiors, Korea], graphite [internal and external superiors, Korea] was used as a mixture of the ratio of weight ratio 60: 30: 8: 2.

Example 5

Manufacture of chemical filter

A pair of 3640 × 560 × 0.2mm mesh nets (Daebo, Korea) with a diameter of 0.85mm (20mesh) and a nonwoven fabric [Daebo, Korea] of the same size as the mesh net are installed on both sides of the mesh net and then trapezoidal jig It was connected between a pair of guide plates having a shape.

Next, 3.2L of an adsorbent for a chemical filter manufactured according to Example 1 was filled into a 3640 × 560 × 02mm mesh mesh having a diameter of 0.85mm (20mesh), Daebo, Korea. Configured.

Then, the guide plates provided on the upper and lower portions of the adsorption layer support were fixed to the inside of the upper and lower frames [Wookyung Industry, Korea] of size 1164 × 18mm, respectively.

Then, the upper and lower frames were jet-bent fixed to the left and right frames to prepare a 1200 × 600 × 80 mm chemical filter.

Here, the material of the frame, the mesh net, the guide plate constituting the chemical filter used aluminum made of non-ferrous metal.

Comparative Example 1

Preparation of Impregnated Activated Carbon Impregnated with Granulated Activated Carbon.

First, 50 g of calcium hydroxide (KOH) [Duksan Pharmaceutical, Internal & External Corporation] corresponding to 5 wt% of 1 kg of diameter 4mm, length 1-2 mm, and pelletized granular activated carbon [Samcheonli activated carbon, Korea] is dissolved in 500ml of distilled water. Prepared.

Then, 500 ml of the prepared impregnated solution was added dropwise to lkg of granulated activated carbon using a burette to allow the precipitated solution to be absorbed into the activated carbon. At this time, the activated carbon was stirred so that the impregnated solution was uniformly absorbed into the activated carbon when the precipitation solution was dropped.

Then, the impregnated solution present in the activated carbon absorbing the impregnated solution is left for about 3 hours to be uniformly absorbed into the surface of the activated carbon and the pores of the activated carbon, and then dried at a temperature of about 150 ° C. to remove moisture present in the activated carbon Removed.

Comparative Example 2

In the same manner as in Comparative Example 1, 50g of phosphoric acid (H ₃ PO ₄ ) [Duksan Pharm. Korea] was used instead of 50g of calcium hydroxide (KOH) according to Comparative Example 1.

Comparative Example 3

In the same manner as in Comparative Example 1, 50g of potassium permanganate (KMnO ₄ ) [Duksan Pharmaceutical Co., Ltd. Korea] was used instead of 50g of calcium hydroxide (KOH) according to Comparative Example 1.

Experiment

Compressive strength of adsorbent

In order to measure the strength of the adsorbents prepared according to Example 1 and Comparative Example 1 according to the present invention, the compressive strength was measured using a compressive strength meter [Model 1308, AIKOH, Japan].

The results are shown in Table 1.

Compressive strength of adsorbent Example 1 Comparative Example 1 Compressive strength (kgf / cm ² ) 205 69

As shown in Table 1, since the strength of the tablet-type adsorbent by tableting according to Example 1 was superior to that of the pellet-form adsorbent by extrusion molding according to Comparative Example 1, The problem of dust generation could be solved.

Acid gas adsorption performance

The inside of the glass reactor having a diameter of 36 mm and a height of 200 mm having an inlet and an outlet on the other side facing each other by crushing the adsorbent prepared according to Example 2 and the adsorbent prepared according to Comparative Example 1 to 10 to 14 mesh sizes. 100 cm ³ was charged respectively.

Then, as an inlet gas, chlorine (Cl ₂ ), hydrogen chloride (HCl), nitrogen oxides (NOx), sulfur oxides (SOx), hydrogen sulfide (H ₂ S) and 0.01 vol% (100 ppm) of hydrogen fluoride at a concentration of 1 vol% HF) was introduced into each of the above adsorption reactors.

Here, the temperature of the inlet gas is 20 to 25 ℃, linear velocity is 98cm / min, space velocity is 600hr^-OneIt was.

Then, the concentration of acid gas flowing out of the outlet of the adsorption reactor was measured by a detection tube [Gastech, Japan]. At this time, the time when the concentration of the leaking acid gas was 10ppm was set as the breakthrough point.

The results are shown in Table 2.

Acid gas adsorption capacity Acid gas throughput (mmol-acid gas / g-adsorbent) Example 2 Comparative Example 2 Cl ₂ 3.57 2.68 HCl 8.93 2.5 NOx 2.38 1.61 SOx 2.80 1.79 H ₂ S 11.9 2.95 HF 7.14 3.13

As shown in Table 2, the acid gas adsorption capacity of the adsorbent having the metal compound according to Example 2 was higher than that of the activated carbon impregnated with the basic material according to Comparative Example 2. The filter's life was shown to be longer.

Basic Gas Adsorption Performance

The adsorbent prepared according to Example 3 and the adsorbent prepared according to Comparative Example 2 were crushed into 10 to 14 mesh sizes to charge 100 cm ³ to the adsorption reactor, respectively.

Then, 0.3 to 1.2mm ball (ball) in the form of -SO ₃ ^- of a 100cm ³ (sulfonate) a strong acid cation exchange resin having a heat exchanger [Samyang Corporation, Korea] was charged to another reactor adsorption.

Then, 0.5 vol% of ammonia (NH ₃ ), NMP (N-methyl-2-pyrolidone), and trimethylamine (TMA) were introduced into the respective adsorption reactors as inflow gases. Here, the temperature of the inlet gas was 20 to 25 ° C., the linear velocity was 98 cm / min, and the space velocity was 600 hr ⁻¹ .

Then, the concentration of basic gas flowing out of the outlet of the adsorption reactor was measured by a detection tube [Gastech, Japan]. At this time, the time when the concentration of the leaking basic gas was 20 ppm was set as the breakthrough time.

The results are shown in Table 3.

Basic Gas Adsorption Capacity Basic gas throughput (mmol-basic gas / g-adsorbent) Example 3 Comparative Example 3 Ion exchange resin NH ₂ 8.84 1.39 7.30 NMP 7.37 3.75 6.00 TMA 8.04 4.46 6.26

As shown in Table 3, the metal compound is superior to the adsorption capacity of the basic gas of the adsorbent having the metal compound of Example 3 as the composition of the strongly acidic ion exchange resin and the activated carbon impregnated with an acidic substance (Comparative Example 3 and ion exchange resin). The chemical filter filled with the adsorbent prepared by the polymer was found to have a longer life.

Adsorption Performance of Volatile Organometallic Compounds and Ozone

The adsorbent prepared according to Example 4 and the adsorbent prepared according to Comparative Example 3 were broken into 10 to 14 mesh sizes to charge 100 cm ³ to the adsorption reactor, respectively.

Then, as an inlet gas, formaldehyde (HCHO), acetaldehyde (CH ₃ CHO), benzene, toluene, xylene, acetic acid (CH ₃ COOH), and chloroform (0.1 vol%) were used. Volatile organic metal compounds (VOC) such as CH ₃ Cl) and 0.04 vol% (400 ppm) of ozone (O ₃ ) were introduced into the respective adsorption reactors.

Here, the temperature of the inlet gas is 20 to 25 ℃, linear velocity is 98cm / min, space velocity is 600hr^-OneIt was.

Then, the concentrations of volatile organometallic compounds and ozone gas flowing out to the outlet of the adsorption reactor were measured by a detection tube [Gastech, Japan]. At this time, the time when the concentration of the leaked volatile organometallic compound is 50ppm, the concentration of ozone gas is 3ppm as the breakthrough point.

The results are shown in Table 4.

Volatile Organic Metal Compounds and Ozone Adsorption Capacity Volatile Organic Metal Compounds and Ozone Throughput (mmol-gas / g-Adsorbent) Example 4 Comparative Example 3 HCHO 0.23 0.06 CH ₃ CHO 0.48 0.18 Benzene 0.85 1.39 Toluene 1.70 2.48 Xylene 1.14 2.01 CH ₃ COOH 3.12 1.98 CH ₃ Cl 0.17 0.10 O ₃ 5.96 2.45

As shown in Table 4, the VOCs and ozone adsorption capacities of the adsorbents having activated carbon and metal compounds impregnated with KMnO ₄ having strong oxidizing power were shown in Comparative Example 3 for larger molecules such as benzene, toluene, and xylene. The adsorption performance of activated carbon was good, but in the case of aldehyde, acetic acid and ozone, the adsorption performance of the metal compound according to Example 4 was excellent. In particular, in the case of VOCs and ozone, unlike acid and basic gases, the adsorption performance of impregnated activated carbon is lower than that of non-impregnated activated carbon (general activated carbon without chemicals). Was found to be more effective.

Moreover, although Comparative Example 3 was found to be better than that of Example 4 with respect to some volatile organic metal compounds such as benzene, toluene, and xylene, the adsorption performance of the metal compound according to Example 4 was comparative Example 3 Compared to the activated carbon according to the present invention is not significantly lower, in order to treat the above-mentioned specific volatile organic metal compound indicates that the mixture of activated carbon in the chemical adsorbent according to the present invention can be considered.

Sulfur oxide removal efficiency of chemical filter

After installing the adsorbents prepared in Example 2 and Comparative Example 1 in the chemical filter prepared according to Example 5, sulfur oxides were introduced into each chemical filter to remove sulfur oxides (SO ₂ ) of the chemical filter. It was confirmed.

Here, the thickness of the chemical filter was 40mm, the concentration of sulfur oxide (SO ₂ ) [Seonggang Special Gas, South Korea] was 20ppm, the temperature of the inlet gas containing sulfur oxide is 20 to 25 ℃, relative humidity 40 to 50 % And linear velocity were 0.2 m / s.

On the other hand, the concentration of the gas passing through the chemical filter was measured using FT-IR [MIDAC, Italy].

The result is shown in FIG.

Ammonia Removal Efficiency of Chemical Filter

The chemical filter was carried out in the same manner as the sulfur oxide removal efficiency experiment, but instead of the adsorbents according to Example 2 and Comparative Example 1 used the adsorbents according to Example 3 and Comparative Example 2, instead of the inlet gas containing sulfur oxides Ammonia [Seongkang Special Gas, Korea] was introduced to measure the ammonia (NH3) removal efficiency of the chemical filter. Here, the concentration of ammonia was 20 ppm.

The result is shown in FIG.

Formaldehyde Removal Efficiency of Chemical Filters

In the same manner as the sulfur oxide removal efficiency experiment of the chemical filter, but instead of the adsorbents according to Example 2 and Comparative Example 1 used the adsorbents according to Example 4 and Comparative Example 3, instead of the inlet gas containing sulfur oxides Formaldehyde [Duksan Chemical, Korea] was introduced to measure the formaldehyde removal efficiency of the chemical filter. Here, the concentration of formaldehyde was 20 ppm.

The result is shown in FIG.

Ozone removal efficiency of chemical filter

In the same manner as the sulfur oxide removal efficiency experiment of the chemical filter, but instead of the adsorbents according to Example 2 and Comparative Example 1 used the adsorbents according to Example 4 and Comparative Example 3, instead of the inlet gas containing sulfur oxides The ozone removal efficiency of the chemical filter was measured by introducing ozone [Seongkang Special Gas, Korea]. Here, the concentration of ozone was 20 ppm.

The result is shown in FIG.

Pressure loss measurement of chemical filter

Manufactured in the same manner as in Example 5, but installed in the chemical filter of 600 × 440 × 40mm size so that it can be mounted on the pressure loss experiment apparatus installed in each of the adsorbents prepared according to Example 1 and Comparative Example 1 By introducing air into the chemical filter, the pressure loss (differential pressure) of the chemical filter according to the linear velocity of the inlet air was confirmed. The chemical filter with the adsorbent was mounted on a pressure loss test apparatus manufactured by an acrylic square column of 610 mm in width, 450 mm in length, and 1000 mm in length, and then air was injected into the test apparatus inlet to measure the differential pressure at the front and rear ends of the chemical filter. The linear velocity of the inlet air was 0.2 to 1.0m / s, and the pressure loss was measured using a differential pressure transmitter (Differential pressure transmitter, Ulfa technology, Korea).

The result is shown in FIG.

As described above, those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or essential features. Therefore, the above-described embodiments are to be understood as illustrative in all respects and not as restrictive. The scope of the present invention should be construed that all changes or modifications derived from the meaning and scope of the appended claims and their equivalents, rather than the detailed description, are included in the scope of the present invention.

The present invention provides a chemical filter adsorbent using metal oxides, metal hydroxides, metal salts, or mixtures thereof to remove harmful gases without desorbing gases adsorbed by strong chemical bonding force of metal compounds and harmful gases, and It has the effect of increasing the lifespan.

In addition, by manufacturing the adsorbent for the chemical filter according to the present invention in the form of a ball, pellet or tablet to maximize the amount of harmful gas removal active ingredients charged in the chemical filter to improve the removal efficiency and reduce the pressure loss due to the linear velocity change Not only can it reduce the particulate matter caused by conventional adsorbent wear.

In addition, when the chemical filter is manufactured using the adsorbent for the chemical filter according to the present invention, since an adhesive is not used separately, there is an effect of preventing the generation of secondary pollutants due to the volatile gas generated by the adhesive.

Claims (15)

10 to 99% by weight of a metal compound including a metal oxide, a metal hydroxide, a metal salt or a mixture thereof; And 1 to 90% by weight of an organic binder, an inorganic binder or a mixture thereof. The method of claim 1, The chemical filter adsorbent is a chemical filter adsorbent, characterized in that the ball, pellet or tablet form. The method according to claim 1 or 2, The metal compound may be a metal oxide such as Fe ₂ O ₃ , Fe ₃ O ₄ , CuO, MnO ₂ , SrO, SrO ₂ , CaO, zeolite, FeO (OH), Sr (OH) ₂ , Ca (OH) _2, or the like. Adsorbent for chemical filters, characterized in that at least one material selected from metal salts such as metal hydroxide, FeSO ₄ , CuSO ₄ , SrCO ₃ , CaCO ₃ . The method of claim 1, Adsorbent for a chemical filter, characterized in that the metal compound further comprises 10 to 90% by weight of activated carbon based on the total weight of the metal compound. The method according to claim 1 or 2, The metal compound may be a metal oxide such as Fe ₂ O ₃ , Fe ₃ O ₄ , CuO, MnO ₂ , SrO, SrO ₂ , CaO, zeolite, FeO (OH), Sr (OH) ₂ , Ca (OH) _2, or the like. A mixture of at least two or more mixtures selected from the group consisting of metal salts such as metal hydroxides, FeSO ₄ , CuSO ₄ , SrCO ₃ , CaCO ₃ or iron compounds and strontium compounds having a weight ratio of 50:50, copper having a weight ratio of 80:20 A mixture of a compound and an iron compound, and a mixture of zeolite and manganese oxide having a weight ratio of 60:40. The method according to claim 1 or 2, Adsorbent for chemical filters, characterized in that the organic binder is methyl cellulose, dextrin, polyvinyl alcohol, graphite or a mixture thereof. The method according to claim 1 or 2, The inorganic binder is an alumina sol, colloidal silica, aerosol, bentonite, or a mixture thereof. The method according to claim 1 or 2, Adverse agents for chemical filters are harmful to the gaseous gas that flows into manufacturing processes such as semiconductors, precision electronic components, pharmaceuticals, and food manufacturing, such as air conditioners or buildings for general industrial fields, or air purifiers for indoor air purification. Adsorbent for chemical filters, characterized in that used to remove the gas. A chemical filter comprising the adsorbent for a chemical filter according to claim 1. The method of claim 9, An adsorption layer support in which the chemical filter has a trapezoidal jig shape and is filled with an adsorbent for a chemical filter therein; Two pairs of guide plates fastened to the upper and lower ends of the adsorption layer support such that the adsorption layer support has a trapezoidal jig-shaped structure; An upper frame and a lower frame to which the pair of guide plates are respectively inserted and seated; And at least two side frames connected to the upper frame and the lower frame. The method of claim 10, The adsorbent layer support is connected to the first mesh network having a pair of two so as to provide a place where the adsorbent for the chemical filter is filled, and the adsorbent powder for the chemical filter is separated to the outside. Nonwoven fabric for preventing the chemical filter, characterized in that consisting of a second mesh network connected to the outside of the nonwoven fabric to support the nonwoven fabric. The method of claim 10, Chemical filter, characterized in that the upper frame and the lower frame and the side frame of the chemical filter is fastened by jet bending. The method according to any one of claims 10 to 12, And the frame, the first mesh net, the second mesh net, and the guide plate are made of nonferrous metal. 1 to 90% by weight of the metal compound including 10 to 99% by weight of the total weight of the adsorbent, including metal oxides, metal hydroxides, metal salts or mixtures thereof, and 1 to 90% by weight of the organic binder, the inorganic binder or a mixture thereof, based on the total weight of the adsorbent. Mixing with 20% by weight of ultrapure distilled water; Thereafter, the mixture is dried for 1 to 2 hours in a drying furnace maintained at a temperature of about 100 ℃ and then aged for about 4 hours at room temperature. The method of claim 14, Method for producing a chemical filter adsorbent characterized in that it further comprises a molding step of molding the mixture aged in the step of the aging step.

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