KR20010067819A - Piezoelectric transformer having of good piezo effect and calcinating method of the same - Google Patents
Piezoelectric transformer having of good piezo effect and calcinating method of the same Download PDFInfo
- Publication number
- KR20010067819A KR20010067819A KR1020010017135A KR20010017135A KR20010067819A KR 20010067819 A KR20010067819 A KR 20010067819A KR 1020010017135 A KR1020010017135 A KR 1020010017135A KR 20010017135 A KR20010017135 A KR 20010017135A KR 20010067819 A KR20010067819 A KR 20010067819A
- Authority
- KR
- South Korea
- Prior art keywords
- piezoelectric
- piezoelectric transformer
- composition
- firing
- hours
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000001354 calcination Methods 0.000 title claims abstract description 15
- 230000000694 effects Effects 0.000 title description 2
- 229910052787 antimony Inorganic materials 0.000 claims abstract description 15
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 15
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 15
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 15
- 239000000203 mixture Substances 0.000 claims description 27
- 238000010304 firing Methods 0.000 claims description 24
- 238000005245 sintering Methods 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 17
- 239000011230 binding agent Substances 0.000 claims description 13
- 239000000843 powder Substances 0.000 claims description 13
- 239000000919 ceramic Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 8
- 229910052726 zirconium Inorganic materials 0.000 claims description 8
- 238000000498 ball milling Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- 238000010298 pulverizing process Methods 0.000 claims description 7
- 238000002156 mixing Methods 0.000 claims description 5
- 238000000748 compression moulding Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 238000000227 grinding Methods 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 4
- 239000006104 solid solution Substances 0.000 claims description 4
- 238000002485 combustion reaction Methods 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 3
- 239000011802 pulverized particle Substances 0.000 claims description 3
- 239000000654 additive Substances 0.000 claims description 2
- 230000000996 additive effect Effects 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- 238000005498 polishing Methods 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 abstract description 5
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 2
- 230000008878 coupling Effects 0.000 description 15
- 238000010168 coupling process Methods 0.000 description 15
- 238000005859 coupling reaction Methods 0.000 description 15
- 230000008859 change Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000003921 particle size analysis Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/093—Forming inorganic materials
- H10N30/097—Forming inorganic materials by sintering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Power Engineering (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
본 발명은 압전특성이 우수한 압전 변압기와 그 소성방법에 관한 것으로, 보다 상세하게 PZT 기본조성에 Mn, W, Sb, Nb의 원소들을 첨가하고 몰비를 조절하여 전기 기계결합계수 K31, K33및 기계적 품질계수(Qm)이 크고 큐리온도가 높으며 진동에 의해 자체 발열이 적고, 기계적 강도가 높은 압전특성이 우수한 압전 변압기와 그 소성방법에 관한 것이다.The present invention relates to a piezoelectric transformer having excellent piezoelectric characteristics and a firing method thereof, and more specifically, by adding elements of Mn, W, Sb, and Nb to the basic composition of PZT, and adjusting the molar ratio, the electromechanical coupling coefficients K 31 , K 33 and The present invention relates to a piezoelectric transformer having a high mechanical quality factor (Qm), high Curie temperature, low self-heating due to vibration, and excellent piezoelectric properties with high mechanical strength, and a firing method thereof.
주지된 바와 같이, 압전 특성이란 결정질 재료가 응력을 받으면 전하가 발생하는 현상으로 최근에는 이런 압전 특성을 갖는 각종 압전 재료가 의료 기기, 비파괴 검사, Sonar등의 초음파 응용에서 공장 자동화, 로봇, 정밀 위치 결정에 사용되는 액추레이터 등 그 응용 범위가 증가함에 따라 많은 연구와 개발이 이루어지고 있다. 압전 변압기를 이해하기 위해서는 압전 현상에 대한 고찰이 있어야 하는 바, 압전 현상이란 결정에 기계적 압력을 가하여 이온을 변위 시키면 양전하와 음전하의 분포가 비대칭으로 되어 전기 쌍극자 모멘트가 유기되어 표면에 전하가 나타나는 현상이다.As is well known, piezoelectric properties are phenomena in which charge occurs when a crystalline material is stressed. Recently, various piezoelectric materials having such piezoelectric properties are used for factory automation, robots, and precision positioning in ultrasonic applications such as medical devices, nondestructive testing, and sonar. As the application range of the actuators used in the crystals increases, much research and development is conducted. In order to understand piezoelectric transformers, it is necessary to consider piezoelectric phenomena. Piezoelectric phenomena are a phenomenon in which the distribution of positive and negative charges becomes asymmetrical when the ions are displaced by applying mechanical pressure to the crystal, causing the electric dipole moment to be induced and the charges appear on the surface. to be.
세라믹을 이용한 압전 변압기는 50년대말에 개발되어 TV수신기의 고압전원등 고전압, 전력용 Inverter에 응용하고자 하였으나, 고강도와 압전 특성이 우수한 압전 세라믹 재료의 개발이 늦어 그 동안 응용되지 못하였다. 그러나 최근에 압전 특성이 우수한 재료의 개발 등에 힘입어 일본 등에서 고전력용 압전 변압기의 개발로 인하여 노트북 컴퓨터의 display에 이용되는 backlight 구동용 전원으로 실용화가 되고 있다.Piezoelectric transformers using ceramics were developed in the late 50's and applied to high voltage and power inverters such as high voltage power supply of TV receivers. However, the development of piezoelectric ceramic materials with high strength and piezoelectric properties was not possible. Recently, however, due to the development of materials with excellent piezoelectric properties, the development of high-power piezoelectric transformers in Japan has been practically used as a backlight driving power source for notebook computer displays.
도 1은 일반적인 소결 정방형의 세라믹에 전극을 도포한 상태를 도시한 도면이다. 이를 참조하면, 상기 압전 변압기(2)는 압전재를 이용하여 출력(2차)측에 전달되어 다시 전기신호로 변환 출력되는 원리의 소자이다. 따라서 전통적인 자기 변압기에 비하여 권선이 불필요하므로 구조가 간단하고 소형화, 박형화, 경량화가 가능하다. 또한 표피효과가 없어서 고주파화에 유리하고, 1, 2차간의 전기절연을 고려할 필요가 없으며, 전자(electromagnetic) 노이즈를 발생시키지 않고, ferrite 변압기에 비하여 고효율화가 가능한 장점을 가지고 있다. 그러나, 상기 압전변압기(2)는 이러한 장점외에 부하저항이나 구동 주파수에 따라서 승압비나 효율이 변화하는 큰 단점을 가지고 있다.1 is a view showing a state in which an electrode is applied to a general sintered square ceramic. Referring to this, the piezoelectric transformer 2 is a device of the principle that is transmitted to the output (secondary) side by using a piezoelectric material is converted into an electrical signal and output again. Therefore, the winding is unnecessary as compared with the conventional magnetic transformer, the structure is simple, miniaturized, thinned, and lightweight. In addition, there is no skin effect, which is advantageous for high frequency, it is not necessary to consider the electrical insulation between the first and second, and does not generate electromagnetic noise, and has the advantage of higher efficiency than the ferrite transformer. However, in addition to these advantages, the piezoelectric transformer 2 has a big disadvantage in that the boost ratio or efficiency varies depending on the load resistance and the driving frequency.
또한, 현재까지 고전압원을 얻기 위해 제안되는 로젠(Rosen)형 압전 트랜스포머는 길이 방향 진동 모드로 구동되기에 최대 구동 주파수가 200∼300㎑이며, 또한 내부 임피던스가 크기 때문에 전력 손실을 가져와 고전력 밀도를 가지기는 어려웠다. 그리고 종래의 권선형 트랜스포머는 1㎒이상의 스위칭 주파수에서 철손 및 동손의 증가에 의해 사용하기가 어려우며, 소형화에도 많은 어려움을 가지고 있다.In addition, the Rosen type piezoelectric transformer, which has been proposed to obtain a high voltage source to date, is driven in a longitudinal vibration mode, and has a maximum driving frequency of 200 to 300 kHz, and also has a high internal impedance, resulting in high power density. It was difficult to have. The conventional winding transformer is difficult to use due to the increase in iron loss and copper loss at a switching frequency of 1 MHz or more, and has a lot of difficulty in miniaturization.
본 발명은 상기한 종래 기술의 사정을 감안하여 이루어진 것으로, PZT 세라믹계에 Mn, W, Sb, Nb의 원소들을 첨가하고 그 몰비 조성비를 조절함으로써 전기 기계결합계수 K31, K33및 기계적 품질계수(Qm)이 크고 큐리온도가 높으며 진동에 의해 자체 발열이 적고, 기계적 강도가 높은 압전특성이 우수한 압전 변압기와 그 소성방법을 제공함에 그 목적이 있다.SUMMARY OF THE INVENTION The present invention has been made in view of the above-described prior art, and the electromechanical coupling coefficients K 31 , K 33 and mechanical quality coefficients are obtained by adding elements of Mn, W, Sb, and Nb to PZT ceramics and adjusting the molar ratio composition ratios. It is an object of the present invention to provide a piezoelectric transformer having a large (Qm), high Curie temperature, low self-heating due to vibration, and excellent piezoelectric properties with high mechanical strength and a firing method thereof.
도 1은 일반적인 소결 정방형의 세라믹에 전극을 도포한 상태를 도시한 도면,1 is a view showing a state in which the electrode is applied to a general sintered square ceramic,
도 2는 본 발명의 실시예에 따른 조성으로 소성된 압전 변압기를 나타내는 도면,2 is a view showing a piezoelectric transformer fired with a composition according to an embodiment of the present invention;
도 3은 본 발명의 실시예에 따른 압전 변압기의 소성 공정을 나타내는 공정도,3 is a process chart showing a firing process of a piezoelectric transformer according to an embodiment of the present invention;
도 4는 본 발명의 실시예에 따른 압전 변압기의 소결시간에 따른 온도 승온율을 나타내는 그래프,4 is a graph showing the temperature increase rate according to the sintering time of the piezoelectric transformer according to the embodiment of the present invention;
도 5는 본 발명의 실시예에 따른 압전 변압기의 소결온도에 따른 전기 기계결합계수(Kp)의 변화치를 나타내는 그래프,5 is a graph showing a change value of the electromechanical coupling coefficient Kp according to the sintering temperature of the piezoelectric transformer according to the embodiment of the present invention;
도 6은 본 발명의 실시예에 따른 압전 변압기의 소결온도에 따른 기계적 품질계수(Qm)의 변화치를 나타내는 그래프이다.6 is a graph showing a change in the mechanical quality factor (Qm) according to the sintering temperature of the piezoelectric transformer according to an embodiment of the present invention.
*도면의 주요부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *
4:압전변압기, 6:입력단,4: piezoelectric transformer, 6: input stage,
8:출력단, 10:구동부,8: output stage, 10: drive unit,
12:발진부.12: Oscillation part.
상기한 목적을 달성하기 위해, 본 발명의 바람직한 실시예에 따르면 PZT[Pb(Zr,Ti)O3]계 세라믹에 Mn, W, Sb, Nb는 원소들을 첨가하여 소성함으로써 압전 특성이 우수해지도록 제작된 것을 특징으로 하는 압전특성이 우수한 압전 변압기가 제공된다.In order to achieve the above object, according to a preferred embodiment of the present invention Mn, W, Sb, Nb to the PZT [Pb (Zr, Ti) O 3 ] -based ceramic is added to the element to bake to improve the piezoelectric properties Provided is a piezoelectric transformer having excellent piezoelectric characteristics, which is manufactured.
바람직하게, 소성시 첨가물질의 조성은 PbZrO3와,PbTiO3와, Pb[Mn0.32W0.26(Sb0.16Nb0.16)]O3의 조성이 [50%, 46%, 4%]의 조성비를 갖고 소성되는 것을 특징으로 한다.Preferably, the composition of the additive during firing is PbZrO 3 , PbTiO 3 and Pb [Mn 0.32 W 0.26 (Sb 0.16 Nb 0.16 )] O 3 whose composition ratio is [50%, 46%, 4%] It is characterized by.
한편, 본 발명은 PZT[Pb(Zr,Ti)O3]계 세라믹에 Mn, W, Sb, Nb는 원소들을 첨가 소성된 압전변압기를 소성하는 방법에 있어서, PbZrO3와,PbTiO3와, Pb[Mn0.32W0.26(Sb0.16Nb0.16)]O3의 조성이 [50%, 46%, 4%]의 조성비를 갖도록 구성하는 평량 및 파우더 배치 과정과; 조성물의 평량 및 파우더 배치가 이루어지면 볼 밀링(Ball Milling)을 통해 혼합 및 분쇄를 행하는 과정과; 혼합 및 분쇄에 의해 개별적으로 섞여있는 분자를 하소(Calcination) 온도 800∼900[.deg.C]에서 3시간정도의 하소를 진행하는 과정과; 약 48시간 정도로 2차 분쇄(Ball milling)를 진행하는 과정과; 2 차 분쇄가 완료되면 0.5∼2 ton/c㎡의 압력으로 가압 성형하는 과정과; 압축성형이 완료되면, 성형체에 함유된 결합제를 연소 온도 500∼700[.deg.C]에서 3∼5시간 정도로 바인더휘발(Burn-out)시키는 과정과; 바인더휘발(Burn-out)이 완료되면 성형체를 온도구간 1000∼1200[.deg.C]로 2시간 정도로 소결(Sintering) 하는 과정과; 상기 소결이 완료되면 압전 성형체를 커팅(Cutting)하고, 연마하는 과정과; 연마된 그 표면상에 전극(Ag)을 증착시키고 분극처리하는 과정으로 이루어진 것을 특징으로 하는 압전특성이 우수한 압전 변압기의 소성방법이 제공된다.Meanwhile, the present invention provides a method of firing a piezoelectric transformer in which Mn, W, Sb, and Nb are added and fired to PZT [Pb (Zr, Ti) O 3 ] -based ceramics, wherein PbZrO 3 , PbTiO 3 , and Pb A basis weight and powder batching process configured such that the composition of [Mn 0.32 W 0.26 (Sb 0.16 Nb 0.16 )] O 3 has a composition ratio of [50%, 46%, 4%]; Mixing and pulverizing through ball milling when a basis weight and powder arrangement of the composition are made; Calcining the mixed molecules separately by mixing and pulverizing at a calcining temperature of 800 to 900 [.deg.C] for about 3 hours; Performing ball milling for about 48 hours; Pressing and molding at a pressure of 0.5 to 2 ton / cm 2 when the secondary grinding is completed; When the compression molding is completed, the process of binder-out the binder contained in the molded body at a combustion temperature of 500 to 700 [.deg.C] for about 3 to 5 hours; Sintering the molded body at a temperature range of 1000 to 1200 [.deg.C] for about 2 hours when the binder volatilization is completed; Cutting and polishing the piezoelectric molded body when the sintering is completed; Provided is a firing method of a piezoelectric transformer having excellent piezoelectric characteristics, comprising a process of depositing and polarizing an electrode Ag on a polished surface thereof.
바람직하게, 상기 성형체의 분쇄후에는 분쇄된 입자들을 건조시키는 과정을 더 포함하여 이루어지는 것을 특징으로 하는 압전특성이 우수한 압전 변압기의 소성방법이 제공된다.Preferably, after the pulverization of the molded body is provided a firing method of a piezoelectric transformer with excellent piezoelectric characteristics, characterized in that further comprising the step of drying the pulverized particles.
더욱 바람직하게, 상기 하소(Calcination)과정으로 고용이 완성된 분말은 1∼5[㎛]의 입도로 분쇄된 분말에 결합제를 포함하여 바인딩하는 과정을 더 포함하여 이루어지는 것을 특징으로 하는 압전특성이 우수한 압전 변압기의 소성방법이 제공된다.More preferably, the powder that has been dissolved in the calcination process is excellent in piezoelectric properties, characterized in that it further comprises the step of binding to the powder pulverized to a particle size of 1 ~ 5 [㎛] including a binder. A firing method of a piezoelectric transformer is provided.
이하, 본 발명에 대해 도면을 참조하여 상세하게 설명한다.EMBODIMENT OF THE INVENTION Hereinafter, this invention is demonstrated in detail with reference to drawings.
도 2는 본 발명의 실시예에 따른 조성으로 소성된 압전 변압기를 나타내는 도면이다.2 is a view showing a piezoelectric transformer fired with a composition according to an embodiment of the present invention.
이를 참조하면, 본 발명의 소성으로 인해 제작된 압전 변압기(4)는구동부(10)와 발진부(12)로 이루어지는 바, 상기 구동부(10)의 일단에 형성된 입력단(6)에 교류전압을 걸어주면 입력단(6)의 d31과 출력단(8)의 d33이 결합하여 발진부(12)의 일단에 형성된 출력단(8)을 통해 승압된 전압이 출력된다.Referring to this, the piezoelectric transformer 4 manufactured by the firing of the present invention includes a driving unit 10 and an oscillation unit 12, and when an AC voltage is applied to an input terminal 6 formed at one end of the driving unit 10. The voltage boosted through the output terminal 8 formed at one end of the oscillation unit 12 by combining d 31 of the input terminal 6 and d 33 of the output terminal 8 is output.
본 발명은 압전 변압기용 재료로서 기본적으로 높은 승압비를 발생시키기 위하여 전기 기계결합계수 K31, K33, 및 기계적 품질 계수(Qm)이 크고 큐리온도가 높으며 진동에 의해 자체 발열이 적고, 기계적 강도가 높은 압전재 조성에 관한 것으로, 더욱 상세하게는 PZT 기본조성에 Mn, W, Sb, Nb의 원소들을 첨가하고 몰비를 조절하여 최고의 특성, 즉 전기적, 기계적 특성이 우수한 조성을 가지는 압전 변압기를 제작하는 방법에 관한 것이다.The present invention is basically a material for piezoelectric transformers, in order to generate a high step-up ratio, the electromechanical coupling coefficient K 31 , K 33 , and the mechanical quality coefficient (Qm) are large, the Curie temperature is high, and the self-heating is low due to vibration, and the mechanical strength is high. The piezoelectric material has a high piezoelectric material composition, and more specifically, adds elements of Mn, W, Sb, and Nb to the PZT basic composition and adjusts the molar ratio to produce a piezoelectric transformer having a composition having the best properties, ie, electrical and mechanical properties. It is about a method.
본 발명은 전기 기계결합계수 및 품질 계수가 높은 압전 변압기를 제작하기 위해, Mn, W, Sb, Nb 물질을 기본 PZT 조성에 도입하였다는 점에 그 특징이 있다.The present invention is characterized by the introduction of Mn, W, Sb, and Nb materials into the basic PZT composition to fabricate piezoelectric transformers with high electromechanical coupling and high quality coefficients.
상기 Mn, W, Sb, Nb는 원소들을 첨가할 경우, 압전 페로브스카이트(Perovskite) 구조에 본 원소들이 치환물로서 작용하여 압전현상으로 생기는 전기 기계결합계수 및 품질계수의 향상을 가져오는 특성을 가지고 있다. 따라서, Mn, W, Sb, Nb을 첨가하여 우수한 특성을 나타내는 페로브스카이트(Perovskite) 구조를 형성한 후, 이것을 로젠 타입의 압전 변압기로 제작한다.The Mn, W, Sb, and Nb are properties of improving the electromechanical coupling coefficient and quality coefficient generated by the piezoelectric phenomenon by acting as substitutes for the elements in the piezoelectric Perovskite structure when elements are added. Have Therefore, Mn, W, Sb, and Nb are added to form a Perovskite structure exhibiting excellent characteristics, and then this is produced as a Rosen type piezoelectric transformer.
이하, 본 발명에 따른 압전변압기의 소성방법을 첨부된 도면을 참조하여 상세하게 기술한다.Hereinafter, the firing method of the piezoelectric transformer according to the present invention will be described in detail with reference to the accompanying drawings.
도 3은 본 발명의 실시예에 따른 압전 변압기의 소성 공정을 나타내는 공정도이고, 도 4는 본 발명의 실시예에 따른 압전 변압기의 소결시간에 따른 온도 승온율을 나타내는 그래프이다.3 is a process chart showing a firing process of a piezoelectric transformer according to an exemplary embodiment of the present invention, and FIG. 4 is a graph showing a temperature increase rate according to the sintering time of the piezoelectric transformer according to an exemplary embodiment of the present invention.
이를 참조하면, 상기 압전변압기(4)의 소성방법은 일반 소성법을 사용하는 바, 먼저 기본 3 성분계 조성물(예컨대, PbO, ZrO2, TiO2, etc)의 평량(Weighing)과 파우더 배치(Powder Batch)가 선행되는 바, 이때 상기 기본 3 성분계 조성물 외에 0.5PbZrO3와,0.46PbTiO3와, 0.04Pb[Mn0.32W0.26(Sb0.16Nb0.16)]O3이 첨가된다. 즉, PbZrO3와,PbTiO3와, Pb[Mn0.32W0.26(Sb0.16Nb0.16)]O3의 조성은 [50%, 46%, 4%]의 조성율로 이루어진다.(제 1 단계: ST-1)Referring to this, the firing method of the piezoelectric transformer 4 uses a general firing method. First, a basis weight and powder batch of a basic three-component composition (eg, PbO, ZrO 2 , TiO 2 , etc) are used. Batch) is preceded by 0.5PbZrO 3 , 0.46PbTiO 3 , and 0.04Pb [Mn 0.32 W 0.26 (Sb 0.16 Nb 0.16 )] O 3 in addition to the basic three-component composition. That is, the compositions of PbZrO 3 , PbTiO 3 , and Pb [Mn 0.32 W 0.26 (Sb 0.16 Nb 0.16 )] O 3 have a composition ratio of [50%, 46%, 4%]. (First step: ST -One)
압전 변압기 조성물의 평량 및 파우더 배치가 이루어지면 볼 밀링(Ball Milling)을 통해 1차 분쇄가 이루어지는 바, 1차 혼합 및 분쇄에 요구되는 시간은 24시간 정도이다.(제 2 단계: ST-2)When the basis weight and powder arrangement of the piezoelectric transformer composition are made, the first milling is performed through ball milling, and the time required for the first mixing and milling is about 24 hours. (Second step: ST-2)
혼합 및 분쇄가 이루어진 상태에서는 개별적으로 섞여있는 분자를 하소(Calcination)를 통하여 하나의 고용체로 만들게 되는 바, 하소(calcination)는 3 성분계 조성물을 구성하는 데 중요한 절차로서, 하소(calcination)의 주 관건은 고용체를 만드는 온도의 설정이다. 본 발명에서는 하소의 온도를 800∼900[.deg.C]로 설정하여 하소를 진행하였으며 그 진행시간은 3시간 정도가 소요되었고, 이때 최적 온도는 비교적 간단한 XRD 분석으로 설정할 수 있다.(제 3 단계: ST-3)In the mixed and pulverized state, the individual mixed molecules are converted into one solid solution through calcination. Calcination is an important procedure for constructing a three-component composition. Is the setting of the temperature at which the solid solution is made. In the present invention, the calcination was performed by setting the temperature of the calcining at 800 to 900 [.deg.C], and the time required for the calcination was about 3 hours, and the optimum temperature can be set by a relatively simple XRD analysis. Step: ST-3)
하소(calcination)가 완료되면, 대략 48시간 정도로 2차 분쇄(Ball milling)를 진행하고 분쇄에 따른 입도 분석을 행하는 바, 입도 분석의 결과 그 입자의 평균직경이 1[㎛]에 이르도록 한다. 이때, 입도는 입도분석기로 측정하게 되며, 분쇄기의 볼 직경이 클수록 분쇄효과는 감소되는 경향이 나타나므로 이를 토대로 입도측정의 결과를 관찰하면서 볼 밀링(ball milling)의 속도 및 볼 함유비율을 조정해야 한다.(제 4 단계: ST-4)When the calcination is completed, the second milling (Ball milling) for about 48 hours and the particle size analysis according to the pulverization, the particle size analysis results in the average diameter of the particles to 1 [㎛]. At this time, the particle size is measured by the particle size analyzer, and the larger the ball diameter of the grinder, the smaller the grinding effect tends to be. Therefore, the ball milling speed and the ball content rate should be adjusted while observing the results of the particle size measurement. (Step 4: ST-4)
2 차 분쇄가 완료되면 압축성형(Pressing)을 행하는 바, 압축성형은 결합제가 함유된 분말을 일정한 압력으로 가압함으로써 성형하는 과정이다. 본 발명에서는 0.5∼2 ton/c㎡의 압력으로 성형을 하였으나, 이는 각 공정에 따라 그 압력수치를 상이하게 설정할 수 있다.(제 5 단계: ST-5)Pressing is performed when the secondary grinding is completed. Compression molding is a process of forming a powder by pressing a powder containing a binder at a constant pressure. In the present invention, the molding was performed at a pressure of 0.5 to 2 ton / cm 2, but this can be set differently according to each process. (Fifth Step: ST-5)
압축성형이 완료되면, 성형체에 함유된 결합제를 연소하여 제거시키는 바인더휘발(Burn-out) 과정을 진행하는 바, 그 바인더휘발(Burn-out) 온도는 500∼700[.deg.C]에서 연소시키며 승온과정에서 2∼3 [.deg.C]/min으로 승온시킨다. 또한 연소시 도가니를 개방시켜서 최대한 연소된 결합제가 빠져나갈 수 있도록 하며, 바인더휘발(Burn-out)에 소요되는 시간은 3∼5시간 정도로 한다.(제 6 단계: ST-6)When the compression molding is completed, a burn-out process of burning and removing the binder contained in the molded body is performed. The burn-out temperature of the binder is burned at 500 to 700 [.deg.C]. And raise the temperature to 2 ~ 3 [.deg.C] / min during the temperature increase process. In addition, open the crucible during combustion to allow the burned out binder to escape as much as possible, and the time required for binder volatilization is about 3 to 5 hours. (Stage 6: ST-6)
바인더휘발(Burn-out)이 완료되면 성형체의 소결(Sintering)을 행하는 바, 성형체의 밀도를 산출해내어 밀도의 변화가 일정하게 유지되는 온도구간이 적절한 소결온도가 된다. 본 발명에서는 그 온도구간을 1000∼1200[.deg.C]로 설정한 상태에서 소결(Sintering)을 진행하며, 이때 성형체의 수축율은 13∼15 [%] 미만이어야한다. 소결이 완결된 성형체의 경우 그 결정립의 크기는 1[㎛]가 되도록 한다. 또한, 소결시간은 2시간 정도로 한다. (제 7 단계: ST-7)When the binder volatilization is completed, the sintering of the molded body is performed. The density of the molded product is calculated, and a temperature section in which the change in density is kept constant becomes an appropriate sintering temperature. In the present invention, sintering is performed while the temperature range is set to 1000 to 1200 [.deg.C], and the shrinkage of the molded product should be less than 13 to 15 [%]. In the case of a sintered molded body, the size of the crystal grains is 1 [µm]. The sintering time is about 2 hours. (Seventh step: ST-7)
그런 다음, 상기 소결(Sintering)이 완료되어 성형된 압전 성형체를 커팅(Cutting)하고(제 8 단계: ST-8), 그 성형체를 연마하며(제 9 단계: ST-9), 그 표면상에 전극(Ag)을 증착시키고(제 10 단계: ST-10), 전극이 증착된 성형체에 분극처리(Poling)를 행한다.(제 11 단계: ST-11)Then, the sintering is completed and the formed piezoelectric molded body is cut (step 8: ST-8), the molded body is polished (step 9: ST-9), and the surface The electrode Ag is deposited (step 10: ST-10), and polarization is performed on the formed body on which the electrode is deposited. (11th step: ST-11)
이때, 본 발명에서는 상기 성형체의 분쇄후에 건조(Drying)를 행하여 분쇄된 입자들을 건조시키는 과정을 포함시킬 수 있으며(제 12, 14 단계: ST-12, 14), 또한 상기 하소(Calcination)로 고용이 완성된 분말은 결합제를 포함하여 성형시키는 바인딩(Binding)과정을 거치게 되는 바, 예컨대 1∼5[㎛]의 입도로 분쇄된 분말에 결합제를 포함하여 바인딩함으로써 코팅될 수 있도록 하는 것이다.(제 13단계: ST-13)In this case, the present invention may include a step of drying the pulverized particles by drying after the pulverization of the molded article (steps 12 and 14: ST-12 and 14), and also solid solution as the calcination. The finished powder is subjected to a binding process to include a binder, for example, to be coated by including a binder in a powder ground to a particle size of 1 to 5 [μm]. Step 13: ST-13)
이하, 본 발명의 실시예에 따라 소성된 압전특성이 우수한 압전 변압기의 소결온도에 따른 각종 결합계수의 변화를 첨부된 도면을 참조하여 상세하게 기술한다.Hereinafter, the change of the various coupling coefficients according to the sintering temperature of the piezoelectric transformer having excellent piezoelectric properties fired according to the embodiment of the present invention will be described in detail with reference to the accompanying drawings.
도 4는 본 발명의 실시예에 따른 압전 변압기의 소결시간에 따른 온도 승온율을 나타내는 그래프이다.4 is a graph showing the temperature increase rate according to the sintering time of the piezoelectric transformer according to the embodiment of the present invention.
도 4에 도시된 바와 같이, 본 발명에 따라 PZT[Pb(Zr,Ti)O3]계 세라믹에 Mn, W, Sb, Nb의 원소들을 첨가한 성형체는 그 소결시 6시간이 도래될 때까지 가열하면1100[.deg.C]로 직선적 승온이 이루어진다.As shown in FIG. 4, the molded article in which Mn, W, Sb, and Nb elements were added to a PZT [Pb (Zr, Ti) O 3 ] -based ceramic according to the present invention was used until the sintering time reached 6 hours. When heated, linear temperature rises to 1100 [.deg.C].
이때, 본 발명에 따른 PZT[Pb(Zr,Ti)O3]계 세라믹에 Mn, W, Sb, Nb의 원소들을 첨가한 성형체를 최소 2시간 이상동안 상기 최고 가열온도 1100[.deg.C]를 유지토록 하고, 그 후에는 다시 직선적으로 온도를 강하시킨다.At this time, the maximum heating temperature of 1100 [.deg.C] for a molded article in which Mn, W, Sb, and Nb elements are added to PZT [Pb (Zr, Ti) O 3 ] -based ceramic according to the present invention for at least 2 hours. The temperature is then decreased linearly again.
도 5는 본 발명의 실시예에 따른 압전 변압기의 소결온도에 따른 전기 기계결합계수(Kp)의 변화치를 나타내는 그래프이다.5 is a graph showing a change value of the electromechanical coupling coefficient Kp according to the sintering temperature of the piezoelectric transformer according to the embodiment of the present invention.
도 5에 도시된 바와 같이, 본 발명에 따라 PZT[Pb(Zr,Ti)O3]계 세라믹에 Mn, W, Sb, Nb의 원소들을 첨가함으로써 소성된 압전변압기(4)는 그 소성공정중 소결온도에 따라 전기 기계 결합계수(Kp)가 상이하게 나타나는 바, 1100[.deg.C]에서 승온하여 1150[.deg.C]에 도래되었을 때 각각 소성된 압전변압기(4)의 전기 기계 결합계수(Kp)를 검출하게 되면 그 전기 기계 결합계수(Kp)는 0.512에서 0.535로 직선적 상승을 보인다.As shown in FIG. 5, the piezoelectric transformer 4 fired by adding elements of Mn, W, Sb, and Nb to a PZT [Pb (Zr, Ti) O 3 ] -based ceramic according to the present invention is subjected to the firing process. The electromechanical coupling coefficient (Kp) is different depending on the sintering temperature. The electromechanical coupling of the piezoelectric transformer 4 fired when the temperature is raised to 1100 [.deg.C] and reaches 1150 [.deg.C], respectively. Upon detecting the coefficient Kp, the electromechanical coefficient Kp increases linearly from 0.512 to 0.535.
또한, 소결온도가 1150[.deg.C]에서 1200[.deg.C]까지의 구간에서 소성된 압전변압기(4)의 전기 기계 결합계수(Kp)는 완만한 직선, 예컨대 0.535에서 0.545로 상승된다. 1200[.deg.C]이상 소결온도를 적용하여 소성된 압전변압기(4)의 전기 기계 결합계수(Kp)는 완만하게 감소하게 되는 바, 압전 변압기(4)의 전기 기계 결합계수(Kp)는 단지 그 결합계수에만 한정되어 소결온도가 결정되는 것이 아니고 후술되는 기계적 품질계수(Qm)와 함께 고찰되어야만 보다 우수한 품질의 압전 변압기(4)를 소성할 수 있다.Also, the electromechanical coefficient Kp of the piezoelectric transformer 4 fired in the sintering temperature range from 1150 [.deg.C] to 1200 [.deg.C] increases from a gentle straight line, for example, 0.535 to 0.545. do. The electromechanical coefficient (Kp) of the piezoelectric transformer (4) fired by applying a sintering temperature of 1200 [.deg.C] or more gradually decreases. The electromechanical coefficient (Kp) of the piezoelectric transformer (4) is The sintering temperature is not limited only to the coupling coefficient, and the piezoelectric transformer 4 of higher quality can be fired only when considered together with the mechanical quality factor Qm described below.
도 6은 본 발명의 실시예에 따른 압전 변압기의 소결온도에 따른 기계적 품질계수(Qm)의 변화치를 나타내는 그래프이다.6 is a graph showing a change in the mechanical quality factor (Qm) according to the sintering temperature of the piezoelectric transformer according to an embodiment of the present invention.
도 6에 도시된 바와 같이, 본 발명에 따라 PZT[Pb(Zr,Ti)O3]계 세라믹에 Mn, W, Sb, Nb의 원소들을 첨가함으로써 소성된 압전변압기(4)는 도 5에 도시된 전기 기계 결합계수(Kp)의 고찰외에도 기계적 품질계수(Qm)의 고찰이 이루어져야 하는 바, 1100[.deg.C]에서 1200[.deg.C]까지의 승온에서 상기 압전변압기(4)의 기계적 품질계수(Qm)는 전기 기계 결합계수(Kp)와는 상이하게 하강 직선형태를 나타낸다.As shown in FIG. 6, the piezoelectric transformer 4 fired by adding elements of Mn, W, Sb, and Nb to a PZT [Pb (Zr, Ti) O 3 ] -based ceramic according to the present invention is shown in FIG. In addition to the consideration of the electromechanical coupling coefficient (Kp), the consideration of the mechanical quality factor (Qm) should be made. At the elevated temperature of 1100 [.deg.C] to 1200 [.deg.C], the piezoelectric transformer 4 The mechanical quality factor Qm is in the form of a falling straight line differently from the electromechanical coupling factor Kp.
또한, 1200[.deg.C]에서 1300[.deg.C]까지의 기계적 품질계수(Qm)는 대략 1700(Qm)정도까지 선형적으로 상승하기는 하나, 결국 도 5의 전기 기계적 결합계수(Kp)와 도 6의 기계적 품질계수(Qm)를 동시에 고려할 때 소결온도로는 1100[.deg.C] 정도가 적합하다는 것을 알 수 있으며, 그 때의 품질향상을 수치적으로 확인할 수 있다.In addition, although the mechanical quality factor (Qm) of 1200 [.deg.C] to 1300 [.deg.C] increases linearly to about 1700 (Qm), the electromechanical coupling coefficient of FIG. Considering both Kp) and the mechanical quality factor (Qm) of FIG. 6, it can be seen that about 1100 [.deg.C] is suitable as the sintering temperature, and the quality improvement at that time can be confirmed numerically.
한편, 본 발명의 실시예에 따른 압전특성이 우수한 압전 변압기 및 소성방법은 단지 상기한 실시예에 한정되는 것이 아니라 그 기술적 요지를 이탈하지 않는 범위내에서 다양한 변경이 가능하다.On the other hand, the piezoelectric transformer and the firing method excellent in the piezoelectric characteristics according to the embodiment of the present invention is not limited to the above embodiment, but various modifications can be made within the scope without departing from the technical gist.
상기한 바와 같이, 본 발명에 따른 압전특성이 우수한 압전 변압기 및 그 소성방법은 전기기계결합계수 및 품질계수가 우수한 압전 조성을 가지고, 압전변압기를 제작하면 변압기의 사이즈를 최소화 할 수 있고, 전기적 피로현상이 없기 때문에 차세대 변압기로 주목받을 수 있으며, 이러한 소성방법으로 소성된 압전 변압기는 높은 효율＞90%, 높은 승압비를 가지게 되고, 착화소자용 고전압 발생기, 휴대용 고주파 통신기기의 스위칭 파워 서플라이(Switching power supply, TV나 복사기 등의 고압발생장치, LCD 백라이트 구동용 변압기 등에 매우 광범위하게 이용될 수 있다.As described above, the piezoelectric transformer having excellent piezoelectric characteristics and the firing method thereof according to the present invention have a piezoelectric composition with excellent electromechanical coupling coefficient and quality coefficient, and the piezoelectric transformer can minimize the size of the transformer and cause electrical fatigue. The piezoelectric transformer fired by this firing method has high efficiency> 90%, high boost ratio, and switching power supply of a high voltage generator for an ignition element and a portable high frequency communication device. It can be used for a wide range of high voltage generators such as TVs, photocopiers and LCD backlight drive transformers.
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020010017135A KR20010067819A (en) | 2001-03-31 | 2001-03-31 | Piezoelectric transformer having of good piezo effect and calcinating method of the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020010017135A KR20010067819A (en) | 2001-03-31 | 2001-03-31 | Piezoelectric transformer having of good piezo effect and calcinating method of the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20010067819A true KR20010067819A (en) | 2001-07-13 |
Family
ID=19707684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020010017135A KR20010067819A (en) | 2001-03-31 | 2001-03-31 | Piezoelectric transformer having of good piezo effect and calcinating method of the same |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR20010067819A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100431404B1 (en) * | 2001-04-06 | 2004-05-22 | 임기조 | Piezoelectric ceramics composition for high power piezoelectric devices, piezoelectric transformer using the same and driving method of piezoelectric transformer |
| KR100544091B1 (en) * | 2002-12-05 | 2006-01-25 | 주식회사 스마텍 | Piezoelectric Ceramic Composition |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3998748A (en) * | 1974-07-18 | 1976-12-21 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric ceramic compositions |
| US4862029A (en) * | 1987-02-11 | 1989-08-29 | Tosoh Corporation | Actuator |
| JPH07315925A (en) * | 1994-05-18 | 1995-12-05 | Ngk Spark Plug Co Ltd | Piezoelectric porcelain composition for ceramic filter device excellent in moisture resistance |
| KR0161349B1 (en) * | 1995-01-20 | 1998-11-16 | 무라따 야스따까 | Piezoelectric ceramic compositions |
| US6104128A (en) * | 1998-06-18 | 2000-08-15 | Denso Corporation | Piezoelectric ceramics and piezoelectric transformer formed therefrom |
| JP2000294852A (en) * | 1999-04-08 | 2000-10-20 | Murata Mfg Co Ltd | Piezoelectric ceramics composition and piezoelectric buzzer and piezoelectric actuator utilizing the same |
| KR20020014775A (en) * | 2000-08-18 | 2002-02-25 | 무라타 야스타카 | Piezoelectric ceramic material, sintered piezoelectric ceramic compact, and piezoelectric ceramic device |
-
2001
- 2001-03-31 KR KR1020010017135A patent/KR20010067819A/en not_active Application Discontinuation
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3998748A (en) * | 1974-07-18 | 1976-12-21 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric ceramic compositions |
| US4862029A (en) * | 1987-02-11 | 1989-08-29 | Tosoh Corporation | Actuator |
| JPH07315925A (en) * | 1994-05-18 | 1995-12-05 | Ngk Spark Plug Co Ltd | Piezoelectric porcelain composition for ceramic filter device excellent in moisture resistance |
| KR0161349B1 (en) * | 1995-01-20 | 1998-11-16 | 무라따 야스따까 | Piezoelectric ceramic compositions |
| US6104128A (en) * | 1998-06-18 | 2000-08-15 | Denso Corporation | Piezoelectric ceramics and piezoelectric transformer formed therefrom |
| JP2000294852A (en) * | 1999-04-08 | 2000-10-20 | Murata Mfg Co Ltd | Piezoelectric ceramics composition and piezoelectric buzzer and piezoelectric actuator utilizing the same |
| KR20020014775A (en) * | 2000-08-18 | 2002-02-25 | 무라타 야스타카 | Piezoelectric ceramic material, sintered piezoelectric ceramic compact, and piezoelectric ceramic device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100431404B1 (en) * | 2001-04-06 | 2004-05-22 | 임기조 | Piezoelectric ceramics composition for high power piezoelectric devices, piezoelectric transformer using the same and driving method of piezoelectric transformer |
| KR100544091B1 (en) * | 2002-12-05 | 2006-01-25 | 주식회사 스마텍 | Piezoelectric Ceramic Composition |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2003104163A1 (en) | Piezoelectric porcelain composition, laminated piezoelectric device therefrom and process for producing the same | |
| CN114409401A (en) | Potassium-sodium niobate piezoelectric ceramic, preparation method thereof and electronic equipment | |
| JP2002308672A (en) | Method for manufacturing piezoelectric ceramic, piezoelectric ceramic and piezoelectric ceramic device | |
| CN101386533B (en) | Method for producing piezoelectric ceramic | |
| EP1855329A1 (en) | Multilayer piezoelectric element | |
| KR20010067819A (en) | Piezoelectric transformer having of good piezo effect and calcinating method of the same | |
| KR100685327B1 (en) | Piezoelectric ceramic composition and piezoelectric device | |
| JP4169202B2 (en) | Method for producing piezoelectric ceramic composition | |
| JP2884635B2 (en) | Piezoelectric ceramics and method of manufacturing the same | |
| JP2005119945A (en) | Piezoelectric ceramic composition | |
| JP4569062B2 (en) | Piezoelectric ceramic | |
| JP2000103674A (en) | Piezoelectric ceramic composition and its production | |
| JPH11349380A (en) | Piezoelectric ceramic composition and piezoelectric element using the same | |
| CN100511746C (en) | Piezoelectric actuator | |
| KR20010067818A (en) | Micro transformer and calcinating method of the same | |
| JPH08283069A (en) | Piezoelectric ceramic and its production | |
| CN1278990C (en) | Doped lead columbate manganate - lead zirconate titanate piezoelectric ceramic materials and process for preparation thereof | |
| KR100336426B1 (en) | Method for manufacturing ceramics composition for electro-energy conversion | |
| JP3080277B2 (en) | Method for producing bismuth layered compound | |
| CN111704461A (en) | Formula and preparation method of high Curie point low temperature co-fired piezoelectric ceramic | |
| JPH06224486A (en) | Polarizing method for piezoelectric ceramics | |
| CN116496083B (en) | Core-shell structure hardened potassium-sodium niobate-based leadless piezoelectric ceramic and preparation method thereof | |
| CN117460389A (en) | Piezoelectric single crystal composite material with low dielectric loss and high electromechanical coupling coefficient and preparation method and application thereof | |
| CN108275983A (en) | A kind of preparation method and applications of lead-free piezoceramic material | |
| JP3213849B2 (en) | Piezoelectric ceramic composition |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E601 | Decision to refuse application |