KR20000042618A - Robot of cylindrical coordinates - Google Patents

Abstract

PURPOSE: A robot of cylindrical coordinates is provided to decrease the size and the weight by arm-operating mechanism of shaft-in-shaft structure. CONSTITUTION: A robot of cylindrical coordinates comprises : a frame(110) including a lower fixing plate(112) and a upper fixing plate(114) ; a rotating stage(120) rotating and including a lower round plate(122) and a upper round plate(124) ; a lead screw(130) and a vertical guide rod(140) installed to rotate each other on the lower round plate(122) ; a lead screw nut combining body(134) and a vertical guide rod nut(144) rotating each other with the lead screw(130) and along the vertical guide rod(140) ; a moving part(150) installed on by the lead screw nut combining body(134) and a vertical guide rod nut(140) ; a shaft structure(160), one part of which is connected with the moving part(150) and the other part of which is installed for it to slide through the upper round plate(124) and the upper fixing plate(114) ; an arm support frame(180) having a couple of arm operating shafts(186, 188) ; the first operating device that rotates the rotating stage(120) ; the second operating device that rotates the lead screw(130) ; the third operating device that rotates each shaft of the shaft structure(160).

Description

Cylindrical Coordinate System Robot

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cylindrical coordinate system robot, and more particularly, to a cylindrical coordinate system robot which adopts an arm driving mechanism of a shaft-in-shaft structure to compact the size of the robot.

In general, a cylindrical coordinate robot is installed in a production line to move an object in three directions to perform tasks such as loading and unloading a product, processing or assembling a part, and handling a finished product. In other words, the automation of most manufacturing processes in the industrial field has produced various types of robotic devices capable of handling materials and components necessary for such manufacturing processes. These robotic devices can range in scope from industrial robotic devices, which are mission critical, to smaller precision robotic devices. Such robotic devices may also have a more general purpose in addition to one specific purpose.

Among the various robotic devices, lower layer robots may have a robot arm structure designed to position an object at a certain point in a fixed cylindrical space. Examples of devices of this kind have been disclosed in US Pat. Nos. 4,466,769, 5,178,512, and 4,728,252. However, such robotic devices are disclosed as conventional lifting mechanisms as a means of moving an object in a flat cylindrical zone and extending the movement along the vertical axis of the cylindrical zone.

In the semiconductor manufacturing industry, robots handling articles can be used for a myriad of purposes. The most important of these is the handling of silicon wafers. The procedure, of course, is done in a room with a clean environment, and the robot must be able to move very precisely. The most common apparatus currently used for this purpose is a general robot with a rotatable means for rotating and a lifting means for lifting a cylinder. Furthermore, a means for extending and contracting in the distal direction the arm on which the hand holding the object is installed is provided.

However, in the conventional cylindrical coordinate robots having two arms, the reducer and the motor are directly connected to each axis of rotation, and the motor and the reducer are directly added to each arm drive shaft to move the two arms located at the upper part of the robot in the radial direction thereof. It is connected. Therefore, since an expensive reducer is used, manufacturing cost increases and the size of the robot increases. In addition, there is a problem that the power and control signal cables of the motor should be wired to the upper layer of the robot.

In addition, in the cylindrical coordinate system robot having two arms, there is a problem in that it is difficult to configure the rotation axis, the linear drive axis, and the arm drive axis on the same axis.

The present invention has been conceived in view of the above problems, the rotation axis and the linear motion axis of the robot is positioned in parallel, the arm drive shaft connected to the linear drive axis and parallel to the linear axis and the rotation axis of the arm drive shaft after The object is to provide a cylindrical coordinate system robot composed of a shaft-in-shaft structure.

Another object of the present invention is to place a plurality of motors for rotating or lifting the robot, the motors for driving two arms in the lower part of the robot, the innermost shaft of the shaft-in-shaft structure cabling and piping It is to provide a cylindrical coordinate system robot that can reduce the weight and compact structure of the robot by forming a hollow for.

1 is a perspective view schematically showing a cylindrical coordinate system robot according to an embodiment of the present invention.

2 is a partial cross-sectional view of the main portion of FIG.

3 is a bottom view of FIG. 1.

4 is a rear view of FIG. 1.

<Description of the symbols for the main parts of the drawings>

110.Frame 120.Rotating Stage

130 ... Lead screw 140 ... Vertical guide rod

134 ... Lead Screw Nut Assemblies 144Vertical Guide Rod Nuts

150 ... moving member 160 ... shaft structure

180 ... arm support frame 190 ... arm part

The present invention for achieving the above object, the frame comprising a lower fixing plate and an upper fixing plate; A rotating stage including an upper disc and a lower disc and rotatably installed about a rotation axis with respect to the frame; A lead screw installed on the upper disc and the lower disc to rotate about a linear drive shaft substantially parallel to the rotary shaft; Vertical guide rods disposed on the upper disk and the lower disk so as to be positioned in substantially parallel to the rotary shaft and the linear drive shaft, respectively; A lead screw nut assembly coupled to the lead screw so as to be movable while being rotated along the lead screw in a vertical direction and coupled to the lead screw; A vertical guide rod nut coupled to the vertical guide rod so that the vertical guide rod can be rotated by the rotational force and freely moved in the vertical direction along the vertical guide rod; A moving member having the lead screw nut assembly and the vertical guide rod nut installed to move freely between the upper disc and the lower disc along the lead screw and the vertical guide rod; A cavity for piping and wiring is provided with a longitudinally formed inner shaft, an outer shaft and an intermediate shaft installed coaxially with the inner shaft, each independently rotatable, a part of which is coupled to the moving member and the other part of the A shaft structure installed to slide through the upper disc and the upper fixing plate; An arm support frame installed on a portion of the shaft structure and provided with a pair of arm driving shafts which are rotated in parallel with the rotation axis; First driving means for rotating the rotating stage relative to the frame; Second driving means for rotating the lead screw relative to the frame; And third driving means for rotating each shaft of the shaft structure with respect to the rotating stage.

According to another feature of the invention, the lead screw nut assembly, the lead screw nut is installed to be movable in the vertical direction while rotating along the lead screw; And a lead screw spline nut integrally coupled to the lead screw nut and installed to move freely along the lead screw in a vertical direction.

According to another feature of the invention, the shaft structure, the outer shaft is connected to the first arm drive shaft of the pair of arm drive shaft by a belt / pulley means; And an intermediate shaft connected to a second arm driving shaft of the pair of arm driving shafts by a belt / pulley means and positioned inside the outer shaft and inside the inner shaft.

On the other hand, the present invention further comprises a pair of arm portions each installed to extend perpendicular to the pair of arm drive shaft to be rotated in conjunction with the rotation of the individual shaft of the shaft structure.

According to a preferred and advanced aspect of the present invention, the upper fixing plate and the lower fixing plate are connected by a support shaft; In order to reduce the number of cables and tubes installed in the cavity of the inner shaft, a filter, a vacuum sensor, a solenoid valve, and the like are disposed on the upper fixing plate, the lower fixing plate, and the support shaft so as not to interfere with the rotation of the shaft structure.

According to an advantageously advanced aspect of the present invention, the first drive means, the electric motor is fixed to the rotating stage; An input end is installed in the electric motor and an output end is attached to the lower fixing plate.

According to another advantageous and advanced aspect of the present invention, the second driving means is an electric motor fixed to the moving member and movable with the moving member.

According to another advantageous and advanced aspect of the present invention, the third drive means has two electric motors mounted on the independently controllable rotating stage, each of which is adapted to the rotational force from the motor by means of belt / pulley means. Transfer to shaft and outer shaft.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view schematically showing a cylindrical coordinate system robot according to an embodiment of the present invention.

As shown, the cylindrical coordinate system robot 100 according to a preferred embodiment of the present invention includes a frame 110 and a lower disc 122 including the lower fixing plate 112 and the upper fixing plate 114, the arrow " Rotation stage 120 rotatable in the A "direction, the lead screw 130 and the vertical guide rod 140, the lead screw 130 is installed on the lower disk 122 so as to rotate in the direction of arrows" B "," C ", respectively. Lead screw nut assembly 134 coupled to the vertical guide rod nut 144 coupled to the vertical guide rod 140, the lead screw 130 and the vertical guide rod 140 freely in the direction of the arrow "D" Reciprocating movable member 150, a portion of which is coupled to the movable member 150, the other portion penetrates the upper fixing plate 114, the shaft structure 160 which is slidable in the "D" direction, the shaft structure 160 Arm support frame (1) is installed on a portion of the pair of arm portions 190 are installed 80, first and second drive means for rotating the rotating stage 120 and the lead screw 130 relative to the frame 110, and the outer shaft 162 of the shaft structure 160 relative to the rotating stage 120 And third driving means for rotating the intermediate shaft 164, respectively.

Referring to FIG. 2, which is a cross-sectional view schematically showing the main portion of FIG. 1, the frame 110 includes a lower fixing plate 112 for supporting the entire robot, and a lower distance from the lower fixing plate 112, that is, a cylindrical coordinate system robot. The upper fixing plate 114 is located at a distance of the required vertical rise distance and connected to the lower fixing plate 112 by a plurality of support shafts 116. Here, the upper fixing plate 114 in contact with the outer shaft 162 of the shaft structure 160 is provided with an upper fixing plate oil portion 114a in the direction of arrow "A" with respect to the upper fixing plate 114 of the shaft structure 160. Smooths the sliding.

On the other hand, the frame 110, as shown in Figure 3, the pneumatic tube 111, the filter 113, the solenoid valve 115, such as a vacuum sensor (not shown) installed a number of components for driving the robot It is a component. This not only reduces the number of cables or tubes 117 installed in the cavity 166a formed in the inner shaft 166 but also prevents the components from interfering with the rotation of the shaft structure 160.

The rotating stage 120 is installed on the hollow central shaft 123 to be rotated relative to the frame 110 about the rotating shaft 121. That is, the upper disk 124 of the rotating stage 120 is provided to the upper fixing plate 114, the lower disk 122 is so close to the lower fixing plate 112, respectively. An upper disc oil part 124a is provided on the upper disc 124 so that the shaft structure 160 smoothly slides with respect to the upper disc 124. Here, the lower disc 122 and the upper disc 124 are connected and supported by the lead screw 130 and the vertical guide rod 140, respectively.

The first driving means is for relatively rotating the rotating stage 120 with respect to the frame 110, and includes a θ motor 126, a reducer 128, θ belt / pulley means.

The θ motor 126 is a conventional electric motor that generates power by the control means not shown, and is fixed to the lower fixing plate (112). θ belt / pulley means are θ motor drive pulley 126a installed on the output shaft of θ motor 126, center shaft pulley 123a installed on the center shaft 123, θ motor drive pulley 126a and center shaft pulley 123a ) Is provided with a θ motor driving belt (127). On the other hand, the reducer 128 has its input end connected to the θ motor 126 and its output end is fixed to the lower fixing plate 112. Therefore, when the θ motor 126 is operated, since the output end of the reducer 128 is fixed to the lower fixing plate 112, the rotational force of the θ motor 126 transmitted by the θ belt / pulley means is lowered in the lower disc ( 122 is rotated relative to the lower fixing plate (112).

The lead screw 130 is provided as a means for imparting the vertical movement of the robot as is commonly seen in a conventional robot device, it is preferable that a general ball screw is used. The lead screw 130 is coupled to the upper disc 124 by the upper lead screw bearing 124b and to the lower disc 122 by the lower lead screw bearing 122a. Therefore, the lead screw 130 is supported by the upper and lower lead screw bearings (124b, 122a) can be freely rotated in the direction of the arrow "B" with respect to the upper, lower discs (124, 122). In addition, the lead screw 130 is rotated about a linear drive shaft 131 substantially parallel to the rotation shaft 121.

The second driving means is for reciprocating the arm support frame 180 of the robot 100 in the direction of arrow "A" by rotating the lead screw 130 with respect to the rotation stage 120, Z motor 132 And Z-belt / pulley means. The Z motor 132 is installed on the movable member 150 to be independently controllable and reversely rotatable. The Z belt / pulley means is connected to the lead screw nut 136, which is a part of the lead screw nut assembly 134, by the Z motor driving pulley 132a and the Z belt 133 installed on the output shaft of the Z motor 132. The lead screw nut pulley 136a provided is provided.

When driving the Z motor 132, the rotational force is transmitted to the lead screw nut 136 by the Z belt / pulley means so that the lead screw nut 136 is rotated relative to the lead screw 130. Then, as the lead screw nut 136 is rotated about the lead screw 130, the lifting movement is performed, and the movable member 150 provided with the lead screw nut 136 is capable of reciprocating up and down. At this time, the lead screw spline nut 138 which is another part of the lead screw nut assembly 134 is free to move along the lead screw 130 without being rotated. Similarly, the vertical guide rod nut 144 coupled to the vertical guide rod 140 also moves along the vertical guide rod 140.

As described above, the lead screw nut assembly 134 is a component in which the lead screw nut 136 and the lead screw spline nut 138 are integrally coupled. That is, the lead screw nut 136 in the form of a conventional ball screw nut and the lead screw spline nut 138 in the form of a conventional spline nut work together. The lead screw nut 136 is installed to be reciprocated vertically along the lead screw 130 while being rotated by the rotational force of the Z motor 132, and the lead screw spline nut 138 is the lead screw 130 When it is rotated is installed to rotate with the lead screw 130. In addition, a lead screw spline nut pulley 138a is installed at an upper portion of the lead screw spline nut 138 to the lead screw spline nut driven pulley 162a installed on the outer shaft 162 by the lead screw spline nut belt 139. Connected.

As described above, the upper disk 124 and the lower disk 122 is also supported by a vertical guide rod 140 in addition to the lead screw 130, the vertical guide rod 140 is a conventional robot device and Similar ball spline forms are used. That is, the vertical guide rod nut 144 connected thereto is rotated by the rotation of the vertical guide rod 140 itself, or the vertical guide rod nut 144 can move freely along the fixed vertical guide rod 140. It is a structure. The vertical guide rod 140 is disposed between the rotary stage 120 and substantially parallel to the rotary shaft 121 and the linear drive shaft 131, respectively, so as to be rotated in the direction of arrow "C". That is, the vertical guide rod 140 is installed on the upper disc 124 by the upper vertical guide rod bearing 124c and on the lower disc 122 by the lower vertical guide rod bearing (not shown). Therefore, the vertical guide rod 140 supports the upper disc 124 by the upper vertical guide rod bearing 124c, and can be freely rotated with respect to the upper disc 124.

The vertical guide rod nut 144 preferably takes the form of a general spline nut commonly found in conventional robotic devices. That is, the vertical guide rod nut 144 is rotated together with the vertical guide rod 140 when the vertical guide rod 140 is rotated, and has a function of rotating the intermediate shaft 164, by the Z motor 132. When the movable member 150 is elevated, the movable member 150 is installed to be freely moved in the vertical direction along the vertical guide rod 140. The vertical guide rod nut pulley 144a is installed at the vertical guide rod nut 144 and is connected to the vertical guide rod nut driven pulley 164a installed at the intermediate shaft 164 by the vertical guide rod nut belt 145.

The movable member 150 causes the shaft structure 160 to slide with respect to the upper fixing plate 114 and the upper disk 124 while reciprocating between the upper disk 124 and the lower disk 122. In addition, the lead screw nut assembly 134 is installed on the movable member 150, and the vertical guide rod nut 144 is installed to be rotatable by the vertical guide rod bearing 146. In addition, one end of the inner shaft 166 of the shaft structure 160 is fixed. Therefore, during the vertical movement of the cylindrical coordinate system robot 100 according to the preferred embodiment of the present invention, when the lead screw nut coupling body 134 coupled to the lead screw 130 is rotated, the vertical guide rod nut 144 and the shaft The structure 160 has a function of elevating together between the upper disk 124 and the lower disk 122.

The shaft structure 160 is one end is installed in the moving member 150 and the other end is installed in the arm support frame 180 through the upper disk 124 and the upper fixing plate 114, each shaft ( 162, 164 and 166 are coaxially installed to rotate independently, i.e., the intermediate shaft 164 is positioned inside the outer shaft 162, and the inner shaft 166 is spaced apart within the intermediate shaft 164. Has a so-called shaft-in-shaft structure. Here, bearings 163 and 165 are interposed between the outer shaft 162, the intermediate shaft 164, and the inner shaft 166, and the inner shaft 166 is a cavity in which a cable for arm driving or a system control signal is to be located. 166a is formed in the longitudinal direction therein, and a lower portion of the inner shaft 166 is fixed to the moving member 150. The first arm drive pulley 182 is installed at the upper end of the outer shaft 162, and the lead screw spline nut driven pulley 162a described above is installed at one outer peripheral surface thereof. The second arm drive pulley 184 is installed at the upper end of the intermediate shaft 164 and the vertical guide rod nut driven pulley 164a is installed at the lower end thereof.

The third driving means is for independently rotating the outer shaft 162 and the intermediate shaft 164 of the shaft structure 160 with respect to the rotary stage 120, the rotary stage 120 to be independently controllable and reversely rotatable. And a first arm driving motor (172 of FIG. 4), a second arm driving motor 176, and first and second arm driving belts / pulley means, respectively, installed in the upper and lower arm. The rotational force of the first and second arm drive motors 172 and 176 is transmitted to the corresponding external shaft 162 and the intermediate shaft 164 to finally rotate the first and second arm drive shafts 186 and 188.

As shown in FIG. 4, a first arm driving motor pulley 172a is installed at an output shaft of the first arm driving motor 172, and the first arm driving motor pulley 172a is formed of a plurality of belts and pulleys. The first arm driving belt / pulley means 173 is connected to the first arm driving motor driven pulley 130a installed at the lower end of the lead screw 130. In this embodiment, a plurality of belts and pulleys are configured as the first arm driving belt / pulley means 173. However, this is only according to the arrangement of the other components of the robot, it is also possible to connect the first arm drive motor pulley 172a and the first arm drive motor driven pulley 130a by one belt.

Therefore, when the rotational force of the first arm driving motor 172 is transmitted to the lead screw 130 by the first arm driving motor belt / pulley means 173 to rotate the lead screw 130, the lead screw nut assembly The external shaft 162 is rotated by the lead screw spline nut belt / pulley means installed in the lead screw spline nut 138 of 134, whereby the first arm drive shaft 186 is rotated to eventually rotate the first arm. The arm 192 may be rotated. Here, when the lead screw 130 is rotated, a semi-rotation means for preventing the lead screw nut 136, which is another part of the lead screw nut assembly 134, from being moved in the vertical direction is provided. The anti-rotation means can be performed by driving the Z motor 132 in a direction opposite to the rotation direction of the first arm driving motor 172 so that the lead screw nut 130 does not move in conjunction with the lead screw 136.

The second arm driving motor pulley 176a is installed on the output shaft of the second arm driving motor 176 as a part of the second arm driving belt / pulley means, and the second arm driving motor pulley 176a is a second arm. The driving arm belt 177 is connected to the second arm driven motor driven pulley 140a installed at the lower end of the vertical guide rod 140. That is, when the rotational force of the second arm driving motor 176 is transmitted to the vertical guide rod 140 by the second arm driving motor belt / pulley means to rotate the vertical guide rod 140, the vertical guide rod nut ( The intermediate shaft 164 is rotated by the vertical guide rod nut belt / pulley means installed at 144, and thus the second arm drive shaft 188 is rotated, and thus the second arm unit 194 may be rotated. .

The arm support frame 180 is installed on a portion of the shaft structure 160 and rotated together by the rotation of the shaft structure 160. As described above, the arm support frame 180 is positioned in parallel to the rotation shaft 121. A pair of arm drive shafts 186 and 188 that are rotated relative to 180 is provided. Here, arm drive shaft bearings 186a and 188a are interposed between the first and second arm drive shafts 186 and 188 and the arm support frame 180 to rotate the arm drive shafts 186 and 188 with respect to the arm support frame 180. Make it smooth.

The first arm drive shaft 186 and the second arm drive shaft 188 may be independently driven and rotated. A first arm driven pulley 183 is installed at a lower end of the first arm driving shaft 186 and connected to the first arm driving pulley 182 by a first arm driving belt 185. In addition, a first arm driven pulley 187 is installed at a lower end of the second arm driving shaft 188 and is connected to the second arm driving pulley 184 by a second arm driving belt 189.

First and second arm parts 192 and 194 may be rotated on the upper ends of the first and second arm driving shafts 186 and 188 so as to be rotated in linkage with the outer shaft 162 and the intermediate shaft 164 of the shaft structure 160, respectively. It extends perpendicular to the arm drive shafts (186, 188). That is, the first arm part 192 is installed on the upper end of the first arm driving shaft 186 by the first arm part belt / pulley means and bearing 191, and the second arm part 194 is the second arm. It is installed on the upper end of the second arm drive shaft 188 by the arm belt / pulley means and bearing 195.

Referring to the operation of the cylindrical coordinate system robot according to a preferred embodiment of the present invention configured as described above are as follows.

First, with reference to Figs. 1 and 2 will be described for the rotational motion of the θ direction.

When the controller of the robot operates the θ motor 126, the θ motor drive pulley 126a installed on the output shaft is rotated to move the center shaft pulley 123a formed on the center shaft 123 by the θ motor drive belt 127. I want to rotate it. However, since the input end of the reducer 128 whose output end is fixed to the lower fixing plate 112 is connected to the output shaft of the? Motor 126, the rotational force of the? Motor 126 fixed to the lower disc 122 is By rotating the lower disc 122 relative to the lower fixing plate 112 by the belt / pulley means, the rotating stage 120 can be rotated with respect to the frame 110 in the direction of arrow "A" of FIG. .

Second, the operation of the movable member to move up and down to reciprocate the arm support frame up and down will be described with reference to Figures 1, 2 and 4.

When the controller of the robot drives the Z motor 132, the Z motor drive pulley 132a installed on the output shaft is rotated to rotate the lead screw nut pulley 136a by the Z belt 133. Then, the lead screw nut 136 is rotated about the lead screw 130 to perform the lifting movement. Accordingly, the movable member 150 provided with the lead screw nut 136 may reciprocate in the direction of arrow “D” of FIG. 1. At this time, the lead screw spline nut 138, which is another part of the lead screw nut assembly 134, does not rotate and freely moves along the lead screw 130 to guide the reciprocating motion of the movable member 150. Similarly, the vertical guide rod nut 144 installed on the movable member 150 also moves along the vertical guide rod 140 to guide the reciprocating motion of the movable member 150.

Third, the operation of driving the first arm portion of the pair of arm portions will be described with reference to FIGS. 1 and 2.

The controller of the robot drives the first arm driving motor 172. Then, the first arm drive motor pulley 172a installed on the output shaft is rotated, and this rotational force is driven by the first arm drive motor belt / pulley means 173 at the lower end of the lead screw 130. It is delivered to the pulley (130a). The rotational force thus transmitted causes the lead screw 130 to rotate in the direction of arrow “B” in FIG. 2. Then, the lead screw spline nut 138 coupled to the lead screw 130 is rotated together to rotate the lead screw spline nut pulley 138a installed on the outer circumferential surface thereof. This rotational force is transmitted to the lead screw spline nut driven pulley 162a by the lead screw spline nut belt 139 to rotate the outer shaft 162. The rotation of the external shaft 162 rotates the first arm driving pulley 182 installed on the upper end thereof, and the rotational force is transmitted to the first arm driven pulley 183 by the first arm driving belt 185. The first arm drive shaft 186 is rotated. Therefore, the first arm portion 192 provided in the first arm drive shaft 186 can be rotated in a desired direction in the horizontal direction.

Fourth, an operation of driving the second arm part of the pair of arm parts will be described with reference to FIGS. 1 and 2.

The controller of the robot drives the second arm driving motor 176. Then, the second arm drive motor pulley 176a installed on the output shaft is rotated and the rotational force is driven by the second arm drive belt 177 as a part of the pulley means installed at the bottom of the vertical guide rod 140. The motor pulley 176a is installed, and the second arm driving motor pulley 176a is driven by the second arm driving motor belt 177 at the lower end of the vertical guide rod 140. The second arm driving motor driven pulley 140a. Is delivered. The transmitted rotational force is to rotate the vertical guide rod 140 in the direction of the arrow "C" of FIG. Then, the vertical guide rod nut 144 coupled to the vertical guide rod 140 rotates together to rotate the vertical guide rod nut pulley 144a installed on the outer circumferential surface thereof. This rotational force is transmitted to the vertical guide rod nut driven pulley 164 by the vertical guide rod nut belt 145 to rotate the intermediate shaft 164. The rotation of the inner shaft 164 rotates the second arm driving pulley 184 installed at the upper end thereof, and the rotational force is transmitted to the first arm driven pulley 187 by the second arm driving belt 189. The second arm drive shaft 188 is rotated. Thus, the second arm portion 194 provided in the second arm drive shaft 188 can be rotated in the desired direction in the horizontal direction.

Cylindrical coordinate system robot according to a preferred embodiment of the present invention having the above configuration has the following effects.

First, cost is reduced and robot size is reduced by positioning only one expensive gearhead for the robot's rotation in the θ direction and eliminating the other arm drive to vertical lift motion reducers.

Second, the compaction of the robot can be obtained by positioning the shaft drive shaft in parallel with the shaft structure of the shaft-in-shaft structure having the same center, so that the power transmission mechanism for moving the pair of arm portions in the radial direction of the cylinder can be obtained. .

Third, by forming a cavity in the inner shaft of the shaft structure to embed the control signal cable of the robot solves the difficulty of cabling or piping wired to the arm of the robot.

Claims (8)

A frame including a lower fixing plate and an upper fixing plate; A rotating stage including an upper disc and a lower disc and rotatably installed about a rotation axis with respect to the frame; A lead screw installed on the upper disc and the lower disc to rotate about a linear drive shaft substantially parallel to the rotary shaft; Vertical guide rods disposed on the upper disk and the lower disk so as to be positioned in substantially parallel to the rotary shaft and the linear drive shaft, respectively; A lead screw nut assembly coupled to the lead screw so as to be movable while being rotated along the lead screw in a vertical direction and coupled to the lead screw; A vertical guide rod nut coupled to the vertical guide rod so that the vertical guide rod can be rotated by the rotational force and freely moved in the vertical direction along the vertical guide rod; A moving member having the lead screw nut assembly and the vertical guide rod nut installed to move freely between the upper disc and the lower disc along the lead screw and the vertical guide rod; A cavity for piping and wiring is provided with a longitudinally formed inner shaft, an outer shaft and an intermediate shaft installed coaxially with the inner shaft, each independently rotatable, a part of which is coupled to the moving member and the other part of the A shaft structure installed to slide through the upper disc and the upper fixing plate; An arm support frame installed on a portion of the shaft structure and provided with a pair of arm driving shafts which are rotated in parallel with the rotation axis; First driving means for rotating the rotating stage relative to the frame; Second driving means for rotating the lead screw with respect to the rotating stage; And And a third driving means for rotating each shaft of the shaft structure with respect to the rotating stage. The method of claim 1, wherein the lead screw nut assembly, A lead screw nut installed to be movable in the vertical direction while being rotated along the lead screw; And a lead screw spline nut integrally coupled to the lead screw nut and installed to move freely in a vertical direction along the lead screw. The method of claim 1, wherein the shaft structure, An outer shaft connected to a first arm driving shaft of the pair of arm driving shafts by a belt / pulley means; And a middle shaft connected to a second arm driving shaft of the pair of arm driving shafts by a belt / pulley means and positioned inside the outer shaft and the inner shaft of the pair of arm driving shafts. The cylindrical coordinate system of claim 1, further comprising a pair of arm portions extending vertically to the pair of arm driving shafts so that the shaft structures can be rotated in association with rotation of the individual shafts of the shaft structure. robot. The method of claim 1, The upper fixing plate and the lower fixing plate are connected by a support shaft; A filter, a vacuum sensor, a solenoid valve, etc., are positioned on the upper fixing plate, the lower fixing plate, and the support shaft so as not to interfere with the rotation of the shaft structure to reduce the number of cables and tubes installed in the cavity of the inner shaft. Cylindrical gauge system robot. The method of claim 1, wherein the first driving means, An electric motor fixed to the rotating stage; And an input end is installed in the electric motor and an output end is attached to the lower fixing plate. The method of claim 1, The second driving means is provided with an electric motor fixed to the moving member can be moved with the moving member; characterized in that for transmitting the rotational force from the motor by the belt / pulley means to the lead screw. Cylindrical coordinate system robot. The method of claim 1, The third driving means has two electric motors installed on the independently controllable rotating stage, and is characterized by a belt / pulley means for transmitting the rotational force from the motor to the intermediate shaft and the external shaft, respectively. Coordinate System Robot.